JP5816578B2 - Gas distribution connection packing and gas distribution connection using the same - Google Patents
Gas distribution connection packing and gas distribution connection using the same Download PDFInfo
- Publication number
- JP5816578B2 JP5816578B2 JP2012049344A JP2012049344A JP5816578B2 JP 5816578 B2 JP5816578 B2 JP 5816578B2 JP 2012049344 A JP2012049344 A JP 2012049344A JP 2012049344 A JP2012049344 A JP 2012049344A JP 5816578 B2 JP5816578 B2 JP 5816578B2
- Authority
- JP
- Japan
- Prior art keywords
- packing
- seal
- gas
- gas flow
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012856 packing Methods 0.000 title claims description 86
- 238000009826 distribution Methods 0.000 title claims description 26
- 230000002093 peripheral effect Effects 0.000 claims description 23
- 239000007789 gas Substances 0.000 description 129
- 238000007789 sealing Methods 0.000 description 21
- 239000000463 material Substances 0.000 description 12
- 230000009257 reactivity Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229920003002 synthetic resin Polymers 0.000 description 4
- 239000000057 synthetic resin Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012795 verification Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 210000004907 gland Anatomy 0.000 description 2
- 229910000856 hastalloy Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000010718 Oxidation Activity Effects 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229920003049 isoprene rubber Polymers 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
Landscapes
- Joints With Pressure Members (AREA)
- Gasket Seals (AREA)
Description
本発明は、ガス流通部接続用パッキンおよびそれを用いたガス流通接続部に関し、例えば、半導体や太陽電池等の生産装置や研究設備等において使用される材料ガスや各種プロセスにおいて使用される液化ガスや特殊ガス等のガス供給装置において用いられるガス流通部接続用パッキンおよびそれを用いたガス流通接続部に関するものである。 TECHNICAL FIELD The present invention relates to a gas distribution part connection packing and a gas distribution connection part using the same, for example, a material gas used in a production apparatus or research facility such as a semiconductor or a solar cell, or a liquefied gas used in various processes. The present invention relates to a gas distribution part connection packing used in a gas supply device such as a gas or a special gas, and a gas distribution connection part using the same.
半導体や太陽電池等（例えば成膜材料等）を生産する製造装置や新たな素材を開発する研究設備、あるいは各種プロセスにおいては、各種の材料ガスや特殊ガスあるいは液体材料ガス等が多用されている。こうしたガスの中には、高い吸着性や強い腐食性を有するもの、あるいは空気中の水分と反応や吸湿して変質するもの等があり、ガス供給配管系は、外気と遮蔽あるいは密閉され、上記製造装置等に供給されて消費される。 Various material gases, special gases, liquid material gases, etc. are frequently used in manufacturing equipment for producing semiconductors, solar cells, etc. (for example, film forming materials), research facilities for developing new materials, and various processes. . Among these gases, there are those having high adsorptivity and strong corrosivity, or those that react with moisture in the air or change moisture, and the gas supply piping system is shielded or sealed from outside air, It is supplied to a manufacturing apparatus and consumed.
こうしたガス供給配管系には多くのガス流通接続部が備えられ、定期的に保守点検のための取外し作業や取り付け作業が行なわれる。このため、ガス流通接続部においては、配管系を構成する接続部材に接続するナット間に導入するパッキンが多く用いられる。このとき、例えばガスシリンダーとガス供給装置の接続は、ガス漏洩の危険性が非常に高い箇所であるため、こうしたシールに用いられるパッキンに対しては、その変形量を管理すべく、ナットの締め付けトルクが管理される。つまり、トルク値が管理・校正されたトルクレンチを使用し、規定値内のトルクで締付け、ガス漏洩を防止する必要がある。トルクレンチのトルク値が管理・校正されていない場合は、締付を実施してもガス漏洩が発生する可能性がある。一方、こうした管理を必要としない構成を有するガス流通接続部は、従前からガス供給装置における課題の１つであり、種々の検討がなされてきた。 Such a gas supply piping system is provided with a lot of gas circulation connection parts, and a detaching work and a mounting work for maintenance and inspection are periodically performed. For this reason, in a gas distribution connection part, many packings introduce | transduced between the nuts connected to the connection member which comprises a piping system are used. At this time, for example, the connection between the gas cylinder and the gas supply device is a place where there is a very high risk of gas leakage. Therefore, for the packing used for such a seal, tighten the nut to control the amount of deformation. Torque is managed. In other words, it is necessary to use a torque wrench whose torque value is controlled and calibrated and tighten with a torque within a specified value to prevent gas leakage. If the torque value of the torque wrench is not controlled or calibrated, gas leakage may occur even if tightening is performed. On the other hand, the gas distribution connection portion having a configuration that does not require such management has been one of the problems in the gas supply device, and various studies have been made.
