JP2014224788A - Temperature control device of infrared detector - Google Patents
Temperature control device of infrared detector Download PDFInfo
- Publication number
- JP2014224788A JP2014224788A JP2013104909A JP2013104909A JP2014224788A JP 2014224788 A JP2014224788 A JP 2014224788A JP 2013104909 A JP2013104909 A JP 2013104909A JP 2013104909 A JP2013104909 A JP 2013104909A JP 2014224788 A JP2014224788 A JP 2014224788A
- Authority
- JP
- Japan
- Prior art keywords
- detector
- temperature
- temperature controller
- infrared
- infrared detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Radiation Pyrometers (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
【課題】赤外線検出素子を温調するのではなく、間接的な温調方式を用いることで、面に沿って均一になり易い温調を行う赤外線検出器温度調整装置を提供する。【解決手段】縦横に配置された複数の検出素子を有する赤外線検出器Ａの温度調整装置であって、検出器Ａの受光面Ａｆとは反対側に検出器Ａと平行に配置された面状ないし板状の温調器Ｃと、検出器Ａと温調器Ｃとの間に設けられた空気の層Δとを備える。【選択図】図１An infrared detector temperature adjustment device is provided that performs temperature adjustment that tends to be uniform along a surface by using an indirect temperature adjustment method instead of temperature-controlling an infrared detection element. A temperature adjusting device for an infrared detector A having a plurality of detection elements arranged vertically and horizontally, and having a planar shape arranged in parallel to the detector A on the opposite side of the light receiving surface Af of the detector A. Or a plate-like temperature controller C, and an air layer Δ provided between the detector A and the temperature controller C. [Selection] Figure 1
Description
本発明は例えば赤外線カメラの赤外線検出器に付随する温度調整装置に関する。 The present invention relates to a temperature adjustment device associated with an infrared detector of an infrared camera, for example.
赤外線カメラの主要部品の１つである二次元赤外線検出器は、測定対象の温度変化を検出して、それに応じた出力値を得る素子である。検出器には二次元に任意の数の検出素子が配置されており、各素子が視野上の各画素に相当する。赤外線の検出素子には、受光した赤外線の量に応じた温度を検出するという特性上、自らの温度変化に伴って、前記出力値が変動するという問題点がある。また、この影響はセンサがとらえた対象物の温度変化よりも大きな値となって現れる場合もある。 A two-dimensional infrared detector, which is one of the main components of an infrared camera, is an element that detects a temperature change of a measurement target and obtains an output value corresponding to the change. An arbitrary number of detection elements are two-dimensionally arranged in the detector, and each element corresponds to each pixel on the field of view. The infrared detection element has a problem that the output value fluctuates with its own temperature change due to the characteristic of detecting the temperature according to the amount of received infrared light. In addition, this influence may appear as a value larger than the temperature change of the object captured by the sensor.
この影響を減少させるための手法として、赤外線検出器そのものを温度調整し、一定の温度を保持するという方法（以下、温調という）が考えられている。 As a technique for reducing this influence, a method of adjusting the temperature of the infrared detector itself and maintaining a constant temperature (hereinafter referred to as temperature control) is considered.
赤外線検出器は二次元の面で対象物の赤外線を感知して温度を測定する素子であるため、各素子に誤差が生じることを避けるためには、受光面に熱的なムラが生じないように温調を行うのが望ましい。 Infrared detectors are elements that measure the temperature by sensing the infrared rays of the object on a two-dimensional surface. It is desirable to adjust the temperature.
