JP4359028B2 - Peeling suppression device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to exfoliation charge compensation device, and more particularly in such when moving from the mounting table plate member as a glass substrate or a semiconductor wafer or the like of the liquid crystal panel, that the static electricity is charged by the separation charger in the plate-like member it relates exfoliation charge compensation device you suppressed.
[0002]
[Prior art]
When the two objects in contact with each other leave, a part of the charge carrier once moved at the contact interface returns to the original state, and the part remaining on the surface becomes static. Charge transfer at the time of contact is a universal phenomenon that occurs not only with insulators but also between metals that are conductors. Therefore, even if a metal is held by an insulator and contacted and separated, it is charged.
[0003]
In the manufacturing process of a liquid crystal panel and the manufacturing process of a semiconductor device, it is necessary to transport a plate-like member such as a glass substrate or a semiconductor wafer between a plurality of steps, and the plate-like member is moved from a placement part on which it is temporarily placed. At this time, peeling electrification occurs. When the plate-like member is moved only by being placed on the placement portion, the amount of static electricity due to peeling charging is small. However, in a process where static electricity is likely to occur, such as a rubbing process or a bonding process, which is a process of manufacturing a liquid crystal panel, when the plate-shaped member is moved from the mounting portion, the amount of charge due to peeling charging increases. It was necessary to provide a static eliminator such as an ionizer.
[0004]
[Problems to be solved by the invention]
However, the antistatic measures for removing static electricity charged by the peeling charge with a static eliminator such as an ionizer remove or neutralize the static electricity charged by the peeling charge, and do not prevent or suppress the peeling charge. The charge amount of the peeling charge increases as the peeling speed increases. Therefore, in order to reduce the amount of charge, it is necessary to slow down the peeling speed, that is, the speed at which the plate-like member is lifted from the placing portion, and the tact time becomes long and the productivity decreases.
[0005]
The present invention was made in view of the above problems, purpose of their offer exfoliation charge compensation device that can be suppressed peeling electrification when moving from placement portion plate member There is to do.
[0006]
[Means for Solving the Problems]
To achieve the previous SL object, in the invention according to claim 1, temporarily it can be placed placing portion the plate-shaped member, a plurality of vibration, which is formed in a rectangular flat plate elongated made conductor The plate is configured by an object levitation device that excites the plate with an excitation unit and levitates the plate-like member from the surface of the diaphragm by the radiation pressure of sound waves from the diaphragm, and the diaphragm is grounded, and the plurality of diaphragms Is composed of diaphragms on both sides and a diaphragm arranged between the diaphragms on both sides and vibrating at a predetermined position, and the diaphragms on both sides of the plurality of diaphragms are moved by the diaphragms on both sides The diaphragms on both sides can be moved up and down and tilted by the moving means, and the moving means moves the plurality of plate-like members placed on the plurality of diaphragms. When floating from the surface of the diaphragm of the plate In response, the actuators provided in the moving means are driven, so that the diaphragms on both sides are separated from the surface of the plurality of diaphragms facing the plate member side and the plurality of plate members. The diaphragm is moved so as to maintain a constant distance from the surface facing the diaphragm .
[0009]
In this invention, when moving a plate-shaped member from a mounting part, an object levitation apparatus is operated and the diaphragm made from a conductor is excited. Then, the plate-like member floats in a state of maintaining a certain gap from the surface of the diaphragm by the radiation pressure of the sound wave from the diaphragm. As a result, peeling electrification is suppressed. Moreover, since the mounting portion is made of a conductor and grounded, it is easy to suppress the generation of static electricity.
[0011]
Further , the diaphragms on both sides are supported by the moving means so as to be movable up and down and can be tilted, and the actuators provided on the moving means are driven to keep the diaphragms on both sides constant distance from the floating plate-like member. Therefore, even if the plate-like member is easily bent, the gap between the plate-like member and the plurality of diaphragms is kept constant, and peeling charging is suppressed .
[0012]
DETAILED DESCRIPTION OF THE INVENTION
( Reference example )
Hereinafter, reference examples will be described with reference to FIGS. 1 (a) shows a partially omitted schematic perspective view of a peeling antistatic device, (b) is to indicate a part omitted schematic side view.
[0013]
As shown in FIG. 1A, the peeling antistatic device 11 includes an object levitation device 13 that functions as a mounting portion on which a glass substrate 12 (shown by a chain line) as a plate-like member can be temporarily mounted. Yes. The object levitation device 13 is provided on a support plate 14 that is disposed horizontally.
[0014]
A vibrator 15 constituting the object levitation device 13 is fixed to the support plate 14, and the vibrator 15 is connected to a conductor diaphragm 17 via a horn 16. A plurality of diaphragms 17 (two in this reference example ) are arranged in parallel, and each diaphragm 17 is formed in a long rectangular plate shape narrower than the width of the glass substrate 12, and supports or floats the glass substrate 12 together. It can be held. Each diaphragm 17 is grounded.
