JP4662284B2 - Holding jig - Google Patents

Description

  The present invention relates to a holding jig, and more particularly, to a holding jig having a simple structure that can hold and remove an object to be bonded as desired.

  Conventionally, in the production of thin parts such as silicon wafers, flexible printed boards, glass plates for large screen display devices, small parts such as ceramic capacitors, coil filters, etc., the thin sheets are easily damaged, The small parts or the like are difficult to fix in place and easily fall down. Generally, these thin plates or small parts are fixed to a holding jig or the like, for example, a polishing process, a pattern forming process, a dicing process, etc. Manufacturing processes, transportation between the manufacturing processes, storage, and the like are performed.

  And these thin plate-like objects or small parts are held by the holding jig during the manufacturing process, during the transfer between the manufacturing processes, and / or during the storage, etc. And / or after storage, it is removed from the holding jig. Therefore, the holding jig is required to have a characteristic of reliably holding a thin plate or small parts and a characteristic of easily removing the thin plate or small parts when necessary.

  As such a holding jig, for example, “in a substrate holding chuck for holding a substrate by vacuum suction, a wall that forms a negative pressure when the substrate is vacuum-sucked, and a deformation of the substrate during the vacuum suction” And a plurality of auxiliary support bodies that suppress the above-described problem, and at least the auxiliary support bodies of the wall body and the auxiliary support bodies are formed to protrude on the surface of the glass substrate (see Patent Document 1). ) And “a jig for holding a small part, characterized in that at least the surface part is formed of a rubber elastic material having adhesiveness, and the small part can be tightly held on the surface of the elastic material by the adhesive force” ( Patent Document 2).

  However, since the substrate holding chuck described in Patent Document 1 fixes the substrate by vacuum suction, it is necessary to always perform vacuum suction during the manufacturing process, during transportation between the manufacturing processes, and / or during storage. In particular, when the mass of the substrate is large, it is necessary to increase the degree of vacuum, a high voltage is required, and electric charges may remain on a thin plate or small component removed from the holding device. The structure and manufacturing method itself were complicated and expensive. Further, the substrate may be damaged by the auxiliary support. Further, since the substrate holding chuck fixes the substrate by vacuum suction, it cannot be used in a reduced pressure environment or a vacuum environment, and its application may be limited. For example, as a method of applying various compositions such as a liquid crystal composition on a substrate, in order to prevent bubbles or the like from entering the inside or the surface of the applied various compositions, A method of applying various compositions may be employed. When this method is employed, the substrate holding chuck described in Patent Document 1 cannot be used as a jig for holding the substrate.

  On the other hand, since the holding jig described in Patent Document 2 has at least a surface portion having adhesiveness, when holding a thin plate-like object or a small part on the holding jig in close contact with the surface of the elastic member. The entire surface of the small component is brought into close contact, and in particular, the thin plate-like object has a large contact area with the surface of the elastic member, and when removing the thin plate-like object or the small component from the elastic member, There was a problem that it was difficult to remove parts. Therefore, it is necessary to remove the small component and the thin plate with a great force over the adhesive force, and the thin plate or the small component may be deformed, or may be damaged such as being cracked or chipped.

JP 2000-286329 A Japanese Examined Patent Publication No. 7-93247

  An object of the present invention is to provide a holding jig having a simple structure that can hold an object to be bonded with a sufficient adhesive holding force and can be removed as desired.

As means for solving the problems,
Claim 1 is bonded to the substrate, the adhesive sheet of the sheet-like material can adhesive held on the surface, formed Ri and a protrusion mechanism that is disposed on the opposite side of the surface relative to the adhesive sheet , the projecting mechanism, relative to a portion of the adhesive sheet the adhesive sheet to the adhesive retained the adherend object from the opposite side of the surface relative to the adhesive sheet when removed from the adhesive sheet A holding jig having a plurality of projecting members for projecting ,
Claim 2, wherein the substrate is formed in a convex shape in the periphery of said plate and the flat plate portion, have a peripheral wall portion and a vent hole for adhesively fixed to the adhesive sheet, each of the plurality of the protrusion members said erected on the flat plate portion, a holding jig according to claim 1 having a height smaller length than the peripheral wall portion,
Claim 3, each of the plurality of the protruding member surrounds the tip of its, the protective member for protecting said adhesive sheet from said projecting member, the biasing member for biasing said protective member to the adhesive sheet side The holding jig according to claim 2, comprising:
Claim 4, wherein the substrate has a plurality of through holes penetrating in the thickness direction, the projection mechanism operating member, each plurality of the projecting member is erected having a length greater than the thickness of the substrate 2. The holding jig according to claim 1, wherein the operation member is attached to the base body so that each of the plurality of projecting members can move forward and backward in the axial direction of the through hole in the through hole. And
According to a fifth aspect of the present invention, the base includes a flat plate portion having a plurality of the through-holes and a peripheral wall portion that is formed in a convex shape on a peripheral portion of the flat plate portion and that adheres and fixes the adhesive sheet, and the plurality of the protrusions Each of the members is a holding jig according to claim 4, wherein each of the members has a length larger than a height of the peripheral wall portion.
According to a sixth aspect of the present invention, the base includes a flat plate portion having a plurality of the through holes, and a peripheral wall portion that is formed in a convex shape so as to hang from the peripheral edge portion of the flat plate portion and fixes a support member that supports the operation member. The holding jig according to claim 4.

  The holding jig according to the present invention is located on the opposite side of a surface (hereinafter sometimes referred to as an adhesive surface) capable of adhering and holding an object to be adhered to the adhesive sheet. And a protruding mechanism for relatively protruding a part of the adhesive sheet from the opposite side of the adhesive surface. Therefore, even when the holding jig according to the present invention has a simple structure, when the object to be adhered and held by the adhesive sheet is removed from the adhesive sheet, the sticking tool Since a part of the sheet protrudes relatively and the contact area between the adhesive sheet and the adherend is significantly reduced, the adherend to be adhered and held on the adhesive sheet is not deformed and damaged. It can be removed as desired by its own weight or by applying a slight force. Therefore, according to the present invention, it is possible to provide a holding jig having a simple structure that can adhere and hold an adherend with sufficient adhesive holding force and can be removed as desired.

  The holding jig according to the present invention will be described. The holding jig according to the present invention includes an adhesive sheet and a protruding mechanism located on the opposite side of the adhesive surface with respect to the adhesive sheet. For example, the holding jig is attached to the adhesive surface of the adhesive sheet. Is used for manufacturing, transporting and / or storing an object to be adhered. It is advantageous that the adherend to be held by the holding jig is a thin plate-like object or a small component that is easily damaged or damaged, or is small and difficult to handle. Examples of the thin plate-like material include a silicon wafer, a flexible printed circuit board, and a glass plate for a large screen display device. Examples of the small component include a ceramic capacitor and a coil filter. The object to be adhered is preferably a thin plate-like object in that the object of the present invention can be achieved well. In this invention, the adherend may be held by the holding jig alone, or a plurality of adherends may be held simultaneously. In the present invention, the parts include semi-finished products and finished products.

  The pressure-sensitive adhesive sheet holds the adherend to be described later, and part of the pressure-sensitive adhesive sheet protrudes relatively from the pressure-sensitive surface, thereby easily releasing the pressure-sensitive adhesive holding of the object to be sticked. Therefore, the adhesive sheet only needs to have adhesiveness on at least one surface, that is, the surface that holds and holds the adherend, and the back surface has adhesiveness even if it has adhesiveness. May not be included.

  The adhesive surface having adhesiveness in the adhesive sheet is not a region having a predetermined adhesive force, a weak adhesive region having an adhesive force weaker than the adhesive force of the adhesive surface, or a non-adhesive material having substantially no adhesive force. You may have an adhesion field. It is preferable that this adhesive surface has a uniform adhesive force over the entire region, in particular, over the entire adhesive holding region defined as a region for sticking and holding the adherend. Even if the adherend has a relatively large mass when it has a uniform adhesive force over the entire surface or the entire adhesion holding area, it can stick and hold the adherend as desired on the adhesive sheet. it can. In addition, the adhesive sheet can be easily manufactured, and the surface of the adhesive sheet does not need to be subjected to adhesive force adjustment processing such as ultraviolet irradiation or roughening treatment, and the original durability of the adhesive sheet is effective. To be demonstrated.

The adhesive surface only needs to have an adhesive force sufficient to hold the object to be adhered. For example, the object to be adhered is placed on the adhesive surface and the holding jig is inclined at least 90 degrees. Sometimes, it is preferable to have an adhesive force sufficient to hold the adherend. In particular, when the holding jig is rotated 180 degrees so that the adhesive surface faces downward, the adhesive force sufficient to hold the adherend, that is, the own weight per unit area of the adherend ( g / mm ²⁾ preferably has a large adhesive strength (g / mm ²⁾ than. When the adhesive surface has such an adhesive force, the adherend can be reliably held on the adhesive sheet. Although the specific adhesive force of the adhesive surface is determined according to the weight, size, etc. of the adherend to be held on the adhesive sheet, it is, for example, 1 to 60 (g / mm ² ). preferably, more preferably from 2~40 (g / mm ^2), particularly preferably from 4~20 (g / mm ^2).

