JP2755191B2 - Display device container - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a container for a display device comprising two substrates, and is particularly suitable for a field emission display device.

[0002]

2. Description of the Related Art An electric field applied to a metal or semiconductor surface is 10
^At about ⁹ [V / m], electrons pass through the barrier and emit electrons in a vacuum even at room temperature due to the tunnel effect.
This phenomenon has been known for a long time as field emission (Field Emission), and a cathode that emits electrons by using such a principle is called a field emission cathode (Fiel Emission).
d Emission Cathode). In recent years, it has become possible to make the above-described micron-sized field emission cathode by making full use of semiconductor microfabrication technology. By forming a large number of field emission cathodes on a substrate, it is possible to create a surface emission type field emission array. It is possible. It has been proposed to apply such a field emission array as an electron source for a display device, a CRT, an electron microscope, or an electron beam device.

FIG. 5 shows a conventional display device as an example of an application example. In this display device (hereinafter, referred to as FED), a cathode substrate 1 on which a field emission array 10 is formed and an anode substrate 5 are arranged to face each other at a predetermined interval to form a container for holding the inside at a high vacuum. I have. The field emission array 10 formed on the cathode substrate 1 includes a cathode conductor 2 formed by sputtering or the like, a plurality of conical emitter cones 9 formed thereon, and a portion near the tip of the emitter cone 9. A Spindt-type field emission array 10 composed of the gate conductor 8 and the gate conductor 8. Further, inside the anode substrate 5, an anode conductor 6-1 and a phosphor layer 6-2 are stacked thereon to form a light emitting section 6.

The pitch between the emitter cones 9 can be made with a dimension of 10 μm or less, and tens to hundreds of thousands of such emitter cones 9 are provided on one cathode substrate 1. I have. In the field emission array emission, since the distance between the gate and cathode can be a sub-micron, electrons from the emitter cone 9 by applying a voltage V _GE of only a few 10 volts between the gate and cathode You can do it.

Since a positive voltage _VA is applied to the anode conductor 6-1 with respect to the gate conductor 8, the electrons emitted from the emitter cone 9 are accelerated in the dashed trajectory shown in FIG. -1. At this time, the captured electrons collide with the phosphor layer 6-2 laminated on the anode conductor 6-1 to excite the phosphor layer 6-2, so that the phosphor layer 6-2 emits light. This light emission can be observed through the transparent anode substrate 5.

By the way, a side plate or a glass bead or a glass fiber is sandwiched around the peripheral portion so that the distance between the anode substrate 5 and the cathode substrate 1 is several hundred microns, but the inside is kept under high vacuum. Since the container is pulled, the container constituted by the anode substrate 5 and the cathode substrate 4 is pressed by the atmospheric pressure and bends so as to reduce the interval. Therefore, in order to prevent this, a plurality of spacers 3 are arranged at a predetermined interval between the anode substrate 5 and the cathode substrate 1, so that a predetermined interval is maintained over the entire container.

[0007] One end of the spacer 3 is a seal glass 11
The other end of the spacer 3 is welded to the cathode substrate 1 by the seal glass 11. A plurality of the spacers 3 are provided at a portion where the FEC 10 is not formed at intervals of about 2 mm.

Here, a method for manufacturing a container in which the spacers 3 are disposed in the container will be described with reference to FIGS. First, several hundreds of glass fibers 101 having a diameter of, for example, about 50 μm, which are materials for forming the spacers 3, are fixed on a glass base 100 with an adhesive so as to be in close contact with each other as shown in FIG. In this case, the glass base 100
The glass fiber 101 is fixed so as to be parallel to the long axis. Then, the wafer is repeatedly cut by a dicing saw along a cutting line so as to have a predetermined length, for example, about 200 μm.

The cut glass fiber 101 is set on a jig 110 for positioning a position provided on the anode substrate 5 as a spacer 3 after the fixed adhesive is melted by a solvent and further washed. Is done. This jig 110 has a box shape as shown in FIG.
An erect portion 111 having an opening 114 for erecting and holding the glass fiber 101 having a predetermined length.
, A porous portion 112 made of a porous material, and a jig 110
And an exhaust unit 113 for exhausting the inside. The position of the opening 114 is provided corresponding to the position where the spacer is provided on the anode substrate 5.