[0015]
The diaphragm 17 is fixed to the horn 16 excited by the vibrator 15 at both ends. The horn 16 is fastened to the diaphragm 17 by a screw 18 at its tip. The horn 16 is formed in a flat and substantially rectangular parallelepiped shape, and a truncated cone cone 16a is integrally fixed to the lower surface of the horn 16 and is attached to the diaphragm 17 in a state orthogonal to the longitudinal direction in the vicinity of the longitudinal end portion thereof. It has been. The cone 16 a is fixed to the vibrator 15 on the surface opposite to the surface fixed to the horn 16. The front end surface of the horn 16 is formed on a plane orthogonal to the axial direction of the vibrator 15, and the horn 16 and the central axis of the vibrator 15 are arranged in a state extending in the vertical direction. In FIGS. 1A and 1B, the horn 16, the cone 16a, and the vibrator 15 are drawn ignoring the size ratio.
[0016]
A so-called Langevin type vibrator is used as the vibrator 15 and includes a pair of ring-shaped piezo elements 19a and 19b as shown in FIG. A ring-shaped electrode plate 20 is disposed between the piezo elements 19a and 19b, and metal blocks 21a and 21b that are in contact with the surface of the piezo elements 19a and 19b on the side opposite to the side in contact with the electrode plate 20 are attached by bolts (not shown). The vibrator 15 is configured by tightening and fixing. The bolt is screwed into a screw hole (not shown) formed in the metal block 21a from the metal block 21b side. Both metal blocks 21a, 21b are in a state of being electrically connected to each other via bolts. A flange 22 is formed on the metal block 21a, and the metal block 21a is fixed to the support plate 14 at the flange 22 by bolts (not shown) in a state of being fitted in holes (not shown) formed in the support plate 14. .
[0017]
The vibrator 15 is connected to the oscillator 23. The electrode plate 20 is connected to the oscillator 23 via the wiring 24a, and the ground terminal of the oscillator 23 is connected to the metal block 21b via the wiring 24b. The horn 16, the cone 16 a, the vibrator 15, and the oscillator 23 constitute excitation means for exciting the diaphragm 17. In FIG. 1A, the illustration of the oscillator 23 connected to one of the vibrators 15 is omitted.
[0018]
Next, the operation of the apparatus configured as described above will be described.
The peeling antistatic device 11 is disposed as a mounting portion in a process where static electricity is easily generated, such as a rubbing process or a bonding process. When the rubbing process or the bonding process is performed, the driving of the excitation unit is stopped, and the glass substrate 12 is supported in a state of being in contact with the diaphragm 17.
[0019]
When the glass substrate 12 is moved from the placement portion, that is, the vibration plate 17, the excitation means is driven. That is, the oscillator 23 is driven, the vibrator 15 is excited at a predetermined resonance frequency (for example, around 20 kHz), the horn 16 is longitudinally oscillated, and the diaphragm 17 is excited via the horn 16 to bend and vibrate. A standing wave is generated. Then, as shown in FIG. 2A, the glass substrate 12 supported (held) in contact with the diaphragm 17 is transformed into the state shown in FIG. 2B by the radiation pressure of the sound wave radiated from the diaphragm 17. As shown, it floats from the surface of the diaphragm 17. The levitation distance is, for example, 100 to 300 μm, and in FIG. 2B, the distance between the glass substrate 12 and the diaphragm 17 is exaggerated.
[0020]
When two objects that are in contact with each other are separated, peeling electrification generally occurs. Also in the case of the glass substrate 12, if the glass substrate 12 is manually held by one end and separated from the diaphragm 17 (peeling), a large charge is charged in the glass substrate 12. On the other hand, when the object levitation device 13 is operated and the glass substrate 12 is peeled off from the diaphragm 17, the potential increases slightly, but the amount of the increase is that the diaphragm 17 holds one end of the glass substrate 12 manually. It decreases to nearly 1/10 of the case of trying to move away from it. The state is shown in the graph of FIG.
[0021]
As shown in FIG. 3, when the glass substrate 12 was simply separated from the diaphragm 17 (illustrated by a broken line), the potential increased to nearly 400 V in a short time and then decreased. On the other hand, when peeled off by ultrasonic levitation (shown by a solid line), the potential increased slightly but was saturated at a low potential. The reason for this is not clear, but in sonic levitation, the gap between the glass substrate 12 and the diaphragm 17 is kept constant, and the gap is small, so that the glass substrate 12 and the diaphragm 17 are separated as shown in FIG. It is thought to function and balance like a capacitor.
