JP2013093605A - Substrate lamination device and substrate lamination method - Google Patents

Abstract

An oscillating body restraining mechanism that does not generate a reaction force on another shaft is provided.
A rocking body restraining mechanism according to the present invention includes a rocking body that moves along a spherical seat.
3 is a rocking body restraining mechanism for restraining the movement of the cylindrical body 3 and includes a cylindrical cut surface 119 formed on the rocking body 113 and a pushing member 115 having a spherical tip and abutting the cut surface 119.
And is configured.
[Selection] Figure 2

Description

The present invention relates to a substrate bonding apparatus for substrates of semiconductor devices, and more particularly to adjustment of parallelism between bonded substrates.

A technology for mounting electronic components such as a memory and an MPU at a high density is the most important technology for manufacturing a portable electronic device such as a mobile phone, a notebook computer, and a digital camera. As a technology for this purpose, flip chip mounting technology has been developed, and recently, development for obtaining higher density electronic devices by stacking semiconductor chips using this technology has been actively conducted. Yes. In the mounting by the flip chip technology, it is important that the surfaces to be bonded are parallel when the semiconductor chip is bonded to the wiring substrate or when the semiconductor chip is bonded onto the semiconductor chip. In the case of bonding particularly large substrates, for example, the adjustment of parallelism between bonded substrates is important in a semiconductor chip stacking process, a MEMS manufacturing process, a liquid crystal substrate bonding process, and the like at a wafer level.

The adjustment of the parallelism is basically a rotation adjustment around two axes, and direct control of rotation around the two axes (see, for example, Patent Document 1), an inter-substrate spacing adjustment at two points in the substrate plane, and a swivel mechanism. A copying mechanism using a spherical seat is generally used. Among these mechanisms, a copying mechanism using a spherical seat is mechanically simple and many improvements have been proposed. When a spherical seat is used, the tilt can be adjusted in any direction. However, when performing in-plane alignment between wafers (in-plane coordinate alignment of the wafer), rotation around an axis perpendicular to the surface It is often better to suppress Techniques for this purpose are disclosed in, for example, Patent Document 2 and Patent Document 3.

Japanese Patent No. 2783235 JP 2000-49199 A JP 2001-135648 A

However, the technique disclosed in Patent Document 1 requires a substrate holding mechanism having an area larger than the area of the bonded substrate, and has a problem that the size of the entire apparatus becomes large. . Further, in the technique disclosed in Patent Document 2, since the spherical center position of the spherical seat forming the copying mechanism is not on the bonding surface, when the substrate to be bonded becomes large,
A tilt error of the bonding surface causes a lateral shift of the bonding surface. For this reason, there is a problem that the positional deviation between the substrates becomes large. Furthermore, in the technique disclosed in Patent Document 3, a technique for holding the swinging body by an elastic body that is difficult to deform in one direction is disclosed. There is a problem that the reaction force becomes an obstacle to the copying operation.

The present invention has been made in view of such problems, and an object of the present invention is to provide a rocking body restraining mechanism that does not generate a reaction force to another shaft, and a substrate bonding apparatus using the rocking body restraining mechanism. It is said.

In order to achieve such an object, the rocking body restraining mechanism according to the present invention is a rocking body restraining mechanism that restrains the movement of the rocking body that moves along the spherical seat, and has a cylindrical surface shape formed on the rocking body. And a push member that has a spherical tip and abuts against the cut surface.

In the above-described swinging body restraining mechanism, the pressing member is preferably a ball roller.

A substrate bonding apparatus according to the present invention includes an upper substrate holding member, a lower substrate holding member, a tilt control member that supports the lower substrate holding member and includes a spherical seat and a rocking body having a spherical shape, An XY stage that moves the tilt control member in a plane parallel to the substrate surface, a Z stage that moves the tilt control member in a direction perpendicular to the substrate surface, and an alignment member that aligns the bonded substrates together. The tilt control member has a rocking body restraining mechanism including a cylindrical cut surface formed on the rocking body and a push member having a spherical shape at the tip and abutting the cut surface.

In the present invention, since the movement of the oscillator is restricted to rotation about two axes, the tilt angle between the substrates can be adjusted with high accuracy, and no in-plane positional deviation between the bonded substrates occurs. This
It can be used effectively for bonding that requires highly accurate alignment.

