JP3855769B2 - Build-up insulating layer forming resin composition, resin sheet, and printed wiring board manufacturing method using the same - Google Patents
Build-up insulating layer forming resin composition, resin sheet, and printed wiring board manufacturing method using the same Download PDFInfo
- Publication number
- JP3855769B2 JP3855769B2 JP2001395484A JP2001395484A JP3855769B2 JP 3855769 B2 JP3855769 B2 JP 3855769B2 JP 2001395484 A JP2001395484 A JP 2001395484A JP 2001395484 A JP2001395484 A JP 2001395484A JP 3855769 B2 JP3855769 B2 JP 3855769B2
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- resin
- layer
- printed wiring
- wiring board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000011342 resin composition Substances 0.000 title claims description 53
- 229920005989 resin Polymers 0.000 title claims description 45
- 239000011347 resin Substances 0.000 title claims description 45
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000011941 photocatalyst Substances 0.000 claims description 24
- 150000001875 compounds Chemical class 0.000 claims description 21
- 150000002894 organic compounds Chemical class 0.000 claims description 20
- -1 maleimide compound Chemical class 0.000 claims description 16
- 238000007772 electroless plating Methods 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 238000000354 decomposition reaction Methods 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 5
- 229920000620 organic polymer Polymers 0.000 claims description 5
- 239000003513 alkali Substances 0.000 claims description 4
- 238000009713 electroplating Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000007747 plating Methods 0.000 description 24
- 238000000034 method Methods 0.000 description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 18
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 16
- 229910052757 nitrogen Inorganic materials 0.000 description 15
- 239000000243 solution Substances 0.000 description 13
- 239000002966 varnish Substances 0.000 description 13
- 239000010408 film Substances 0.000 description 12
- 239000003960 organic solvent Substances 0.000 description 11
- 238000005530 etching Methods 0.000 description 10
- 239000000047 product Substances 0.000 description 10
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 9
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 239000011889 copper foil Substances 0.000 description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000000654 additive Substances 0.000 description 6
- 239000004020 conductor Substances 0.000 description 6
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- 239000003063 flame retardant Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000004408 titanium dioxide Substances 0.000 description 6
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- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000011256 inorganic filler Substances 0.000 description 5
- 229910003475 inorganic filler Inorganic materials 0.000 description 5
- 239000007800 oxidant agent Substances 0.000 description 5
- 229920003192 poly(bis maleimide) Polymers 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 239000012670 alkaline solution Substances 0.000 description 4
- 238000001723 curing Methods 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000001294 propane Substances 0.000 description 4
- 150000003923 2,5-pyrrolediones Chemical class 0.000 description 3
- 125000006022 2-methyl-2-propenyl group Chemical group 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
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- 230000001678 irradiating effect Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 3
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 2
- PYVHLZLQVWXBDZ-UHFFFAOYSA-N 1-[6-(2,5-dioxopyrrol-1-yl)hexyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CCCCCCN1C(=O)C=CC1=O PYVHLZLQVWXBDZ-UHFFFAOYSA-N 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 2
- XMNIXWIUMCBBBL-UHFFFAOYSA-N 2-(2-phenylpropan-2-ylperoxy)propan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)OOC(C)(C)C1=CC=CC=C1 XMNIXWIUMCBBBL-UHFFFAOYSA-N 0.000 description 2
- VEORPZCZECFIRK-UHFFFAOYSA-N 3,3',5,5'-tetrabromobisphenol A Chemical compound C=1C(Br)=C(O)C(Br)=CC=1C(C)(C)C1=CC(Br)=C(O)C(Br)=C1 VEORPZCZECFIRK-UHFFFAOYSA-N 0.000 description 2
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- RGIBXDHONMXTLI-UHFFFAOYSA-N chavicol Chemical compound OC1=CC=C(CC=C)C=C1 RGIBXDHONMXTLI-UHFFFAOYSA-N 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- ZQMIGQNCOMNODD-UHFFFAOYSA-N diacetyl peroxide Chemical compound CC(=O)OOC(C)=O ZQMIGQNCOMNODD-UHFFFAOYSA-N 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 125000005394 methallyl group Chemical group 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- INJVFBCDVXYHGQ-UHFFFAOYSA-N n'-(3-triethoxysilylpropyl)ethane-1,2-diamine Chemical compound CCO[Si](OCC)(OCC)CCCNCCN INJVFBCDVXYHGQ-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002736 nonionic surfactant Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229920000570 polyether Polymers 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000011164 primary particle Substances 0.000 description 2
- 239000007870 radical polymerization initiator Substances 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
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- 150000003568 thioethers Chemical class 0.000 description 2
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 2
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 2
