JP2019205972A - Static elimination dust removal device - Google Patents

Abstract

An object of the present invention is to remove static electricity from an object to be treated at a low running cost and efficiently in a short time, and to prevent dust removed from the object from being ejected to the outside and contaminating a work environment. I will provide a. A processing chamber (11) having an opening (16), a windless ionizer (20) for generating ions in the processing chamber (11), a blower unit (25) for sending clean air to the processing chamber (11), and a blower unit (25) from the processing chamber (11). A circulation mechanism 30 for circulating air is provided, and clean air is pressure-fed from the blower unit 25 toward the workpiece W placed in the processing chamber, and the ions generated in the windless ionizer 20 are also collected together with the clean air. By reaching the processed object W, the object W to be processed is removed of dust and discharged, and the circulation mechanism 30 circulates air from the processing chamber 11 to the blower 25. [Selection diagram] Figure 1

Description

  The present invention relates to dust and static electricity adhering to a workpiece by spraying ionized air onto a workpiece such as an electronic device, an optical lens, a film, or a resin product that requires removal of static electricity and dust. The present invention relates to a static elimination device for removing water.

In this type of static eliminator, dust that has been removed from the object to be processed is scattered and floats around the opening through which the object is put in and out, and pollutes the work environment. Alternatively, the problem of redeposition to the object to be processed has occurred.
In order to prevent this, conventionally, for example, air that blows air downward from an air jet pipe into an opening for taking in and out an object separately from the ionized air jetting means, and shields the processing space from the outside. Proposals have been made to prevent the dust removed from the workpiece from leaking out by forming a curtain or by blowing ionized air from the bottom of the opening toward the center of the processing space ( (See Patent Documents 1 and 2).

JP 2006-7012 A Utility Model Registration No. 3117372

  However, those described in Patent Documents 1 and 2 are the arrangement of an air jet pipe for forming an air curtain, a nozzle for jetting ion air, a mechanism for maintaining its cleanliness, and supply of compressed air to these pipes and nozzles. Means that require different energy, such as means, must be installed, and there is an extra cost in terms of running costs after the installation of equipment, and pressure is always applied even when the device is not in operation. There is a possibility that a mechanism for maintaining cleanliness is connected by a pipe, so that unclean air leaks along with a small amount of air leakage to the surrounding environment where the equipment is installed, and that clean air is lengthened. It is important to note the conflicting requirements of the possibility of reduced cleanliness due to piped over distance.

In addition, the devices described in Patent Documents 1 and 2 require that a dust collector be installed downstream of the apparatus by connecting a duct hose, and clean air is always discharged outside through the filter in the dust collector. There is an inconvenience that the installation location must be examined so that the dust blown up from the floor due to the exhaust pressure or the dust scattering during the filter maintenance of the dust collector does not hinder the operation.
Furthermore, if the amount of clean air discharged from the filter decreases due to clogging of the filter formed in the dust collector, the inside of the device changes to positive pressure, and dust removed from the workpiece leaks out from the opening. There's a problem.

  The present invention has been made in view of the above circumstances, and can neutralize and remove dust from an object to be processed efficiently at a low running cost in a short time. The dust removed from the object to be processed is ejected to the outside. It aims at providing the static elimination dust removal apparatus which does not pollute a working environment.

In order to achieve the above object, a static elimination dust removing apparatus according to the present invention is a static elimination dust elimination apparatus that performs static elimination dust removal on a workpiece,
A processing chamber having an opening for taking in and out the workpiece;
A windless ionizer that is provided on the ceiling of the processing chamber and generates ions in the processing chamber;
A blower unit provided on a ceiling of the processing chamber, for pumping clean air into the processing chamber;
A circulation mechanism that circulates air from the processing chamber to the blower, and supplies clean air from the blower to the object to be processed that is put in the treatment chamber through the opening. In addition, the ion generated by the windless ionizer is blown onto the object to be processed, thereby removing dust from the object to be processed and discharging air from the processing chamber to the air blowing unit by the circulation mechanism. And

  In the present invention, the clean air is pumped from the blower toward the object to be processed in the processing chamber from the opening for taking in and out the object to be processed, and the ions generated by the non-wind ionizer together with the clean air As the dust is discharged from the object to be processed and air is circulated from the processing chamber to the blower by the circulation mechanism, the object is removed from the object at a low running cost and in a short time. It is possible to prevent the dust removed from the object from being ejected to the outside and contaminating the work environment.

