JP5783298B2 - SiC semiconductor device manufacturing method and SiC semiconductor device - Google Patents

Description

  The present invention relates to a method for manufacturing a SiC semiconductor device and a SiC semiconductor device.

  Silicon carbide (SiC) has a larger band gap than silicon (silicon: Si), and it is possible to manufacture a semiconductor device having a higher withstand voltage and higher operating temperature than Si semiconductors. In addition, since the resistance value of the semiconductor itself is smaller than that of the Si semiconductor, a reduction in loss due to a reduction in resistance value (ON resistance value) at the time of connection in semiconductor operation is expected.

  However, a further reduction in loss is also demanded for SiC semiconductors. In the case of a Schottky barrier diode, the on-resistance is the Schottky electrode junction resistance, the Schottky barrier interface resistance, the conduction resistance in the SiC epitaxial layer, the SiC substrate conduction resistance, the ohmic electrode-SiC substrate interface junction resistance, and the electrode It consists of its own resistance. Of these, the resistance value of the SiC substrate takes a relatively large value. The resistance of the SiC substrate is a value determined by the doping amount of the n-type impurity with respect to the substrate. Nitrogen is usually doped, but if the concentration is higher than the standard value in order to lower the resistance value, the crystallinity will deteriorate and the characteristics of the Schottky barrier diode will deteriorate. Absent. Therefore, it has been studied to make the substrate crystal thin.

  For example, Patent Document 1 discloses a method for reducing a resistance component of a substrate crystal in a vertical direction by grinding a SiC substrate to have a thickness of 250 μm or 200 μm or less, thereby greatly reducing on-resistance during operation. Yes.

Japanese Patent Laid-Open No. 2004-22878 Japanese Patent No. 4148105 JP-A-7-94408

  However, as shown in Patent Document 1, if the substrate is ground and thinned, the substrate warps due to the influence of processing strain remaining on the substrate. Since the SiC crystal is a highly brittle material unlike the Si crystal, warping occurs on the spherical surface according to the strain on the substrate surface while maintaining the hardness even if the substrate is thinned. Therefore, in the subsequent photoengraving process, there is a problem that exposure becomes impossible, and if a force is applied to correct the warpage, the substrate crystal is easily cracked and the substrate becomes very difficult to handle. . There are Patent Document 2 (removing at least a part of a work-affected layer that generates warpage) and Patent Document 3 (resolving warpage due to lattice mismatch by ion implantation) as techniques for solving the warpage of the substrate.

  Accordingly, the present invention has been made in view of the above-described problems, and an object of the present invention is to provide a method of manufacturing an SiC semiconductor element that corrects the warp of the SiC substrate.

The method for manufacturing a semiconductor device of the present invention includes (a) a step of growing a SiC epitaxial layer on a SiC substrate, (b) a step of implanting ions into the SiC epitaxial layer, and (c) activating the implanted ions. And (d) forming an internal stress layer that generates expansion stress by condensing a laser beam that passes through the SiC substrate or SiC epitaxial layer inside the crystal of the SiC substrate or SiC epitaxial layer. A process.
The semiconductor device of the present invention includes a SiC epitaxial layer formed on a SiC substrate, an ion implantation region formed on the surface side of the SiC epitaxial layer, and a predetermined depth inside the crystal of the SiC substrate or the SiC epitaxial layer. is a number formed in the position, and an internal stress layer is a dot-shaped SiC amorphous region for generating the expansion stress, internal stress layer that continuous with SiC substrate or SiC epitaxial layer.

  The method for manufacturing a semiconductor device and the semiconductor device of the present invention include an internal stress layer that generates expansion stress in the SiC substrate or the SiC epitaxial layer. Thereby, the curvature of a SiC substrate can be corrected.

2 is a schematic cross-sectional view showing the structure of the SiC Schottky barrier diode of the first embodiment. FIG. 6 is a schematic cross-sectional view showing a manufacturing step of the SiC Schottky barrier diode of the first embodiment. FIG. 6 is a schematic cross-sectional view showing a manufacturing step of the SiC Schottky barrier diode of the first embodiment. FIG. 6 is a schematic cross-sectional view showing a manufacturing step of the SiC Schottky barrier diode of the first embodiment. FIG. 6 is a schematic cross-sectional view showing a manufacturing step of the SiC Schottky barrier diode of the first embodiment. FIG. 6 is a schematic cross-sectional view showing a manufacturing step of the SiC Schottky barrier diode of the first embodiment. FIG. 6 is a schematic cross-sectional view showing a manufacturing step of the SiC Schottky barrier diode of the first embodiment. FIG. It is sectional drawing of the SiC substrate which the curvature by the process-affected layer produced. It is sectional drawing of the SiC substrate which corrected the curvature by the internal stress layer. It is a wafer top view which shows an internal stress layer and a dicing line. It is sectional drawing of the SiC substrate in which the internal stress layer and the internal stress layer for element separation were formed.