- JMYZLRSSLFFUQN-UHFFFAOYSA-N (2-chlorobenzoyl) 2-chlorobenzenecarboperoxoate Chemical compound ClC1=CC=CC=C1C(=O)OOC(=O)C1=CC=CC=C1Cl JMYZLRSSLFFUQN-UHFFFAOYSA-N 0.000 description 1
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- PWXTUWQHMIFLKL-UHFFFAOYSA-N 1,3-dibromo-5-[2-(3,5-dibromo-4-prop-2-enoxyphenyl)propan-2-yl]-2-prop-2-enoxybenzene Chemical compound C=1C(Br)=C(OCC=C)C(Br)=CC=1C(C)(C)C1=CC(Br)=C(OCC=C)C(Br)=C1 PWXTUWQHMIFLKL-UHFFFAOYSA-N 0.000 description 1
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- VXZIUZPGTGXQKS-UHFFFAOYSA-N 3-silylpyrrole-2,5-dione Chemical compound [SiH3]C1=CC(=O)NC1=O VXZIUZPGTGXQKS-UHFFFAOYSA-N 0.000 description 1
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- KBQVDAIIQCXKPI-UHFFFAOYSA-N 3-trimethoxysilylpropyl prop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C=C KBQVDAIIQCXKPI-UHFFFAOYSA-N 0.000 description 1
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- CKKHZUOZFHWLIY-UHFFFAOYSA-N 4-(4-hydroxy-3-prop-2-enylphenyl)-2-prop-2-enylphenol Chemical group C1=C(CC=C)C(O)=CC=C1C1=CC=C(O)C(CC=C)=C1 CKKHZUOZFHWLIY-UHFFFAOYSA-N 0.000 description 1
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Images
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- Laminated Bodies (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
【0001】
【発明の属する技術分野】
本発明は、ビルドアッププリント配線板の製造工程等においてアディティブ法めっきを行う際に、粗面化処理剤として有害な酸化剤を使用しなくとも金属との密着性が得られ、かつ表面平滑性の優れた樹脂層を形成するビルドアップ絶縁層形成用樹脂組成物、当該樹脂組成物をフィルム上に形成してなる樹脂シート、並びに当該樹脂組成物を用いたプリント配線板の製造方法に関するものである。
【0002】
【従来の技術】
半導体の多端子化、パッケージの小サイズ化、ベアチップ実装化等の半導体実装技術の革新により、電子機器の小型軽量化は大きく促進された。半導体パッケージを搭載するプリント配線板も従来の多層配線板では配線の引き回しが困難となり、ブラインドバイアホールを有するビルドアップ多層配線板が必須となってきた。更に、CPUの高周波化に伴い、パッケージ基板の配線長の短縮、高密度配線化の促進、並びに特性インピーダンスコントロールのために配線形状加工の精度アップ等が要求されており、数十μm以下のライン/スペース(L/S)を精度よく加工する必要が生じてきた。
また、デバイスの高速化に伴い微細配線では伝送信号が配線の周辺に集中し易く、配線の表面粗さが大きいと抵抗が高くなり高速伝送の妨げとなってくるので、配線回路と樹脂の接着界面では平滑化が必要となってきた。
【0003】
従来の銅張積層板あるいは樹脂付き銅箔を加工してプリント配線板を製造する場合、銅箔粗化面の表面粗さは少なくとも数μmあり、エッチング時のばらつきとなる。更に、めっきスルーホールを有するプリント配線板の場合は銅箔の厚みに加えてめっき厚分だけ余分にエッチングすることになるが、銅箔粗化面の表面粗さに加えてめっき厚のばらつきを加味すると、最大厚みの銅を完全にエッチングするにはエッチング時間が長くなる。その結果、銅厚の薄い部分はオーバーエッチングとなり易く、数十μm以下のL/Sの加工精度が得られなくなる。
そこで、エッチングする銅の厚みを薄くしてエッチング精度を高めるために、銅張積層板や樹脂付き銅箔を使用しないアディティブ法が利用されている。しかしながら、高密度配線とバイアホール接続とを必要とするビルドアッププリント配線板の製造をセミアディティブ法で行う場合、樹脂層表面を従来のクロム酸や過マンガン酸カリウム等の酸化剤を使用して粗化処理しようとすると、やはり表面粗さとして数μmの凹凸を設けないとめっき金属との接着力が得られなかった。より高密度な数μm以下のL/Sとなるとこれらの凹凸によりエッチングのばらつきが生じるため配線・回路の加工精度に限界があった。
【0004】
一方、クロム酸のような有害な酸化剤を使用せず、めっき表面性および樹脂成型品の寸法精度を保ったまま、密着性の良好な無電解めっき膜を形成する方法として、樹脂材料表面に紫外線を照射してから無電解めっきを行う方法が特開平8−253869号公報に開示されている。また、無電解めっき密着性を更に高めるために紫外線照射後に非イオン界面活性剤を含むアルカリ溶液と接触させる表面処理工程を加えた無電解メッキ方法が特開平10−88361号公報に開示されている。
しかしながら、これらの方法では、樹脂表面に紫外線を照射した後に行われる、アルカリ溶液あるいは脱脂液での表面処理、Pd−Snコロイド液あるいは錯化液等の活性化液による表面処理、並びに、Snを除去する酸活性処理等の表面処理工程において、樹脂表面が空気に触れると無電解めっきが未析出になる傾向があり、安定して無電解めっきを行えないという欠点があった。また、無電解めっきが良好な状態で処理できたとしても、依然としてプリント配線板に応用するには十分な引き剥がし強さやはんだ耐熱性が得られないという問題があった。
【0005】
【発明が解決しようとする課題】
本発明の課題は、上記従来技術の欠点を解決し、有害な酸化剤を使用しなくとも樹脂表面の表面処理を行うことができ、表面の粗さおよび導体厚のばらつきに起因するエッチング精度不良が回避され、樹脂表面が平滑状態でめっき金属との密着性を確保することができる方法を提供することを課題とするものである。
【0006】
【課題を解決するための手段】
本発明は、有機高分子化合物または重合可能な有機化合物(以下、これらを「有機化合物」と総称する。)に、紫外線照射による樹脂組成物の分解反応を触媒する光触媒を分散させてなり、紫外線照射により分解可能なビルドアップ絶縁層形成用樹脂組成物を提供するものである。また、当該樹脂組成物として、特にプリント配線板用樹脂組成物として優れた、(A)アルケニルフェノール化合物 、(B)マレイミド化合物および(C)光触媒を主成分とする樹脂組成物を提供するものである。また、本発明は、フィルム上に、前記樹脂組成物の層を形成してなる樹脂シートである。また、本発明は、前記ビルドアップ絶縁層形成用樹脂組成物の層に紫外線を照射した後、酸またはアルカリ溶液で表面の反応分解物を除去し、次いで、上記層の表面に金属皮膜を形成する工程を含むプリント配線板の製造方法である。更に、本発明は、無電解めっきの後および/または電気めっきにより金属皮膜を形成し、無電解めっきの後および/または電気銅めっきの後にベーキングを行う工程を含む、より密着性の高いプリント配線板の製造方法である。
【0007】
【発明の実施の形態】
本発明で用いる光触媒としては、二酸化チタン、チタン酸ストロンチウム、ニオブ酸カリウム等が利用できるが安定で活性の高いとの理由から二酸化チタンが好ましい。二酸化チタンの結晶構造には正方晶系の高温型ルチル型と低温型のアナターゼ型、並びに斜方晶系のブルッカイト型があるが、光触媒としては光活性の高いアナターゼ型二酸化チタンが好ましい。なお、粒径はできる限り微細なもの、一次粒径がO.1μm以下のものが好ましい。
一次粒径が大きくなると樹脂の微細な分解ができずめっきの密着強度が得られ難くなる。
二酸化チタンの例としては、石原産業(株)製ST−01、ST−21、ST−41、堺化学(株)製SSP−20、SSP−25、日本アエロジル(株)製P25、TN90、チタン工業(株)製STT−65C−S等が挙げられる。これらは粉体であるため、通常二次凝集が起こっており、サブミクロンまで分散させる必要がある。その方法にはディスパ-、ペイントコンディッショナー、ホモジナイザー、ボールミル等により可能である。
【0008】
光触媒の使用方法としては、本発明の樹脂組成物を構成する有機化合物中に光触媒を均一に混合あるいは混練させる方法、前記有機化合物を溶解させた溶液中で光触媒を分散させて被めっき物をプライマー処理して塗布乾燥硬化する方法、あるいは前記有機化合物を溶解させた溶液中で光触媒を分散させてフィルム状に塗布乾燥して被めっき物にラミネートして硬化させる方法、光触媒含有量の多い層と従来の光触媒を含まないビルドアップ材料樹脂組成物の層の2層構造として内層板にラミネートする方法等の種々の方法が利用できる。
【0009】
本発明の樹脂組成物を構成する有機化合物は、有機高分子化合物または重合可能な有機化合物で、後者は単独または共重合により有機高分子化合物となるものである。これら有機化合物は、単独でもまた複数を混合して用いても良い。
本発明の有機化合物は、プリント配線板のアディティブ法めっきの対象となる樹脂またはその重合前の有機化合物であることが本発明の目的に合致するものである。
【0010】
プリント配線板のアディティブ法めっきの対象となる樹脂としては、フェノール樹脂、エポキシ樹脂、ポリイミド樹脂、ビスマレイミド・トリアジン樹脂、メタリル樹脂、ベンゾシクロブテン樹脂、ポリフェニレンエーテル樹脂、ポリスルホン、ポリエーテルスルホン、ポリエーテルイミド、ポリアリルスルホン、ポリアミドイミド、ポリフェニレンスルフィド、ポリエーテルエーテルキトン等の単独または添加物を加えたもの、或いはそれらの組み合わせたものが挙げられる。
【0011】
これら樹脂表面に金属皮膜を形成する方法としては、スパッタリング、真空蒸着、イオンプレーティング等の物理蒸着(PVD)や化学蒸着(CVD)のドライプレーティング等も挙げられるが、無電解めっきまたは/および電気めっきの方が経済性であり好ましい。無電解めっきとしては無電解ニッケル−リン合金めっき、無電解ニッケル−硼素合金めっき、無電解銅めっき等が挙げられる。
【0012】
本発明の多層プリント配線板の製造方法において使用する樹脂組成物は紫外線に感応するものなら使用可能であるが、高耐熱性および絶縁性等を兼ね備えた(A)アルケニルフェノ−ル化合物 、(B)マレイミド化合物および(C)光触媒からなる紫外線に感応する樹脂組成物が好ましく用いることができる。
【0013】
紫外線の照射量は100mJ/cm2以上であれば光触媒による樹脂組成物の分解は可能であるが、好ましくは300mJ〜10J/cm2である。露光量が多くなると作業時間が悪くなるとともにパネルの温度上昇を伴い好ましくない。
【0014】
紫外線照射後、紫外線により反応成分および光触媒による酸化分解物を除去するために酸またはアルカリで洗浄する必要がある。酸としては硫酸、塩酸、硝酸、フッ酸、リン酸等、アルカリは水酸化ナトリウム、水酸化カリウム等が利用できる。
【0015】
更に、特開平10−88361号公報に記載のように紫外線照射した後の樹脂表面の樹脂分解物を、ポリオキシエチレン結合を有する非イオン界面活性剤を含有するアルカリ溶液で除去してもよい。特開平10−88361においては、ポリスチレンやABSに対して紫外線照射してめっき密着性が得られるものであるが主としてC=C結合、C−H結合、C−C結合が解離されるものである。光触媒を併用すれば分解できる化学結合基の種類が多くなり紫外線照射露光量が小さくても樹脂の分解が可能であり、露光時間の短縮ができるので作業性が向上する。また、樹脂組成物で種々の添加物が混在すると表面における分解可能な化学結合基の密度が小さくなるので、光触媒を併用するとより効果的に表面改質ができる。