Further, in the configuration of the present invention, the air blowing unit is provided between the opening and the windless ionizer,
The ions may be confined in the processing chamber by an air curtain formed by clean air pumped from the blower.

  According to such a configuration, the ions generated in the processing chamber by the windless ionizer are confined in the processing chamber by the air curtain formed by the clean air pumped from the blower, so that the ions are trapped in the surrounding charged object. Without being induced, it can act on the object to be processed and reliably remove the charge.

Further, in the configuration of the present invention, the circulation mechanism includes an intake port provided in a back side wall portion on the back side facing the opening of the processing chamber, a first filter provided in the intake port, A flow path connected to the intake port, a fan connected to the flow path on the opposite side of the intake port, and a second filter provided on the downstream side of the fan,
After the air in the processing chamber sucked from the intake port by the fan flows through the first filter, flows through the flow path, and further passes through the second filter to become clean air. The clean air may be circulated through the blower.

  Here, a medium efficiency filter having a lower efficiency than the second filter is used as the first filter, and a high efficiency filter such as a HEPA filter is used as the second filter. Since the pressure loss during passage of the high-efficiency filter is larger than the pressure loss during passage of the medium-efficiency filter, the discharge pressure from the blower (blowing pressure) is always lower than the suction pressure from the intake port. Negative pressure is set, and air circulation is negative pressure circulation.

  According to such a configuration, the air in the processing chamber sucked from the intake port by the fan passes through the first filter, so that dust having a relatively large particle size is collected by the first filter and then flowed. By flowing through the path and further passing through the second filter, most of the dust having a small particle diameter is collected by the second filter to become clean air, and then the clean air is circulated to the blower. Then, the clean air can be pumped from the blower, and ions generated by the windless ionizer along with the clean air can be sprayed on the object to be processed, so that dust removal and charge removal from the object can be performed more efficiently. .

Further, in the configuration of the present invention, a wind pressure sensor that is provided at or near the inlet of the blower unit and constantly monitors the wind pressure of clean air pumped from the blower unit;
The wind pressure sensor may include a display unit that detects a decrease in the wind pressure due to the clogging of the second filter and displays the amount of the decrease.

  According to such a configuration, when the second filter is clogged, the wind pressure of the clean air pumped from the blower also decreases. Therefore, this wind pressure drop is detected by the wind pressure sensor, and the amount of wind pressure drop is displayed on the display unit. By doing so, it is possible to easily determine the replacement guide for the second filter.

  Moreover, in the said structure of this invention, the aperture ratio of the said opening part of the said process chamber may be changeable.

  According to such a structure, when installing this static elimination dust removal apparatus in the ventilator which can contain the whole static elimination dust removal apparatus etc., the clean air pumped from a ventilation part actively passes through an opening part outside a processing chamber. Therefore, the replacement and maintenance interval of the first filter and the second filter of the static elimination device can be extended.

  According to the present invention, it is possible to efficiently carry out static elimination and dust removal of a workpiece at a low running cost in a short time, and prevent dust removed from the workpiece from jumping out and contaminating the work environment. it can.

An example of the static elimination dust removal apparatus of embodiment of this invention is shown, and it is the side view which fractured | ruptured one part. FIG. FIG. 3 is a view taken along arrow A in FIG.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a side view in which a part of the charge and dust removing device according to the present embodiment is broken, FIG. 2 is a front view of the same, and FIG. 3 is a view as seen from an arrow A in FIG.

