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JP4552468B2 - Whisker inspection method for tin plating film - Google Patents

Whisker inspection method for tin plating film Download PDF

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JP4552468B2
JP4552468B2 JP2004070428A JP2004070428A JP4552468B2 JP 4552468 B2 JP4552468 B2 JP 4552468B2 JP 2004070428 A JP2004070428 A JP 2004070428A JP 2004070428 A JP2004070428 A JP 2004070428A JP 4552468 B2 JP4552468 B2 JP 4552468B2
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plating film
tin plating
whisker
hours
tin
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JP2005256103A (en
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久裕 田中
茂樹 緒形
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Panasonic Corp
Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Description

本発明は、検査に長期間を要する錫ウイスカを短期間で行うことができる錫めっき皮膜のウイスカ検査方法に関するものである。   The present invention relates to a whisker inspection method for a tin plating film, which can perform tin whisker that requires a long time for inspection in a short period of time.

錫めっきは、装飾品、電子部品、構造部品などの金属表面処理方法として、コストが安く、耐食性、外観、はんだ付け性に優れているために一般的に用いられている。ところが、錫めっきの表面にはウイスカと呼ばれる錫の単結晶からなる針状結晶が発生することが知られている。このウイスカは通常直径1〜2μm、長さは数μm〜数mmに達し、光沢剤を添加した光沢錫めっき皮膜に特に発生しやすいものであり、電子部品の場合にはウイスカが発生・成長すると、回路中や、端子間でショートが発生したり、ノイズ発生の原因となっていた。しかも、近年の電子部品は小型化、高密度化、微弱電流化の傾向にあり、ウイスカが発生すると障害が起こりやすくなっている。   Tin plating is generally used as a metal surface treatment method for decorative articles, electronic parts, structural parts, etc. because of its low cost and excellent corrosion resistance, appearance, and solderability. However, it is known that needle-like crystals made of a single crystal of tin called whiskers are generated on the surface of tin plating. This whisker usually has a diameter of 1 to 2 μm and a length of several μm to several mm, and is particularly likely to occur in a bright tin plating film to which a brightening agent has been added. In the circuit and between the terminals, a short circuit occurred, causing noise. Moreover, recent electronic components tend to be smaller, higher density, and weaker current, and when a whisker is generated, a failure is likely to occur.

解決しようとする問題点は、錫めっきを施した電子部品などの信頼性を確保するためにウイスカの発生・成長状態を検査するには、従来は半年から長い場合は2年間の非常に長い時間がかかる点である。ウイスカを防止する方法の報告は種々なされているが、ウイスカを早く成長させて効率良く研究・検査する方法の報告はなされていない。
特開昭57−126992号公報 特開昭62−020895号公報 特開平01−259195号公報 特開平07−300696号公報 特開2003−163135号公報
The problem to be solved is that, in order to inspect the occurrence and growth state of whiskers in order to ensure the reliability of tin-plated electronic parts, etc., it is conventionally a very long time of 2 years from 6 months This is the point. There have been various reports on methods for preventing whiskers, but no reports have been made on methods for efficient research and inspection by growing whiskers quickly.
JP 57-126992 A Japanese Patent Laid-Open No. 62-020895 JP-A-01-259195 Japanese Patent Application Laid-Open No. 07-300696 JP 2003-163135 A

本発明は、錫めっき皮膜のウイスカ検査方法に関し、錫めっき皮膜が形成された銅または銅合金基材に超音波振動を与えた後、保存温度が30〜60℃、保存湿度が90%RHの高湿度環境に基材を置くことにより、ウイスカの成長する時間を大幅に短縮するウイスカ検査方法を提供することを主要な特徴とする。 The present invention relates to a whisker inspection method for a tin-plated film. After ultrasonic vibration is applied to a copper or copper alloy substrate on which a tin-plated film is formed, the storage temperature is 30 to 60 ° C. and the storage humidity is 90% RH. The main feature is to provide a whisker inspection method that significantly shortens the time for whisker growth by placing the substrate in a high humidity environment .

本発明のウイスカ検査方法は、めっき皮膜のウイスカ成長を短期間で行えるため、何回も検査を繰り返して信頼性の高いめっき皮膜を短期間に得ることができるという利点がある。   The whisker inspection method of the present invention has an advantage that a highly reliable plating film can be obtained in a short time by repeating the inspection many times because whisker growth of the plating film can be performed in a short period of time.

