JP2766735B2 - Optical system using reflective objective lens - Google Patents
Optical system using reflective objective lensInfo
- Publication number
- JP2766735B2 JP2766735B2 JP1289991A JP1289991A JP2766735B2 JP 2766735 B2 JP2766735 B2 JP 2766735B2 JP 1289991 A JP1289991 A JP 1289991A JP 1289991 A JP1289991 A JP 1289991A JP 2766735 B2 JP2766735 B2 JP 2766735B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- sample
- slider
- objective lens
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Lenses (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、フーリエ変換
赤外分光光度計（ＦＴ−ＩＲ）等に使用される反射対物
レンズを用いた光学系に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical system using a reflection objective lens used in, for example, a Fourier transform infrared spectrophotometer (FT-IR).
【０００２】[0002]
【従来の技術】分光光度計を用いた測定は種々行われて
いるが、特に反射スペクトルを得る反射測定は吸収スペ
クトル測定が困難な試料に対して有効な測定方法であ
る。従来の反射測定には、例えば図５に示すような構成
の装置が使用されている。2. Description of the Related Art Various measurements using a spectrophotometer have been carried out. In particular, reflection measurement for obtaining a reflection spectrum is an effective measuring method for a sample for which absorption spectrum measurement is difficult. In the conventional reflection measurement, for example, an apparatus having a configuration as shown in FIG. 5 is used.
【０００３】図５中、１０１は凹面鏡からなる主鏡、１
０２は凸面鏡からなる副鏡、１０３はハウジング、１０
６は反射鏡、１０７は通常試料等がおかれる物点であ
る。In FIG. 5, reference numeral 101 denotes a primary mirror comprising a concave mirror;
02 is a secondary mirror made of a convex mirror, 103 is a housing, 10
Reference numeral 6 denotes a reflecting mirror, and 107 denotes an object point where a sample or the like is usually placed.
【０００４】この様な構成において、入射光Ａが反射鏡
１０６を介して物点１０７上におかれた試料に照射され
る。試料から発生した光が主鏡１０１と副鏡１０２によ
って反射集光され、この反射光が図示しない検出器に到
達し検出される。In such a configuration, the incident light A is applied to the sample placed on the object point 107 via the reflecting mirror 106. Light generated from the sample is reflected and collected by the primary mirror 101 and the secondary mirror 102, and the reflected light reaches a detector (not shown) and is detected.
【０００５】[0005]
【発明が解決しようとする課題】この図５に示された装
置によって、反射測定を行うことができるようになっ
た。 ところが、反射鏡１０６が副鏡１０２と物点１０
７の間に設けられ、この反射鏡１０６及び図示しない反
射鏡保持具等によって、作動距離（図中Ｄ）が短くな
り、試料交換作業が非常に面倒で作業性が悪いという問
題点がある。さらに、作動距離が短いために、小さな反
射鏡しか設置できず、そのため試料に照射できる光量が
少なく、その結果Ｓ／Ｎ比が悪くなるという問題点もあ
る。The apparatus shown in FIG. 5 has made it possible to perform reflection measurement. However, when the reflecting mirror 106 is
7, the working distance (D in the figure) is shortened by the reflecting mirror 106 and a not-shown reflecting mirror holder, and there is a problem that the work of exchanging the sample is very troublesome and the workability is poor. Furthermore, since the working distance is short, only a small reflecting mirror can be installed, so that the amount of light that can be applied to the sample is small, and as a result, the S / N ratio is deteriorated.
【０００６】本発明は、かかる問題点を解決できる装置
を提供することを目的とするものである。An object of the present invention is to provide an apparatus capable of solving such a problem.