Here, the predetermined adhesive strength of the adhesive surface is determined as follows. First, a suction fixing device (for example, trade name: electromagnetic chuck, KET-1530B, manufactured by Kanetech Co., Ltd.) or a vacuum suction chuck plate for horizontally fixing the adhesive sheet, and a column with a diameter of 10 mm at the tip of the measuring unit. A load measuring device provided with a digital force gauge (trade name: ZP-50N, manufactured by Imada Co., Ltd.) with a contact made of stainless steel (SUS304) made is prepared. An adhesive sheet is fixed on this test stand, and the measurement environment is set to 21 ± 1 ° C. and humidity 50 ± 5%. Next, the contact attached to the load measuring device is lowered until it comes into contact with the measurement site on the adhesive surface at a speed of 20 mm / min, and then the contact is measured at a predetermined load on the measurement site. Press vertically for 3 seconds against the site. Here, the predetermined load is set to 25 g / mm ² . Next, the contact is pulled away from the site to be measured at a speed of 180 mm / min, and the pulling load measured by the digital force gauge at this time is read. This operation is performed at a plurality of locations of the measurement site, the plurality of separation loads obtained are arithmetically averaged, and the average value obtained is taken as the adhesive strength of the adhesive surface. This measurement method may be performed manually, for example, using a test stand (for example, trade name: VERTICAl MODEL MOTORIZED STAND series, manufactured by Imada Co., Ltd.) or the like. .

  The pressure-sensitive adhesive sheet, particularly the pressure-sensitive adhesive surface, is preferably smooth, and specifically has a center line average roughness Ra (JIS B 0601-1982) of 0.8 μm or less, A mirror surface is particularly preferred. When the pressure-sensitive adhesive sheet or the pressure-sensitive adhesive surface is smooth, the adhesive force of the pressure-sensitive adhesive surface can be adjusted uniformly, and the contact state between the pressure-sensitive adhesive surface and the adherend can be made uniform. The object can be kept sticky as desired.

  The pressure-sensitive adhesive sheet preferably has a thickness of about 0.05 to 2 mm. If the thickness of the pressure-sensitive adhesive sheet is less than 0.05 mm, the mechanical strength of the pressure-sensitive adhesive sheet may be lowered, and the durability of the pressure-sensitive adhesive sheet may not be sufficient. It may become difficult to elastically deform and the object to be adhered cannot be easily removed from the adhesive sheet.

  The adhesive sheet has elasticity because it protrudes from the adhesive surface, in other words, in a direction perpendicular to the adhesive surface of the adhesive sheet (perpendicular direction of the adhesive sheet) by the protruding mechanism described later. It is preferable to use an adhesive elastic sheet. The adhesive sheet can be formed by various rubbers such as silicone rubber, fluorine rubber or natural rubber, or various elastomers such as urethane elastomer and styrene-butadiene copolymer elastomer. It is preferably formed of silicone rubber or fluorine-based rubber having excellent strength and weather resistance. Among these, it is particularly preferable to have a rubber hardness (JIS K 6253 [durometer A]) of about 5 to 60. When the rubber hardness is adjusted to the above range, the pressure-sensitive adhesive sheet can exhibit a desired pressure-sensitive adhesive force, is easily elastically deformed, and can easily protrude a part thereof. As said silicone rubber, the silicone rubber composition containing hardening | curing agents, such as organopolysiloxane, a silica type filler, and a peroxide, is mentioned, for example. As such a silicone rubber composition, for example, trade names “KE-520U” and “KE-530U” are available from Shin-Etsu Chemical Co., Ltd. Examples of the fluorine rubber include a fluorine rubber containing a vinylidene fluoride / hexafluoropropylene copolymer, a filler such as carbon, a crosslinking aid such as trialisocyanate, and a curing agent such as peroxide. A composition. As such a fluorinated rubber composition, for example, trade name “DC-2050” or “DC-2260” can be obtained from Daikin Industries, Ltd. An adhesive sheet is formed by a well-known method etc. using the said material, for example.

  The adhesive sheet can be formed into an arbitrary shape according to the shape of the adherend, its manufacturing process and handling, and the shape and size of the holding jig. It is formed in a polygon such as a square, a circle, an ellipse, an indeterminate shape, or a combination of these, and may be the same as or different from the shape of the substrate described later.

  When the sticking object held on the pressure-sensitive adhesive sheet is removed from the pressure-sensitive adhesive sheet, the protruding mechanism is attached to the pressure-sensitive adhesive sheet from the opposite side of the pressure-sensitive adhesive surface on which the pressure-sensitive adhesive object is held. A part of the adhesive sheet is relatively projected. Therefore, the protruding mechanism has a configuration capable of relatively projecting a part of the adhesive sheet in the vertical direction of the adhesive sheet, in other words, from the adhesive surface on which the adherend is held. Specifically, it is located on the opposite side of the adhesive surface with respect to the adhesive sheet. For example, a protruding member such as a rod, pin, pyramid, cone, elliptical cone, prism, cylinder, or elliptical column It is preferable to comprise. When the projecting mechanism includes the projecting member, a part of the adhesive sheet can be relatively projected by the projecting mechanism, so that the object to be adhered is not affected by its own weight without being deformed and damaged. Alternatively, by applying a slight force, the object to be adhered can be removed from the adhesive sheet as desired, the structure of the holding jig is simplified, and the holding jig can be easily manufactured. . The protruding mechanism has a tip, a pin, a pyramid, a cone, an elliptical cone, a prism, a cylinder whose tip is formed so that the outer diameter decreases toward the tip, that is, the tip is tapered. Alternatively, it is particularly preferable to include a protruding member such as an elliptic cylinder. If the protruding mechanism includes such a protruding member, the object to be bonded can be removed from the adhesive sheet as desired.

  The protruding mechanism is a sticky sheet such that the axial direction of the protruding member such as a rod, pin, pyramid, cone, elliptical cone, prism, cylinder, or elliptical column substantially coincides with the vertical direction of the adhesive sheet. It may be arranged on the opposite side of the adhesive surface with respect to the adhesive sheet so that the axial direction of the protruding member and the vertical direction of the adhesive sheet form a predetermined angle. You may arrange | position and may arrange | position on the opposite side of an adhesive surface with respect to an adhesive sheet so that the axial direction of a protrusion member and the perpendicular direction of an adhesive sheet may become substantially perpendicular | vertical.

  At least one protruding mechanism may be disposed on the opposite side of the adhesive surface with respect to the adhesive sheet, and two or more protruding mechanisms may be disposed.

  The protruding mechanism causes a part of the pressure-sensitive adhesive sheet to relatively protrude from the pressure-sensitive adhesive surface of the pressure-sensitive adhesive sheet when removing the object to be adhered held by the pressure-sensitive adhesive sheet from the pressure-sensitive adhesive sheet. At this time, since the protruding amount of the pressure-sensitive adhesive sheet to be relatively protruded is a level that slightly protrudes from the pressure-sensitive adhesive surface, the adherend to which the pressure-sensitive adhesive sheet is held can be removed as desired. The protruding amount of the adhesive sheet is not particularly limited. In this invention, the protrusion amount of an adhesive sheet can be adjusted to about 0.1-5 mm from the adhesive surface, for example, Preferably, it is adjusted to about 0.2-1.5 mm. By adjusting the protruding amount of the adhesive sheet to the above range, it is possible to reliably remove the object to be adhered and held on the adhesive sheet from the adhesive sheet as desired, and to prevent the adhesive sheet from being damaged. Thus, the durability of the adhesive sheet can be sufficiently maintained.

  The protruding mechanism causes a part of the adhesive sheet to relatively protrude from the adhesive surface, thereby reducing the contact area between the adhesive sheet and the adherend. The contact state between the adhesive sheet protruding by the protrusion mechanism and the adherend is preferably, for example, a point contact state or a line contact state. Considering the durability of the adhesive sheet, the contact point has a certain area. A state or a line contact state is particularly preferred. When the contact state between the adhesive sheet and the adherend is a point contact state or a line contact state, the adherend can be removed from the adhesive sheet as desired.

  When a part of the adhesive sheet protrudes due to the protruding mechanism, the total area of the adhesive sheet that makes point contact or line contact with the adherend is the adhesive force of the adhesive sheet and the size or weight of the adherend. It is arbitrarily adjusted according to the above. In this invention, when a part of the pressure-sensitive adhesive sheet protrudes, the total area of the pressure-sensitive adhesive sheet that makes point contact or line contact with the adherend (the total projected area of the protruding portions of the pressure-sensitive adhesive sheet) is, for example, When the protruding amount of the adhesive sheet is adjusted to 0.5 mm from the adhesive surface, it is preferably 10% or less with respect to the surface area of the adhesive sheet or the area of the adhesive holding region, and 3% or less. More preferably, it is particularly preferably 2.5% or less. When the total area is adjusted within the above range, regardless of the size or weight of the object to be adhered, the object to be adhered and held on the adhesive sheet can be reliably as desired without being deformed and damaged. Can be removed. On the other hand, the total area is, for example, 0.1% or more with respect to the surface area of the adhesive sheet or the area of the adhesive holding region when the protruding amount of the adhesive sheet is adjusted to 0.5 mm from the adhesive surface. Preferably, it is 0.15% or more, more preferably 0.18% or more. When the total area is adjusted within the above range, the object to be adhered and held on the adhesive sheet can be removed as desired, and the adhesive sheet is prevented from being damaged by the protruding mechanism. The durability of the sheet can be sufficiently maintained. In addition, the said total area can calculate | require the projection area of each part which protruded by the normal method in the state which protruded the adhesive sheet by the predetermined | prescribed protrusion amount, and can obtain | require it as those total.