【0016】
無電解めっき後のエージングは150〜260℃で5〜120分が適当であり、電気銅めっき後のベーキングは170〜260℃で5〜60分行えばよい。
【0017】
ビルドアップ多層プリント配線の製造において、ビルドアップ絶縁層である樹脂組成物中に光触媒を混在させておくと、ホトビア法あるいはレーザービア加工によるビアホール中の薄膜スカムの残査を除去するときに紫外線を照射するとスカム中の有機物成分が分解されてデスミア処理が容易となる。
【0018】
本発明で用いる有機化合物の中では、有機高分子化合物(以下、単に「高分子化合物」と称する。)が好ましい。また、本発明の樹脂組成物は、紫外線照射により分解可能な樹脂組成物である。なお、本発明の目的において、当該分解は、樹脂組成物の表面近傍、即ち表面からサブミクロン程度で十分である。
【0019】
本発明の樹脂組成物の中で特に好ましいのは、有機化合物の全てまたは主成分が、(A)アルケニルフェノール化合物(以下「成分(A)」と称する。)および(B)マレイミド化合物(以下「成分(B)」と称する。)からなるかまたはこれら2成分を主とする有機化合物、特に好ましくは高分子化合物からなる樹脂組成物である。
【0020】
ここにおいて、成分(A)は、アルケニル基を有するフェノール誘導体であれば特に限定されない。
具体例としては、2,2−ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕プロパン、2,2−ビス〔4−ヒドロキシ−3−(2−プロペニル)フェニル〕プロパン、2,2−ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕ペンタン、2,2−ビス〔4−ヒドロキシ−3−(2−プロペニル)フェニル〕ペンタン、1,1,1,3,3,3−ヘキサフルオロ−2,2−ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕プロパン、1,1,1,3,3,3−ヘキサフルオロ−2,2−ビス〔4−ヒドロキシ−3−(2−プロペニル)フェニル〕プロパン、1,1,1,3,3,3−ヘキサクロロ−2,2−ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕プロパン、1,1,1,3,3,3−ヘキサクロロ−2,2−ビス〔4−ヒドロキシ−3−(2−プロペニル)フェニル〕プロパン、ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕メタン、ビス〔4−ヒドロキシ−3−(2−プロペニル)フェニル〕メタン、1,1−ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕エタン、1,1−ビス〔4−ヒドロキシ−3−(2−プロペニル)フェニル〕エタン、4,4’−ジヒドロキシ−3,3’−ビス(2−メチル−2−プロペニル)ビフェニル、4,4’−ジヒドロキシ−3,3’−ビス(2−プロペニル)ビフェニル、ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕チオエ−テル、ビス〔4−ヒドロキシ−3−(2−プロペニル)フェニル〕チオエ−テル、ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕エ−テル、ビス〔4−ヒドロキシ−3−(2−プロペニル)フェニル〕エ−テル、ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕スルホン、ビス〔4−ヒドロキシ−3−(2−プロペニル)フェニル〕スルホン、ビス〔4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル〕シクロヘキサン等のアルケニル基を2個有するアルケニルフェノール化合物を挙げることができる。
また、2−アリルフェノール、4−アリルフェノール、2−アリル−4−メチルフェノール、2−アリル−4−メトキシフェノール、2−アリル−6−メチルフェノール、2−メタリルフェノール、4−メタリルフェノール、2−メタリル−4−メチルフェノール、2−メタリル−4−メトキシフェノール、2−メタリル−6−メチルフェノール、2−クロチルフェノール等も使用することができる。
更に、1,1,1−トリス(2−アルケニル−4−ヒドロキシフェニル)メタン、1,1,1−トリス(2−アルケニル−4−ヒドロキシフェニル)エタン、4−{4−〔1,1−ビス(2−アルケニル−4−ヒドロキシフェニル)エチル〕}−α,α−ジメチルベンジルフェノール等の3価以上のフェノール類から誘導されるアルケニルフェノール化合物を挙げることができる。
【0021】
これらのアルケニルフェノール化合物は、2種類以上併用しても良い。
好ましいアルケニルフェノール化合物としては、反応性、硬化物の電気特性の点で2−メチル−2−プロペニル基(メタリル基)を有するアルケニルフェノール化合物であり、更に好ましくはこの基を2個有するアルケニルフェノール化合物である。
【0022】
成分(B)のマレイミド化合物としてはN−置換マレイミド化合物およびN,N−置換マレイミド化合物が挙げられる。
N−置換マレイミド化合物およびN,N−置換マレイミド化合物の具体例としては、N−メチルマレイミド、N−エチルマレイミド、N−プロピルマレイミド、N−ヘキシルマレイミド、N−オクチルマレイミド、N−シクロヘキシルマレイミド、N−フェニルマレイミド、N−p−トリルマレイミド、N−m−トリルマレイミド、N−o−トリルマレイミド、N−α−ナフチルマレイミド、N−ベンジルマレイミド、N−p−キシリルマレイミド、N−m−キシリルマレイミド、N−o−キシリルマレイミド、N,N’−エチレンジマレイミド、N,N’−ヘキサメチレンジマレイミド、N,N’−ヘキサメチレンジマレイミド、N,N’−ドデカメチレンジマレイミド、N,N’−m−フェニレンジマレイミド、N,N’−p−フェニレンジマレイミド、N,N’−(オキシジ−p−フェニレン)ジマレイミド、N,N’−(メチレンジ−p−フェニレン)ジマレイミド、N,N’−2,4−トリレンジマレイミド、N,N’−2,6−トリレンジマレイミド、N,N’−m−キシリレンジマレイミド、N,N’−p−キシリレンジマレイミド、N,N’−オキシジプロピレンジマレイミド、エチレンジオキシ−ビス−N−プロピルマレイミド、オキシ−ビス−N−エチルマレイミド、N,N’−p,p’−ジフェニルスルホンビスマレイミド、N,N’−p,p’−ジフェニルエ−テルビスマレイミド、N,N’−ジシクロヘキシルメタンビスマレイミド、N,N’−(3,3−ジクロロ−p,p’−ビスフェニレン)ビスマレイミド、1,1,1,3,3,3ーヘキサフルオロ−2,2−ビス(4−マレイミドフェニル)プロパン、1,1,1,3,3,3ーヘキサフルオロ−2,2−ビス〔4−(4−マレイミドフェノキシ)フェニル〕プロパン等が挙げられる。
【0023】
更にトリ置換あるいはテトラ置換のマレイミド化合物、ポリ(フェニルメチレン)ポリマレイミド化合物またはこれらの各種マレイミド化合物の2種類以上を適宜併用することができる。
好ましいマレイミド化合物としては、耐熱性向上、有機溶剤への可溶性の理由から、N,N’−(メチレンジ−p−フェニレン)ジマレイミドおよびN,N’−p−フェニレンジマレイミド等が挙げられる。
【0024】
ここにおいて、成分(A)と成分(B)の好ましい配合割合は、成分(A)を20〜80重量部、更に好ましくは40〜60重量部、成分(B)を80〜20重量部、更に好ましくは60〜40重量部である。
成分(A)が80重量部を超えると得られる硬化物の耐熱性が低下し易く、20重量部未満では硬化物が脆くなり易い。
【0025】
なお、本発明の樹脂組成物をワニス化する場合、樹脂組成物をそのまま有機溶剤に溶解または分散させてもよいが、成分(A)および成分(B)についてはワニスの固形分濃度を上げるため、またワニスに沈殿を生じ難くするために、予め部分的に反応させてプレポリマー化しておくことが好ましい。具体的には成分(A)と成分(B)とをゲルパーミエーションクロマトグラフィーから算出した反応率が30〜90%となるまで反応させることが好ましい。
【0026】
光触媒は、有機化合物100重量部に対して1〜100重量部が好ましい。1重量部未満では紫外線による高分子物質の分解が少なく、100重量部を超えるとビルドアップ配線板加工時のレーザーにブラインドバイア加工が難しくなる。より好ましくは10〜60重量部である。
【0027】
本発明の樹脂組成物を有機溶剤に溶解または分散させるとワニスが得られる。前記有機溶剤としては、メチルエチルケトン、イソブチルメチルケトン、シクロヘキサノン等のケトン類、酢酸エチル、酢酸ブチル等のエステル類、トルエン、キシレン等の炭化水素類、塩化メチレン、1,1,1−トリクロロエタン等のハロゲン炭化水素類、ジオキサン、テトラヒドロフラン等のエーテル類、セロソルブアセテート等のエーテルエステル類、N,N−ジメチルホルムアミド、N,N−ジメチルアセトアミド、ジメチルスルホキシド、スルホラン等の非プロトン性有機溶剤が用いられるが、特に限定しない。これらの有機溶剤は1種または2種以上を混合して使用することができる。
有機溶剤の使用量は、用途および有機溶剤の種類に応じて種々異なり、明確に規定することは困難であるが、ワニス全重量に対して10〜95重量%、より好ましくは20〜90重量%用いるのが適当である。使用する有機溶剤が10重量%よりも少ないとワニス粘度が高くなり、使用する際の作業性が低下し、また保存安定性が低下する。また、使用する有機溶剤が95重量%よりも多く用いると、逆にワニス粘度が下がりすぎて、均一に塗布し難くなる。
【0028】
本発明の樹脂組成物またはこれから得たワニスには、有機化合物および光触媒の他に、必要に応じて、アクリロニトリル−ブタジエンゴムまたは水素化アクリロニトリル−ブタジエンゴム、柔軟性微粒子、ラジカル重合開始剤、難燃剤、他の樹脂、無機質フィラー、チキソ性付与剤、消泡剤、レベリング剤、或いはシランカップリング剤等を添加しても良い。
【0029】
好ましいラジカル重合開始剤としては、過酸化クミル、過酸化tert−ブチル、過酸化アセチル、過酸化プロピオニル、過酸化ベンゾイル、過酸化−2−クロロベンゾイル、過酸化ラウロイル、ペルオキシ炭酸ジイソプロピル、テトラリンヒドロペルオキシドおよび2,5−ジメチル−2,5−ジ(tert−ブチルパ−オキシ)ヘキサン等の有機過酸化物が挙げられる。
【0030】
前記難燃剤としては、テトラブロモビスフェノールA、テトラブロモビスフェノールAのジ(メタ)アクリレート反応物、テトラブロモビスフェノールAジアリルエーテル、ヘキサブロモベンゼン、トリス(2,3−ジブロモプロピル)イソシアヌレート、2,2−ビス(4−ヒドロキシエトキシ−3,5−ジブロモフェニル)フェニルプロパン、デカブロモジフェニルエーテル、臭素化ポリカーボネート等の有機難燃剤、酸化アンチモン、水酸化アルミ、水酸化マグネシウム、水酸化ジルコニウム、酸化スズ等の無機系難燃剤、トリフェニルホスフェート、トリキシレニルホスフェート等の芳香族リン酸エステル系難燃剤等が挙げられる。
これらの難燃剤は1種または2種以上を併用して使用することができる。
好ましい難燃剤としては、分解温度が高いことおよびワニスに添加し沈殿し難いことから臭素化ポリカーボネートを挙げることができる。
【0031】
前記シランカップリング剤は、本発明の樹脂組成物の成分である有機化合物または光触媒と反応する有機基を有する化合物であれば特に限定されない。具体的には、γ−グリシドキシプロピルトリメトキシシラン、γ−グリシドキシプロピルトリエトキシシラン、γ−グリシドキシプロピルメチルジメトキシシラン、γ−グリシドキシプロピルメチルジエトキシシラン、β−グリシドキドキシエチルトリメトキシシラン、β−(3,4−エポキシシクロヘキシル)エチルトリメトキシシラン、β−(3,4−エポキシシクロヘキシル)エチルトリエトキシシラン、β−(3,4−エポキシシクロヘキシル)プロピルトリメトキシシラン、ビニルトリメトキシシラン、ビニルトリエトキシシラン、γ−アミノプロピルトリエトキシシラン、γ−アミノプロピルトリメトキシシラン、N−(β−アミノエチル)−γ−アミノプロピルトリエトキシシラン、γ−メルカプトプロピルトリメトキシシラン、γ−メタクリロキシプロピルトリメトキシシラン、γ−アクリロキシプロピルトリメトキシシランおよびN−[β−(N−ビニルベンジルアミノ)エチル]−γ−アミノプロピルトリメトキシシラン塩酸塩等を挙げることができる。
【0032】
これらシランカップリング剤としては、所望により1種もしくは2種以上混合して使用することができる。