例えば、メスナットを過剰に締め付けた場合でも、合成樹脂製ガスケットの変形量を最小限に抑制することができることを目的として、図７に示すようなガスシリンダーバルブ接続継手が提案されている（例えば特許文献１参照）。具体的には、グランド１０５を着脱自在に嵌合するメスナット１０４内周のネジ部と、ガスシリンダーバルブ出口１０３外周のネジ部とを螺合させつつ前記グランド１０５とガスシリンダーバルブ出口１０３との間に介在する合成樹脂製ガスケット１０６を押圧して、前記ガスシリンダーバルブ出口１０３に接続するガスシリンダーバルブ接続継手において、前記ガスケット１０６の外周に過剰締め付けを防止する金属製リング１０７を装着した。ここで、１０８はスラストベアリングを、１０９はワイヤ−リングを、１１０はガス漏洩試験のための貫通孔を、１１１はメスナット外周の円形部を示す。 For example, a gas cylinder valve connection joint as shown in FIG. 7 has been proposed for the purpose of minimizing the amount of deformation of the synthetic resin gasket even when the female nut is tightened excessively (for example, a patent) Reference 1). Specifically, the thread portion between the inner periphery of the female nut 104 that detachably fits the gland 105 and the thread portion on the outer periphery of the gas cylinder valve outlet 103 are screwed to each other between the gland 105 and the gas cylinder valve outlet 103. In the gas cylinder valve connection joint connected to the gas cylinder valve outlet 103 by pressing the synthetic resin gasket 106 interposed therebetween, a metal ring 107 for preventing excessive tightening was attached to the outer periphery of the gasket 106. Here, 108 is a thrust bearing, 109 is a wire ring, 110 is a through-hole for a gas leakage test, and 111 is a circular portion on the outer periphery of the female nut.
しかし、上記のようなガス流通接続部には、以下の課題が生じることがあった。
（ｉ）従前のガス流通接続部においては、供給するガス種が腐食性を有する場合はパッキン材を考慮し、反応性・耐食性など安全かつシール性の高いパッキンを使用しなければならない。また、腐食性ガスは反応性がきわめて高いため、ガス供給設備に導入するパッキン材は合成樹脂系の材料は使用できず、耐食性の優れた金属材料を選択することが望ましい。しかしながら、金属材料のパッキンは高硬度のため、トルクレンチを使用し、規定内のトルク値で締付けても、シール性が乏しく、ガス漏洩を防止することができないという問題があった。
（ii）金属製リングを装着したガスケットを用いたガス流通接続部においては、金属性リング以外は合成樹脂製のパッキン材を使用しているため、酸化、反応性が高いガス供給装置には使用できないという問題がある。また、ガスケットのシール性は、従前同様、ガスケットの平面部における面全体の変形量に依存することから、その一部で異常な変形が生じた場合には、シール性が破壊され、その漏洩箇所の特定・修復が難しいという課題があった。特にガスケットに異常がなく、接続部材のシール表面のキズ等があった場合には、その漏洩箇所の特定はさらに困難となる。
However, the following problems may occur in the gas distribution connection section as described above.
(I) In the conventional gas distribution connection portion, when the gas type to be supplied is corrosive, the packing material must be taken into consideration and a safe and highly sealable packing such as reactivity and corrosion resistance must be used. Further, since the corrosive gas has extremely high reactivity, a synthetic resin material cannot be used as the packing material introduced into the gas supply facility, and it is desirable to select a metal material having excellent corrosion resistance. However, since the packing of the metal material has high hardness, there is a problem that even if a torque wrench is used and tightened with a torque value within a specified range, the sealing performance is poor and gas leakage cannot be prevented.
(Ii) Gas distribution connection parts using gaskets with metal rings use synthetic resin packing materials other than metal rings, so they are used for gas supply devices with high oxidation and reactivity. There is a problem that you can not. In addition, since the sealing performance of the gasket depends on the deformation amount of the entire surface of the flat portion of the gasket as before, if an abnormal deformation occurs in a part of the gasket, the sealing performance is destroyed and the leakage location There was a problem that it was difficult to identify and repair. In particular, when there is no abnormality in the gasket and there is a scratch or the like on the seal surface of the connecting member, it is more difficult to identify the leaked portion.
