JP2023002338A - Exhaust gas treatment device - Google Patents

Abstract

To provide an exhaust gas treatment device capable of decomposing exhaust gas with a small installation area and with reduced energy.SOLUTION: An exhaust gas treatment device includes: a reaction part 11 for thermally decomposing exhaust gas; a tank part 12 connected to the downstream side of the reaction part 11, which is a cooling water tank where cooling water is pooled for cooling high temperature gas discharged from the reaction part 11 by contact; and a scrubber part 13 connected to the downstream side of the tank part 12 for cleansing the exhaust gas thermally decomposed, and dissolving a water-soluble component contained in the gas into water. The reaction part 11 includes an exhaust gas introduction pipe 14 connected to an outlet 10a of a pump 10, a decomposition pipe 15 for thermally decomposing the exhaust gas supplied from the exhaust gas introduction pipe 14, and an exhaust pipe 16 for discharging a product generated in the decomposition pipe 15 to the tank part 12, an axis line of the decomposition pipe 15 being inclined or extending in a horizontal direction.SELECTED DRAWING: Figure 1

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust gas treatment apparatus, and more particularly, to an exhaust gas treatment apparatus for treating exhaust gas containing harmful components discharged from various electronic device manufacturing apparatuses such as semiconductors.

2. Description of the Related Art Process gases containing silicon and cleaning gases containing fluorine are used in various electronic device manufacturing apparatuses such as semiconductors. Since the process gas and cleaning gas (hereinafter referred to as exhaust gas) contain harmful components, they are sent to an exhaust gas treatment apparatus via a pump and rendered harmless. As an exhaust gas treatment device that performs such detoxification, a device (harm removal device) disclosed in Patent Document 1 is known.

JP 2016-93792 A

However, in the conventional exhaust gas treatment apparatus 50 as shown in Patent Document 1, as shown in FIG. 5, the heating unit 53 faces the vertical direction, so the outlet of the pump 51 and the inlet of the heating unit 53 are separated. rice field. For this reason, the exhaust gas introduction pipe 52 that connects the pump 51 and the heating unit 53 has become long, and a bent portion has been provided in the middle of the pipe as necessary.

When the exhaust gas introduction pipe 52 is lengthened as described above, the exhaust gas may be cooled in the middle of the pipe to generate powder, which may accumulate inside the pipe. In particular, the powder tends to accumulate at the bent portion of the pipe. Accumulation of powder causes clogging of the tubes and must be prevented. For this reason, the conventional exhaust gas treatment apparatus heats the entire pipe with a heater or the like to prevent the generation of the powder. As a result, the apparatus as a whole consumes energy that does not directly contribute to decomposition of the exhaust gas.

Further, when the exhaust gas introduction pipe 52 is long, the risk of explosion due to gas leakage in the middle of the pipe increases. In order to prevent this explosion, it is necessary to dilute the exhaust gas with a diluent gas such as nitrogen gas. However, on the other hand, diluting the exhaust gas makes it difficult for the decomposition of the exhaust gas to proceed. For this reason, the conventional exhaust gas treatment apparatus needs to increase the gas decomposition performance by enlarging the heating portion. As a result, not only does the entire apparatus become large, but energy that does not directly contribute to decomposition of the exhaust gas is consumed.

Furthermore, when dilution with gas is performed, the temperature of the diluted exhaust gas decreases, so powder is likely to be generated in the pipe. In order to prevent this, it is necessary to heat the gas for dilution, and a separate heating device is required for that purpose.

In view of the above points, an object of the present invention is to provide a compact and energy-saving exhaust gas treatment apparatus.

In order to solve the above-mentioned problems, a first aspect of the present invention provides a reaction section for thermally decomposing exhaust gas discharged from a pump, and a high-temperature gas discharged from the reaction section connected downstream of the reaction section. A tank part that stores cooling water for cooling the gas by contact and is connected to the downstream side of the tank part to wash the exhaust gas after the thermal decomposition treatment and dissolve the water-soluble components contained in the gas in water. a scrubber section, wherein the reaction section includes an exhaust gas introduction pipe connected to an outlet of a pump; a decomposition pipe for thermally decomposing the exhaust gas supplied from the exhaust gas introduction pipe; and an exhaust pipe for discharging products generated in the cracking pipe to the tank portion, and the axis of the cracking pipe is inclined.

