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JP3550076B2 - Exposure equipment - Google Patents

Exposure equipment Download PDF

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Publication number
JP3550076B2
JP3550076B2 JP2000124578A JP2000124578A JP3550076B2 JP 3550076 B2 JP3550076 B2 JP 3550076B2 JP 2000124578 A JP2000124578 A JP 2000124578A JP 2000124578 A JP2000124578 A JP 2000124578A JP 3550076 B2 JP3550076 B2 JP 3550076B2
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JP
Japan
Prior art keywords
microlens
path length
optical path
curable resin
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2000124578A
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Japanese (ja)
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JP2001301230A (en
Inventor
太介 上村
克己 足立
潔 戸泉
正 岩松
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Sharp Corp
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Sharp Corp
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Description

【0001】
【発明の属する技術分野】
本発明は、プリンタや複写機などの電子写真装置に用いられる露光装置に関する。
【0002】
【従来の技術】
電子写真装置の一例を図5に示す。
【0003】
図5の電子写真装置は、像担持体としての感光体ドラム101と、感光体ドラム101に対向して配置された帯電器102と、原稿画像データに応じた静電潜像を感光体ドラム101表面に形成する露光装置103と、露光装置103によって露光された感光体ドラム101表面の静電潜像をトナーにより可視像に現像する現像装置104と、感光体ドラム101上のトナー像を用紙Pに転写する転写ローラ105と、用紙P上のトナー像を熱により定着させる定着ローラ106と、感光体ドラム101上に残留したトナーを除去するクリーナ107などを主体として構成されている。
【0004】
このような電子写真装置に用いられる露光装置としては、従来、図6及び図7に示すように、複数のLEDチップ211・・211が基板210上に配列されてなるLEDアレイ201と、LEDチップ211・・211上に配置されたセルフォックスレンズ202とからなり、各LEDチップ211からの出力光を、セルフォックスレンズ202にて線状(平行光)に集光して感光体ドラム101(図5参照)上に照射する構造のものが一般に使用さている。
【0005】
他の露光装置として、特開平8−156320号公報に、光源となるLEDアレイからの出力光を感光体ドラムに導く光学系を、導波路とマイクロレンズによって構成し、そのマイクロレンズを紫外線硬化樹脂を用いて形成したもの(LEDプリンタヘッド)が開示されている。この公報に記載の露光装置では、ウレタンアクリレート系樹脂等の透明樹脂またはガラスなどで製作した透明金型を用いて、紫外線硬化樹脂製のマイクロレンズをLEDチップに一体形成している。
【0006】
【発明が解決しようとする課題】
ところで、セルフォックスレンズを用いた露光装置によれば、LEDチップとセルフォックスレンズとを高精度に位置合わせする必要があるので、生産性・装置コストの面で問題がある。また、セルフォックスレンズの位置によって周期的な光変動が生じて印字品位が低下するという問題もある。
【0007】
一方、特開平8−156320号公報の露光装置では、マイクロレンズを成形する際に透明金型をLEDチップ面に接触させる必要があるため、電極配線パターンを破損する恐れがある。また、ボンディングワイヤの破損を避けるため、ウエハ上でマイクロレンズを成形した後に、LEDチップを切り出す必要がある。さらに、ウレタンアクリレート系樹脂等の透明樹脂またはガラスなどで製作した透明金型は寿命が短いという問題もある。