本発明の目的は、高い吸着性や強い腐食性を有するガス種あるいは反応性の高いガス種等に対しても、簡便な構成で、外気との接触なくガス流通路の確実なシールを確保し、かつシール面積を低減して低トルクでシール面に潰れ代が形成され、確実なシール部を構成することができるガス流通部接続用パッキンおよびそれを用い、保守が容易で、再現性のよい確実なシール部を構成することができるガス流通接続部を提供することにある。 The object of the present invention is to ensure a reliable seal of the gas flow path with no contact with the outside air with a simple configuration even for gas species having high adsorptivity and strong corrosivity or highly reactive gas species. In addition, the seal area is reduced and a crushing margin is formed on the seal surface with a low torque, and a gas flow portion connection packing capable of constituting a reliable seal portion, and using the same, maintenance is easy and reproducibility is good An object of the present invention is to provide a gas flow connection portion that can constitute a reliable seal portion.
本発明者らは、上記課題を解決するために鋭意研究を重ねた結果、以下に示すガス流通部接続用パッキンおよびそれを用いたガス流通接続部によって上記目的を達成できることを見出し、本発明を完成するに到った。 As a result of intensive studies to solve the above problems, the present inventors have found that the above object can be achieved by the following gas distribution part connection packing and a gas distribution connection part using the same. It came to completion.
本発明は、ガス流通部の端部を構成する接続部材が複数の接続されるガス流通接続部に用いられるシール用パッキンであって、
中央に設けられた開口部と、該開口部を一端とし、所定の厚みを有して相対向する所定長さの平坦面を有する突状部と、該突状部の他端に設けられた段差を一端とし、少なくとも一部に前記突状部よりも薄肉の所定長さの平坦面を有する側面部と、を備え、
前記接続部材の少なくとも１つと、前記突状部の一端および平坦面において係止してシールを形成するとともに、前記接続部材の少なくとも他の１つと、前記突状部の他端に形成された角部においてシールを形成することを特徴とする。
The present invention is a seal packing used in a plurality of gas flow connection parts to which the connection member constituting the end of the gas flow part is connected,
An opening provided in the center, a protrusion having a predetermined thickness and a flat surface having a predetermined length opposite to each other, and the other end of the protrusion A step portion as one end, and a side surface portion having a flat surface of a predetermined length that is thinner than the protruding portion at least in part,
At least one of the connection members, one end of the projecting portion and a flat surface are locked to form a seal, and at least another one of the connection members and a corner formed at the other end of the projecting portion A seal is formed at the portion.
上記のように、各種製造設備には、所定の制御条件の基に、種々のガスが連続的あるいは断続的に供給されることから、不純物の混入がないことは無論のこと、短時間で簡便な操作によって保守が可能なガス供給配管系が要求される。特に、高い吸着性や強い腐食性を有するガス種、あるいは空気中の水分と反応や吸湿して変質するガス種については、そのガス供給配管系の接続部において、その接続操作の安定性とシールの確実性が重要となる。本発明は、接続部材の中間に配設され、１の接続部材と広い面で係止してガス流路の外気とのシールを形成するとともに、パッキンに形成された角部において他の接続部材と接触し、角部の変形によりガス流路と外気とのシールを形成することを特徴とする。こうした構成によって、高い吸着性や強い腐食性を有するガス種あるいは反応性の高いガス種等に対しても、簡便な構成で、外気との接触なくガス流通路の確実なシールを確保し、かつシール面積を低減して低トルクでシール面に潰れ代が形成され、確実なシール部を構成することが可能となった。 As described above, since various gases are continuously or intermittently supplied to various manufacturing facilities based on predetermined control conditions, it is a matter of course that there is no contamination of impurities, and it is simple in a short time. A gas supply piping system that can be maintained by simple operation is required. In particular, for gas species that have high adsorptivity and strong corrosivity, or gas species that react with moisture in the air or change in quality due to moisture absorption, the connection operation stability and seals at the connection part of the gas supply piping system Certainty is important. The present invention is disposed in the middle of the connection member, and is engaged with one connection member on a wide surface to form a seal with the outside air of the gas flow path, and at the corner portion formed in the packing, the other connection member And a seal between the gas flow path and the outside air is formed by the deformation of the corners. With such a configuration, even for gas species having high adsorptivity and strong corrosiveness or highly reactive gas species, etc., a simple configuration ensures a reliable seal of the gas flow path without contact with outside air, and The seal area is reduced and a crushing margin is formed on the seal surface with a low torque, so that a reliable seal portion can be configured.