In a second aspect of the present invention, there is provided a reaction section for thermally decomposing an exhaust gas discharged from a pump, and a reaction section connected to the downstream side of the reaction section for cooling the high-temperature gas discharged from the reaction section by contact. and a scrubber unit connected to the downstream side of the tank unit for cleaning the exhaust gas after the thermal decomposition treatment and dissolving the water-soluble components contained in the gas into water. In the exhaust gas treatment apparatus, the reaction section includes an exhaust gas introduction pipe connected to an outlet of a pump, a decomposition pipe for thermally decomposing the exhaust gas supplied from the exhaust gas introduction pipe, and a product generated in the decomposition pipe. and an exhaust pipe for exhausting substances to the tank portion, and the axis of the cracking pipe extends in a horizontal direction.

A third aspect of the present invention is characterized in that the outlet of the pump and the inlet of the cracking tube are at the same height when the exhaust gas introduction pipe is connected to the pump. .

A fourth invention of the present invention is characterized in that a plurality of reaction sections are connected to one tank section.

A fifth aspect of the present invention is characterized in that the outlet of the exhaust pipe is positioned below the water surface in the tank portion.

A sixth aspect of the present invention is characterized in that the reaction section has a double cylinder structure consisting of an inner cylinder and an outer cylinder, and an automatic inner cylinder cleaning mechanism for cleaning the inner cylinder is provided. It is something to do.

In a seventh aspect of the present invention, the tank section includes a cooling water tank for storing cooling water up to an intermediate height, an exhaust port provided in an upper part of the cooling water tank and connected to the scrubber section, and the cooling water tank. a cylindrical overflow pipe erected from the bottom of the water tank and surrounding the exhaust pipe; the lower end of the exhaust pipe is vertically inserted into the cooling water in the cooling water tank; Above the water surface of the water, a cooling water introduction part for flowing cooling water along the inner peripheral wall is provided. , the height is set so that the cooling water, which is accompanied by the bubbles of the exhaust gas introduced into the cooling water from the exhaust pipe and rises, can flow out from the upper end of the overflow pipe, and is located between the exhaust pipe and the overflow pipe. (2) a bubble dispersing material for dispersing bubbles generated by the exhaust gas introduced into the cooling water from the exhaust pipe;

An eighth invention of the present invention is characterized in that the amount of insertion of the exhaust pipe into the cooling water of the tank is 65 mm or more.

A ninth aspect of the present invention is characterized in that the exhaust gas is discharged from a reaction chamber of an electronic device manufacturing apparatus.

According to the first invention, since the inlet of the cracking tube and the outlet of the pump are close to each other, the flue gas introduction pipe connecting them can be made shorter than before. In addition, since the risk of exhaust gas leakage is reduced accordingly, the amount of nitrogen gas used for dilution can be reduced, and there is no need to increase the decomposition performance of the heated portion. Therefore, the device can be downsized, and the exhaust gas can be decomposed with less energy. Moreover, since the exhaust gas introduction pipe can be shortened, the temperature of the exhaust gas is less likely to drop, and the energy required for heating can be reduced.

According to the second aspect of the invention, since the inlet of the cracking tube and the outlet of the pump face each other, there is no need to greatly bend the flue gas introduction pipe, and the total length can be shortened compared to the conventional one. Therefore, energy for heating the exhaust gas introduction pipe can be suppressed. In addition, since the nitrogen gas for diluting the exhaust gas can be reduced, energy that does not directly contribute to the decomposition of the exhaust gas can be suppressed.

According to the third aspect of the invention, since the exhaust gas introduction pipe is linear and does not have a bent portion, it is difficult for powder to stagnate inside the pipe. In addition, since the exhaust gas introduction pipe can be straight and the total length of the pipe can be shortened, the energy for heating the exhaust gas introduction pipe can be suppressed.

According to the fourth invention, exhaust gas from a plurality of reaction sections can be cooled in one tank section, and the entire apparatus can be made compact.