【0008】
本発明はそのような実情に鑑みてなされたもので、小型で安定した光学特性を有し、しかも光学系のレンズを金型等を用いることなく簡単に作製することが可能な露光装置の提供を目的とする。
【0009】
【課題を解決するための手段】
本発明の露光装置は、発光素子の上にマイクロレンズを組み合わせた電子写真装置用の露光装置において、基板と、前記基板上に千鳥配列された複数の面発光型LED素子と、前記面発光型LED素子の形成面に積層されたマイクロレンズの光学位置調整用の光路長調整層と、前記光路長調整層の表面にコーティングされた紫外線硬化樹脂の濡れ角調整用の表面張力調整層と、前記光路長調整層に形成された表面張力調整層面上の各面発光型LED素子に対向する位置に、所定量の紫外線硬化樹脂を吐出させ、且つその樹脂の表面張力により形成されたマイクロレンズとからなることを特徴としている。
また、本発明の露光装置は、発光素子の上にマイクロレンズを組み合わせた電子写真装置用の露光装置において、基板と、前記基板上に千鳥配列された複数の面発光型LED素子と、前記面発光型LED素子の形成面に積層されたマイクロレンズの光学位置調整用の光路長調整層と、前記光路長調整層の表面上の各面発光型LED素子に対向する位置に、所定量の紫外線硬化樹脂を吐出させ、且つその樹脂の表面張力により形成されたマイクロレンズとからなり、上記光路長調整層に、紫外線硬化樹脂の濡れ角調整用の表面張力調整層の機能を兼用させたことを特徴としている。

【0010】
本発明の露光装置によれば、インクジェット方式等により紫外線硬化樹脂を発光素子チップに非接触の状態で吐出させて、マイクロレンズを発光素子チップに一体形成しているので、セルフォックスレンズのような組立精度による問題はない。また、金型を使用しないので電極配線パターン等の破損の恐れもない。
【0011】
さらに、紫外線硬化樹脂の表面張力によりレンズ形状を得ているので、電極配線パターン等の凹凸を吸収してマイクロレンズを形成することができる。また、発光素子を千鳥配列としているので、レンズ径をドットピッチ以上の大きさとすることも可能になる。
【0012】
本発明の露光装置によれば、発光素子として面発光型LED素子を用いているので、端面発光型のものと比べて素子の製作が簡単であり、また、素子へのマイクロレンズの形成も簡単になるという利点がある。
【0013】
本発明の露光装置によれば、発光素子とマイクロレンズとの間に光路長調整層を形成しているので、マイクロレンズを適性な光学位置、つまり発光素子の接合領域(深さ約5Å)からの光をほぼ平行光に集光できる位置に配置することができる。
【0014】
本発明の露光装置によれば光路長調整層表面にコーティングされた表面張力調整層上にマイクロレンズを形成しているので、紫外線硬化樹脂の濡れ角を調整することが可能となり、目的とするレンズ特性をもつマイクロレンズを作製することができる。なお、このような表面張力調整層の機能は、前記した光路長調整層に兼用させてもよい。
【0015】
本発明の露光装置において、紫外線硬化樹脂の濡れ角は40度以上であることが好ましい。濡れ角θが40度以上であれば、焦点距離fはほぼ一定の値を示すことから、紫外線硬化樹脂の濡れ角は40度以上とすることが、より安定した光学特性を得る上で好ましい。
【0016】
【発明の実施の形態】
本発明の実施形態を、以下、図面に基づいて説明する。
【0017】
図1は本発明の実施形態の要部構造を模式的に示す平面図である。図2は図1のA−A断面図である。
【0018】
この例の露光装置の光源には、LEDアレイチップ1が用いられている。LEDアレイチップ1には、複数の面発光型LED素子11・・11が2列の千鳥配列にて形成されている。各面発光型LED素子11の接合領域は基板10の表面から約5Åの深さに形成されている。各面発光型LED素子11にはぞれぞれ電極配線パターン12が接続されている。
【0019】
LEDアレイチップ1の表面(面発光型LED素子11の形成面)には、シリコン系樹脂製の光路長調整層2が積層されている。光路長調整層2には、各面発光型LED素子11の真上に相当する位置にそれぞれマイクロレンズ3が形成されている。各マクロレンズ3の光軸は面発光型LED素子11の中心(光軸)に一致している。
【0020】
次に、マイクロレンズ3の成形方法を図3を参照しつつ説明する。
【0021】