(Embodiment 1)
<Configuration>
FIG. 1 is a cross-sectional view showing the configuration of the SiC Schottky barrier diode in the first embodiment of the present invention.

  In FIG. 1, an SiC Schottky barrier diode includes an SiC substrate 11 including an n-type 4H—SiC substrate 10 and an n-type SiC epitaxial layer 20 formed on the first main surface (front side) of the SiC substrate 10. The p-type ion implantation region 30 is formed in a portion separated by a predetermined width on the surface side of the SiC epitaxial layer 20, and is formed on the surface side of the SiC epitaxial layer 20 so that the end portion overlaps the ion implantation region 30. The Schottky electrode 40 and an ohmic electrode 50 formed on the second main surface (back surface side) of the SiC substrate 10 are provided.

  The first main surface of SiC substrate 10 is 8 ° off from the (0001) silicon surface. The p-type ion implantation region 30 contains aluminum (Al) as a p-type impurity.

<Manufacturing method>
A manufacturing process of the SiC Schottky barrier diode in the first embodiment will be described with reference to FIGS. 2 to 7 are schematic cross-sectional views in each manufacturing process of the SiC Schottky barrier diode.

First, the SiC substrate 11 is formed. First, an n-type SiC substrate 10 is prepared, and a SiC epitaxial layer 20 having a doping concentration of 5 × 10 ¹⁵ / cm ³ and a thickness of 10 μm is grown on the SiC substrate 10. Then, an oxide film 21 is formed on the SiC epitaxial layer 20 by sacrificial oxidation (FIG. 2).

Next, a p-type termination structure is formed. An ion implantation mask 100 is formed on the oxide film 21, and Al is selectively ion-implanted from the ion implantation mask 100 to form an ion implantation region 30 (FIG. 3). For example, as ion implantation conditions, Al ions are implanted at room temperature at an implantation angle of 0 ° and an energy of 40 to 700 keV so that the implantation amount is 5 × 10 ¹⁷ / cm ³ and the implantation depth is 0.8 μm. Next, after removing the ion implantation mask 100 and the oxide film 21, heat treatment is performed at 1700 ° C. for 30 minutes in an argon atmosphere in order to activate the implanted Al ions. Although the p-type termination structure is formed by this heat treatment process, unevenness due to the film quality degradation layer 60 and the bunching step having a height of 30 nm or more occurs (FIG. 4).

Next, in order to remove the film quality deterioration layer 60 and flatten the unevenness, the surface is polished (FIG. 5).
For example, when a diamond slurry having a particle diameter of 100 nm is used and polished for 10 minutes at a load of 700 g, the surface is polished by about 100 nm, the film quality degradation layer 60 is removed (FIG. 6), and the unevenness is flattened. Occur.

Next, in order to remove scratches generated by polishing, a dry etching process is performed on the surface of the SiC substrate 11 (FIG. 7). Below, the example removed using reactive ion etching (Reactive Ion Etching: RIE) is demonstrated. For example, etching is performed for 5 minutes using a mixed gas of CF ₄ : O ₂ = 4: 1 under conditions of a vacuum of 13 Pa and a DC bias electric field of 3 × 10 ⁵ V / cm. By this RIE, the surface is etched by about 100 nm, scratches caused by polishing disappear, and a flat surface shape is obtained. Note that isotropic plasma etching may be performed instead of RIE.

  Thereafter, after thinning the SiC substrate 10 and forming an internal stress layer, which will be described later, the SiC substrate 11 is wet-treated in the order of sulfuric acid / hydrogen peroxide / hydrofluoric acid. After the wet treatment, a Schottky electrode 40 made of titanium, for example, is formed on the surface of the SiC substrate 11, and an ohmic electrode 50 is formed on the back surface of the SiC substrate 11.

  Through the above-described steps, it is possible to obtain a SiC Schottky barrier diode having flattened irregularities on the surface of the SiC substrate 11 and having no scratches.

<Thinning and formation of internal stress layer>
After removing scratches due to polishing by RIE or the like (FIG. 7), the SiC substrate 10 is thinned. First, the surface device side on which the element active region of the SiC substrate 11 is formed is protected with a resist or the like, and then attached to a flat surface of a tape or a sapphire substrate, and the bottom surface of the SiC substrate 10 is ground to reduce the thickness.