According to the fifth invention, exhaust gas can be efficiently cooled, and powder can be captured. Also, the height of the entire device can be reduced, and the exhaust pipe can be shortened.

According to the sixth invention, it is possible to efficiently remove the powder generated by the thermal decomposition process and deposited in the reaction section.

According to the seventh invention, since the exhaust gas is directly introduced into the cooling water from the exhaust pipe and the two are brought into contact to cool the exhaust gas, there is no need for a spray for ejecting cooling water or a cooling water pumping device in the stage of cooling the exhaust gas. In addition, since there is no need for a cooling structure to increase the contact and residence time between the sprayed cooling water and the exhaust gas, it is possible to reduce the size of the equipment and reduce equipment and operating costs. I can plan.

According to the eighth invention, the exhaust gas can be efficiently cooled. Also, with a simple structure, it is possible to obtain a cooling capacity equivalent to that of conventional spray-type cooling equipment. Furthermore, it is possible to use heat-resistant rigid polyvinyl chloride (heat-resistant temperature: 90°C), which is generally used as a tank material as a low-cost and corrosion-resistant material, for the tank, reducing equipment costs. can be planned.

According to the ninth invention, it is possible to provide an exhaust gas treatment apparatus for treating exhaust gas from a reaction chamber of an electronic device manufacturing apparatus, which can decompose exhaust gas in a compact, energy-saving manner with a small installation area.

According to these aspects of the present invention, it is possible to provide an exhaust gas treatment apparatus that can decompose exhaust gas with a small installation area, a compact size, and energy saving.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the waste gas processing apparatus of one Embodiment (1st Embodiment) of this invention. It is a figure which shows the waste gas processing apparatus of another embodiment (2nd Embodiment) of this invention. Fig. 10 is a plan view of an exhaust gas treatment apparatus according to still another embodiment (third embodiment) of the present invention; It is a figure which shows the waste gas processing apparatus of another embodiment (4th Embodiment) of this invention. It is a figure which shows the conventional exhaust gas processing apparatus. It is a figure which shows the modification of the exhaust gas processing apparatus of the said 1st Embodiment. It is a figure which shows the modification of the exhaust gas processing apparatus of the said 2nd Embodiment. It is a figure which shows the relationship between the insertion amount (water depth) of the exhaust pipe in the cooling water of the tank part in the said 1st Embodiment, and the temperature of the exhaust gas discharged|emitted by the cooling process by a tank part.

FIG. 1 shows an exhaust gas treatment apparatus as one embodiment (first embodiment) to which the present invention is applied. Exhaust gas is generated from a reaction chamber in various electronic device manufacturing apparatuses such as semiconductors. The generated exhaust gas is first sent to the pump 10 to treat the harmful constituents. The exhaust gas treatment apparatus 1 shown in the first embodiment detoxifies harmful components in the exhaust gas sent from the pump 10 by thermal decomposition treatment. As shown in FIG. A tank unit 12 and a scrubber unit 13 are provided.

The reaction section 11 heats and decomposes the exhaust gas sent through the pump 10 , and includes an exhaust gas introduction pipe 14 , a decomposition pipe 15 and an exhaust pipe 16 .

The flue gas introduction pipe 14 is a metal pipe that feeds the flue gas to a cracking pipe 15, which will be described later. ing. A heating device (heater) may be provided around the exhaust gas introduction pipe 14 to prevent the temperature of the exhaust gas from dropping.

The cracking pipe 15 heats and decomposes harmful components in the exhaust gas sent from the exhaust gas introduction pipe 14, and has a double-cylinder structure consisting of an inner cylinder and an outer cylinder. A burner (not shown) is provided. In the burner, a fuel supply pipe, a combustion-supporting fluid supply pipe, and an exhaust gas introduction pipe 14 are concentrically arranged on the same axis, and fuel supplied from the fuel supply pipe is supplied from the combustion-supporting fluid supply pipe When mixed with the supplied combustion-supporting fluid and combusted, the exhaust gas supplied from the exhaust gas introduction pipe 14 is thermally decomposed. The treated exhaust gas is sent to an exhaust pipe 16, which will be described later.