  When the holding jig includes a plurality of protruding mechanisms and when the protruding mechanism includes a plurality of protruding members, the intervals between the plurality of protruding mechanisms or the intervals between the plurality of protruding members, that is, the protrusions on the adhesive sheet The interval between the selected parts is arbitrarily adjusted according to the adhesive strength of the adhesive sheet and the size or weight of the adherend. In the present invention, the interval is preferably adjusted to be small. For example, the interval can be adjusted to about 5 to 100 mm, and preferably adjusted to about 20 to 50 mm. When the interval is adjusted to the above range, the stress generated when the pressure-sensitive adhesive sheet is peeled from the pressure-sensitive adhesive object against the pressure-sensitive adhesive force when removing the pressure-sensitive adhesive object held on the pressure-sensitive adhesive sheet from the pressure-sensitive adhesive sheet. Even if it is a to-be-adhered thing which can be made very small and the thickness was made very thin as a to-be-adhered object, a deformation | transformation and damage can be prevented effectively.

  The protruding mechanism is formed of a material having a strength capable of protruding the adhesive sheet. Examples of such a material include metals such as carbon steel, stainless steel, aluminum alloy, and nickel alloy, polystyrene, epoxy resin, and polychlorinated chloride. Examples thereof include resins such as vinyl, methacrylic resin, polyimide, polyethylene terephthalate, and polyamide. The protrusion mechanism is preferably formed of stainless steel or aluminum alloy from the viewpoint of workability, operability, strength, and the like. As long as the protrusion mechanism can be formed into a desired shape with the material, the manufacturing method is not particularly limited. For example, various forming methods such as vacuum forming, injection molding, and die forming, rolling, cutting, and grinding. And various metal processing methods such as welding.

  The holding jig according to the present invention has a simple structure including the adhesive sheet and the protruding mechanism, and in the case where the object to be adhered is adhesively held, the object to be adhered to the adhesive surface of the adhesive sheet. Is placed, and the adhesive surface of the adhesive sheet and one surface of the adherend are brought into surface contact. As a result, the adherend can be adhered and held on the holding jig by the adhesive force of the adhesive sheet. On the other hand, when removing the object to be adhered held on the adhesive sheet from the adhesive sheet, the protruding mechanism located on the opposite side of the adhesive surface with respect to the adhesive sheet is placed in the vertical direction of the adhesive sheet. Due to the relative movement of the protruding mechanism, a part of the pressure-sensitive adhesive sheet is relative to the pressure-sensitive adhesive surface 5 in the vertical direction of the pressure-sensitive adhesive sheet 5. To protrude. Then, most of the adhesive sheet is peeled off from the adherend, and the adhesive sheet and the adherend are brought into a point contact state or a line contact state by the protruding portion of the adhesive sheet, and the adhesive sheet and the adherend are covered. The contact area with the adhesive is greatly reduced, and the relative adhesive force acting on the entire adherend (adhesive force acting per unit area of the adherend) is reduced. As a result, the adherend can be removed as desired without being deformed and damaged by the weight of the adherend or by applying a slight force.

  Next, a holding jig 1 according to an embodiment of the present invention will be described with reference to FIGS. As shown in FIGS. 1 to 3, the holding jig 1 includes an adhesive sheet 5, a base 10, and 16 protruding mechanisms 30.

As shown in FIGS. 1 to 3, the adhesive sheet 5 has the functions and / or characteristics described above, and is formed in the shape and dimensions described above. Specifically, the adhesive sheet 5 has a uniform adhesive force across its entire surface, specifically, a uniform adhesive force of 1 to 60 (g / mm ² ) in the measurement method. In addition, the adhesive surface 6 for sticking and holding the adherend 9 is mirror-finished. This adhesive sheet 5 is formed in the shape of a substantially square plate having a thickness of about 1 mm by the silicone rubber.

  As shown in FIGS. 1 to 3, the base body 10 has a substantially square flat plate portion 21, a peripheral wall portion 22 that is formed in a convex shape on the peripheral edge of the flat plate portion 21, and fixes the adhesive sheet 5, and a vent hole. 24. The base 10 fixes the pressure-sensitive adhesive sheet 5 to the peripheral wall portion 22 to support and fix the pressure-sensitive adhesive sheet 5 on one surface of the base 10, thereby enabling elastic deformation of the pressure-sensitive adhesive sheet 5.

  The flat plate portion 21 maintains the strength of the holding jig 1 and enables a protruding mechanism 30 described later to be erected. The thickness of the flat plate portion 21 may be appropriately determined depending on the application. For example, when strong strength such as conveyance of the adherend 9 is not required, it may be about 50 μm or more. When a relatively strong strength such as the above is required, it may be about several mm or more.

  As shown in FIGS. 1 to 3, the peripheral wall portion 22 is formed as a convex frame at the peripheral portion of the substrate 10, and supports the adhesive sheet 5 on the upper portion thereof, and the adhesive sheet 5 and the flat plate portion. An internal space 23 is formed together with 21. The height h of the peripheral wall portion 22 (the length from the bottom surface of the flat plate portion 21 to the tip of the peripheral wall portion 22) takes into account the dimensions of the protruding mechanism 30 erected on the flat plate portion 21, the handleability of the holding jig 1, and the like. And it should just be determined suitably, for example, what is necessary is just about 5 mm or more.

  The base body 10 and the flat plate portion 21 are formed in a substantially square shape, but a plate-like body such as a polygon, such as a rectangle, a pentagon, or a hexagon, a circle, an ellipse, an indefinite shape, or a combination thereof. It can also be formed.

  As shown in FIG. 1, the vent hole 24 is formed in the peripheral wall portion 22, communicates the internal space 23 and the outside of the base body 10, and has a gas in the internal space 23 and outside the internal space 23. To ventilate. The hole diameter of the vent hole 24 is preferably increased within a range in which both high compression efficiency or suction efficiency and the strength of the peripheral wall portion 22 can be achieved, and can be set to about 0.2 to 3 mm, for example. . As shown in FIG. 1, the air holes 24 may be formed in the peripheral wall portion 22 or may be formed in the flat plate portion 21. The vent hole 24 is connected to an external compression device such as a compressor (not shown) or a suction device such as a vacuum pump (not shown).

  The base 10 is formed of a material having a strength capable of maintaining the strength of the holding jig 1. Examples of such a material include metals such as carbon steel, stainless steel, aluminum alloy, and nickel alloy, polystyrene, and epoxy. Examples thereof include resins such as resin, polyvinyl chloride, methacrylic resin, polyimide, polyethylene terephthalate, and polyamide, porous materials such as porous ceramics, glass, and composites thereof. Among these materials, a material having a strength that does not deform even when gas is exhausted from the internal space 23 or gas is inserted into the internal space 23 is preferable, from the viewpoint of workability and operability. Stainless steel or aluminum alloy is preferable, and the substrate 10 is made of stainless steel. When the base 10 is formed of a porous material, it is not necessary to form the ventilation holes 24, but it is preferable to seal the side and bottom surfaces of the base 10.

  If the base | substrate 10 can be formed in a desired shape with the said material, the manufacturing method will not be specifically limited, For example, various shaping | molding methods, such as vacuum forming, injection molding, and die shaping | molding, rolling, cutting, grinding And various metal processing methods such as welding. The air holes 24 may be formed by excavation or the like separately. The base 10 is preferably formed by integrally forming the flat plate portion 21 and the peripheral wall portion 22, but can also be manufactured separately. That is, the flat plate portion 21 and the peripheral wall portion 22 may be separately manufactured, and the peripheral wall portion 22 may be fixed to the peripheral edge portion of the flat plate portion 21. For example, the base body 10 may be formed by forming the peripheral wall portion 22 as a frame having an opening portion and fitting the flat plate portion 21 into the opening portion. You may fix and form to a peripheral part.

  As shown in FIGS. 1 to 3, the protruding mechanism 30 has the functions and / or characteristics described above, and is formed in the shape and dimensions described above. Specifically, the protruding mechanism 30 is located on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5, that is, is erected on the flat plate portion 21 of the base 10 and is located in the internal space 23. Yes.