  Since SiC has hardness next to diamond, it is difficult to grind, but grinding is usually performed with a surface grinder using a diamond grindstone. First, the surface is ground to a required thickness with a rough grindstone of about several hundreds, and the surface is mirror-finished with a finishing grindstone of several thousandth count to further reduce the surface roughness. The reason why the surface is finished as a mirror surface is that if the surface roughness of the two opposing surfaces in the substrate crystal is different, a Twiman effect is generated in which the rough surface becomes a convex surface and a large warp occurs.

  Although the on-resistance is reduced by making the SiC substrate 10 thinner, even if the ground surface is mirror-polished and polished, warping occurs due to effects other than the Twiman effect. That is the work-affected layer (work strain layer) effect due to grinding. As shown in FIG. 8, the ground surface of the SiC substrate 10 becomes the work-affected layer 2, and the warpage occurs with the surface of the work-affected layer 2 as a convex surface. In FIG. 8, the SiC substrate 10 and the SiC epitaxial layer 20 are collectively shown as the SiC substrate 11. Normally, when a 4H-SiC substrate crystal having a thickness of 380 μm used as a power device element is thinned to 200 μm, if the substrate is freed as it is after thinning, the ground surface becomes the work-affected layer 2, This surface is warped by 50 μm or more with a convex surface.

  Although the work-affected layer 2 generated on the SiC substrate 11 can be removed by RIE or acid etching, an extremely thin oxide layer or surface roughness is generated on the outermost surface layer, and the contact resistance increases as it is. There is a risk. Therefore, in the manufacturing method of the SiC semiconductor element of the present embodiment, the work-affected layer 2 is not removed, but the direction opposite to the warp by the work-affected layer 2 is provided inside the SiC base 11 as shown in FIG. By forming the amorphous region (internal stress layer 3) that generates the expansion stress, the stress caused by the work-affected layer 2 is offset, the SiC substrate 1 is flattened, and the processing process after the thinning process is effectively worked. did.

  The internal stress layer 3 is formed by condensing a laser beam transmitted through the SiC substrate 11 on a portion where the internal stress layer 3 is generated. In order to collect light inside the crystal, the crystal itself needs to be transparent to the laser light. If it is transparent, it only transmits light, but if the intensity exceeds a certain value, multiphoton absorption occurs and light absorption occurs, heat is generated in the condensing part, and the crystal lattice becomes amorphous. A stress layer 3 is generated. This portion expands because the crystal lattice is disturbed, but the surrounding crystal remains as it is, and therefore remains in a state of being confined inside the crystal as expansion stress. Of course, such stress is generated in a point state, but by generating a large number of internal stress layers 3, stress is generated on the entire surface. By adjusting the three-dimensional position and distribution of the internal stress layer 3 in the SiC base 11, the warp of the SiC base 11 can be controlled and the stress caused by the work-affected layer 2 can be offset.

  That is, the manufacturing method of the SiC semiconductor device of the present embodiment includes (a) a step of preparing an SiC substrate 11 (SiC substrate) having an element active region formed on the surface side, and (b) a surface of the SiC substrate 11. A process of fixing the flat surface and grinding the back surface; and (c) an internal stress layer 3 for applying a stress that cancels the warping caused by grinding while the surface of the SiC base 11 is fixed to the flat surface. Forming. Thereby, the curvature of the SiC substrate accompanying thinning can be corrected, and on-resistance can be reduced.

  SiC transmits light from the ultraviolet region to the wavelength of about 5000 nm in the infrared region in the absence of impurities. The SiC substrate 11 is n-type and is doped with nitrogen to increase the conductivity. In this state, infrared light having a wavelength longer than 1000 nm is not transmitted. In addition, since large light absorption is performed with a peak at 460 nm in the visible light region, the transmission region of the laser beam for modification is suitably 500 nm to 1000 nm.

  In addition, since the focal depth fluctuates when laser irradiation is performed with the SiC substrate 11 warped, it is necessary to perform in a flat state after grinding. For this purpose, the surface device side of the SiC substrate 11 is attached to a substrate such as sapphire and ground, and then laser irradiation is performed while the flatness is maintained in the same vacuum adsorption state to form the internal stress layer 3.

For example, laser irradiation is performed using a YAG laser. The second harmonic (2ω) wavelength is 532 nm, the frequency is 30 kHz, the pulse width is 40 ns, the pulse energy density at the irradiation point is about 10 GW / cm ² , and the dots are spaced at intervals of 200 μm from the ground surface (work-affected layer 2) to 150 μm. The internal stress layer 3 is formed in a straight line parallel to the surface. The depth of the formation position is adjusted by shifting the focus position to the depth calculated from the refractive index after focusing on the surface. As for the surface state of the incident surface of the laser, it is desirable that the flatness is within 1 μm and Ra is 1 nm or less. This is to prevent the power from fluctuating due to the scattering of laser light on the surface. When the dot line of the internal stress layer 3 is formed along the dicing line 4 (FIG. 10) for separating the element in a later process, the internal stress layer 3 does not remain in the separated element, which affects the element characteristics. Does not reach.
Since the internal stress layer 3 is formed with a distribution of only one point in the depth direction by the pulsed laser beam, no cracks are caused until the final separation step.