In the jig 110 having such a structure, a glass fiber cut into a predetermined length is placed on the upright portion 111 of the jig 110 while the inside of the jig 110 is evacuated by connecting a vacuum pump to the exhaust portion 113. When spraying 101, the gas drawn from the opening 114 passes through the porous portion 112 and is exhausted from the exhaust portion 113, so that the diameter is slightly larger than the diameter of the glass fiber 101 having a predetermined length. The glass fiber 101 is set so as to enter and stand in the opening 114, and the glass fiber 101 is sucked into the opening 114 to maintain the standing state as shown in FIG. 3B.

In this state, a glass substrate 120 coated with a transfer paste 121 is placed on a jig 110 as shown in FIG. 3C, and the transfer paste is placed on the upper end of the glass fiber 101 held by the jig 110. The glass substrate 120 is placed on the glass fiber 101 so that the substrate 121 is transferred.
Contact. Next, the glass substrate 101 is attached to a predetermined position of the anode substrate 5 by positioning and placing the anode substrate 5 on the jig 110 holding the glass fiber 101 to which the transfer paste 121 has been transferred. Then, the transfer paste 121 is melted by firing the anode substrate 5, and one end of the glass fiber 101 is welded to the anode substrate 5.

The transfer paste 121 is mainly composed of a low-melting-point seal glass 11 mixed with lead so that the thermal expansion coefficient of the transfer paste 121 matches that of the glass anode substrate 5. It is mixed into a sticky paste, and the resin or the like is dissipated by baking to leave the seal glass 11. The light emitting portion 6 is formed on almost the entire surface of the anode substrate 5, and the portion where the glass fiber 101 is welded is a gap portion while the light emitting portion 6 is formed.

In the anode substrate 5 in which one end of the glass fiber 101 is welded as the spacer 3,
Further, the glass substrate 12 coated with the transfer paste 121 so as to transfer the transfer paste 121 to the other end of the spacer 3.
0 is brought into contact with the other end of the spacer 3. Next, in a state where the cathode substrate 1 is positioned and superposed on the anode substrate 5 and sealed in a sealing furnace, the transfer paste 12 is formed.
1 is melted, and the spacer 3 and the cathode substrate 1 are welded. That is, a container including the anode substrate 5 and the cathode substrate is formed. In this case, a side plate having a predetermined thickness, glass beads, glass fiber, or the like is sandwiched and sealed together with the sealing glass on the peripheral edges of the cathode substrate 1 and the anode substrate 5,
An airtight container capable of forming a vacuum inside is formed, and after sealing, the inside of the container is evacuated to produce a display device as shown in FIG.

[0014]

However, in a conventional display device container having a spacer as shown in FIG. 5, electrons emitted from the emitter cone 9 excite the phosphor layer 6-2 of the light emitting section 6. However, since electrons are emitted from the emitter cone 9 at a considerably wide angle, the electrons are irradiated on the sealing glass 11 in which the spacer 3 is fused to the anode substrate 5 as shown in FIG. May occur. Then, since lead oxide is mixed in the seal glass 11, the electrons are irradiated to release oxygen and adhere to the tip of the emitter cone 9 and the like. Therefore, there is a problem that the emission of the emitter cone 9 is reduced.

Further, when transferring the transfer paste 121 to the spacer 3, a large amount of the transfer paste may adhere to the tip of the spacer 3 due to a variation in the application state of the transfer paste 121. In this case, the size of the paste pattern when the spacer 3 is transferred onto the anode substrate 5 becomes large, and there is a possibility that the paste contacts the pattern of the phosphor layer 6-2. When the paste 121 comes into contact with the pattern of the phosphor layer 6-2 as described above, there is a problem that the contact portion of the phosphor layer 6-2 is deteriorated during firing. Further, since both ends of the spacer 3 are welded with the seal glass 11, there is a problem that the manufacturing method is complicated.

Therefore, the present invention provides a container comprising a cathode substrate and an anode substrate, which can be easily prepared.
It is an object of the present invention to provide a display device container which does not contaminate an electron source even if a spacer is disposed therebetween and does not deteriorate the phosphor layer.

[0017]

In order to achieve the above-mentioned object, a display device container according to the present invention comprises a cathode substrate on which an electron source is formed, and a light-emitting section excited by electrons emitted from the electron source. An anode substrate on which is formed,
A spacer provided between the cathode substrate and the anode substrate so that the cathode substrate and the anode substrate face each other and maintain a predetermined distance, and one end of the spacer is formed of a cathode residue by an adhesive residue. In a state where the spacer is temporarily fixed to the substrate, the spacer is sandwiched between the cathode substrate and the anode substrate.

