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JP2699757B2 - Manufacturing method of printed wiring board - Google Patents

Manufacturing method of printed wiring board

Info

Publication number
JP2699757B2
JP2699757B2 JP4060239A JP6023992A JP2699757B2 JP 2699757 B2 JP2699757 B2 JP 2699757B2 JP 4060239 A JP4060239 A JP 4060239A JP 6023992 A JP6023992 A JP 6023992A JP 2699757 B2 JP2699757 B2 JP 2699757B2
Authority
JP
Japan
Prior art keywords
printed wiring
wiring board
etching
manufacturing
etching resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4060239A
Other languages
Japanese (ja)
Other versions
JPH05267822A (en
Inventor
一智 比嘉
章子 辻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP4060239A priority Critical patent/JP2699757B2/en
Publication of JPH05267822A publication Critical patent/JPH05267822A/en
Application granted granted Critical
Publication of JP2699757B2 publication Critical patent/JP2699757B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、各種電子機器などに使
用されるプリント配線板の製造方法に関するものであ
る。
The present invention relates are those which relate to a method for manufacturing a printed wiring board, such as those used in various electronic devices.

【0002】[0002]

【従来の技術】近年、各種電子機器などに数多く使用さ
れているプリント配線板は、電子機器の小型化や多機能
化に伴い、配線の高密度化とともに高い信頼性が要求さ
れるようになってきている。従って、プリント配線とな
る絶縁基板上の導体パターンの形成方法におけるエッチ
ングレジストの形成は、従来のスクリーン印刷法に代わ
り、感光性ドライフィルムなどを用いた高解像性を有す
る写真現像法がよく用いられるようになってきている。
2. Description of the Related Art In recent years, printed wiring boards, which are widely used in various kinds of electronic devices, are required to have higher densities of wiring and higher reliability as electronic devices become smaller and more multifunctional. Is coming. Therefore, the formation of an etching resist in the method of forming a conductor pattern on an insulating substrate to be a printed wiring is often performed by a photo-developing method having high resolution using a photosensitive dry film instead of a conventional screen printing method. It is becoming possible.

【0003】以下に従来のプリント配線板の製造方法に
ついて説明する。図2は従来のプリント配線板の製造方
法を示すものである。図2において、1は絶縁基板、2
aは銅はく、2bは導体パターン、3はプリント配線板
製造用パネル、4は感光性エッチングレジスト、5は形
成されたエッチングレジスト、6は露光装置、7は現像
装置、8は現像後の水洗・絞り・乾燥装置、9はエッチ
ング装置である。
Hereinafter, a conventional method for manufacturing a printed wiring board will be described. FIG. 2 shows a conventional method for manufacturing a printed wiring board. In FIG. 2, 1 is an insulating substrate, 2
a is copper foil, 2b is a conductor pattern, 3 is a panel for manufacturing a printed wiring board, 4 is a photosensitive etching resist, 5 is an etching resist formed, 6 is an exposure device, 7 is a developing device, and 8 is a developed device. A washing / squeezing / drying device 9 is an etching device.

【0004】以上のように構成されたプリント配線板の
製造方法について、以下にその動作について説明する。
The operation of the method for manufacturing a printed wiring board having the above-described configuration will be described below.