まず、インクジェットのノズルNから所定量の紫外線硬化樹脂を吐出させて、LEDアレイチップ1上の光路長調整層2の表面に付着させる。このとき、光路長調整層2の表面に付着した紫外線硬化樹脂Rは表面張力により外面がレンズ形状になる。このレンズ形状の紫外線硬化樹脂Rを図1に示すような千鳥配列で形成する。そして、光路長調整層2上の全ての紫外線硬化樹脂Rに、紫外線ランプ(図示せず)等からの紫外線を照射して硬化させることにより、図2に示す形状のマイクロレンズ3を得ることができる。
【0022】
ここで、マイクロレンズ3を構成する紫外線硬化樹脂の濡れ角は、12度以上であること好ましい。紫外線硬化樹脂の濡れ角が12度以上であると、図4の濡れ角−焦点距離のグラフに示すように、濡れ角θが変化しても焦点距離fはあまり変化せず、濡れ角の変動による光学特性の変動を抑制することができる。
【0023】
また、図4のグラフから明らかなように、濡れ角θが40度以上であれば、焦点距離fはほぼ一定の値を示すことから、紫外線硬化樹脂の濡れ角は40度以上とすることが、より安定した光学特性を得る上で好ましい。
【0024】
以上の実施形態によれば、面発光型LED素子11を2列の千鳥配列としているので、マイクロレンズ3のレンズ径Dを、ドットピッチ以上の大きさ(D=ドットピッチP×√2+α)とすることができる。
【0025】
また、マイクロレンズ3の下層に光路長調整層2を形成しているので、電極配線パターン12などの異なる材質による濡れ角の違いを吸収することができ、常に安定した光学特性のマイクロレンズ3を得ることができる。
【0026】
さらに、光路長調整層2を設けることによってマイクロレンズ3を面発光型LED素子11に対して適性な光学位置に配置することができる。すなわち、面発光型LED素子11の接合領域が基板10表面から約5Åの深さに形成されているので、LEDアレイチップ1の表面にマイクロレンズ3を直接形成すると、面発光型LED素子11からの光を適性な形状に集光することが困難になるが、図2に示すように、LEDアレイチップ1の表面に光路長調整層2を形成して、面発光型LED素子11とマイクロレンズ3との間に距離をとることで、面発光型LED素子11からの光をほぼ平行な光に集光することができる。
【0027】
ここで、本発明の露光装置において、光路長調整層2の表面に、フッ素樹脂等による表面張力調整層をコーティングしておく。このような表面張力調整層を形成することにより、紫外線硬化樹脂の濡れ角を調整することが可能となり、目的とするレンズ特性を有するマイクロレンズ3を形成することができる。また、このような表面張力調整層の機能を、光路長調整層2に兼用させることもできる。
【0028】
【実施例】
この実施例では、図1、図2において、LEDアレイチップ1、光路長調整層2及びマイクロレンズ3の各寸法・材質を以下のように設定した。
・LEDアレイチップ1
ドットピッチ:P=1200dpi(21.2μm)
・光路長調整層2
シリコン系樹脂(屈折率1.5)
膜厚:75μm
・マイクロレンズ3
紫外線硬化樹脂(屈折率1.5)
濡れ角:50度
レンズ径:D=35μm
レンズ焦点距離:F=30μm(n=1.5)
【0029】
【発明の効果】
以上説明したように、本発明によれば、千鳥配列された各発光素子上にマイクロレンズを一体形成しているので、光量変動及び組立精度等に問題があるセルフフォックレンジを用いることなく、発光素子からの出力光を適性な状態に集光することができる。また、セルフフォックレンジを用いた場合に比べて装置の小型化をはかることができる。
【0030】
さらに、マイクロレンズを、発光素子チップに非接触の状態で吐出された紫外線硬化樹脂の表面張力によって形成しているので、電極配線パターン等が破損する恐れもない。また、マイクロレンズを透明金型等を用いることなく簡単に製作することができるので生産性も良い。
【図面の簡単な説明】
【図1】本発明の実施形態の要部構造を模式的に示す平面図である。
【図2】図1のA−A断面図である。
【図3】マイクロレンズの成形法の説明図である。
【図4】マイクロレンズを構成する紫外線硬化樹脂の濡れ角と焦点距離の関係を示す図である。
【図5】電子写真装置の一例を示す図である。
【図6】従来の露光装置の要部構造を模式的に示す断面図である。
【図7】図6のB−B断面図である。
【符号の説明】
1 LEDアレイチップ
10 基板
11 面発光型LED素子
12 電極配線パターン
2 光路長調整層
3 マイクロレンズ
101 感光体ドラム
102 帯電器
103 露光装置
104 現像装置
105 転写ローラ
106 定着ローラ
107 クリーナ
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an exposure device used for an electrophotographic device such as a printer and a copying machine.