It is a perspective view which shows the cut surface of the cylindrical surface shape published in the rocking | fluctuation body of this invention. It is a figure which shows the cross section of the rocking body and rocking body restraint mechanism of this invention. It is a figure which shows a rocking body and a ball roller. It is a figure which shows the structure of the board | substrate bonding apparatus of this invention. It is a figure which shows the rotation restraint operation | movement of the rocking body restraint mechanism of this invention. It is a figure which shows the Example of the inclination control member of this invention.

An embodiment of a rocking body restraining mechanism according to the present invention will be described with reference to FIGS. 1 and 2. Here, FIG. 1 is a perspective view of the oscillating body 113 in the oscillating body restraining mechanism of the present invention.
These are figures which show the cross section of the rocking body 113 and the spherical seat 111 in broken line AA in FIG. The oscillating body 113 has a spherical surface 117, and this surface 117 can inherently freely oscillate on the spherical surface of the spherical seat 111. However, in the present invention, among the degrees of freedom around these three axes, the degree of freedom of rotation around the Z axis is suppressed. Because of this rotation constraint, the rocking body 113
A notch surface 119 having a cylindrical surface shape is formed on a part of the outer surface of the oscillating member, and a pressing member 115 that abuts against the notch surface 119 is disposed to form an oscillating body restraining mechanism. In FIG. 1, a cylindrical surface 1
Reference numeral 19 denotes a part of a cylindrical surface parallel to the Y axis. The push members 115 are arranged in pairs around the swinging body 113 in a face-to-face manner, and the tip 121 is spherical.

Here, the operation of the rocking body restraining mechanism will be described. The pressing member 115 is a mounting member 125.
It is held by the spherical seat 111 via. At this time, the pressing member 115 is pressed with an appropriate force from the mounting member 125 toward the cut surface 119 by a mechanism (not shown) (for example, a spring).

Rotation around the Y axis: When the oscillator 113 tries to rotate around the Y axis, the cut surface 119 tries to rotate around the central axis of the cylinder. In this case, the tip 121 of the push member 115 has a spherical shape, and the positional relationship between the tip 121 and the cylindrical surface 119 does not change. Therefore, a new force relationship does not occur between the rocking body 113 and the pressing member 115,
Can rotate freely.

Rotation around the X axis: When the oscillating body 113 tries to rotate around the X axis, the rotational axis passes near the surface of the oscillating body 113, so the positional relationship between the cut surface 119 and the tip 121 of the pressing member 115 is Therefore, the cut surface 119 does not receive a force for suppressing rotation from the push member 115. That is, it can rotate freely around the X axis.

Rotation around the Z axis: the cut surface 11 when the oscillator 113 tries to rotate around the Z axis
The positional relationship between 9 and the tip 121 of the pressing member 115 will be described with reference to FIG. FIG. 5 shows the oscillator 1
It is easy to see how the relationship between the boundaries 501 and 503 simulating cylindrical surfaces and the spheres 521 and 523 simulating pressing members when the 13 rotates around the Z axis. The cylindrical surface 503 rotates by δ to become a cylindrical surface 513, and the cylindrical surface 501 rotates by δ and the cylindrical surface 5
11, the sphere 523 pressed against the cylindrical surface tries to move to the position of the sphere 533, and the sphere 521 tries to move to the position of the sphere 531. However, since the sphere is pressed against the cylindrical surface by a spring or the like, torque is applied to the cylindrical surface in a direction opposite to the direction in which rotation is used. Therefore, by appropriately adjusting the spring, the rotation angle around the Z axis can be limited to a desired angle.

The rotation about each axis has been described above. To summarize, it can be seen that the rocking body restraining mechanism of the present invention has a function of rotating the rocking body freely around the X and Y axes but applying a restraining force to the rotation around the Z axis. . With this function, the inclination of the substrate or the like held on the rocking body can be easily adjusted.

FIG. 3 shows another example of the swinging body restraining mechanism. The difference from FIG. 1 is that the push member uses a ball roller 311 having a ball, not a bar having a spherical shape at the tip. In the ball roller 311, since the position of the ball is completely fixed, a large reverse torque can be generated with respect to the rotation around the Z axis. As the ball roller 311, for example, a ball roller such as a model number BCSB or BCHL manufactured by MISUMI Corporation can be used.