As shown in FIGS. 1 and 2, the dust removal and static elimination apparatus according to the present embodiment includes a rectangular box-shaped casing 10. A handle 10a is provided on each of the left and right sides of the casing 10, and the casing 10, that is, the present dust removal static eliminator can be easily carried by the handles 10a and 10a.
A substantially lower half of the housing 10 is a processing chamber 11. The processing chamber 11 is formed by a ceiling portion 12, left and right side wall portions 13 and 14, and a back side wall portion 15, and is a substantially rectangular box-shaped internal space having an open front surface.
Further, the processing chamber 11 has an opening 16 having a rectangular shape in front view on the front side of the housing 10, and the workpiece W is taken into and out of the processing chamber 11 through the opening 16. Yes. Examples of the object to be processed W include electronic parts and optical parts for industrial products, parts such as resin products, chemicals, and packaging trays that cause problems such as destruction of elements or adhesion of dust due to static electricity. Such a component is used as an object to be processed W to perform charge removal and dust removal processing.

The aperture ratio of the opening 16 can be changed. That is, as shown in FIG. 2, support rails 17, 17 having a U-shaped cross section are provided on the left and right side edge portions of the opening 16 so as to oppose left and right. The support rails 17, 17 extend from the lower end of the opening 16 to slightly below the upper and lower centers of the opening 16, and both sides of a rectangular plate-shaped closing plate 18 are inserted into the support rails 17, 17. ing.
Therefore, by removing the closing plate 18 from the support rails 17, 17, the opening ratio of the opening 16 becomes 100%, and by attaching the closing plate 18, the opening ratio becomes about 60%. Further, by preparing a plurality of closing plates 18 having different heights and selectively attaching these closing plates 18, the aperture ratio can be changed.

In addition, a windless ionizer (ion generator) 20 that generates ions in the processing chamber 11 is provided on the ceiling 12 of the processing chamber 11. The windless ionizer 20 is suspended from the ceiling 12 by a bracket 19 having an L-shaped cross section.
The windless ionizer 20 has positive and negative electrodes 20a and 20a that are arranged at an interval, and a voltage is applied between the electrodes 20a and 20a, and between the needle electrodes 20b and 20b. The insulating gas is separated into ions by the generated corona discharge.
Note that two pairs of electrodes 20a and 20a are provided, and a total of four electrodes 20a are provided at a predetermined interval in the bracket 19 in the width direction of the opening 16 (left and right direction in FIG. 1 and the direction perpendicular to the paper surface in FIG. 2) It is attached with. Further, one end of a cable 20c is connected to the windless ionizer 20, and the other end is connected to a power source (not shown).

Generally, ion generators are classified into those in which a voltage from an AC power source is applied to one needle electrode, and those in which a voltage from a DC power source is applied to each of positive and negative needle electrodes. The
In a system in which a positive or negative voltage is alternately applied to one needle electrode from an AC power supply, the applied voltage is increased with respect to the possibility that positive and negative ions generated from the same location cancel each other. Etc. need to be considered.
In addition, although the static elimination object is charged to one of plus and minus, ions that are not necessary for static elimination of the static elimination object collide in the process of static elimination. In the method of generating ions by applying a voltage from the DC power supply to the positive and negative needle electrodes, the amount of positive and negative generated can be controlled by setting the potential of each electrode based on the ground base. It is. Furthermore, when the distance from the needle electrode 20b to the static elimination object (the object to be processed W) is constant as in the non-winding ionizer 20, there is no need to consider the possibility that the positive and negative ions cancel each other. In these respects, an ion generator that generates ions with a DC power supply is more practical in a static elimination apparatus that has a fixed work space (processing chamber 11) as in the present embodiment.