Here, the cracking pipe 15 has its axis aligned so that the inlet of the cracking pipe 15 faces the outlet 10a of the pump 10 and the outlet 10a side of the pump 10 (opposite side of the scrubber section 13) with respect to the vertical direction. ) by an angle α. The lower limit of the inclination angle α is preferably, for example, 30° or more, and more preferably 45° or more. The upper limit of the inclination angle α is preferably 90° or less, for example. By adopting such a mode, the total length of the exhaust gas introduction pipe 14 can be shortened, so the energy for heating the exhaust gas introduction pipe 14 can be reduced. Furthermore, since the total length of the exhaust gas introduction pipe 14 is shortened, the amount of nitrogen gas for dilution can be reduced, so that the energy that does not directly contribute to the decomposition of the exhaust gas can be reduced.

The exhaust pipe 16 is located on the downstream side of the cracking pipe 15, and discharges gas and powder generated during the thermal decomposition process in the cracking pipe 15 to the tank section 12, which will be described later. The lower end of the exhaust pipe 16 is inserted vertically into the cooling water in the cooling water tank of the tank portion 12, and the cooling water flows downward along the inner peripheral wall above the water surface of the cooling water. A water introduction part 20 is provided.

The tank part 12 is a cooling water tank provided on the downstream side of the reaction part 11, in which cooling water is stored up to an intermediate height in a sealed state. , and a cylindrical overflow pipe 17 standing upright from the bottom and surrounding the exhaust pipe 16 . The overflow pipe 17 is provided with a cooling water inflow portion 18 in which cooling water flows from the outside toward the inside, and is accompanied by air bubbles of the exhaust gas introduced into the cooling water from the exhaust pipe 16 and rises. The height of the overflow pipe 17 is set so that water can flow out from the upper end of the overflow pipe 17 . As a result, the cooling water in the tank portion 12 flows into the overflow pipe 17 from the cooling water inlet portion 18 at the bottom, and forms a circulation flow flowing out from the upper portion of the overflow pipe 17 .

A bubble dispersion member 19 is provided between the exhaust pipe 16 and the overflow pipe 17 to disperse bubbles generated by the exhaust gas introduced from the exhaust pipe 16 into the cooling water. By providing the air bubble dispersing member 19, it is possible to disperse large rising air bubbles into small air bubbles and reduce pressure fluctuations, and also improve the cooling efficiency by increasing the contact efficiency between the cooling water and the exhaust gas. .

Inside the tank portion 12 above the water surface of the cooling water in the exhaust pipe 16 , there is provided a cooling water introduction portion 20 through which the cooling water flows down along the inner peripheral wall of the exhaust pipe 16 . The cooling water introduction part 20 is composed of the exhaust pipe 16 having a large-diameter pipe part 22 whose upper end is fixed to the top plate 21 of the cooling water tank 12 and a small-diameter pipe part 23 whose lower end is inserted into the cooling water. The upper end of the small-diameter pipe portion 23 is made to have a tubular structure, and the upper end of the small-diameter pipe portion 23 is made to penetrate the bottom plate 24 provided at the lower end portion of the large-diameter pipe portion 22 and protrude to the vertical middle position of the large-diameter pipe portion 22 . A water reservoir 25 is formed in the portion of the bottom plate 24 between the circumference and the outer circumference of the small-diameter pipe portion 23, and a cooling water supply pipe 26 for supplying cooling water for supply to the water reservoir 25 is provided.

The supplemental cooling water supplied from the cooling water supply pipe 26 to the water reservoir 25 flows into the small diameter pipe portion 23 over the upper end of the small diameter pipe portion 23, and flows along the inner peripheral surface of the small diameter pipe portion 23. It forms a wet wall and flows down. As a result, the contact time between the exhaust gas and the cooling water can be lengthened, and the exhaust gas can be effectively cooled. amount) can be minimized. Since the length of the exhaust pipe 16 immersed under the water surface is the size of the pressure loss before and after the immersed portion, this structure makes it possible to suppress the pressure loss while maintaining high cooling efficiency. It is possible to reduce the load of the suction equipment provided in. Furthermore, since this wetted wall structure is arranged downstream of the cracking tube 15 , it does not cause energy loss in the cracking tube 15 .

