JP4957919B2 - Magnetic property inspection method and apparatus - Google Patents

Description

  The present invention relates to a method and apparatus for inspecting magnetic characteristics of a magnetic field generating element such as a thin film magnetic head element used in a hard disk drive, for example.

  The thin film magnetic head element is composed of a pair of write element and read element. FIG. 14 is a cross-sectional view illustrating the configuration of a thin film magnetic head element. In the thin film magnetic head element 21, the write element 31 records a signal on the magnetic disk 50 by a magnetic field generated by electromagnetic induction from a current flowing through the coil 32. The read element 41 reproduces a signal by detecting the direction of the magnetic field on the magnetic disk 50 with a magnetoresistive element (MR element 42).

  FIG. 15 is an exemplary perspective view of a slider on which a thin film magnetic head element is formed. As shown in this figure, the thin film magnetic head element 21 is located at the end of the slider 2 together with the electrode 22. FIG. 16 is a conceptual explanatory diagram of a slider manufacturing method. When manufacturing the slider, first, a large number of thin-film magnetic head elements are formed on the wafer and cut into a rod shape (FIG. 16 (A) → (B)). This bar is the rover. The slider is obtained by further cutting the row bar into individual pieces (FIG. 16 (B) → (C)). Generally, about 80 sliders can be obtained from one row bar. That is, about 80 thin film magnetic head elements exist in one row bar.

  The slider forms part of an HGA (Head Gimbal Assembly) as illustrated in FIGS. 17A and 17B. That is, the slider 2 is assembled to a suspension 7 (gimbal) having the load beam 3 and the flexure 5. The load beam 3 is made of a metal leaf spring, and a dimple 11 projecting toward the flexure 5 is formed at the tip. The load beam 3 and the flexure 5 are integrated by welding, for example, except for the tip portion, and form a suspension 7. The flexure 5 has a main body 5a and a rectangular tongue 5b. The tongue 5b is connected to the main body 5a only on the side of the front end of the main body 5a, and the other sides are cut off. The back surface of the tongue 5b is urged (pressed) by the dimple 11 so that the tongue 5b is substantially parallel to the load beam 3. The slider 2 is fixed on the tongue 5b, and is urged by the dimple 11 through the tongue 5b to maintain an optimum posture in actual recording / reproduction.

  In a hard disk drive (hereinafter referred to as “HDD”), a signal is recorded on the magnetic disk and the signal is reproduced from the magnetic disk while the magnetic disk rotating at high speed and the slider of the HGA are not in contact with each other. The final inspection of the HGA needs to be performed by creating a situation similar to recording / reproduction for an actual HDD. This is called, for example, a dynamic characteristic inspection. Various methods have been proposed for the dynamic characteristic inspection of HGA. In general, the result of recording (writing) and reproducing (reading) data on pseudo media by HGA is compared with the original data, and the output level is compared. The characteristics of the HGA are evaluated based on the missing bits and bits.

As an apparatus for inspecting the characteristics of HGA, for example, an apparatus described in Patent Document 1 below is known.
JP 2002-373476 A

  If the HGA does not pass the final inspection, expensive parts such as suspensions must be discarded, resulting in an increase in cost. Therefore, it is desirable that the defective product occurrence rate in the final inspection stage is as low as possible. Considering this, one of the reasons why the HGA does not pass the final inspection is considered to be a defect of the thin film magnetic head element. The defect of the thin film magnetic head element is further divided into a defect of a write element and a defect of a read element.

  Here, with respect to the read element, it is possible to obtain characteristics (static characteristics) by applying an external magnetic field, so that it is possible to perform a static characteristics inspection not only in the process after the slider but also in the state of a row bar or a wafer. Therefore, a slider having a thin film magnetic head element with a defective read element can be excluded with a relatively high probability at an early stage. That is, the probability that the read element is defective in the final inspection of the HGA is relatively low.

  On the other hand, since it is necessary to manage the gap between the disk and the thin film magnetic head element with high accuracy when inspecting the characteristics of the write element, the write element is inspected in a process prior to the final inspection of the HGA. It can be said that it is difficult. For this reason, the current situation is that it is necessary to determine whether or not the write element is acceptable only by the final inspection of the HGA. Therefore, the probability that a defective write element exists in the final inspection of the HGA is higher than that of the read element.

  Such a problem becomes more conspicuous in the perpendicular magnetic recording system. This is because the perpendicular magnetic recording method has a higher recording density (narrow energy distribution) than the horizontal magnetic recording method, so that the yield of the thin-film magnetic head element is poor. In the perpendicular magnetic recording system, it is necessary to manage the gap between the disk and the thin-film magnetic head element in nanometer units when inspecting the characteristics of the write element, and the write element is inspected before the final inspection of the HGA. It is even more difficult to do this than with the horizontal magnetic recording system. Since the reproduction principle (reading principle) is the same for both the horizontal magnetic recording method and the perpendicular magnetic recording method, the probability that a defective product will remain in the final inspection of the HGA for the above reason is relatively low. .

  Therefore, rather than a method of measuring each slider, it is possible to perform characteristic inspection including inspection of the write element of each thin-film magnetic head element in the row bar state before the slider shape (before cutting). It is requested.

  FIG. 18 is an outline of the configuration of Japanese Patent Application No. 2008-130235 proposed by the present applicant. The row unit 20 is fixed and the sensor unit 17 is connected to each thin film magnetic head element (read element and write element) 21 of the row bar 20. (Including a magnetic sensor corresponding to a read element) are brought close to each other, and the state of the magnetic field generated by each thin film magnetic head element 21 is read by the sensor unit 17. For this reason, the sensor unit 17 is movable in the X direction, which is the longitudinal direction of the row bar 20, at every arrangement interval of the thin film magnetic head elements 21, and the sensor unit 17 is opposed to the thin film magnetic head element 21. ΔX in the X direction and ΔY fine movement in the Y direction perpendicular to the X direction are possible.

  By the way, in the row bar 20 of FIG. 18, the magnetic field generating surface (upper surface of FIG. 18) on which each thin film magnetic head element 21 faces the recording medium and performs reading / writing is processed with a minute convex surface called a crown. The reason for this is that in a small magnetic disk device, in order to avoid an increase in motor torque due to surface contact friction between the magnetic head and the recording medium at the time of starting the disk, the flying characteristics of the magnetic head with respect to the recording medium are not substantially affected. This is because a slightly convex crown shape is required.

  Due to this crown shape, the positional relationship between the sensor unit 17 and the row bar 20 in FIG. 18 becomes unstable. For example, in FIG. 19A, which shows a transverse cross section (cross section perpendicular to the longitudinal direction) of the row bar 20, the sensor unit 17 is in contact with the row bar 20 while tilting downward to the right. The magnetic sensor (read element) of the sensor unit 17 is very close to or in contact with the write element of the head element, and the facing space (Magnetic Space) G between the read / write elements becomes too small. On the other hand, in FIG. 19B, since the sensor unit 17 is in contact with the row bar 20 while being inclined upward, the magnetic force of the sensor unit 17 with respect to the write element of the thin film magnetic head element on the row bar 20 side. The sensor (read element) is considerably separated, and the facing gap G between the read / write elements becomes excessive.