  Specifically, as shown in FIGS. 1 to 3, the protruding mechanism 30 includes a protruding member 41 erected on the flat plate portion 21 of the base 10 and having a length smaller than the height h of the peripheral wall portion 22. A protective member 44 that surrounds the tip (head 42) of the protruding member 41, protects the adhesive sheet 5 from the protruding member 41, and an urging member 46 that urges the protective member 44 toward the adhesive sheet 5 side. Be prepared.

  More specifically, as shown in FIGS. 2 and 3, the protruding member 41 is formed from a cylindrical body and a bottom surface formed at one end of the body and having a larger outer diameter than the body toward the tip. A conical head 42 formed so that the outer diameter is reduced, and the flat plate portion 21 has a total of 16 at equal intervals so that the axial direction thereof substantially coincides with the vertical direction of the adhesive sheet 5. It is set up individually.

  The length of the projecting member 41 in the axial direction (the total length of the body portion and the head portion 42) only needs to be smaller than the height h of the peripheral wall portion 22. In consideration, it is preferably about 30 to 90% with respect to the height h of the peripheral wall portion 22. The top 43 of the head 42 is chamfered at its tip so that the contact state between the adhesive sheet 5 projected by the projecting mechanism 30 and the adherend 9 is a point contact state having a certain area. It has become.

  As shown in FIG. 2, the protection member 44 surrounds the tip of the protruding member 41, that is, the head 42 in the horizontal direction, and the head 42 and the adhesive sheet 5 come into contact when not intended. And the adhesive sheet 5 is protected from the protruding member 41. As shown in FIGS. 1 to 3, the protection member 44 is formed in a disk shape having a recess 45 that surrounds and stores the head 42. The recess 45 shares an axis with the protection member 44 and protrudes. It has a through hole into which the body portion of the member 41 is inserted. The protection member 44 is adjusted to a size that can surround the head 42.

  The urging member 46 is disposed between the flat plate portion 21 of the base 10 and the protection member 44 and urges the protection member 44 toward the adhesive sheet 5 side. The urging member 46 may be an elastic body that can urge the protective member 44 toward the adhesive sheet 5 in addition to the compression coil spring shown in FIGS. 1 to 3. For example, the urging member 46 may be a rubber member or a conical coil spring. Torsion springs, bamboo shoot springs, leaf springs, ring springs, and the like can be used.

  As shown in FIG. 2, the protrusion mechanism 30 is configured such that the body portion of the protrusion member 41 is inserted into the through hole of the protection member 44 so that the head portion 42 is accommodated in the recess 45, and the flat plate portion of the base body 10. A biasing member 46 is disposed between the protective member 21 and the protective member 44 so as to surround the trunk portion. Therefore, as shown in FIGS. 1 and 2, the protrusion mechanism 30 is configured such that the bottom surface of the head 42 in the protrusion member 41 and the bottom surface of the recess 45 in the protection member 44 come into contact with each other by the biasing member 46. Within the range from the non-contact state to the contact state, the protection member 44 can move back and forth in the axial direction of the protruding member 41. As shown in FIGS. 1 and 2, the protrusion mechanism 30 is configured such that the dimensions of the protrusion member 41 and the protection member 44 and the urging force of the urging member 46 are appropriately adjusted, and the upper surface of the protection member 44 is an adhesive sheet. 5 is formed in the internal space 23 so as to be in contact with the back surface.

  The protruding mechanism 30 configured in this manner can reduce the contact area between the adhesive sheet 5 and the adherend 9 by relatively protruding the protruding member 41, and the adhesive protruding by the protruding member 41. The contact state between the adhesive sheet 5 and the adherend 9 is a point contact state having a certain area. At this time, the total area of the adhesive sheet 5 that makes point contact with the adherend 9 is adjusted to about 0.16 to 0.2% with respect to the surface area of the adhesive sheet 5.

  The protrusion member 41, the protection member 44, and the biasing member 46 in the protrusion mechanism 30 are formed of stainless steel. As long as the protrusion mechanism can be formed into a desired shape by the material, the manufacturing method is not particularly limited, and examples thereof include various metal processing methods such as rolling, cutting, grinding, and welding.

  In the holding jig 1, for example, the pressure-sensitive adhesive sheet 5, the base body 10, the protruding member 41, and the protective member 44 are produced by the above-described method and the like, and the protruding mechanism 30 is formed on the flat plate portion 21 of the base body 10 to have the above-described configuration. Thereafter, the adhesive sheet 5 can be manufactured by being bonded and fixed to the peripheral wall portion 22 with, for example, a thermosetting adhesive. The protruding mechanism 30 may be erected on the flat plate portion 21 of the substrate 10 by a known coupling means such as an adhesive, a combination of a male screw and a female screw.

  Next, the operation of the holding jig 1 will be described. As shown in FIGS. 1 and 2, the holding jig 1 is usually in a state where the upper surface of the protection member 44 is in contact with the back surface of the adhesive sheet 5 by the urging member 46. In this state, the adherend 9 is placed on the adhesive sheet 5 in the case where the adherend 9 is adhered and held when the adherend 9 is manufactured, transported, and / or stored. To do. Then, as shown in FIG. 2, the adherend 9, for example, one surface thereof contacts the adhesive surface 6 of the adhesive sheet 5 in the holding jig 1, and the adhesive sheet 5, that is, the holding jig 1 is contacted. The object to be adhered 9 can be adhered and held as desired.

  In the case of removing the object 9 to be adhered and held on the adhesive sheet 5 after completion of the manufacturing process, after conveyance between manufacturing processes, and / or after storage, etc., vent holes formed in the peripheral wall portion 22 The gas in the internal space 23 is exhausted from 24. Then, the pressure-sensitive adhesive sheet 5 sinks into the internal space 23 while holding the object 9 to be adhered, and pushes down the protective member 44 against the urging force of the urging member 46 toward the flat plate portion 21 side. At this time, the portion of the adhesive sheet 5 that is not in contact with the protective member 44 is recessed toward the flat plate portion 21 side with respect to the upper surface of the protective member 44 to form the recessed portion 7 (see FIG. 3). The portion in contact with the protective member 44 is in a smooth state (a part of the adhesive sheet 5 located on the concave portion 45 may sink into the concave portion 45). Then, when the gas in the internal space 23 is continuously exhausted, as shown in FIG. 3, the depressed portion 7 is further depressed while the adhesive sheet 5 holds the object 9 to be adhered, and the protective member 44 is Further pushed down by the flat plate portion 21 side. Then, since the length of the protruding member 41 in the axial direction is not changed, the head portion 42 of the protruding member 41 appears from the recessed portion 45 of the protective member 44 and the adhesive located on the recessed portion 45 as shown in FIG. The protruding portion 8 is formed on the adhesive sheet 5 by causing the adhesive sheet 5 to protrude relatively from the adhesive surface 6. At this time, the contact state between the adhesive surface 6 of the adhesive sheet 5 and the adherend 9 is released, and the adhesive surface 6 of the adhesive sheet 5 is adhered even if the protruding amount of the protruding portion 8 is slight. It changes from the state which contacted one surface of the thing 9 to the state which contacts a part of to-be-adhered object 9, and the contact state of the protrusion part 8 of the adhesive sheet 5 and the to-be-adhered object 9 has an area of the said range. Since it is in a point contact state, the contact area between the adhesive surface 6 of the adhesive sheet 5 and the adherend 9 is greatly reduced, and the relative adhesive force acting on the entire adherend 9 (adhesive 9 Adhesive force acting per unit area) is reduced, and the adherend 9 cannot be adhered and held with a desired adhesive force. Therefore, the adherend 9 can be removed from the holding jig 1 as desired without being deformed and damaged by the weight of the adherend 9 or by applying a slight force to the adherend 9. it can.

  As described above, the holding jig 1 is formed by the elastic deformation of the adhesive sheet 5 and the cooperating operation of the adhesive sheet 5 and the protruding mechanism 30 caused by adjusting the pressure state of the internal space 23. On the other hand, since a part of the adhesive sheet 5 can be relatively protruded from the adhesive surface 6, it is possible to hold the object 9 to be bonded with sufficient adhesive holding force. Can be removed as desired. Moreover, since the holding jig 1 includes the adhesive sheet 5 having the adhesive surface 6 having a uniform adhesive force and the protection member 44, the adhesive sheet 5, that is, the holding jig 1 is provided. Has extremely high durability.

  The holding jig 1 can be variously modified within a range in which the object of the present invention can be achieved. For example, the protruding mechanism 30 may not include a protection member and a biasing member. That is, the holding jig includes an adhesive sheet and a protruding mechanism having a protruding member. In this case, the adhesive sheet is not protected from the head by the protection member, but can be protected from the head by means such as shortening the length of the protruding member in the axial direction.

  In addition, the holding jig 1 includes 16 protruding mechanisms 30, but in the present invention, the holding jig is not limited to 16, and may include one protruding mechanism, or two or more. May be provided.

  Furthermore, although the protection member 44 is formed in a disk shape, in this invention, as shown in FIG. 4, for example, the protection member surrounds and stores the head 42 of the protruding member 41. An annular member or the like having a disk body 47 having a concave portion 45 to be shared, and a through-hole portion 48 that shares an axis with the disk body 47 and extends from the disk body 47 in the axial direction may be used.