【0005】まず、絶縁基板1と銅はく2aとで構成さ
れた銅張積層板を所定サイズに切断したプリント配線板
製造用パネル3の銅はく2a上に図2(b)に示すよう
にドライフィルム状の感光性エッチングレジスト4を被
覆・形成する。次にドライフィルム状の感光性エッチン
グレジスト4が形成されたプリント配線板製造用パネル
3を図2(a)に示すような露光装置6に搬送し、導体
パターン形成用のマスクフィルムを真空密着させ、紫外
線にて感光性エッチングレジスト4を露光し、図2
(a)に示すような現像装置7にて所定のアルカリ現像
液で図2(c)に示すように感光性エッチングレジスト
4の未露光部分を現像・除去し、図2(a)に示すよう
に水洗・絞り・乾燥装置8を経て、エッチングレジスト
5を銅はく2a上に形成した後、プリント配線板製造用
パネル3を引続いて、図2(a)に示すようなエッチン
グ装置9へ搬送する。通常アルカリ現像型のエッチング
レジスト5は、苛性ソーダ等のアルカリ剥離液で剥離の
後、図2(e)に示すように絶縁基板1上に銅はく2a
より構成される導体パターン2bを形成している。
First, as shown in FIG. 2 (b), a copper clad laminate composed of an insulating substrate 1 and a copper foil 2a is cut into a predetermined size on a copper foil 2a of a printed wiring board manufacturing panel 3 as shown in FIG. Is coated and formed with a photosensitive etching resist 4 in the form of a dry film. Next, the printed wiring board manufacturing panel 3 on which the photosensitive etching resist 4 in the form of a dry film is formed is transported to an exposure apparatus 6 as shown in FIG. 2A, and a mask film for forming a conductor pattern is brought into close contact with the vacuum. Exposure of the photosensitive etching resist 4 with ultraviolet light, FIG.
As shown in FIG. 2C, an unexposed portion of the photosensitive etching resist 4 is developed and removed with a predetermined alkali developing solution in a developing device 7 as shown in FIG. After the etching resist 5 is formed on the copper foil 2a via a water washing / squeezing / drying device 8, the printed wiring board manufacturing panel 3 is successively transferred to an etching device 9 as shown in FIG. Transport . Usually alkaline development type etching
The resist 5 is stripped with an alkali stripper such as caustic soda.
Thereafter, as shown in FIG. 2E, copper foil 2a is placed on the insulating substrate 1.
The conductor pattern 2b is formed.

【0006】[0006]

【発明が解決しようとする課題】しかしながら上記の従
来の構成では、アルカリ現像液で感光性エッチングレジ
スト4の未露光部分を現像・除去し、水洗・絞り・乾燥
装置8を経て、引続きエッチング装置9へ搬送され、連
続的に処理されるため、現像後のプリント配線板製造用
パネル3上に残留するアルカリ現像液は、特にエッチン
グレジスト5が高密度に形成された部分においてはエッ
チングレジスト厚が30〜50μmと厚いため、水洗・
絞り・乾燥装置8における水洗・除去が不十分な状態と
なり、プリント配線板製造用パネル3の表面状態がアル
カリ性の領域となり、露光・重合されたエッチングレジ
スト皮膜においてもアルカリ領域状態では不安定な状態
になる性質を有するアルカリ現像型のドライフィルム状
感光性エッチングレジストでは、形成されたエッチング
レジスト5が高温状態でエッチング溶液に曝され、エッ
チング溶液中においてエッチングレジスト5と銅はく2
aとの密着強度が不安定状態となり、エッチング装置9
内におけるプリント配線板製造用パネル3へのエッチン
グ溶液噴射や搬送部分での物理的接触などにより高密度
に形成されたエッチングレジスト5部分の剥離や欠損な
どが誘発され、エッチング後の導体パターン2b断線
や欠損を発生させ、プリント配線板製造工程保留まり
を著しく悪化させるという問題点を有していた。
However, in the above-mentioned conventional configuration, the unexposed portion of the photosensitive etching resist 4 is developed and removed with an alkali developing solution, and then is passed through a washing / squeezing / drying device 8 and subsequently an etching device 9. The alkaline developer remaining on the printed wiring board manufacturing panel 3 after development is reduced to a thickness of 30 in the portion where the etching resist 5 is formed at a high density. Because it is as thick as ~ 50 µm,
The washing / removal in the squeezing / drying device 8 becomes insufficient, the surface state of the printed wiring board manufacturing panel 3 becomes an alkaline region, and the exposed / polymerized etching resist film is unstable in the alkaline region state. In the case of an alkali-developing dry film photosensitive etching resist having the property of becoming, the formed etching resist 5 is exposed to an etching solution at a high temperature, and the etching resist 5 and the copper foil 2 are exposed in the etching solution.
a becomes in an unstable state, and the etching device 9
Etching of the etching solution onto the printed wiring board manufacturing panel 3 or physical contact at the transporting portion in the inside of the inside causes peeling or loss of the etching resist 5 portion formed at a high density, and the conductive pattern 2b after the etching is removed . There has been a problem that disconnection or breakage is caused, and the suspension of the manufacturing process of the printed wiring board is remarkably deteriorated.