好ましいシランカップリング剤は、反応性および接着性の向上等の理由により、γ−グリシドキシプロピルトリメトキシシラン、β−(3,4−エポキシシクロヘキシル)エチルトリメトキシシラン等のエポキシ基含有シランカップリング剤及びγ−アミノプロピルトリエトキシシラン、γ−アミノプロピルトリメトキシシラン、N−(β−アミノエチル)−γ−アミノプロピルトリエトキシシラン等のアミノ基含有シランカップリング剤を挙げることができる。
【0033】
前記無機フィラーは、例えば、硬化物の寸法精度向上や線膨張係数コントロール等の目的で添加される。使用し得る無機フィラーの代表例としては、シリカ粉、ケイ酸ジルコニウム、アルミナ、炭酸カルシウム、石英ガラス粉、クレー、タルク、硫酸バリウム、酸化ジルコニウム等が挙げられる。これらの無機フィラーは、単独でまたは2種類以上混合して用いることができる。また、これら無機フィラーの添加量は使用目的に応じて決定されるが、一般に樹脂組成物の全容量に対して5〜75容量%の範囲内とするのが適当である。
【0034】
本発明の樹脂組成物またはワニスの織布または不織布への含浸、樹脂フィルムや金属箔へのコーティングは、通常のディップ、スプレー、グラビアコーティング、ロールコーティング等の方法により行うことができる。塗布の厚みは、通常1〜200μm、好ましくは10〜100μmである。ワニスの場合には、コーティング後に乾燥させて溶媒を除去する。このとき、好ましい乾燥温度は室温〜250℃(より好ましくは100〜200℃)、好ましい乾燥時間は数分〜4時間(より好ましくは数分〜0.5時間)である。
【0035】
本発明の樹脂組成物またはワニスを硬化させる際には、この組成物または有機溶剤除去後の組成物を、例えば100〜300℃の恒温槽で10分〜5時間加熱すれば良い。また別の硬化方法として紫外線硬化、電子線硬化等を用いることができる。
【0036】
ポリエチレンテレフタレート等のフィルムに、本発明の樹脂組成物を塗布乾燥させてなる樹脂シートの作成すると、当該シートの樹脂組成物側をプリント配線板用のパネルまたは基板の表面に圧着または熱圧着しフィルムを取り除くことにより、パネルまたは基板上に本発明の樹脂組成物の層を容易に形成することができる。
また、前記フィルムに本発明の樹脂組成物の層を形成し、その上に加熱時に流動性を有する樹脂の層を形成してなる樹脂シートは、プリント配線板用のパネルまたは基板の表面に熱圧着したときに、加熱時に流動性を示す樹脂がパネルまたは基板の表面凹部に流れ込むため、圧着した層との密着性が向上し、また表面が平らとなるので更に好ましい。
【0037】
【作用】
本発明の樹脂組成物を用いて得られたプリント配線板は、表面の平滑性を保っているのに拘わらず、金属との密着性が優れたものである。この理由は定かでないが、次のように推測される。光触媒に紫外線を照射すると価電子帯の電子が励起され、価電子帯に正孔と電子の2つのキャリアが生じる。この正孔は強い酸化作用があり有機物を分解することができる。一方、電子は還元反応を起こすことができる。本発明は、有機物を構成する分子中に存在するC−C、C−H、C−N、C−O、O−H、N−H等の結合エネルギーよりも大きな光触媒の強い酸化力を利用して、樹脂表面の高分子物質を分解して官能基を生成させるため、その官能基と金属との密着力が得られるものである。
【0038】
【実施例】
以下、実施例を示して本発明を詳細に説明する。
実施例1
(樹脂組成物の調整)
冷却管、攪拌機および温度計を取り付けた1リットル三口フラスコに、ビス(4−マレイミドフェニル)メタン100.6g、2,2−ビス[4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル]プロパン75.5gおよびN,N−ジメチルアセトアミド58.9gを仕込み、130℃で4時間反応させた。反応物のゲルパーミエーションクロマトグラフィー分析(以下「GPC分析」と証する。)を行った結果、未反応のビス(4−マレイミドフェニル)メタンと2,2−ビス[4−ヒドロキシ−3−(2−メチル−2−プロペニル)フェニル]プロパンとの合計量は、47.2%であった。
反応液を40℃まで冷却した後、メチルエチルケトン67.0gおよびジクミルパーオキシド12.8gを配合し、均一になるまで攪拌した。その後、二酸化チタン(石原産業(株)製ST−01)を添加しない樹脂組成物▲1▼、樹脂固形分100部に対して25部添加した樹脂組成物▲2▼、樹脂固形分100部に対して50部添加した樹脂組成物▲3▼を作成した。
メチルエチルケトン溶液105.1gを加えペントコンディッショナーで攪拌することにより光触媒が均一に分散したワニスを得た。
【0039】
(樹脂シートの作成)
前記のワニスを25μmポリエチレエンテレフタレート(PET)フィルム上に、乾燥後の厚みが50μmとなるようにバーコーターを用いて数回塗布し、160℃で10分間乾燥させて樹脂シートを得た。
【0040】
実施例2
(多層プリント配線板の製造)
本発明における多層プリント配線板の製造方法について図面に基づき説明する。
図1に示すように0.4mm厚のビスマレイミドトリアジン樹脂積層板4からなる内層パネルの18μm厚の導体回路パターン3を黒化処理した後、前記樹脂シートを120℃でラミネートした後PETフィルム1を取り除き、図2に示すように導体回路パターン3上に約30μm厚さの樹脂組成物の層2を有するパネルを形成した。180℃、60分の加熱を行い樹脂を硬化させた。
【0041】
次に、上記パネルを炭酸ガスレーザー加工により直径70μmのブラインドバイアホール6を形成し、樹脂表面をナノメーター粒径の酸化アルミを介してバフ水洗研磨を行った後、酸化アルミを完全に除去した(図3)。
【0042】
以下、図4に示すように、樹脂組成物の層表面に紫外線を1J/cm2照射した後、水酸化ナトリウム50g/リットルおよびポリオキシエチレンドデシルジエーテル0.2g/リットルからなるアルカリ溶液を用いて50℃、5分間揺動浸漬した。水洗後、37%塩酸150ミリリットル/リットルの液に30秒浸漬した後、キャタリスト液(奥野製薬(株)製A−30)75ミリリットル/リットルおよび37%塩酸150ミリリットル/リットルからなる液に5分間浸漬した。引き続き、37%塩酸75ミリリットル/リットルの液に3分間揺動浸漬した後、化学ニッケルめっき液(奥野製薬(株)製)35℃で5分間めっきを行った。
【0043】
ここで、テープ試験をした結果、樹脂組成物▲1▼ではわずかにニッケルがはがれた。170℃30分のエージングを実施するとテープ試験によるはがれは全くなくなった。
【0044】
次に、硫酸銅電気めっきにより30μmの銅を厚付けした後、200℃30分のべーキングを行った(図5)。引き続き、エッチングレジストを介して不要な銅箔をエッチング除去してビルドアッププリント配線板を作成した(図6)。ピール強度、はんだ耐熱性を測定するため電気銅めっきを30μmとしたが、高密度配線を形成するためには電気銅めっき厚を薄く調整することができる。
【0045】
次に、上記のように作成したプリント配線板の評価を下記のように行った。JIS−C6481に従って銅箔を50mm/分の速度で引き剥して引き剥し強さを測定した。25mm角パターンのテストピース10個について、浴温260℃の溶融はんだ浴に銅箔面を下にして浮かべ、銅箔が膨れるまでの時間を測定した。そして、上記のように作成したビルドアッププリント配線板のめっき金属を全面エッチング除去した後の樹脂表面の表面粗さを測定した。これらの測定結果を表1に示す。
表1より、明らかに二酸化チタンを添加する密着性が高くなることがわかる。また、ベーキングの効果が大きいこともわかる。
【0046】
【表1】
【0047】
【発明の効果】
本発明は、有害な酸化剤を使用せず、紫外線を照射し紫外線による反応分解物を除去するだけで強いめっき密着性が得られ、めっき金属と樹脂の界面の平滑性があるために高密度配線が可能であり、かつ高周波伝送特性に優れたプリント配線板を製造することができるもので、工業上の利用価値が大きいものである。
【図面の簡単な説明】
【図1】本発明の実施例である多層プリント配線板の製造過程における、表面に導体回路パターン3を有する内層パネルに樹脂シートをラミネートすね前の概略断面図である。
【図2】同製造過程における、内層パネルに樹脂シートををラミネートして形成した後の構成を示した概略断面図である。
【図3】同製造過程における、ブラインドバイアホール6を形成した後の上記内層パネルを示した概略断面図である。
【図4】同製造過程における、樹脂組成物の層の表面を紫外線照射した後、反応分解物を除去した状態を示す概略断面図である。
【図5】同製造過程における、めっきを施した状態を示す概略断面図である。
【図6】同製造過程における、外層銅箔パターンをエッチング後の概略断面図である。
【符号の説明】
1 フィルム
2 樹脂組成物
3 導体回路
4 内層積層板
6 ブラインドバイアホール
7 めっき層
8 導体回路
9 めっきブラインドバイアホール[0001]
BACKGROUND OF THE INVENTION
The present invention , Resin with excellent surface smoothness that can be adhered to metal without using harmful oxidizing agent as roughening agent when performing additive plating in the manufacturing process of build-up printed wiring boards Forming a layer For build-up insulation layer formation The present invention relates to a resin composition, a resin sheet formed by forming the resin composition on a film, and a method for producing a printed wiring board using the resin composition.
[0002]
[Prior art]
The downsizing and weight reduction of electronic devices has been greatly promoted by innovations in semiconductor mounting technology such as semiconductor multi-terminal, package size reduction, and bare chip mounting. A printed wiring board on which a semiconductor package is mounted is also difficult to route with a conventional multilayer wiring board, and a built-up multilayer wiring board having a blind via hole has become essential. Furthermore, along with the increase in CPU frequency, there is a demand for shortening the wiring length of package substrates, promoting higher density wiring, and improving the accuracy of wiring shape processing to control characteristic impedance. / Necessary to process space (L / S) has arisen.
In addition, as the speed of devices increases, transmission signals tend to concentrate on the periphery of fine wiring, and if the surface roughness of the wiring is large, resistance increases and obstructs high-speed transmission. Smoothing has become necessary at the interface.
[0003]