In the tank portion 12, the gas discharged from the exhaust pipe 16 is cooled by contact with the cooling water, and the powder (product) discharged from the exhaust pipe 16 is captured by the cooling water. At this time, since the outlet of the exhaust pipe 16 is positioned below the water surface of the cooling water, the discharged gas and powder come into direct contact with the cooling water. Capture is efficient. Although not shown, the tank portion 12 is provided with a water supply route and a water discharge route for introducing new cooling water and replacing the water while keeping the amount of cooling water stored constant.

The scrubber section 13 is provided in the upper part of the tank section 12 , and is filled with a filler 27 and provided with a spray nozzle 28 above the filler 27 . In the scrubber section 13, impurities in the gas cooled by the cooling water in the tank section 12 are captured by the filler 27, and then the gas is washed with washing water sprayed from the spray nozzle 28 to remove water-soluble components. do. Since the exhaust gas from which impurities and water-soluble components have been removed is rendered harmless, it can be safely discharged from the exhaust path above the scrubber part 13 after passing through the mist catcher 29 to remove moisture.

FIG. 2 shows an exhaust gas treatment apparatus which is another embodiment (second embodiment) to which the present invention is applied. The exhaust gas treatment apparatus in the second embodiment shows the case where the inclination angle α of the cracking tube 15 in the first embodiment is 90°, and the axis of the cracking tube 15 extends in the horizontal direction. there is Other configurations are the same as those of the first embodiment.

In the exhaust gas treatment apparatus of the second embodiment, the axis of the cracking pipe 15 extends horizontally, so that the outlet 10a of the pump 10 and the inlet of the cracking pipe 15 face each other. The total length can be shortened than before. Therefore, energy for heating the exhaust gas introduction pipe 14 can be suppressed. In addition, since the nitrogen gas for diluting the exhaust gas can be reduced, energy that does not directly contribute to the decomposition of the exhaust gas can be suppressed. At this time, if the outlet 10a of the pump 10 and the inlet of the cracking tube 15 are at the same height from the installation surface G, the flue gas introduction pipe 14 is not provided with a bent portion and becomes a straight pipe. It is more preferable because it becomes difficult for powder to stagnate.

Further, when the outlet 10a of the pump 10 and the inlet of the cracking tube 15 are different in height from the installation surface G, both the exhaust gas treatment apparatus 1 and the pump 10 are Alternatively, one of them can be placed on the mount D to make the heights the same.

FIG. 3 shows an exhaust gas treatment apparatus which is still another embodiment (third embodiment) to which the present invention is applied. The exhaust gas treatment apparatus in the third embodiment is different from the exhaust gas treatment apparatus in the previous embodiment in that the reaction sections 11 of the plurality of exhaust gas treatment apparatuses are connected to one tank section 12 . The rest of the configuration is the same as that of the first embodiment, and the plurality of cracking pipes 15 are inclined toward the outlet side of each pump 10, but the plurality of pumps 10 are arranged on the side of the tank portion 12. there is In the first embodiment, the pump 10, the tank portion 12, and the scrubber portion 13 are arranged in a straight line. It's becoming

As shown in the first embodiment, the exhaust gas treatment apparatus of the present invention can reduce the amount of nitrogen gas diluted, so that the amount of exhaust gas after thermal decomposition can be reduced, and it directly contributes to the decomposition of exhaust gas. You can reduce the energy you don't need. Therefore, as shown in the third embodiment, it is possible to cool the exhaust gas after thermal decomposition treatment discharged from the plurality of reaction sections in one tank section. By adopting such a mode, it is possible to provide a compact exhaust gas treatment apparatus as a whole while increasing the amount of exhaust gas to be treated. Although FIG. 3 shows an embodiment in which three exhaust gas treatment devices are connected to one tank, the number of connected exhaust gas treatment devices is limited to the extent that the exhaust gas can be cooled by cooling water. It does not matter if there are two or four or more.

FIG. 4 shows an exhaust gas treatment apparatus which is still another embodiment (fourth embodiment) to which the present invention is applied. The exhaust gas treatment apparatus of the fourth embodiment is different from the exhaust gas treatment apparatus of the first embodiment in that an automatic inner tube cleaning mechanism is provided inside the reaction section 11 . Other configurations are the same as those of the first embodiment.