具体的には、パッキンを用いたシールの形成におけるトルク量は、パッキンの変形がより小容量（局部的）であるほど小さく、ガス流通路においては、その周回をパッキンの一部と接続部材との線接触あるいはこれに近い接触をさせることが好ましい。本発明は、接続部材とパッキンとの接触によるシールを、突状部の角部という小容量の部位における変形によって形成することによって、非常に小さなトルクでシール面に潰れ代が形成され、確実なシール部を構成することを可能にした。 Specifically, the amount of torque in the formation of the seal using the packing is smaller as the deformation of the packing is smaller (local), and in the gas flow passage, the circumference of the packing is connected to a part of the packing and the connecting member. It is preferable to make a line contact or contact close to this. According to the present invention, the seal by contact between the connecting member and the packing is formed by deformation in a small capacity portion called a corner portion of the projecting portion, so that a crushing margin is formed on the seal surface with a very small torque. It was possible to configure the seal part.
本発明は、上記ガス流通部接続用パッキンであって、前記側面部の一部に、１以上の、該側面部よりも厚肉の厚肉部を有することを特徴とする。
上記のように、本発明に係るガス流通部接続用パッキンは、低トルクでガス流路の外気との確実なシール部を構成する上において、パッキンに形成された角部の変形が重要な役割を果たしている。本発明は、さらに、その角部に繋がる側面部の一部に厚肉部を設けることによって、角部の変形によるシール性を強化することができることを見出した。角部の変形によって生じたパッキンの歪を該厚肉部において吸収するとともに、角部への反発力の発生によって、よりシール性を強化することができる。また、突状部以外に形成された厚肉部は、接続部材とのシール面を新たに形成することができるとともに、後述するように、接続部材における溝部の配設によって、さらに２重のシール機能を有する構成とすることが可能となった。特に、内部圧力が高いガス流路に用いるガス流通部接続用に好適である。
The present invention is the above-described packing for connecting a gas flow part, characterized in that a part of the side part has one or more thick parts that are thicker than the side part.
As described above, the gas circulation portion connecting packing according to the present invention has an important role in the deformation of the corner portion formed in the packing in configuring a reliable seal portion with the outside air of the gas flow path with low torque. Plays. The present invention has further found that the sealability due to the deformation of the corner can be enhanced by providing a thick portion at a part of the side surface connected to the corner. The distortion of the packing caused by the deformation of the corner portion is absorbed in the thick portion, and the sealing property can be further enhanced by the generation of the repulsive force on the corner portion. Further, the thick portion formed other than the projecting portion can newly form a sealing surface with the connecting member, and, as will be described later, further double sealing is achieved by disposing the groove portion in the connecting member. It became possible to make it the structure which has a function. In particular, it is suitable for connecting a gas flow part used for a gas flow path having a high internal pressure.
本発明は、上記ガス流通部接続用パッキンであって、前記側面部の他端に、該側面部よりも厚肉の厚肉部を備え、前記側面部と対向する平面部を有する前記接続部材の少なくとも１つとシールを形成することを特徴とする。
ガス流路の外気との確実なシール部を構成する上において、１つのシール構造によって形成されるのではなく、複数のシール構造によって形成されることが好ましい場合がある。本発明は、突状部以外に形成された厚肉部を側面部の他端（一端は突状部）に設け、複数のシール構造とするとともに、最も最外周面で外気を遮断するシールを形成することによって、より確実なシール部を構成することができる。
The present invention is the gas-flow-portion-connecting packing, wherein the connecting member has a thick-walled portion thicker than the side surface at the other end of the side surface and has a flat surface facing the side surface. A seal is formed with at least one of the above.
In configuring a reliable seal portion with the outside air of the gas flow path, it may be preferable to form a plurality of seal structures instead of a single seal structure. In the present invention, a thick portion formed other than the projecting portion is provided at the other end of the side surface portion (one end is a projecting portion) to form a plurality of seal structures, and a seal that blocks outside air at the outermost peripheral surface. By forming, a more reliable seal part can be constituted.