Next, the substrate bonding apparatus of the present invention will be described with reference to FIG. The substrate bonding apparatus includes an upper substrate holding unit 405, a lower substrate holding unit 406, a two-field microscope 417, and an XY stage 4.
09, a tilt stage (tilt control member) 407, and a Z stage 441. Here, the structure and operation of the tilt stage 407 will be described with reference to FIG. First, the main members are a swinging body 113 that moves following the spherical seat 111, a cylindrical cut surface 119,
The pressing member 115 that contacts the cut surface 119, the spring 619 that contacts the pressing member 115 to the cut surface 119, and the mounting members 123 and 12 that hold the pressing member 115 and the spring 619.
5. An adjustment terminal 601 for adjusting the angle and a balance spring 625.

Next, the operation of the tilt stage 407 will be described. Oscillator 113 and cut surface 119
Since the action of the pressing member 115 is the same as that already described with reference to FIGS. 1 and 2,
It is omitted here. The tilt stage 407 of this embodiment has an electrostatic chucking plate 651 on the upper surface of the oscillator 113, and can hold the substrate (wafer) to be bonded by electrostatic chucking. Next, the tilt control of the adsorbed substrate will be described. On one mounting member 123, the adjustment terminal 6 is provided.
On the supporting member 617 for supporting 01 and the mounting member 125 at the counter electrode position of the swinging body, the spring 6
A spring support member 615 for supporting 25 is disposed. When adjusting the angle around the axis of the oscillator 113, the adjustment terminal 601 is moved up and down by a screw or an electrostrictive element. Adjustment terminal 601
, The rocking body 113 rotates to the right. On the other hand, there is a spring 625 at the counter electrode of the oscillating body 113 to give a force to always rotate the oscillating body 113 counterclockwise. Therefore, the oscillating body 113 rotates stably even at a minute angle while receiving substantially balanced force from the adjustment terminal 601 and the spring 625. The combination of the adjustment terminal 601 and the spring 625 is 9 on the spherical seat.
Another set is attached at a position rotated by 0 degrees. For this reason, the rotation around the X axis can be similarly controlled with high accuracy.

Returning to FIG. 4, the substrate bonding apparatus of the present invention and other related apparatuses will be described on the basis of wafer conveyance. A wafer whose surface has been cleaned by CMP (Chemical Mechanical Polishing), etc., and whose cleaning and activation processes have been completed by removing dirt, foreign matter and oxide layer on the bonded surface, is opened by a transfer device (not shown). The sheet is set on the conveyance table 427 through the valve 423. When the wafer is delivered, the wafer is delivered via lift pins 425 provided on the transfer table 427.
When the wafer is set on the transfer table 427, the gate valve 423 is closed and the vacuum device 43 is closed.
1 starts operation, and the inside of the chamber is evacuated. When a predetermined degree of vacuum is reached, the gate valve 421 is opened, and the wafer 401 is transferred from the transfer table 427 to the lower substrate holder 406 by the transfer device 435. (This wafer is denoted as 403). Next, through the same operation, the other wafer 401 having the electrodes to be bonded is held by the upper substrate holding portion 405. The upper and lower holding plates are provided with an electrostatic chucking mechanism that electrostatically chucks the wafer. When the wafers having electrodes to be bonded are respectively held on the holding plates, the two-field microscope 417 is inserted between the adjacent wafers 401 and 403 to obtain alignment information between the wafers. When the alignment information is obtained, the XY stage 409 and the tilt stage (tilt control member) 407 are driven to align the electrodes on the wafer.

When the alignment is completed, the overlay apparatus is operated. The superimposing apparatus includes upper and lower substrate holders 405 and 406, an upper fixing beam 415, and a Z stage (height direction) 441 on the base 413. Based on the alignment information, the Z stage 441 operates and the two wafers are superimposed. At the time of superposition, a resin for temporarily fixing is applied, so that it can be conveyed to the pressurizing step which is the next step. The atmosphere in which the alignment device / superposition device is placed is a vacuum atmosphere or an inert gas atmosphere in order to prevent reoxidation of the electrode surface. Accordingly, a vacuum device 433 is attached to this chamber, and an inert gas supply path and a control valve (not shown) are attached.

As in this embodiment, when the tilt stage (tilt control member) having the oscillator restraining mechanism of the present invention is used in the substrate bonding apparatus, when the substrate is rotated around an axis parallel to the conventional surface, The problem that the rotation around the axis perpendicular to the surface is caused by the interference due to the rotation and the accuracy of alignment is reduced is solved, and a substrate bonding apparatus capable of highly accurate alignment is obtained.