  As shown in FIG. 19, when the contact state of the sensor unit 17 with the row bar 20 becomes unstable due to the crown shape, the facing distance between the read / write elements of the sensor unit 17 and the row bar 20 varies for each measurement. As a result, measurement conditions may vary, and the measurement values obtained may be adversely affected.

  The present invention has been made in view of such a situation, and the object thereof is to simulate the recording characteristics of the magnetic field generating element even if the magnetic field generating surface to be inspected is not flat due to crown processing or the like. More specifically, a magnetic characteristic inspection method and apparatus capable of inspecting the recording characteristics of a magnetic field generating element such as a thin film magnetic head element before the final inspection of the HGA can be inspected without using Is to provide.

The first aspect of the present invention is a magnetic property inspection method. This method
A predetermined current is supplied to the inspected field generating element for generating a magnetic field based on the predetermined current, monitor and to have a magnetic sensor for reading the magnetic field generated the magnetic field generating element, the relative said magnetic field generator magnetic A sensor unit having at least two protrusions for maintaining the facing distance of the sensor at a predetermined value;
Using the sensor holding means that holds the sensor unit and has flexibility at least in part,
A first step of driving the magnetic sensor in a direction approaching the magnetic field generating element by the sensor holding means to bring each of the two convex portions into contact with the magnetic field generating element;
A second step of maintaining a contact state of the two convex portions and changing a relative position between the magnetic sensor and the magnetic field generating element within a predetermined range;
A third step of reading the generated magnetic field of the magnetic field generating element by the magnetic sensor at the relative position changed in the second step;
And a fourth step of evaluating characteristics of the magnetic field generating element based on the magnetic field read by the magnetic sensor at each of the plurality of relative positions after repeating the second and third steps a predetermined number of times. It is.

  In the magnetic property inspection method according to the first aspect, the magnetic field generating surface of the magnetic field generating element may be a convex surface.

The second aspect of the present invention is a magnetic property inspection method. This method
A plurality of thin film magnetic head elements having a pair of write elements and read elements are aligned in one row and integrated into a single piece, and a plurality of sliders each having one thin film magnetic head element are obtained by cutting into individual pieces. was inspected, with at least two protrusions for maintaining the opposing distance of the magnetic sensor to a predetermined value and the monitor has a magnetic sensor for reading the generated magnetic field, with respect to the row bar of the write element of the head element A sensor unit;
Using the sensor holding means that holds the sensor unit and has flexibility at least in part,
A first step of driving the magnetic sensor in a direction close to the row bar by the sensor holding means to bring each of the two convex portions into contact with the row bar;
A second step of maintaining a contact state between the two convex portions and changing a relative position between the magnetic sensor and the write element within a predetermined range;
A third step of reading the generated magnetic field of the write element by the magnetic sensor at the relative position changed in the second step;
A fourth step of evaluating the characteristics of the write element based on the magnetic field read by the magnetic sensor at each of the plurality of relative positions after repeating the second and third steps a predetermined number of times,
The first to fourth steps are executed for a plurality of write elements.

  In the magnetic property inspection method according to the second aspect, the sensor unit further includes a magnetic field generator, and in the third step, the magnetic field generated by the magnetic field generator is read by the read element of the thin film magnetic head element, The characteristics of the read element may also be evaluated in the fourth step based on the read magnetic field.

  In the magnetic property inspection method according to the second aspect, the magnetic field generating surface of the row bar may be a convex surface.

  In the magnetic property inspection method according to the first or second aspect, in the fourth step, the write element is compared by comparing an output value from the magnetic sensor that has read the magnetic field in the third step with a predetermined reference value. You may determine the quality of.

A third aspect of the present invention is a magnetic property inspection apparatus. This device
Element holding means for holding a magnetic field generating element, which is supplied with a predetermined current and generates a magnetic field based on the predetermined current, at a predetermined position as an inspection target;
Moni and to have a magnetic sensor for reading the magnetic field generated by the said magnetic field generator, a sensor unit having at least two protrusions for maintaining the opposing distance of the magnetic sensor relative to the magnetic field generating device to a predetermined value,
Sensor holding means for holding the sensor unit and having flexibility at least in part;
A relative position control means for driving the sensor holding means to control a relative position between the magnetic field generating element and the magnetic sensor;
The relative position control means changes the relative position within a predetermined range while keeping each of the two convex portions in contact with the magnetic field generating element, and the magnetic sensor reads each of the plurality of relative positions. And an inspection unit for evaluating the characteristics of the magnetic field generating element based on the magnetic field.

  In the magnetic property inspection apparatus according to the third aspect, the magnetic field generating surface of the magnetic field generating element may be a convex surface.

A fourth aspect of the present invention is a magnetic property inspection apparatus. This device
A plurality of thin film magnetic head elements having a pair of write elements and read elements are aligned in one row and integrated into a single piece, and a plurality of sliders each having one thin film magnetic head element are obtained by cutting into individual pieces. A rover holding means for holding in a predetermined position;
A sensor unit having and a monitor, at least two protrusions for maintaining the opposing distance of the magnetic sensor to a predetermined value for the row bar having a magnetic sensor for reading the magnetic field generated by the write element of the head element,
Sensor holding means for holding the sensor unit and having flexibility at least in part;
A relative position control means for driving the sensor holding means to control a relative position between the write element and the magnetic sensor;
The relative position control means changes the relative position within a predetermined range while bringing the two convex portions into contact with the row bar, and the magnetic sensor reads each of the plurality of relative positions. An inspection unit that evaluates the characteristics of the light element based on a magnetic field.

  In the magnetic property inspection apparatus according to the fourth aspect, the magnetic field generating surface of the row bar may be a convex surface.

In the magnetic property inspection apparatus according to the fourth aspect, the relative position control means includes a linear movement means capable of moving the row bar relative to the sensor unit in parallel with a longitudinal direction of the row bar;
A first moving means capable of moving the sensor unit in a first direction parallel to a longitudinal direction of the row bar relative to the light element; and a magnetic field of the row bar orthogonal to the first direction. Second moving means movable in a second direction substantially parallel to the generating surface;
The sensor unit may include a third moving unit that is movable relative to the light element in a third direction that is movable toward and away from the magnetic field generating surface of the row bar.

  In this case, at least one of the first to third moving means may use a piezo element.

  A magnetic property inspection apparatus according to a fourth aspect, comprising: an imaging device capable of imaging the sensor unit and the row bar; and an image processing device that performs image processing on an imaging signal of the imaging device, the sensor unit and the row bar It is preferable that the markers provided respectively in the above are imaged by the imaging device and the sensor unit and the light element are aligned with each marker as a reference.