The inner cylinder automatic cleaning mechanism provided in the fourth embodiment has a double cylinder structure in which the cracking tube 15 is composed of an inner cylinder 30 and an outer cylinder 31, and the inner cylinder 30 has an inner wall 32 and an outer wall 33. In order to prevent the powder generated by the thermal decomposition of the exhaust gas from accumulating inside the inner cylinder 30, the inside of the inner cylinder 30 is automatically cleaned to remove the powder. It is a mechanism to

The automatic inner cylinder cleaning mechanism has a path for injecting a powder removing gas in order to remove the powder deposited inside the inner cylinder 30 . The path extends from an external powder-removing gas source (not shown) through the through-hole 34 of the outer cylinder 31 and the powder-removing gas introduction port 35 provided in the outer wall 33 of the inner cylinder 30 . It leads to the inside of the cylinder 30 . When the powder-removing gas is jetted into the inner cylinder 30 through the path, the inner wall 32 of the inner cylinder 30 serves as a guide, so that the powder-removing gas flows along the inside of the inner cylinder 30. It flows vigorously, and the deposited powder can be peeled off and removed by the wind pressure of the gas. The removed powder is discharged to the tank portion 12 and captured by the cooling water inside the tank portion 12 .

A plurality of the powder removing gas introduction ports 35 are provided at equal intervals in the circumferential direction in the same cross section of the inner cylinder 30 in the axial direction, so that the powder can be efficiently removed from the entire inner surface of the inner wall 32. It is preferable that Any kind of powder removing gas may be used as long as the powder can be separated from the inner surface of the inner cylinder by air pressure, and nitrogen gas, dry air, or the like is preferably used. The supply pressure is, for example, about 0.2 to 0.5 MPa.

Next, using the exhaust gas treatment apparatus having the configuration shown in the first embodiment, the amount of insertion of the exhaust pipe 16 into the cooling water of the tank part 12 (water depth at the tip) is changed, and the cooling effect of the treated gas with respect to the water depth was measured. By supplying fuel and combustion-supporting gas to the cracking tube 15 and combusting the exhaust gas, a treated gas having a generated calorific value of 250 kcal/min and a gas flow rate of 1 m ³ /min was generated. The cooling water in the tank part 12 was changed at a rate of 5 L/min. Then, the amount of insertion of the exhaust pipe 16 into the cooling water was set to 65 mm, 90 mm, 115 mm, and 135 mm, and the temperature of the processing gas (exhaust gas) discharged from the exhaust port of the tank portion 12 was measured.

The results are indicated by triangles in FIG. The dashed line A in FIG. 8 is the theoretical cooling temperature value when only the latent heat of vaporization is used. From these results, it was found that a sufficient cooling effect can be exhibited by setting the amount of insertion of the exhaust pipe 16 into the cooling water to 65 mm or more, and a cooling capacity equivalent to the theoretical value can be secured by setting the amount to 90 mm or more. Understand. Therefore, it is possible to obtain a cooling capacity equivalent to that of a conventional spray-type cooling facility with an exhaust gas treatment apparatus having a simple structure and maintenance-free configuration. In addition, it is possible to use heat-resistant rigid polyvinyl chloride (heat-resistant temperature of 90°C), which is generally used as a tank material as an inexpensive material, for the tank part 12, which reduces the equipment cost. can be achieved.

In each of the above-described embodiments, the air bubble dispersing member 19 is not an essential component, and may not be provided as long as the air bubbles generated by the exhaust gas are sufficiently dispersed. Further, in each of the above embodiments, the thermal decomposition treatment of the exhaust gas is performed by a burner method, but the thermal decomposition treatment is not limited to the burner method, and a plasma method, a heater method, or the like may be employed. .