Further, in the display device container, Aerosil may be added to the temporary fixing adhesive of the spacer to increase the temporary fixing strength.
The spacer may be produced by fixing a plurality of glass fibers on a glass substrate so as to be in close contact with each other, and cutting out the glass fibers to a predetermined length with a dicing saw.

[0019]

According to the present invention, the spacer is disposed such that one end of the spacer is temporarily fixed to one of the substrates constituting the container, so that a seal glass as a spacer fixing means is not required. Thus, the risk of oxygen being released by irradiation with an electron beam can be almost eliminated, and deterioration of the phosphor layer can be prevented. Furthermore, since the spacer is only temporarily fixed, the manufacturing method can be simplified.

[0020]

FIG. 2 is a sectional view showing an embodiment of a container for a display device according to the present invention. In this figure, 1 is a cathode substrate, 2 is a cathode conductor formed on the cathode substrate 1 by sputtering or the like, 3 is a spacer for maintaining a distance between the cathode substrate 1 and the anode substrate 5, and 4 is a spacer for the cathode substrate. Acrylic resin (residue) temporarily fixed to 1 side, 5 is an anode substrate constituting a container whose inside is kept in a high vacuum together with the cathode substrate 1, 6 is an anode conductor 6-1 and a phosphor layer 6-2. 6-1 is an anode conductor formed on the anode substrate 5 by sputtering or the like;
2 is a phosphor layer which emits light when excited by electrons, 7 is an insulating layer laminated on the cathode conductor 2, 8 is a gate conductor laminated on the insulating layer 7, and 9 is a gate conductor 8 at the tip.
An emitter cone 10 is formed on the cathode conductor 2 in a conical shape so as to face the Spindle-type field emission cathode (FEC) array composed of the cathode conductor 2, the insulating layer 7, the gate conductor 8, and the emitter cone 9. It is.

The operation of the display device housed in a container comprising the cathode substrate 1 and the anode substrate 5 will be described.
When a predetermined positive voltage is applied to the gate conductor 8 with respect to the cathode conductor 2, electrons are emitted from the tip of the emitter cone 9. The electrons are accelerated by the electric field generated by the anode conductor 6-1 to which a positive voltage is applied to the gate conductor 8, and collide with the phosphor layer 6-2. As a result, the phosphor layer 6-2 is excited to emit light. This light emission can be observed through the transparent anode substrate 5.

In the container for a display device of this embodiment,
One end of the spacer 3 is only temporarily fixed by the acrylic resin 4 on the insulating layer 7 formed on the cathode substrate 1 side, and the spacer 3 is only sandwiched between the cathode substrate 1 and the anode substrate 5. It has been. For this reason,
Even if electrons are emitted from the emitter cone 9 at a wide angle as shown by a broken line, there is no sealing glass from which oxygen is released due to the irradiated electrons, so that oxygen is not released and the tip of the emitter cone 9 is contaminated. Can be substantially prevented.

Further, the end of the spacer 3 on the side of the anode substrate 5 is merely in contact, and since there is no fixing means such as sealing glass, the pattern of the fixing means such as sealing glass and the phosphor layer are not provided. The pattern of the phosphor layer 6-2 does not come into contact with the pattern of the phosphor layer 6-2.

Next, a method for arranging the spacer 3 in the container will be described. Since the steps up to the middle shown in FIG. 3B are the same as the conventional ones, the subsequent steps shown in FIG. Figure 1
This will be described with reference to FIG. First, as shown in FIG. 1A, an opening 114 provided in an upright portion 111 of a jig 110 is provided.
The acrylic resin 4 is adhered to one end of the glass fiber 101 so as to adhere to the tip of the glass fiber 101 held upright.
The glass substrate 120 coated with is placed on the jig 110,
The tip of the glass fiber 101 is brought into contact. With the acrylic resin 4 transferred to the tip of the glass fiber 101 in this manner, the cathode substrate 1 is positioned and placed on the jig 110 as shown in FIG. By stopping the exhaust from the glass substrate 101, the glass fiber 101 serves as the spacer 3 and serves as the cathode substrate 1.
Be attached to.

In this state, the cathode substrate 1 is kept at about 480 ° C.
When baked, the acrylic resin 4 is burned off, leaving only the residue. In this case, the spacer 3 is kept temporarily fixed to the cathode substrate 1 by the acrylic resin (residue) 4. Next, the anode substrate 5 is positioned with respect to the cathode substrate 1 to which the spacer 3 is temporarily fixed as shown in FIG. 1C, and the anode substrate 5 is placed on the cathode substrate 1. In this case, although not shown, a side substrate of a predetermined thickness provided with a sealing glass on the peripheral portion of the cathode substrate 1 and the anode substrate 5 so that the substrates 1 and 5 face each other at a predetermined interval, or a sealing glass. And a glass bead or a glass fiber are sandwiched therebetween, so that the cathode substrate 1 and the anode substrate 5 face each other at a predetermined interval.

