JP3246858B2 - Power supply - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power supply device using a semiconductor device applied to a pulse generation circuit used in, for example, a pulse laser device and the like, and more particularly to a high power supply device by simultaneously turning on and off a plurality of semiconductor devices connected in series. The present invention relates to a device capable of turning on and off a voltage.

[0002]

2. Description of the Related Art When a high voltage is turned on / off by a semiconductor device such as a thyristor or a GTO thyristor,
Since there is a limit to the voltage that can be turned on and off by a single semiconductor device, a plurality of semiconductor devices are connected in series to increase the on / off voltage as a whole. FIG. 5 is a circuit diagram showing a power supply device for a thyristor high-pressure valve similar to that described in, for example, “Mitsubishi Electric Technical Report”, Vol. 45, No. 6, where 11-1N are connected to a primary winding. A plurality of output voltage generating terminals U connected to the input terminals A1, B1 and the secondary winding for transforming and outputting the voltage of the primary winding.
1, V1 to Un, and Vn. Transformers 11 to 1N have input terminals connected in series as illustrated. .., 2N1 to 2Nn are a plurality of output voltage generating terminals U1, V1 to
In the driving circuits supplied with power from Un and Vn, all the driving circuits simultaneously generate an ON signal or an OFF signal. 3N1 to 3Nn are semiconductor devices such as thyristors that are on / off controlled by the on / off signals of the drive circuits 211 to 21n... 2N1 to 2Nn, and all the semiconductor devices are connected in series. 4
An AC power supply generates an AC voltage between the input terminal A1 of the first transformer 1N and the input terminal B1 of the uppermost transformer 11. That is, the input terminals A1 to B1 of the transformers 11 to 1N are sequentially connected in series when viewed from the AC power supply 4, and the semiconductor devices 311 to 3Nn are connected in series in multiple stages.

Next, the operation of the power supply will be described. The AC voltage is shared by the AC power supply 4 between the input terminals A1 and B1 of the transformers 11 to 1N and input. Here, the transformers 11 to 1N and the drive circuit 211
To 2Nn and the semiconductor devices 311 to 3Nn operate in the same manner, so that only the operation of the configuration corresponding to the uppermost transformer 11 will be described below. That is, the input terminal A1-
The transformer 11 to which the AC voltage is applied between B1 is insulated between its output voltage generating terminals U1, V1 to Un, and Vn, and transforms a substantially uniform voltage, and is applied to the corresponding drive circuits 211 to 21n. Output. Drive circuits 211 and 2
1n are simultaneously driven and controlled, and simultaneously output ON signals or OFF signals to the semiconductor device group 311 corresponding to the transformer 11.
To 31n. Thereby, the semiconductor device 311
31n perform an on / off operation at the same time. In such an operation, since all the transformers from the first stage to the uppermost stage and the configuration corresponding thereto are simultaneously performed, the semiconductor devices 311 to 3Nn simultaneously perform on / off operations, and connect between the ground potential and the high potential HV. Open and close electrically. Semiconductor devices 311 having different potentials from ground potential to high potential HV
The power supply outputs to the drive circuits 211 to 2Nn for driving to 3Nn are insulated from each other,
Since the AC power supply 4 is a power supply source from the ground potential, the transformers 11 to 1N guarantee a dielectric strength between each input and output.

[0004]

Since the conventional power supply device is constructed as described above, the withstand voltage between the input and output of the transformers 11 to 1N for distributing and outputting the power supplies insulated from each other is increased by a high potential. Side, the transformer 11 in the uppermost stage is
Requires a dielectric strength equal to an operating voltage of 11 to 3 Nn,
Therefore, there is a problem that the transformer is large and expensive. In addition, there is a problem in that heat is generated in the transformer due to energy charged in the stray capacitance existing between the input and output of the transformer, and a surge voltage is generated in the AC power supply 4 due to an on / off operation of the semiconductor devices 311 to 3Nn. As the switching potential of the device becomes higher, there is a problem that the stable power supply operation is hindered.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has provided a compact and inexpensive apparatus by drastically reducing the dielectric strength of a power supply circuit for driving a semiconductor device. It is another object of the present invention to provide a power supply device capable of performing a stable operation.