DESCRIPTION OF SYMBOLS 1... Exhaust gas processing apparatus, 10... Pump, 10a... Pump outlet, 11... Reaction part, 12... Tank part, 13... Scrubber part, 14... Exhaust gas introduction pipe , 15... Decomposition pipe, 16... Exhaust pipe, 17... Overflow pipe, 18... Cooling water inlet, 19... Air bubble dispersion material, 20... Cooling water inlet, 21. Top plate 22 Large-diameter tube portion 23 Small-diameter tube portion 24 Bottom plate 25 Water reservoir 26 Cooling water supply pipe 27 Filler , 28... spray nozzle, 29... mist catcher, 30... inner cylinder, 31... outer cylinder, 32... inner wall, 33... outer wall, 34... through hole, 35... Gas introduction port for removing powder, 50 Exhaust gas treatment device, 51 Pump, 52 Exhaust gas introduction pipe, 53 Heating part, D: Base, G: Installation surface

Claims (9)

a reaction section for thermally decomposing the exhaust gas discharged from the pump; a tank section connected to the downstream side of the reaction section and storing cooling water for cooling the high-temperature gas discharged from the reaction section by contact; a scrubber unit connected to the downstream side of the tank unit for cleaning the exhaust gas after the thermal decomposition treatment and dissolving water-soluble components contained in the gas in water, wherein
The reaction section includes an exhaust gas introduction pipe connected to the outlet of the pump, a decomposition pipe that heats and decomposes the exhaust gas supplied from the exhaust gas introduction pipe, and a product generated in the decomposition pipe that is exhausted to the tank portion. and an exhaust pipe that
An exhaust gas treatment apparatus, wherein the axis of the cracking tube is inclined. a reaction section for thermally decomposing the exhaust gas discharged from the pump; a tank section connected to the downstream side of the reaction section and storing cooling water for cooling the high-temperature gas discharged from the reaction section by contact; a scrubber unit connected to the downstream side of the tank unit for cleaning the exhaust gas after the thermal decomposition treatment and dissolving water-soluble components contained in the gas in water, wherein
The reaction section includes an exhaust gas introduction pipe connected to the outlet of the pump, a decomposition pipe that heats and decomposes the exhaust gas supplied from the exhaust gas introduction pipe, and a product generated in the decomposition pipe that is exhausted to the tank portion. and an exhaust pipe that
An exhaust gas treatment apparatus, wherein the axis of the cracking tube extends in a horizontal direction. 3. The exhaust gas treatment apparatus according to claim 1, wherein the outlet of the pump and the inlet of the cracking tube are at the same height when the exhaust gas introduction pipe is connected to the pump. 4. The exhaust gas treatment apparatus according to any one of claims 1 to 3, wherein a plurality of said reaction sections are connected to one said tank section. 5. An exhaust gas treatment apparatus according to any one of claims 1 to 4, wherein an outlet of said exhaust pipe is located below a water surface in said tank portion. 6. The reactor according to any one of claims 1 to 5, wherein said reaction section has a double cylinder structure consisting of an inner cylinder and an outer cylinder, and is provided with an inner cylinder automatic cleaning mechanism for cleaning the inner wall of said inner cylinder. 1. The exhaust gas treatment device according to item 1. The tank section includes a cooling water tank that stores cooling water up to an intermediate height, an exhaust port that is provided in the upper part of the cooling water tank and is connected to the scrubber section, and an exhaust pipe that stands upright from the bottom of the cooling water tank. a tubular overflow pipe surrounding the perimeter of the
The exhaust pipe has a cooling water introduction part whose lower end is inserted vertically into the cooling water in the cooling water tank and causes the cooling water to flow down along the inner peripheral wall above the water surface of the cooling water,
The overflow pipe is provided with a cooling water inflow part in which cooling water flows from the outside toward the inside, and the cooling water that rises accompanied by bubbles of the exhaust gas introduced into the cooling water from the exhaust pipe flows into the cooling water. It is set at a height that allows it to flow out from the upper end of the overflow pipe,
7. A bubble dispersing material for dispersing bubbles generated by the exhaust gas introduced into the cooling water from the exhaust pipe is provided between the exhaust pipe and the overflow pipe. 1. The exhaust gas treatment device according to claim 1. 8. The exhaust gas treatment apparatus according to any one of claims 1 to 7, wherein the amount of insertion of the exhaust pipe into the cooling water of the tank portion is 65 mm or more. 9. An exhaust gas treatment apparatus according to any one of claims 1 to 8, wherein said exhaust gas is discharged from a reaction chamber of an electronic device manufacturing apparatus.

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