銅または銅合金基材上に錫めっき皮膜を形成、速やかに界面活性剤を含有した水溶液に錫めっき皮膜を浸漬し、超音波洗浄機にて超音波振動を与えた後、錫めっき皮膜を50℃90%RHの恒温恒湿槽に168時間保存することで、30℃保存時の2600時間(15週間)に相当する長さのウイスカを成長させて検査することが出来る。 The tin plating film was formed on a copper or copper alloy substrate promptly tin plating film was immersed in an aqueous solution containing a surfactant, after applying ultrasonic vibration at ultrasonic cleaner, a tin plating film By storing in a constant temperature and humidity chamber at 50 ° C. and 90% RH for 168 hours, whisker having a length corresponding to 2600 hours (15 weeks) when stored at 30 ° C. can be grown and inspected.

また、錫めっき皮膜のウイスカ検査方法に関し、基材上に厚さが0.5〜3μmの錫めっき皮膜を形成した後、その保存環境を85℃90%RHの恒温恒湿槽に168時間保存することで、30℃保存時の約2倍密度のウイスカを成長させて検査することが出来る。   In addition, regarding a whisker inspection method for a tin plating film, after forming a tin plating film having a thickness of 0.5 to 3 μm on a substrate, the storage environment is stored in a constant temperature and humidity chamber at 85 ° C. and 90% RH for 168 hours. By doing so, it is possible to grow and inspect about twice the density whisker when stored at 30 ° C.

PPF(PrePlated Frame:前めっき)方式に用いられる電子部品用リードフレームを例に説明する。図2,図3は本発明で用いた電子部品用リードフレームの平面図および断面図である。電子部品用リードフレームに使用される基材には、低錫リン青銅または析出硬化型等の銅または銅合金や、鉄にニッケルを約42wt%含む鉄・ニッケル合金が用いられる。本実施例では銅合金であるアロイ194を生地として用いた。最初、このアロイ194の薄板をリードフレームの形状に加工する。加工する方法としては、リードフレームの形状を打ち抜くための金型を造り、この金型を用いてプレス装置により打ち抜き加工する方法と、感光レジストを表面に塗布しパターンを焼き付けた後、現像し感光レジストをリードフレームのポジパターンとして残し、塩化第二鉄または塩化第二銅等のエッチング液で加工する方法がある。本発明では、プレス法もエッチング法も任意に選択できる。本実施例1ではプレス法により、アロイ194の板をリードフレーム形状に加工した後、洗浄工程を経て、必要に応じて熱処理工程を通し、プレスで打ち抜いた時に基材に残った応力を除去する。その後、めっき工程に入る。   A lead frame for electronic parts used in a PPF (PrePlated Frame) method will be described as an example. 2 and 3 are a plan view and a cross-sectional view of the lead frame for an electronic component used in the present invention. As the base material used for the lead frame for electronic parts, low tin phosphor bronze, precipitation hardened copper or copper alloy, or iron / nickel alloy containing about 42 wt% nickel in iron is used. In this example, alloy 194, which is a copper alloy, was used as the fabric. First, a thin plate of the alloy 194 is processed into a lead frame shape. As a processing method, a die for punching the shape of the lead frame is manufactured, a punching process is performed using a press device using this die, a photosensitive resist is applied on the surface, a pattern is baked, and then developed and photosensitive. There is a method in which a resist is left as a positive pattern of a lead frame and processed with an etching solution such as ferric chloride or cupric chloride. In the present invention, the pressing method and the etching method can be arbitrarily selected. In the first embodiment, a plate of alloy 194 is processed into a lead frame shape by a pressing method, and then a cleaning process is performed, and a heat treatment process is performed as necessary to remove the stress remaining on the base material when punched with a press. . Thereafter, the plating process is started.

以下に本発明のめっき工程の詳細を説明する。   Details of the plating process of the present invention will be described below.

洗浄工程により生地に付着したプレス工程や熱処理工程の油成分をアルカリ脱脂剤等により浸漬法または電気的な方法の併用または単独使用により除去した後、銅下地めっきを0.2μm以上形成する。銅下地めっき液として、シアン化銅溶液を用いた。その後、銀の部分めっき工程によりインナーリード部2に銀めっきを行う。   After removing the oil component of the press process and heat treatment process adhering to the fabric by the washing process by using an alkaline degreasing agent or the like by using a dipping method or an electrical method in combination or using alone, a copper base plating is formed to 0.2 μm or more. A copper cyanide solution was used as a copper base plating solution. Thereafter, the inner lead portion 2 is subjected to silver plating by a silver partial plating step.

銀の部分めっき5を行った後、生地と錫めっき層の密着性を改善するため塩酸、硝酸、硫酸を1種または2種以上から選択された処理剤によって、アウターリード部3の錫めっき層6を処理する。本実施例1では5%の硫酸を用いた。   After the silver partial plating 5 is performed, the tin plating layer of the outer lead portion 3 is treated with a treatment agent selected from one or more of hydrochloric acid, nitric acid and sulfuric acid in order to improve the adhesion between the fabric and the tin plating layer. 6 is processed. In Example 1, 5% sulfuric acid was used.