本発明は、ガス流通部の端部を構成する接続部材が複数の接続されるガス流通接続部であって、
中央に設けられた開口部と、該開口部を一端とし、所定の肉厚を有し、相対向する所定長さの平坦面を有する突状部と、該突状部の他端に段差を有し、前記突状部よりも薄い肉厚の所定長さの平坦面を少なくとも一部に有する側面部と、を備えたガス流通部接続用パッキンを用いるとともに、
前記接続部材の少なくとも１つが、内周面が前記ガス流通路に接するスリーブおよび前記側面部と対向する平面部を備え、該スリーブの外周面および該平面部において前記突状部の一端および平坦面が係止してシールを形成し、前記接続部材の少なくとも他の１つが、ガス流通路に接する内周面の一端に所定長さの傾斜部を備え、該傾斜部において前記突状部の他端に形成された角部が押圧されて変形してシールを形成することを特徴とする。
上記ガス流通部接続用パッキンは、低トルクでシール面に潰れ代が形成され、少ないシール面積で確実なシール部を構成することができる。本発明は、こうしたパッキンを効果的に用いるガス流通接続部として、１つを、内周面がガス流通路に接するように備えられたスリーブの外周面およびにおいて該パッキンの突状部の一端および平坦面と係止させ、他の１つを、ガス流通路に接する内周面の一端に所定長さの傾斜部を備え、該傾斜部においてパッキンの角部を押圧させることによって、保守が容易で、再現性のよい確実なシールを形成することができる。
The present invention is a gas flow connection part to which a plurality of connection members constituting the end of the gas flow part are connected,
A step is provided at the center, an opening having the opening as one end, a predetermined thickness, a flat surface having a predetermined length opposite to each other, and the other end of the protrusion. And using a packing for connecting a gas flow part comprising a side part having at least a part of a flat surface with a predetermined length that is thinner than the projecting part,
At least one of the connecting members includes a sleeve whose inner peripheral surface is in contact with the gas flow passage and a flat portion facing the side portion, and one end of the projecting portion and a flat surface on the outer peripheral surface of the sleeve and the flat portion. Locks to form a seal, and at least the other one of the connecting members has an inclined portion of a predetermined length at one end of the inner peripheral surface in contact with the gas flow passage, and the protruding portion A corner portion formed at the end is pressed and deformed to form a seal.
The gas flow portion connecting packing has a low torque, a crushing margin is formed on the seal surface, and a reliable seal portion can be configured with a small seal area. The present invention provides one end of the protruding portion of the packing on the outer peripheral surface of the sleeve provided so that the inner peripheral surface is in contact with the gas flow passage, Maintenance is easy by locking the flat surface and providing the other one with an inclined portion of a predetermined length at one end of the inner peripheral surface in contact with the gas flow passage, and pressing the corner of the packing at the inclined portion. Thus, a reliable seal with good reproducibility can be formed.
本発明は、上記ガス流通接続部であって、前記側面部と対向する平面部を有する前記接続部材の少なくともいずれかの該平面部の一部に、前記ガス流通部および前記パッキンの外周端部との間を周回するように溝部が設けられ、前記側面部の一部が変形して該溝部に挿入され、シールが形成されることを特徴とする。
上記のように、ガス流路と外気の間に複数のシール構造が形成されることが好ましい場合がある。本発明は、パッキンの突状部におけるシール構造に加え、接続部材の平面部とパッキンの側面部（厚肉部を含む）との間のシール面（面接触）、さらに該平面部の一部に設けられた溝部へ挿入されるパッキンの一部の変形による新たなシール（線接触に近い）が形成されることによって、より確実なシール部を構成することができる。
The present invention is the gas flow connection portion, wherein the gas flow portion and the outer peripheral end portion of the packing are formed on a part of the flat portion of at least one of the connection members having a flat portion facing the side surface portion. A groove portion is provided so as to circulate between the two and a part of the side surface portion is deformed and inserted into the groove portion to form a seal.
As described above, it may be preferable to form a plurality of seal structures between the gas flow path and the outside air. In addition to the sealing structure in the projecting portion of the packing, the present invention provides a sealing surface (surface contact) between the flat surface portion of the connecting member and the side surface portion (including the thick wall portion) of the packing, and a part of the flat surface portion. By forming a new seal (close to line contact) by deformation of a part of the packing inserted into the groove portion provided in the seal portion, a more reliable seal portion can be configured.