[0002]
[Prior art]
FIG. 5 shows an example of the electrophotographic apparatus.
[0003]
The electrophotographic apparatus shown in FIG. 5 includes a photosensitive drum 101 serving as an image carrier, a charger 102 arranged opposite to the photosensitive drum 101, and a photosensitive drum 101 for transferring an electrostatic latent image corresponding to document image data. An exposure device 103 for forming on the surface, a developing device 104 for developing an electrostatic latent image on the surface of the photosensitive drum 101 exposed by the exposure device 103 into a visible image with toner, and a toner image on the photosensitive drum 101 for paper The image forming apparatus mainly includes a transfer roller 105 that transfers the toner image onto the sheet P, a fixing roller 106 that fixes the toner image on the sheet P by heat, and a cleaner 107 that removes the toner remaining on the photosensitive drum 101.
[0004]
Conventionally, as an exposure apparatus used in such an electrophotographic apparatus, an LED array 201 in which a plurality of LED chips 211 are arranged on a substrate 210 as shown in FIGS. The self-focusing lens 202 is arranged on the 211. The output light from each LED chip 211 is condensed linearly (parallel light) by the self-fox lens 202, and the photosensitive drum 101 (see FIG. 5) The structure of irradiating on the top is generally used.
[0005]
As another exposure apparatus, Japanese Patent Application Laid-Open No. 8-156320 discloses an optical system that guides output light from an LED array as a light source to a photosensitive drum by a waveguide and a microlens. (LED printer head) is disclosed. In the exposure apparatus described in this publication, a microlens made of an ultraviolet curable resin is integrally formed on an LED chip using a transparent mold made of a transparent resin such as urethane acrylate resin or glass.
[0006]
[Problems to be solved by the invention]
By the way, according to the exposure apparatus using the self-fox lens, since it is necessary to align the LED chip and the self-fox lens with high accuracy, there is a problem in productivity and equipment cost. In addition, there is a problem in that periodic light fluctuations occur depending on the position of the self-fox lens, and print quality deteriorates.
[0007]
On the other hand, in the exposure apparatus disclosed in Japanese Patent Application Laid-Open No. 8-156320, it is necessary to bring a transparent mold into contact with the LED chip surface when forming a microlens, and there is a possibility that the electrode wiring pattern may be damaged. Also, in order to avoid damage to the bonding wires, it is necessary to cut out the LED chips after forming the microlenses on the wafer. Further, there is a problem that a transparent mold made of a transparent resin such as urethane acrylate resin or glass or the like has a short life.
[0008]
The present invention has been made in view of such circumstances, and provides an exposure apparatus which has small and stable optical characteristics and can easily manufacture an optical lens without using a mold or the like. With the goal.
[0009]
[Means for Solving the Problems]
The exposure apparatus of the present invention is an exposure apparatus for an electrophotographic apparatus in which a microlens is combined on a light emitting element, wherein the substrate, a plurality of surface emitting LED elements arranged in a staggered pattern on the substrate, and the surface emitting type An optical path length adjustment layer for adjusting the optical position of the microlens laminated on the formation surface of the LED element, a surface tension adjustment layer for adjusting the wetting angle of the ultraviolet curable resin coated on the surface of the optical path length adjustment layer, A predetermined amount of ultraviolet curable resin is discharged to a position facing each surface emitting LED element on the surface tension adjusting layer surface formed on the optical path length adjusting layer, and a microlens formed by the surface tension of the resin. It is characterized by becoming.