High-density mounting and high-speed operation of semiconductor devices continue to be a major trend for semiconductor devices in the future, and the present invention that is necessary for the realization of the semiconductor devices is inevitably used for future semiconductor device manufacturing. is there.

111 Spherical seat 113 Oscillator 115 Push member 119 Cut surface 311 Ball roller 405 Upper substrate holder 406 Lower substrate holder 407 Tilt stage (tilt control member)
409 XY stage 441 Z stage

The present invention has been made in view of such problems, and an object of the present invention is to provide a substrate bonding apparatus and a substrate bonding method that are effective for bonding that requires highly accurate alignment . .

In order to achieve such an object, a substrate bonding apparatus according to the present invention is a substrate bonding apparatus capable of aligning and overlapping a first substrate and a second substrate, A first substrate holding member that holds one substrate, and a first shaft that is provided to face the first substrate holding member and that holds the second substrate and faces the first substrate holding member A first axial direction, a second axial direction orthogonal to the first axial direction, and a third axial direction orthogonal to the first axial direction and the second axial direction. A second substrate holding member that is rotatable about the axis of the first substrate, the second axis, and the third axis, and a rotation of the second substrate holding member about the first axis at a predetermined angle. And a restraining mechanism for limiting the range.

The above-described substrate bonding apparatus includes a spherical seat and an oscillating body having a spherical shape that rotates following the spherical seat, and the oscillating body supports the second substrate holding member in a rotatable manner. A control member; and a stage capable of moving the tilt control member together with the second substrate holding member in the first axial direction, the second axial direction, and the third axial direction. The restraining mechanism is configured to rotate the swinging body around the first axis in a state where the swinging body is rotatable around the second axis and the third axis following the spherical seat. It is preferable to limit to the angle range .
Preferably, the first substrate holding member holds the first substrate by electrostatic adsorption, and the second substrate holding member holds the second substrate by electrostatic adsorption.

The substrate bonding method according to the present invention includes an alignment step of aligning the first substrate and the second substrate with each other, and the first substrate and the second substrate aligned in the alignment step. A substrate bonding apparatus according to the present invention is used in the alignment step and the overlapping step.

It is a perspective view which shows the cut surface of the cylindrical surface shape published on the rocking | fluctuation body . It is a figure which shows the cross section of a rocking body and a rocking body restraint mechanism. It is a figure which shows a rocking body and a ball roller. It is a figure which shows the structure of the board | substrate bonding apparatus of this invention. It is a figure which shows the rotation restraint operation | movement of a rocking body restraint mechanism . It is a figure which shows the Example of an inclination control member .

Embodiment of this application is described using FIG. 1 and FIG. Here, FIG. 1 is a perspective view of the oscillating body 113 in the oscillating body restraining mechanism , and FIG. 2 is a diagram showing a cross section of the oscillating body 113 and the spherical seat 111 along the broken line AA in FIG. The oscillating body 113 has a spherical surface 117, and this surface 117 can inherently freely oscillate on the spherical surface of the spherical seat 111. However, in the present invention, among the degrees of freedom around these three axes, the degree of freedom of rotation around the Z axis is suppressed. For this rotation restraint, a cut surface 119 having a cylindrical surface shape is formed on a part of the outer surface of the rocking body 113, and a push member 115 that contacts the cut surface 119 is arranged to form a rocking body restraining mechanism. Yes. In FIG. 1, the cylindrical surface 119 is a part of the surface of the cylinder parallel to the Y axis. The push members 115 are arranged in pairs around the swinging body 113 in a face-to-face manner, and the tip 121 is spherical.

Claims (3)

An oscillating body restraining mechanism that restrains the motion of an oscillating body that moves along a spherical seat,
A cylindrical cut surface formed on the rocking body;
An oscillating body restraining mechanism characterized in that the tip has a spherical shape and has a pushing member that comes into contact with the cut surface. The rocking body restraining mechanism according to claim 1, wherein the pressing member is a ball roller. A substrate bonding apparatus,
An upper substrate holding member;
A lower substrate holding member;
An inclination control member that supports the lower substrate holding member and includes a spherical seat and a rocking body having a spherical shape;
An XY stage for moving the tilt control member in a plane parallel to the substrate surface;
A Z stage for moving the tilt control member in a direction perpendicular to the substrate surface;
An alignment member for aligning the bonded substrates,
The tilt control member has a rocking body restraining mechanism comprising a cylindrical cut-out surface formed on the rocking body and a pushing member having a spherical shape at the tip and abutting against the cut-out surface. Alignment device.

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