JP2018093211A - Laser device and non-transitory computer-readable recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To arrange a laser device including a system for energy saving or resource saving.SOLUTION: A laser device 1010 comprises: a pair of electrodes; a fan arranged to make a gas supplied to between the pair of electrode flow; a motor arranged to operate the fan; and a display device arranged to display at least one of an electric power per unit time, consumed by the laser device 1010, and a total electric power consumed by the laser device 1010. The electric power per unit time, consumed by the laser device 1010 includes an electric power per unit time, consumed by the motor. The total electric power consumed by the laser device 1010 includes a total electric power consumed by the motor. The electric power per unit time consumed by the motor is calculated based on a pressure of gas supplied to between the pair of electrodes. The total electric power consumed by the motor is calculated based on a pressure of gas supplied to between the pair of electrodes.SELECTED DRAWING: Figure 3

Description

  The present disclosure relates to a laser apparatus and a non-transitory computer-readable recording medium.

  As semiconductor integrated circuits are miniaturized and highly integrated, improvement in resolving power is demanded in semiconductor exposure apparatuses. Hereinafter, the semiconductor exposure apparatus is simply referred to as “exposure apparatus”. For this reason, the wavelength of light output from the light source for exposure is being shortened. As a light source for exposure, a gas laser device is used instead of a conventional mercury lamp. Currently, as a gas laser apparatus for exposure, a KrF excimer laser apparatus that outputs ultraviolet light with a wavelength of 248 nm and an ArF excimer laser apparatus that outputs ultraviolet light with a wavelength of 193 nm are used.

  Current exposure techniques include immersion exposure, which fills the gap between the projection lens on the exposure apparatus side and the wafer with liquid and changes the refractive index of the gap, thereby shortening the apparent wavelength of the exposure light source. It has been put into practical use. When immersion exposure is performed using an ArF excimer laser device as an exposure light source, the wafer is irradiated with ultraviolet light having a wavelength of 134 nm in water. This technique is called ArF immersion exposure. ArF immersion exposure is also called ArF immersion lithography.

  Since the spectral line width in natural oscillation of the KrF and ArF excimer laser devices is as wide as about 350 to 400 pm, chromatic aberration of laser light (ultraviolet light) projected on the wafer by the projection lens on the exposure device side is generated, resulting in high resolution descend. Therefore, it is necessary to narrow the spectral line width of the laser light output from the gas laser device until the chromatic aberration becomes negligible. The spectral line width is also called the spectral width. For this reason, a narrow band module (Line Narrow Module) having a narrow band element is provided in the laser resonator of the gas laser device, and the narrow band of the spectrum width is realized by this narrow band module. Note that the band narrowing element may be an etalon, a grating, or the like. Such a laser device having a narrowed spectral width is called a narrow-band laser device.

Japanese Patent No. 3773858 US Pat. No. 6,973,111 Special table 2010-519784 gazette U.S. Pat. No. 7,835,414 US Patent Application Publication No. 2013/0100980 US Pat. No. 6,735,236

Overview

  A laser apparatus according to an embodiment of the present disclosure includes a pair of electrodes, a fan configured to flow a gas supplied between the pair of electrodes, and a motor configured to move the fan. A display configured to display at least one of the power consumed by the laser device and the amount of power consumed by the laser device, wherein the power consumed by the laser device is consumed by the motor The amount of power consumed by the laser device includes the amount of power consumed by the motor, and the power consumed by the motor is the amount of gas supplied between the pair of electrodes. The amount of power consumed by the motor is calculated based on the pressure of the gas supplied between the pair of electrodes. It may be a laser device that is calculated are.

  A non-transitory computer-readable recording medium according to an embodiment of the present disclosure includes a pair of electrodes and a fan configured to flow a gas supplied between the pair of electrodes and the fan. A program configured to cause a computer to display on a display at least one of the power consumed by the laser device including the motor and the amount of power consumed by the laser device. The power consumed by the laser device includes power consumed by the motor, and the power consumed by the laser device includes power consumed by the motor and consumed by the motor. The power to be calculated is calculated based on the pressure of the gas supplied between the pair of electrodes, The amount of power consumed by chromatography data is calculated based on the pressure of the gas supplied to between the pair of electrodes may be a non-transitory computer-readable recording medium.

  Several embodiments of the present disclosure are described below by way of example only and with reference to the accompanying drawings.

In the figure, a dotted arrow means at least one of signal input and output. In the figure, solid arrows indicate the movement of a substance or the progress of light.
FIG. 1A is a diagram illustrating the overall configuration of a discharge excitation gas laser apparatus for a semiconductor exposure apparatus. FIG. 1B is a diagram illustrating a part of the configuration of a discharge excitation gas laser device for a semiconductor exposure apparatus. FIG. 2 is a diagram illustrating the operation of a discharge excitation gas laser device for a semiconductor exposure apparatus. FIG. 3 is a diagram illustrating a schematic configuration of the laser apparatus according to the first embodiment of the present disclosure. FIG. 4 is a diagram illustrating the configuration of the power system of the laser apparatus according to the first embodiment of the present disclosure. FIG. 5 is a diagram illustrating a configuration of a cooling system of the laser apparatus according to the first embodiment of the present disclosure. FIG. 6 is a diagram illustrating the configuration of the purge gas system of the laser apparatus according to the first embodiment of the present disclosure. FIG. 7 is a diagram illustrating the configuration of the laser gas system of the laser apparatus according to the first embodiment of the present disclosure. FIG. 8 is a diagram illustrating a configuration of a ventilation system of the laser apparatus according to the first embodiment of the present disclosure. FIG. 9 is a diagram illustrating a method for calculating the power consumption of the laser apparatus including the power meter according to the first embodiment of the present disclosure. FIG. 10A is a diagram illustrating a method of calculating the power consumption amount of the motor included in the laser apparatus that does not include the power meter according to the first embodiment of the present disclosure. FIG. 10B is a diagram illustrating a method of calculating the power consumption amount of the charger included in the laser apparatus that does not include the power meter according to the first embodiment of the present disclosure. FIG. 10C is a diagram illustrating a method of calculating the power consumption of the laser control unit and other devices included in the laser apparatus that does not include the power meter according to the first embodiment of the present disclosure. FIG. 10D is a diagram illustrating a method of calculating the total power consumption of the laser apparatus that does not include the power meter according to the first embodiment of the present disclosure. FIG. 11 is a diagram illustrating a method of calculating the cooling water consumption in the laser apparatus according to the first embodiment of the present disclosure. FIG. 12 is a diagram illustrating a method of calculating the consumption amount of nitrogen gas in the laser apparatus according to the first embodiment of the present disclosure. FIG. 13A is a diagram illustrating a method of calculating the consumption of helium gas supplied to the narrowband module in the laser apparatus according to the first embodiment of the present disclosure. FIG. 13B is a diagram illustrating a method of calculating the consumption amount of helium gas supplied to the chamber in the laser apparatus according to the first embodiment of the present disclosure. FIG. 13C is a diagram illustrating a method of calculating the consumption amount of helium gas supplied to the laser apparatus according to the first embodiment of the present disclosure. FIG. 14 is a diagram illustrating a method of calculating the consumption amount of the laser gas supplied to the laser apparatus according to the first embodiment of the present disclosure. FIG. 15 is a diagram illustrating a method of calculating air consumption by ventilation in the laser apparatus according to the first embodiment of the present disclosure. FIG. 16 is a diagram illustrating an operation for energy saving depending on the laser gas condition in the laser apparatus according to the first embodiment of the present disclosure. FIG. 17 is a diagram illustrating the relationship between the total pressure of the laser gas, the charging voltage, and the energy dispersion in the laser apparatus according to the first embodiment of the present disclosure. FIG. 18 is a diagram illustrating a subroutine for changing from the normal mode to the energy saving mode by increasing the total pressure of the laser gas in the laser apparatus according to the first embodiment of the present disclosure. FIG. 19 is a diagram illustrating the relationship between the partial pressure of the fluorine gas in the laser gas, the charging voltage, and the energy dispersion in the laser apparatus according to the first embodiment of the present disclosure. FIG. 20 is a diagram illustrating a subroutine for changing from the normal mode to the energy saving mode by increasing the partial pressure of the fluorine gas in the laser gas in the laser apparatus according to the first embodiment of the present disclosure. FIG. 21 is a diagram illustrating an operation for energy saving and resource saving depending on the stop time in the laser apparatus according to the first embodiment of the present disclosure. FIG. 22 is a diagram illustrating an operation for energy saving and resource saving by monitoring the stop time in the laser apparatus according to the first embodiment of the present disclosure. FIG. 23 is a diagram illustrating an operation for reducing the consumption of cooling water in the laser apparatus according to the first embodiment of the present disclosure. FIG. 24 is a diagram illustrating a configuration for reducing air consumption by ventilation in the laser apparatus according to the first embodiment of the present disclosure. FIG. 25 is a diagram illustrating a configuration of a laser apparatus according to the second embodiment of the present disclosure. FIG. 26 is a diagram illustrating a configuration of the power system of the laser apparatus according to the second embodiment of the present disclosure. FIG. 27 is a diagram illustrating a configuration of a cooling system of the laser apparatus according to the second embodiment of the present disclosure. FIG. 28 is a diagram illustrating a configuration for reducing air consumption by ventilation in the laser apparatus according to the second embodiment of the present disclosure. FIG. 29 is a diagram illustrating a configuration of a purge gas system of a laser apparatus according to the second embodiment of the present disclosure. FIG. 30A is a diagram illustrating the relationship between the concentration of oxygen gas as an impurity contained in nitrogen gas and the time for supplying nitrogen gas in the laser apparatus according to the second embodiment of the present disclosure. FIG. 30B is a diagram illustrating a first example of a method for reducing the consumption of nitrogen gas in the laser apparatus according to the second embodiment of the present disclosure. FIG. 30C is a diagram illustrating a second example of a method for reducing consumption of nitrogen gas in a laser apparatus according to the second embodiment of the present disclosure. FIG. 31 is a diagram illustrating a pulse power module according to an embodiment of the present disclosure. FIG. 32 is a diagram illustrating a control unit according to an embodiment of the present disclosure. FIG. 33 is a diagram illustrating a computer-readable recording medium according to an embodiment of the present disclosure.

Embodiment

Contents 1. Overview 2. 2. Laser apparatus 2.1 Configuration of laser apparatus 2.2 Operation of laser apparatus 2.3 Problems of laser apparatus Laser apparatus according to first embodiment of present disclosure 3.1 Configuration of laser apparatus according to first embodiment of present disclosure 3.2 Operation of laser apparatus according to first embodiment of present disclosure 3.3 3. Energy saving and resource saving in the laser apparatus according to the first embodiment of the disclosure. Laser device according to second embodiment of present disclosure 4.1 Configuration and operation of laser device according to second embodiment of present disclosure 4.2 Energy saving in laser device according to second embodiment of present disclosure and Resource saving 5. Others 5.1 Pulse power module 5.2 Control unit (controller)
5.3 Computer-readable recording medium Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. Embodiment described below shows an example of this indication and does not limit the contents of this indication. In addition, all the configurations and operations described in the embodiments are not necessarily essential as the configurations and operations of the present disclosure. In addition, the same referential mark is attached | subjected to the same component and the overlapping description is abbreviate | omitted.

1. Overview Embodiments of the present disclosure may relate to a laser apparatus. Embodiments of the present disclosure may relate to a laser apparatus including a system for energy saving or resource saving.

  The laser apparatus according to the embodiment of the present disclosure may be an exposure laser apparatus. The exposure laser apparatus may be a laser apparatus for a semiconductor exposure apparatus.

  The laser device according to the embodiment of the present disclosure may be a discharge excitation gas laser device. The discharge excitation gas laser apparatus may be an apparatus that discharges and excites laser gas supplied to the chamber by applying a predetermined voltage to a pair of electrodes disposed in the chamber for laser oscillation.

In a laser device, energy consumption and resource consumption may occur. Energy consumption in a discharge excited gas laser device may include power consumption for a charger and a cross flow fan motor that may be included in the laser device. The resource consumption in the discharge-excited gas laser device may include laser gas consumption, purge gas consumption, cooling water consumption, and exhaust consumption. The consumption of the laser gas may include consumption of a mixed gas of argon (Ar) and neon (Ne), and consumption of a mixed gas of fluorine (F ₂ ), argon (Ar), and neon (Ne). The consumption of the laser gas may include the consumption of a mixed gas of krypton (Kr) and neon (Ne) and the consumption of a mixed gas of fluorine (F ₂ ), krypton (Kr), and neon (Ne). Purge gas consumption may include nitrogen (N ₂ ) gas consumption and helium (He) gas consumption. Cooling water consumption may include consumption of water to cool a charger, a pulse power module (PPM), and a heat exchanger included in the chamber included in the laser device. Exhaust consumption may include exhaust consumption for ventilation.

  The laser device may be configured to monitor and display on the display the amount of energy consumption and the amount of resource consumption in the laser device. The display may be a display included in the laser device or a display provided outside the laser device. The discharge-excited gas laser device may be configured to monitor the amount of power, laser gas, purge gas, cooling water, and exhaust consumption and display it on a display.

  The laser device may include a system configured to reduce the amount of energy consumption and resource consumption in the laser device.

  The method of displaying or calculating the energy consumption and the resource consumption in the laser device may be recorded on a computer-readable recording medium in the form of a computer program. The method for reducing energy consumption and resource consumption in the laser apparatus may be recorded on a computer-readable recording medium in the form of a computer program.

2. 2. Laser Device 2.1 Configuration of Laser Device FIG. 1A is a diagram illustrating the overall configuration of a discharge excitation gas laser device for a semiconductor exposure apparatus. FIG. 1B is a diagram illustrating a part of the configuration of a discharge excitation gas laser device for a semiconductor exposure apparatus.

  A laser apparatus 1000 that is a discharge excitation gas laser apparatus may be used together with the semiconductor exposure apparatus 2000. The laser light emitted from the laser apparatus 1000 may enter the semiconductor exposure apparatus 2000. The semiconductor exposure apparatus 2000 may include an exposure apparatus control unit 2010. The exposure apparatus control unit 2010 may be configured to control the semiconductor exposure apparatus 2000.

  The laser device 1000 may include a housing 100. The housing 100 may be provided with a ventilation port 110 and a laser emission window 120. The laser apparatus 1000 may include a chamber 200, a narrowband module (LNM) 300, an output coupling mirror (OC) 400, an energy monitor 500, a charger 600, and a pulse power module (PPM) 700 in the housing 100. Good.

  The laser device 1000 may include a laser control unit 800, a laser gas supply device 910, a purge gas supply device 920, and an exhaust device 930 in the housing 100.

  The chamber 200 includes a first window 210, a second window 220, a cross flow fan (CCF) 230, a motor 240, a pair of electrodes 250a and 250b, an electrical insulator 260, a pressure sensor 270, and a heat exchanger (not shown). ) May be included.

  The narrowband module 300 may include two prism beam expanders 310 and a grating 320.

  The energy monitor 500 may include a beam splitter 510 and a pulse energy sensor 520.

  The pulse power module 700 may include a semiconductor switch 710 and a pulse compression circuit (not shown).

  The cross flow fan 230 may be configured to supply a laser gas between the pair of electrodes 250a and 250b. The cross flow fan 230 may be configured to circulate the laser gas supplied into the chamber 200. The motor 240 may be configured to rotate the cross flow fan 230.

  The pulse power module 700 may be connected to the first electrode 250 a through a feedthrough of an electrical insulator 260 included in the chamber 200. The pulse power module 700 may be configured to apply a pulse voltage between the first electrode 250a and the second electrode 250b.

  The output coupling mirror 400 may be a partial reflection mirror. The narrowband module 300 and the output coupling mirror 400 may be arranged to constitute an optical resonator of the laser device 1000. The chamber 200 may be disposed on the optical path of the optical resonator.

  The two prism beam expanders 310 included in the narrowband module 300 may enlarge the beam diameter of the laser light that passes through the second window 220 provided in the chamber 200. The laser light passing through the second window 220 may be incident on the grating 320 included in the narrowband module 300. The grating 320 may be configured to select the wavelength of the laser light. The grating 320 may be provided in a Littrow arrangement such that the diffraction angle of the laser light matches the incident angle of the laser light.

  The beam splitter 510 included in the energy monitor 500 may be provided on the optical path of the optical resonator. The beam splitter 510 may be arranged such that a part of the laser light that passes through the beam splitter 510 is output through the laser emission window 120. The beam splitter 510 may be arranged such that a part of the laser light reflected from the beam splitter 510 enters a pulse energy sensor 520 included in the energy monitor 500. The pulse energy sensor 520 may be configured to measure the pulse energy of the laser light.