[0006]

According to the present invention, there is provided a power supply apparatus comprising: an input terminal for inputting an AC voltage; a plurality of output voltage generating terminals for outputting a plurality of voltages obtained by transforming the voltage of the input terminal; The output terminals and input terminals of a plurality of transformers each having an output terminal for generating a voltage substantially the same as the AC voltage input to the terminal are sequentially cascaded in multiple stages, and among the plurality of transformers, the first stage transformer An AC voltage is input to an input terminal from an AC power supply.

Further, another power supply device according to the present invention includes an input terminal for inputting an AC voltage, a plurality of output voltage generation terminals for outputting a plurality of voltages obtained by transforming the voltage of the input terminal, and the input terminal. Output terminals and input terminals of a plurality of transformers each having an output terminal for generating a voltage substantially the same as the input AC voltage are sequentially cascaded in multiple stages, and an input terminal of a first-stage transformer among the plurality of transformers Input an AC voltage from an AC power supply to the
One end of an input terminal of each transformer is electrically connected to a ground terminal of a semiconductor device group corresponding to each transformer.

Further, another power supply device according to the present invention includes an input terminal for inputting an AC voltage, a plurality of output voltage generating terminals for outputting a plurality of voltages obtained by transforming the voltage of the input terminal, and the input terminal. Output terminals and input terminals of a plurality of transformers each having an output terminal for generating a voltage substantially the same as the input AC voltage are sequentially cascaded in multiple stages, and an input terminal of a first-stage transformer among the plurality of transformers Input an AC voltage from an AC power supply to the
One end of an input terminal of each transformer is electrically connected to a ground terminal of a semiconductor device group corresponding to each transformer via a fixed resistor.

Further, another power supply device according to the present invention includes an input terminal for inputting an AC voltage, a plurality of output voltage generating terminals for respectively outputting a plurality of voltages obtained by transforming the voltage of the input terminal, and the input terminal. Output terminals and input terminals of a plurality of transformers each having an output terminal for generating a voltage substantially the same as the input AC voltage are sequentially cascaded in multiple stages, and an input terminal of a first-stage transformer among the plurality of transformers Input an AC voltage from an AC power supply to the
One end of the input terminal of each transformer and the ground terminal of the semiconductor device group corresponding to each transformer are electrically connected via a fixed resistor, and a common mode choke is connected between the output terminal and the input terminal of the adjacent transformer. It is a coil connected.

In another power supply device according to the present invention, the input terminal of each transformer and the ground terminal of the semiconductor device group corresponding to each transformer are connected to a fixed resistor having a resistance value larger than the ON resistance value of the semiconductor device group. Are electrically connected to each other.

In another power supply device according to the present invention, the core material of the transformer is made of a high frequency magnetic material.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiment 1 FIG. Hereinafter, a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a diagram showing a circuit configuration of a power supply device. Reference numerals 11 to 1N denote transformers. Output voltage generating terminal U
1, V1 to Un, Vn, and an output terminal A2 that outputs a voltage substantially the same as the AC voltage input to the input terminals A1 and B1,
B2, and each of the transformers 11 to 1N sequentially has an input terminal A
1, B1 and output terminals A2, B2 are cascaded in multiple stages. .. 2N1-2Nn are a plurality of output voltage generating terminals U1, V of the transformers 11-1N.
1 to Un and Vn, all of which generate ON signals or OFF signals at the same time. Reference numerals 311 to 31n denote semiconductor device groups corresponding to the transformers 11 connected in series, respectively.
Similarly, 2n is a semiconductor device group corresponding to the transformer 12 connected in series, and each of the semiconductor device groups 311 to 31n, 321 to 32n,.
n are also connected in series, and all the semiconductor devices 311
... 3Nn are the driving circuits 211 to 21n.
On / off control is simultaneously performed by an on / off signal generated by 2Nn to open and close the high voltage HV. 4 is an input terminal A of the first stage transformer 1N among the transformers 11 to 1N.
1, an AC power supply for inputting an AC voltage to B1.