この前処理の後に、アウターリード部3に電流密度40A/dm2により錫めっきの部分めっきを行った。めっき液としてはMST−400(レイボルド製)を用い、MST−錫を用い金属錫として50g/L、酸としてMST−酸を75mL/L、添加剤としてMST−400を60mL/Lの濃度で調製した。浴温50℃、流速5L/minの条件で錫めっき皮膜を形成した。陽極電極は、白金、イリジウム、タンタル、ロジウム、ルテニウムの金属またはその酸化物のうち一つ以上を含む不溶性電極により任意に選択できる。
本実施例1ではチタンの生地に酸化イリジウムと酸化タンタルの混合物を被覆した不溶性電極を使用した。通常の錫板などを用いた溶解性電極を使用すると、電極交換が頻繁となり、その都度生産ラインを停止する必要があるため、量産性が極端に低下し、好ましくない。もちろん、高速めっき方法を用いない場合は、可溶性陽極を用いることもできる。
After this pretreatment, the outer lead part 3 was partially plated with tin at a current density of 40 A / dm 2 . MST-400 (manufactured by Reybold) is used as the plating solution, MST-tin is used as metal tin, 50 g / L as metal tin, MST-acid as acid is 75 mL / L, and MST-400 is prepared as additive at a concentration of 60 mL / L. did. A tin plating film was formed under conditions of a bath temperature of 50 ° C. and a flow rate of 5 L / min. The anode electrode can be arbitrarily selected from insoluble electrodes containing one or more of platinum, iridium, tantalum, rhodium, ruthenium metal or oxides thereof.
In Example 1, an insoluble electrode in which a titanium fabric was coated with a mixture of iridium oxide and tantalum oxide was used. When a soluble electrode using a normal tin plate or the like is used, electrode replacement becomes frequent, and it is necessary to stop the production line each time, so that mass productivity is extremely lowered, which is not preferable. Of course, when a high-speed plating method is not used, a soluble anode can also be used.

めっき厚さは3〜15μmの範囲で任意に選択できる。めっき厚が3μmより薄くなると、下地の影響ではんだぬれ性が悪くなる。15μm以上厚くなると、モールド樹脂の封止工程で金型の隙間から樹脂が漏れる等の不具合が発生するので好ましくない。本実施例1では9μmの錫めっきを行った。錫めっきを行った後、水洗を行いめっき液を充分除去した後、第三リン酸ナトリウム・12水和物を50g/Lの濃度で60℃、20秒間の浸漬処理によって、錫めっき面をエッチング処理した。次に、リード側面に漏れた銀を除去するため電気的にリードフレーム表面の銀を除去した後、有機皮膜による変色防止処理を行った後、水洗後乾燥した。
次に、錫めっき皮膜を形成したリードフレームを速やかに超音波洗浄機にて超音波振動を与え、30℃90%RHの恒温恒湿槽に保存し、168時間、504時間、864時間、1512時間、2616時間を経過した時にその都度取り出して、走査型電子顕微鏡(SEM)を用いてウイスカの発生状況を観察した。ウイスカ長さは長いものから20本を選びその平均値を用いた。超音波洗浄機は8510J−DTH(ブランソニック製)を用い、40,000Hz、50℃で30分間超音波振動を与えた。
The plating thickness can be arbitrarily selected within a range of 3 to 15 μm. When the plating thickness is less than 3 μm, the solder wettability deteriorates due to the influence of the base. A thickness of 15 μm or more is not preferable because problems such as resin leakage from the gaps in the mold occur in the molding resin sealing step. In Example 1, tin plating of 9 μm was performed. After the tin plating, the plating solution is sufficiently removed by washing with water, and then the surface of the tin plating is etched by dipping the trisodium phosphate 12 hydrate at a concentration of 50 g / L at 60 ° C. for 20 seconds. Processed. Next, in order to remove silver leaked to the side surface of the lead, silver on the surface of the lead frame was electrically removed, followed by an anti-discoloration treatment with an organic film, and then washed with water and dried.
Next, the lead frame on which the tin plating film is formed is promptly subjected to ultrasonic vibration by an ultrasonic cleaner, and stored in a constant temperature and humidity chamber at 30 ° C. and 90% RH, and is stored for 168 hours, 504 hours, 864 hours, 1512. When the time of 2,616 hours passed, the sample was taken out each time, and the occurrence of whiskers was observed using a scanning electron microscope (SEM). The average whisker length was selected from 20 long whisker lengths. The ultrasonic washer was 8510J-DTH (manufactured by Brandonic), and was subjected to ultrasonic vibration at 40,000 Hz and 50 ° C. for 30 minutes.

恒温恒湿度保存条件が40℃90%RHであること以外は、実施例1と同様の方法で行った。   The method was the same as in Example 1 except that the constant temperature and humidity storage condition was 40 ° C. and 90% RH.