  Next, a holding jig 2 which is another embodiment of the present invention will be described with reference to FIGS. As shown in FIGS. 5 and 6, the holding jig 2 includes an adhesive sheet 5, a base 11, and a protruding mechanism 31. The pressure-sensitive adhesive sheet 5 is formed in the same manner as the pressure-sensitive adhesive sheet 5 of the holding jig 1, and the peripheral edge of the pressure-sensitive adhesive sheet 5 is fixed to a substrate 11 to be described later by adhesive fixing with a thermosetting adhesive or the like. Yes.

  As shown in FIGS. 5 and 6, the base 11 is formed in a substantially square flat plate shape having a through hole 25 penetrating in the thickness direction. The base 11 maintains the strength of the holding jig 1, fixes the adhesive sheet 5 on one surface thereof, and arranges the protruding mechanism 31 on the other surface side, so that the elasticity of the adhesive sheet 5 is maintained. Allows deformation. The thickness of the base 11 is adjusted in the same manner as the flat plate portion 21 of the holding jig 1. The through holes 25 penetrate in the thickness direction of the base 11 with a substantially uniform hole diameter in the axial direction, and a total of 16 through holes 25 are formed in the base 11 at equal intervals. The diameter of the through hole 25 is adjusted so that a head 52 of a projecting member 51 to be described later can move forward and backward in the axial direction in the through hole 25. Note that a movable mechanism insertion hole (not shown) into which a bolt 55 of the movable mechanism 34 described later can be inserted is formed at each corner of the base 11. The base 11 is formed of a material having a strength capable of maintaining the strength of the holding jig 2 and the manufacturing method thereof is not particularly limited as long as the base 11 can be formed in a desired shape. As such a material and a manufacturing method, the material and manufacturing method which were illustrated by the base | substrate 10 of the holding jig 1 are mentioned.

  As shown in FIGS. 5 and 6, the protruding mechanism 31 has the functions and / or characteristics described above, and is formed in the shape and dimensions described above. Specifically, the protruding mechanism 31 is an operation in which a protruding member 51 that is positioned on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5 and has a length larger than the thickness of the base 11 is erected. The operation member 54 is configured to be mounted on the base 11 so that the protruding member 51 can move back and forth in the through hole 25 in the axial direction of the through hole 25.

  As shown in FIGS. 5 and 6, the protruding member 51 is formed in the same manner as the protruding member 41 of the holding jig 1, but its axial length (the total length of the trunk portion and the head 52). Is set larger than the thickness of the substrate 11. The length in the axial direction of the projecting member 51 only needs to be larger than the thickness of the base body 11, but considering the adhesive holding work and the removal work of the adherend 9, it is about 120 to 300% with respect to the thickness of the base body 11. Preferably there is. As with the protruding mechanism 30 of the holding jig 1, the protruding member 51 is arranged in 4 rows × 4 width in the same manner as the protruding mechanism 30 of the holding jig 1 so that the axial direction of the protruding member 51 substantially coincides with the vertical direction of the adhesive sheet 5. A total of 16 columns are erected at regular intervals in the array of columns.

  As shown in FIGS. 5 and 6, the operation member 54 is provided with 16 projecting members 51 erected so that the 16 projecting members 51 can be operated simultaneously. A movable mechanism through hole (not shown) through which the bolt 55 of the movable mechanism 34 can be penetrated is formed at each corner of the operation member 54 (a position corresponding to the movable mechanism insertion hole). The operation member 54 is formed of the same material as that of the base 11 and by the same manufacturing method. Specifically, the operation member 54 is made of stainless steel and has the same shape as the base 11.

  The protruding mechanism 31 is attached to the base body 11 by a movable mechanism 34. As shown in FIGS. 5 and 6, the movable mechanism 34 is inserted into a movable mechanism insertion hole formed at a corner of one surface of the base 11, and is suspended from the surface of the base 11, thereby operating the operation member 54. The bolt 55 penetrating the (moving mechanism through hole), the nut 56 screwed into the bolt 55, the bolt 55 is disposed between the base 11 and the operation member 54, and the operation member 54 is urged. And an urging member 57. The movable mechanism 34 enables the operation member 54 to move forward and backward within a predetermined range. The bolt 55 and the nut 56 are made of the same material as the base 11 and have arbitrary dimensions. The urging member 57 is a compression coil spring like the urging member 46 of the holding jig 1, but may be an elastic body as described above.

  As shown in FIGS. 5 and 6, in the movable mechanism 34, the protruding mechanism 31 is positioned on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5, and the head 52 of the protruding member 51 penetrates the base body 11. The bolt 55 that is disposed in the hole 25 and that is surrounded by the biasing member 57 is passed through the movable mechanism through-hole of the operation member 54 so that the operation member 54 and the base body 11 are substantially parallel to each other. Are assembled by screwing the tips of the nuts with nuts 55.

  As shown in FIGS. 5 and 6, the protruding mechanism 31 is positioned on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5 by the movable mechanism 34 or the like, and the head 52 of the protruding member 51 is the base 11. It arrange | positions in the through-hole 25 of this. Therefore, the projecting mechanism 31 causes the operation member 54 of the projecting member 51 to move within a predetermined movable range by the movable mechanism 34 or the like against the urging force of the urging member 57 or according to the urging force of the urging member 57. Accordingly, the projecting member 51 can be moved back and forth in the axial direction in the through-hole 25 by operating the operating member 54 back and forth in the axial direction of the projecting member 51.

  The protruding mechanism 31 configured as described above causes the protruding member 51 to advance in the axial direction against the urging force of the urging member 57, thereby causing a part of the adhesive sheet 5 to protrude, The contact area with the adherend 9 can be reduced, and the contact state between the adhesive sheet 5 protruding by the protruding member 51 and the adherend 9 is a point contact state having a certain area. At this time, the total area of the pressure-sensitive adhesive sheet 5 in point contact with the adherend 9 is adjusted to 0.16 to 0.2% with respect to the surface area of the pressure-sensitive adhesive sheet 5.

  Next, the operation of the holding jig 2 will be described. As shown in FIG. 5, the holding jig 2 is normally positioned in the through hole 25 by the urging member 57 and is not in contact with the back surface of the adhesive sheet 5. Is in a state. In this state, when the adherend 9 is to be adhesively held when the adherend 9 is manufactured, transported and / or stored, the holding jig 2 is the same as the holding jig 1. It is possible to hold the adherend 9 as desired.

  When removing the adherend to be adhered 9 held on the adhesive sheet 5 after completion of the manufacturing process, after transportation between the manufacturing processes, and / or after storage, the operation member 54 is manually or automatically removed. The projection member 51 is pressed in the axial direction against the urging force of the urging member 57. Then, the top 53 of the protruding member 51 comes into contact with the back surface of the adhesive sheet 5. Further, when the operation member 54 is pressed, the length of the protruding member 51 in the axial direction is adjusted to be longer than the thickness of the base body 11, so that the top 53 of the protruding member 51 is formed on the base body 11 as shown in FIG. 6. The pressure-sensitive adhesive sheet 5 that emerges from the through-hole 25 and is located on the through-hole 25 is protruded in a direction perpendicular to the pressure-sensitive adhesive sheet 5 with respect to the pressure-sensitive adhesive surface 6 of the pressure-sensitive adhesive sheet 5. 8 is formed. At this time, the contact state between the back surface of the adhesive sheet 5 and the adherend 9 is released, and the adhesive sheet 5 comes into contact with one surface of the adherend 9 even if the protruding amount of the protrusion 8 is slight. Since it changes from the state which has been in contact with a part of the adherend 9, the contact state between the protruding portion 8 of the adhesive sheet 5 and the adherend 9 is a point contact state having an area in the above range. The contact area between the adhesive sheet 5 and the adherend 9 is greatly reduced, and the relative adhesive force acting on the entire adherend 9 (adhesive force per unit area of the adherend 9) is small. As a result, it becomes impossible to adhere and hold the adherend 9 with a desired adhesive force. Therefore, the adherend 9 can be removed from the holding jig 2 as desired without being deformed and damaged by the weight of the adherend 9 or by applying a slight force to the adherend 9. it can.

  Thus, the holding jig 2 keeps the pressure-sensitive adhesive sheet 5 smooth by the protrusion of the protrusion mechanism 31 and the elastic deformation of the pressure-sensitive adhesive sheet 5 caused by the forward / backward operation of the operation member 54. Since a part of the sheet 5 can be protruded from the adhesive surface 6, the adherend 9 can be adhered and held with a sufficient adhesion holding force and can be removed as desired. Moreover, since the holding jig 2 includes the adhesive sheet 5 having the adhesive surface 6 having a uniform adhesive force, the adhesive sheet 5, that is, the holding jig 2 has extremely high durability. . Furthermore, since the holding jig 2 causes the protruding mechanism 31 to function due to a mechanical configuration, for example, the holding jig 2 is used in an environment other than a normal pressure environment such as a reduced pressure environment, a vacuum environment, or a pressurized environment. You can also.