また、本発明は、上記ガス流通接続部であって、前記側面部と対向する平面部を有する前記接続部材の少なくともいずれかの該平面部の一部に、前記ガス流通部および前記パッキンの外周端部との間を周回するように溝部が設けられ、前記側面部の一部に１以上の該側面部よりも厚肉の厚肉部を有する前記パッキンの、該厚肉部の一部が変形して該溝部に挿入され、シールが形成されることを特徴とする。
パッキンを用いたシールの形成におけるトルク量は、パッキンの変形がより小容量（局部的）であるほど小さく、ガス流通路においては、その周回をパッキンの一部と接続部材との線接触あるいはこれに近い接触をさせることが好ましい。本発明は、接続部材とパッキンの側面部との接触によるシール形成を、側面部の一部に厚肉部を設けて小容量化し、さらに接続部材に溝部を設け、該溝部へのパッキンの局部的な変形によるシール部分の小容量化によって、複数のシール構造を有しても、非常に小さなトルクでシール面に潰れ代が形成され、突状部の角部における変形と同様、確実なシール部を構成することができる。
Further, the present invention provides the gas circulation connection part, wherein at least a part of the flat part of the connection member having a flat part facing the side part is provided on the outer periphery of the gas circulation part and the packing. A part of the thick part of the packing is provided with a groove part so as to circulate between the end part, and a part of the side part has a thick part thicker than one or more side parts. The seal is formed by being deformed and inserted into the groove.
The amount of torque in the formation of the seal using the packing is smaller as the deformation of the packing is smaller (local). In the gas flow path, the circumference of the gas flow passage is in line contact with a part of the packing and the connecting member. It is preferable to make contact close to. The present invention reduces the seal formation by contact between the connecting member and the side surface portion of the packing by providing a thick portion at a part of the side surface portion, further providing a groove portion in the connecting member, and local portions of the packing in the groove portion. By reducing the capacity of the seal part due to a general deformation, even if there are multiple seal structures, a crushing margin is formed on the seal surface with a very small torque. Can be configured.
本発明に係るガス流通部接続用パッキン（以下「本パッキン」という）は、中央に設けられた開口部と、該開口部を一端とし、所定の厚みを有して相対向する所定長さの平坦面を有する突状部と、該突状部の他端に設けられた段差を一端とし、少なくとも一部に突状部よりも薄肉の所定長さの平坦面を有する側面部と、を備え、接続部材の少なくとも１つと、開口部および突状部の平坦面において係止してシールを形成するとともに、接続部材の少なくとも他の１つと、突状部の他端に形成された角部においてシールを形成することを特徴とする。以下、図面を参照しながら説明する。 A packing for connecting a gas flow part according to the present invention (hereinafter referred to as “the present packing”) has an opening provided in the center and a predetermined length opposite to each other with a predetermined thickness with the opening being one end. A projecting portion having a flat surface, and a side surface portion having a flat surface having a predetermined length that is thinner than the projecting portion at least in part with a step provided at the other end of the projecting portion as one end. , At least one of the connecting members, and locked on the flat surface of the opening and the protruding portion to form a seal, and at least one other of the connecting members and the corner formed at the other end of the protruding portion A seal is formed. Hereinafter, description will be given with reference to the drawings.
＜本パッキンの基本構成例＞
図１は、本パッキンの基本的な構成を例示する概略図である。本パッキン１０は、その中央に、内部にガスが流通可能な開口部１を有し、開口部１を一端（２ａ）とし、所定の厚み２ｄを有して相対向する所定長さ２Ｌの平坦面２ｂを有する突状部２と、突状部２の他端２ｃに設けられた段差３ａを一端とし、少なくとも一部に突状部２よりも薄肉の所定長さ３Ｌの平坦面３ｂを有する側面部３と、を備える。他端には、段差３ａによって角部２ｃが形成される。本パッキン１０は、例えば２つの接続部材の中間に配設され、後述するように、突状部２の一端２ａおよび平坦面２ｂにおいて１の接続部材と係止し、ガス流路の外気とのシールを形成するとともに、角部２ｃ（他端）において他の接続部材と接触し、角部２ｃが変形することによって、ガス流路と外気とのシールを形成することができる。
<Basic configuration example of this packing>
FIG. 1 is a schematic view illustrating the basic configuration of the packing. The packing 10 has an opening 1 through which gas can flow in the center, the opening 1 is one end (2a), and has a predetermined thickness 2d and a predetermined length 2L facing each other. The protrusion 2 having the surface 2b and the step 3a provided at the other end 2c of the protrusion 2 have one end, and at least a portion of the flat surface 3b is thinner than the protrusion 2 and has a predetermined length 3L. Side surface portion 3. At the other end, a corner 2c is formed by the step 3a. The packing 10 is disposed, for example, in the middle of two connection members, and locks with one connection member at one end 2a and the flat surface 2b of the projecting portion 2, as described later. While forming a seal, it contacts with another connecting member at the corner 2c (the other end), and the corner 2c is deformed to form a seal between the gas flow path and the outside air.