面の構成を持つ赤外線検出器を温調するための手段として、一般的には面状のヒータやペルチェ素子が使用される。しかし、これらの温調器は面状の構成を持つものの、実際に熱を発生させる熱源としては内部の金属線や素子に頼っており、その配置は面に対して必ずしも一様ではない。結果的に、温度分布は必ずしも一様とは云えない。一様でない温調素子で赤外線検出器の温調を行うと、その温度ムラがそのまま赤外線検出器に伝わり、結果的に赤外線検出器の各画素からの出力値が温度ムラの影響を受けることで、得られる出力値が一様にならないという問題があった。 In general, a planar heater or a Peltier element is used as a means for controlling the temperature of an infrared detector having a surface configuration. However, although these temperature controllers have a planar configuration, they rely on internal metal wires and elements as heat sources that actually generate heat, and their arrangement is not necessarily uniform with respect to the surface. As a result, the temperature distribution is not always uniform. If the temperature of the infrared detector is adjusted with a non-uniform temperature control element, the temperature unevenness is directly transmitted to the infrared detector, and as a result, the output value from each pixel of the infrared detector is affected by the temperature unevenness. There was a problem that the output values obtained were not uniform.
本発明の赤外線検出器の温度調整装置は間接的な温調方式を用いることで、面に沿って均一になり易い温調を行うことを目的とする。 The temperature adjusting device for an infrared detector according to the present invention aims to perform temperature control that tends to be uniform along the surface by using an indirect temperature control method.
本発明は縦横に配置された複数の検出素子を有する赤外線検出器の温度調整装置であって、
前記検出器の受光面とは反対側に前記検出器と平行に配置された面状ないし板状の温調器と、
前記検出器と前記温調器との間に設けられ、前記検出器と前記温調器とが互いに離間して配置されていることで前記検出器と前記温調器との間に形成された空気の層とを備える。
The present invention is an infrared detector temperature adjustment device having a plurality of detection elements arranged vertically and horizontally,
A planar or plate-shaped temperature controller disposed in parallel to the detector on the opposite side of the light receiving surface of the detector;
Provided between the detector and the temperature controller, and formed between the detector and the temperature controller by arranging the detector and the temperature controller apart from each other. An air layer.
本発明によれば、検出器を昇温ないし冷却させる温調器と前記検出器との間に空気の層が設けられているので、温調器の二次元に沿った温度のバラツキが空気の層で小さくなる。したがって、簡単な構造で、温調器の特性を選ぶことなく均一な温調が可能となる。 According to the present invention, since the air layer is provided between the temperature controller that raises or cools the detector and the detector, the temperature variation along the two dimensions of the temperature adjuster Smaller in layers. Therefore, uniform temperature control is possible with a simple structure without selecting the characteristics of the temperature controller.
好ましくは、前記温調器と検出器との間には、前記温調器に接する金属板が前記検出器と平行に配置され、前記金属板と前記検出器との間に前記空気の層が設けられている。 Preferably, a metal plate in contact with the temperature controller is disposed between the temperature controller and the detector in parallel with the detector, and the air layer is provided between the metal plate and the detector. Is provided.
この場合、温調器による熱が金属板に伝熱されることで、温調器における温度のムラが金属板において小さくなり、更に前記空気の層を介することで、検出器の温度のムラが更に小さくなる。 In this case, since the heat from the temperature controller is transferred to the metal plate, the temperature unevenness in the temperature controller is reduced in the metal plate, and further through the air layer, the temperature unevenness of the detector is further increased. Get smaller.
Ａは赤外線検出器であり、温調される対象物である。Ｃは温調を行うための温調器である。赤外線検出器は検出素子が二次元的に配置されており、仮に、温調器Ｃと検出器Ａを直接的に接触させて温調を行うと、温調器Ｃが二次元的に偏った温度特性を持っている場合、その特性は熱という形で検出器Ａに伝わり、結果的に得られる出力にムラが生じる。 A is an infrared detector, which is an object to be temperature-controlled. C is a temperature controller for temperature adjustment. In the infrared detector, the detection elements are two-dimensionally arranged. If the temperature controller C and the detector A are brought into direct contact with each other and the temperature is adjusted, the temperature controller C is two-dimensionally biased. In the case of having a temperature characteristic, the characteristic is transmitted to the detector A in the form of heat, and the resulting output is uneven.