  Chamber 200 and narrowband module 300 may be connected by a tube. Chamber 200 and energy monitor 500 may be connected by a tube. The energy monitor 500 and the laser emission window 120 may be connected by a tube.

The laser gas supply device 910 may be connected to each of the first gas cylinder 3010 and the second gas cylinder 3020 provided outside the laser apparatus 1000 by piping. The first gas cylinder 3010 may contain a laser gas containing a halogen gas. The laser gas containing a halogen gas may be, for example, a mixed gas of fluorine (F ₂ ), argon (Ar), and neon (Ne). The second gas cylinder 3020 may include a laser gas that does not include a halogen gas. The laser gas not containing the halogen gas may be, for example, a mixed gas of argon (Ar) and neon (Ne). The laser gas supply device 910 and the chamber 200 may be connected by piping. The laser gas supply device 910 may include a valve (not shown) and a flow rate adjustment valve (not shown). The laser gas supply device 910 may be configured to supply the laser gas from the first gas cylinder 3010 and the laser gas from the second gas cylinder to the chamber 200.

The purge gas supply device 920 may be connected to a third gas cylinder 3030 provided outside the laser device 1000 by piping. The third gas cylinder 3030 may contain a purge gas. For example, the purge gas may be at least one of nitrogen (N ₂ ) gas and helium (He) gas. The purge gas supply device 920 and the band narrowing module 300 may be connected by piping. The purge gas supply device 920 and the energy monitor 500 may be connected by piping. The purge gas supply device 920 may include a valve (not shown) and a flow rate adjustment valve (not shown). The purge gas supply device 920 may be configured to supply the purge gas from the third gas cylinder 3030 to the band narrowing module 300 and the energy monitor 500.

  The exhaust device 930 may be connected to the chamber 200 by piping. The exhaust device 900 may be configured to exhaust at least a portion of the laser gas in the chamber 200 from the chamber 200. The exhaust device 930 may include an exhaust pump (not shown) and a halogen filter (not shown) for removing halogen. The exhaust device 930 may exhaust the laser gas into the housing 100.

2.2 Operation of Laser Device FIG. 2 is a diagram illustrating the operation of a discharge excitation gas laser device for a semiconductor exposure apparatus.

  In step S <b> 101, the laser controller 800 may supply purge gas to the band narrowing module 300 and the energy monitor 500 through the purge gas supply device 920. By supplying the purge gas to the narrowband module 300 and the energy monitor 500, contamination of the optical elements included in the narrowband module 300 and the energy monitor 500 may be suppressed.

  In step S <b> 102, the laser control unit 800 may open a valve of a pipe (not shown) and supply cooling water to the laser device 800.

  In step S <b> 103, the laser controller 800 may exhaust the laser gas in the chamber 200 through the exhaust device 930 and supply the laser gas into the chamber 200 through the laser gas supply device 910. By using a mixed gas of argon and neon and a mixed gas of fluorine, argon, and neon, the laser gas may be supplied into the chamber 200 to achieve the desired composition and total pressure of the laser gas.

  In step S <b> 104, the laser control unit 800 may rotate the cross flow fan 230 by using the motor 240. Laser gas may be supplied between the first electrode 250a and the second electrode 250b by rotating the cross flow fan 230.

  In step S105, the laser controller 800 may set the charging voltage Vhv applied to the charger 600 to the initial value Vhv0.

  In step S <b> 106, the laser control unit 800 may receive the target pulse energy Et of the laser light from the exposure apparatus control unit 2010. The laser control unit 800 may transmit the charging voltage Vhv data to the charger 600 so that the pulse energy of the laser light becomes Et.

  In step S <b> 107, the charger 600 may apply the charging voltage Vhv to the pulse power module 700. When the trigger Tr is output from the exposure apparatus control unit 2010 to the laser control unit 800, the trigger Tr is output from the laser control unit 800 to the semiconductor switch of the pulse power module 700 in synchronization with the trigger Tr output from the exposure apparatus control unit 2010. 710 may be input. When the semiconductor switch 710 is turned on, a current pulse is compressed by a magnetic compression circuit included in the pulse power module 700, and a predetermined pulse voltage may be applied between the first electrode 250a and the second electrode 250b. As a result, pulse discharge occurs between the first electrode 250a and the second electrode 250b, and the laser gas can be excited. The optical resonator including the output coupling mirror 400 and the grating 320 can reduce the line width of the laser light and output the pulsed laser light from the output coupling mirror 400. The pulse laser beam output from the output coupling mirror 400 can enter the energy monitor 500. In this way, the laser apparatus 1000 may perform laser oscillation.

  In step S <b> 108, part of the pulsed laser light incident on the energy monitor 500 may be reflected by the beam splitter 510. The pulse energy E of the pulsed laser light reflected from the beam splitter 510 may be measured by the pulse energy sensor 520. Data of the measured pulse energy E of the pulse laser beam may be transmitted to the laser control unit 800.

  In step S <b> 109, the laser control unit 800 may calculate a difference ΔE = E−Et between the target pulse energy Et received from the exposure apparatus control unit 2010 and the pulse energy E measured by the pulse energy sensor 520. .

  In step S110, the laser controller 800 may calculate the next charging voltage Vhv ′ to be transmitted to the charger 6 by using ΔE obtained in step S109. The next charging voltage Vhv ′ to be transmitted to the charger 6 may be calculated by using an equation of Vhv ′ = Vhv−k · ΔE, and k may be a proportionality constant.

  In step S <b> 111, the laser control unit 800 may transmit the next charging voltage Vhv ′ to the charger 600. Thus, the laser controller 800 can stabilize the pulse energy E to the target pulse energy Et by controlling the charging voltage Vhv transmitted to the charger 600.

  In step S112, when the laser oscillation is ended, the laser control unit 800 ends the control of the laser apparatus 1000. If the laser oscillation is not terminated, the laser control unit 800 may proceed to step S106. Each time the laser control unit 800 receives the next target pulse energy Et and the trigger Tr is input to the laser control unit 800, the laser apparatus 1000 may output pulsed laser light in synchronization with the trigger Tr by discharge. Good.

  When the output of the pulse laser beam by the discharge is repeated in this way, the fluorine gas in the laser gas is consumed and the impurity gas can be generated. The laser controller 800 may control the laser gas supply device 910 and the exhaust device 930 so as to replenish the consumed fluorine gas and control the concentration of the impurity gas in the laser gas. The fluorine gas in the laser gas exhausted through the exhaust device 930 may be removed by a halogen filter (not shown) provided in the exhaust device 930. The laser gas from which the fluorine gas has been removed may be exhausted into the housing 100 through the exhaust device 930. The laser gas exhausted into the housing 100 may be exhausted to the outside of the laser apparatus 1000 through the ventilation port 110 and a pipe connected to the ventilation port 110.

2.3 Problems of Laser Device In the laser device 1000, energy consumption and resource consumption can occur. The energy consumed in the laser apparatus 1000 may include power such as power consumed by the charger 600, power consumed by the crossflow fan 230, and standby power of the laser apparatus 100. Resources consumed in the laser apparatus 1000 may include a mixed gas of argon and neon and a laser gas such as a mixed gas of fluorine, argon and neon, and a purge gas such as nitrogen gas or helium gas. Resources consumed in the laser apparatus 1000 include cooling water for the laser apparatus 1000, such as a heat exchanger included in the chamber 200 and cooling water for the charger 600 and the pulse power module 700 included in the laser apparatus 1000. But you can. The resources consumed in the laser apparatus 1000 may include exhaust due to ventilation of the laser apparatus 1000.

  The laser device 1000 may measure the power consumed in the laser device 1000 (the main component thereof) in order to save energy in the laser device 1000. The laser apparatus 1000 may measure the amount of each type of laser gas consumed in the laser apparatus 1000 in order to save resources in the laser apparatus 1000. The laser apparatus 1000 may measure the amount of each type of purge gas consumed in the laser apparatus 1000 in order to save resources in the laser apparatus 1000. In order to save resources in the laser apparatus 1000, the laser apparatus 1000 may measure the amount of cooling water consumed for cooling the laser apparatus 1000 (main component thereof). The laser apparatus 1000 may measure the amount of exhaust consumed by the ventilation of the laser apparatus 1000 in order to save resources in the laser apparatus 1000.

3. 3. Laser apparatus according to first embodiment of present disclosure 3.1 Configuration of laser apparatus according to first embodiment of present disclosure FIG. 3 is a schematic configuration of a laser apparatus according to the first embodiment of the present disclosure. FIG. The same reference numerals are given to the same components of the laser apparatus illustrated in FIG. 3 as those of the laser apparatus illustrated in FIG. 1, and the description of the components is omitted. The same reference numerals are assigned to the same components of the semiconductor exposure apparatus illustrated in FIG. 3 as those of the semiconductor exposure apparatus illustrated in FIG. 2, and the description of the components is omitted.

  A laser device 1010 illustrated in FIG. 3 may include a gas control unit 810 in addition to the laser control unit 800 in the housing 100. The gas control unit 810 may be connected to the laser control unit 800. The gas control unit 810 may be connected to the laser gas supply device 910 and the exhaust device 930. The laser control unit 800 may be connected to the purge gas supply device 920. The laser gas supply device 910 may be controlled by the laser control unit 800 through the gas control unit 810. The purge gas supply device 920 may be controlled by the laser controller 800. The purge gas supply device 920 may be connected to the laser control unit 800 through the gas control unit 810. The exhaust device 930 may be connected to the laser control unit 800 through the gas control unit 810.

  The laser apparatus 1010 illustrated in FIG. 3 may include a fourth gas cylinder 3040 and a fifth gas cylinder 3050 instead of the third gas cylinder 3030 illustrated in FIG. The fourth gas cylinder 3040 may include a first purge gas such as nitrogen gas. The fifth gas cylinder 3050 may include a second purge gas, such as helium gas, which is different from the first purge gas. The fourth gas cylinder 3040 may be connected to the purge gas supply device 920 through a pipe. The fifth gas cylinder 3050 may be connected to the laser gas supply device 910 and the purge gas supply device 920 through a pipe. The supply of the first purge gas from the fourth gas cylinder 3040 to the band narrowing module 300 and the energy monitor 500 may be controlled by the purge gas supply device 920. The supply of the second purge gas from the fifth gas cylinder 3050 to the chamber 200 and the energy monitor 500 may be controlled by the laser gas supply device 910.

  The laser control unit 800 may be connected to an Internet line 4010, a user interface 4020, and a fault detection & classification (FDC) system 4030 provided outside the laser device 1010. Data received by the laser controller 800 may be transmitted to the computer through the Internet line 4010. Data may be transmitted from the computer to the laser controller 800 through the Internet line 4010. The user interface 4020 may include a display function for displaying data received by the laser controller 800. Data to be transmitted to the laser control unit 800 may be input to the user interface 4020. The fault detection & classification (FDC) system 4030 may include a function of monitoring at least one state of the laser apparatus 1010 and the semiconductor exposure apparatus 2000. When an abnormality of the laser apparatus 1010 is detected, the FDC system 4030 may statistically process the detected abnormality and classify the detected abnormality type. Data received by the laser controller 800 may be transmitted to the FDC system 4030.

  FIG. 4 is a diagram illustrating the configuration of the power system of the laser apparatus according to the first embodiment of the present disclosure. The same reference numerals are given to the same components of the laser apparatus illustrated in FIG. 4 as those of the laser apparatus illustrated in FIG. 3, and the description of the components is omitted. Components identical to those of the semiconductor exposure apparatus illustrated in FIG. 3 are given the same reference numerals and descriptions of those components are omitted.

  Regarding the power system of the laser apparatus 1010, the motor 240, the charger 600, the laser controller 800, and other devices 820 may be connected to a power source (not shown). Other devices 820 may include a controller, such as a gas controller 810, and a system that holds power while the laser device 1010 is on standby. Electric power may be supplied from the power source to the motor 240, the charger 600, the laser controller 800, and the other device 820. The power supplied from the power source to the motor 240, the charger 600, the laser controller 800, and other devices 820 may be measured by a wattmeter 5010. This power may be calculated by the laser control unit 800. This power may be controlled by the laser controller 800.

  FIG. 5 is a diagram illustrating a configuration of a cooling system of the laser apparatus according to the first embodiment of the present disclosure. The same reference numerals are given to the same components of the laser apparatus illustrated in FIG. 5 as those of the laser apparatus illustrated in FIG. 3, and the description of the components is omitted. The same reference numerals are given to the same components of the semiconductor exposure apparatus illustrated in FIG. 5 as those of the semiconductor exposure apparatus illustrated in FIG. 3, and the description of the components is omitted.

  Regarding the cooling system of the laser apparatus 1010, the motor 240, the heat exchanger 280 provided in the chamber 200, the charger 600, and the pulse power module 700 may be connected to a cooling water tank (not shown) through a pipe. . The motor 240, the heat exchanger 280 provided in the chamber 200, the charger 600, and the pulse power module 700 may be supplied with cooling water from a cooling water tank through piping. The motor 240, the heat exchanger 280, the charger 600, and the pulse power module 700 may be cooled by cooling water. The cooling water supplied to the motor 240, the heat exchanger 280 provided in the chamber 200, the charger 600, and the pulse power module 700 may be returned to the cooling water tank through a pipe. The flow rate of the cooling water supplied to the motor 240, the heat exchanger 280 provided in the chamber 200, the charger 600, and the pulse power module 700 may be adjusted by a flow rate adjusting valve Vw provided in the pipe. The flow rate adjustment valve Vw may be controlled by the laser control unit 800. The flow rate of the cooling water passing through the charger 600 may be measured by the flow meter F1. The flow rate of the cooling water passing through the pulse power module 700 may be measured by the flow meter F2. The flow rate of the cooling water passing through the heat exchanger 280 may be measured by the flow meter F3. The flow rate of the cooling water passing through the motor 240 may be measured by the flow meter F4. The flow rate of the cooling water measured by the flow meter F1, the flow meter F2, the flow meter F3, and the flow meter F4 may be transmitted to the laser control unit 800.

  FIG. 6 is a diagram illustrating the configuration of the purge gas system of the laser apparatus according to the first embodiment of the present disclosure. The same reference numerals are given to the same components of the laser apparatus illustrated in FIG. 6 as those of the laser apparatus illustrated in FIG. 3, and the description of the components is omitted. The same reference numerals are given to the same components of the semiconductor exposure apparatus illustrated in FIG. 6 as those of the semiconductor exposure apparatus illustrated in FIG. 3, and the description of the constituent elements is omitted.

  Regarding the purge gas system of the laser apparatus 1010, a fourth gas cylinder 3040 containing nitrogen gas and a fifth gas cylinder 3050 containing helium gas may be connected to the purge gas supply device 920 through a pipe. The fourth gas cylinder 3040 containing nitrogen gas may be connected to the energy monitor 500 so as to supply nitrogen gas to the energy monitor 500 through the purge gas supply device 920. The optical element included in the energy monitor 500 may be cleaned with nitrogen gas. The fifth gas cylinder 3050 containing helium gas may be connected to the band narrowing module 300 so as to supply helium gas to the band narrowing module 300 through the purge gas supply device 920. The optical element included in the narrowband module 300 may be cleaned with helium gas.

In the purge gas supply device 920, a nitrogen gas flow meter F _N2 , a nitrogen gas flow rate adjustment valve VA _N2 , and a nitrogen gas system operation valve VON ₂ may be provided in a pipe connecting the fourth gas cylinder 3040 and the energy monitor 500. . The flow rate of nitrogen gas supplied to the energy monitor 500 may be measured by a nitrogen gas flow meter F _N2 . The flow rate of nitrogen gas supplied to the energy monitor 500 may be adjusted by a nitrogen gas flow rate adjustment valve VA _N2 . Supply of the nitrogen gas to the energy monitor 500 from the fourth gas cylinder 3040 may be started or stopped by a nitrogen gas system operated valve VO _N2. The nitrogen gas flow meter F _N2 may be connected to the laser control unit 800, and the flow rate of nitrogen gas measured by the nitrogen gas flow meter F _N2 may be transmitted to the laser control unit 800. The nitrogen gas system operation valve VON ₂ may be connected to the laser controller 800 and controlled by the laser controller 800.

In the purge gas supply device 920, a helium gas flow meter F _He , a helium gas flow rate adjustment valve VA _He , and a helium gas system operation valve VO _He are provided in a pipe connecting the fifth gas cylinder 3050 and the band narrowing module 300. Also good. The flow rate of helium gas supplied to the band narrowing module 300 may be measured by a helium gas flow meter F _He . The flow rate of helium gas supplied to the narrowband module 300 may be adjusted by a helium gas flow rate adjustment valve VA _He . The supply of helium gas from the fifth gas cylinder 3050 to the band narrowing module 300 may be started or stopped by the helium gas system operation valve VO _He . The helium gas flow meter F _He is connected to the laser controller 800, and the flow rate of helium gas measured by the helium gas flow meter F _He may be transmitted to the laser controller 800. The helium gas system operation valve VO _He may be connected to the laser controller 800 and controlled by the laser controller 800.