  In this case, the image processing device is substantially parallel to the optical axis of the imaging device, along with alignment in the first axial direction substantially perpendicular to the optical axis of the imaging device, by image processing of the imaging signal obtained by imaging each marker. It is preferable to perform alignment with respect to the second axial direction.

  Further, the imaging device is a high-magnification narrow-focus camera, and the alignment with respect to the second axial direction is based on the contrast difference of each marker imaged by the high-magnification narrow-focus camera. It is good to carry out by measuring the distance in the axial direction of 2.

  In the magnetic property inspection apparatus according to the fourth aspect, the inspection unit determines the quality of the write element by comparing an output value from the magnetic sensor as a result of reading the magnetic field with a predetermined reference value. It may be.

  In the magnetic property inspection apparatus according to the fourth aspect, the sensor unit further includes a magnetic field generation unit, and the inspection is performed based on a result of reading a magnetic field generated by the magnetic field generation unit by the read element of the thin film magnetic head element. The unit may also evaluate the characteristics of the read element.

  In the magnetic property inspection apparatus according to the third or fourth aspect, the sensor unit may be provided with at least three convex portions.

  In the magnetic property inspection apparatus according to the third or fourth aspect, the convex portion may be located at a position covering the magnetic sensor, or the magnetic sensor may be included in the convex portion.

  Alternatively, the magnetic sensor may be positioned between the pair of convex portions.

  In the magnetic property inspection apparatus according to the third or fourth aspect, at least a surface of the convex portion may be a DLC film. In this case, the facing distance between the magnetic sensor and the thin film magnetic head element on the row bar may be controlled by changing the film thickness of the DLC film. The DLC film may have a maximum film thickness of 50 nm (the film thickness may be 50 nm or less).

  It should be noted that any combination of the above-described constituent elements, or a conversion of the expression of the present invention between systems or the like is also effective as an aspect of the present invention.

  According to the present invention, a sensor unit having a magnetic sensor has a convex portion for maintaining the interval between the magnetic sensor facing the magnetic field generating element at a predetermined value when contacting the magnetic field generating element such as a row bar. Therefore, even if the magnetic field generating surface to be inspected in the magnetic field generating element is not flat because of crown processing or the like, the facing distance is kept constant, and the magnetic field generated by the magnetic field generating element is changed to the magnetic field. Can be read by a sensor. As a result, the characteristics of the magnetic field generating element can be evaluated with high accuracy without variations based on the magnetic field generated by the magnetic field generating element read by the magnetic sensor without using pseudo media as in the final inspection of the HGA. it can.

  Further, in the case as shown in FIG. 19B, it is difficult to read the magnetic field generated by the magnetic field generating element with the magnetic sensor because the distance between the magnetic sensor facing the magnetic field generating element is excessive and sufficient measurement is performed. Although it may not be possible, the occurrence of such a situation can be avoided and the inspection efficiency can be improved.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or equivalent component and member shown by each drawing, and the overlapping description is abbreviate | omitted suitably. In addition, the embodiments do not limit the invention but are exemplifications, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.

  FIG. 1 shows the structure of a sensor unit according to an embodiment of the present invention, FIG. 2 shows a schematic perspective view illustrating the configuration of a magnetic property inspection apparatus 100 according to an embodiment of the present invention, and FIG. It is a schematic diagram explaining the motion of each part of 2 apparatuses. Here, two directions orthogonal to each other in the horizontal plane are defined as first and second directions (X direction and Y direction), and a vertical direction is defined as a third direction (Z direction).

  2 and 3, the magnetic property inspection apparatus 100 includes a base 11 and a row bar holding that is driven in the X direction (the row bar moving axis Hx direction) with respect to the horizontal portion of the base 11. A holding base 12 as means, a YZ adjusting part 13 attached to a vertical portion of the base 11, a fine movement unit 15 as movement (fine movement) means in the first to third directions, and at least partially flexible A sensor holder 16 as a sensor holding means having a property, a sensor unit 17 attached to the distal end side of the sensor holder 16, a high-power narrow-focus camera 18 as an imaging device, and an inspection unit 19 are provided. Further, an illumination 181 that illuminates the imaging range associated with the narrow focus camera 18 and an image processing device 182 that performs image processing on the imaging signal of the narrow focus camera 18 are provided.

  The holding table 12 supported on the horizontal portion of the base 11 so as to be movable in the direction of the row bar movement axis Hx by the linear moving means holds the row bar 20 by, for example, vacuum suction so that the magnetic field generation surface to be inspected is on the upper side. To do. In a state where the row bar 20 is held by the holding table 12, the longitudinal direction of the row bar 20 is parallel to the X direction, and the magnetic field generating surface of the row bar 20 is substantially parallel to the XY plane. The holding by the holding table 12 may be a mechanical chuck instead of vacuum suction. Here, the upper surface of the holding table 12 (the holding surface of the row bar 20) keeps the variation in distance between the row bar 20 and the sensor unit 17 within a predetermined value, that is, within a distance in which the magnetic field between the row bar 20 and the sensor unit 17 can be measured. The flatness (Z direction) necessary for this is ensured. The row bar 20 includes a plurality of thin film magnetic head elements 21 each having a pair of write elements 31 and read elements 41 arranged in a row and integrated into one row, and is cut into individual pieces so that one thin film magnetic head element 21 is formed. A plurality of sliders. In actuality, the write element 31 and the read element 41 are formed by thin film technology on the right side surface of the row bar 20 in FIG. 2, and the write element 31 and the read facing the magnetic field generating surface (surface to be inspected) of the row bar 20. Although the dimension of the element 41 is very small, it is shown schematically large in FIG.

  The holding table 12 has a function of sequentially moving the row bar 20 by a distance corresponding to the arrangement interval of the thin film magnetic head elements 21 to sequentially position the thin film magnetic head elements 21 below the sensor unit 17.

  The YZ adjustment unit 13 attached to the vertical portion of the base 11 has a function of moving and adjusting the fine movement unit 15 in the Y direction (Hy direction) and the Z direction (Hz direction). The fine movement unit 15 finely moves the sensor unit 17. It is used for initial setting so that the magnetic field generated by the thin film magnetic head element 21 can be read in the range.

  The fine movement unit 15 uses, for example, a piezo element (piezoelectric element), and can finely move the sensor holder 16 in the X, Y, and Z directions (piezo Px, Py, Pz directions) with high accuracy (for example, nm order). To support. The sensor holder 16 is, for example, a flexible arm, and a sensor unit 17 is fixed and supported on the tip side of the sensor holder 17 with the magnetic field generation surface facing down. Therefore, the sensor unit 17 can be moved in the Hy direction and the Hz direction by the YZ adjusting unit 13 and can be finely moved in the Px, Py, Pz directions (first to third directions) by being supported by the fine movement unit 15. .

  The sensor unit 17 has a function equivalent to that of the magnetic head element, that is, has a magnetic field generator (not shown) corresponding to a write element and a magnetic sensor 175 corresponding to a read element as shown in FIG. In addition, the row bar 20 and the magnetic field generation surfaces are opposed to each other in a substantially parallel state while being supported by the sensor holder 16, and must be at a distance at which the generated magnetic fields can be detected.