恒温恒湿度保存条件が50℃90%RHであること以外は、実施例1と同様の方法で行った。   The method was the same as in Example 1 except that the constant temperature and humidity storage condition was 50 ° C. and 90% RH.

恒温恒湿度保存条件が60℃90%RHであること以外は、実施例1と同様の方法で行った。   The method was the same as in Example 1 except that the constant temperature and humidity storage conditions were 60 ° C. and 90% RH.

超音波振動を与える際に界面活性剤を用い、恒温恒湿度保存条件が30℃90%RHであること以外は、実施例1と同様の方法で行った。界面活性剤はネオペレックスG−15(花王製)を1mL/Lで用いた。   This was performed in the same manner as in Example 1 except that a surfactant was used when applying ultrasonic vibration and the constant temperature and humidity storage condition was 30 ° C. and 90% RH. As the surfactant, Neoperex G-15 (manufactured by Kao) was used at 1 mL / L.

超音波振動を与える際に界面活性剤を用い、恒温恒湿度保存条件が40℃90%RHであること以外は、実施例1と同様の方法で行った。界面活性剤はネオペレックスG−15(花王製)を1mL/Lで用いた。   A surfactant was used when applying ultrasonic vibration, and the same method as in Example 1 was performed except that the constant temperature and humidity storage condition was 40 ° C. and 90% RH. As the surfactant, Neoperex G-15 (manufactured by Kao) was used at 1 mL / L.

超音波振動を与える際に界面活性剤を用い、恒温恒湿度保存条件が50℃90%RHであること以外は、実施例1と同様の方法で行った。界面活性剤はネオペレックスG−15(花王製)を1mL/Lで用いた。   A surface active agent was used when applying ultrasonic vibration, and the method was the same as in Example 1 except that the constant temperature and humidity storage condition was 50 ° C. and 90% RH. As the surfactant, Neoperex G-15 (manufactured by Kao) was used at 1 mL / L.

超音波振動を与える際に界面活性剤を用い、恒温恒湿度保存条件が60℃90%RHであること以外は、実施例1と同様の方法で行った。界面活性剤はネオペレックスG−15
(花王製)を1mL/Lで用いた。
(比較例1)
This was performed in the same manner as in Example 1 except that a surfactant was used when applying ultrasonic vibration and the constant temperature and humidity storage condition was 60 ° C. and 90% RH. Surfactant is Neoperex G-15
(Kao) was used at 1 mL / L.
(Comparative Example 1)

超音波洗浄機による超音波振動を与えず、恒温恒湿度保存条件が30℃60%RHであること以外は、実施例1と同様な方法で行った。
(比較例2)
It was carried out in the same manner as in Example 1 except that ultrasonic vibration by an ultrasonic cleaner was not applied and the constant temperature and humidity storage condition was 30 ° C. and 60% RH.
(Comparative Example 2)

恒温恒湿度保存条件が50℃60%RHであること以外は、実施例1と同様の方法で行った。   The method was the same as in Example 1 except that the constant temperature and humidity storage condition was 50 ° C. and 60% RH.

錫めっき皮膜の検査条件と2616時間までのウイスカ成長の経過を(表1)、図4に示す。   The inspection conditions of the tin plating film and the progress of whisker growth up to 2616 hours (Table 1) are shown in FIG.

Figure 0004552468
(表1)、図4に示す様に、実施例1〜4では錫めっき皮膜が形成された銅または銅合金基材に超音波振動を与えた後、30℃90%RH〜60℃90%RHの環境下に168時間保存することで、比較例1の30℃60%RH保存時の400時間〜1700時間に相当する長さのウイスカを得た。特に、50℃90%RHに168時間保存することで、30℃60%RH保存時の1700時間に相当する長さのウイスカを得た。
Figure 0004552468
(Table 1), as shown in FIG. 4, in Examples 1-4, after giving an ultrasonic vibration to the copper or copper alloy base material in which the tin plating film was formed , 30 degreeC90% RH-60 degreeC90% By storing in an RH environment for 168 hours, whisker having a length corresponding to 400 hours to 1700 hours in Comparative Example 1 when stored at 30 ° C. and 60% RH was obtained. In particular, whisker having a length corresponding to 1700 hours when stored at 30 ° C. and 60% RH was obtained by storing at 50 ° C. and 90% RH for 168 hours.