  FIG. 7 is a diagram illustrating the configuration of the laser gas system of the laser apparatus according to the first embodiment of the present disclosure. The same reference numerals are given to the same components of the laser apparatus illustrated in FIG. 7 as those of the laser apparatus illustrated in FIG. 3, and the description of the components is omitted. The same reference numerals are given to the same components of the semiconductor exposure apparatus illustrated in FIG. 7 as those of the semiconductor exposure apparatus illustrated in FIG. 3, and the description of the constituent elements is omitted.

  Regarding the laser gas system of the laser device 1010, the first gas cylinder 3010, the second gas cylinder 3020, and the fifth gas cylinder 3050 may be connected to the laser gas supply device 910 through a pipe. The first gas cylinder 3010 may include a mixed gas of fluorine, argon, and neon. The second gas cylinder 3020 may include a mixed gas of argon and neon. The fifth gas cylinder 3050 may contain helium gas. The first gas cylinder 3010, the second gas cylinder 3020, and the fifth gas cylinder 3050 may be connected to the chamber 200 through the laser gas supply device 910.

  In the laser gas supply device 910, a gas system operation valve may be provided in a pipe connecting the first gas cylinder 3040 and the chamber 200. The supply of the mixed gas of fluorine, argon, and neon from the first gas cylinder 3040 to the chamber 200 may be started or stopped by a gas system operation valve provided in a pipe connecting the first gas cylinder 3040 and the chamber 200. Good. The gas system operation valve provided in the pipe connecting the first gas cylinder 3040 and the chamber 200 may be controlled by the gas control unit 810.

  In the laser gas supply device 910, a gas system operation valve may be provided in a pipe connecting the second gas cylinder 3020 and the chamber 200. The supply of the mixed gas of argon and neon from the second gas cylinder 3020 to the chamber 200 may be started or stopped by a gas system operation valve provided in a pipe connecting the second gas cylinder 3020 and the chamber 200. The gas system operation valve provided in the pipe connecting the second gas cylinder 3020 and the chamber 200 may be controlled by the gas control unit 810.

  In the laser gas supply device 910, a gas system operation valve may be provided in a pipe connecting the fifth gas cylinder 3050 and the chamber 200. The supply of helium gas from the fifth gas cylinder 3050 to the chamber 200 may be started or stopped by a gas system operation valve provided in a pipe connecting the fifth gas cylinder 3050 and the chamber 200. The gas system operation valve provided in the pipe connecting the fifth gas cylinder 3050 and the chamber 200 may be controlled by the gas control unit 810.

  Regarding the laser gas system of the laser device 1010, the exhaust device 930 may be connected to the chamber 200 through a pipe. The exhaust device 930 may be provided so that laser gas is emitted into the housing 100 through a pipe.

  In the exhaust device 930, a gas system operation valve may be provided in a pipe connected to the chamber 200. The exhaust of the laser gas from the chamber 200 into the housing 100 may be started or stopped by a gas system operation valve provided in a pipe connected to the chamber 200. The gas system operation valve provided in the pipe connected to the chamber 200 may be controlled by the gas control unit 810.

  In the exhaust device 930, a vacuum pump 940 may be provided in a pipe connected to the chamber 200. The vacuum pump 940 may be configured to exhaust the laser gas in the chamber 200 out of the chamber 200 through a pipe connected from the chamber 200 to the chamber 200. The vacuum pump 940 may be provided downstream of a gas system operation valve provided in a pipe connected to the chamber 200. The operation of the vacuum pump 940 may be controlled by the gas control unit 810.

  In the exhaust device 930, a fluorine gas trap 950 may be provided in a pipe connected to the chamber 200. The fluorine gas trap 950 may be configured to capture fluorine contained in the laser gas from the chamber 200. Laser gas from which fluorine has been removed may be emitted from the exhaust device 930 into the housing 100 by the fluorine gas trap 950. The fluorine gas trap 950 may be provided between a gas system operation valve and a vacuum pump 940 provided in a pipe connected to the chamber 200.

  FIG. 8 is a diagram illustrating a configuration of a ventilation system of the laser apparatus according to the first embodiment of the present disclosure. The same reference numerals are given to the same components of the laser apparatus illustrated in FIG. 8 as those of the laser apparatus illustrated in FIG. 3, and the description of the components will be omitted. Components of the semiconductor exposure apparatus illustrated in FIG. 8 that are the same as those of the semiconductor exposure apparatus illustrated in FIG. 3 are given the same reference numerals, and descriptions thereof are omitted.

  Regarding the ventilation system of the laser device 1010, the housing 100 may be provided with a first air inlet 130 and a second air inlet 140. Air may be introduced from the outside of the housing 100 into the housing 100 through the first air inlet 130 and the second air inlet 140. The element provided in the interior 100 of the housing may be cooled by air introduced into the interior of the housing 100. The air introduced into the housing 100 may be discharged to the outside of the housing 100 through the ventilation port 110. A wind speed sensor 150 may be provided inside the housing 100. The wind speed sensor 150 may be provided so as to measure the wind speed of the air passing through the ventilation port 110. The wind speed sensor 150 may be connected to the laser control unit 800. Data on the wind speed of air measured by the wind speed sensor 150 may be transmitted to the laser controller 800.

3.2 Operation of Laser Device According to First Embodiment of Present Disclosure FIG. 9 is a diagram illustrating a method of calculating the power consumption amount of the laser device including the power meter according to the first embodiment of the present disclosure. It is.

  In step S201, the laser control unit 800 may substitute an initial value 0 for the power consumption amount Wh (0).

  In step S <b> 202, the laser control unit 800 supplies power Ew (time T (time T = 0)) supplied from the power source to the motor 240, the charger 600, the laser control unit 800, and other devices 820 by the power meter 5010. 0) may be measured.

  In step S203, the laser control unit 800 may reset the time T of a timer (not shown) included in the laser control unit 800 and start measuring the time T by the timer.

  In step S204, the laser control unit 800 may determine whether or not the time T measured by the timer is equal to or greater than a predetermined value Tc. The predetermined value Tc may be a measurement period of the power consumption amount Wh of the laser device 1010. Tc may be, for example, not less than (1/3600) hours and not more than (1/60) hours. If the time T is equal to or greater than Tc, the laser control unit 800 may proceed to step S205. If the time T is less than Tc, step S204 may be repeated.

  In step S <b> 205, the laser controller 800 supplies power Ew (T) at time T (≧ Tc) supplied from the power source to the motor 240, the charger 600, the laser controller 800, and other devices 820 by the power meter 5010. May be measured.

  In step S <b> 206, the laser control unit 800 may calculate the power consumption amount Wh (T) of the laser device 1010 based on Ew (T) measured by the wattmeter 5010. It may be assumed that the power varies linearly from Ew (0) to Ew (T) between times 0 and T. The power consumption amount Wh (T) of the laser device 1010 may be calculated according to the formula: Wh (T) = {Ew (T) + Ew (0)} (T / 2) + Wh (0).

  In step S207, the laser control unit 800 may transmit the calculated power consumption amount Wh (T) to the user interface 4020 and display it.

  In step S208, the laser controller 800 substitutes the value of Ew (T) for Ew (0) and obtains the value of Wh (T) for Wh (0) in order to obtain an integrated value of the power consumption amount Wh (T). A value may be substituted.

  In step S209, the laser control unit 800 may determine whether or not to finish calculating the power consumption. When the calculation of the power consumption amount is not completed, the laser control unit 800 may proceed to step S203.

  In this way, the power consumption of the laser device 1010 may be calculated.

  FIG. 10A is a diagram illustrating a method of calculating the power consumption amount of the motor included in the laser apparatus that does not include the power meter according to the first embodiment of the present disclosure.

  In step S <b> 301, the laser control unit 800 may substitute the initial value 0 for the power consumption amount Whm (0) of the motor 240.

  In step S302, the laser control unit 800 may measure the pressure P (0) of the laser gas contained in the chamber 200 at time 0 (time T = 0) by the pressure sensor 270.

  In step S <b> 303, the laser control unit 800 may calculate the motor power Em (0) at time 0 based on the pressure P (0) of the laser gas measured by the pressure sensor 207. It may be assumed that the electric power Em (0) of the motor at time 0 is proportional to the pressure P (0) of the laser gas measured by the pressure sensor 207. The motor power Em (0) at time 0 may be calculated according to the equation Em (0) = α · P (0) + β, where α is a gas pressure coefficient and β is an offset constant. . The gas pressure coefficient α and the offset coefficient β may be measured in advance or may be design values. The gas pressure coefficient α and the offset coefficient β may be stored in a storage unit (not shown) included in the laser control unit 800. The laser controller 800 may read the gas pressure coefficient α and the offset coefficient β from the storage unit.

  In step S304, the laser control unit 800 may reset the time T of a timer (not shown) included in the laser control unit 800 and start measuring the time T by the timer.

  In step S305, the laser control unit 800 may determine whether or not the time T measured by the timer is equal to or greater than a predetermined value Tc. The predetermined value Tc may be a measurement cycle of the power consumption amount Wh of the motor 240. Tc may be, for example, not less than (1/3600) hours and not more than (1/60) hours. If the time T is equal to or greater than Tc, the laser control unit 800 may proceed to step S306. If the time T is less than Tc, step S305 may be repeated.

  In step S306, the laser control unit 800 may determine whether or not the cross flow fan 230 is rotating. If the cross flow fan is rotating, the laser controller 800 may proceed to step S307. When the cross flow fan 203T is not rotating, the process may proceed to step S308.

  In step S <b> 307, the laser control unit 800 may measure the pressure P (T) of the laser gas contained in the chamber 200 at time T using the pressure sensor 270.

  In step S308, the laser control unit 800 may substitute 0 for the electric power Em (0) of the motor 240 at time 0. Thereafter, the laser controller 800 may proceed to Step 310.

  In step S309, the laser control unit 800 may calculate the electric power Em (T) of the motor at the time T based on the pressure P (T) of the laser gas measured by the pressure sensor 207. It may be assumed that the electric power Em (T) of the motor at time T is proportional to the pressure P (T) of the laser gas measured by the pressure sensor 207. The electric power Em (T) of the motor 240 at time T may be calculated according to the formula Em (T) = α · P (T) + β when α is a gas pressure coefficient and β is an offset constant. Good. The gas pressure coefficient α and the offset coefficient β may be as described above.

  In step S310, the electric power consumption Whm (T) of the motor 240 may be calculated based on the electric power Em (T) of the motor 240 at time T. It may be assumed that the power varies linearly from Em (0) to Em (T) from time 0 to T. The power consumption amount Whm (T) of the motor 240 may be calculated according to the equation: Whm (T) = {Em (T) + Em (0)} (T / 2) + Whm (0).

  In step S311, the laser control unit 800 substitutes the value of Em (T) for Em (0) and sets Whm (T) to Whm (0) in order to obtain an integrated value of the power consumption amount Whm (T). A value may be substituted.

  In step S312, the laser control unit 800 may determine whether or not to finish calculating the power consumption of the motor 240. When the calculation of the power consumption amount of the motor 240 is not completed, the laser control unit 800 may proceed to step S304.

  In this way, the power consumption amount Whm of the motor 240 may be calculated.

When changing the rotation speed of the motor 240, the electric power Em (T) of the motor 240 at time T is Em (T) = (α · P (T) + β) · (ω (T) / ω (0)) ³ It may be calculated according to the following formula. Here, P (T) is the pressure of the laser gas at time T, α is a gas pressure coefficient, β is an offset constant, ω (T) is the rotational speed of the motor 240 at time T, and ω (0) is the motor 240 at time 0. It may be the number of rotations.

  FIG. 10B is a diagram illustrating a method of calculating the power consumption amount of the charger included in the laser apparatus that does not include the power meter according to the first embodiment of the present disclosure.

  In step S401, the laser controller 800 may read the charging voltage Vhv applied to the charger 600.

  In step S402, the laser controller 800 may determine whether or not the charger 600 has discharged between the first electrode 250a and the second electrode 250b. When a discharge is performed between the electrode 250a and the second electrode 250b, the laser control unit 800 may proceed to step S403. When no discharge is performed between the electrode 250a and the second electrode 250b, the laser control unit 800 may repeat step S402.

In step S403, the laser controller 800 may calculate one pulse of discharge energy Ed (unit: J) based on the value of the charging voltage Vhv. One pulse of discharge energy Ed may be calculated according to an equation of Ed = a (Vhv) ² + b (Vhv) + c. Here, a, b, and c may be predetermined coefficients. The predetermined coefficients a, b, and c may be measured in advance or may be design values. The predetermined coefficients a, b, and c may be stored in a storage unit (not shown) included in the laser control unit 800. The laser controller 800 may read predetermined coefficients a, b, and c from the storage unit.

  In step S404, the laser control unit 800 may calculate an integrated value ΣEd of discharge energy for a plurality of pulses.

  In step S405, the laser controller 800 may calculate the power consumption amount Whc of the charger 600 based on the integrated value ΣEd of discharge energy for a plurality of pulses. The power consumption amount Whc of the charger 600 may be calculated according to the formula Whc = γ · ΣEd when γ is a conversion factor. γ may be 1/360000 kWh / J.

  In step S406, the laser control unit 800 may determine whether or not to finish calculating the power consumption of the charger 600. When the calculation of the power consumption amount of the charger 600 is not completed, the laser control unit 800 may proceed to step S402.

  In this way, the power consumption amount Whc of the charger 600 may be calculated.

  FIG. 10C is a diagram illustrating a method of calculating the power consumption of the laser control unit and other devices included in the laser apparatus that does not include the power meter according to the first embodiment of the present disclosure.

  In step S501, the laser control unit 800 may reset the time H of a timer (not shown) included in the laser control unit 800 and start measuring the time H by the timer.

  In step S502, the laser control unit 800 may calculate the power consumption amount Whl of the laser control unit 800 and other devices based on the power of the laser control unit 800 and other devices. The power consumption amount Whl of the laser control unit 800 and other devices may be calculated according to an expression of Whl = El · H. Here, El may be the power of the laser controller 800 and other devices. El may be a fixed value independent of the state of operation of the laser device 1010.

  In step S503, the laser control unit 800 may determine whether to finish calculating the power consumption amounts of the laser control unit 800 and other devices. If the calculation of the power consumption of the laser control unit 800 and other devices is not completed, the laser control unit 800 may proceed to step S502.

  In this way, the power consumption amount Whl of the laser control unit 800 and other devices may be calculated.

  FIG. 10D is a diagram illustrating a method of calculating the total power consumption of the laser apparatus that does not include the power meter according to the first embodiment of the present disclosure.

  In step S601, based on the power consumption amount Whm of the motor 240, the power consumption amount Whc of the charger 600, and the power consumption amount Whl of the laser controller 800 and other devices, the overall power consumption amount Wh of the laser device 1010. May be calculated. The overall power consumption amount Wh of the laser device 1010 may be calculated according to an equation of Wh = Whm + Whc + Whl.

  In step S602, the laser control unit 800 may transmit the calculated power consumption amount Wh to the user interface 4020 and display it.

  In step S603, the laser control unit 800 may determine whether to end the calculation of the power consumption of the laser device 1010. When the calculation of the power consumption amount of the laser device 1010 is not completed, the laser control unit 800 may proceed to step S601.

  In this way, the power consumption amount Wh of the laser device 1010 may be calculated.

  FIG. 11 is a diagram illustrating a method of calculating the cooling water consumption in the laser apparatus according to the first embodiment of the present disclosure.

  In step S <b> 701, the laser control unit 800 may substitute an initial value 0 for the cooling water consumption L (0) in the laser apparatus 1010.

  In step S702, the laser controller 800 may measure the flow rate F1 (0) of the cooling water passing through the charger 600 at time 0 (time T = 0) by the flow meter F1. The laser control unit 800 may measure the flow rate F2 (0) of the cooling water passing through the pulse power module 700 at time 0 (time T = 0) with the flow meter F2. The laser control unit 800 may measure the flow rate F3 (0) of the cooling water passing through the heat exchanger 280 at time 0 (time T = 0) with the flow meter F3. The laser control unit 800 may measure the flow rate F4 (0) of the cooling water passing through the motor 240 at time 0 (time T = 0) with the flow meter F4.