Next, the operation will be described. Each transformer 1
Since 1 to 1N are cascaded in multiple stages, a voltage substantially equal to the voltage output from the AC power supply 4 is sequentially applied between the input terminals A1 to B1 of the transformers 11 to 1N.
While being excited, each output voltage generation terminal U1, V1
Uninsulated voltages are obtained at Un and Vn, and power is supplied to each of the drive circuits 211 to 21n... 2N1 to 2Nn at a substantially uniform voltage. On the other hand, a high voltage is applied to the switch constituted by the serially connected semiconductor devices 311 to 3Nn when the switch is off.
The output voltage generation terminals U1, V1 to Un, and Vn of the semiconductor device groups 311 to 31n, 321 to 32n,... 3 corresponding to the output voltage generation terminals U1, V1 to Un, and Vn, respectively.
The potential becomes substantially equal to the shared voltage of N1 to Nn.

Further, from the configuration of each of the transformers 11 to 1N,
The high voltage applied to the semiconductor devices 311 to 3Nn is substantially equal to the output voltage generation terminals U1V1 to U1V of the transformers 11 to 1N.
nVn and the sum of the stray capacitances existing between the input terminals A1 to B1 and shared by the input terminals A of the transformers 11 to 1N.
Semiconductor device groups 311 to 31 corresponding also between 1 and B1
n, 321-32n,... 3N1-3Nn. From this, each transformer 11-1N
Input terminals A1-B1 and output voltage generation terminals U1V1-
The potential difference between UnVn is much smaller than the high voltage HV applied to the semiconductor devices 311 to 3Nn. Therefore, the dielectric strength between the input terminals A1, B1 of the transformers 11 to 1N and the output voltage generation terminals U1V1 to UnVn is significantly reduced as compared with the high voltage HV. Also, the transformer 11
The charging energy to the stray capacitance of the input terminals A1 and B1 and the output voltage generation terminals U1V1 to UnVn
Because the potential difference between them is small,
Heat generation of 1 to 1 N and surge voltage to the AC power supply 4 are also reduced.

Embodiment 2 FIG. 2 is a circuit diagram of a power supply device according to a second embodiment of the present invention. In the figure, reference numeral 5 denotes a connection conductor for fixing potential,
To 1N of the input terminals and the semiconductor device groups 311 to 31n and 321 to 32 corresponding to the transformers 11 to 1N.
n,... are connected between ground terminals of 3N1 to 3Nn. Thus, by providing the connection conductor 5, each of the semiconductor device groups 311 to 31n, 321 to 32n,.
..Semiconductor device group that can reliably fix the potential of input terminal B1 of each of transformers 11 to 1N to a potential determined by the shared potential of 3N1 to 3Nn, and that the dielectric strength required between the input and output of transformers 11 to 1N , And only n shared voltages.

Embodiment 3 FIG. 3 is a circuit diagram of a power supply device according to a third embodiment of the present invention. In the figure, reference numeral 6 denotes a fixed resistor inserted into the connection conductor 5, which has a resistance value larger than the on-resistance of n semiconductor devices 311 to 3Nn in series. With this configuration,
Each of the semiconductor device groups 311 to 31n, 321 to 32n,
... The dielectric strength required between the input and output of each of the transformers 11 to 1N at a potential determined by the shared potentials of 3N1 to 3Nn can be limited to only the shared voltage of n semiconductor device groups. When the semiconductor devices 311 to 3Nn are turned off, the stray capacitance between the input and output of the transformers 11 to 1N is charged. When the semiconductor devices 311 to 3Nn are turned on, the stray capacitance is discharged through each semiconductor device. Is consumed by the fixed resistor 6, so that the internal heat generation of the transformers 11 to 1N can be reduced.