【０００７】[0007]
【課題を解決するための手段】この目的を達成するた
め、本発明の反射対物レンズを用いた光学系は、試料か
ら発生した光を集光する主鏡と副鏡を備えた反射対物レ
ンズと、該反射対物レンズの主鏡と副鏡の間の試料を見
込み得る位置に配置される非球面鏡とを備え、該非球面
鏡を介して外部からの光を前記試料に照射するようにし
たことを特徴としている。In order to achieve this object, an optical system using a reflective objective lens according to the present invention comprises a reflective objective lens having a primary mirror and a secondary mirror for condensing light generated from a sample. An aspherical mirror disposed between the primary mirror and the sub-mirror of the reflective objective lens at a position where the sample can be seen, and irradiating the sample with external light via the aspherical mirror. And
【０００８】[0008]
【作用】反射対物レンズの主鏡と副鏡の間に非球面鏡を
設け、その非球面鏡を介して外部からの光を試料に照射
し試料から発生した光を検出器に向けて集光できる。A non-spherical mirror is provided between the primary mirror and the sub-mirror of the reflective objective lens, and the sample can be irradiated with light from the outside via the non-spherical mirror, and the light generated from the sample can be collected toward the detector.
【０００９】[0009]
【実施例】図１（ａ）は本発明を実施した装置の一例を
示す光学図で、図１（ｂ）は図１（ａ）のＣ−Ｃ断面図
である。1 (a) is an optical diagram showing an example of an apparatus embodying the present invention, and FIG. 1 (b) is a cross-sectional view taken along the line CC of FIG. 1 (a).
【００１０】図中、凹面鏡からなる主鏡１と凸面鏡から
なる副鏡２との間の空間の略中央の図に向かって左側の
ハウジング３にガイド４を設け、このガイド４内を左右
にスライドするスライダ５が取付けられている。このス
ライダ５の先端には楕円面鏡や放物面鏡等からなる非球
面鏡６が取付けられており、スライダ５と共にガイド内
を左右にスライドできる。そして、ハウジング３に取付
けられているガイド４の反対側のハウジング３に穴１０
が開けられている。７は試料が置かれている物点、８，
９は光路である。In the figure, a guide 4 is provided in a housing 3 on the left side as viewed substantially in the center of the space between a primary mirror 1 composed of a concave mirror and a sub-mirror 2 composed of a convex mirror. Slider 5 is mounted. An aspheric mirror 6, such as an elliptical mirror or a parabolic mirror, is attached to the tip of the slider 5, and can slide left and right in the guide together with the slider 5. A hole 10 is formed in the housing 3 on the opposite side of the guide 4 attached to the housing 3.
Is open. 7 is the object point where the sample is placed, 8,
9 is an optical path.
【００１１】この様な構成において、スライダ５が図に
向かって右側に挿入され、非球面鏡６が主鏡１と副鏡２
の間の光路８に入る。穴１０から水平に入射された光Ａ
が非球面鏡６を介して物点７上の試料に照射される。そ
して、試料から発生した光は図示しない検出器に向けて
集光される。このようにして試料の反射スペクトルを得
ることができる。そして、反射測定を終了し、透過測定
をする場合は、スライダ５を左方向に移動させ非球面鏡
６をガイド４内に収納する。そして、試料の裏側から光
Ｂを照射することによって透過測定が可能となる。In such a configuration, the slider 5 is inserted on the right side as viewed in the figure, and the aspherical mirror 6 includes the primary mirror 1 and the secondary mirror 2.
Into the light path 8 between. Light A incident horizontally from the hole 10
Irradiates the sample on the object point 7 via the aspherical mirror 6. Then, light generated from the sample is collected toward a detector (not shown). Thus, the reflection spectrum of the sample can be obtained. Then, when the reflection measurement is completed and the transmission measurement is performed, the slider 5 is moved to the left and the aspheric mirror 6 is stored in the guide 4. Then, by irradiating light B from the back side of the sample, transmission measurement becomes possible.