  In step S703, the laser controller 800 cools the laser device 1010 flowing at time 0 (time T = 0) based on the flow rates F1 (0), F2 (0), F3 (0), and F4 (0). You may calculate the sum total F (0) of the flow volume of water. The total flow rate F (0) of the cooling water flowing to the laser device 1010 at time 0 may be calculated according to the formula F (0) = F1 (0) + F2 (0) + F3 (0) + F4 (0). .

  In step S704, the laser control unit 800 may reset the time T of a timer (not shown) included in the laser control unit 800 and start measuring the time T by the timer.

  In step S705, the laser control unit 800 may determine whether or not the time T measured by the timer is equal to or greater than a predetermined value Tc. The predetermined value Tc may be a measurement period of the power consumption amount Wh of the laser device 1010. Tc may be, for example, not less than (1/3600) hours and not more than (1/60) hours. If the time T is equal to or greater than Tc, the laser control unit 800 may proceed to step S706. If the time T is less than Tc, step S705 may be repeated.

  In step S706, the laser controller 800 may measure the flow rate F1 (T) of the cooling water passing through the charger 600 at time T with the flow meter F1. The laser controller 800 may measure the flow rate F2 (T) of the cooling water passing through the pulse power module 700 at time T by the flow meter F2. The laser controller 800 may measure the flow rate F3 (T) of the cooling water passing through the heat exchanger 280 at time T by the flow meter F3. The laser controller 800 may measure the flow rate F4 (T) of the cooling water passing through the motor 240 at time T by the flow meter F4.

  In step S <b> 707, the laser controller 800 determines the total flow F of the cooling water flowing in the laser device 1010 at time T based on the flow rates F <b> 1 (T), F <b> 2 (T), F <b> 3 (T), and F <b> 4 (T). (T) may be calculated. The total flow rate F (T) of the cooling water flowing through the laser device 1010 at time T may be calculated according to the formula F (T) = F1 (T) + F2 (T) + F3 (T) + F4 (T). .

  In step S708, the laser control unit 800 calculates the cooling water consumption L (T) in the laser device 1010 based on the total F (T) of the flow rate of the cooling water flowing in the laser device 1010 at time T. Also good. It may be assumed that the consumption amount of the cooling water in the laser apparatus 1010 varies linearly from F (0) to F (T) from time 0 to T. The cooling water consumption L (T) in the laser device 1010 may be calculated according to the equation L (T) = {F (T) + F (0)} (T / 2) + L (0).

  In step S709, the laser controller 800 may transmit the calculated cooling water consumption L (T) to the user interface 4020 and display it.

  In step S710, the laser control unit 800 substitutes the value of F (T) into F (0) and obtains L (T) into L (0) in order to obtain the integrated value of the cooling water consumption L (T). ) Value may be substituted.

  In step S711, the laser control unit 800 may determine whether to end the calculation of the cooling water consumption. If the calculation of the cooling water consumption is not completed, the laser control unit 800 may proceed to step S704.

  In this manner, the consumption amount of cooling water in the laser apparatus 1010 may be calculated.

  FIG. 12 is a diagram illustrating a method of calculating the consumption amount of nitrogen gas in the laser apparatus according to the first embodiment of the present disclosure.

In step S <b> 801, the laser control unit 800 may substitute the initial value 0 for the consumption L _N2 (0) of the nitrogen gas supplied to the laser apparatus 1010.

In step S802, the laser controller 800 may measure the flow rate F _N2 (0) of nitrogen gas supplied to the laser device 1010 at time 0 (time T = 0) by the flow meter F _N2 .

  In step S803, the laser control unit 800 may reset the time T of a timer (not shown) included in the laser control unit 800 and start measuring the time T using the timer.

  In step S804, the laser control unit 800 may determine whether or not the time T measured by the timer is equal to or greater than a predetermined value Tc. The predetermined value Tc may be a measurement period of the power consumption amount Wh of the laser device 1010. Tc may be, for example, not less than (1/3600) hours and not more than (1/60) hours. If the time T is equal to or greater than Tc, the laser control unit 800 may proceed to step S805. If the time T is less than Tc, step S804 may be repeated.

In step S805, the laser controller 800 may measure the flow rate F _N2 (T) of nitrogen gas supplied to the laser device 1010 at time T by the flow meter F _N2 .

In step S806, the laser control unit 800 uses the flow rate of nitrogen gas F _N2 (T) supplied to the laser apparatus 1010 at time T and the like to consume the amount L _N2 (T of nitrogen gas supplied to the laser apparatus 1010). ) May be calculated. It may be assumed that the flow rate of the nitrogen gas supplied to the laser device 1010 during the period from time 0 to T varies linearly from F _N2 (0) to F _N2 (T). The consumption L _N2 (T) of the nitrogen gas supplied to the laser device 1010 is in accordance with the formula L _N2 (T) = {F _N2 (T) + F _N2 (0)} (T / 2) + L _N2 (0) , May be calculated.

In step S807, the laser controller 800 may transmit the calculated nitrogen gas consumption L _N2 (T) to the user interface 4020 and display it.

In step S808, the laser controller 800 substitutes the value of F _N2 (T) for F _N2 (0) and L _N2 (0) to obtain the integrated value of the nitrogen gas consumption L _N2 (T). The value of L _N2 (T) may be substituted for.

  In step S809, the laser control unit 800 may determine whether or not to finish calculating the consumption amount of nitrogen gas. When the calculation of the consumption amount of nitrogen gas is not completed, the laser control unit 800 may proceed to step S803.

  In this way, the consumption amount of nitrogen gas supplied to the laser device 1010 may be calculated.

  FIG. 13A is a diagram illustrating a method of calculating the consumption of helium gas supplied to the narrowband module in the laser apparatus according to the first embodiment of the present disclosure.

In step S _<b> 901, the laser control unit 800 may substitute the initial value 0 for the consumption L _HeLNM (0) of the helium gas supplied to the band narrowing module 300 in the laser device 1010.

In step S902, the laser controller 800 measures the flow rate F _HeLNM (0) of the helium gas supplied to the band narrowing module 300 in the laser device 1010 at time 0 (time T = 0) by the flow meter F _He . Also good.

  In step S903, the laser control unit 800 may reset the time T of a timer (not shown) included in the laser control unit 800 and start measuring the time T by the timer.

  In step S904, the laser control unit 800 may determine whether or not the time T measured by the timer is equal to or greater than a predetermined value Tc. The predetermined value Tc may be a measurement period of the power consumption amount Wh of the laser device 1010. Tc may be, for example, not less than (1/3600) hours and not more than (1/60) hours. If the time T is equal to or greater than Tc, the laser control unit 800 may proceed to step S905. If the time T is less than Tc, step S904 may be repeated.

In step S905, the laser controller 800 may measure the flow rate F _HeLNM (T) of the helium gas supplied to the band narrowing module 300 in the laser device 1010 at time T by the flow meter F _He .

In step S906, the laser controller 800 controls the band narrowing module 300 in the laser apparatus 1010 based on the flow rate F _HeLNM (T) of the helium gas supplied to the band narrowing module 300 in the laser apparatus 1010 at time T. The consumption amount L _HeLNM (T) of the supplied nitrogen gas may be calculated. It may be assumed that the flow rate of the helium gas supplied to the line-narrowing module 300 in the laser apparatus 1010 during the period from time 0 to T varies linearly from F _HeLNM (0) to F _HeLNM (T). The consumption L _HeLNM (T) of the helium gas supplied to the narrow-band module 300 in the laser apparatus 1010 is L _HeLNM (T) = {F _HeLNM (T) + F _HeLNM (0)} (T / 2) + L _HeLNM It may be calculated according to the equation (0).

In step S907, the laser control unit 800 substitutes the value of F _HeLNM (T) for F _HeLNM (0) and _obtains the value of L _HeLNM (0) to obtain the integrated value of the helium gas consumption L _HeLNM (T). The value of L _HeLNM (T) may be substituted for.

  In step S908, the laser control unit 800 may determine whether to finish calculating the consumption of helium gas. If the calculation of the consumption of helium gas is not completed, the laser control unit 800 may proceed to step S903.

In this way, the consumption amount L _{HeLNM of the} helium gas supplied to the band narrowing module 300 in the laser device 1010 may be calculated.

  FIG. 13B is a diagram illustrating a method of calculating the consumption amount of helium gas supplied to the chamber in the laser apparatus according to the first embodiment of the present disclosure.

  In step S <b> 1001, the laser control unit 800 may reset the number of times N of helium gas supplied to the chamber 200 in the laser apparatus 1010.

  In step S <b> 1002, the laser control unit 800 may count the number N of helium gas supplies to the chamber 200 in the laser apparatus 1010.

In step S _<b> 1003, the laser control unit 800 may calculate the consumption amount L _HeCHM of the helium gas supplied to the chamber 200 in the laser device 1010 based on the number N of helium gas supplies to the chamber 200. The consumption amount L _HeCHM of the helium gas supplied to the chamber 200 in the laser apparatus 1010 may be calculated according to the formula L _HeCHM = V · N. Here, V may be the volume of helium gas supplied to the chamber 200 at a time.

  In step S1004, the laser control unit 800 may determine whether or not to finish calculating the consumption of helium gas. When the calculation of the consumption amount of helium gas is not completed, the laser control unit 800 may proceed to step S1002.

In this way, the consumption amount L _{HeCHM of the} helium gas supplied to the chamber 200 in the laser apparatus 1010 may be calculated.

  FIG. 13C is a diagram illustrating a method of calculating the consumption amount of helium gas supplied to the laser apparatus according to the first embodiment of the present disclosure.

In step S _<b> 1101, the laser control unit 800 is supplied to the laser apparatus 1010 based on the helium gas consumption L _HeLNM supplied to the band narrowing module 300 and the helium gas consumption L _HeCHM supplied to the chamber 200. Helium gas consumption L _He may be calculated. The consumption L _He of the helium gas supplied to the laser apparatus 1010 may be calculated according to the formula L _He = L _HeLNM + L _HeCHM .

In step S1102, the laser controller 800 may transmit the calculated helium gas consumption amount L _He to the user interface 4020 and display it.

  In step S <b> 1103, the laser control unit 800 may determine whether to finish calculating the consumption of helium gas supplied to the laser apparatus 1010. If the calculation of the consumption of helium gas supplied to the laser apparatus 1010 is not completed, the laser control unit 800 may proceed to step S1101.

In this way, the consumption amount L _{He of the} helium gas supplied to the laser device 1010 may be calculated.

  FIG. 14 is a diagram illustrating a method of calculating the consumption amount of the laser gas supplied to the laser apparatus according to the first embodiment of the present disclosure. In FIG. 14, the laser gas may be a mixed gas of fluorine, argon, and neon supplied from the first gas cylinder 3010 to the chamber 200. In FIG. 14, the laser gas may be a mixed gas of argon and neon supplied from the second gas cylinder 3020 to the chamber 200.

  In step S1201, the laser control unit 800 may substitute the initial value 0 for the integrated value ΔPsum of the laser gas pressure increase in the chamber 200.

  In step S <b> 1202, the laser control unit 800 may determine whether to inject laser gas into the chamber 200 from at least one of the first gas cylinder 3010 and the second gas cylinder 3020. When the laser gas is injected into the chamber 200 from at least one of the first gas cylinder 3010 and the second gas cylinder 3020, the laser control unit 800 may proceed to step S1203. When the laser gas is not injected into the chamber 200 from either the first gas cylinder 3010 or the second gas cylinder 3020, the laser control unit 800 may repeat step S1202.

  In step S <b> 1203, the laser control unit 800 may measure the pressure P (front) of the laser gas in the chamber 200 immediately before injecting the laser gas into the chamber 200 by using the pressure sensor 270.

  In step S <b> 1204, the laser control unit 800 may inject laser gas into the chamber 200 from at least one of the first gas cylinder 3010 and the second gas cylinder 3020. The laser control unit 800 may inject laser gas into the chamber 200 by opening a gas system operation valve provided in a pipe connecting the first gas cylinder 3010 or the second gas cylinder 3020 and the chamber 200. The laser controller 800 may determine whether or not the pressure of the laser gas in the chamber 200 is a predetermined pressure by using the pressure sensor 270. When the pressure of the laser gas in the chamber 200 is equal to or higher than a predetermined pressure, the laser control unit 800 uses a gas system operation valve provided in a pipe connecting the first gas cylinder 3010 or the second gas cylinder 3020 and the chamber 200. You may close it. If the pressure of the laser gas in the chamber 200 is less than a predetermined pressure, the gas system operation valve may be left open.

  In step S <b> 1205, the laser control unit 800 may measure the pressure P (after) of the laser gas in the chamber 200 immediately after the laser gas is injected into the chamber 200 by using the pressure sensor 270.

  In step S1206, the laser control unit 800 may calculate the pressure increase ΔP of the laser gas in the chamber 200 based on the pressure P (front) and the pressure P (rear). The pressure increase ΔP of the laser gas in the chamber 200 may be calculated according to the equation: ΔP = P (rear) −P (previous).

  In step S <b> 1207, the laser control unit 800 may calculate the integrated value ΔPsum of the laser gas pressure increase in the chamber 200 based on the laser gas pressure increase ΔP in the chamber 200. The integrated value ΔPsum of the laser gas pressure increase in the chamber 200 may be calculated by integrating the laser gas pressure increase ΔP in the chamber 200.

  In step S1208, the laser control unit 800 may calculate the laser gas consumption amount Q in the standard state (volume of the laser gas consumed in the standard state) Q based on the integrated value ΔPsum of the laser gas pressure increase in the chamber 200. . The standard state may be a state at a temperature of 0 ° C. and a pressure of 1013 hPa. The laser gas consumption Q in the standard state may be calculated according to an equation of Q = (V / P0) · ΔPsum. Here, V may be the volume of the chamber 200 and P0 may be 1013 hPa.

  In step S1209, the laser control unit 800 may transmit the laser gas consumption Q in the standard state to the user interface 4020 and display it.

  In step S <b> 1210, the laser control unit 800 may determine whether to finish calculating the consumption amount of the laser gas supplied to the laser apparatus 1010. When the calculation of the consumption amount of the laser gas supplied to the laser apparatus 1010 is not completed, the laser control unit 800 may proceed to step S1202.

  In this way, the consumption amount Q of the laser gas supplied to the laser apparatus 1010 may be calculated.

  FIG. 15 is a diagram illustrating a method of calculating air consumption by ventilation in the laser apparatus according to the first embodiment of the present disclosure.

  In step S <b> 1301, the laser control unit 800 may substitute the initial value 0 for the air consumption Lve (0) due to the ventilation of the laser device 1010.

  In step S1302, the laser controller 800 may measure the wind speed v (0) of the air passing through the laser device 1010 at time 0 (time T = 0) by the wind speed sensor 150.

In step S1303, the laser control unit 800 calculates the flow rate Qv (0) of air passing through the laser device 1010 at time 0 (time T = 0) based on the wind speed v (0) of air. Good. The flow rate Qv (0) of the air passing through the inside of the laser apparatus 1010 at time 0 is Qv (0) = π (D / 2) ² · when the ventilation port 110 has a circular opening with a diameter D. It may be calculated according to the equation of v (0).

  In step S1304, the laser control unit 800 may reset the time T of a timer (not shown) included in the laser control unit 800 and start measuring the time T by the timer.

  In step S1305, the laser control unit 800 may determine whether or not the time T measured by the timer is equal to or greater than a predetermined value Tc. The predetermined value Tc may be a measurement period of the power consumption amount Wh of the laser device 1010. Tc may be, for example, not less than (1/3600) hours and not more than (1/60) hours. If the time T is equal to or greater than Tc, the laser control unit 800 may proceed to step S1306. If the time T is less than Tc, step S1305 may be repeated.

  In step S1306, the laser control unit 800 may measure the wind speed v (T) of the air passing through the laser device 1010 at time T by the wind speed sensor 150.

In step S1307, the laser controller 800 may calculate the flow rate Qv (T) of air passing through the laser device 1010 at time T based on the wind speed v (T) of air. The flow rate Qv (T) of air passing through the inside of the laser apparatus 1010 at time T is Qv (T) = π (D / 2) ² · when the ventilation port 110 has a circular opening with a diameter D. It may be calculated according to the equation of v (T).

  In step S1308, the laser control unit 800 calculates the air consumption Lve (T) due to the ventilation of the laser device 1010 based on the flow rate Qv (T) of air passing through the laser device 1010 at time T. May be. It may be assumed that the flow rate of air passing through the inside of the laser apparatus 1010 from time 0 to T varies linearly from Qv (0) to Qv (T). The air consumption Lve (T) due to the ventilation of the laser apparatus 1010 may be calculated according to the equation Lve (T) = {Qv (T) + Qv (0)} (T / 2) + Lve (0). .