更に、実施例5〜8では錫めっき皮膜が形成された銅または銅合金基材に界面活性剤を含有する水溶液中にて超音波振動を与えた後、30℃90%RH〜60℃90%RHの環境下に168時間保存することで、30℃60%RH保存時の600時間〜2600時間に相当する長さのウイスカを得た。特に、50℃90%RHに168時間保存することで、30℃60%RH保存時の2600時間以上に相当する長さのウイスカを得た。 Further, in Examples 5 to 8, ultrasonic vibration was applied to a copper or copper alloy substrate on which a tin plating film was formed in an aqueous solution containing a surfactant , and then 30 ° C. and 90% RH to 60 ° C. and 90%. By storing in an RH environment for 168 hours, whiskers having a length corresponding to 600 to 2600 hours when stored at 30 ° C. and 60% RH were obtained. In particular, whisker having a length corresponding to 2600 hours or more when stored at 30 ° C. and 60% RH was obtained by storing at 50 ° C. and 90% RH for 168 hours.

図1に実施例8で成長した168時間後のウイスカを示す。本発明の方法で成長させたウイスカは、根元部分が細くなる傾向があり、ウイスカとその根元部分とは隙間が存在した。   FIG. 1 shows whiskers after 168 hours grown in Example 8. The whisker grown by the method of the present invention has a tendency that the root portion becomes thin, and there is a gap between the whisker and the root portion.

本発明の方法によるウイスカの成長メカニズムは明かではないが、銅または銅合金基材と錫めっき皮膜との錫銅合金であって、内部応力を増大させるCu6Sn5が成長しやすく、内部応力を減少させるCu3Snが成長しにくい温度域(30〜60℃)において、超音波振動によるエネルギーの供給と界面活性剤による水浸透性の向上で、めっき皮膜結晶の粒子間にわずかな隙間が出来やすくなることで、めっき皮膜中に内在していた応力が解放されやすくなり、短期間にウイスカが成長したものと考える。 Although the whisker growth mechanism according to the method of the present invention is not clear, it is a tin-copper alloy of a copper or copper alloy base material and a tin plating film, and Cu 6 Sn 5 that increases the internal stress easily grows. In the temperature range (30-60 ° C) where Cu 3 Sn is difficult to grow, there is a slight gap between the particles of the plating film crystals due to the energy supply by ultrasonic vibration and the improvement of water permeability by the surfactant. By making it easier, the stress inherent in the plating film is easily released, and it is thought that whiskers grew in a short period of time.

次に、銅または銅合金基材上に錫めっき皮膜を形成後、速やかに85℃90%RHの恒
温恒湿槽に168時間保存することで、ウイスカ生成密度を大きくして検査することが出来る。
Next, after forming a tin plating film on a copper or copper alloy substrate, it can be inspected by increasing the whisker generation density by quickly storing it in a constant temperature and humidity chamber at 85 ° C. and 90% RH for 168 hours. .

錫めっき皮膜の厚さが1μm、超音波洗浄機による超音波振動を与えず、恒温恒湿度保存条件が85℃90%RHで168時間保存したこと以外は、実施例1と同様の方法で行い、100μm×100μmエリアに発生したウイスカの生成密度を観察した。
(比較例3)
Except that the thickness of the tin plating film was 1 μm, no ultrasonic vibration was applied by an ultrasonic cleaner, and the constant temperature and humidity storage condition was 85 ° C. and 90% RH for 168 hours, the same method as in Example 1 was performed. The production density of whiskers generated in an area of 100 μm × 100 μm was observed.
(Comparative Example 3)

超音波洗浄機による超音波振動を与えず、恒温恒湿度保存条件が85℃90%RHで168時間保存したこと以外は、実施例1と同様の方法で行い、ウイスカの生成密度を観察した。
(比較例4)
The whisker production density was observed in the same manner as in Example 1 except that the ultrasonic cleaning by the ultrasonic cleaner was not applied and the constant temperature and constant humidity storage condition was stored at 85 ° C. and 90% RH for 168 hours.
(Comparative Example 4)

錫めっき皮膜の厚さが1μm、超音波洗浄機による超音波振動を与えず、恒温恒湿度保存条件が30℃60%RHで168時間保存したこと以外は、実施例1と同様の方法で行い、ウイスカの生成密度を観察した。
(比較例5)
Except that the thickness of the tin plating film was 1 μm, no ultrasonic vibration was applied by an ultrasonic cleaner, and the constant temperature and humidity storage conditions were 30 ° C. and 60% RH for 168 hours, the same method as in Example 1 was performed. The whisker formation density was observed.
(Comparative Example 5)

錫めっき皮膜の厚さが1μm、超音波洗浄機による超音波振動を与えず、恒温恒湿度保存条件が60℃90%RHで168時間保存したこと以外は、実施例1と同様の方法で行い、ウイスカの生成密度を観察した。   Except that the thickness of the tin plating film was 1 μm, no ultrasonic vibration was applied by an ultrasonic cleaner, and the constant temperature and humidity storage condition was 60 ° C. and 90% RH for 168 hours, the same method as in Example 1 was performed. The whisker formation density was observed.