[0022]
This reference example has the following effects.
(1) When moving the plate-like member (glass substrate 12) temporarily placed from the conductive placement portion (vibrating plate 17), the vibrating plate 17 is excited to generate ultrasonic waves. The glass substrate 12 is levitated from the diaphragm 17 using the radiation pressure of sound waves. Therefore, the glass substrate 12 is in a state of maintaining a certain gap from the vibration plate 17 by the action of sound waves from the vibration plate 17, and peeling charging is suppressed.
[0023]
(2) Since the diaphragm 17 is made of a conductor, it can be easily grounded and static electricity can be easily prevented.
(3) Since the glass substrate 12 is instantaneously levitated from the diaphragm 17 by the action of ultrasonic waves, the tact time is shortened and the productivity is improved.
[0024]
(4) Since the long diaphragm 17 is used as the diaphragm 17, the number of diaphragms 17 can be reduced as compared with a configuration in which many short diaphragms are used, and each diaphragm 17 is grounded. Work becomes easy.
[0025]
(5) By using the peeling antistatic device 11 as a mounting portion in the rubbing process of the manufacturing process of the liquid crystal panel, peeling charging can be suppressed when the glass substrate 12 is moved from the mounting portion after the rubbing process.
[0026]
(Implementation form)
Next, an embodiment of the present invention will be described with reference to FIGS. In this embodiment, when the plate-like member placed on the diaphragm is levitated from the surface of the diaphragm, the distance between each diaphragm and the plate-like member is kept constant corresponding to the bending of the plate-like member. Thus, the point that the plate-like member is configured to be movable is greatly different from the reference example . The same parts as those in the reference example are denoted by the same reference numerals, and detailed description thereof is omitted.
[0027]
FIG. 5A is a schematic side view showing a support state of the vibrator 15, and FIG. 5B is a schematic plan view in which the illustration of the diaphragm 17 is omitted. FIGS. 6A to 6C are schematic diagrams for explaining the operation.
[0028]
As shown in FIGS. 6A to 6C, in this embodiment, three sets of diaphragms 17 are provided, the central diaphragm 17 is vibrated at a predetermined position, and both sides of the central diaphragm 17 are sandwiched. The diaphragm 17 provided in is provided so as to be movable so that the distance from the central diaphragm 17 and the angle formed can be adjusted. Each diaphragm 17 is grounded.
[0029]
As shown in FIGS. 5A and 5B, the vibrator 15 that supports the movable diaphragm 17 is movable along a pair of guide rails 25 fixed on the support plate 14. It is fixed to. The guide rail 25 is disposed so as to extend in a direction orthogonal to the longitudinal direction of the diaphragm 17 (perpendicular to the paper surface of FIGS. 5A and 5B), and the upper surface of the guide rail 25 is held in a floating state. It is formed so as to be bent with substantially the same curvature as that in the bent state. A hole 14 a that allows the vibrator 15 to move together with the moving body 26 is formed in a portion sandwiched between the guide rails 25 of the support plate 14. The moving body 26 includes wheels 26 a that roll on the guide rail 25. The moving body 26 is connected to a plunger 28 of a linear actuator 27 fixed on the support plate 14, and is moved along the guide rail 25 by driving the linear actuator 27. The connecting portion between the moving body 26 and the plunger 28 employs a configuration (for example, a combination of a pin and a long hole) that allows the relative movement in the vertical direction of the moving body 26 with respect to the plunger 28.
[0030]
In this embodiment, when the glass substrate 12 is levitated from the state where the glass substrate 12 is in contact with the diaphragm 17 as shown in FIG. 6A, first, each diaphragm 17 is excited and shown in FIG. 6B. As shown, the glass substrate 12 is levitated from the surface of the diaphragm 17. When the glass substrate 12 is large and thin, the glass substrate 12 is bent by its own weight, and the distance between the glass substrate 12 and the diaphragm 17 is not constant. In order to avoid this, each linear actuator 27 is immediately driven from the state of FIG. 6B, and the moving body 26 is moved to a predetermined position. Then, as shown in FIG. 6C, the vibrator 15 is moved together with the vibration plate 17 to a predetermined position where the distance from the glass substrate 12 becomes constant according to the bending of the glass substrate 12. As a result, even when the glass substrate 12 is bent, the distance (gap) between the glass substrate 12 and the vibration plate 17 can be kept constant, and peeling charging can be suppressed. In FIGS. 6A to 6C, the support plate 14, the guide rail 25, and the like are not shown.
[0031]
This embodiment has the following effects in addition to the same effects as (1) to (5) of the reference example .
(6) A part of the diaphragm 17 is configured to be movable together with the vibrator 15 so as to keep the gap with the glass substrate 12 constant corresponding to the bending of the glass substrate 12. Therefore, even when the glass substrate 12 is large and thin and easily bends, the peeling charge is satisfactorily suppressed.