When a printed wiring board is manufactured by processing a conventional copper-clad laminate or a resin-coated copper foil, the roughened surface of the copper foil has a surface roughness of at least several μm, resulting in variations during etching. In addition, in the case of a printed wiring board having plated through holes, etching is performed by an amount corresponding to the plating thickness in addition to the thickness of the copper foil. In addition, the etching time is long to completely etch the maximum thickness of copper. As a result, the thin copper portion is likely to be over-etched, and an L / S processing accuracy of several tens of μm or less cannot be obtained.
Therefore, in order to reduce the thickness of the copper to be etched and improve the etching accuracy, an additive method that does not use a copper-clad laminate or a resin-coated copper foil is used. However, when manufacturing a build-up printed wiring board that requires high-density wiring and via-hole connection by the semi-additive method, the surface of the resin layer is made using an oxidizing agent such as conventional chromic acid or potassium permanganate. When the roughening treatment was attempted, the adhesive strength with the plated metal could not be obtained unless unevenness of several μm was provided as the surface roughness. When the density of L / S is several μm or less with higher density, the unevenness of etching occurs due to these irregularities, so that there is a limit to the processing accuracy of wiring and circuits.
[0004]
On the other hand, as a method of forming an electroless plating film with good adhesion without using a harmful oxidizing agent such as chromic acid while maintaining the plating surface properties and the dimensional accuracy of the resin molded product, JP-A-8-253869 discloses a method of performing electroless plating after irradiating ultraviolet rays. Japanese Patent Laid-Open No. 10-88361 discloses an electroless plating method in which a surface treatment step of contacting with an alkaline solution containing a nonionic surfactant after ultraviolet irradiation is added in order to further improve electroless plating adhesion. .
However, in these methods, the surface treatment with an alkaline solution or a degreasing solution, the surface treatment with an activating solution such as a Pd-Sn colloid solution or a complexing solution, etc. performed after irradiating the resin surface with ultraviolet rays, and Sn In the surface treatment process such as acid activation treatment to be removed, when the resin surface is exposed to air, the electroless plating tends to be unprecipitated, and there is a disadvantage that the electroless plating cannot be stably performed. Further, even if the electroless plating can be performed in a good state, there is still a problem that sufficient peel strength and solder heat resistance for application to a printed wiring board cannot be obtained.
[0005]
[Problems to be solved by the invention]
The object of the present invention is to solve the above-mentioned drawbacks of the prior art, and to perform surface treatment of the resin surface without using a harmful oxidant, resulting in poor etching accuracy due to variations in surface roughness and conductor thickness. Therefore, it is an object of the present invention to provide a method that can prevent adhesion and ensure adhesion with a plated metal with a smooth resin surface.
[0006]
[Means for Solving the Problems]
The present invention relates to an organic polymer compound or a polymerizable organic compound (hereinafter collectively referred to as “organic compound”). Catalyze the decomposition reaction of resin composition by UV irradiation The present invention provides a resin composition for forming a buildup insulating layer, which is obtained by dispersing a photocatalyst and is decomposable by ultraviolet irradiation. Further, as the resin composition, a resin composition mainly comprising (A) an alkenylphenol compound, (B) a maleimide compound and (C) a photocatalyst, which is excellent as a resin composition for printed wiring boards, is provided. is there. Moreover, this invention is a resin sheet formed by forming the layer of the said resin composition on a film. In the present invention, the layer of the resin composition for forming a build-up insulating layer is irradiated with ultraviolet rays, then the reaction decomposition product on the surface is removed with an acid or alkali solution, and then a metal film is formed on the surface of the layer. It is a manufacturing method of a printed wiring board including the process to do. Furthermore, the present invention provides a printed wiring with higher adhesion, including a step of forming a metal film after electroless plating and / or electroplating, and baking after electroless plating and / or after electrolytic copper plating. It is a manufacturing method of a board.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
As the photocatalyst used in the present invention, titanium dioxide, strontium titanate, potassium niobate and the like can be used, but titanium dioxide is preferable because it is stable and highly active. The crystal structure of titanium dioxide includes tetragonal high-temperature rutile and low-temperature anatase types, and orthorhombic brookite type. As the photocatalyst, anatase titanium dioxide having high photoactivity is preferable. The particle diameter is preferably as fine as possible and the primary particle diameter is preferably O.1 μm or less.