このとき、突状部２の一端２ａおよび平坦面２ｂと１の接続部材は、面接触することによって、十分なシール性を確保するとともに、突状部２に対する押圧を分散することによって、突状部２の変形を低減し、本パッキン１０の係止を確実に行なうことができる。一方、角部２ｃと他の接続部材は、角部２ｃの変形に伴う所定幅の線接触に近い接触を行なうことによって、低トルクでシール面に潰れ代が形成され、確実なシール部を構成するとともに、小さなシール面積（接触面積）による十分なシール性を確保することができる。 At this time, the one end 2a of the projecting portion 2 and the connecting member of the flat surfaces 2b and 1 are brought into surface contact so as to ensure sufficient sealing performance and disperse the pressure on the projecting portion 2, thereby projecting the projecting shape. The deformation of the portion 2 can be reduced, and the packing 10 can be reliably locked. On the other hand, the corner portion 2c and the other connecting members are made close to a line contact with a predetermined width associated with the deformation of the corner portion 2c, so that a crushing margin is formed on the seal surface with a low torque, thereby forming a reliable seal portion. In addition, it is possible to ensure sufficient sealing performance due to a small sealing area (contact area).
対象となるガスは、特に限定することはない。ヘリウム（Ｈｅ）やアルゴン（Ａｒ）等の希ガスあるいは窒素ガス（Ｎ２）等のような反応性が低く安定性の高いガスだけではなく、特に高い吸着性や強い腐食性を有するガス種あるいは反応性の高いガス種などには、その特徴を有効に活かすことができる。具体的には、ＮＨ３，ＢＣＬ３，ＣＬ２，ＳｉＨ２ＣＬ２，Ｓｉ２Ｈ６、ＨＢｒ、ＨＦ、Ｎ２Ｏ、Ｃ３Ｆ８、ＳＦ６、ＷＦ６等に代表される材料ガス等を挙げることができる。 The target gas is not particularly limited. Not only a gas having a low reactivity and a high stability such as a rare gas such as helium (He) or argon (Ar) or a nitrogen gas (N 2 ), but also a gas species having a particularly high adsorptivity or strong corrosiveness or The characteristics can be effectively utilized for highly reactive gas species. Specifically, material gases represented by NH 3 , BCL 3 , CL 2 , SiH 2 CL 2 , Si 2 H 6 , HBr, HF, N 2 O, C 3 F 8 , SF 6 , WF 6 , etc. Can be mentioned.
本パッキンは、成形性および所定の弾性あるいは変形性を有するものであれば、特に限定されるものではく、対象となるガス種によって、種々の材料を用いることができる。例えば、反応性が低いガス等に対しては、ネオプレンゴムやイソプレンゴム等の高弾性樹脂や銅やアルミニウム等の変形容易な金属を用いることができる。一方、反応性や吸着性の強いガス等に対しては、例えばフッ素ゴムやフッ素樹脂あるいはブタジエンゴム等の耐蝕性樹脂やステンレス鋼（ＳＵＳ−３１６Ｌ等）やハステロイ（ＴＭ）やニッケル等を用いることが好ましい。 The packing is not particularly limited as long as it has moldability and predetermined elasticity or deformability, and various materials can be used depending on the target gas type. For example, for a gas having low reactivity, a highly elastic resin such as neoprene rubber or isoprene rubber, or an easily deformable metal such as copper or aluminum can be used. On the other hand, for gas having strong reactivity and adsorptivity, for example, corrosion resistant resin such as fluororubber, fluororesin or butadiene rubber, stainless steel (SUS-316L, etc.), Hastelloy (TM), nickel, etc. are used. Is preferred.