[0032]
The embodiment is not limited to the above, and may be configured as follows, for example.
(Circle) the diaphragm 17 which comprises the object levitation apparatus 13 is not restricted in length, You may use a short diaphragm. However, when the glass substrate 12 having the same area is supported, the number of the long diaphragm 17 may be smaller, and the trouble of grounding the diaphragm 17 is simplified.
[0033]
When the diaphragm 17 has a large area and a small plate-like member, the diaphragm 17 itself plays a role of grounding, even if the diaphragm 17 is not necessarily grounded.
If ○ easy bending large thin glass substrate 12 as in the implementation form, instead of holding levitate the glass substrate 12 to deflect in the state of convex downward, configured to buoyant held to deflect in a state protruding upward It is good.
[0034]
○ Supporting the vibrator 15 instead of the configuration in which the moving body 26 is moved along the guide rail 25 as a configuration in which the gap between the glass substrate 12 and the diaphragm 17 is kept constant corresponding to the bending of the glass substrate 12. The supporting member to be moved can be lifted and lowered by the lifting and lowering means, and the vibrator 15 can be tilted on the supporting member. Also in this case, the gap between the glass substrate 12 and the diaphragm 17 can be adjusted to a predetermined value by combining lifting and tilting.
[0035]
O When the diaphragm 17 is grounded, the method is not limited to the method of directly connecting to the ground via wiring, and the support plate 14 or the frame of the peeling antistatic device 11 may be made of a conductor and grounded through them.
[0036]
The plate-like member is not limited to the glass substrate 12 but may be another object such as a semiconductor wafer.
The width of the horn 16 that supports the long diaphragm 17 may not be the same as the width of the diaphragm 17, and may be wider or narrower than the diaphragm 17. Is preferred. Further, when a short diaphragm or a square diaphragm is supported, the horn may be formed in a columnar shape or a truncated cone shape.
[0037]
The fixing of the diaphragm 17 to the horn 16 is not limited to fastening with screws, and an adhesive may be used, or may be fixed by brazing or welding.
The vibrator 15 is not limited to the Langevin type vibrator, and other vibrators may be used.
[0038]
The invention (technical idea) grasped from the reference examples and embodiments will be described below.
(1) The diaphragm is formed long.
[0039]
(2) pre-Symbol plate member is a glass substrate.
(3) pre-Symbol vibrator for supporting the diaphragm, is tiltably supported on a support member which can be raised and lowered lifting means, by combining the tilt of lift and vibrator support members, the plate-like member and the diaphragm The gap can be adjusted to a predetermined value.
[0040]
(4) the use of stripping charge compensation device as a mounting portion, after the rubbing treatment on the glass substrate, a rubbing treatment method of moving from the mounting portion by levitate the glass substrate by sound waves.
[0041]
【The invention's effect】
As described above in detail, according to the invention described in claim 1 , peeling electrification can be suppressed when the plate-like member is moved from the mounting portion.
[Brief description of the drawings]
FIG. 1A is a schematic perspective view of a peeling charge suppressing device of a reference example , and FIG.
2A is a schematic diagram of a state in which a glass substrate is placed on a diaphragm, and FIG. 2B is a schematic diagram of a state in which the glass substrate is levitated.
FIG. 3 is a graph showing the relationship between time and potential when peeling a glass substrate.
FIG. 4 is a schematic diagram for explaining the operation.
5 (a) is a fragmentary schematic side view of a form of implementation, (b) is a fragmentary schematic plan view.
FIGS. 6A to 6C are schematic side views illustrating the same operation.

Claims (1)

The mounting portion on which the plate-like member can be temporarily placed is excited by a plurality of diaphragms made of a conductor and formed in a long rectangular flat plate shape by an excitation means, and the above-described portions are obtained by radiating pressure of sound waves from the diaphragm. A plate-like member is configured with an object levitating device that levitates from the surface of the diaphragm, and the diaphragm is grounded.
The plurality of diaphragms are configured by diaphragms on both sides and diaphragms disposed between the diaphragms on both sides and vibrating at a predetermined position, and the diaphragms on both sides of the plurality of diaphragms Supported by a moving means that enables movement of the diaphragm,
The diaphragms on both sides can be moved up and down and tilted by the moving means, and the moving means floats the plate-like member placed on the plurality of diaphragms from the surface of the plurality of diaphragms. The actuators provided in the moving means are driven in response to the bending of the plate-like member, so that the diaphragms on both sides are made to face the plate-like member side of the plurality of diaphragms. A peeling electrification suppressing device that moves the plate-like member so as to keep a constant distance from a surface facing the plurality of diaphragms .

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