  The holding jig 2 can be variously modified within a range in which the object of the present invention can be achieved. For example, the operation member 54 stands up with all the protruding members 51 and allows all the protruding members 51 to stand. Although it is possible to operate simultaneously, in the present invention, the operating member may stand up each protruding member independently, and a plurality of protruding members, for example, a plurality of protruding members aligned in one direction are arranged in a row. Each may be erected independently. As described above, when the protruding member is erected, a plurality of objects to be adhered can be held, and each object to be adhered can be removed at different times. Further, although the operation member 54 is mounted substantially parallel to the base body 11, in the present invention, the operation member may be mounted on the base body at an angle with a certain angle. For example, the operation member may be mounted on the base 11 without adopting the movable member 34, one end of which is rotatably fixed to one end of the base 11 by a biasing member or the like.

  Further, the protruding mechanism 31 is arranged so that the head 52 of the protruding member 51 is positioned in the through hole 25 of the base body 11. In this invention, the protruding mechanism is configured such that the head of the protruding member is the base of the base body. You may arrange | position so that it may be located below. The number of projecting members erected on the operation member is not limited as in the holding jig 1.

  Further, the holding jig 2 is a movable restricting means, for example, a rod-like member having the same length as the interval between the base and the operating member, so that the operating member 54 does not move forward and backward in the axial direction of the protruding member 51. A safety device mounted between the base and the operating member, and a bolt of the movable mechanism is provided with a locking piece that protrudes from the outer peripheral surface, and the operating member is locked to the locking piece to move the operating member. You may provide the safety device etc. which regulate.

  Next, a holding jig 3 according to another embodiment of the present invention will be described with reference to FIGS. As shown in FIGS. 7 to 9, the holding jig 3 includes the adhesive sheet 5, the base 12, and the protruding mechanism 32. The adhesive sheet 5 is formed in the same manner as the adhesive sheet 5 of the holding jig 1.

  As shown in FIGS. 7 to 9, the base 12 has a substantially square flat plate portion 21, a peripheral wall portion 22 that is formed in a convex shape on the peripheral edge of the flat plate portion 21, and fixes the adhesive sheet 5, and a flat plate portion. And a through hole 25 penetrating in the thickness direction. The base 12 fixes the pressure-sensitive adhesive sheet 5 to the peripheral wall portion 22 to support and fix the pressure-sensitive adhesive sheet 5 on one surface of the base 12, thereby enabling elastic deformation of the pressure-sensitive adhesive sheet 5. The flat plate portion 21 maintains the strength of the holding jig 1. The thickness of the flat plate portion 21 is adjusted in the same manner as the flat plate portion 21 of the holding jig 1. The peripheral wall portion 22 is formed in the same manner as the peripheral wall portion 22 of the holding jig 1, and supports the adhesive sheet 5 on the upper portion thereof, and forms an internal space 26 together with the adhesive sheet 5 and the flat plate portion 21. The height h of the peripheral wall portion 22 (the length from the bottom surface of the flat plate portion 21 to the tip of the peripheral wall portion 22) may be determined as appropriate. As shown in FIG. 7, the through-hole 25 penetrates in the thickness direction of the flat plate portion 21, extends in one direction of the flat plate portion 21 (vertical direction in FIG. 7), and is equidistant from the flat plate portion 21. A total of four are formed. The width and length of the through-hole 25 are adjusted to a width and length that allow a head 62 of a protruding member 61 (described later) to move forward and backward in the axial direction in the through-hole 25. Note that movable mechanism insertion holes (not shown) into which bolts 55 of the movable mechanism 34 to be described later can be inserted are formed in the respective corners of the base 12. The base 12 is formed of a material having a strength capable of maintaining the strength of the holding jig 3, and examples of such a material include the materials exemplified for the base 10 of the holding jig 1. The base 12 is formed of the above material in the same manner as the holding jig 1.

  As shown in FIGS. 7 to 9, the protruding mechanism 32 has the functions and / or characteristics described above, and is formed in the shape and dimensions described above. Specifically, the protruding mechanism 32 is provided with a protruding member 61 that is positioned on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5 and that has a length larger than the height h of the peripheral wall portion 22. The operating member 64 is mounted on the base 12 so that the protruding member 61 is positioned in the internal space 26.

  As shown in FIGS. 7 to 9, the protruding member 61 is formed in a prism (wall shape) having a length larger than the height h of the peripheral wall portion 22 and has a tapered head portion 62. . The height of the projecting member 61 may be any length that is greater than the height of the peripheral wall portion 22, but considering the adhesive holding operation and removal operation of the adherend 9, the height of the protruding member 61 is 120 with respect to the height h of the peripheral wall portion 22. It is preferably about ˜300%. A total of four protruding members 61 are erected on the operation member 64 at equal intervals so that the height direction of the protruding member 61 and the vertical direction of the adhesive sheet 5 substantially coincide. The protruding member 61 is made of stainless steel, and is basically formed in the same manner as the protruding member 51 of the holding jig 2 except for its height and shape.

  As shown in FIGS. 7 to 9, the operation member 64 is provided with a total of four protruding members 61 standing at equal intervals so that the four protruding members 64 can be operated simultaneously. The operation member 64 is made of stainless steel and is formed in the same manner as the operation member 54 of the holding jig 2.

  The protruding mechanism 32 is attached to the base 12 by a movable mechanism 34. The movable mechanism 34 is formed in the same manner as the movable mechanism 34 of the holding jig 2. That is, in the movable mechanism 34, as shown in FIGS. 7 to 9, the protruding mechanism 32 is located on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5, and the head 62 of the protruding member 61 is an internal space. 26 and the bolt 55 surrounded by the urging member 57 is passed through the movable mechanism through-hole of the operation member 64 so that the operation member 64 and the base 12 are substantially parallel to each other. The tip is screwed with a nut 55 and assembled.

  7-9, the protrusion mechanism 32 is located on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5 by the movable mechanism 34 or the like, and the head 62 of the protrusion member 61 is an internal space. 26 is arranged. Therefore, the projecting mechanism 32 causes the operating member 64 of the projecting member 61 to move within a predetermined movable range by the movable mechanism 34 or the like against the urging force of the urging member 57 or according to the urging force of the urging member 57. Accordingly, the projecting member 61 can be moved back and forth in the axial direction in the through hole 25 by operating the operation member 64 back and forth in the axial direction of the projecting member 61.

  The protruding mechanism 32 configured as described above causes the protruding member 61 to advance in the axial direction against the urging force of the urging member 57, thereby causing a part of the adhesive sheet 5 to protrude, The contact area with the adherend 9 can be reduced, and the contact state between the adhesive sheet 5 protruding by the protruding member 61 and the adherend 9 is a line contact state having a certain area. At this time, the total area of the adhesive sheet 5 in line contact with the adherend 9 is adjusted to 1.9 to 2.3% with respect to the surface area of the adhesive sheet 5.

  Next, the operation of the holding jig 3 will be described. As shown in FIG. 7 and FIG. 8, the holding jig 3 is usually placed on the back surface of the adhesive sheet 5 by the urging member 57 so that the head 62 of the protruding member 61 is located in the internal space 26. You are not in contact. In this state, when the adherend 9 is to be adhesively held when the adherend 9 is manufactured, transported and / or stored, the holding jig 3 is the same as the holding jig 1. It is possible to hold the adherend 9 as desired.

  When removing the adherend to be adhered 9 held on the adhesive sheet 5 after completion of the manufacturing process, after transportation between the manufacturing processes, and / or after storage, the operation member 64 is manually or automatically removed. The projection member 61 is pressed in the axial direction against the biasing force of the biasing member 57. Then, the top portion 63 of the protruding member 61 comes into contact with the back surface of the adhesive sheet 5. Further, when the operating member 64 is pressed, the length of the protruding member 61 in the axial direction is adjusted to be higher than the height h of the peripheral wall portion 22, and therefore, as shown in FIG. 9, the protruding member 61 of the internal space 26. The adhesive sheet 5 positioned above is protruded in the vertical direction of the adhesive sheet 5 with respect to the adhesive surface 6 of the adhesive sheet 5, and the protruding portion 8 is formed on the adhesive sheet 5. At this time, the contact state between the back surface of the adhesive sheet 5 and the adherend 9 is released, and the adhesive sheet 5 comes into contact with one surface of the adherend 9 even if the protruding amount of the protrusion 8 is slight. Since the contact state between the protruding portion 8 of the adhesive sheet 5 and the adherend 9 becomes a line contact state having the area in the above range, the state changes from a state where it is in contact with a part of the adherend 9. The contact area between the adhesive sheet 5 and the adherend 9 is greatly reduced, and the relative adhesive force acting on the entire adherend 9 (adhesive force per unit area of the adherend 9) is small. As a result, it becomes impossible to adhere and hold the adherend 9 with a desired adhesive force. Therefore, the adherend 9 can be removed from the holding jig 3 as desired without being deformed and damaged by the weight of the adherend 9 or by applying a slight force to the adherend 9. it can.