これを防ぐため、本装置では温調器Ｃと赤外線検出器Ａの間に空隙つまり空気の層Δを設けている。また、温調器Ｃは面状ヒータのような強度のないものである場合もあり、その場合、金属板Ｂに温調器Ｃを貼付することで検出器Ａと温調器Ｃとの距離Ｄを均一化するようにしてもよい。このような構造をとることで、温調器Ｃの温度的な特性をダイレクトに検出器Ａに伝えることがなくなり、検出器Ａを面的に均一に温調することが可能となる。 In order to prevent this, in this apparatus, a gap, that is, an air layer Δ is provided between the temperature controller C and the infrared detector A. Further, the temperature controller C may not be as strong as a planar heater, and in that case, the distance between the detector A and the temperature controller C is obtained by attaching the temperature controller C to the metal plate B. You may make it make D uniform. By adopting such a structure, the temperature characteristic of the temperature controller C is not directly transmitted to the detector A, and the detector A can be uniformly temperature-controlled in a plane.
つぎに、本実施例について更に詳しく説明する。
赤外線検出器Ａは、熱的検出器又は光学的（量子的）検出器のいずれであってもよい。熱的検出器は赤外光の吸収による素子の温度上昇の結果生じる巨視的性質の変化を利用する。光学的検出器は赤外光の光子で励起された電子（正孔）によって素子の物理的性質が変化することを利用する。
Next, this embodiment will be described in more detail.
The infrared detector A may be either a thermal detector or an optical (quantum) detector. Thermal detectors take advantage of the change in macroscopic properties resulting from the temperature rise of the device due to absorption of infrared light. The optical detector uses the fact that the physical properties of the device are changed by electrons (holes) excited by infrared photons.
赤外線検出器Ａは、いわゆる二次元検出器で、多数の検出素子が縦横に配置されている。温調器Ｃは前記検出器Ａの受光面Ａｆとは反対側に前記検出器Ａと平行に配置され、面状ないし板状に形成されている。 The infrared detector A is a so-called two-dimensional detector, and a large number of detection elements are arranged vertically and horizontally. The temperature controller C is arranged on the opposite side of the light receiving surface Af of the detector A in parallel with the detector A, and is formed in a planar shape or a plate shape.
前記温調器Ｃと検出器Ａとの間には、前記温調器Ｃに貼付された状態で接する金属板Ｂが前記検知器Ａと平行に配置されている。前記金属板Ｂと前記検出器Ａとの間には、空気の層Δが設けられている。すなわち、前記検出器Ａと前記温調器Ｃとは互いに距離Ｄだけ離間して配置され、前記検出器Ａと温調器Ｃとの間に金属板Ｂと空気の層Δが設けられている。 Between the temperature controller C and the detector A, a metal plate B that is in contact with the temperature controller C while being attached to the temperature controller C is disposed in parallel with the detector A. An air layer Δ is provided between the metal plate B and the detector A. That is, the detector A and the temperature controller C are spaced apart from each other by a distance D, and a metal plate B and an air layer Δ are provided between the detector A and the temperature controller C. .
本発明は二次元の赤外線検出器の温調に用いることができる。 The present invention can be used for temperature control of a two-dimensional infrared detector.
Ａ：赤外線検出器 Ａｆ：受光面
Ｂ：金属板
Ｃ：温調器
Δ：空気の層
A: Infrared detector Af: Light receiving surface B: Metal plate C: Temperature controller Δ: Air layer
Claims (2)
前記検出器の受光面とは反対側に前記検出器と平行に配置された面状ないし板状の温調器と、
前記検出器と前記温調器との間に設けられ、前記検出器と前記温調器とが互いに離間して配置されていることで前記検出器と前記温調器との間に形成された空気の層とを備える。 A temperature adjusting device for an infrared detector having a plurality of detection elements arranged vertically and horizontally,
A planar or plate-shaped temperature controller disposed in parallel to the detector on the opposite side of the light receiving surface of the detector;
Provided between the detector and the temperature controller, and formed between the detector and the temperature controller by arranging the detector and the temperature controller apart from each other. An air layer.