As shown in FIG. 2, the housing 10 includes a substrate 21 to which a windless ionizer 20 is connected. The voltage of negative ions can be varied by a semi-fixed resistance volume provided on the substrate 21. By controlling it, the ion generation balance can be adjusted.
Further, an ion balance adjustment volume 22 is provided on the front surface of the housing 10, and the semi-fixed resistance volume can be operated by operating the ion balance adjustment volume 22. Therefore, the ion generation balance can be adjusted by operating the ion balance adjustment volume 22.
Further, the casing 10 is provided with a high-pressure abnormality warning lamp 23 in the vicinity of the ion balance adjustment volume 22, and when the pressure generated in the windless ionizer 20 becomes abnormally high, the high-pressure abnormality warning lamp 23 is provided. Lights up or flashes.

  Further, since the windless ionizer 20 has a small cancellation loss of positive and negative ions, ions can be generated at a relatively low voltage. Therefore, oxidation and deterioration of the electrode are unlikely to occur, and impurities are difficult to adhere to the object to be cleaned (processed object). For this reason, it becomes possible to make use of the characteristics as a static elimination dust removal apparatus in a clean air environment, and it is optimal for cleaning semiconductor devices and lens parts, for example.

  In addition, on the ceiling portion 12 of the processing chamber 11, a blower unit 25 that pumps clean air into the processing chamber 11 is provided. As shown in FIG. 1, the air blower 25 is provided between the opening 16 and the windless ionizer 20 so as to protrude downward from the lower surface of the ceiling portion 12. The blower section 25 is provided so as to extend in the width direction of the opening section 16 (in the direction orthogonal to the paper surface in FIG. 1, the left-right direction in FIG. 2). Moreover, the upper surface (base end surface) and the lower surface (front end surface) of the air blowing unit 25 are opened, and the clean air flowing in from the upper surface blows out from the lower surface.

Further, the blower section 25 is formed so that its cross-sectional area gradually decreases from the base end face toward the front end face. In other words, the air blower 25 is formed so that the inner side surface that extends in the width direction of the opening 16 and faces in the depth direction of the processing chamber 11 gradually approaches from the base end surface of the air blower 25 toward the front end surface. Has been.
Thus, since the ventilation part 25 is formed in slit nozzle shape, the clean air which flowed in from the upper surface of the ventilation part 25 blows down toward the process chamber 11 from a lower surface (front end surface), ie, so that it may be pumped. It has become.
The ceiling portion 12 is provided with an illumination 26. The illumination 26 is an LED illumination, and is provided in a substantially central portion of the lower surface of the ceiling portion 12 so as to illuminate the processing chamber 11 brightly.

As shown in FIG. 1, the casing 10 is provided with a circulation mechanism 30 that circulates air from the processing chamber 11 to the blower 25.
The circulation mechanism 30 includes an intake port 31 provided in the back wall portion facing the opening 16 of the processing chamber 11, that is, the back side wall portion 15 of the processing chamber 11, and a medium efficiency filter provided in the intake port 31. (First filter) 32, a flow path 33 connected to the air inlet 31, a fan 34 connected to the flow path 33 on the side opposite to the air inlet 31, and a high-efficiency filter provided on the downstream side of the fan 34 (Second filter) 35.

The intake port 31 is formed in a rectangular shape having a long side directed to the left and right and a short side directed to the top and bottom, and the left and right lengths (long side lengths) are the same as the left and right lengths of the air blower 25. It is almost equal. Further, the air inlet 31 is disposed in a substantially lower half of the opening 16 in a front view, and its upper side is higher than the upper side of the closing plate 18.
The medium efficiency filter 32 is formed in a shape and size substantially the same as the intake port 31 in a front view, and is attached to the peripheral portion of the intake port 31 so as to close the intake port 31.

  The flow path 33 is a space that extends vertically along the inner surface of the back wall of the housing 10, and the width in the left-right direction of the flow path 33 is substantially equal to the width in the left-right direction of the housing 10. Yes. A space is formed between the rear wall of the housing 10 and the back side wall portion 15 of the processing chamber 11, and this space constitutes a substantially lower half of the flow path 33. Further, substantially the upper half of the flow path 33 extends to the lower surface of the upper wall of the housing 10, and the upper end portion of the flow path 33 communicates with the fan 34, that is, the upper end portion of the flow path 33 is Connected to the fan 34.