If the primary particle size becomes large, the resin cannot be finely decomposed and it becomes difficult to obtain the adhesion strength of plating.
Examples of titanium dioxide include ST-01, ST-21, ST-41 manufactured by Ishihara Sangyo Co., Ltd., SSP-20, SSP-25 manufactured by Sakai Chemical Co., Ltd., P25, TN90 manufactured by Nippon Aerosil Co., Ltd., and titanium. STT-65C-S manufactured by Kogyo Co., Ltd. can be used. Since these are powders, secondary agglomeration usually occurs and it is necessary to disperse them to submicrons. For this method, disperser, paint conditioner, homogenizer, ball mill or the like can be used.
[0008]
As a method for using the photocatalyst, a method in which the photocatalyst is uniformly mixed or kneaded in the organic compound constituting the resin composition of the present invention, a photocatalyst is dispersed in a solution in which the organic compound is dissolved, and an object to be plated is used as a primer A method of treating and coating and curing, or a method of dispersing a photocatalyst in a solution in which the organic compound is dissolved, coating and drying in a film, laminating and curing on a substrate, a layer having a high photocatalyst content, and Various methods such as a conventional method of laminating the inner layer plate as a two-layer structure of a layer of a build-up material resin composition not containing a photocatalyst can be used.
[0009]
The organic compound constituting the resin composition of the present invention is an organic high molecular compound or a polymerizable organic compound, and the latter is an organic high molecular compound by itself or by copolymerization. These organic compounds may be used alone or in combination.
The organic compound of the present invention is a resin to be subjected to additive plating of a printed wiring board, or an organic compound before polymerization thereof, which meets the object of the present invention.
[0010]
Resin that is subject to additive plating of printed wiring boards is phenol resin, epoxy resin, polyimide resin, bismaleimide / triazine resin, methallyl resin, benzocyclobutene resin, polyphenylene ether resin, polysulfone, polyethersulfone, polyether Examples thereof include imide, polyallylsulfone, polyamideimide, polyphenylene sulfide, polyether ether kitten, and the like, or a combination thereof.
[0011]
Examples of methods for forming a metal film on the resin surface include physical vapor deposition (PVD) such as sputtering, vacuum vapor deposition, and ion plating, and dry plating using chemical vapor deposition (CVD). Plating is more economical and preferable. Examples of the electroless plating include electroless nickel-phosphorus alloy plating, electroless nickel-boron alloy plating, and electroless copper plating.
[0012]
The resin composition used in the method for producing a multilayer printed wiring board of the present invention can be used as long as it is sensitive to ultraviolet rays, but (A) an alkenylphenol compound having high heat resistance and insulating properties, (B A resin composition sensitive to ultraviolet rays comprising a maleimide compound and (C) a photocatalyst can be preferably used.
[0013]
The amount of UV irradiation is 100mJ / cm 2 The resin composition can be decomposed by the photocatalyst as described above, but preferably 300 mJ to 10 J / cm. 2 It is. When the exposure amount is increased, the working time is deteriorated and the temperature of the panel is increased.
[0014]
After UV irradiation, it is necessary to wash with acid or alkali in order to remove reaction components and oxidative decomposition products by the photocatalyst with UV light. As the acid, sulfuric acid, hydrochloric acid, nitric acid, hydrofluoric acid, phosphoric acid and the like can be used, and as the alkali, sodium hydroxide, potassium hydroxide and the like can be used.
[0015]
Further, as described in JP-A-10-88361, the resin decomposition product on the resin surface after the ultraviolet irradiation may be removed with an alkaline solution containing a nonionic surfactant having a polyoxyethylene bond. In JP-A-10-88361, polystyrene and ABS are irradiated with ultraviolet rays to obtain plating adhesion, but mainly C = C bond, C—H bond, and C—C bond are dissociated. . When the photocatalyst is used in combination, the types of chemical bonding groups that can be decomposed are increased, and the resin can be decomposed even when the ultraviolet irradiation exposure amount is small, and the exposure time can be shortened, so that workability is improved. Moreover, since the density of the chemical bond group which can be decomposed | disassembled in the surface will become small when various additives are mixed in a resin composition, surface modification can be more effectively performed together with a photocatalyst.
[0016]
The aging after electroless plating is suitably 150 to 260 ° C. for 5 to 120 minutes, and baking after electrolytic copper plating may be performed at 170 to 260 ° C. for 5 to 60 minutes.
[0017]
In the manufacture of build-up multilayer printed wiring, if a photocatalyst is mixed in the resin composition that is the build-up insulating layer, ultraviolet rays are emitted when removing the residual thin film scum in the via hole by the photovia method or laser via processing. Irradiation decomposes organic components in the scum and facilitates desmear treatment.
[0018]
Among the organic compounds used in the present invention, organic polymer compounds (hereinafter simply referred to as “polymer compounds”) are preferable. The resin composition of the present invention is a resin composition that can be decomposed by ultraviolet irradiation. For the purpose of the present invention, the decomposition is sufficient in the vicinity of the surface of the resin composition, that is, about submicron from the surface.
[0019]
Particularly preferred among the resin compositions of the present invention are those in which all or the main component of the organic compound is (A) an alkenylphenol compound (hereinafter referred to as “component (A)”) and (B) a maleimide compound (hereinafter “ It is a resin composition composed of an organic compound composed mainly of these two components, particularly preferably a polymer compound.
[0020]
Here, the component (A) is not particularly limited as long as it is a phenol derivative having an alkenyl group.
Specific examples include 2,2-bis [4-hydroxy-3- (2-methyl-2-propenyl) phenyl] propane and 2,2-bis [4-hydroxy-3- (2-propenyl) phenyl] propane. 2,2-bis [4-hydroxy-3- (2-methyl-2-propenyl) phenyl] pentane, 2,2-bis [4-hydroxy-3- (2-propenyl) phenyl] pentane, 1,1 , 1,3,3,3-hexafluoro-2,2-bis [4-hydroxy-3- (2-methyl-2-propenyl) phenyl] propane, 1,1,1,3,3,3-hexa Fluoro-2,2-bis [4-hydroxy-3- (2-propenyl) phenyl] propane, 1,1,1,3,3,3-hexachloro-2,2-bis [4-hydroxy-3- ( 2-methyl-2-propenyl) Enyl] propane, 1,1,1,3,3,3-hexachloro-2,2-bis [4-hydroxy-3- (2-propenyl) phenyl] propane, bis [4-hydroxy-3- (2- Methyl-2-propenyl) phenyl] methane, bis [4-hydroxy-3- (2-propenyl) phenyl] methane, 1,1-bis [4-hydroxy-3- (2-methyl-2-propenyl) phenyl] Ethane, 1,1-bis [4-hydroxy-3- (2-propenyl) phenyl] ethane, 4,4′-dihydroxy-3,3′-bis (2-methyl-2-propenyl) biphenyl, 4,4 '-Dihydroxy-3,3'-bis (2-propenyl) biphenyl, bis [4-hydroxy-3- (2-methyl-2-propenyl) phenyl] thioether, bis [4-hydroxy-3- 2-propenyl) phenyl] thioether, bis [4-hydroxy-3- (2-methyl-2-propenyl) phenyl] ether, bis [4-hydroxy-3- (2-propenyl) phenyl] ether Ter, bis [4-hydroxy-3- (2-methyl-2-propenyl) phenyl] sulfone, bis [4-hydroxy-3- (2-propenyl) phenyl] sulfone, bis [4-hydroxy-3- (2 Examples include alkenylphenol compounds having two alkenyl groups such as -methyl-2-propenyl) phenyl] cyclohexane.
Also, 2-allylphenol, 4-allylphenol, 2-allyl-4-methylphenol, 2-allyl-4-methoxyphenol, 2-allyl-6-methylphenol, 2-methallylphenol, 4-methallylphenol 2-methallyl-4-methylphenol, 2-methallyl-4-methoxyphenol, 2-methallyl-6-methylphenol, 2-crotylphenol, and the like can also be used.
Furthermore, 1,1,1-tris (2-alkenyl-4-hydroxyphenyl) methane, 1,1,1-tris (2-alkenyl-4-hydroxyphenyl) ethane, 4- {4- [1,1- And alkenylphenol compounds derived from trihydric or higher phenols such as bis (2-alkenyl-4-hydroxyphenyl) ethyl]}-α, α-dimethylbenzylphenol.
[0021]
These alkenylphenol compounds may be used in combination of two or more.