【００１２】図２（Ａ）は本発明を実施した装置の他の
一例を示す光学図で、図２（ｂ）はそのＣ−Ｃ断面図で
ある。図１の実施例においては穴１０からの入射光Ａの
入射方向とスライダの動作方向が一致するようにスライ
ダ５を設けたが、図２の実施例では、入射光Ａの入射方
向に対し直交するようにスライダ５を設け非球面鏡６の
向きを調整し、物点７上の試料に光Ａが照射されるよう
にしている。また、光の入射方向は図示に限らず、例え
ば、図中Ａ′に示すように、スライダ５の動作方向と同
じ方向から光を非球面鏡６に入射させるようにしても良
い。FIG. 2A is an optical diagram showing another example of the device embodying the present invention, and FIG. 2B is a cross-sectional view taken along the line CC. In the embodiment of FIG. 1, the slider 5 is provided so that the incident direction of the incident light A from the hole 10 and the operation direction of the slider coincide with each other. In the embodiment of FIG. The slider 5 is provided to adjust the direction of the aspherical mirror 6 so that the sample on the object point 7 is irradiated with light A. Further, the light incident direction is not limited to the illustrated one, and for example, the light may be incident on the aspherical mirror 6 from the same direction as the operation direction of the slider 5, as shown by A 'in the figure.
【００１３】図３は本発明を実施した装置の他の一例を
示す光学図で、図１の実施例においてはハウジング３に
取付けられているガイド４の反対側のハウジング３に開
けられていた穴１０のところに、図３に示すように、ガ
イド１１を設け、このガイド１１内をスライダ５に連動
するスライダ１２が取付けられている。１６，１７は平
面鏡である。スライダ１２には平面鏡１３が取付けられ
ており、スライダ５が図に向かって右側に挿入され、非
球面鏡６が主鏡１と副鏡２の間の光路８に入ると、スラ
イダ１２が連動して右に移動しガイド１１から平面鏡１
３が露出し、入射光Ａが平面鏡１３を介して導入され、
この導入された光は非球面鏡６を介して物点７上の試料
に照射される。FIG. 3 is an optical diagram showing another example of the apparatus embodying the present invention. In the embodiment of FIG. 1, a hole formed in the housing 3 on the opposite side of the guide 4 mounted on the housing 3 is shown. As shown in FIG. 3, a guide 11 is provided at 10, and a slider 12 which is linked to the slider 5 in the guide 11 is attached. Reference numerals 16 and 17 are plane mirrors. When the plane mirror 13 is attached to the slider 12, the slider 5 is inserted on the right side as viewed in the figure, and when the aspherical mirror 6 enters the optical path 8 between the primary mirror 1 and the secondary mirror 2, the slider 12 interlocks. Move to the right and move from the guide 11 to the plane mirror 1
3 is exposed, the incident light A is introduced through the plane mirror 13,
The introduced light irradiates the sample on the object point 7 via the aspherical mirror 6.
【００１４】一方、スライダ５を左側に移動させると、
非球面鏡６が光路８から、そして平面鏡１３が入射光Ａ
の光路から外れる。その結果、入射光Ａが図中点線で示
すように平面鏡１６，１７を介して、試料の裏側から光
を照射でき透過測定が可能となる。On the other hand, when the slider 5 is moved to the left,
Aspherical mirror 6 is from optical path 8 and plane mirror 13 is incident light A
Out of the light path of As a result, the incident light A can be radiated from the back side of the sample through the plane mirrors 16 and 17 as indicated by the dotted lines in the figure, and transmission measurement can be performed.
【００１５】図４は本発明を実施した装置の他の一例を
示す光学図で、ガイド４内を左右にスライドする中空の
スライダ１４を取付け、このスライダ１４の底分に非球
面鏡６が取付けられている。この時スライダ１４が図に
向かって右側に挿入され、非球面鏡６が主鏡１と副鏡２
の間の光路８に入る。ここで、外部からの入射光Ａが、
中空のスライダ１４内を通り非球面鏡６を介してスライ
ダ１４の底部に開けられた開口１５を通って物点７上の
試料に照射される。FIG. 4 is an optical view showing another example of the apparatus embodying the present invention. A hollow slider 14 is mounted on the guide 4 to slide left and right in the guide 4, and an aspheric mirror 6 is mounted on the bottom of the slider 14. ing. At this time, the slider 14 is inserted on the right side as viewed in FIG.
Into the light path 8 between. Here, external incident light A is
The sample on the object point 7 is irradiated through the hollow slider 14 through the opening 15 formed in the bottom of the slider 14 via the aspherical mirror 6.