Further, the exposure apparatus of the present invention is an exposure apparatus for an electrophotographic apparatus in which a microlens is combined on a light emitting element, wherein the substrate, a plurality of surface emitting LED elements arranged in a staggered pattern on the substrate, An optical path length adjustment layer for adjusting the optical position of the microlens laminated on the surface on which the light emitting LED element is formed, and a predetermined amount of ultraviolet light at a position on the surface of the optical path length adjustment layer facing each surface emitting LED element. A microlens formed by discharging the cured resin, and formed by the surface tension of the resin, wherein the optical path length adjusting layer also functions as a surface tension adjusting layer for adjusting the wetting angle of the ultraviolet curable resin. Features.

[0010]
According to the exposure apparatus of the present invention, since the ultraviolet curable resin is discharged in a non-contact state to the light emitting element chip by an ink jet method or the like, and the microlenses are formed integrally with the light emitting element chip, such as a self-fox lens There is no problem due to assembly accuracy. Further, since no mold is used, there is no risk of damage to the electrode wiring pattern and the like.
[0011]
Further, since the lens shape is obtained by the surface tension of the ultraviolet curing resin, the microlenses can be formed by absorbing irregularities of the electrode wiring pattern and the like. In addition, since the light emitting elements are arranged in a staggered arrangement, the lens diameter can be made larger than the dot pitch.
[0012]
According to the exposure apparatus of the present invention, since the surface-emitting type LED element is used as the light-emitting element, the manufacture of the element is easier than that of the edge-emitting type, and the formation of the microlens on the element is also easier. There is an advantage that it becomes.
[0013]
According to the exposure apparatus of the present invention, since the forming the optical path length adjusting layer between the light emitting element and the microlens, a microlens proper optical positions, i.e. from the junction region of the light emitting element (a depth of about 5 Å) Can be arranged at a position where the light can be converged into substantially parallel light.
[0014]
According to the exposure apparatus of the present invention, since the microlens is formed on the surface tension adjusting layer coated on the optical path length adjusting layer, it is possible to adjust the wetting angle of the ultraviolet curable resin, A microlens having lens characteristics can be manufactured. The function of the surface tension adjusting layer may be shared by the optical path length adjusting layer.
[0015]
In the exposure apparatus of the present invention, the ultraviolet curable resin preferably has a wetting angle of 40 degrees or more. If the wetting angle θ is 40 degrees or more, the focal length f shows a substantially constant value. Therefore, it is preferable to set the wetting angle of the ultraviolet curable resin to 40 degrees or more in order to obtain more stable optical characteristics.
[0016]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of the present invention will be described below with reference to the drawings.
[0017]
FIG. 1 is a plan view schematically showing a main structure of an embodiment of the present invention. FIG. 2 is a sectional view taken along line AA of FIG.
[0018]
An LED array chip 1 is used as a light source of the exposure apparatus of this example. In the LED array chip 1, a plurality of surface-emitting LED elements 11 are formed in a two-row staggered arrangement. The bonding area of each surface-emitting type LED element 11 is formed at a depth of about 5 ° from the surface of the substrate 10. An electrode wiring pattern 12 is connected to each of the surface-emitting LED elements 11.
[0019]
An optical path length adjustment layer 2 made of a silicon-based resin is laminated on the surface of the LED array chip 1 (the surface on which the surface-emitting type LED element 11 is formed). Microlenses 3 are formed in the optical path length adjustment layer 2 at positions corresponding to positions directly above the respective surface-emitting LED elements 11. The optical axis of each macro lens 3 coincides with the center (optical axis) of the surface-emitting LED element 11.
[0020]
Next, a method of forming the micro lens 3 will be described with reference to FIG.