Preferred alkenylphenol compounds are alkenylphenol compounds having a 2-methyl-2-propenyl group (methallyl group) in terms of reactivity and cured product electrical properties, more preferably alkenylphenol compounds having two such groups. It is.
[0022]
Examples of the maleimide compound of component (B) include N-substituted maleimide compounds and N, N-substituted maleimide compounds.
Specific examples of N-substituted maleimide compounds and N, N-substituted maleimide compounds include N-methylmaleimide, N-ethylmaleimide, N-propylmaleimide, N-hexylmaleimide, N-octylmaleimide, N-cyclohexylmaleimide, N -Phenylmaleimide, Np-tolylmaleimide, Nm-tolylmaleimide, N-o-tolylmaleimide, N-α-naphthylmaleimide, N-benzylmaleimide, Np-xylylmaleimide, Nm-k Silylmaleimide, N-o-xylylmaleimide, N, N′-ethylenedimaleimide, N, N′-hexamethylenedimaleimide, N, N′-hexamethylenedimaleimide, N, N′-dodecamethylenedimaleimide, N, N′-m-phenylene dimaleimide, N, N′-p-phenylene dimale N, N ′-(oxydi-p-phenylene) dimaleimide, N, N ′-(methylenedi-p-phenylene) dimaleimide, N, N′-2,4-tolylenemaleimide, N, N′-2, 6-tolylene dimaleimide, N, N′-m-xylylene dimaleimide, N, N′-p-xylylene dimaleimide, N, N′-oxydipropylene dimaleimide, ethylenedioxy-bis-N-propyl maleimide, Oxy-bis-N-ethylmaleimide, N, N′-p, p′-diphenylsulfone bismaleimide, N, N′-p, p′-diphenyl terbismaleimide, N, N′-dicyclohexylmethane bismaleimide N, N ′-(3,3-dichloro-p, p′-bisphenylene) bismaleimide, 1,1,1,3,3,3-hexafluoro-2,2-bis (4-male Midofeniru) propane, 1,1,1,3,3,3 over hexafluoro-2,2-bis [4- (4-maleimide phenoxy) phenyl] propane.
[0023]
Furthermore, two or more of tri- or tetra-substituted maleimide compounds, poly (phenylmethylene) polymaleimide compounds, or these various maleimide compounds can be used in combination as appropriate.
Preferred maleimide compounds include N, N ′-(methylenedi-p-phenylene) dimaleimide and N, N′-p-phenylenedimaleimide for reasons of improved heat resistance and solubility in organic solvents.
[0024]
Here, the preferable mixture ratio of the component (A) and the component (B) is 20 to 80 parts by weight of the component (A), more preferably 40 to 60 parts by weight, and 80 to 20 parts by weight of the component (B). Preferably it is 60-40 weight part.
When the component (A) exceeds 80 parts by weight, the heat resistance of the resulting cured product tends to be lowered, and when it is less than 20 parts by weight, the cured product tends to become brittle.
[0025]
When the resin composition of the present invention is varnished, the resin composition may be dissolved or dispersed as it is in an organic solvent. However, for the component (A) and the component (B), the solid content concentration of the varnish is increased. Moreover, in order to make it difficult to cause precipitation in the varnish, it is preferable to pre-polymerize by partially reacting in advance. Specifically, it is preferable to react the component (A) and the component (B) until the reaction rate calculated from gel permeation chromatography reaches 30 to 90%.
[0026]
The photocatalyst is preferably 1 to 100 parts by weight with respect to 100 parts by weight of the organic compound. When the amount is less than 1 part by weight, the polymer substance is hardly decomposed by ultraviolet rays, and when the amount exceeds 100 parts by weight, it is difficult to perform blind via processing on the laser when processing the build-up wiring board. More preferably, it is 10-60 weight part.
[0027]
When the resin composition of the present invention is dissolved or dispersed in an organic solvent, a varnish is obtained. Examples of the organic solvent include ketones such as methyl ethyl ketone, isobutyl methyl ketone and cyclohexanone, esters such as ethyl acetate and butyl acetate, hydrocarbons such as toluene and xylene, halogens such as methylene chloride and 1,1,1-trichloroethane. Aprotic organic solvents such as hydrocarbons, ethers such as dioxane and tetrahydrofuran, ether esters such as cellosolve acetate, N, N-dimethylformamide, N, N-dimethylacetamide, dimethyl sulfoxide and sulfolane are used. There is no particular limitation. These organic solvents can be used alone or in combination of two or more.
The amount of organic solvent used varies depending on the application and the type of organic solvent, and it is difficult to define clearly, but it is 10 to 95% by weight, more preferably 20 to 90% by weight, based on the total weight of the varnish. It is appropriate to use. When the organic solvent to be used is less than 10% by weight, the varnish viscosity is increased, the workability during use is lowered, and the storage stability is lowered. On the other hand, when the organic solvent to be used is used in an amount of more than 95% by weight, the varnish viscosity is excessively lowered and it becomes difficult to apply uniformly.
[0028]
In addition to the organic compound and the photocatalyst, the resin composition of the present invention or the varnish obtained therefrom includes, if necessary, acrylonitrile-butadiene rubber or hydrogenated acrylonitrile-butadiene rubber, flexible fine particles, radical polymerization initiator, flame retardant. Other resins, inorganic fillers, thixotropic agents, antifoaming agents, leveling agents, silane coupling agents, etc. may be added.
[0029]
Preferred radical polymerization initiators include cumyl peroxide, tert-butyl peroxide, acetyl peroxide, propionyl peroxide, benzoyl peroxide, 2-chlorobenzoyl peroxide, lauroyl peroxide, diisopropyl peroxycarbonate, tetralin hydroperoxide and An organic peroxide such as 2,5-dimethyl-2,5-di (tert-butylperoxy) hexane may be mentioned.
[0030]
Examples of the flame retardant include tetrabromobisphenol A, a di (meth) acrylate reaction product of tetrabromobisphenol A, tetrabromobisphenol A diallyl ether, hexabromobenzene, tris (2,3-dibromopropyl) isocyanurate, 2,2 -Organic flame retardants such as bis (4-hydroxyethoxy-3,5-dibromophenyl) phenylpropane, decabromodiphenyl ether, brominated polycarbonate, antimony oxide, aluminum hydroxide, magnesium hydroxide, zirconium hydroxide, tin oxide, etc. Examples include inorganic flame retardants, aromatic phosphate ester flame retardants such as triphenyl phosphate, and trixylenyl phosphate.
These flame retardants can be used alone or in combination of two or more.
Preferred flame retardants include brominated polycarbonate because of its high decomposition temperature and difficulty in precipitation when added to a varnish.
[0031]
The silane coupling agent is not particularly limited as long as it is an organic compound that is a component of the resin composition of the present invention or a compound having an organic group that reacts with a photocatalyst. Specifically, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropyltriethoxysilane, γ-glycidoxypropylmethyldimethoxysilane, γ-glycidoxypropylmethyldiethoxysilane, β-glycidoxy Cyethyltrimethoxysilane, β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, β- (3,4-epoxycyclohexyl) ethyltriethoxysilane, β- (3,4-epoxycyclohexyl) propyltrimethoxysilane , Vinyltrimethoxysilane, vinyltriethoxysilane, γ-aminopropyltriethoxysilane, γ-aminopropyltrimethoxysilane, N- (β-aminoethyl) -γ-aminopropyltriethoxysilane, γ-mercaptopropyltrimethoxy Silane, γ-me And tacryloxypropyltrimethoxysilane, γ-acryloxypropyltrimethoxysilane, and N- [β- (N-vinylbenzylamino) ethyl] -γ-aminopropyltrimethoxysilane hydrochloride.
[0032]
These silane coupling agents can be used alone or in combination of two or more as desired.
Preferred silane coupling agents include epoxy group-containing silane cups such as γ-glycidoxypropyltrimethoxysilane and β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane for reasons such as improved reactivity and adhesion. Examples include a ring agent and an amino group-containing silane coupling agent such as γ-aminopropyltriethoxysilane, γ-aminopropyltrimethoxysilane, and N- (β-aminoethyl) -γ-aminopropyltriethoxysilane.
[0033]
The inorganic filler is added for the purpose of, for example, improving the dimensional accuracy of the cured product or controlling the linear expansion coefficient. Representative examples of inorganic fillers that can be used include silica powder, zirconium silicate, alumina, calcium carbonate, quartz glass powder, clay, talc, barium sulfate, zirconium oxide and the like. These inorganic fillers can be used alone or in admixture of two or more. Moreover, although the addition amount of these inorganic fillers is determined according to the intended purpose, generally it is suitable to set it as the range of 5-75 volume% with respect to the total capacity | capacitance of a resin composition.