  As described above, the magnetic field generation surface to be inspected of the row bar 20 is slightly convex due to crown processing. For this reason, the problem described in FIGS. 19A and 19B occurs when the surface of the sensor unit 17 facing the row bar is a flat surface. Therefore, as shown in FIGS. 1A and 1B, convex portions 17a, 17b, and 17c are formed at three locations (for example, vertices of an isosceles triangle) on the opposing surface of the sensor unit 17, and among them, the row 20 A magnetic sensor 175 (specifically, an MR element corresponding to a read element) is arranged at the base of a convex part 17a (at the apex position where the isosceles sides intersect) facing the write element 31. The convex portions 17a, 17b, and 17c can be formed, for example, by dry etching the facing surface (contact surface) and leaving only the portions that become the convex portions 17a, 17b, and 17c. On the surface side of the magnetic sensor 175, a DLC (Diamond-Like Carbon) film 172 as a wear-resistant nonmagnetic film formed on the opposing surface of the sensor unit 17 from the beginning is left with a predetermined thickness. However, the DLC film 172 may be formed with a predetermined thickness after etching.

  The sensor unit 17 is fixed to a flexible sensor holder 16 and inspects a thin film magnetic head element 21 to be described later in a state where the three convex portions 17a, 17b, and 17c of the sensor unit 17 are always in contact with the row bar 20. (However, when the inspection of one thin-film magnetic head element 21 is completed and the next thin-film magnetic head element 21 is linearly moved below the sensor unit 17, the sensor unit 17 moves relative to the row bar 20. Non-contact). Of the three convex portions 17a, 17b, and 17c of the sensor unit 17, the convex portion 17a that includes (arranges) the magnetic sensor 175 at the base is the width direction of the row bar 20 (direction orthogonal to the longitudinal direction). The other two convex portions 17b and 17c are close to the other end portion in the width direction of the row bar 20, and are located in contact with one end portion position (the position of the write element 31 of the thin film magnetic head element 21). It is the arrangement which can touch a position. That is, the flat intermediate portion of the facing surface of the sensor unit 17 contacts the crown shape of the row bar 20, and the variation in the facing space (Magnetic Space) G between the read / write elements described with reference to FIGS. To avoid generating.

  As shown in FIGS. 1A and 1B, three convex portions 17a, 17b, and 17c are formed in the sensor unit 17, and these are always in contact with the row bar 20 during the inspection of the thin film magnetic head element 21. If the state is maintained, the facing gap G between the read / write elements can be stably maintained.

  Although the crown shape of the row bar 20 varies depending on the type of row bar, the height difference H of the crown is about 10 to 30 nm. At this time, the height T of the sensor unit projection is about 2000 nm (= about 2 μm), DLC film thickness: can be set to about 1 to 3 nm.

  As shown in FIGS. 2 and 3, the support mechanism of the narrow focus camera 18 includes an XZ adjustment unit 183 that can move in the X direction and the Z direction (Cx direction and Cz direction), and a Y direction (focal point). The camera holding base 184 is movable in the adjustment axis Cy direction), and the narrow-focus camera 18 is fixedly supported by the camera holding base 184.

  The inspection unit 19 has a function of acquiring operation commands and inspection data for the read element and the write element of each thin film magnetic head element 21 included in the row bar 20, and analyzing and determining the inspection data. The inspection unit 19 is electrically connected to the electrodes of the sensor unit 17 and the respective electrodes of the thin film magnetic head element 21 to be inspected by the row bar 20. That is, the probe 191 connected to the inspection unit 19 is in contact with the electrode 22 of the thin film magnetic head element 21 as schematically shown in FIG. 4 (the convex portion of the sensor unit is omitted) or as schematically shown in FIGS. ing. Connection between the electrodes of the sensor unit 17 and the inspection unit 19 may be performed by normal wiring. A result of detecting a magnetic field generated by each thin film magnetic head element 21 by a sensor unit 17 by flowing a magnetic field generated current from the current generating means of each inspection unit 19 between the write input electrodes of each thin film magnetic head element 21 (that is, magnetoelectric conversion). The recording characteristic of each thin film magnetic head element 21 is evaluated by the output determination means of the inspection unit 19 based on the voltage value between the read output electrodes obtained in (1). In addition, a magnetic field generation current is caused to flow between the current generation means of the inspection unit 19 between the write input electrodes of the sensor unit 17, and the magnetic field generated by the sensor unit 17 is detected by the read element of each thin film magnetic head element 21 (that is, magnetoelectric). Based on the voltage value between the read output electrodes obtained by the conversion), the reproduction characteristic of each thin film magnetic head element 21 can be evaluated by the output determination means of the inspection unit 19. Details of the measurement and evaluation procedure will be described later with reference to FIG.

  The alignment (alignment) between the thin film magnetic head element 21 and the sensor unit 17 included in the row bar 20, that is, the relative position of both needs to be managed on the nanometer order (for example, about 1 nm). Since the mechanical positioning by the open loop of the sensor unit 17 may leave an error of about 5 μm, the elements of the sensor unit 17 (the magnetic sensor 175 for reading or the magnetic field generator for writing) and the measurement target of the row bar 20 It can be said that the positioning of the thin-film magnetic head element 21 (the write element 31 or the read element 41) to be the final alignment by closed loop is desirable.

  Therefore, it is effective to perform alignment at the pre-measurement stage in the three directions of XYZ in order to perform an efficient apparatus operation (which does not require wasted time) and measurement at an ideal position. The alignment method is different in the three directions of XYZ.

  XY alignment: As shown in FIG. 5 (illustration of the convex portion of the sensor unit is omitted), there are processing markers 176 and 206 used in the wafer processing process for both the sensor unit 17 and the row bar 20, and the processing markers 176 and 206 are used as a reference. As a result, the positioning of the row bar 20 and the sensor unit 17 can be performed. Since the processing markers 176 and 206 are formed by a wafer process, they have the same accuracy as the pattern electrodes. The processing markers 176 and 206 are imaged by the narrow-focus camera 18 shown in FIG.

  The positioning in the X direction can be performed by a known method in which each of the markers 176 and 206 is image-recognized by the image processing device 182 and a geometric reference in the X direction of both the markers 176 and 206 is obtained and aligned.

  In the Y-direction positioning, the depth-of-field characteristic of the narrow-focus camera 18 is used, and the Y-direction position is determined by the edge contrast difference (blur) in the image data of the processing marker 206 of the rover 20 and the processing marker 176 of the sensor unit 17. to decide. This technique itself is publicly known, and it is preferable that the narrow-focus camera 18 has a high magnification of a microscope level, and the illumination 181 uses ultraviolet light having a short wavelength.