【0007】この問題を回避するため水洗・絞り・乾燥
装置8における水洗のスプレー圧力を20〜30%増加
させ、現像後のエッチングレジスト5パターンの高密度
部分のアルカリ現像液を十分に水洗、洗い流し、プリン
ト配線板製造用パネル3表面状態を中性状態にさせる方
法を実施する場合があるが、水洗時に現像後の不安定状
態のエッシングレジスト5にダメージを与え、エッチン
グレジスト5の剥離や欠損を誘発させる危険性があり、
高密度・高精度な導体パターン2bを有するプリント配
線板の製造には不向きなものであった。
In order to avoid this problem, the spray pressure for washing in the washing / squeezing / drying device 8 is increased by 20 to 30% to sufficiently wash and wash the alkali developing solution in the high-density portion of the developed etching resist 5 pattern. flow and, although the panel 3 surface state for printed wiring board manufacture which may implement the method of the neutral state, damage to the edge Thing resist 5 of instability after the development at the time of washing, peeling the etching resist 5 And risk of deficiency,
It is not suitable for manufacturing a printed wiring board having a high-density and high-precision conductive pattern 2b.

【0008】本発明は上記従来の問題点を解決するもの
で、高密度・高精度な導体パターンを有するプリント配
線板を歩留まりよく提供することを目的とする。
An object of the present invention is to solve the above-mentioned conventional problems and to provide a printed wiring board having a high-density and high-precision conductive pattern with a high yield.

【0009】[0009]

【課題を解決するための手段】この目的を達成するため
に本発明は、絶縁基板上の導体層にアルカリ現像および
アルカリ剥離型の感光性エッチングレジストが形成され
たプリント配線板製造用パネルをエッチングする際、前
記感光性エッチングレジストの未露光部を現像・水洗・
絞り・乾燥した直後に、酸性領域でかつ常温の水溶液に
浸した後、露出した導体層をエッチングすることにより
プリント配線板を製造することである。
[MEANS FOR SOLVING THE PROBLEMS] To achieve this object
In the present invention, the conductive layer on the insulating substrate alkali development and
Alkali stripping type photosensitive etching resist is formed
Before etching a printed wiring board manufacturing panel
Develop, rinse, and clean the unexposed areas of the photosensitive etching resist.
Immediately after being squeezed and dried, it is converted to an aqueous solution in the acidic region and at room temperature.
After soaking, by etching the exposed conductor layer
To manufacture a printed wiring board.

【0010】[0010]

【作用】アルカリ現像型の感光性エッチングレジストは
アルカリ水溶液や高温の水溶液に浸すと耐性および密着
性が低下し現像および剥離する性質があり、逆に酸性か
つ常温の水溶液に浸すと現像および剥離しにくくなるこ
とを確認したことから、露光・現像および水洗・絞り・
乾燥した直後のアルカリ現像型の感光性エッチン グレジ
ストを酸性領域かつ常温の水溶液に浸すことにより、ア
ルカリ現像液および水洗・絞り並びに乾燥時の加熱によ
って、耐性が低下したエッチングレジストを酸性領域か
つ常温の水溶液に浸すことによって、エッチングレジス
トの耐性を向上し、導体層との密着を向上させることが
できる。このことから高温のエッチング条件に曝される
前に、感光性エッチングレジストの耐性を一旦高めるこ
とにより、エッチング装置内でのエッチングレジストの
部分的な剥離や欠損を防止することができる。
[Action] Alkaline development type photosensitive etching resist
Resistance and adhesion when immersed in alkaline aqueous solution or high temperature aqueous solution
Has the property of deteriorating and developing and peeling.
Immersion in an aqueous solution at room temperature makes development and peeling difficult.
And exposure, development and washing with water, squeezing,
The photosensitive etching Gureji of alkali development type immediately after drying
By immersing the glass in an aqueous solution at room temperature in the acidic region,
Lukari developer and washing / squeezing and heating during drying
The etching resist with reduced resistance
By immersing it in an aqueous solution at room temperature
The contact resistance with the conductor layer.
it can. This exposes them to high temperature etching conditions
Before improving the resistance of the photosensitive etching resist,
And the etching resist in the etching apparatus
Partial peeling or loss can be prevented.