  Thus, the holding jig 3 keeps the pressure-sensitive adhesive sheet 5 smooth by the protrusion of the protrusion mechanism 32 and the elastic deformation of the pressure-sensitive adhesive sheet 5 caused by the forward / backward operation of the operation member 64. Since a part of the sheet 5 can be protruded from the adhesive surface 6, the adherend 9 can be adhered and held with a sufficient adhesion holding force and can be removed as desired. In addition, since the holding jig 3 includes the adhesive sheet 5 having the adhesive surface 6 having a uniform adhesive force, the adhesive sheet 5, that is, the holding jig 3 has extremely high durability. . Furthermore, since the holding jig 3 causes the protruding mechanism 32 to function according to the mechanical configuration, for example, the holding jig 3 is used in an environment other than a normal pressure environment such as a reduced pressure environment, a vacuum environment, or a pressurized environment. You can also.

  The holding jig 3 can be variously modified within a range in which the object of the present invention can be achieved. For example, similarly to the holding jig 2, each protruding member is erected independently on the operation member. Alternatively, a plurality of protruding members may be erected independently for each row, and the operating member is inclined and attached to the base body with a certain angle with respect to the base body. May be.

  Further, although the protruding mechanism 32 is arranged so that the protruding member 61 is located in the internal space 26, in the present invention, the protruding mechanism 61 may be arranged so as to be positioned below the base body 12. Good. The number of projecting members erected on the operation member is not limited as in the holding jig 1.

  Further, like the holding jig 2, the holding jig 3 may be provided with a movable restricting means for restricting the unintended forward / backward movement of the operation member 64, and the operation member has a certain angle with respect to the base. Then, it may be inclined and attached to the substrate.

  Next, a holding jig 4 which is still another embodiment of the present invention will be described with reference to FIGS. As shown in FIGS. 10 and 11, the holding jig 4 includes an adhesive sheet 5, a base 13, and a protruding mechanism 33. The pressure-sensitive adhesive sheet 5 is formed in the same manner as the pressure-sensitive adhesive sheet 5 of the holding jig 1, and the peripheral edge of the pressure-sensitive adhesive sheet 5 is fixed to a substrate 11 to be described later by adhesive fixing with a thermosetting adhesive or the like. Yes.

  As shown in FIGS. 10 and 11, the base 13 is formed in a substantially square flat plate portion 21, a peripheral wall portion 22 that is formed in a convex shape on the peripheral portion of the flat plate portion 21, and fixes a support member described later, and a flat plate portion. And a through hole 25 penetrating in the thickness direction. The substrate 13 fixes the adhesive sheet 5 on one surface thereof, and enables the elastic deformation of the adhesive sheet 5 by the protruding mechanism 33 arranged on the other surface side. The flat plate portion 21 maintains the strength of the holding jig 1. The thickness of the flat plate portion 21 is adjusted in the same manner as the flat plate portion 21 of the holding jig 1. As shown in FIGS. 10 and 11, the peripheral wall portion 22 is formed as a convex frame on the peripheral edge portion of the base 13 so as to hang down from the flat plate portion 21, and a support member 75 is fixed to the lower portion thereof. The internal space 28 is formed together with the portion 21 and the support member 75. The height h of the peripheral wall portion 22 (the length from the upper surface of the flat plate portion 21 to the tip of the peripheral wall portion 22) may be appropriately determined within a range in which an operation member 74 described later can be accommodated in the internal space 28. As shown in FIGS. 10 and 11, the through-holes 25 penetrate in the thickness direction of the flat plate portion 21, and in the same manner as the base body 11 of the holding jig 2, the total number of the through holes 25 is 4 rows × 4 rows. Sixteen pieces are formed on the flat plate portion 21 at equal intervals. The diameter of the through hole 25 is adjusted to a size that allows a head 72 of a protruding member 71 (described later) to move forward and backward in the axial direction in the through hole 25. The base 13 is formed of a material having a strength capable of maintaining the strength of the holding jig 4, and examples of such a material include the materials exemplified for the base 10 of the holding jig 1. The base 13 is formed of the above material in the same manner as the holding jig 1.

  As shown in FIGS. 10 and 11, the protruding mechanism 33 has the functions and / or characteristics described above, and is formed in the shape and dimensions described above. Specifically, the protruding mechanism 33 is located on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5 and is provided with a protruding member 71 having a length larger than the thickness of the flat plate portion 21. The operation member 74 has an operation member 74 that is housed in the internal space 28 so that the projecting member 71 can move back and forth in the axial direction of the through hole 25 in the through hole 25.

  As shown in FIGS. 10 and 11, the protruding member 71 is formed in a cylindrical shape and has a tapered head portion 72. Although the height of the protrusion member 71 should just be a length larger than the thickness of the flat plate part 21, if the adhesion holding work and removal work of the to-be-adhered thing 9 are considered, it will be 120- with respect to the thickness of the flat plate part 21. It is preferably about 300%. As with the protruding mechanism 30 of the holding jig 1, the protruding member 71 is arranged in 4 columns × horizontal in the operation member 74 so that the height direction of the protruding member 71 and the vertical direction of the adhesive sheet 5 substantially coincide with each other. A total of 16 pieces are erected at equal intervals in a four-row arrangement. The protruding member 71 is made of stainless steel.

  As shown in FIGS. 10 and 11, the operation member 74 is provided with 16 projecting members 71 erected so that the 16 projecting members 71 can be operated simultaneously. The operation member 74 is provided with a mounting hole for mounting an operation rod 78 described later on the surface opposite to the surface on which the protruding member 71 is erected. The operation member 74 is formed of the same material as that of the base 13 and by the same manufacturing method. Specifically, the operation member 74 is made of stainless steel and has the same shape as the flat plate portion 21 of the base 13.

  As shown in FIGS. 10 and 11, the protruding mechanism 33 is accommodated in the internal space 28 by the movable mechanism 35. The movable mechanism 35 is fixed to the lower portion of the peripheral wall portion 27, supports the operation member 74, and restricts the movable range of the operation member 74 within the internal space 28, between the flat plate portion 21 and the operation member 74. And a biasing member 57 that biases the operation member 74 toward the support member 75, and is fixed to the operation member 74 through the support member 75, and the operation member 74 is against the biasing force of the biasing member 57. An operation rod 78 that is pushed out to the flat plate portion 21 side, a rod protection member 77 that protects the operation rod 78, and a rod pressing member 79 that presses the operation rod 78 toward the flat plate portion 21 are provided. The movable mechanism 35 enables the protruding mechanism 33 to move forward and backward within the internal space 28.

  As shown in FIGS. 10 and 11, the support member 75 is formed in substantially the same shape as the flat plate portion 21, and a rod through hole 76 through which an operation rod 78 described later is penetrated is formed in a substantially central portion thereof. . The urging member 57 only needs to be able to urge the operation member 74 toward the support member 75, and the holding jig 4 employs a compression coil spring as in the urging member 46 of the holding jig 1. The elastic body described above may be employed. As shown in FIGS. 10 and 11, the operation rod 78 is formed in a cylindrical shape having a tapered end portion. The other end of the operation rod 78 passes through the rod through hole 76 of the support member 75 and is fixed to the mounting hole of the operation member 74. As shown in FIGS. 10 and 11, the rod protection member 77 is attached to the support member 75 so as to hang down from the periphery of the rod through hole 76. The rod protection member 77 is formed in a cylindrical shape having a tube through hole penetrating in the axial direction, and surrounds the operation rod 78 with the through hole to protect the operation rod 78. The length of the rod protection member 77 in the axial direction may be adjusted so that a rod pressing member 79 described later can press the operation rod 78 toward the flat plate portion 21 side. The rod pressing member 79 is formed in a plate-like body having one end portion in the vicinity of the free end of the rod protection member 77, rotatably supported by the rod pressing member 79, and the other end being a free end. In FIG. 10, the rod pressing member 79 is in contact with the operating rod 78, but the operating rod 78 and the rod pressing member 79 may or may not be in contact. The support member 75, the rod protection member 77, the operation rod 78, and the rod pressing member 79 are each formed of the same material as that of the base 13 and the same manufacturing method.

  As shown in FIGS. 10 and 11, in the movable mechanism 35, the protruding mechanism 33 is positioned on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5, and the head 72 of the protruding member 71 penetrates the base body 13. The support member 75, the urging member 57, the rod protection member 77, the operation rod 78, and the rod pressing member 79 are arranged in the hole 25 and in a state where the operation member 44 and the base 13 are substantially parallel to each other. ing.

  As shown in FIGS. 10 and 11, the protruding mechanism 33 is located on the opposite side of the adhesive surface 6 with respect to the adhesive sheet 5 by the movable mechanism 35 or the like, and is disposed in the internal space 28 and protrudes. A head 72 of the member 71 is arranged in the through hole 25 of the base 13. Therefore, the projecting mechanism 33 has the operation member 74 of the projecting member 71 in the internal space 28 by the movable mechanism 35 or the like against the urging force of the urging member 57 or according to the urging force of the urging member 57. It is possible to move forward and backward in the axial direction. Therefore, by operating the rod pressing member 79, the operation member 74 can be moved back and forth in the axial direction of the projecting member 71 via the operation rod 78. As a result, the projecting member 71 moves through the through hole 25. It can move back and forth in the axial direction.