  Z alignment: The sensor unit 17 is moved down in the Pz direction by the fine movement unit 15 until it contacts the row bar 20. When the sensor unit 17 is in contact with the row bar 20, the flexible sensor holder 16 is bent, and the row bar 20 is brought into contact with the convex portions 17a, 17b, and 17c of the sensor unit 17 shown in FIG. As described above, the contact surface (contact surface) of the sensor unit 17 is etched to reduce the contact area and form the three convex portions 17a, 17b, and 17c, thereby stabilizing the contact with the row bar 20 having the crown shape. be able to. Since the sensor unit 17 is fixed to the sensor holder 16 and the sensor holder 16 has flexibility, a stable facing distance can be obtained unless the contact portion of the sensor unit 17 is affected by the crown. For the flexible sensor holder 16, various configurations are conceivable. For example, the sensor holder 16 to which the sensor unit 17 is attached may be made of a flexible material in the form of a leaf spring. It is done. A modification of the sensor holder 16 will be described later with reference to FIGS. 12 and 13.

  FIG. 6 is a simplified flowchart showing the flow of the magnetic characteristic inspection of the thin film magnetic head element by the magnetic characteristic inspection apparatus 100 shown in FIG. 2, and the flow of the magnetic characteristic inspection in the present embodiment will be described with reference to this figure. Here, the number of magnetic field measurement points for each thin film magnetic head element 21 included in the row bar 20 is defined as N.

-Rover holding step: The row bar 20 is arranged on the upper surface of the holding table 12 by, for example, manual supply or using a predetermined transport mechanism, and the row bar 20 is held by vacuum holding of the holding table 12, for example, and "rover fixing is completed".

Temporary positioning step: The sensor unit 17 is temporarily positioned so as to face the thin film magnetic head element 21 to be measured included in the row bar 20 by linearly moving the holding base 12 in the direction of the row bar moving axis Hx (“row bar X Axis temporary positioning is complete.) At this time, the movement amount of the holding table 12 may be based on a predetermined numerical value (the arrangement interval of the thin film magnetic head elements 21) or based on image processing based on an image captured by the narrow focus camera 18. Good.

Write input step: A recording electrical signal (magnetic field generation current) is input from the current generating means of the inspection unit 19 to the write element 31 of the row bar 20, and a magnetic field is generated from the pole 27 of the write element shown in FIG. The input of the recording electric signal to the write element may be continued until the measurement is completed.

Piezo Pz moving (lowering) step: The sensor holder 16 is finely moved in the Z direction (downward direction) by the fine movement unit 15, and the projections 17 a, 17 b, 17 c of the sensor unit 17 are moved as shown in FIG. Touch the magnetic field generation surface. This can be confirmed by an image captured by the narrow focus camera 18. Thereby, the facing distance between the magnetic sensor 175 and the write element 31 of the row bar 20 is stably maintained.

XY alignment step: With the convex portions 17a, 17b, and 17c of the sensor unit 17 in contact with the row bar 20, the sensor holder 16 is finely moved in the X direction and the Y direction by the fine movement unit 15, and the magnetic sensor 175 of the sensor unit 17 is moved. The position of the sensor unit 17 is finely adjusted so that the read signal is equal to or greater than a predetermined value, and the measurement start point is determined. For example, as shown in FIG. 4, the position where the pole 27 of the write element of the thin-film magnetic head element 21 and the magnetic sensor 175 (specifically, MR element) of the sensor unit 17 face each other is the measurement start point.

Piezo Px, Py moving step (measuring step): The fine movement unit 15 is moved by a predetermined amount in the X and Y directions, and the read output voltage of the sensor unit 17 at that position is recorded. Repeat this N times. Thereby, the read output voltage of the sensor unit 17 at N locations is recorded as measurement data. Thereby, the magnetic field distribution in a predetermined area can be measured for the predetermined thin-film magnetic head element 21.

Piezo Pz movement (upward) step: The sensor holder 16 is finely moved in the Z direction (upward direction) by the fine movement unit 15 to separate the sensor unit 17 from the row bar 20 [piezo Pz movement (upward)].

Output process: Outputs measurement results in the measurement process (measurement value plot). An example of the output result is shown in FIG. In this figure, (A) shows the magnetic field distribution when the frequency of the recording current is 10 MHz, and (B) shows the magnetic field distribution when the frequency is 50 MHz. In this case, it is possible not only to determine good / bad based on the value of simple input / output data, but also to see the overwrite characteristics from the output data of magnetic flux at different frequencies. This is a measurement item for determining whether or not the already recorded data can be overwritten and erased. The recording current can be measured even with a direct current (frequency = 0 Hz).

Read output evaluation step: Based on the measurement result in the measurement step, the output determining means of the inspection unit 19 evaluates the measured recording characteristics of the thin film magnetic head element 21. Specifically, the thin film magnetic head element 21 measured by comparing the measurement results (output values) at a plurality of locations (N locations) with a reference value (for example, one corresponding to the required magnetic field strength and range). Judge the quality. A determination method is adopted in which different default values are determined for each of the N measurement points as the reference value, and if the deviation from the default value is within a predetermined range, it is determined to be good (OK). can do.

  When the measurement result is good (OK), the next thin film magnetic head element 21 is measured in the same flow from the temporary positioning step.

  On the other hand, when the measurement result is defective (NG), the magnetic property inspection of the row bar 20 is finished, and the next new row bar 20 is received on the holding table 12.

  Normally, each of the above steps (however, the row bar holding step is omitted because it is executed only when the row bar is replaced) is performed for all the thin film magnetic head elements 21 included in the row bar 20. Although the above-described series of steps inspects the recording characteristics (write characteristics) of the thin film magnetic head element 21, it is also possible to inspect the reproduction characteristics (read characteristics) in conjunction with the recording characteristics inspection. . In this case, in the measurement step, after the lead output voltage of the sensor unit 17 is recorded, an electrical signal for recording (magnetic field generation current) is input from the current generation means of the inspection unit 19 to the sensor unit 17, thereby the sensor unit 17. The magnetic field generated by the magnetic field generator (similar to the write element of the thin film magnetic head element 21) is read by the thin film magnetic head element 21, and the voltage output as a result of the reading is also recorded. The inspection unit 19 also evaluates the reproduction characteristics of the thin film magnetic head element 21 (that is, the characteristics of the read element 41 of the thin film magnetic head element 21).

  In FIGS. 1A and 1B, the facing distance G between the magnetic sensor 175 and the write element 31 of the thin film magnetic head element 21 on the row bar 20 side is the resistance of the convex portions 17a, 17b, and 17c of the sensor unit 17. The film thickness of the DLC film 172 as the wearable nonmagnetic film is substantially determined, but the film thickness of the DLC film 172 of the projections 17a, 17b, and 17c is changed as shown in FIGS. 8A and 8B. Thus, the facing gap G between the magnetic sensor 175 and the write element 31 of the thin film magnetic head element on the row bar 20 side can be controlled. When the DLC film 172 is set to the maximum thickness in the configuration shown in FIG. 8A, the thickness of the DLC film 172 is about 50 nm at a maximum so as to maintain the film characteristics. Further, as shown in FIG. 8B, it is also possible to form the protrusions 17a, 17b, and 17c with only the DLC film 172 by performing etching within the range of the thickness of the DLC film 172.