An anode substrate 5 is provided on the cathode substrate 1.
Is loaded into a sealing furnace, and the whole is heated to melt the sealing glass at the peripheral edge. This completes the sealing of the container, and after cooling, the inside of the container is evacuated to a vacuum from an exhaust pipe or exhaust port (not shown). Then
Since the inside of the container is evacuated, the cathode substrate 1 and the anode substrate 5 are pressed by the atmospheric pressure,
The spacers 3 arranged at a predetermined interval between the cathode substrate 1 and the anode substrate 5 are in a state of being pressurized at atmospheric pressure, and the spacers 3 that stably hold the cathode substrate 1 and the anode substrate 5 are provided. It can be maintained at a predetermined interval.

The acrylic resin 4 is composed of a resin such as an acrylic resin which is easily decomposed by temperature and a solvent thereof. By the way, the height of the created spacer 3 has some variation. If there is such variation, the short spacer 3 will play, so that the spacer 3 is not sealed during sealing.
Is softened so that the uneven height of the spacer 3 is absorbed. For this reason, the spacer 3 is formed using a glass fiber having a low softening point.

In the above description, the spacer is temporarily fixed on the insulating layer formed on the cathode substrate. However, the present invention is not limited to this, and a portion where the insulating layer and the cathode conductor are not formed is provided on the cathode substrate. The spacer may be temporarily fixed directly to the cathode substrate, or a portion where an insulating layer is not formed may be provided and temporarily fixed on the cathode conductor. Further, it may be temporarily fixed to the anode substrate side instead of the cathode substrate side.

[0029]

As described above, according to the present invention, since the spacer is temporarily fixed to one side of the substrate, it is not necessary to use a seal glass, and oxygen is released even when an electron beam is irradiated to the fixed portion of the spacer. The seal glass is not used, and the seal glass does not come into contact with the phosphor layer, thereby preventing deterioration of the phosphor layer.

Further, since the spacer is pressurized by the atmospheric pressure, the distance between the cathode substrate and the anode substrate can be stably maintained. Further, since the variation in the spacer length can be absorbed at the time of sealing, the spacer that plays in the container can be substantially eliminated. In addition, since it is not necessary to use a seal glass, the manufacturing method can be simplified and the cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a view showing a method for producing a display device container of the present invention.

FIG. 2 is a sectional view of an embodiment of the display device container of the present invention.

FIG. 3 is a diagram showing a conventional method for producing a display device container.

FIG. 4 is a view showing a conventional method for producing a display device container.

FIG. 5 is a cross-sectional view of an embodiment of a conventional display device container.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cathode substrate 2 Cathode conductor 3 Spacer 4 Acrylic resin 5 Anode substrate 6 Light emitting part 6-1 Anode conductor 6-2 Phosphor layer 7 Insulating layer 8 Gate conductor 9 Emitter cone 10 FEC 11 Seal glass 101 Glass fiber 110 Jig

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Satoshi Yoshimura 629 Oshiba, Mobara-shi, Chiba Futaba Electronics Industry Co., Ltd. (72) Inventor Kenichi Honda 629 Oshiba, Mobara-shi, Chiba Futaba Electronics Industry Co., Ltd. (56) References JP-A-6-310054 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) H01J 29/86 H01J 31/12

Claims (3)

(57) [Claims] A cathode substrate on which an electron source is formed; an anode substrate on which a light-emitting portion excited by electrons emitted from the electron source is formed; and the cathode substrate and the anode substrate face each other. to hold a predetermined interval Te, and a disposed a spacer between the cathode substrate the anode substrate, a cathode group by residue of one end of the spacer adhesive
A display device container, wherein the spacer is sandwiched between a cathode substrate and an anode substrate when the spacer is temporarily fixed to a plate . 2. The container for a display device according to claim 1, wherein Aerosil is added to the adhesive in order to increase the temporary fixing strength of the spacer. 3. The method according to claim 1, wherein the spacer is formed by fixing a plurality of glass fibers on a glass substrate so as to be in close contact with each other, and cutting the glass fibers into a predetermined length with a dicing saw. 2. The container for a display device according to 1.