【0011】[0011]

【実施例】以下本発明の一実施例について、図面を参照
しながら説明する。図1は、本発明の一実施例における
プリント配線板の製造方法を示すものである。
An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a method of manufacturing a printed wiring board according to one embodiment of the present invention.

【0012】図1において、11は絶縁基板、12aは
銅はく、12bは導体パターン、13はプリント配線板
製造用パネル、14は感光性エッチングレジスト、15
は形成されたエッチングレジスト、16は露光装置、1
7は現像装置、18は現像後の水洗・絞り・乾燥装置、
19はエッチング装置、19aは酸性領域の水溶液処理
用の第1のブース、19bはエッチング用の第2のブー
スである。
In FIG. 1, 11 is an insulating substrate, 12a is copper foil, 12b is a conductor pattern, 13 is a panel for manufacturing a printed wiring board, 14 is a photosensitive etching resist, 15
Is the formed etching resist, 16 is the exposure device, 1
7 is a developing device, 18 is a washing / squeezing / drying device after development,
Reference numeral 19 denotes an etching apparatus, 19a denotes a first booth for treating an aqueous solution in an acidic region, and 19b denotes a second booth for etching.

【0013】以上のように構成された製造装置によるプ
リント配線板の製造方法について、図1を用いてその動
作を説明する。
The operation of the method for manufacturing a printed wiring board by the manufacturing apparatus configured as described above will be described with reference to FIG.

【0014】まず、絶縁基板11と銅はく12aとで構
成された銅張積層板を所定サイズに切断したプリント配
線板製造用パネル13の銅はく12a上に図1(b)に
示すようにドライフィルム状の感光性エッチングレジス
ト14を被覆・形成する。ドライフィルム状の感光性エ
ッチングレジスト14が形成されたプリント配線板製造
用パネル13を図1(a)に示すように露光装置16に
搬送し、導体パターン形成用のマスクフィルムを真空密
着させ、紫外線により光量約40〜100mj/cm2
条件で露光性エッチングレジスト14を露光する。
First, as shown in FIG. 1B, on a copper foil 12a of a printed wiring board manufacturing panel 13 obtained by cutting a copper-clad laminate composed of an insulating substrate 11 and a copper foil 12a into a predetermined size. Is coated and formed with a photosensitive etching resist 14 in the form of a dry film. The printed wiring board manufacturing panel 13 on which the dry film-shaped photosensitive etching resist 14 is formed is transported to the exposure device 16 as shown in FIG. The light-exposed resist 14 is exposed under the condition of a light amount of about 40 to 100 mj / cm 2 .

【0015】次に、露光後のプリント配線板製造用パネ
ル13を搬送コンベア上を一定の速度で図1(a)に示
すように現像装置17へ搬送させ、現像装置17内で濃
度約1wt%の炭酸ナトリウムからなるアルカリ現像液
を用い、圧力約1.0〜2.0kg/cm2、処理時間約4
5〜60秒の条件で感光性エッチングレジスト14の未
露光部分を現像、除去し、図1(c)に示すように銅は
く12a上にエッチングレジスト15を形成する。
Next, the exposed printed wiring board manufacturing panel 13 is transported on the transport conveyor to the developing device 17 at a constant speed as shown in FIG. Pressure of about 1.0 to 2.0 kg / cm 2 , processing time of about 4
The unexposed portion of the photosensitive etching resist 14 is developed and removed under the conditions of 5 to 60 seconds, and an etching resist 15 is formed on the copper foil 12a as shown in FIG.