  As shown in FIGS. 8A and 8B, the facing gap G between the magnetic sensor 175 and the write element 31 can be intentionally controlled by the film thickness of the DLC film 172, and a magnetic field at an arbitrary distance from the write element 31. The distribution can be measured, and the optimum facing distance G can be obtained for each measurement target rover.

  According to the present embodiment, the following effects can be achieved.

(1) Even if the row bar 20 having a large number of thin-film magnetic head elements 21 is crowned, the convex portions 17a are formed at three locations (for example, vertices of an isosceles triangle) on the surface of the sensor unit 17 facing the row bar. The posture of the sensor unit 17 relative to the row bar 20 can be stabilized by forming the bumps 17b and 17c and bringing the projections 17a, 17b, and 17c into contact with the magnetic field generating surface of the row bar 20. Therefore, when the magnetic characteristic inspection of the thin film magnetic head element 21 is performed in a state where the convex portions 17a, 17b, and 17c are in contact with the row bar 20, the row bar 20 side light element 31 and the magnetic sensor 175 at the base position of the convex portion 17a Thus, it is possible to perform magnetic measurement while maintaining a predetermined distance between the counters, and it is possible to prevent the occurrence of measurement errors due to variations in the counterspacing for each row bar, thereby improving the measurement accuracy.

(2) As described above, the recording characteristics of each thin film magnetic head element 21 can be inspected at the stage of the row bar 20, that is, before being cut into individual pieces to be sliders. Easy to handle and good inspection efficiency.

(3) Since the position of the sensor unit 17 with respect to the thin film magnetic head element 21 is controlled by the fine movement of the fine movement unit 15, the inspection reliability is high. Then, the magnetic unit generated by the thin film magnetic head element 21 is read by the sensor unit 17 at N positions near the thin film magnetic head element 21 by high-precision position control of the sensor unit 17 by the fine movement unit 15 and read at each position. The recording characteristic of the thin film magnetic head element 21 (that is, the characteristic of the write element 31 of the thin film magnetic head element 21) can be evaluated by the inspection unit 19 based on the output voltage.

(4) It is possible to inspect the reproduction characteristics together with the inspection of the recording characteristics of the thin-film magnetic head element 21, which is efficient.

(5) By these, the magnetic characteristic inspection of each thin film magnetic head element 21 at the rover stage can be performed efficiently and with high accuracy without using pseudo media as in the final inspection of the HGA, and the defective thin film magnetic head element By excluding the row bar 20 including 21, it is possible to reduce the probability that a thin film magnetic head element with poor recording characteristics remains in the final inspection of the HGA. That is, it is very advantageous in terms of cost reduction because the waste of expensive parts such as a suspension for a thin film magnetic head element with poor recording characteristics is reduced.

  Hereinafter, a specific configuration of the magnetic property inspection apparatus 100 according to the present embodiment will be described.

  FIG. 9 is a perspective view illustrating a specific configuration of the magnetic property inspection apparatus 100 shown in FIG. 2. In this figure, the configuration in the case of automatically performing from the supply of the row bar 20 to the inspection and discharge is illustrated.

  The upper surface of the housing 201 forms a work space for the magnetic property inspection apparatus 100. The control panel 205 is built in the casing 201 and controls the overall operation of the magnetic property inspection apparatus 100. The cover 206 surrounds each member (other than the inspection unit 19) shown in FIG. The supply unit 210 transfers the uninspected row bar 20 that is sequentially supplied to the lower side of the transport holder 130. The conveyance holder 130 can move in the horizontal direction along the conveyance axis 215 (X axis), and can move in the vertical direction (Z-axis direction) by its own built-in movement mechanism. The discharge unit 220 transfers the inspected row bar 20 to the outside. Inside the cover 206 below the intermediate position of the transport shaft 215 is a fixing / measuring unit 300 including the holding base 12 for fixing the row bar 20 shown in FIG. 2 and other measuring mechanisms. The monitor 207 is for informing the user of the inspection result and the status of the entire apparatus.

  The flow of the apparatus of FIG. 9 will be described. First, the conveyance holder 130 holds the uninspected row bar 20 transferred by the supply unit 210, and above the fixing / measurement unit 300 along the conveyance axis 215, that is, FIG. The lower bar 20 is moved to the right above the second holding table 12 (inside the cover 206) and descends, and the row bar 20 is arranged on the holding table 12 through the upper opening of the cover 206. In this state, the inspection of the row bar 20 is performed according to the procedure of FIG. 6, and when the inspection is completed, the transport holder 130 moves upward while holding the row bar 20 and moves to the right along the transport shaft 215 to above the discharge unit 220. Then, the row bar 20 is discharged.

  The present invention has been described above by taking the embodiment as an example, but it will be understood by those skilled in the art that various modifications can be made to each component and each step of the embodiment within the scope of the claims. is there. Hereinafter, modifications will be described.

  The protrusions formed on the sensor unit 17 can be arranged other than that shown in FIG. 1, and FIG. 10A shows a straight line from the two-point arrangement of the protrusions 17b and 17c in FIG. 1B. It is the structure replaced with the linear convex part 17d. Others are the same as in FIG. Usually, since the crown shape of the row bar 20 has little change in the longitudinal direction of the row bar, the shape of FIG. As a further modification, the configuration shown in FIG. 10B may be employed in which the magnetic sensor 175 is not disposed at the center of the sensor unit 17. In this case, convex portions 17i, 17j, and 17k are formed on the opposing surface of the sensor unit 17 so as to be located at the apex of the triangle, and the base portion of one convex portion 17i of the convex portions 17i and 17j that can be opposed to the light element of the rover. A magnetic sensor 175 is disposed on the front side.

  In FIG. 11, two convex portions 17 e and 17 f that form a pair are formed on the facing surface of the sensor unit 17 on the side facing the light element at one end in the width direction of the row bar 20, and facing the other end in the width direction. One convex portion 17g is formed on the side, and a magnetic sensor 175 is disposed at an intermediate position between the convex portions 17e and 17f so as to form a convex portion 17h having a lower height than the convex portions 17e and 17f. .

  In this case, the three convex portions 17e, 17f, and 17g contact the crown-shaped magnetic field generation surface of the row bar 20, and the posture of the sensor unit 17 with respect to the row bar 20 can be stabilized as in the case of FIG. In addition, by providing the magnetic sensor 175 on the convex portion 17h whose height is lower than that of the convex portions 17e and 17f, a necessary facing distance can be ensured between the row bar 20 side light element and the magnetic sensor 175.