錫めっき皮膜の検査条件とウイスカ生成密度の関係を(表2)に示す。(表2)に示す様に、錫めっき膜厚が1μmでは錫めっき皮膜形成後に85℃90%RHの環境下に168時間保存することで、錫めっき膜厚9μmより顕著に大きなウイスカ生成密度が観察され、同じ1μmの膜厚でも30℃60%RH、60℃90%RH保存時よりも大きなウイスカの生成密度が観察された。   The relationship between the inspection conditions of the tin plating film and the whisker generation density is shown in (Table 2). As shown in (Table 2), when the tin plating film thickness is 1 μm, the whisker generation density is remarkably larger than the tin plating film thickness of 9 μm by storing it in an environment of 85 ° C. and 90% RH after forming the tin plating film. It was observed that whisker production density was larger even at the same film thickness of 1 μm than when stored at 30 ° C. and 60% RH and 60 ° C. and 90% RH.

Figure 0004552468
次に、錫めっき皮膜の厚さを0.2から9μmまで変化させた時のウイスカの成長状況を30℃60RH%に500時間、1000時間、2000時間で観察した結果を図5に示す。
Figure 0004552468
Next, FIG. 5 shows the results of observation of the whisker growth state at 30 ° C. and 60 RH% over 500 hours, 1000 hours, and 2000 hours when the thickness of the tin plating film was changed from 0.2 to 9 μm.

錫めっき皮膜の厚さを0.2〜9μmまで変化させ、それぞれについて30℃60%RHに保存した場合の500h、1000h、2000hでのウイスカ成長経過を観察した。   The thickness of the tin plating film was changed from 0.2 to 9 μm, and the whisker growth progress was observed at 500 h, 1000 h, and 2000 h when stored at 30 ° C. and 60% RH for each.

図5に示す様に、錫めっき膜厚が0.6μmより薄くなるとほとんどウイスカが生成しなくなり、錫めっき膜厚が3μmより厚くなるとウイスカの成長が小さくなる。このことから、30℃60%RHの環境では0.6μmから3μmの範囲でウイスカが成長しやすい範囲が存在した。   As shown in FIG. 5, when the tin plating film thickness is less than 0.6 μm, almost no whisker is generated, and when the tin plating film thickness is more than 3 μm, whisker growth is reduced. For this reason, in the environment of 30 ° C. and 60% RH, there was a range in which whiskers were likely to grow in the range of 0.6 to 3 μm.

次に、銅または銅合金基材上に厚さが0.5〜3μmの錫めっき皮膜を形成し、界面活性剤を含有する水溶液中にて超音波振動を速やかに与えた後、めっき皮膜が半径60〜90mmの円弧状の曲げによる変形を保持した状態で20〜40℃の環境に置くことにより、ウイスカの成長を大きくして検査することが出来る。 Next, after forming a tin plating film having a thickness of 0.5 to 3 μm on a copper or copper alloy base material and quickly applying ultrasonic vibration in an aqueous solution containing a surfactant , the plating film is By placing in an environment of 20 to 40 ° C. while maintaining deformation due to arc-shaped bending with a radius of 60 to 90 mm, the growth of whiskers can be increased and inspected.

錫めっき皮膜の厚さが1μm、超音波洗浄機による超音波振動を与えず、恒温恒湿度保存条件が30℃60%RHで168時間保存したこと以外は、実施例1と同様の方法で行った。   The same procedure as in Example 1 was performed except that the thickness of the tin plating film was 1 μm, the ultrasonic vibration was not applied by an ultrasonic cleaner, and the constant temperature and humidity storage condition was 30 ° C. and 60% RH for 168 hours. It was.

錫めっき皮膜の厚さが1μm、超音波振動を与える際に界面活性剤を用い、500mLのガラスビーカーの外側にめっき皮膜が形成されたリードフレームを巻き付けることで、めっき皮膜が半径88mmの円弧状の曲げによる変形を保持した状態で、恒温恒湿度保存条件が30℃60%RHで168時間保存したこと以外は、実施例1と同様の方法で行った。   When the tin plating film has a thickness of 1 μm, a surfactant is used when applying ultrasonic vibration, and the lead frame with the plating film formed on the outside of a 500 mL glass beaker is wound to form an arc with a radius of 88 mm. This was performed in the same manner as in Example 1 except that the constant temperature and humidity storage conditions were stored at 30 ° C. and 60% RH for 168 hours in a state where the deformation due to bending was maintained.