【0016】次に、図1(a)に示すようにプリント配
線板製造用パネル13は水洗・絞り・乾燥装置18へ搬
送され、プリント配線板製造用パネル13表面に残留し
ている現像液を水洗、洗い流し、絞り・乾燥処理され
る。次にプリント配線板製造用パネル13は、図1
(a)に示すようにエッチング装置19の第1のブース
19aにおいてpH2.0〜6.0、液温20〜30
の酸性領域の水溶液によりスプレー圧力0.5〜2.0
kg/cm2、処理時間5〜10秒の条件で処理される。処
理後のプリント配線板製造用パネル13の表面状態は、
pH2.0〜6.0と酸性領域の状態となり、同時に絞
り・乾燥処理後のプリント配線板製造用パネル13の表
面温度は約50〜60℃に上昇しているが、エッチング
装置19の第1のブース19a通過後のプリント配線板
製造用パネル13の表面温度は約20〜30℃に降下
し、形成されたエッチングレジスト15皮膜の強度およ
び銅はく12aとの密着性が強化・改善される。
Next, as shown in FIG. 1A, the printed wiring board manufacturing panel 13 is conveyed to a washing / squeezing / drying device 18 to remove the developing solution remaining on the surface of the printed wiring board manufacturing panel 13. Washed, rinsed, squeezed and dried. Next, the printed wiring board manufacturing panel 13 is shown in FIG.
As shown in (a), in the first booth 19a of the etching apparatus 19, the pH is 2.0 to 6.0 and the liquid temperature is 20 to 30 ° C.
Spray pressure 0.5 to 2.0 depending on the aqueous solution of acidic region
The processing is performed under the conditions of kg / cm 2 and a processing time of 5 to 10 seconds. The surface condition of the printed wiring board manufacturing panel 13 after the treatment is as follows.
The surface temperature of the printed wiring board manufacturing panel 13 after the squeezing and drying treatment has risen to about 50 to 60 ° C. at the same time. The surface temperature of the printed wiring board manufacturing panel 13 after passing through the booth 19a drops to about 20 to 30 ° C., and the strength of the formed etching resist 15 film and the adhesion to the copper foil 12a are strengthened and improved. .

【0017】ついで図1(a)に示すようにエッチング
装置19の第2のブース19bに搬送されたプリント配
線板製造用パネル13は、塩化第2銅などの強酸性エッ
チング溶融にてエッチングが施され、エッチングレジス
ト15を剥離の後、図1(d)に示すように絶縁基板1
1上に導体パターン12bが形成される。
Next, as shown in FIG. 1A, the printed wiring board manufacturing panel 13 transported to the second booth 19b of the etching apparatus 19 is etched by a strongly acidic etching melt such as cupric chloride. And etching resist
After peeling off the substrate 15 , as shown in FIG.
1, a conductor pattern 12b is formed.

【0018】本実施例によるプリント配線板の製造方法
と従来のプリント配線板の製造方法を比較すると、エッ
チング装置内におけるエッチングレジスト剥離や欠損に
よる導体パターン断線や欠損の発生約90%以上が改
善された結果を確認できた。
[0018] Comparing the manufacturing method of this embodiment according to the printed wiring board manufacturing method of the conventional printed circuit board, occurrence of the conductor pattern breakage and defects due to etching resist peeling and defects in the etching apparatus improved about 90% or more The result was confirmed.

【0019】以上のように本実施例によれば、エッチン
グ前にプリント配線板製造用パネルを酸性領域の水溶液
で処理、冷却することにより、エッチング装置内におけ
るエッチングレジスト剥離や欠損の発生を著しく改善す
ることができる。
As described above, according to the present embodiment, before the etching, the panel for manufacturing a printed wiring board is treated with an aqueous solution in an acidic region and cooled, so that the occurrence of peeling of the etching resist and the occurrence of defects in the etching apparatus are remarkably improved. can do.

【0020】なお、本発明の実施の形態においてプリン
ト配線板は片面プリント配線板としたがプリント配線板
は両面や多層プリント配線板としてもよい。また、エッ
チング溶液は塩化第2銅としたがエッチング溶液は塩化
第2鉄や硫酸銅などの酸性エッチング溶液としてもよい
ことは言うまでもない。
Although the printed wiring board is a single-sided printed wiring board in the embodiment of the present invention, the printed wiring board may be a double-sided or multilayer printed wiring board. Although the etching solution is cupric chloride, it goes without saying that the etching solution may be an acidic etching solution such as ferric chloride or copper sulfate.

