JP2536297Y2 - Magnetic circuit for sputtering equipment - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic circuit arranged on a magnetron electrode of a sputtering apparatus for producing a thin film.

[0002]

2. Description of the Related Art As shown in FIG. 2, a magnetic circuit arranged on a magnetron electrode portion of a conventional sputtering apparatus is as follows.
A columnar permanent magnet 2 magnetized in the height direction is fixed to the center of a disk-shaped yoke 1, and the yoke 1 is mounted on the outer periphery of the yoke 1 so as to be magnetized to have a different polarity from the columnar permanent magnet 2. An annular permanent magnet 3 magnetized in the vertical direction is fixed on the yoke 1 to form a magnetic circuit. Magnetic lines of force 6 generated from the cylindrical permanent magnet 2 and the annular permanent magnet 3 forming the magnetic circuit form a toroidal magnetic field required for sputtering, and a target 7 which also functions as an electrode is disposed in the toroidal magnetic field. I have.

[0003]

Conventionally, in this type of magnetic circuit, when the strength of the toroidal magnetic field is increased in order to improve the efficiency of sputtering, the diameter of the permanent magnet may be increased. The size of the permanent magnet in the radial direction cannot be increased because it is restricted by the size of the target. Therefore, it is necessary to increase the height dimension of the permanent magnet, and there is a problem that the size of the apparatus is increased and the manufacturing cost is increased. Further, when the height of the permanent magnet is increased, the amount of leakage magnetic flux increases, and there is a problem that the effective magnetic field acting on the target does not become strong.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a magnetic circuit for a sputtering apparatus which is arranged on a magnetron electrode portion of a sputtering apparatus which forms a strong toroidal magnetic field without increasing the size of the entire magnetic circuit.

[0005]

In order to achieve the above object, in the magnetic circuit of the present invention, there is provided a cylindrical circuit arranged at the inner peripheral surface of an annular permanent magnet fixed to a yoke and at the center of the annular permanent magnet. A ring-shaped auxiliary permanent magnet is inserted and arranged in the space with the outer peripheral surface of the permanent magnet to form a magnetic circuit, and the magnetic pole of the auxiliary permanent magnet is fixed in the height direction fixed to the yoke. The magnetization direction of the two magnetized permanent magnets is a radial magnetization direction that is perpendicular to the magnetization direction. The magnetic poles on the outer peripheral surface are annular permanent magnets, and the magnetic poles on the inner peripheral surface are cylindrical permanent magnets. It is magnetized to have the same polarity, and the toroidal magnetic field is configured to be strong by a magnetic circuit in which a ring-shaped auxiliary permanent magnet is inserted and arranged without increasing the size of the conventional magnetic circuit as a whole. It is.

That is, the present invention provides a magnetic circuit arranged on a magnetron electrode portion of a sputtering apparatus, in which a columnar permanent magnet magnetized in the height direction is provided at a central portion of a disk-shaped yoke, and a circular magnet is provided at an outer peripheral portion. A columnar permanent magnet and an annular permanent magnet magnetized in the height direction with polarities of different polarity are fixed, and an annular support made of non-magnetic material is inserted into the space between the annular permanent magnet and the cylindrical permanent magnet. Installed, a ring-shaped auxiliary permanent magnet is arranged above the support base, and the polarity of the auxiliary permanent magnet is fixed to the yoke. The magnet is magnetized in the radial direction that is perpendicular to the magnet, and the magnetism on the outer peripheral surface is magnetized to have the same polarity as that of the ring-shaped permanent magnet, and the magnetism on the inner peripheral surface is the same as that of the columnar permanent magnet. Forming a magnetic circuit for a sputtering apparatus A.

[0007]

The magnetic circuit constructed as described above is provided between the main permanent magnet and the magnetic flux generated from the annular permanent magnet and the columnar permanent magnet, which are the main permanent magnets fixed to the yoke. A magnetic field generated from the disposed auxiliary permanent magnet is combined with the auxiliary permanent magnet to form a magnetic path, thereby forming a strong toroidal magnetic field.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a sectional view showing a configuration of a magnetic circuit for a sputtering apparatus according to the present invention. In FIG. 1, a disk-shaped yoke 1
A magnetic columnar permanent magnet 2 magnetized in the height direction and having the N-pole on the yoke 1 side and the S-pole on the opposite side, which is magnetized in the height direction, is fixed to the center of the magnet. On the outer periphery of the yoke 1, the yoke 1 side magnetized in the height direction so as to have a polarity opposite to that of the columnar permanent magnet 2 is S.
A magnetic annular permanent magnet 3 having a pole and an N pole on the opposite side is fixed concentrically with the columnar permanent magnet 2. Further, an annular support base 5 made of a non-magnetic material is inserted and installed in the space between the inner peripheral surface of the main annular permanent magnet 3 fixed to the yoke 1 and the outer peripheral surface of the cylindrical permanent magnet 2. A magnetic circuit is formed by disposing the ring-shaped auxiliary permanent magnet 4 above the support base 5. The magnetism of the auxiliary permanent magnet 4 is different from the magnetization direction of the cylindrical permanent magnet 2 fixed to the yoke 1 and magnetized in the height direction and the annular permanent magnet 3 arranged on the outer periphery of the cylindrical permanent magnet 2. In this embodiment, the magnetic pole on the outer peripheral surface is the same as that of the ring-shaped permanent magnet 3 and is the N pole.
The magnetic pole on the inner peripheral surface is magnetized to the S pole having the same polarity as the cylindrical permanent magnet, and is toroidally formed by the magnetic force lines 6 generated from the cylindrical permanent magnet 2, the annular permanent magnet 3, and the ring-shaped auxiliary permanent magnet 4. A magnetic field is formed, and the target 7 is placed in the toroidal magnetic field.

[0009]

[Effects of the Invention] Since the present invention is configured as described above, it has the following effects. A ring-shaped auxiliary permanent magnet that is magnetized in the radial direction is arranged in the space between the ring-shaped permanent magnet and the columnar permanent magnet that are mainly magnetized in the yoke, and the lines of magnetic force of each permanent magnet are By configuring the magnetic circuit to be synthesized, it is possible to provide a magnetic circuit for a sputtering apparatus which forms an effective strong toroidal magnetic field acting on a target without increasing the size of the conventional magnetic circuit as a whole.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of a magnetic circuit of the present invention.

FIG. 2 is a sectional view showing a configuration of a conventional magnetic circuit.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 yoke 2 columnar permanent magnet 3 annular permanent magnet 4 auxiliary permanent magnet 5 support 6 magnetic field line 7 target

Claims (1)

(57) [Scope of request for utility model registration] In a magnetic circuit arranged on a magnetron electrode portion of a sputtering apparatus, a columnar permanent magnet magnetized in a height direction in a central portion of a disk-shaped yoke, and a columnar permanent magnet on an outer peripheral portion. A magnet and a ring-shaped permanent magnet magnetized in the height direction with different polarities are fixed, and a ring-shaped support base made of non-magnetic material is inserted and installed in the space between the ring-shaped permanent magnet and the columnar permanent magnet, A ring-shaped auxiliary permanent magnet is arranged on the upper side of the support base, and the polarity of the auxiliary permanent magnet is fixed to the yoke. Magnetize in the radial direction that becomes a right angle direction, magnetize the outer surface magnet to have the same polarity as the annular permanent magnet, and the inner surface magnet to have the same polarity as the columnar permanent magnet to form a toroidal magnetic field. A magnetic circuit for a sputtering apparatus.