  Various configurations are conceivable for the flexible sensor holder 16 to which the sensor unit 17 is attached. For example, when the sensor holder 16 to which the sensor unit 17 is attached is made of a flexible material in the form of a leaf spring, the configuration is simple, but as shown in the explanatory view of FIG. It is inevitable that a slight change in the Y direction occurs due to bending of the leaf spring-shaped sensor holder 16 with the change. For this reason, the sensor holder has a structure in which a rigid sensor holder main body and a flexible member whose position varies only in the Z direction are combined, and the flexible member is sandwiched between the sensor holder main body and the sensor unit. It is more preferable to employ a structure in which the sensor unit is held by the elastic member.

  In the example of FIG. 13, the sensor holder 16 driven by the fine movement unit includes a rigid holder arm 161 (sensor holder main body), a rigid holder base 162 fixed to the distal end thereof, and a flexible holder member. 163 and a flexible substrate 164 (in FIG. 13, the surface facing the row bar is shown as facing upward). One edge of the flexible holder member 163 and the flexible substrate 164 is sequentially stacked and fixed on the holder base 162, and the sensor unit 17 is fixed on the flexible substrate 164.

  The flexible holder member 163 includes a circular ring portion 163a that is partially (radially) connected to the peripheral edge by forming a required cutout, and an inner circle that is partially (radially) connected to the circular ring portion 163a. A plate portion 163b is provided. A convex portion (dimple) 163c facing the flexible substrate 164 is formed on the disc portion 163b. The convex portion 163c is movable only in the Z direction due to the flexibility of the flexible holder member 163. The holder base 162 has a recess 162a so as not to hinder the movement of the flexible holder member 163.

  By forming a similar notch in the flexible substrate 164, a sensor unit arrangement region 164a that abuts on the convex portion 163c is defined, and the sensor unit 17 is fixed and secured to the position directly above the convex portion 163c. Yes. That is, the sensor unit 17 is supported so as to float freely in the Z direction, the pitch Px, and the roll Ry direction. Accordingly, the sensor unit 17 can take an arbitrary posture following the surface shape of the row bar 20.

  In the embodiment, the row bar 20 is linearly moved in the X direction in the temporary positioning step so that the thin film magnetic head elements 21 to be measured are sequentially positioned below the sensor unit 17. It may be configured to move linearly in the direction. However, in this case, the narrow-focus camera 18 and the mechanism associated therewith must also move linearly in the X direction in conjunction with the sensor unit 17.

  In the embodiment, the sensor unit 17 has a function equivalent to that of a magnetic head element including a read element and a write element. However, in a modified example, the sensor unit 17 does not have a function of generating a recording magnetic field. A magnetic sensor corresponding to a read element that reads a magnetic field may be provided. Even in this case, only the recording characteristics of the thin film magnetic head element can be inspected.

  In the embodiment, the target of magnetic property inspection is a thin film magnetic head element included in a row bar. However, in a modified example, not only a row bar having a thin film magnetic head element but also an element or medium having an arbitrary magnetic field generation or magnetic field is used as a magnetic property. It is good also as an object of inspection. In the embodiment, the fine movement unit 15 is exemplified by using a piezo element. However, in a modified example, a mechanism that linearly drives a precision ball screw with a servo motor or a linear motor may be used instead.

It is a structure of the sensor unit used by embodiment of this invention, Comprising: (A) is a front view, (B) is a bottom view. 1 is a schematic perspective view illustrating the configuration of a magnetic property inspection apparatus according to an embodiment of the invention. The schematic diagram which simplified the magnetic property inspection apparatus of FIG. FIG. 3 is a schematic enlarged view illustrating an alignment state between a row bar and a sensor unit in the magnetic property inspection apparatus of FIG. 2. The schematic diagram explaining the alignment of a X direction and a Y direction with a rover and a sensor unit. 3 is a simplified flowchart showing a flow of magnetic characteristic inspection of a thin film magnetic head element by the magnetic characteristic inspection apparatus shown in FIG. It is an example of an output of a measurement result in an embodiment, and (A) is an explanatory view showing a magnetic field distribution when the frequency of a recording current is 10 MHz, and (B) is the frequency of 50 MHz. It is shown that the facing space (Magnetic Space) between the magnetic sensor and the write element of the thin film magnetic head element can be controlled by changing the film thickness of the convex DLC film in the sensor unit. (B) is explanatory drawing which shows the case where a convex part is formed by etching within the thickness of a DLC film. FIG. 3 is a perspective view illustrating a specific overall configuration of the magnetic property inspection apparatus shown in FIG. 2. The bottom view which shows the modification of a sensor unit. The bottom view which shows the other modification of a sensor unit. Explanatory drawing which shows that the position change of a Y direction arises in the case of alignment of the sensor unit with respect to a rover in the Z direction. The disassembled perspective view which shows the modification of the sensor holder to which a sensor unit adheres. FIG. 3 is a cross-sectional view illustrating the configuration of a thin film magnetic head element. 3 is an exemplary perspective view of a slider on which a thin film magnetic head element is formed. FIG. The conceptual explanatory drawing of the manufacturing method of a slider. It is shape explanatory drawing of HGA, (A) is a side view, (B) is a bottom view. 1 is a schematic configuration diagram of a thin film magnetic head element characteristic inspection apparatus proposed by the present applicant. FIG. This shows the inconvenience when the rover is crowned. (A) shows the case where the facing distance between the light element on the rover side and the magnetic sensor of the sensor unit is too narrow. (B) shows the case where the facing distance is too wide. It is explanatory drawing of.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Base 12 Holding stand 13 XY adjustment part 15 Fine adjustment unit 16 Sensor holder 17 Sensor unit 17a-17h Convex part 18 Narrow focus camera 19 Inspection unit 20 Rover 21 Thin film magnetic head element 22 Electrode 31 Write element 41 Read element 100 Magnetic characteristic inspection Device 130 Transport holder 172 DLC film 175 Magnetic sensor 176, 206 Marker 201 Case 205 Control panel 206 Cover 207 Monitor 210 Supply unit 215 Transport shaft 220 Discharge unit 300 Fixing / measurement unit

Claims (23)