錫めっき皮膜の厚さが1μm、超音波振動を与える際に界面活性剤を用い、300mLのガラスビーカーの外側にめっき皮膜が形成されたリードフレームを巻き付けることで、めっき皮膜が半径76mmの円弧状の曲げによる変形を保持した状態で、恒温恒湿度保存条件が30℃60%RHで168時間保存したこと以外は、実施例1と同様の方法で行った。   When the tin plating film has a thickness of 1 μm, a surfactant is used to apply ultrasonic vibration, and a lead frame having a plating film formed on the outside of a 300 mL glass beaker is wound to form an arc with a radius of 76 mm. This was performed in the same manner as in Example 1 except that the constant temperature and humidity storage conditions were stored at 30 ° C. and 60% RH for 168 hours in a state where the deformation due to bending was maintained.

錫めっき皮膜の厚さが1μm、超音波振動を与える際に界面活性剤を用い、200mLのガラスビーカーの外側にめっき皮膜が形成されたリードフレームを巻き付けることで、めっき皮膜が半径66mmの円弧状の曲げによる変形を保持した状態で、恒温恒湿度保存条件が30℃60%RHで168時間保存したこと以外は、実施例1と同様の方法で行った。
(比較例6)
When the tin plating film has a thickness of 1 μm, a surfactant is used to apply ultrasonic vibration, and a lead frame having a plating film formed on the outside of a 200 mL glass beaker is wound to form an arc shape with a radius of 66 mm. This was performed in the same manner as in Example 1 except that the constant temperature and humidity storage conditions were stored at 30 ° C. and 60% RH for 168 hours in a state where the deformation due to bending was maintained.
(Comparative Example 6)

超音波洗浄機による超音波振動を与えず、恒温恒湿度保存条件が30℃60%RHで168時間保存したこと以外は、実施例1と同様の方法で行った。
(比較例7)
It was carried out in the same manner as in Example 1 except that the ultrasonic vibration by the ultrasonic cleaner was not applied and the constant temperature and humidity storage conditions were stored at 30 ° C. and 60% RH for 168 hours.
(Comparative Example 7)

錫めっき皮膜の厚さが1μm、超音波洗浄機による超音波振動を与えず、200mLのガラスビーカーの外側にめっき皮膜が形成されたリードフレームを巻き付けることで、めっき皮膜が半径66mmの円弧状の曲げによる変形を保持した状態で、恒温恒湿度保存条件が30℃60%RHで168時間保存したこと以外は、実施例1と同様の方法で行った。
(比較例8)
The thickness of the tin plating film is 1 μm, the ultrasonic wave is not applied by an ultrasonic cleaner, and the lead frame having the plating film formed on the outside of a 200 mL glass beaker is wound to form an arc-shaped plating film having a radius of 66 mm. It was carried out in the same manner as in Example 1 except that the constant temperature and humidity storage conditions were stored at 30 ° C. and 60% RH for 168 hours in a state in which deformation due to bending was maintained.
(Comparative Example 8)

錫めっき皮膜の厚さが1μm、超音波洗浄機による超音波振動を与えず、200mLのガラスビーカーの外側にめっき皮膜が形成されたリードフレームを巻き付けることで、めっき皮膜が半径66mmの円弧状の曲げによる変形を保持した状態で、恒温恒湿度保存条件が60℃90%RHで168時間保存したこと以外は、実施例1と同様の方法で行った。
(比較例9)
The thickness of the tin plating film is 1 μm, the ultrasonic wave is not applied by an ultrasonic cleaner, and the lead frame having the plating film formed on the outside of a 200 mL glass beaker is wound to form an arc-shaped plating film having a radius of 66 mm. It was performed in the same manner as in Example 1 except that the constant temperature and humidity storage condition was stored at 60 ° C. and 90% RH for 168 hours in a state where deformation due to bending was maintained.
(Comparative Example 9)

錫めっき皮膜の厚さが1μm、超音波振動を与える際に界面活性剤を用い、恒温恒湿度保存条件が30℃60%RHで168時間保存したこと以外は、実施例1と同様の方法で行った。
(比較例10)
The same method as in Example 1 except that the thickness of the tin plating film was 1 μm, a surfactant was used when applying ultrasonic vibration, and the constant temperature and humidity storage condition was 30 ° C. and 60% RH for 168 hours. went.
(Comparative Example 10)

錫めっき皮膜の厚さが1μm、超音波振動を与える際に界面活性剤を用い、100mLのガラスビーカーの外側にめっき皮膜が形成されたリードフレームを巻き付けることで、めっき皮膜が半径54mmの円弧状の曲げによる変形を保持した状態で、恒温恒湿度保存条件が30℃60%RHで168時間保存したこと以外は、実施例1と同様の方法で行った。   When the tin plating film has a thickness of 1 μm, a surfactant is used when applying ultrasonic vibration, and a lead frame having a plating film formed on the outside of a 100 mL glass beaker is wound to form an arc-shaped plating film with a radius of 54 mm This was performed in the same manner as in Example 1 except that the constant temperature and humidity storage conditions were stored at 30 ° C. and 60% RH for 168 hours in a state where the deformation due to bending was maintained.