Embodiment 4 FIG. 4 is a circuit diagram of a power supply device according to Embodiment 4 of the present invention. In the figure, reference numerals 6 and 7 denote fixed resistors inserted into the connection conductors 51 and 52, respectively, and each have a resistance value larger than the on-resistance of n semiconductor devices 311 to 3Nn in series.
Reference numeral 8 denotes each of the transformers 11 to 1N cascaded in multiple stages.
Are common mode choke coils connected as shown between adjacent input terminals A1, B1 and output terminals A2, B2. As described above, by connecting the common mode choke coil 8, the semiconductor devices 311 to 3N
n on and off, suppresses a surge generated via a stray capacitance between the input and output of the transformers 11 to 1N to suppress each transformer 11
1N is prevented, and the occurrence of a surge in the AC power supply 4 is suppressed, and the power supply operation is stabilized.

Embodiment 5 In the above embodiment, the core material of the transformers 11 to 1N is not described. However, if the core material of the transformers 11 to 1N is made of a high-frequency magnetic material such as ferrite or amorphous, a frequency of several KHz to
Losses during high frequency operation of several tens KHz can be reduced, and the size of the transformers 11 to 1N can be reduced.

[0019]

As described above, the power supply of the present invention has an input terminal for inputting an AC voltage, a plurality of output voltage generating terminals for outputting a plurality of voltages obtained by transforming the voltage of the input terminal, and an input terminal. The output terminals and input terminals of a plurality of transformers having an output terminal for generating substantially the same voltage as the AC voltage input to the input terminal are sequentially cascaded in multiple stages, and among the plurality of transformers, the input terminals of the first stage transformer Since the AC voltage is input from the AC power supply to each of the transformers, the cascade-connected transformers can successively share the high voltage insulation strength, and the insulation strength of each transformer can be greatly reduced.

Further, in the power supply device of the present invention, one end of the input terminal of each transformer is electrically connected to the ground terminal of the semiconductor device group corresponding to each transformer. There is an effect that transformer potential sharing can be ensured.

Further, in the power supply device of the present invention, one end of the input terminal of each transformer and the ground terminal of the semiconductor device group corresponding to each transformer are electrically connected via a fixed resistor. The charging energy to the stray capacitance existing between the outputs can be consumed by the fixed resistor, the heat generation inside the transformer can be suppressed, and the power supply voltage can be stably supplied.

Further, in the power supply apparatus of the present invention, both ends of the input terminal of each transformer and the earth side terminal of the semiconductor device group corresponding to each transformer are electrically connected via fixed resistors and are adjacent to each other. Since the common mode choke coil is connected between the output terminal and input terminal of the transformer, the charging energy to the stray capacitance existing between the input and output of the transformer can be consumed by the above-mentioned fixed resistor, and the heat generated inside the transformer And the surge generated at the time of the ON / OFF operation of the semiconductor device can be suppressed.

Further, the power supply device of the present invention provides a fixed resistor having a resistance value larger than the ON resistance value of the semiconductor device group between the input terminal of each transformer and the ground terminal of the semiconductor device group corresponding to each transformer. Are electrically connected to each other through the transformer, the charge energy to the stray capacitance existing between the input and output of the transformer can be reliably consumed by the fixed resistor, and the heat generated inside the transformer can be sufficiently suppressed. .

In the power supply device of the present invention, since the core material of the transformer is made of a high-frequency magnetic material, there is an effect that the size can be reduced.

[Brief description of the drawings]

FIG. 1 is a circuit diagram showing a circuit configuration of a power supply device according to Embodiment 1 of the present invention.

FIG. 2 is a circuit diagram showing a circuit configuration of a power supply device according to Embodiment 2 of the present invention.

FIG. 3 is a circuit diagram showing a circuit configuration of a power supply device according to Embodiment 3 of the present invention.