2. The temperature adjusting device according to claim 1, wherein a metal plate in contact with the temperature controller is disposed in parallel with the detector between the temperature controller and the detector, and between the metal plate and the detector. Is provided with the air layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013104909A JP2014224788A (en) | 2013-05-17 | 2013-05-17 | Temperature control device of infrared detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013104909A JP2014224788A (en) | 2013-05-17 | 2013-05-17 | Temperature control device of infrared detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2014224788A true JP2014224788A (en) | 2014-12-04 |
Family
ID=52123546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013104909A Pending JP2014224788A (en) | 2013-05-17 | 2013-05-17 | Temperature control device of infrared detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2014224788A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4501131A (en) * | 1984-01-03 | 1985-02-26 | The United States Of America As Represented By The Secretary Of The Army | Cryogenic cooler for photoconductive cells |
| JP2000513432A (en) * | 1998-04-03 | 2000-10-10 | レイセオン・カンパニー | Cryogenic cooler with mechanically flexible thermal interface |
| US20110248167A1 (en) * | 2009-04-21 | 2011-10-13 | Gurvitch Michael A | Bolometric sensor with high TCR and tunable low resistivity |
-
2013
- 2013-05-17 JP JP2013104909A patent/JP2014224788A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4501131A (en) * | 1984-01-03 | 1985-02-26 | The United States Of America As Represented By The Secretary Of The Army | Cryogenic cooler for photoconductive cells |
| JP2000513432A (en) * | 1998-04-03 | 2000-10-10 | レイセオン・カンパニー | Cryogenic cooler with mechanically flexible thermal interface |
| US20110248167A1 (en) * | 2009-04-21 | 2011-10-13 | Gurvitch Michael A | Bolometric sensor with high TCR and tunable low resistivity |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107076617B (en) | For compact, light weight and the advanced carbon nanotube black matrix of multilayer of on-demand infrared calibration | |
| US9086327B2 (en) | Carbon nanotube blackbody film for compact, lightweight, and on-demand infrared calibration | |
| JP2014048176A5 (en) | ||
| JP2018017910A5 (en) | ||
| RU2013154419A (en) | DEVICE AND METHOD FOR ADAPTATION OF SIGNATURE AND OBJECT WITH SUCH DEVICE | |
| US9933311B2 (en) | Blackbody function | |
| JP2014527481A5 (en) | ||
| JP2011172225A5 (en) | ||
| US9459154B2 (en) | Multi-layer advanced carbon nanotube blackbody for compact, lightweight, and on-demand infrared calibration | |
| WO2013140917A1 (en) | Liquid chromatographic analysis device and temperature control method for same | |
| WO2017196351A1 (en) | Forming a three-dimensional object | |
| KR102432782B1 (en) | Control method of rolling machine for milling and device therefor | |
| US20130341535A1 (en) | Infrared scene projector | |
| JP2017533165A5 (en) | Apparatus, method and system for controlling thickness of crystal sheet grown on melt | |
| JP2014224788A (en) | Temperature control device of infrared detector | |
| US8471209B2 (en) | Method for maintenance of an array of bolometer-type detectors | |
| RU2010137456A (en) | DEVICE AND METHOD FOR MONITORING RADIUS FLOWS DURING GROUND HEAT AND VACUUM TESTS OF SPACE OBJECTS | |
| JP7258874B2 (en) | Microbolometer and manufacturing method thereof | |
| Lee et al. | Thermal performance analysis of vacuum variable-temperature blackbody system | |
| JP2011154206A5 (en) | ||
| RU176316U1 (en) | TEST OBJECT FOR MEASURING PERMISSION RESOLUTION | |
| KR101407701B1 (en) | Correction apparatus for 2 point correction of infrarred detection device | |
| US10760976B2 (en) | Thermal imaging of heat sources in thermal processing systems | |
| KR101330302B1 (en) | Apparatus for uniforming heat temperature of slab and control method thereof | |
| RU191285U1 (en) | DEVICE FOR TESTING THE PERMISSION OF TERMOVISOURS BY CONTRAST |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160226 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170119 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170130 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20170719 |