錫めっき皮膜の検査条件と168時間経過後のウイスカ成長との関係を(表3)に示す。(表3)に示す様に、錫めっき膜厚が1μmでは、錫めっき皮膜形成後に30℃60%RHの環境下に168時間保存することで、錫めっき膜厚が9μmの場合よりも顕著なウイスカの成長が観察された。また、同じ1μmの膜厚でも界面活性剤を含有した水溶液中で超音波振動を与えた後、めっき皮膜に曲げによる応力を大きくするにつれてウイスカ成長は更に顕著となった。この際、曲げによる応力を加えすぎると、その効果はなかった。   The relationship between the inspection conditions of the tin plating film and the whisker growth after 168 hours is shown in (Table 3). As shown in (Table 3), when the tin plating film thickness is 1 μm, it is more prominent than when the tin plating film thickness is 9 μm by storing in a 30 ° C. and 60% RH environment after forming the tin plating film for 168 hours. Whisker growth was observed. Further, whisker growth became more remarkable as the stress due to bending was increased in the plating film after ultrasonic vibration was applied in an aqueous solution containing a surfactant even with the same film thickness of 1 μm. At this time, if too much stress due to bending was applied, the effect was not obtained.

Figure 0004552468
以上、本実施例で示した様に、錫めっき皮膜を3〜15μm形成後、超音波振動、界面活性剤存在下での超音波振動を与え、温度が30〜60℃、湿度が80〜95%RHで保存することにより、ウイスカ成長を大きくして検査することが出来る。
Figure 0004552468
As described above, after forming a tin plating film of 3 to 15 μm as shown in this example, ultrasonic vibration and ultrasonic vibration in the presence of a surfactant are applied, and the temperature is 30 to 60 ° C. and the humidity is 80 to 95. By storing at% RH, whisker growth can be increased and inspected.

また、錫めっき皮膜を0.5〜3μm形成後、温度が80〜100℃、湿度が80〜95%RHで保存することにより、ウイスカ生成密度を高めることが出来る。更に、界面活性剤存在下での超音波振動を与え、錫めっき皮膜が曲げによる変形を保持した状態で、温度が20〜40℃で保存することにより、ウイスカ成長を大きくして検査することが出来る。   In addition, after forming a tin plating film of 0.5 to 3 μm, the whisker production density can be increased by storing at a temperature of 80 to 100 ° C. and a humidity of 80 to 95% RH. Furthermore, it is possible to inspect the whisker growth by applying ultrasonic vibration in the presence of a surfactant and maintaining the temperature at 20 to 40 ° C. while the tin plating film retains deformation due to bending. I can do it.

以上の実施例では電子部品用リードフレームへの錫めっき皮膜について記述したが、本発明はこの用途に限定されるものではない。   Although the tin plating film on the lead frame for electronic parts has been described in the above embodiment, the present invention is not limited to this application.

ウイスカ成長を大きくすることにより、長期間を要していたウイスカ検査を短期間で終えることが出来るため、錫めっきを用いるもの全てにおいて、ウイスカが発生しにくい信頼性の高い製品が開発・生産できる。   By increasing whisker growth, whisker inspection that required a long period of time can be completed in a short period of time, so it is possible to develop and produce highly reliable products that do not generate whiskers in all products that use tin plating. .

本発明で成長したウイスカ図Whisker diagram grown in the present invention 本発明で用いた電子部品用リードフレームの平面図The top view of the lead frame for electronic components used by this invention 本発明で用いた電子部品用リードフレームの断面図Sectional view of the lead frame for electronic components used in the present invention 錫めっき皮膜の検査条件によるウイスカ成長経過の関係図Relationship diagram of whisker growth process according to tin plating film inspection conditions 錫めっき膜厚と成長したウイスカ長さとの関係図Relationship between tin plating film thickness and grown whisker length

符号の説明Explanation of symbols

1 チップ搭載部
2 インナーリード部
3 アウターリード部
4 タイバー部
5 銀または銀合金めっき部
6 錫めっき部
DESCRIPTION OF SYMBOLS 1 Chip mounting part 2 Inner lead part 3 Outer lead part 4 Tie bar part 5 Silver or silver alloy plating part 6 Tin plating part

Claims (1)

錫めっき皮膜が形成された銅または銅合金基材に超音波振動を与えた後、保存温度が30〜60℃、保存湿度が90%RHの高湿度環境に前記基材を保存することを特徴とする錫めっき皮膜のウイスカ検査方法。 After ultrasonic vibration is applied to a copper or copper alloy substrate on which a tin plating film is formed, the substrate is stored in a high humidity environment where the storage temperature is 30 to 60 ° C. and the storage humidity is 90% RH. Whisker inspection method for tin plating film .
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