FIG. 4 is a circuit diagram showing a circuit configuration of a power supply device according to Embodiment 4 of the present invention.

FIG. 5 is a circuit diagram showing a circuit configuration of a conventional power supply device.

[Explanation of symbols]

11-1N transformer, 211-2Nn drive circuit, 3
11 to 3Nn semiconductor devices, 4 AC power supplies, 6 fixed resistors, 7 fixed resistors, 8 common mode choke coils.

Continuation of front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H03K 17/00-17/70

Claims (6)

(57) [Claims] An input terminal for inputting an AC voltage, a plurality of output voltage generating terminals for outputting a plurality of voltages obtained by transforming the voltage of the input terminal, and a voltage substantially the same as the AC voltage input to the input terminal. And output terminals for
A plurality of transformers in which the output terminal and the input terminal are sequentially connected in multiple stages; an AC power supply for inputting an AC voltage to an input terminal of a first-stage transformer of the plurality of transformers; A plurality of drive circuits each connected to the output voltage generation terminal and simultaneously generating on / off signals, and a plurality of semiconductor devices each connected in series and controlled on / off by on / off signals of the corresponding plurality of drive circuits are provided. Power supply device. 2. An input terminal for inputting an AC voltage, a plurality of output voltage generating terminals for respectively outputting a plurality of voltages obtained by transforming the voltage of the input terminal, and a voltage substantially the same as the AC voltage input to the input terminal. And output terminals for
A plurality of transformers in which the output terminal and the input terminal are sequentially connected in multiple stages; an AC power supply for inputting an AC voltage to an input terminal of a first-stage transformer of the plurality of transformers; A plurality of drive circuits each connected to an output voltage generation terminal and simultaneously generating an on / off signal, a plurality of semiconductor devices each being connected in series and being controlled on / off by an on / off signal of the corresponding plurality of drive circuits; A power supply device, wherein one end of an input terminal of each transformer is electrically connected to a ground terminal of a semiconductor device group corresponding to each transformer. 3. An input terminal for inputting an AC voltage, a plurality of output voltage generating terminals for outputting a plurality of voltages obtained by transforming the voltage of the input terminal, and a voltage substantially the same as the AC voltage input to the input terminal. And output terminals for
A plurality of transformers in which the output terminal and the input terminal are sequentially connected in multiple stages; an AC power supply for inputting an AC voltage to an input terminal of a first-stage transformer of the plurality of transformers; A plurality of drive circuits each connected to an output voltage generation terminal and simultaneously generating an on / off signal, a plurality of semiconductor devices each being connected in series and being controlled on / off by an on / off signal of the corresponding plurality of drive circuits; A power supply device, wherein one end of an input terminal of each transformer is electrically connected to a ground terminal of a semiconductor device group corresponding to each transformer via a fixed resistor. 4. An input terminal for inputting an AC voltage, a plurality of output voltage generating terminals for outputting a plurality of voltages obtained by transforming the voltage of the input terminal, and a voltage substantially the same as the AC voltage input to the input terminal. And output terminals for
A plurality of transformers in which the output terminal and the input terminal are sequentially connected in multiple stages; an AC power supply for inputting an AC voltage to an input terminal of a first-stage transformer of the plurality of transformers; A plurality of drive circuits each connected to an output voltage generation terminal and simultaneously generating an on / off signal, a plurality of semiconductor devices each being connected in series and being controlled on / off by an on / off signal of the corresponding plurality of drive circuits; One end of the input terminal of each transformer and the ground terminal of the semiconductor device group corresponding to each transformer are electrically connected via a fixed resistor, and the common mode is connected between the output terminal and the input terminal of the adjacent transformer. A power supply device characterized by connecting a choke coil. 5. The power supply according to claim 3, wherein a resistance value of the fixed resistor is larger than an on-resistance value of the semiconductor device group. 6. The power supply according to claim 1, wherein the core material of the transformer is made of a high-frequency magnetic material.