  The protruding mechanism 33 configured as described above causes the protruding member 71 to advance in the axial direction against the urging force of the urging member 57, thereby causing a part of the adhesive sheet 5 to protrude and the adhesive sheet 5. The contact area between the adhesive sheet 5 and the adherend 9 can be reduced, and the contact state between the adhesive sheet 5 protruding by the protruding member 71 and the adherend 9 is a point contact state having a certain area. At this time, the total area of the pressure-sensitive adhesive sheet 5 in point contact with the adherend 9 is adjusted to 0.16 to 0.2% with respect to the surface area of the pressure-sensitive adhesive sheet 5.

  Next, the operation of the holding jig 4 will be described. As shown in FIG. 10, the holding jig 4 is normally positioned in the through hole 25 by the urging member 57 and is not in contact with the back surface of the adhesive sheet 5. Is in a state. In this state, when the adherend 9 is to be adhesively held when the adherend 9 is manufactured, transported and / or stored, the holding jig 2 is the same as the holding jig 1. It is possible to hold the adherend 9 as desired.

  In the case of removing the adherend to be adhered 9 held on the adhesive sheet 5 after completion of the manufacturing process, after conveyance between the manufacturing processes, and / or after storage, the rod pressing member 79 is manually or automatically. Is rotated toward the operating rod 78 side and the operating rod 78 is pressed, whereby the operating member 74 to which the operating rod 78 is attached is pressed against the urging force of the urging member 57 in the axial direction of the protruding member 71. Then, the top 73 of the protruding member 71 comes into contact with the back surface of the adhesive sheet 5. Further, when the rod pressing member 79 is rotated in the same direction, the operation member 54 is further pressed in the same direction, and the length of the protruding member 71 in the axial direction is adjusted to be longer than the thickness of the flat plate portion 13. As shown in FIG. 5, the top 73 of the protruding member 71 emerges from the through hole 25 of the base 13, and the adhesive sheet 5 located on the through hole 25 is adhesive to the adhesive surface 6 of the adhesive sheet 5. The protruding portion 8 is formed on the adhesive sheet 5 by protruding in the vertical direction of the sheet 5. At this time, the contact state between the back surface of the adhesive sheet 5 and the adherend 9 is released, and the adhesive sheet 5 comes into contact with one surface of the adherend 9 even if the protruding amount of the protrusion 8 is slight. Since it changes from the state which has been in contact with a part of the adherend 9, the contact state between the protruding portion 8 of the adhesive sheet 5 and the adherend 9 is a point contact state having an area in the above range. The contact area between the adhesive sheet 5 and the adherend 9 is greatly reduced, and the relative adhesive force acting on the entire adherend 9 (adhesive force per unit area of the adherend 9) is small. As a result, it becomes impossible to adhere and hold the adherend 9 with a desired adhesive force. Therefore, the adherend 9 can be removed from the holding jig 2 as desired without being deformed and damaged by the weight of the adherend 9 or by applying a slight force to the adherend 9. it can.

  Thus, the holding jig 4 keeps the pressure-sensitive adhesive sheet 5 smooth by the protrusion of the protrusion mechanism 33 and the elastic deformation of the pressure-sensitive adhesive sheet 5 caused by the forward / backward operation of the operation member 74, and on the other hand, the pressure-sensitive adhesive Since a part of the sheet 5 can be protruded from the adhesive surface 6, the adherend 9 can be adhered and held with a sufficient adhesion holding force and can be removed as desired. Further, since the holding jig 4 includes the adhesive sheet 5 having the adhesive surface 6 having a uniform adhesive force, the adhesive sheet 5, that is, the holding jig 4 has extremely high durability. . Furthermore, since the holding jig 4 causes the protruding mechanism 33 to function due to a mechanical configuration, for example, the holding jig 4 is used in an environment other than the normal pressure environment such as a reduced pressure environment, a vacuum environment, or a pressurized environment. You can also.

  The holding jig 4 can be variously modified within a range in which the object of the present invention can be achieved. For example, similarly to the holding jig 2, each protruding member is erected independently on the operation member. Alternatively, the plurality of projecting members may be erected independently for each row.

  Further, the protruding mechanism 33 is arranged so that the head 72 of the protruding member 71 is positioned in the through hole 25 of the base body 13. In this invention, the protruding mechanism is configured such that the head of the protruding member is the base of the base body. You may arrange | position so that it may be located below. The number of projecting members erected on the operation member is not limited as in the holding jig 1.

  Further, although the movable member 35 includes the urging member 57 and the rod protection member, in the present invention, the movable member may not include the urging member and / or the rod protection member. Further, although the support member 75 is formed in substantially the same shape as the peripheral wall portion 27, in this invention, the support member may be in a shape capable of supporting the operation member. For example, the inner surface or the lower portion of the peripheral wall portion It may be a plurality of convex pieces that are fixed to each other, or may be a plurality of rod-like bodies that protrude from the inner surface of the peripheral wall portion, pins, or the like.

FIG. 1 is a schematic perspective view showing a holding jig according to an embodiment of the present invention. FIG. 2 is a schematic partial cross-sectional view taken along the line AA in FIG. FIG. 3 is a schematic partial cross-sectional view along the line AA in FIG. 1 showing a state in which a part of the adhesive sheet is protruded. FIG. 4 is a schematic cross-sectional view showing another example of the protective member. FIG. 5 is a schematic partial cross-sectional view showing a state in which an object to be adhered is adhesively held on a holding jig according to another embodiment of the present invention. FIG. 6 is a schematic partial sectional view showing a state in which a part of an adhesive sheet is protruded in a holding jig which is another embodiment of the present invention. FIG. 7 is a schematic perspective view showing a holding jig according to another embodiment of the present invention. FIG. 8 is a schematic partial cross-sectional view taken along the line BB in FIG. FIG. 9 is a schematic partial cross-sectional view along the line BB in FIG. 7 showing a state in which a part of the adhesive sheet is protruded. FIG. 10 is a schematic partial cross-sectional view showing a state in which an object to be adhered is adhered and held on a holding jig which is still another embodiment of the present invention. FIG. 11 is a schematic partial cross-sectional view showing a state in which a part of an adhesive sheet is protruded in a holding jig which is still another embodiment of the present invention.

Explanation of symbols

1, 2, 3, 4 Holding jig 5 Adhesive sheet 6 Adhesive surface 7 Depressed part 8 Protruding part 9 Object to be adhered (silicon wafer)
10, 11, 12, 13 Base 21 Flat plate part 22, 27 Peripheral wall parts 23, 26, 28 Internal space 24, 25 Through holes 30, 31, 32, 33 Projecting mechanism 34, 35 Movable mechanism 41, 51, 61, 71 Projecting Members 42, 52, 62, 72 Heads 43, 53, 63, 73 Top 44 Protective member 45 Recess 46 Energizing member 47 Disc body 48 Passed through parts 54, 64, 74 Operating member 55 Bolt 56 Nut 57 Energizing member 75 Support member 76 Rod through hole 77 Rod protection member 78 Operation rod 79 Rod pressing member

Claims (6)

A pressure-sensitive adhesive sheet that is adhesively fixed to the substrate and capable of sticking and holding a thin plate on the surface;
Formed Ri and a protrusion mechanism that is disposed on the opposite side of the surface relative to the adhesive sheet,
The projection mechanism, the relative portions of the adhesive sheet the adhesive sheet to the adhesive retained the adherend object from the opposite side of the surface relative to the adhesive sheet when removed from the adhesive sheet holding jig having a plurality of protruding members which protrude. The substrate is then closed and the flat plate portion is formed in a convex shape in the periphery of said plate, said peripheral wall portion of the adhesive sheet is bonded and fixed, and a vent,
Each of the plurality of protrusion members, are erected on said plate, the holding jig according to claim 1 having a height smaller length than the peripheral wall portion. Each of the plurality of the protruding member, surrounds the tips of their, provided with a protective member for protecting said adhesive sheet from said projecting member, and a biasing member for biasing the protective member to the adhesive sheet side The holding jig according to claim 2. The base has a plurality of through holes penetrating in the thickness direction,
The projection mechanism has an operating member that each of the plurality of the protruding member is erected having a length greater than the thickness of the substrate, the operating member said plurality of protrusion members is the through-hole The holding jig according to claim 1, wherein the holding jig is attached to the base body so as to be capable of moving back and forth in the axial direction of the through hole. The base has a flat plate portion having a plurality of the through-holes, and a peripheral wall portion that is formed in a convex shape on a peripheral portion of the flat plate portion, and adheres and fixes the adhesive sheet.
The holding jig according to claim 4, wherein each of the plurality of protruding members has a length greater than a height of the peripheral wall portion. The said base | substrate has a flat plate part which has the said several through-hole, and a surrounding wall part which is formed in convex shape so that it may hang down to the peripheral part of the said flat plate part, and fixes the supporting member which supports the said operation member. 4. A holding jig according to 4.

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