[0021]
First, a predetermined amount of an ultraviolet curable resin is ejected from an ink jet nozzle N and adheres to the surface of the optical path length adjustment layer 2 on the LED array chip 1. At this time, the outer surface of the ultraviolet curable resin R attached to the surface of the optical path length adjusting layer 2 has a lens shape due to surface tension. This lens-shaped ultraviolet curable resin R is formed in a staggered arrangement as shown in FIG. Then, by irradiating all the ultraviolet curing resins R on the optical path length adjusting layer 2 with ultraviolet rays from an ultraviolet lamp (not shown) or the like, the microlenses 3 having the shape shown in FIG. 2 can be obtained. it can.
[0022]
Here, the wetting angle of the ultraviolet curable resin constituting the microlens 3 is preferably 12 degrees or more. When the wetting angle of the ultraviolet curable resin is 12 degrees or more, as shown in the graph of the wetting angle-focal length in FIG. Of the optical characteristics due to the above.
[0023]
Further, as is clear from the graph of FIG. 4, if the wetting angle θ is 40 degrees or more, the focal length f shows a substantially constant value. Therefore, the wetting angle of the ultraviolet curable resin is set to 40 degrees or more. It is preferable to obtain more stable optical characteristics.
[0024]
According to the above embodiment, since the surface-emitting type LED elements 11 are arranged in a staggered arrangement of two rows, the lens diameter D of the microlens 3 is set to a size equal to or larger than the dot pitch (D = dot pitch P × √2 + α). can do.
[0025]
Further, since the optical path length adjusting layer 2 is formed below the microlens 3, the difference in the wetting angle due to different materials such as the electrode wiring pattern 12 can be absorbed, and the microlens 3 having always stable optical characteristics can be obtained. Obtainable.
[0026]
Further, by providing the optical path length adjusting layer 2, the microlens 3 can be arranged at an appropriate optical position with respect to the surface-emitting type LED element 11. That is, since the bonding region of the surface emitting LED element 11 is formed at a depth of about 5 ° from the surface of the substrate 10, if the microlens 3 is directly formed on the surface of the LED array chip 1, It is difficult to condense the light into an appropriate shape. However, as shown in FIG. 2, an optical path length adjusting layer 2 is formed on the surface of the LED array chip 1 so that the surface emitting LED element 11 and the micro lens By setting a distance between the light emitting device and the light emitting device 3, the light from the surface-emitting type LED element 11 can be collected into substantially parallel light.
[0027]
Here, in the exposure apparatus of the present invention, the surface of the optical path length adjusting layer 2 is coated with a surface tension adjusting layer made of fluororesin or the like . By forming such a surface tension adjusting layer, the wetting angle of the ultraviolet curable resin can be adjusted, and the microlens 3 having desired lens characteristics can be formed. Further, the function of such a surface tension adjusting layer can be shared by the optical path length adjusting layer 2.
[0028]
【Example】
In this embodiment, the dimensions and materials of the LED array chip 1, the optical path length adjusting layer 2, and the microlenses 3 in FIGS. 1 and 2 are set as follows.
LED array chip 1
Dot pitch: P = 1200 dpi (21.2 μm)
.Optical path length adjustment layer 2
Silicon resin (refractive index 1.5)
Film thickness: 75 μm
Micro lens 3
UV curable resin (refractive index 1.5)
Wetting angle: 50 degrees Lens diameter: D = 35 μm
Lens focal length: F = 30 μm (n = 1.5)
[0029]
【The invention's effect】
As described above, according to the present invention, since the microlenses are integrally formed on each of the light-emitting elements arranged in a staggered manner, the light emission can be performed without using a self-FOC range which has a problem in light quantity fluctuation and assembly accuracy. Output light from the element can be collected in an appropriate state. In addition, the size of the apparatus can be reduced as compared with the case where the self-fock range is used.
[0030]
Further, since the microlenses are formed by the surface tension of the ultraviolet curable resin discharged in a non-contact state with the light emitting element chip, there is no possibility that the electrode wiring pattern or the like is damaged. Further, since the microlenses can be easily manufactured without using a transparent mold or the like, productivity is good.