  After the ohmic electrode 50 is formed on the back surface of the SiC substrate 11 whose warpage has been corrected by the internal stress layer 3 in this manner, chip division is performed. In the case of laser dicing, an etching mask is formed by photolithography, and the ohmic electrode 50 at the chip division portion is removed. After performing the characteristic inspection of each chip on the wafer, the chip is divided.

  Further, in the case of laser dicing, as shown in FIG. 11, in the vertical direction along the dicing line 4, as close to the surface as possible inside the SiC substrate 11, so that cracking occurs in the dicing line 4 more reliably. A plurality of lasers are irradiated to form an element isolation internal stress layer 5 different from the internal stress layer 3. Then, chip isolation is performed starting from the element isolation internal stress layer 5. Of course, element isolation may be performed not only by laser dicing but also by dicing using a dicing blade with a grindstone.

<Effect>
According to the manufacturing method of the SiC semiconductor element of the present embodiment, the following effects are obtained. That is, the manufacturing method of the SiC semiconductor device of this embodiment includes (a) a step of preparing a SiC substrate 11 (SiC substrate) having an ion implantation region 30 (device active region) formed on the surface side, and (b). A step of fixing the surface of the SiC substrate 11 to a flat surface and grinding the back surface; and (c) an internal for applying a stress that cancels the warp of the SiC substrate 11 by grinding while the surface of the SiC substrate 11 is fixed to the flat surface. Forming the stress layer 3 inside the SiC substrate 11. Thereby, the curvature of the SiC substrate accompanying thinning can be corrected, and on-resistance can be reduced.

  In the step (c), the internal stress layer 3 is formed by laser irradiation. By forming the internal stress layer 3 using laser irradiation, it is possible to correct the warp of the SiC substrate accompanying the reduction in thickness and reduce the on-resistance.

  Further, in the step (c), an amorphous layer is formed as the internal stress layer 3. The expansion of the amorphous layer becomes a stress that cancels the warp of the SiC substrate 11 due to grinding, and the warp of the SiC substrate accompanying the thinning can be corrected, and the on-resistance can be reduced.

  In the step (c), the internal stress layer 3 is formed along the dicing line 4 of the chip, so that the internal stress layer 3 does not remain in the element after separation, and the element characteristics are not affected.

  Further, (d) a step of forming an element isolation internal stress layer 5 (another internal stress layer) on the surface side of the SiC substrate 11 along the dicing line 4 is further provided. Chip separation can be performed as a starting point.

  2 Work-affected layer, 3 Internal stress layer, 4 Dicing line, 5 Element isolation internal stress layer, 10 SiC substrate, 11 SiC substrate, 20 SiC epitaxial layer, 21 Oxide film, 30 Ion implantation region, 40 Schottky electrode, 50 Ohmic electrode, 60 film quality deteriorated layer, 100 ion implantation mask.

Claims (6)

(A) growing a SiC epitaxial layer on the SiC substrate;
(B) implanting ions into the SiC epitaxial layer;
(C) performing a heat treatment for activating the implanted ions;
(D) forming an internal stress layer that generates an expansion stress by condensing a laser beam that passes through the SiC substrate or the SiC epitaxial layer inside the crystal of the SiC substrate or the SiC epitaxial layer. A method for producing a SiC semiconductor device, comprising:   The method of manufacturing an SiC semiconductor device according to claim 1, wherein the internal stress layer in the step (d) is formed by pulse laser irradiation.   2. The method of manufacturing an SiC semiconductor device according to claim 1, wherein the internal stress layer in the step (d) is formed by laser irradiation in a state where the SiC substrate is vacuum-adsorbed. 3.   3. The method of manufacturing an SiC semiconductor device according to claim 1, wherein the internal stress layer in the step (d) is formed along a dicing line. 4. A SiC epitaxial layer formed on the SiC substrate;
An ion implantation region formed on the surface side of the SiC epitaxial layer;
The SiC substrate or a number is formed at a predetermined depth position of the crystal within the SiC epitaxial layer, Bei example an internal stress layer is a dot-shaped SiC amorphous region for generating the expansion stress, the internal stress layer A SiC semiconductor element characterized by being continuous with the SiC substrate or the SiC epitaxial layer .   6. The SiC semiconductor device according to claim 5, wherein the internal stress layers are formed at a predetermined interval.

Images