  In step S1309, the laser control unit 800 may transmit the calculated air consumption Lve (T) to the user interface 4020 and display it.

  In step S1310, the laser control unit 800 substitutes the value of Qv (T) for Qv (0) and Lve (T) for Lve (0) in order to obtain an integrated value of the air consumption Lve (T). The value of may be substituted.

  In step S1311, the laser control unit 800 may determine whether or not to end the calculation of air consumption. If the calculation of the air consumption amount is not completed, the laser control unit 800 may proceed to step S1304.

  In this manner, the amount of air consumed by ventilation of the laser device 1010 may be calculated.

  Table 1 illustrates parameters obtained in the laser apparatus according to the embodiment of the present invention.

上述したパラメータの値は、露光装置制御部２０１０に送信されてもよい。上述したパラメータの値は、インターネット回線４０１０を通じてコンピュータに送信されてもよい。上述したパラメータの値は、ユーザインターフェース４０２０に表示されてもよい。レーザ制御部８００は、上述した消費量のパラメータの基準値に対する上述した消費量のパラメータの値の比（％）を算出してもよい。上述した消費量のパラメータの基準値に対する上述した消費量のパラメータの値の比（％）は、ユーザインターフェース４０２０に表示されてもよい。レーザ制御部８００は、上述した消費量のパラメータに関する一パルス毎のコストを算出してもよい。上述した消費量のパラメータに関する一パルス毎のコストは、ユーザインターフェース４０２０に表示されてもよい。レーザ制御部８００は、上述した消費量のパラメータに関する複数のパルスにわたる累積コストを算出してもよい。上述した消費量のパラメータに関する複数のパルスにわたる累積コストは、ユーザインターフェース４０２０に表示されてもよい。上述したパラメータの値は、ＦＤＣシステム４０３０に送信されてもよい。

The parameter values described above may be transmitted to the exposure apparatus control unit 2010. The parameter values described above may be transmitted to the computer via the Internet line 4010. The parameter values described above may be displayed on the user interface 4020. The laser controller 800 may calculate a ratio (%) of the value of the consumption parameter described above to the reference value of the consumption parameter described above. The ratio (%) of the consumption parameter value described above to the consumption parameter reference value described above may be displayed on the user interface 4020. The laser controller 800 may calculate the cost for each pulse related to the consumption parameter described above. The cost per pulse for the consumption parameter described above may be displayed on the user interface 4020. The laser controller 800 may calculate an accumulated cost over a plurality of pulses related to the consumption parameter described above. The accumulated cost over multiple pulses for the consumption parameter described above may be displayed on the user interface 4020. The parameter values described above may be transmitted to the FDC system 4030.

3.3 Energy Saving and Resource Saving in the Laser Device According to the First Embodiment of the Present Disclosure FIG. 16 illustrates energy saving depending on the laser gas conditions in the laser device according to the first embodiment of the present disclosure. It is a figure which illustrates the operation | movement for.

  In step S1401, the laser control unit 800 sets the operation mode of the laser device 1010 to the normal mode.

  In step S1402, the laser control unit 800 may determine whether or not the exposure apparatus control unit 2010 has requested a change in the operation mode. The change of the operation mode may be a change from the normal mode to the energy saving mode. If the exposure apparatus control unit 2010 requests a change in the operation mode, the laser control unit 800 may proceed to step S1403. If the exposure apparatus control unit 2010 does not request a change in the operation mode, the laser control unit 800 may repeat step S1402.

In step S1403, the laser control unit 800 may transmit performance deterioration prediction data for the laser apparatus 1010 to the exposure apparatus control unit 2010 when the operation mode is changed from the normal mode to the energy saving mode. The performance deterioration prediction data for the laser device 1010 is a storage unit (not shown) included in the laser control unit 800.
May be stored. The performance deterioration prediction data for the laser device 1010 may be in the range of the energy dispersion σE of the laser light (for example, the maximum value and the minimum value of the energy dispersion σE of the laser light). The energy dispersion σE of the laser light may be a dispersion of energy values of the laser light for a plurality of pulses measured by the pulse energy sensor 520.

  In step S1404, the laser control unit 800 may determine whether or not the performance deterioration prediction data transmitted to the exposure apparatus control unit 2010 is permitted by the exposure apparatus control unit 2010. If the performance deterioration prediction data is permitted by the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1405. If the performance deterioration prediction data is not permitted by the exposure apparatus control unit 2010, the laser control unit 800 may return to step S1402.

  In step S1405, the laser control unit 800 may change the operation mode of the laser device 1010 from the normal mode to the energy saving mode.

  In step S1406, the laser control unit 800 may determine whether or not the exposure apparatus control unit 2010 has requested a change in the operation mode. The change of the operation mode may be a change from the energy saving mode to the normal mode. If the exposure apparatus control unit 2010 requests a change in the operation mode, the laser control unit 800 may proceed to step S1407. If the exposure apparatus control unit 2010 does not request a change in the operation mode, the laser control unit 800 may repeat step S1406.

  In step S1407, the laser control unit 800 may change the operation mode of the laser device 1010 from the energy saving mode to the normal energy mode.

  As described above, the laser control unit 800 may change the operation mode of the laser device 1010 and achieve energy saving of the laser device 1010 in response to a request to change the operation mode from the exposure apparatus control unit 2010. .

  FIG. 17 is a diagram illustrating the relationship between the total pressure of the laser gas, the charging voltage, and the energy dispersion in the laser apparatus according to the first embodiment of the present disclosure. The horizontal axis in FIG. 17 may indicate the total pressure of the laser gas in the chamber 200. The vertical axis in FIG. 17 may indicate the received voltage Vhv or the laser beam energy dispersion σE applied between the first electrode 250a and the second electrode 250b by the charger 600.

  In the laser device 1010, the set value of the energy of the laser beam and the partial pressure of the fluorine gas contained in the laser gas may be constant. When the set value of the energy of the laser beam and the partial pressure of the fluorine gas contained in the laser gas are constant, the charger 600 applies between the first electrode 250a and the second electrode 250b as the total pressure Pt of the laser gas increases. The charged charging voltage Vhv may be reduced. As the total pressure Pt of laser gas increases, the power consumption and power consumption of the charger 600 may be reduced. However, the pulse energy dispersion σE of the laser beam can increase with an increase in the total pressure Pt of the laser gas. The performance deterioration data transmitted to the exposure apparatus controller 2010 may be data relating to an increase in the pulse energy dispersion σE of the laser light with respect to an increase in the total pressure Pt of the laser gas.

  FIG. 18 is a diagram illustrating a subroutine for changing from the normal mode to the energy saving mode by increasing the total pressure of the laser gas in the laser apparatus according to the first embodiment of the present disclosure.

  The subroutine illustrated in FIG. 18 may be a routine for executing step S1405 in the main routine illustrated in FIG.

  In step S1501, the laser control unit 800 may control the laser device 1010 so that the laser device 1010 performs laser oscillation.

  In step S1502, the laser control unit 800 may measure the energy dispersion σE of the laser light by using the pulse energy sensor 520. The laser control unit 800 may measure the total pressure Pt of the laser gas by using the pressure sensor 270.

  In step S1503, the laser controller 800 may increase the set value of the total pressure Pt of the laser gas.

  In step S1504, the laser control unit 800 may control the supply of the laser gas to the chamber 200 through the gas control unit 810 based on the set value of the total pressure Pt of the laser gas. The supply of the laser gas to the chamber 200 may be controlled so that the total pressure Pt of the laser gas becomes a changed set value of the total pressure Pt of the laser gas.

  In step S1505, the laser control unit 800 may measure the energy dispersion σE of the laser light by using the pulse energy sensor 520. The laser control unit 800 may measure the total pressure Pt of the laser gas by using the pressure sensor 270.

  In step S1506, the laser controller 800 may determine whether or not the laser light energy dispersion σE is greater than a predetermined minimum value σEmin of the laser light energy dispersion σE. The predetermined minimum value σEmin of the energy dispersion σE of the laser beam may be determined according to use conditions of the semiconductor exposure apparatus 2000. When the energy dispersion σE of the laser light is larger than a predetermined minimum value σEmin of the energy dispersion σE of the laser light, the laser control unit 800 may proceed to step S1507. If the laser light energy dispersion σE is equal to or smaller than a predetermined minimum value σEmin of the laser light energy dispersion σE, the laser control unit 800 may proceed to step S1503.

  In step S1507, the laser controller 800 may determine whether or not the energy dispersion σE of the laser light is smaller than a predetermined maximum value σEmax of the energy dispersion σE of the laser light. The predetermined maximum value σEmax of the energy dispersion σE of the laser beam may be determined according to use conditions of the semiconductor exposure apparatus 2000. When the laser light energy dispersion σE is smaller than a predetermined maximum value σEmax of the laser light energy dispersion σE, the laser controller 800 may return to the main routine. If the laser light energy dispersion σE is equal to or greater than a predetermined maximum value σEmax of the laser light energy dispersion σE, the laser control unit 800 may proceed to step S1508.

  In step S1508, the laser control unit 800 may decrease the set value of the total pressure Pt of the laser gas. After reducing the set value of the total pressure Pt of the laser gas, the laser control unit 800 may proceed to step S1504.

  As described above, the laser controller 800 may adjust the set value of the total pressure Pt of the laser gas so that the energy dispersion σE of the laser beam satisfies σEmin <σE <σEmax.

  When the energy dispersion σE of the laser beam is allowed under the use conditions of the semiconductor exposure apparatus 2000, the set value of the total pressure Pt of the laser gas in the energy saving mode is set to the set value of the total pressure Pt of the laser gas in the normal mode. May be increased. Thereby, the charging voltage Vhv applied between the first electrode 250a and the second electrode 250b by the charger 600 may be reduced and the power consumption of the charger 600 may be reduced.

  FIG. 19 is a diagram illustrating the relationship between the partial pressure of fluorine gas and the charging voltage or energy dispersion in the laser gas in the laser apparatus according to the first embodiment of the present disclosure. The horizontal axis in FIG. 19 may indicate the partial pressure of fluorine gas in the laser gas in the chamber 200. The vertical axis in FIG. 19 may indicate the received voltage Vhv or the laser beam energy dispersion σE applied between the first electrode 250a and the second electrode 250b by the charger 600.

In the laser device 1010, the set value of the laser beam energy and the total pressure of the laser gas may be constant. When the set value of the laser beam energy and the total pressure of the laser gas are constant, it is applied between the first electrode 250a and the second electrode 250b by the charger 600 as the partial pressure P _F2 of the fluorine gas in the laser gas increases. The applied charging voltage Vhv may be reduced. The power consumption and power consumption of the charger 600 may be reduced with an increase in the partial pressure P _F2 of the fluorine gas in the laser gas. However, the pulse energy dispersion σE of the laser beam can increase with an increase in the partial pressure P _F2 of the fluorine gas in the laser gas. The performance deterioration data transmitted to the exposure apparatus controller 2010 may be data relating to an increase in the pulse energy dispersion σE of the laser light with respect to an increase in the partial pressure P _F2 of the fluorine gas in the laser gas.

  FIG. 20 is a diagram illustrating a subroutine for changing from the normal mode to the energy saving mode by increasing the partial pressure of the fluorine gas in the laser gas in the laser apparatus according to the first embodiment of the present disclosure.

  The subroutine illustrated in FIG. 20 may be a routine for executing step S1405 in the main routine illustrated in FIG.

  In step S1601, the laser control unit 800 may control the laser device 1010 so that the laser device 1010 performs laser oscillation.

In step S1602, the laser control unit 800 may measure the energy dispersion σE of the laser light by using the pulse energy sensor 520. The laser control unit 800 may measure the total pressure Pt of the laser gas by using the pressure sensor 270. The laser controller 800 determines the fluorine gas in the laser gas from the total pressure Pt of the laser gas, the flow rate of the laser gas supplied from the first gas cylinder 3010 to the chamber 200, and the flow rate of the laser gas supplied from the second gas cylinder 3020 to the chamber 200. The partial pressure P _F2 may be calculated.

In step S1603, the laser control unit 800 may control the supply of the laser gas to the chamber 200 through the gas control unit 810 so as to increase the partial pressure P _F2 of the fluorine gas in the laser gas.

  In step S1604, the laser control unit 800 may measure the energy dispersion σE of the laser light by using the pulse energy sensor 520.

  In step S1605, the laser controller 800 may determine whether or not the laser light energy dispersion σE is greater than a predetermined minimum value σEmin of the laser light energy dispersion σE. The predetermined minimum value σEmin of the energy dispersion σE of the laser beam may be determined according to use conditions of the semiconductor exposure apparatus 2000. When the energy dispersion σE of the laser light is larger than a predetermined minimum value σEmin of the energy dispersion σE of the laser light, the laser control unit 800 may proceed to step S1606. If the laser light energy dispersion σE is equal to or smaller than the predetermined minimum value σEmin of the laser light energy dispersion σE, the laser control unit 800 may proceed to step S1603.

  In step S1606, the laser controller 800 may determine whether or not the laser light energy dispersion σE is smaller than a predetermined maximum value σEmax of the laser light energy dispersion σE. The predetermined maximum value σEmax of the energy dispersion σE of the laser beam may be determined according to use conditions of the semiconductor exposure apparatus 2000. When the laser light energy dispersion σE is smaller than a predetermined maximum value σEmax of the laser light energy dispersion σE, the laser controller 800 may return to the main routine. If the laser light energy dispersion σE is equal to or greater than a predetermined maximum value σEmax of the laser light energy dispersion σE, the laser control unit 800 may proceed to step S1607.

In step S1607, the laser control unit 800 may control the supply of the laser gas to the chamber 200 through the gas control unit 810 so as to decrease the partial pressure P _F2 of the fluorine gas in the laser gas. After decreasing the partial pressure P _F2 of the fluorine gas in the laser gas, the laser control unit 800 may proceed to step S1604.

Thus, the laser controller 800 may adjust the partial pressure P _F2 of the fluorine gas in the laser gas so that the energy dispersion σE of the laser light satisfies σEmin <σE <σEmax.

Energy dispersive σE of the laser beam, if it is acceptable in terms of use of the semiconductor exposure apparatus 2000, the partial pressure P _F2 of the fluorine gas in the laser gas in the energy saving mode, the partial pressure P _F2 of the fluorine gas in the laser gas in the normal mode You may increase with respect to. Thereby, the charging voltage Vhv applied between the first electrode 250a and the second electrode 250b by the charger 600 may be reduced and the power consumption of the charger 600 may be reduced.

  FIG. 21 is a diagram illustrating an operation for energy saving and resource saving depending on the stop time in the laser apparatus according to the first embodiment of the present disclosure.

  In step S <b> 1701, the laser control unit 800 may determine whether or not an operation signal of the laser apparatus 1010 has been received from the exposure apparatus control unit 2010 in the semiconductor exposure apparatus 2000. When the operation signal of the laser apparatus 1010 is received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1702. When the operation signal of the laser apparatus 1010 is not received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to Step 1703.

  In step S1702, the laser controller 800 may supply helium gas and nitrogen gas to the band narrowing module 300 and the energy monitor 500 through the purge gas supply device 920, respectively. Next, the laser control unit 800 may supply cooling water to the laser device 1010. Next, the laser controller 800 may drive a motor 240 configured to rotate the cross flow fan 230. Next, the laser controller 800 may apply a charging voltage from the charger 600 between the first electrode 250a and the second electrode 250b.

  In step S <b> 1703, the laser control unit 800 may determine whether or not a stop signal and stop time Ts of the laser apparatus 1010 are received from the exposure apparatus control unit 2010 in the semiconductor exposure apparatus 2000. When the stop signal and stop time Ts of the laser apparatus 1010 are received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1704. When the stop signal and stop time Ts of the laser apparatus 1010 are not received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1701.

  In step S1704, the laser controller 800 may determine whether Ts is greater than a predetermined stop time Ts1. The predetermined stop time Ts1 may be, for example, 30 seconds. When Ts is larger than the predetermined stop time Ts1, the laser control unit 800 may proceed to step S1705. If Ts is not greater than the predetermined stop time Ts1, the laser control unit 800 may proceed to step S1701.

  In step S1705, the laser controller 800 may stop the application of the charging voltage between the first electrode 250a and the second electrode 250b from the charger 600.

  In step S1706, the laser controller 800 may determine whether Ts is greater than a predetermined stop time Ts2. The predetermined stop time Ts2 may be longer than the predetermined stop time Ts1. The predetermined stop time Ts2 may be, for example, a time of 3 minutes or more and 5 minutes or less. If Ts is greater than the predetermined stop time Ts2, the laser control unit 800 may proceed to step S1707. If Ts is not greater than the predetermined stop time Ts2, the laser control unit 800 may proceed to step S1701.