【0021】[0021]

【発明の効果】以上のように本発明は、エッチング前に
プリント配線板製造用パネルを酸性水溶液で処理、冷却
することにより、高密度・高精度な導体パターンのプリ
ント配線板を歩留まりよく生産することができる優れた
プリント配線板の製造方法を実現できるものである。
As described above, according to the present invention, a printed wiring board having a high-density and high-precision conductive pattern is produced with a high yield by treating and cooling the printed wiring board manufacturing panel with an acidic aqueous solution before etching. Can be excellent
A method for manufacturing a printed wiring board can be realized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は本発明の実施例におけるプリント配線
板の製造装置の概念図 (b)〜(e)は本発明の実施例におけるプリント配線
板の製造方法の製造過程の断面図
FIG. 1A is a conceptual diagram of a printed wiring board manufacturing apparatus according to an embodiment of the present invention. FIGS. 1B to 1E are cross-sectional views of a manufacturing process of a printed wiring board manufacturing method according to an embodiment of the present invention.

【図2】(a)は従来のプリント配線板の製造装置の概
念図 (b)〜(d)は従来のプリント配線板の製造方法の製
造過程の断面図
2A is a conceptual diagram of a conventional printed wiring board manufacturing apparatus, and FIGS. 2B to 2D are cross-sectional views of a manufacturing process of a conventional printed wiring board manufacturing method.

【符号の説明】[Explanation of symbols]

11 絶縁基板 12a 銅はく 12b 導体パターン 13 プリント配線板製造用パネル 14 感光性エッチングレジスト 15 エッチングレジスト 16 露光装置 17 現像装置 18 水洗・絞り・乾燥装置 19 エッチング装置 19a 酸性領域の水溶液処理用の第1のブース 19b エッチング用の第2のブース DESCRIPTION OF SYMBOLS 11 Insulating substrate 12a Copper foil 12b Conductive pattern 13 Panel for manufacturing printed wiring board 14 Photosensitive etching resist 15 Etching resist 16 Exposure device 17 Developing device 18 Rinsing / squeezing / drying device 19 Etching device 19a Aqueous solution treatment for acidic area aqueous solution Booth 1 19b Second booth for etching

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 絶縁基板上の導体層にアルカリ現像型の
感光性エッチングレジストが形成されたプリント配線板
製造用パネルをエッチングする際、前記感光性エッチン
グレジストの未露光部を現像・水洗・絞り・乾燥した直
後に、酸性領域でかつ常温の水溶液に浸した後、露出し
た導体層をエッチングすることを特徴とするプリント配
線板の製造方法。
1. An alkali-developing type conductive layer is provided on a conductive layer on an insulating substrate.
Printed wiring board with photosensitive etching resist
When etching a production panel, the photosensitive etchant
After developing, washing, squeezing and drying the unexposed part of the resist,
Later, after immersion in an aqueous solution at room temperature in an acidic area,
Printed wiring characterized by etching a conductive layer
Manufacturing method of wire plate.
JP4060239A 1992-03-17 1992-03-17 Manufacturing method of printed wiring board Expired - Lifetime JP2699757B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4060239A JP2699757B2 (en) 1992-03-17 1992-03-17 Manufacturing method of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4060239A JP2699757B2 (en) 1992-03-17 1992-03-17 Manufacturing method of printed wiring board

Publications (2)

Publication Number Publication Date
JPH05267822A JPH05267822A (en) 1993-10-15
JP2699757B2 true JP2699757B2 (en) 1998-01-19

Family

ID=13136431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4060239A Expired - Lifetime JP2699757B2 (en) 1992-03-17 1992-03-17 Manufacturing method of printed wiring board

Country Status (1)

Country Link
JP (1) JP2699757B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05267821A (en) * 1992-03-17 1993-10-15 Matsushita Electric Ind Co Ltd Method and apparatus for manufacturing printed wiring board

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444774A (en) * 1977-09-14 1979-04-09 Matsushita Electric Works Ltd Method of fabricating printed board
JPH05267821A (en) * 1992-03-17 1993-10-15 Matsushita Electric Ind Co Ltd Method and apparatus for manufacturing printed wiring board

Also Published As

Publication number Publication date
JPH05267822A (en) 1993-10-15

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