Further, an inner wall 36 is horizontally provided above the ceiling portion 12 of the processing chamber 11 with a predetermined distance from the ceiling portion 12, and a fan filter unit 37 is installed on the inner wall 36.
The fan filter unit 37 includes the fan (blower fan) 34 and the high-efficiency filter (second filter) 35. The high-efficiency filter 35 is provided below the fan 34, that is, downstream of the fan 34. It has been.
The fan 34 is provided in the fan case 34a, and the high efficiency filter 35 is provided in the filter case 35a. A fan filter unit 37 is configured by integrally connecting the fan case 34a and the filter case 35a. And this fan filter unit 37 is incorporated in the housing | casing 10 so that extraction is possible. For example, a HEPA filter can be used as the high efficiency filter 35.

  Further, a rectangular hole is formed in the inner wall 36 where the fan filter unit 37 is installed, and the high efficiency filter 35 faces the hole. Therefore, the air flow formed by the fan 34 passes through the high-efficiency filter 35 and then flows as clean air from the hole into the air accumulation space 38 between the inner wall 36 and the ceiling portion 12. The clean air that has flowed into the air reservoir space 38 is pumped from the blower 25 to the processing chamber 11.

Further, a wind pressure sensor 40 is provided in the air reservoir space 38 in the vicinity of the inlet of the blower 25. The wind pressure sensor 40 can constantly monitor the operating state of the fan filter unit 37 by constantly monitoring the wind pressure of the clean air pumped from the blower unit 25.
As shown in FIG. 3, a display portion 41 is provided on the side wall portion 14 of the processing chamber 11 in the vicinity of the opening portion 16. The display unit 41 is connected to the wind pressure sensor 40, and when the wind pressure sensor 40 detects a decrease (change) in the wind pressure of clean air due to clogging of the high-efficiency filter 35, the decrease amount (change amount). ) Is displayed.
As the display unit 41, for example, a multistage LED indicator capable of displaying wind pressure changes in multiple stages is used. By visually checking such a display unit 41, it is possible to determine a decrease in the wind pressure of the clean air pumped from the blower unit 25, and thus it is possible to determine a replacement guide for the high-efficiency filter 35.

  As shown in FIG. 2, the housing 10 has a built-in board 42 to which the fan filter unit 37 is connected, and the fan 34 is operated by operating the air volume adjusting volume 43 connected to the board 42. The air volume can be adjusted by adjusting the rotation speed. Further, a power switch 45 is provided in the vicinity of the air volume adjustment volume 43. When the power switch 45 is turned on, the fan 34 rotates and the windless ionizer 20 is activated, and when the power switch 45 is turned off, the fan 34 rotates. Is stopped and the windless ionizer 20 is stopped.

Next, a method for discharging and dusting the workpiece W by the discharging and dust removing apparatus having such a configuration will be described.
First, the power switch 45 is turned on to rotate the fan 34 and then insert the workpiece W into the processing chamber 11 from the opening 16. Further, when the power switch 45 is turned on, the windless ionizer 20 is activated, and ions are generated in the upper part of the processing chamber 11.

When the fan 34 rotates, the air in the flow path 33 is sucked and the flow path 33 becomes negative pressure, so that the air K1 in the processing chamber 11 is sucked into the flow path 33 from the intake port 31. The air K1 sucked from the air inlet 31 passes through the medium efficiency filter 32, whereby dust having a relatively large particle diameter in the air is collected by the medium efficiency filter 32, and then the air K1 flows into the flow path. 33 flows upward. The air K1 is sucked into the suction port of the fan 34 from the upper part of the flow path 33 and further discharged from the discharge port of the fan 34.
The air K1 discharged from the discharge port of the fan 34 passes through the high efficiency filter 35 provided on the downstream side of the fan 34, so that most dust having a small particle diameter is collected by the high efficiency filter 35 and clean air. K2.
The clean air K <b> 2 flows into the air reservoir space 38, is then supplied to the blower unit 25 formed in the shape of a slit nozzle, and is pumped downward from the front end surface of the blower unit 25 to the processing chamber 11.