【００１６】[0016]
【発明の効果】以上詳述した如く、本発明によれば、反
射対物レンズの主鏡と副鏡の間の試料を見込み得るに非
球面鏡を設け、その非球面鏡を介して外部からの光を試
料に照射し試料から発生した光を検出器に向けて集光で
きるようにしたので、副鏡と物点の間に設けられていた
反射鏡及び図示しない反射鏡保持具等がなくなり、試料
交換作業が非常にしやすくなる。さらに、従来装置にお
いては、小さな反射鏡しか設置できなかったが、本発明
によってかなり大きい非球面鏡を設置できるようになっ
たので、そのため試料に照射できる光量が多くなりＳ／
Ｎ比が向上する。As described above in detail, according to the present invention, an aspherical mirror is provided so that a sample can be seen between the primary mirror and the secondary mirror of the reflection objective lens, and external light is transmitted through the aspherical mirror. Since the light emitted from the sample can be collected and directed to the detector by irradiating the sample, there is no need to use a reflecting mirror provided between the sub-mirror and the object point, a not-shown reflecting mirror holder, etc. Work becomes very easy. Further, in the conventional apparatus, only a small reflecting mirror can be installed. However, according to the present invention, a considerably large aspherical mirror can be installed.
The N ratio is improved.
【図１】本発明を実施した装置の一例を示す光学図及び
Ｃ−Ｃ断面図である。FIG. 1 is an optical diagram and a cross-sectional view taken along a line CC of an example of an apparatus embodying the present invention.
【図２】本発明を実施した装置の他の一例を示す光学図
及びＣ−Ｃ断面図である。FIG. 2 is an optical diagram and a CC cross-sectional view showing another example of the device embodying the present invention.
【図３】本発明を実施した装置の他の一例を示す光学図
である。FIG. 3 is an optical diagram showing another example of the device embodying the present invention.
【図４】本発明を実施した装置の他の一例を示す光学図
である。FIG. 4 is an optical diagram showing another example of the device embodying the present invention.
【図５】従来例を示す光学図である。FIG. 5 is an optical diagram showing a conventional example.
１：主鏡 ２：副鏡 ３：ハウジング ４，１１：ガイド ５，１２，１４：スライダ ６：非球面鏡 ７：物点 ８，９：光路 １０：穴 １３，１６，１７：平面鏡 １５：開口 1: Primary mirror 2: Secondary mirror 3: Housing 4, 11: Guide 5, 12, 14: Slider 6: Aspherical mirror 7: Object point 8, 9: Optical path 10: Hole 13, 16, 17: Plane mirror 15: Opening
Claims (1)
鏡を備えた反射対物レンズと、該反射対物レンズの主鏡
と副鏡の間の試料を見込み得る位置に配置される非球面
鏡とを備え、該非球面鏡を介して外部からの光を前記試
料に照射するようにしたことを特徴とする反射対物レン
ズを用いた光学系。1. A reflective objective lens having a primary mirror and a secondary mirror for condensing light generated from a sample, and a non-reflective lens disposed between the primary mirror and the secondary mirror of the reflective objective lens at a position where the sample can be seen. An optical system using a reflective objective lens, comprising: a spherical mirror; and irradiating the sample with external light via the aspherical mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1289991A JP2766735B2 (en) | 1991-01-10 | 1991-01-10 | Optical system using reflective objective lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1289991A JP2766735B2 (en) | 1991-01-10 | 1991-01-10 | Optical system using reflective objective lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04235332A JPH04235332A (en) | 1992-08-24 |
| JP2766735B2 true JP2766735B2 (en) | 1998-06-18 |
Family
ID=11818232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1289991A Expired - Fee Related JP2766735B2 (en) | 1991-01-10 | 1991-01-10 | Optical system using reflective objective lens |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2766735B2 (en) |
-
1991
- 1991-01-10 JP JP1289991A patent/JP2766735B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04235332A (en) | 1992-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19980310 |
|
| LAPS | Cancellation because of no payment of annual fees |