[Brief description of the drawings]
FIG. 1 is a plan view schematically showing a main structure of an embodiment of the present invention.
FIG. 2 is a sectional view taken along line AA of FIG.
FIG. 3 is an explanatory diagram of a method for forming a microlens.
FIG. 4 is a diagram showing a relationship between a wetting angle of an ultraviolet curable resin constituting a microlens and a focal length.
FIG. 5 is a diagram illustrating an example of an electrophotographic apparatus.
FIG. 6 is a cross-sectional view schematically showing a main part structure of a conventional exposure apparatus.
FIG. 7 is a sectional view taken along line BB of FIG. 6;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 LED array chip 10 Substrate 11 Surface emitting LED element 12 Electrode wiring pattern 2 Optical path length adjustment layer 3 Microlens 101 Photoconductor drum 102 Charger 103 Exposure device 104 Developing device 105 Transfer roller 106 Fixing roller 107 Cleaner

Claims (3)

発光素子の上にマイクロレンズを組み合わせた電子写真装置用の露光装置において、In an exposure apparatus for an electrophotographic apparatus in which a microlens is combined on a light emitting element,
基板と、Board and
前記基板上に千鳥配列された複数の面発光型LED素子と、A plurality of surface-emitting LED elements arranged in a staggered pattern on the substrate,
前記面発光型LED素子の形成面に積層されたマイクロレンズの光学位置調整用の光路長調整層と、An optical path length adjustment layer for adjusting the optical position of the microlens laminated on the formation surface of the surface emitting LED element;
前記光路長調整層の表面にコーティングされた紫外線硬化樹脂の濡れ角調整用の表面張力調整層と、A surface tension adjustment layer for adjusting the wetting angle of the ultraviolet curable resin coated on the surface of the optical path length adjustment layer,
前記光路長調整層に形成された表面張力調整層面上の各面発光型LED素子に対向する位置に、所定量の紫外線硬化樹脂を吐出させ、且つその樹脂の表面張力により形成されたマイクロレンズとA predetermined amount of ultraviolet curable resin is discharged at a position on the surface tension adjusting layer surface formed on the optical path length adjusting layer, which faces each surface emitting LED element, and a microlens formed by the surface tension of the resin.
からなることを特徴とする露光装置。An exposure apparatus comprising:
発光素子の上にマイクロレンズを組み合わせた電子写真装置用の露光装置において、
基板と、
前記基板上に千鳥配列された複数の面発光型LED素子と、
前記面発光型LED素子の形成面に積層されたマイクロレンズの光学位置調整用の光路長調整層と、
前記光路長調整層の表面上の各面発光型LED素子に対向する位置に、所定量の紫外線硬化樹脂を吐出させ、且つその樹脂の表面張力により形成されたマイクロレンズとからなり、
上記光路長調整層に、紫外線硬化樹脂の濡れ角調整用の表面張力調整層の機能を兼用させたことを特徴とする露光装置。
In an exposure apparatus for an electrophotographic apparatus in which a microlens is combined on a light emitting element,
Board and
A plurality of surface-emitting LED elements arranged in a staggered pattern on the substrate,
An optical path length adjustment layer for adjusting the optical position of the microlens laminated on the surface on which the surface emitting LED element is formed,
A predetermined amount of ultraviolet curable resin is discharged at a position on the surface of the optical path length adjustment layer facing each surface-emitting type LED element, and a microlens formed by surface tension of the resin,
An exposure apparatus, wherein the optical path length adjusting layer also has a function of a surface tension adjusting layer for adjusting the wetting angle of the ultraviolet curable resin .
上記表面張力調整層により、上記マイクロレンズを形成する紫外線硬化樹脂の濡れ角が40度以上となるように調整したことを特徴とする請求項1記載の露光装置。2. The exposure apparatus according to claim 1, wherein the surface tension adjusting layer is adjusted so that the wetting angle of the ultraviolet curable resin forming the microlens is 40 degrees or more.
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