The pumped clean air K2 is speeded up, and ions generated by the windless ionizer are sprayed onto the workpiece W together with the speeded clean air K2. That is, the high-speed clean air K2 draws ions generated by the windless ionizer 20 and is sprayed onto the workpiece W. As a result, clean air K2 and ions reach the workpiece W, so that the dust removal of the workpiece W is performed.
Further, the ions generated by the windless ionizer 20 are confined in the processing chamber 11 by the air curtain AK formed by the clean air K2 blown out from the blower unit 25, and are not induced by the surrounding charged substances, but are ionized air. That is, clean air K2 containing ions is blown onto the workpiece W.

Then, the dust blown off from the surface of the workpiece W rides on the air flow blown from the blower unit 25 and is attached to the intake port 31 provided in the back side wall portion 15 of the processing chamber 11. Accordingly, dust having a relatively large particle diameter is collected, air in which the dust is collected flows through the flow path 33, and most of the dust having a small particle diameter is collected by the high-efficiency filter 35. For example, when a HEPA filter is used as the high-efficiency filter 35, it is possible to remove 99.97% or more of particles of 0.3 μm or more.
As described above, the air in the processing chamber 11 flows through the flow path 33 after dust having a relatively large particle diameter is collected by the medium efficiency filter 32, and further, the air having almost the small particle diameter is further reduced by the high efficiency filter 35. After the dust is collected, it is pumped again to the processing chamber 11 as clean air from the blower 25. That is, the air in the processing chamber 11 circulates and returns to the processing chamber 11 as clean air again.

  Further, the high-speed clean air K2 pressure-fed from the blower unit 25 is blown onto the workpiece W while drawing the outside air K3 from the opening 16 of the processing chamber 11 to become air K1 containing dust, and the processing chamber 11 The air is sucked into the air inlet 31 provided in the back side wall portion 15 of the other side, passes through the medium efficiency filter 32, and further passes through the high efficiency filter 35. Since the pressure loss during passage of the high-efficiency filter 35 is larger than the pressure loss during passage of the medium-efficiency filter 32, the discharge pressure from the blower 25 (blowing pressure) is always lower than the drawing pressure from the intake port 31. The processing chamber 11 is set to a negative pressure, and the air circulation is a negative pressure circulation. Further, clogging of the high-efficiency filter 35 that occurs with the operation of the static elimination dust removing device increases the pressure loss during passage, so that the negative pressure is always maintained in the processing chamber 11. For this reason, the leakage of the dust removed from the workpiece W can be prevented.

  As described above, according to the present embodiment, clean air K2 is pumped from the blower 25 toward the workpiece W placed in the processing chamber 11 from the opening 16 for taking in and out the workpiece W. Then, by blowing the ions generated by the windless ionizer together with the clean air K2 to the workpiece W, the dust is removed from the workpiece W, and air is sent from the processing chamber 11 to the blower 25 by the circulation mechanism 30. Since it is circulated, it is possible to efficiently remove static electricity and dust from the workpiece W at a low running cost and in a short time, and prevent dust removed from the workpiece W from flying out and contaminating the work environment. it can.

In addition, the air K1 in the processing chamber 11 sucked from the intake port 31 by the fan 34 passes through the medium efficiency filter 32, so that dust having a relatively large particle diameter is collected by the medium efficiency filter 32 and then flowed. By flowing through the path 33 and further passing through the high efficiency filter 35, most of the dust having a small particle diameter is collected by the high efficiency filter 35 to become clean air K <b> 2, and then the clean air is sent to the blower section 25. It is circulated in. Then, the clean air K2 is pumped from the blower 25, and the ions generated by the windless ionizer 20 together with the clean air K2 are blown onto the workpiece W, thereby removing dust from the workpiece W more efficiently. Can be done.
Furthermore, since the ions generated in the processing chamber 11 by the windless ionizer 20 are confined in the processing chamber 11 by the air curtain AK formed by the clean air K2 pumped from the blower 25, the ions are trapped in the surrounding charged material. Without being induced, it can act on the workpiece W and surely remove electricity.