[0034]
The impregnation of the resin composition or varnish of the present invention into a woven or non-woven fabric and the coating onto a resin film or a metal foil can be carried out by a usual method such as dipping, spraying, gravure coating or roll coating. The thickness of application is usually 1 to 200 μm, preferably 10 to 100 μm. In the case of varnish, the solvent is removed by drying after coating. At this time, a preferable drying temperature is room temperature to 250 ° C. (more preferably 100 to 200 ° C.), and a preferable drying time is several minutes to 4 hours (more preferably several minutes to 0.5 hours).
[0035]
When the resin composition or varnish of the present invention is cured, the composition or the composition after removal of the organic solvent may be heated, for example, in a thermostatic bath at 100 to 300 ° C. for 10 minutes to 5 hours. As another curing method, ultraviolet curing, electron beam curing, or the like can be used.
[0036]
When a resin sheet is formed by applying and drying the resin composition of the present invention on a film of polyethylene terephthalate, etc., the resin composition side of the sheet is pressure-bonded or thermo-compressed to the surface of a printed wiring board panel or substrate. By removing, a layer of the resin composition of the present invention can be easily formed on the panel or substrate.
In addition, a resin sheet formed by forming a layer of the resin composition of the present invention on the film and forming a resin layer having fluidity when heated thereon is heated on the surface of a panel or substrate for a printed wiring board. When the pressure bonding is performed, a resin exhibiting fluidity at the time of heating flows into the concave portion of the surface of the panel or the substrate, so that the adhesion with the pressure-bonded layer is improved and the surface becomes even more preferable.
[0037]
[Action]
The printed wiring board obtained by using the resin composition of the present invention has excellent adhesion to a metal regardless of the fact that the surface smoothness is maintained. The reason for this is not clear, but is presumed as follows. When the photocatalyst is irradiated with ultraviolet rays, electrons in the valence band are excited, and two carriers of holes and electrons are generated in the valence band. These holes have a strong oxidizing action and can decompose organic substances. On the other hand, electrons can cause a reduction reaction. The present invention utilizes the strong oxidizing power of a photocatalyst that is greater than the binding energy of C—C, C—H, C—N, C—O, O—H, N—H, etc. present in the molecules constituting the organic matter. Then, since the polymer substance on the resin surface is decomposed to generate a functional group, adhesion between the functional group and the metal can be obtained.
[0038]
【Example】
Hereinafter, the present invention will be described in detail with reference to examples.
Example 1
(Adjustment of resin composition)
In a 1 liter three-necked flask equipped with a condenser, a stirrer and a thermometer, 100.6 g of bis (4-maleimidophenyl) methane, 2,2-bis [4-hydroxy-3- (2-methyl-2-propenyl) phenyl 75.5 g of propane and 58.9 g of N, N-dimethylacetamide were charged and reacted at 130 ° C. for 4 hours. As a result of gel permeation chromatography analysis (hereinafter referred to as “GPC analysis”) of the reaction product, unreacted bis (4-maleimidophenyl) methane and 2,2-bis [4-hydroxy-3- (2 The total amount with -methyl-2-propenyl) phenyl] propane was 47.2%.
After cooling the reaction solution to 40 ° C., 67.0 g of methyl ethyl ketone and 12.8 g of dicumyl peroxide were blended and stirred until uniform. Thereafter, a resin composition (1) to which titanium dioxide (ST-01 manufactured by Ishihara Sangyo Co., Ltd.) is not added, a resin composition (2) added to 25 parts with respect to 100 parts of resin solids, and 100 parts of resin solids. On the other hand, a resin composition (3) added with 50 parts was prepared.
A varnish in which the photocatalyst was uniformly dispersed was obtained by adding 105.1 g of methyl ethyl ketone solution and stirring with a pent conditioner.
[0039]
(Create resin sheet)
The varnish was applied on a 25 μm polyethylene terephthalate (PET) film several times using a bar coater so that the thickness after drying was 50 μm, and dried at 160 ° C. for 10 minutes to obtain a resin sheet.
[0040]
Example 2
(Manufacture of multilayer printed wiring boards)
The manufacturing method of the multilayer printed wiring board in this invention is demonstrated based on drawing.
As shown in FIG. 1, after blackening the 18 μm-thick
[0041]
Next, a blind via
[0042]
Hereinafter, as shown in FIG. 4, ultraviolet rays are applied to the layer surface of the resin composition at 1 J / cm. 2 After the irradiation, rocking immersion was performed at 50 ° C. for 5 minutes using an alkaline solution composed of 50 g / liter of sodium hydroxide and 0.2 g / liter of polyoxyethylene dodecyl diether. After washing with water, the sample was immersed in a solution of 150 ml / liter of 37% hydrochloric acid for 30 seconds, and then added to a solution comprising 75 ml / liter of catalyst liquid (A-30 manufactured by Okuno Pharmaceutical Co., Ltd.) and 150 ml / liter of 37% hydrochloric acid. Immerse for a minute. Subsequently, after dipping in a solution of 37% hydrochloric acid 75 ml / liter for 3 minutes, plating was performed at 35 ° C. for 5 minutes at a chemical nickel plating solution (Okuno Pharmaceutical Co., Ltd.).
[0043]
Here, as a result of the tape test, nickel was slightly peeled off in the resin composition (1). When aging was performed at 170 ° C. for 30 minutes, no peeling occurred due to the tape test.
[0044]
Next, after 30 μm of copper was thickened by copper sulfate electroplating, baking was performed at 200 ° C. for 30 minutes (FIG. 5). Subsequently, unnecessary copper foil was removed by etching through an etching resist to produce a build-up printed wiring board (FIG. 6). In order to measure peel strength and solder heat resistance, the electrolytic copper plating is set to 30 μm. However, in order to form a high-density wiring, the electrolytic copper plating thickness can be adjusted to be thin.
[0045]
Next, the printed wiring board prepared as described above was evaluated as follows. The copper foil was peeled off at a speed of 50 mm / min in accordance with JIS-C6481, and the peel strength was measured. Ten test pieces having a 25 mm square pattern were floated on a molten solder bath having a bath temperature of 260 ° C. with the copper foil face down, and the time until the copper foil expanded was measured. And the surface roughness of the resin surface after carrying out the etching removal of the plating metal of the buildup printed wiring board produced as mentioned above was measured. These measurement results are shown in Table 1.
Table 1 clearly shows that the adhesion to which titanium dioxide is added is enhanced. It can also be seen that the baking effect is great.
[0046]
[Table 1]
[0047]
【The invention's effect】
The present invention does not use a harmful oxidant, and can be obtained by irradiating ultraviolet rays and removing reaction decomposition products caused by ultraviolet rays, thereby obtaining strong plating adhesion and smoothness at the interface between the plating metal and the resin. A printed wiring board that can be wired and has excellent high-frequency transmission characteristics can be manufactured, and has great industrial utility value.
[Brief description of the drawings]
FIG. 1 is a schematic sectional view before laminating a resin sheet on an inner panel having a
FIG. 2 is a schematic cross-sectional view showing a configuration after a resin sheet is laminated on an inner panel in the same manufacturing process.
FIG. 3 is a schematic cross-sectional view showing the inner layer panel after forming the blind via
FIG. 4 is a schematic cross-sectional view showing a state in which a reaction decomposition product is removed after the surface of the resin composition layer is irradiated with ultraviolet rays in the same production process.
FIG. 5 is a schematic cross-sectional view showing a state in which plating is performed in the manufacturing process.
FIG. 6 is a schematic cross-sectional view after etching the outer layer copper foil pattern in the same manufacturing process.
[Explanation of symbols]
1 film
2 Resin composition
3 Conductor circuit
4 Inner layer laminate
6 Blind Viahole
7 Plating layer
8 Conductor circuit
9 Plating blind via hole
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001395484A JP3855769B2 (en) | 2001-12-26 | 2001-12-26 | Build-up insulating layer forming resin composition, resin sheet, and printed wiring board manufacturing method using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001395484A JP3855769B2 (en) | 2001-12-26 | 2001-12-26 | Build-up insulating layer forming resin composition, resin sheet, and printed wiring board manufacturing method using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003192905A JP2003192905A (en) | 2003-07-09 |
| JP3855769B2 true JP3855769B2 (en) | 2006-12-13 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001395484A Expired - Lifetime JP3855769B2 (en) | 2001-12-26 | 2001-12-26 | Build-up insulating layer forming resin composition, resin sheet, and printed wiring board manufacturing method using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3855769B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI867910B (en) * | 2023-12-22 | 2024-12-21 | 財團法人工業技術研究院 | Photosensitive dry film, composition solution for forming thereof, and method for electroless plating metal layer |
-
2001
- 2001-12-26 JP JP2001395484A patent/JP3855769B2/en not_active Expired - Lifetime
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| JP2003192905A (en) | 2003-07-09 |
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