A predetermined current is supplied to the inspected field generating element for generating a magnetic field based on the predetermined current, monitor and to have a magnetic sensor for reading the magnetic field generated the magnetic field generating element, the relative said magnetic field generator magnetic A sensor unit having at least two protrusions for maintaining the facing distance of the sensor at a predetermined value;
Using the sensor holding means that holds the sensor unit and has flexibility at least in part,
A first step of driving the magnetic sensor in a direction approaching the magnetic field generating element by the sensor holding means to bring each of the two convex portions into contact with the magnetic field generating element;
A second step of maintaining a contact state of the two convex portions and changing a relative position between the magnetic sensor and the magnetic field generating element within a predetermined range;
A third step of reading the generated magnetic field of the magnetic field generating element by the magnetic sensor at the relative position changed in the second step;
A fourth step of evaluating the characteristics of the magnetic field generating element based on the magnetic field read by the magnetic sensor at each of a plurality of relative positions after repeating the second and third steps a predetermined number of times. Magnetic property inspection method.   2. The magnetic property inspection method according to claim 1, wherein the magnetic field generating surface of the magnetic field generating element is a convex surface. A plurality of thin film magnetic head elements having a pair of write elements and read elements are aligned in one row and integrated into a single piece, and a plurality of sliders each having one thin film magnetic head element are obtained by cutting into individual pieces. was inspected, with at least two protrusions for maintaining the opposing distance of the magnetic sensor to a predetermined value and the monitor has a magnetic sensor for reading the generated magnetic field, with respect to the row bar of the write element of the head element A sensor unit;
Using the sensor holding means that holds the sensor unit and has flexibility at least in part,
A first step of driving the magnetic sensor in a direction close to the row bar by the sensor holding means to bring each of the two convex portions into contact with the row bar;
A second step of maintaining a contact state between the two convex portions and changing a relative position between the magnetic sensor and the write element within a predetermined range;
A third step of reading the generated magnetic field of the write element by the magnetic sensor at the relative position changed in the second step;
A fourth step of evaluating the characteristics of the write element based on the magnetic field read by the magnetic sensor at each of the plurality of relative positions after repeating the second and third steps a predetermined number of times,
A magnetic property inspection method, wherein the first to fourth steps are executed for a plurality of write elements.   4. The magnetic property inspection method according to claim 3, wherein the sensor unit further includes a magnetic field generation unit, and in the third step, the magnetic field generated by the magnetic field generation unit is read by the read element of the thin film magnetic head element, A magnetic property inspection method for evaluating characteristics of the read element in the fourth step based on the read magnetic field.   5. The magnetic property inspection method according to claim 3, wherein the magnetic field generating surface of the row bar is a convex surface.   6. The magnetic property inspection method according to claim 1, wherein in the fourth step, an output value from the magnetic sensor that has read the magnetic field in the third step is compared with a predetermined reference value. A magnetic property inspection method for determining pass / fail of the write element. Element holding means for holding a magnetic field generating element, which is supplied with a predetermined current and generates a magnetic field based on the predetermined current, at a predetermined position as an inspection target;
Moni and to have a magnetic sensor for reading the magnetic field generated by the said magnetic field generator, a sensor unit having at least two protrusions for maintaining the opposing distance of the magnetic sensor relative to the magnetic field generating device to a predetermined value,
Sensor holding means for holding the sensor unit and having flexibility at least in part;
A relative position control means for driving the sensor holding means to control a relative position between the magnetic field generating element and the magnetic sensor;
The relative position control means changes the relative position within a predetermined range while keeping each of the two convex portions in contact with the magnetic field generating element, and the magnetic sensor reads each of the plurality of relative positions. And an inspection unit that evaluates the characteristics of the magnetic field generating element based on the magnetic field.   8. The magnetic property inspection apparatus according to claim 7, wherein the magnetic field generating surface of the magnetic field generating element is a convex surface. A plurality of thin film magnetic head elements having a pair of write elements and read elements are aligned in one row and integrated into a single piece, and a plurality of sliders each having one thin film magnetic head element are obtained by cutting into individual pieces. A rover holding means for holding in a predetermined position;
A sensor unit having and a monitor, at least two protrusions for maintaining the opposing distance of the magnetic sensor to a predetermined value for the row bar having a magnetic sensor for reading the magnetic field generated by the write element of the head element,
Sensor holding means for holding the sensor unit and having flexibility at least in part;
A relative position control means for driving the sensor holding means to control a relative position between the write element and the magnetic sensor;
The relative position control means changes the relative position within a predetermined range while bringing the two convex portions into contact with the row bar, and the magnetic sensor reads each of the plurality of relative positions. A magnetic property inspection apparatus comprising: an inspection unit that evaluates characteristics of the write element based on a magnetic field.   The magnetic property inspection apparatus according to claim 9, wherein the magnetic field generating surface of the row bar is a convex surface. The magnetic property inspection apparatus according to claim 9 or 10, wherein the relative position control means is a linear movement means capable of moving the row bar relative to the sensor unit in parallel with the longitudinal direction of the row bar;
A first moving means capable of moving the sensor unit in a first direction parallel to a longitudinal direction of the row bar relative to the light element; and a magnetic field of the row bar orthogonal to the first direction. Second moving means movable in a second direction substantially parallel to the generating surface;
3. A magnetic property inspection apparatus comprising: a third moving means capable of moving in a third direction that allows the sensor unit to move toward and away from the magnetic field generating surface of the row bar relative to the light element.   12. The magnetic property inspection apparatus according to claim 11, wherein at least one of the first to third moving means uses a piezo element.   The magnetic property inspection apparatus according to any one of claims 9 to 12, comprising an imaging device capable of imaging the sensor unit and the row bar, and an image processing device that performs image processing on an imaging signal of the imaging device, A magnetic characteristic inspection apparatus that images the markers respectively provided on the sensor unit and the row bar with the imaging apparatus and performs alignment between the sensor unit and the light element with reference to each marker.   The magnetic property inspection apparatus according to claim 13, wherein the image processing apparatus performs alignment in a first axial direction substantially perpendicular to the optical axis of the imaging apparatus by image processing of an imaging signal obtained by imaging each marker. A magnetic property inspection apparatus for performing alignment with a second axis direction substantially parallel to the optical axis of the imaging apparatus.   15. The magnetic property inspection apparatus according to claim 14, wherein the imaging device is a high-magnification narrow-focus camera, and each marker imaged by the high-magnification narrow-focus camera is aligned with the second axial direction. A magnetic property inspection apparatus that performs the measurement by measuring the distance of each marker in the second axial direction according to the contrast difference.   16. The magnetic property inspection apparatus according to claim 9, wherein the inspection unit compares the output value from the magnetic sensor as a result of reading the magnetic field with a predetermined reference value. A magnetic property inspection device for determining the quality of a product.   17. The magnetic property inspection apparatus according to claim 9, wherein the sensor unit further includes a magnetic field generation unit, and the magnetic field generated by the magnetic field generation unit is read by the read element of the thin film magnetic head element. A magnetic property inspection apparatus in which the inspection unit also evaluates the characteristics of the read element based on a result.   18. The magnetic property inspection apparatus according to claim 7, wherein the sensor unit is provided with at least two convex portions.   The magnetic characteristic inspection apparatus according to claim 7, wherein the convex portion is located at a position covering the magnetic sensor, or the magnetic sensor is included in the convex portion. .   The magnetic property inspection apparatus according to claim 18, wherein the magnetic sensor is positioned between the pair of convex portions.   21. The magnetic property inspection apparatus according to claim 7, wherein at least a surface of the convex portion is a DLC film.   23. The magnetic property inspection apparatus according to claim 21, wherein a facing distance between the magnetic sensor and the thin film magnetic head element on the row bar side is controlled by changing a film thickness of the DLC film.   23. The magnetic property inspection apparatus according to claim 22, wherein the DLC film has a maximum thickness of 50 nm.

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