  In step S1707, the laser control unit 800 may stop the motor 240 configured to rotate the cross flow fan 230. The rotation of the cross flow fan 230 may be stopped by stopping the motor 240.

  In step S1708, the laser controller 800 may determine whether Ts is greater than a predetermined stop time Ts3. The predetermined stop time Ts3 may be longer than the predetermined stop time Ts2. The predetermined stop time Ts3 may be, for example, a time of 1 hour or more and 5 hours or less. If Ts is greater than the predetermined stop time Ts3, the laser control unit 800 may proceed to step S1709. If Ts is not greater than the predetermined stop time Ts3, the laser control unit 800 may proceed to step S1701.

  In step S1709, the laser control unit 800 may reduce or stop the supply of cooling water to the laser device 1010. The supply of cooling water to the laser device 1010 may be reduced to a minimum flow rate of the cooling water. By reducing or stopping the supply of cooling water to the laser device 1010, cooling of the components of the laser device 1010 may be reduced or stopped.

  In step S1710, the laser control unit 800 may determine whether Ts is greater than a predetermined stop time Ts4. The predetermined stop time Ts4 may be longer than the predetermined stop time Ts3. The predetermined stop time Ts4 may be, for example, a time of 5 hours or more and 24 hours or less. If Ts is greater than the predetermined stop time Ts4, the laser control unit 800 may proceed to step S1711. If Ts is not greater than the predetermined stop time Ts4, the laser control unit 800 may proceed to step S1701.

  In step S <b> 1711, the laser control unit 800 may stop the supply of helium gas to the band narrowing module 300 and the supply of nitrogen gas to the energy monitor 500. Thereby, the cleaning of the optical system of the apparatus 1010 by the helium gas and nitrogen gas laser may be stopped.

  Thus, depending on the stop time Ts transmitted from the exposure apparatus control unit 2010, supply of purge gas to the laser apparatus 1010, supply of cooling water to the laser apparatus 1010, driving of the motor 240, and charge voltage At least one of the applications may be reduced or stopped. Depending on the stop time Ts transmitted from the exposure apparatus controller 2010, energy saving and resource saving in the laser apparatus 1010 may be performed.

  FIG. 22 is a diagram illustrating an operation for energy saving and resource saving by monitoring the stop time in the laser apparatus according to the first embodiment of the present disclosure.

  In step S1801, the laser controller 800 may supply helium gas and nitrogen gas to the band narrowing module 300 and the energy monitor 500 through the purge gas supply device 920, respectively.

  In step S1802, the laser control unit 800 may supply cooling water to the laser device 1010.

  In step S1803, the laser control unit 800 may drive the motor 240 configured to rotate the cross flow fan 230.

  In step S1804, the laser controller 800 may apply a charging voltage from the charger 600 between the first electrode 250a and the second electrode 250b.

  In step S1805, the laser control unit 800 may transmit a trigger acceptance signal to the exposure apparatus control unit 2010. The trigger acceptance signal may be a signal indicating that the laser control unit 800 is on standby to receive a trigger from the exposure apparatus control unit 2010.

  In step S1806, the laser control unit 800 may reset the time T of a timer (not shown) included in the laser control unit 800 and start measuring the time T by the timer.

  In step S1807, the laser control unit 800 may determine whether the operation signal of the laser device 1010 is not received from the exposure apparatus control unit 2010 (the operation signal of the laser device 1010 is off). When the operation signal of the laser apparatus 1010 is not received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1808. When the operation signal of the laser apparatus 1010 is received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1806.

  In step S1808, the laser controller 800 may determine whether T is greater than a predetermined stop time Ts1. The predetermined stop time Ts1 may be 5 seconds, for example. If Ts is greater than the predetermined stop time Ts1, the laser control unit 800 may proceed to step S1809. If Ts is not greater than the predetermined stop time Ts1, the laser control unit 800 may proceed to step S1810.

  In step S1809, the laser controller 800 may stop the application of the charging voltage between the first electrode 250a and the second electrode 250b from the charger 600.

  In step S <b> 1810, the laser control unit 800 may determine whether or not the operation signal of the laser device 1010 is received from the exposure apparatus control unit 2010 (the operation signal of the laser device 1010 is off). When the operation signal of the laser apparatus 1010 is not received from the exposure apparatus control unit 2010, the laser control unit 800 may repeat step S1808. When the operation signal of the laser apparatus 1010 is received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1806.

  In step S1811, the laser controller 800 may determine whether Ts is greater than a predetermined stop time Ts2. The predetermined stop time Ts2 may be longer than the predetermined stop time Ts1. The predetermined stop time Ts2 may be 1 minute, for example. If Ts is greater than the predetermined stop time Ts2, the laser control unit 800 may proceed to step S1812. If Ts is not greater than the predetermined stop time Ts2, the laser control unit 800 may proceed to step S1813.

  In step S1812, the laser control unit 800 may stop the motor 240 configured to rotate the cross flow fan 230. The rotation of the cross flow fan 230 may be stopped by stopping the motor 240.

  In step S <b> 1813, the laser control unit 800 may determine whether or not the operation signal of the laser device 1010 is not received from the exposure apparatus control unit 2010 (the operation signal of the laser device 1010 is off). When the operation signal of the laser apparatus 1010 is not received from the exposure apparatus control unit 2010, the laser control unit 800 may repeat step S1811. When the operation signal of the laser apparatus 1010 is received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1804.

  In step S1814, the laser control unit 800 may determine whether Ts is greater than a predetermined stop time Ts3. The predetermined stop time Ts3 may be longer than the predetermined stop time Ts2. The predetermined stop time Ts3 may be, for example, 10 minutes. If Ts is greater than the predetermined stop time Ts3, the laser control unit 800 may proceed to step S1815. If Ts is not greater than the predetermined stop time Ts3, the laser control unit 800 may proceed to step S1816.

  In step S1815, the laser control unit 800 may reduce or stop the supply of cooling water to the laser device 1010. The supply of cooling water to the laser device 1010 may be reduced to a minimum flow rate of the cooling water. By reducing or stopping the supply of cooling water to the laser device 1010, cooling of the components of the laser device 1010 may be reduced or stopped.

  In step S <b> 1816, the laser control unit 800 may determine whether or not the operation signal of the laser device 1010 is not received from the exposure apparatus control unit 2010 (the operation signal of the laser device 1010 is off). When the operation signal of the laser apparatus 1010 is not received from the exposure apparatus control unit 2010, the laser control unit 800 may repeat step S1814. When the operation signal of the laser apparatus 1010 is received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1803.

  In step S1817, the laser control unit 800 may determine whether Ts is greater than a predetermined stop time Ts4. The predetermined stop time Ts4 may be longer than the predetermined stop time Ts3. The predetermined stop time Ts4 may be 1 hour, for example. When Ts is larger than the predetermined stop time Ts4, the laser control unit 800 may proceed to step S1818. If Ts is not greater than the predetermined stop time Ts4, the laser control unit 800 may proceed to step S1819.

  In step S <b> 1818, the laser control unit 800 may stop the supply of helium gas to the band narrowing module 300 and the supply of nitrogen gas to the energy monitor 500. Thereby, the cleaning of the optical system of the apparatus 1010 by the helium gas and nitrogen gas laser may be stopped.

  In step S1819, the laser control unit 800 may determine whether or not the operation signal of the laser device 1010 is not received from the exposure apparatus control unit 2010 (the operation signal of the laser device 1010 is off). When the operation signal of the laser apparatus 1010 is not received from the exposure apparatus control unit 2010, the laser control unit 800 may repeat step S1817. When the operation signal of the laser apparatus 1010 is received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1802.

  In step S1820, the laser control unit 800 may determine whether or not the operation signal of the laser device 1010 is not received from the exposure apparatus control unit 2010 (the operation signal of the laser device 1010 is off). When the operation signal of the laser apparatus 1010 is not received from the exposure apparatus control unit 2010, the laser control unit 800 may be on standby. When the operation signal of the laser apparatus 1010 is received from the exposure apparatus control unit 2010, the laser control unit 800 may proceed to step S1801.

  As described above, the time T during which the operation signal of the laser apparatus 1010 is not received from the exposure apparatus controller 2010 (the time during which the laser apparatus 1010 is stopped) T may be monitored. Depending on the time T during which the laser device 1010 is stopped, at least one of supply of purge gas to the laser device 1010, supply of cooling water to the laser device 1010, driving of the motor 240, and application of a charging voltage is reduced. Or it may be stopped. Depending on the time T when the laser device 1010 is stopped, energy saving and resource saving in the laser device 1010 may be performed.

  FIG. 23 is a diagram illustrating an operation for reducing the consumption of cooling water in the laser apparatus according to the first embodiment of the present disclosure.

In step S1901, the laser control unit 800 may read the power of the laser device 1010. The laser control unit 800 may read the power measured by the wattmeter 5010. The laser control unit 800 may read the total value of the power of the motor 240, the charger 600, the laser control unit 800, and other devices included in the laser device 1010. The electric power Ed of the charger 600 may be calculated according to an equation of Ed = (a · Vhv ² + b · Vhv + c) · f. Here, Vhv may be a charging voltage applied between the first electrode 250a and the second electrode 250b, a, b, and c may be predetermined coefficients, and f may be a pulse repetition frequency.

  In step S1902, the laser control unit 800 may control the flow rate L of the cooling water in the laser device 1010 based on the power of the laser device 1010. The flow rate L of the cooling water in the laser device 1010 may be controlled by using the flow rate adjustment valve Vw. The cooling water flow rate L in the laser device 1010 may be controlled to be proportional to the electric power Ed of the laser device 1010. A flow rate adjusting valve may be provided in each of the cooling water pipes in the laser device 1010. The cooling water flow rate L in the laser device 1010 may be controlled by a flow rate adjusting valve provided in a cooling water pipe in the laser device 1010. The flow rate of the cooling water passing through the charger 600 may be controlled by a flow rate adjusting valve provided in the piping for the cooling water passing through the charger 600 so as to be proportional to the electric power Ed of the charger 600. The flow rate of the cooling water passing through the pulse power module 700 may be controlled by a flow rate adjusting valve provided in the cooling water pipe passing through the pulse power module 700 so as to be proportional to the electric power Ed of the charger 600. . The flow rate of the cooling water passing through the heat exchanger 280 may be controlled by a flow rate adjusting valve provided in the piping for the cooling water passing through the heat exchanger 280 so as to be proportional to the electric power Ed of the charger 600. . The flow rate of the cooling water passing through the motor 240 may be controlled by a flow rate adjusting valve provided in a pipe for cooling water passing through the motor 240 so as to be proportional to the electric power Em of the motor.

  Thus, the consumption of cooling water in the laser device 1010 may be reduced by controlling the flow rate of the cooling water in the laser device 1010 based on the power of the laser device 1010.

  FIG. 24 is a diagram illustrating a configuration for reducing air consumption by ventilation in the laser apparatus according to the first embodiment of the present disclosure. The same reference numerals are assigned to the same components of the laser apparatus illustrated in FIG. 24 as those of the laser apparatus illustrated in FIG. 8, and the description of the components is omitted. Components of the semiconductor exposure apparatus illustrated in FIG. 24 that are the same as those of the semiconductor exposure apparatus illustrated in FIG. 8 will be assigned the same reference numerals and descriptions thereof will be omitted.

  An automatic butterfly valve 160 may be provided in the ventilation port 110 in the laser apparatus 1010. The automatic butterfly valve 160 may be connected to the laser control unit 800. The laser controller 800 may control the automatic butterfly valve 160 based on the power of the laser device 1010. The flow rate of air by ventilation in the laser device 1010 may be adjusted by controlling the automatic butterfly valve 160. The air flow rate by ventilation in the laser device 1010 may be adjusted to be proportional to the power of the laser device 1010. Air consumption due to ventilation in the laser device 1010 may be reduced by controlling the automatic butterfly valve 160.

4). Laser apparatus according to second embodiment of present disclosure 4.1 Configuration and operation of laser apparatus according to second embodiment of present disclosure FIG. 25 illustrates a configuration of a laser apparatus according to the second embodiment of the present disclosure. It is a figure illustrated. The same reference numerals are given to the components of the laser apparatus illustrated in FIG. 25 that are the same as the components of the laser apparatus illustrated in FIG. 3 or FIG. 8, and the description of the components is omitted. The same reference numerals are given to the same components of the semiconductor exposure apparatus illustrated in FIG. 25 as those of the semiconductor exposure apparatus illustrated in FIG. 3 or FIG. 8, and the description of the constituent elements will be omitted. .

  The laser device 1020 illustrated in FIG. 25 may include a master oscillator and a power oscillator.

  The master oscillator includes a first chamber 201, a first motor 241 and a first pulse power module 701 provided in the first chamber 201, a band narrowing module 300, and a first output coupling mirror 401. But you can. The first chamber 201, the first output coupling mirror 401, and the narrowband module 300 may be configured to form a laser resonator. The first pulse power module 701 may include a first semiconductor switch 711. The first pulse power module 701 may be configured to apply a pulse voltage between a pair of electrodes included in the first chamber 201. The first motor 241 may be provided to drive a cross flow fan included in the first chamber 201.

  The power oscillator may include a second chamber 202, a second motor 242 and a second pulse power module 702 provided in the second chamber 202, a second output coupling mirror 402, and a partial reflection mirror 405. . The second chamber 202, the second output coupling mirror 402, and the partially reflecting mirror 405 may be configured to form a laser resonator. The second pulse power module 702 may include a second semiconductor switch 712. The second pulse power module 701 may be configured to apply a pulse voltage between a pair of electrodes included in the second chamber 202. The second motor 242 may be provided to drive a cross flow fan included in the second chamber 202.

  The laser device 1020 includes a first high reflection mirror 403, a second high reflection mirror 404, a first energy monitor 501, a second energy monitor 502, a first charger 601, and a second charger 602. May be included.

  The mixed gas of fluorine, argon, and neon contained in the first gas cylinder 3010 may be supplied to the first chamber 201 and the second chamber 202 through the laser gas supply device 910. The mixed gas of argon and neon contained in the second gas cylinder 3020 may be supplied to the first chamber 201 and the second chamber 202 through the laser gas supply device 910. The gas contained in the first chamber 201 and the gas contained in the second chamber 202 may be exhausted into the housing 100 through the exhaust device 930.

  When the first semiconductor switch 711 is turned on, the pulse voltage Vhv1 may be applied between the pair of electrodes included in the first chamber 201 by the first charger 601 and the first pulse power module 701. When the second semiconductor switch 712 is turned on, the pulse voltage Vhv2 may be applied between the pair of electrodes included in the second chamber 202 by the second charger 601 and the second pulse power module 702.

  The wavelength band of the laser light generated by the discharge between the pair of electrodes included in the first chamber 201 may be narrowed by the band narrowing module 300. Laser light having a wavelength band narrowed by the narrowband module 300 may be output from the first output coupling mirror 401. The laser light output from the first output coupling mirror 401 may be reflected by the first high reflection mirror 403 and the second high reflection mirror 404. A part of the laser light reflected from the first high reflection mirror 403 and the second high reflection mirror 404 is incident on the second chamber 202 through the partial reflection mirror 405. The light incident on the second chamber 202 may be amplified between the partial reflection mirror 405 and the second output coupling mirror 402. The amplified laser light may enter the semiconductor exposure apparatus 2000 through the second output coupling mirror 402.

  A first energy sensor 501 may be provided between the first high reflection mirror 403 and the second high reflection mirror 404. The energy of the laser beam output from the first chamber 201 may be monitored by the first energy sensor 501. A second energy sensor 502 may be provided between the second output coupling mirror 402 and the semiconductor exposure apparatus 2000. The energy of the laser beam output from the second chamber 202 may be monitored by the second energy sensor 502. The pressure of the laser gas contained in the first chamber 201 may be measured by a pressure sensor provided in the first chamber 201. The pressure of the laser gas contained in the second chamber 202 may be measured by a pressure sensor provided in the second chamber 202.

  FIG. 26 is a diagram illustrating a configuration of the power system of the laser apparatus according to the second embodiment of the present disclosure. The same reference numerals are given to the same components of the laser apparatus illustrated in FIG. 26 as those of the laser apparatus illustrated in FIG. 4 or FIG. 25, and descriptions of the components are omitted. Components of the semiconductor exposure apparatus illustrated in FIG. 26 that are the same as those of the semiconductor exposure apparatus illustrated in FIG. 4 or FIG. 25 are given the same reference numerals, and descriptions thereof are omitted. .