  Further, when the high-efficiency filter 35 is clogged, the wind pressure of the clean air K2 supplied to the air reservoir space 38 through the high-efficiency filter 35 is decreased, so that the wind pressure change (wind pressure decrease) of the clean air K2 flowing into the blower unit 25 is reduced. Can be visually confirmed on the display unit 41 configured by a multi-stage LED indicator. The change standard of the high efficiency filter can also be discriminated by this wind pressure change.

  Further, since the opening ratio of the opening 16 of the processing chamber 11 can be changed by the closing plate 18, by increasing the opening ratio, the force of the clean air K <b> 2 pumped from the blower 25 to pull in the outside air K <b> 3 is weakened. In addition, the back side wall portion 15 of the processing chamber 11 is provided with a speed at which the compressed clean air K2 that has collided with the inner wall surface of the processing chamber 11 is directed outward from the opening 16 of the processing chamber 11. Since it exceeds the speed at which the medium-efficiency filter 32 attached to the intake port 31 is about to be sucked, the processing chamber 11 has a positive pressure with respect to the atmosphere, and can include installation conditions that do not require a negative pressure, for example, the entire static elimination dust removal device. When installing this static elimination dust removal apparatus in a ventilator, the clean air K2 ventilated from the ventilation part 25 can be actively discharged | emitted to the exterior of the process chamber 11. FIG. Therefore, the replacement and maintenance intervals of the medium efficiency filter 32 and the high efficiency filter 35 can be extended.

W Object to be treated K1 Air K2 Clean air AK Air curtain 11 Processing chamber 12 Ceiling part 15 Back side wall part 16 Opening part 18 Closing plate 20 Windless ionizer 25 Blower part 30 Circulation mechanism 31 Inlet port 32 Medium efficiency filter (first filter)
33 Channel 34 Fan 35 High-efficiency filter (second filter)
40 Wind pressure sensor 41 Display section

Claims (5)

A static elimination device that performs static elimination and dust removal on a workpiece,
A processing chamber having an opening for taking in and out the workpiece;
A windless ionizer that is provided on the ceiling of the processing chamber and generates ions in the processing chamber;
A blower unit provided on a ceiling of the processing chamber, for pumping clean air into the processing chamber;
A circulating mechanism that circulates air from the processing chamber to the blower, and supplies clean air from the blower to the object to be processed that is put in the processing chamber through the opening, and the clean air In addition, by blowing ions generated by the windless ionizer to the object to be processed, dust is removed from the object to be processed, and air is circulated from the processing chamber to the blowing unit by the circulation mechanism. Static elimination dust removal equipment. The blowing section is provided between the opening and the windless ionizer,
The static elimination dust removing apparatus according to claim 1, wherein the ion is confined in the processing chamber by an air curtain formed by clean air pumped from the blower. The circulation mechanism is
An intake port provided in a back side wall portion on the back side facing the opening of the processing chamber;
A first filter provided in the intake port;
A flow path connected to the intake port;
A fan connected to the flow path on the opposite side of the air inlet;
A second filter provided downstream from the fan,
After the air in the processing chamber sucked from the intake port by the fan flows through the first filter, flows through the flow path, and further passes through the second filter to become clean air. 3. The static elimination dust removing apparatus according to claim 1, wherein the clean air is circulated through the air blowing section. A wind pressure sensor that is provided at or near the inlet of the blower, and constantly monitors the wind pressure of clean air pumped from the blower;
The static elimination dust removing apparatus according to claim 3, further comprising: a display unit that detects a decrease in the wind pressure due to the clogging of the second filter by the wind pressure sensor and displays the amount of the decrease. The static elimination dust removing apparatus according to any one of claims 1 to 4, wherein an opening ratio of the opening of the processing chamber is changeable.

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