  Regarding the power system of the laser device 1020, the first motor 241, the second motor 242, the first charger 601, the second charger 602, the laser controller 800, and other devices (not shown) It may be connected to a power source (not shown). Other devices may include a controller, such as a gas controller 810, and a system that holds power while the laser device 1020 is on standby. The first motor 241, the second motor 242, the first charger 601, the second charger 602, the laser controller 800, and other devices may be supplied with power from a power source. The first motor 241, the second motor 242, the first charger 601, and the second charger 602 may be supplied with power from a power source through the terminal block 5020 and the like.

  The power supplied from the power source to the first motor 241, the second motor 242, the first charger 601, the second charger 602, the laser controller 800, and other devices is measured by a wattmeter 5010. May be.

  The power supplied from the power source to the first motor 241, the second motor 242, the first charger 601, the second charger 602, the laser controller 800, and other devices is calculated by the laser controller 800. May be.

  The total power consumption Wh of the laser device 1020 is the power consumption Whm1 of the first motor 241, the power consumption Whm2 of the second motor 242, the power consumption Whc1 of the first charger 601, and the second charge. It may be calculated based on the power consumption amount Whc2 of the device 602 and the power consumption amount Whl of the laser control unit 800 and other devices. The overall power consumption amount Wh of the laser apparatus 1010 may be calculated according to an equation of Wh = Whm1 + Whm2 + Whc1 + Whc2 + Whl.

The power consumption amount Whm1 of the first motor 241 and the power consumption amount Whm2 of the second motor 242 are:
Em1 = α1 · P1 + β1
Whm1 = Em1 · Hm
Em2 = α2 · P2 + β2
Whm2 = Em2 · Hm
It may be calculated according to the following formula. Here, P1 and P2 are the pressure of the laser gas in the first chamber 201 and the pressure of the laser gas in the second chamber 202, respectively, and α1 and α2 are the gas pressure coefficient of the first chamber 201 and the gas of the second chamber 202, respectively. The pressure coefficient, β1 and β2 are the offset constant of the first chamber 201 and the offset constant of the second chamber 202, Em1 and Em2 are the power consumption of the first motor 241 and the second motor 242, respectively, and Hm is the first. The operation time of the first motor 201 and the second motor 202 may be used.
α1, α2, β1, and β2 may be measured in advance or may be design values. α1, α2, β1, and β2 may be stored in a storage unit (not shown) included in the laser control unit 800. The laser control unit 800 may read α1, α2, β1, and β2 from the storage unit.

  The power consumption amount Whc1 of the first charger 601 and the power consumption amount Whc2 of the second charger 602 may be calculated as follows.

One pulse of discharge energy Ed1 and Ed2 for the first charger 601 and the second charger 602 is:
Ed1 = a1 (Vhv1) ² + b2 (Vhv1) + c2
Ed2 = a2 (Vhv2) ² + b2 (Vhv2) + c2
It may be calculated according to the following formula. Here, Vhv1 and Vhv2 are respectively a charging voltage applied between a pair of electrodes in the first chamber 201 and a charging voltage applied between a pair of electrodes in the second chamber 202, a1, a2, b1, b2, c1, and c2 may be predetermined coefficients.
The predetermined coefficients a1, a2, b1, b2, c1, and c2 may be measured in advance or may be design values. The predetermined coefficients a1, a2, b1, b2, c1, and c2 may be stored in a storage unit (not shown) included in the laser control unit 800. The laser control unit 800 may read predetermined coefficients a1, a2, b1, b2, c1, and c2 from the storage unit.

The power consumption amount Whc1 of the first charger 601 and the power consumption amount Whc2 of the second charger 602 are a plurality of pulses for the first charger 601 and the second charger 602 with γ as a conversion factor. From the integrated values ΣEd1 and ΣEd2 of the discharge energies Ed1 and Ed2,
Whc1 = γ · ΣEd1
Whc2 = γ · ΣEd2
It may be calculated according to the following formula. γ may be 1/360000 kWh / J.

  The power consumption amount Whl of the laser control unit 800 and other devices may be calculated according to an expression of Whl = El · Hl. Here, El may be the power consumption of the laser control unit 800 and other devices, and Hl may be the time from the start to the end of calculation of the power consumption of the laser control unit 800 and other devices. H1 may be a fixed value independent of the state of operation of the laser device 1020.

  In this way, the power consumption amount Wh of the laser device 1020 may be calculated.

  The power supplied from the power source to the first motor 241, the second motor 242, the first charger 601, the second charger 602, the laser controller 800, and other devices is controlled by the laser controller 800. May be.

  FIG. 27 is a diagram illustrating a configuration of a cooling system of the laser apparatus according to the second embodiment of the present disclosure. The same reference numerals are given to the components of the laser apparatus illustrated in FIG. 27 that are the same as the components of the laser apparatus illustrated in FIG. 5 or FIG. Components of the semiconductor exposure apparatus illustrated in FIG. 27 that are the same as those of the semiconductor exposure apparatus illustrated in FIG. 5 or FIG. 25 are assigned the same reference numerals, and descriptions of those components are omitted. .

  Regarding the cooling system of the laser device 1020, the first motor 241, the second motor 242, the first heat exchanger 281 provided in the first chamber 201, and the first motor 281 provided in the second chamber 202 are used. The second heat exchanger 282, the first charger 601, the second charger 602, the first pulse power module 701, and the second pulse power module 702 include a first manifold 6011 and a second manifold 6012. And may be connected to a cooling water tank (not shown) through a pipe. A first motor 241, a second motor 242, a first heat exchanger 281, a second heat exchanger 282, a first charger 601, a second charger 602, a first pulse power module 701, The second pulse power module 702 may be supplied with cooling water from the cooling water tank through the first manifold 6011 and the piping. A first motor 241, a second motor 242, a first heat exchanger 281, a second heat exchanger 282, a first charger 601, a second charger 602, a first pulse power module 701, And the second pulse power module 702 may be cooled by cooling water. A first motor 241, a second motor 242, a first heat exchanger 281, a second heat exchanger 282, a first charger 601, a second charger 602, a first pulse power module 701, The cooling water supplied to the second pulse power module 702 may be returned to the cooling water tank through the second manifold 6012 and piping.

  A first motor 241, a second motor 242, a first heat exchanger 281, a second heat exchanger 282, a first charger 601, a second charger 602, a first pulse power module 701, The flow rate of the cooling water supplied to the second pulse power module 702 may be adjusted by a flow rate adjustment valve Vw provided in the pipe. The flow rate adjustment valve Vw may be controlled by the laser control unit 800.

  The flow rate of the cooling water passing through the first charger 601 may be measured by the flow meter F11. The flow rate of the cooling water passing through the first pulse power module 701 may be measured by the flow meter F12. The flow rate of the cooling water passing through the first heat exchanger 281 may be measured by the flow meter F13. The flow rate of the cooling water passing through the first motor 241 may be measured by the flow meter F14. The flow rate of the cooling water passing through the second charger 602 may be measured by the flow meter F21. The flow rate of the cooling water passing through the second pulse power module 702 may be measured by the flow meter F22. The flow rate of the cooling water passing through the second heat exchanger 282 may be measured by the flow meter F23. The flow rate of the cooling water passing through the second motor 242 may be measured by the flow meter F24. The flow rate of the cooling water measured by the flow meter F11, the flow meter F12, the flow meter F13, the flow meter F14, the flow meter F21, the flow meter F22, the flow meter F23, and the flow meter F24 is transmitted to the laser controller 800. Also good.

  The total flow rate F (T) of the cooling water flowing to the laser device 1020 at time T is F = F11 (T) + F12 (T) + F13 (T) + F14 (T) + F21 (T) + F22 (T) + F23 (T) It may be calculated according to the equation + F24 (T). Here, F11 (T), F12 (T), F13 (T), F14 (T), F21 (T), F22 (T), F23 (T), and F24 (T) are flowmeters F11, It may be the flow rate of the cooling water measured by F12, F13, F14, F21, F22, F23, and F24.

4.2 Energy Saving and Resource Saving in the Laser Device According to the Second Embodiment of the Present Disclosure FIG. 28 illustrates a configuration for reducing the amount of air consumed by ventilation in the laser device according to the second embodiment of the present disclosure. It is a figure to do. The same reference numerals are given to the same components of the laser apparatus illustrated in FIG. 28 as those of the laser apparatus illustrated in FIG. 24 or FIG. 25, and descriptions of the components are omitted. Components of the semiconductor exposure apparatus illustrated in FIG. 28 that are the same as those of the semiconductor exposure apparatus illustrated in FIG. 24 or FIG. 25 are assigned the same reference numerals, and descriptions of those components are omitted. .

  An automatic butterfly valve 160 may be provided in the ventilation port 110 in the laser apparatus 1020. The automatic butterfly valve 160 may be connected to the laser control unit 800. The laser control unit 800 may control the automatic butterfly valve 160 based on the power of the laser device 1020. The air flow rate due to ventilation in the laser device 1020 may be adjusted by controlling the automatic butterfly valve 160. The air flow rate by ventilation in the laser device 1020 may be adjusted to be proportional to the power of the laser device 1020. Air consumption due to ventilation in the laser device 1020 may be reduced by controlling the automatic butterfly valve 160.

  FIG. 29 is a diagram illustrating a configuration of a purge gas system of a laser apparatus according to the second embodiment of the present disclosure. The same reference numerals are given to the components of the laser apparatus illustrated in FIG. 29 that are the same as the components of the laser apparatus illustrated in FIG. 6 or FIG. 25, and descriptions of the components are omitted. The same components as those of the semiconductor exposure apparatus illustrated in FIG. 29 that are the same as those of the semiconductor exposure apparatus illustrated in FIG. 6 or FIG. 25 are given the same reference numerals, and descriptions thereof are omitted. .

  For the purge gas system of the laser device 1020, a fourth gas cylinder 3040 containing nitrogen gas and a fifth gas cylinder 3050 containing helium gas may be provided.

  Nitrogen gas is supplied from the fourth gas cylinder 3040 to the first chamber 201, the second chamber 202, the second energy monitor 502, and the optical pulse stretcher (OPS) 7040 through the first gas manifold 7010 and piping. May be. Nitrogen gas may be exhausted into the housing 100 through the first chamber 201 or the second gas manifold 7020. The first chamber 201, the second chamber 202, the second energy monitor 502, and the optical pulse stretcher 7040 may be cleaned with nitrogen gas.

  The optical pulse stretcher 7040 may be configured to increase the pulse width of the laser light output from the laser device 1020. The optical pulse stretcher 7040 may include a half mirror and a mirror so that the laser light transmitted through the half mirror and the laser light reflected from the half mirror have an optical path difference or a phase difference.

  The helium gas may be supplied from the fifth gas cylinder 3050 to the narrowband module 300 through a pipe. The helium gas may be exhausted into the housing 100 through the first chamber 201. The band narrowing module 300 may be cleaned with helium gas.

  A valve may be provided between the fourth gas cylinder 3040 and the first gas manifold 7010. An automatic nitrogen gas flow controller (not shown) connected to and controlled by the laser controller 800 may be provided between the fourth gas cylinder 3040 and the first gas manifold 7010. A bypass valve and a nitrogen gas flow controller may be provided in piping from the first gas manifold 7010 to the first chamber 201, the second chamber 202, the second energy monitor 502, and the optical pulse stretcher 7040. The flow rate of nitrogen gas supplied from the fourth gas cylinder 3040 to the first chamber 201, the second chamber 202, the second energy monitor 502, and the optical pulse stretcher 7040 is a valve, a bypass valve, and a nitrogen gas flow rate adjustment. May be adjusted by a vessel. The flow rate of nitrogen gas supplied from the fourth gas cylinder 3040 to the first chamber 201, the second chamber 202, the second energy monitor 502, and the optical pulse stretcher 7040 is more efficient by adjusting the bypass valve. May be adjusted. A nitrogen gas flow meter may be provided in a pipe provided so that nitrogen gas is exhausted into the housing 100 through the second manifold 7020. Alternatively, a nitrogen gas flow meter may be provided in the piping between the fourth gas cylinder 3040 and the first gas manifold 7010. The flow rate of nitrogen gas exhausted from the fourth gas cylinder 3040 into the housing 100 may be measured by a nitrogen gas flow meter.

  A valve and a helium gas flow rate controller may be provided in the pipe from the fifth gas cylinder 3050 to the band narrowing module 300. The flow rate of helium gas supplied from the fifth gas cylinder 3050 to the band narrowing module 300 may be adjusted by a valve and a helium gas flow rate regulator. A helium gas flow meter may be provided in the pipe from the fifth gas cylinder 3050 to the band narrowing module 300. The flow rate of helium gas supplied from the fifth gas cylinder 3050 to the band narrowing module 300 may be measured by a helium gas flow meter.

  Valves provided in piping from the fourth gas cylinder 3040 to the first chamber 201, the second chamber 202, the second energy monitor 502, and the optical pulse stretcher 7040, and the band narrowing from the fifth gas cylinder 3050 The valves provided in the pipes up to the module 300 may be connected to the laser control unit 800 and controlled by the laser control unit 800. The flow rate of nitrogen gas measured by the nitrogen gas flow meter may be transmitted to the laser controller 800. The flow rate of helium gas measured by the helium gas flow meter may be transmitted to the laser controller 800.

  An oxygen concentration meter 7030 may be provided in a pipe provided so that nitrogen gas is exhausted into the housing 100 through the second manifold 7020. The oxygen concentration meter 7030 may be provided so as to measure the concentration of oxygen gas as an impurity contained in nitrogen gas exhausted into the housing 100 through the second manifold 7020. The concentration of oxygen gas as an impurity contained in the nitrogen gas may be transmitted to the laser controller 800. The concentration of oxygen gas as an impurity measured by the oxygen concentration meter 7030 may be controlled by adjusting at least one of a nitrogen gas valve and a nitrogen gas flow controller.

  FIG. 30A is a diagram illustrating the relationship between the concentration of oxygen gas as an impurity contained in nitrogen gas and the time for supplying nitrogen gas in the laser apparatus according to the second embodiment of the present disclosure. In FIG. 30A, the dotted line illustrates the case where the bypass valve is closed in the laser device 1020. In FIG. 30A, the solid line illustrates the case where the bypass valve is opened in the laser device 1020. As illustrated in FIG. 30A, when the time for supplying nitrogen gas is increased, the concentration of oxygen gas as an impurity contained in nitrogen gas may be decreased. As illustrated in FIG. 30A, the concentration of oxygen gas when the bypass valve is opened may be decreased in a shorter time than when the bypass valve is closed. H in FIG. 30A indicates that the concentration of oxygen gas as an impurity contained in the nitrogen gas from the start of supply of the nitrogen gas is an allowable oxygen gas concentration (the maximum value of the concentration of oxygen gas that may be contained as an impurity in the nitrogen gas ) Is shown. The allowable oxygen gas concentration may be 10 ppm, for example.

  FIG. 30B is a diagram illustrating a first example of a method for reducing the consumption of nitrogen gas in the laser apparatus according to the second embodiment of the present disclosure.

  In step S2001, the laser control unit 800 may determine whether or not to supply nitrogen gas to the laser device 1020. When supplying nitrogen gas to the laser device 1020, the laser control unit 800 supplies the nitrogen gas to the laser device 1020 by using a valve and a nitrogen gas flow rate regulator provided in the pipe, and at step S2002. You may proceed to. When nitrogen gas is not supplied to the laser device 1020, step S2001 may be repeated.

  In step S2002, the laser control unit 800 may reset the time T of a timer (not shown) included in the laser control unit 800 and start measuring the time T by the timer.

  In step S2003, the laser control unit 800 may open a bypass valve provided in the pipe.

  In step S2004, it may be determined whether or not the time T measured by the timer is greater than the predetermined time H. If the time T measured by the timer is greater than the predetermined time H, the laser control unit 800 may proceed to step S2005. If the time T measured by the timer is equal to or shorter than the predetermined time H, step S2004 may be repeated.

  In step S2005, the laser control unit 800 may close a bypass valve provided in the pipe.

  The amount of nitrogen gas supplied to the laser device 1020 may be increased by opening the bypass valve until the time from the supply of nitrogen gas in the laser device 1020 reaches a predetermined time H. The amount of nitrogen gas supplied to the laser device 1020 may be increased by opening the bypass valve until the concentration of oxygen gas as an impurity contained in the nitrogen gas reaches an allowable oxygen gas concentration. Nitrogen gas may be supplied to the laser device 1020 so that the concentration of oxygen gas as an impurity contained in the nitrogen gas is more efficiently reduced by opening the bypass valve.

  When the time from the supply of nitrogen gas in the laser device 1020 reaches a predetermined time H, the amount of nitrogen gas supplied to the laser device 1020 may be reduced by closing the bypass valve. When the concentration of oxygen gas as an impurity contained in the nitrogen gas becomes an allowable oxygen gas concentration, the amount of nitrogen gas supplied to the laser device 1020 may be reduced by closing the bypass valve. By closing the bypass valve, the nitrogen gas may be supplied to the laser device 1020 so that the concentration of oxygen gas as an impurity contained in the nitrogen gas is equal to or lower than the allowable oxygen gas concentration.

  Instead of the bypass valve provided in the laser device 1020, an automatic nitrogen gas flow rate controller connected to and controlled by the laser controller 800 is provided between the fourth gas cylinder 3040 and the first gas manifold 7010. Also good. The amount of nitrogen gas supplied to the laser device 1020 may be increased by an automatic nitrogen gas flow controller until the time from the supply of nitrogen gas in the laser device 1020 reaches a predetermined time H.

  Thus, the consumption amount of nitrogen gas in the laser apparatus according to the second embodiment of the present disclosure may be reduced.

  FIG. 30C is a diagram illustrating a second example of a method for reducing consumption of nitrogen gas in a laser apparatus according to the second embodiment of the present disclosure.

  In step S <b> 2101, the laser control unit 800 may determine whether or not to supply nitrogen gas to the laser device 1020. When supplying the nitrogen gas to the laser device 1020, the laser controller 800 supplies the nitrogen gas to the laser device 1020 by using a valve and a nitrogen gas flow rate controller provided in the pipe, and at step S2102. You may proceed to. When nitrogen gas is not supplied to the laser device 1020, step S2101 may be repeated.

  In step S2102, the laser control unit 800 may measure the concentration C of oxygen gas as an impurity contained in the nitrogen gas by using the oxygen concentration meter 7030.

  In step S2103, the laser control unit 800 may open a bypass valve provided in the pipe.

In step S2104, it may be determined whether or not the measured value of the concentration C of oxygen gas as an impurity contained in the nitrogen gas is equal to or higher than the allowable oxygen gas concentration. If the measured value of the concentration C of oxygen gas as an impurity contained in the nitrogen gas is greater than or equal to the allowable oxygen gas concentration C _O2 , the laser control unit 800 may proceed to step S2105. If the measured value of the concentration C of oxygen gas as an impurity contained in the nitrogen gas is smaller than the allowable oxygen gas concentration C _O2 , step S2104 may be repeated.

  In step S2105, the laser controller 800 may close a bypass valve provided in the pipe.

  The amount of nitrogen gas supplied to the laser device 1020 may be increased by opening the bypass valve until the measured value of the concentration of oxygen gas as an impurity contained in the nitrogen gas reaches an allowable oxygen gas concentration. Nitrogen gas may be supplied to the laser device 1020 so that the concentration of oxygen gas as an impurity contained in the nitrogen gas is more efficiently reduced by opening the bypass valve.

  When the measured value of the concentration of oxygen gas as an impurity contained in the nitrogen gas reaches the allowable oxygen gas concentration, the amount of nitrogen gas supplied to the laser device 1020 may be reduced by closing the bypass valve. By closing the bypass valve, the nitrogen gas may be supplied to the laser device 1020 so that the concentration of oxygen gas as an impurity contained in the nitrogen gas is equal to or lower than the allowable oxygen gas concentration.

  Instead of the bypass valve provided in the laser device 1020, an automatic nitrogen gas flow rate controller connected to and controlled by the laser controller 800 is provided between the fourth gas cylinder 3040 and the first gas manifold 7010. Also good. The amount of nitrogen gas supplied to the laser device 1020 may be increased by an automatic nitrogen gas flow controller until the measured value of the concentration of oxygen gas as an impurity contained in the nitrogen gas reaches an allowable oxygen gas concentration. .

  Thus, the consumption amount of nitrogen gas in the laser apparatus according to the second embodiment of the present disclosure may be reduced.

5. Others 5.1 Pulse Power Module FIG. 31 is a diagram illustrating a pulse power module according to an embodiment of the present disclosure.

  The pulse power module 700 may be connected to the charger 600 and the chamber 200. The pulse power module 700 and the charger 600 may be connected to the laser controller 800.

When the charger 600 receives a charging signal from the laser controller 800, the charger 600 may apply the charging voltage Vhv to a charging capacitor having a capacity C ₀ included in the pulse power module 700. The energy stored in the charging capacitor having the capacity C ₀ by the charging voltage Vhv by the charger 600 may be (1/2) C ₀ (Vhv) ² . The energy of the discharge per pulse in the chamber 200 may be (1/2) C ₀ (Vhv) ² .

  A pulse voltage may be generated by transmitting a trigger Tr relating to discharge from the laser controller 800 to the semiconductor switch included in the pulse power module 700.

The pulse power module 700 includes a transformer TC ₁ , magnetic switches MS ₁ , MS ₂ , and MS ₃ , and capacitors C ₁ , C ₂ , and C ₃ in addition to a semiconductor capacitor 710 and a charging capacitor having a capacity C _0. May be included. The transformer TC ₁ , the magnetic switches MS ₁ , MS ₂ , and MS ₃ , and the capacitors C ₁ , C ₂ , and C ₃ included in the pulse power module 700 may form a magnetic pulse compression circuit. The pulse width of the pulse voltage may be compressed by the magnetic pulse compression circuit in the pulse power module 700.

  A pulse voltage having a compressed pulse width may be applied to the current introduction terminal 250 c and the electrode holder 290 included in the chamber 200. A pulse voltage having a compressed pulse width is connected between the first electrode 250 a connected to the current introduction terminal 250 c and shaped by the electric insulator 260 and the second electrode 250 b connected to the electrode holder 290. It may be applied. A pulse voltage applied between the first electrode 250a and the second electrode 250b may cause discharge of the laser gas supplied between the first electrode 250a and the second electrode 250b. Laser light may be generated by discharging a laser gas.

  The laser gas supplied between the first electrode 250 a and the second electrode 250 b may be circulated in the chamber 200 by the cross flow fan 230. The laser gas circulated by the cross flow fan 230 may be cooled by the heat exchanger 280.

5.2 Control unit (controller)
FIG. 32 is a diagram illustrating a control unit according to an embodiment of the present disclosure.

  Each control part in embodiment mentioned above may be comprised by general purpose control equipment, such as a computer and a programmable controller. For example, it may be configured as follows.

<Configuration>
The control unit includes a processing unit 8000, a storage memory 8005 connected to the processing unit 8000, a user interface 8010, a parallel I / O controller 8020, a serial I / O controller 8030, A / D, and D / A. And a converter 8040. The processing unit 8000 may include a CPU 8001, a memory 8002, a timer 8003, and a GPU 8004 connected to the CPU 8001.

<Operation>
The processing unit 8000 may read a program stored in the storage memory 8005. The processing unit 8000 may execute the read program, read data from the storage memory 8005 in accordance with execution of the program, or store data in the storage memory 8005.

  The parallel I / O controller 8020 may be connected to a device capable of communication via a parallel I / O port. The parallel I / O controller 8020 may control communication using a digital signal via the parallel I / O port, which is performed in the process in which the processing unit 8000 executes the program.

  The serial I / O controller 8030 may be connected to a device capable of communication via a serial I / O port. The serial I / O controller 8030 may control communication by a digital signal through the serial I / O port, which is performed in the process in which the processing unit 8000 executes a program.

  The A / D and D / A converter 8040 may be connected to a communicable device via an analog port. The A / D and D / A converter 8040 may control communication using an analog signal through an analog port, which is performed in the process in which the processing unit 8000 executes a program.

  The user interface 8010 may be configured such that the operator displays the execution process of the program by the processing unit 8000, and causes the processing unit 8000 to stop the program execution or interrupt processing by the operator.

  The CPU 8001 of the processing unit 8000 may perform program calculation processing. The memory 8002 may temporarily store a program during the course of execution of the program by the CPU 8001 or temporarily store data during a calculation process. The timer 8003 may measure time and elapsed time, and output the time and elapsed time to the CPU 8001 according to execution of the program. When the image data is input to the processing unit 8000, the GPU 8004 may process the image data according to execution of the program and output the result to the CPU 8001.

<Connected equipment>
The device connected to the parallel I / O controller 8020 and capable of communicating via the parallel I / O port may be another control unit or the like.

  The device connected to the serial I / O controller 8030 and capable of communicating via the serial I / O port may be a DC high-voltage power supply or the like.

  A device connected to the A / D and D / A converter 8040 and capable of communicating via an analog port may be a pressure sensor or the like.

5.3 Computer-readable recording medium FIG. 33 is a diagram illustrating a computer-readable recording medium according to an embodiment of the present disclosure.

  A CD-ROM 9010 as a computer-readable recording medium stores a program for calculating energy consumption and resource consumption in the laser apparatus according to the embodiment of the present disclosure and displaying the calculation on the display. The program recorded on the CD-ROM 9010 may be read and executed by a general-purpose computer. The computer-readable recording medium may be a floppy (registered trademark) disk, DVD-ROM, BD-ROM, or hard disk.

  The above description is intended to be illustrative only and not limiting. Thus, it will be apparent to one skilled in the art that modifications may be made to the embodiments of the present disclosure without departing from the scope of the appended claims.

  Terms used throughout this specification and the appended claims should be construed as "non-limiting" terms. For example, the terms “include” or “included” should be interpreted as “not limited to those described as included”. The term “comprising” should be interpreted as “not limited to what is described as having”. Also, the indefinite article “a” or “an” in the specification and the appended claims should be interpreted to mean “at least one” or “one or more”.

DESCRIPTION OF SYMBOLS 100 Housing 110 Ventilation port 120 Laser emission window 130 1st inlet port 140 2nd inlet port 150 Wind speed sensor 160 Automatic butterfly valve 200 Chamber 201 1st chamber 202 2nd chamber 210 1st window 220 2nd window Window 230 Crossflow fan 240 Motor 241 First motor 242 Second motor 250a First electrode 250b Second electrode 250c Current introduction terminal 260 Electrical insulator 270 Pressure sensor 280 Heat exchanger 281 First heat exchanger 282 Second heat exchanger 290 Electrode holder 300 Narrow band module 310 Prism beam expander 320 Grating 400 Output coupling mirror 401 First output coupling mirror 402 Second output coupling mirror 403 One high reflection mirror 404 Second high reflection mirror 405 Partial reflection mirror 500 Energy monitor 501 First energy monitor 502 Second energy monitor 510 Beam splitter 520 Pulse energy sensor 600 Charger 601 First charger 602 Second Charger 700 pulse power module 701 first pulse power module 702 second pulse power module 710 semiconductor switch 711 first semiconductor switch 712 second semiconductor switch 800 laser control unit 810 gas control unit 820 other device 910 laser gas Supply device 920 Purge gas supply device 930 Exhaust device 940 Vacuum pump 950 Fluorine gas trap 1000, 1010, 1020 Laser device 2000 Semiconductor exposure device 2010 Exposure device system Part 3010 First gas cylinder 3020 Second gas cylinder 3030 Third gas cylinder 3040 Fourth gas cylinder 3050 Fifth gas cylinder 4010 Internet line 4020 User interface 4030 FDC system 5010 Power meter 5020 Terminal block 6011 First manifold 6012 Second manifold Manifold 7010 First gas manifold 7020 Second gas manifold 7030 Oxygen meter 7040 Optical pulse stretcher 9010 CD-ROM

The laser apparatus according to an embodiment of the present disclosure includes a configured Display b to display the amount of consumption of resources in a discharge pumping type gas laser device, the consumption of resources, the consumption of the laser gas, the consumption of purge gas, cooling Including at least one of water consumption and exhaust consumption.

A non-transitory computer readable recording medium according to an embodiment of the present disclosure includes a program configured to cause a computer to display the amount of resource consumption in a discharge excitation gas laser apparatus on a display. The resource consumption recorded includes at least one of laser gas consumption, purge gas consumption, cooling water consumption, and exhaust consumption.

Claims (15)

A laser device,
A pair of electrodes;
A fan configured to flow a gas supplied between the pair of electrodes;
A motor configured to move the fan;
A display configured to display at least one of the power consumed by the laser device and the amount of power consumed by the laser device;
The power consumed by the laser device includes power consumed by the motor,
The amount of power consumed by the laser device includes the amount of power consumed by the motor,
The power consumed by the motor is calculated based on the pressure of the gas supplied between the pair of electrodes,
The amount of power consumed by the motor is calculated based on the pressure of the gas supplied between the pair of electrodes.
Laser device. The laser device according to claim 1,
Further comprising a charger configured to apply a voltage between the pair of electrodes;
The power consumed by the laser device is the sum of the power consumed by the charger, the power consumed by the motor, the power consumed by the charger, and the power consumed by the motor. Including at least one,
The amount of power consumed by the laser device includes the amount of power consumed by the charger, the amount of power consumed by the motor, the amount of power consumed by the charger, and the power consumed by the motor. Including at least one of a sum of quantities,
Laser device. The laser apparatus according to claim 2, wherein
The amount of power consumed by the charger is obtained by integrating the amount of power consumed for each application of voltage to the pair of electrodes.
Laser device. The laser apparatus according to claim 2, wherein
A standby power supply device configured to supply standby power of the laser device;
The power consumed by the laser device includes the sum of the power consumed by the charger, the power consumed by the motor, and the power consumed by the standby power supply device,
The amount of power consumed by the laser device includes the sum of the amount of power consumed by the charger, the amount of power consumed by the motor, and the amount of power consumed by the standby power supply device.
Laser device. The laser apparatus according to claim 2, wherein
A controller configured to calculate at least one of the power consumed by the laser device and the amount of power consumed by the laser device;
Laser device. The laser device according to claim 5, wherein
The controller may further control a flow rate of water that cools at least the charger and the motor based on at least one of power consumed by the laser device and power consumed by the laser device. A laser device that is configured. The laser device according to claim 5, wherein
The controller may further control a flow rate of air that cools at least the charger and the motor based on at least one of the power consumed by the laser device and the amount of power consumed by the laser device. A laser device that is configured. The laser device according to claim 5, wherein
A laser resonator configured to amplify light generated by applying a voltage to the pair of electrodes;
An optical system configured to guide the light amplified by the laser resonator, and an oximeter configured to measure a concentration of oxygen in a gas passing through the optical system;
The control unit is further configured to control the flow rate of the gas passing through the optical system based on the concentration of oxygen in the gas passing through the optical system.
Laser device. The laser device according to claim 5, wherein
And further comprising an energy dispersion measuring device configured to measure energy dispersion of laser light emitted from the laser device,
The controller is further configured to control a composition of a gas supplied between the pair of electrodes based on the energy dispersion.
Laser device. The laser device according to claim 1,
The power consumed by the motor is calculated based on the pressure of the gas and the rotational speed of the motor,
The amount of power consumed by the motor is calculated based on the pressure of the gas and the rotation speed of the motor.
Laser device. A non-transitory computer-readable recording medium,
Power consumed by a laser device including a pair of electrodes and a fan configured to flow a gas supplied between the pair of electrodes and a motor configured to move the fan, and the laser device Records a program configured to cause a computer to display at least one of the power consumed on a display;
The power consumed by the laser device includes power consumed by the motor,
The amount of power consumed by the laser device includes the amount of power consumed by the motor,
The power consumed by the motor is calculated based on the pressure of the gas supplied between the pair of electrodes,
The amount of power consumed by the motor is calculated based on the pressure of the gas supplied between the pair of electrodes.
A non-transitory computer-readable recording medium. The non-transitory computer-readable recording medium according to claim 11,
The power consumed by the laser device is consumed by the charger included in the laser device, the power consumed by the motor, the power consumed by the charger, and the motor. Including at least one of a sum of powers,
The amount of power consumed by the laser device includes the amount of power consumed by the charger, the amount of power consumed by the motor, the amount of power consumed by the charger, and the power consumed by the motor. Including at least one of a sum of quantities,
A non-transitory computer-readable recording medium. The non-transitory computer-readable recording medium according to claim 12,
The amount of power consumed by the charger is obtained by integrating the amount of power consumed for each application of voltage to the pair of electrodes.
A non-transitory computer-readable recording medium. The non-transitory computer-readable recording medium according to claim 12,
The power consumed by the laser device includes a sum of power consumed by the charger, power consumed by the motor, and power consumed by a standby power supply device included in the laser device,
The amount of power consumed by the laser device includes the sum of the amount of power consumed by the charger, the amount of power consumed by the motor, and the amount of power consumed by the standby power supply device.
A non-transitory computer-readable recording medium. The non-transitory computer-readable recording medium according to claim 11,
The program is a non-transitory computer-readable recording medium configured to calculate at least one of the power consumed by the laser device and the amount of power consumed by the laser device.

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