本パッキンは、上記形態に限定されるものではなく、例えば図２（Ａ）〜（Ｄ）に例示する構成を用いることができる。具体的には、図２（Ａ）のように、１つの平坦面２ｂのみを有する突状部２を備えた構成を挙げることができる。一端２ａと側面部３から繋がる平坦面３ｃによって１の接続部材と係止してシールを形成し、角部２ｃにおいて他の接続部材とのシールを形成することができる。平坦部３ｃ全体でシール面を形成することができ、かつ角部２ｃの変形による歪を大きく吸収することができる。また、角部２ｃは必ずしも直角をいうものではなく、図２（Ｂ）のように、丸みを有する角部２ｃを備えた構成を挙げることができる。保守された場合において繰り返し使用される場合に、角部２ｃの損傷を緩和することができ、確実なシールを確保することができる。同様に、角部２ｃ以外の端部の角についても、丸みを有する構成を挙げることができる。図１，図２（Ａ）に例示した構成について、各々図２（Ｃ），（Ｄ）のように、一端２ａの両角および側面部３の他端３ｅの両角について、丸みを構成することができる。 This packing is not limited to the said form, For example, the structure illustrated to FIG. 2 (A)-(D) can be used. Specifically, as shown in FIG. 2 (A), a configuration including a protruding portion 2 having only one flat surface 2b can be given. The flat surface 3c connected from the one end 2a and the side surface portion 3 can be engaged with one connecting member to form a seal, and the corner portion 2c can form a seal with another connecting member. A sealing surface can be formed by the entire flat portion 3c, and distortion due to deformation of the corner portion 2c can be largely absorbed. Moreover, the corner | angular part 2c does not necessarily say a right angle, but can provide the structure provided with the corner | angular part 2c which has roundness like FIG. 2 (B). When used repeatedly in the case of maintenance, damage to the corner 2c can be alleviated and a reliable seal can be ensured. Similarly, the corners of the end portions other than the corner portion 2c can also be configured to have roundness. In the configurations illustrated in FIGS. 1 and 2A, as shown in FIGS. 2C and 2D, both corners of the one end 2 a and both corners of the other end 3 e of the side surface portion 3 may be rounded. it can.
＜本パッキンを用いたガス流通接続部の基本構成例＞
本パッキン１０を用いたガス流通接続部（以下「本接続部」という）の実施の形態について、説明する。図３（Ａ）は、図１に例示された本パッキン１０を備えた本接続部によって、ガス充填容器（図示せず）に接続された容器弁２０とガス供給装置（図示せず）への供給流路３０が接続される基本的な構成を例示する概略図である。ガス供給装置への充填ガスの供給時に、容器弁２０に供給流路３０が接続され、未使用時あるいは点検時には接続が解かれる。使用時には、容器弁２０を構成するバルブ２１の操作によって、開閉弁２２が移動し、ガス充填容器内部に繋がるガス流通路２３が、本パッキン１０を介して供給流路３０と接続され、充填ガスがガス供給装置に供給される。供給流路３０は、外気への充填ガスの漏洩が生じないように、容器弁２０の開部２４にナット２５によって固定される。容器弁２０および供給流路３０を構成する各部の素材は、堅牢な構造を形成することが可能であれば特に制限はないが、半導体用特殊材料ガス供給装置等に使用される場合には、耐蝕性を必要とすることから、例えばステンレス鋼（ＳＵＳ−３１６Ｌ等）やハステロイ（ＴＭ）やニッケルなどを使用することが好ましい。
<Example of basic configuration of gas distribution connection using this packing>
An embodiment of a gas distribution connection part (hereinafter referred to as “main connection part”) using the packing 10 will be described. FIG. 3 (A) shows the connection between the container valve 20 connected to the gas filling container (not shown) and the gas supply device (not shown) by the main connecting portion including the main packing 10 illustrated in FIG. It is the schematic which illustrates the basic composition to which the supply flow path 30 is connected. The supply flow path 30 is connected to the container valve 20 when the filling gas is supplied to the gas supply device, and the connection is released when not in use or at the time of inspection. In use, the on-off valve 22 is moved by the operation of the valve 21 constituting the container valve 20, and the gas flow passage 23 connected to the inside of the gas filling container is connected to the supply flow path 30 through the packing 10, and the filling gas Is supplied to the gas supply device. The supply flow path 30 is fixed to the opening 24 of the container valve 20 by a nut 25 so that the filling gas does not leak to the outside air. The material of each part constituting the container valve 20 and the supply flow path 30 is not particularly limited as long as it can form a robust structure, but when used in a semiconductor special material gas supply device or the like, Since corrosion resistance is required, it is preferable to use, for example, stainless steel (SUS-316L or the like), Hastelloy (TM), nickel, or the like.
このとき、ガス流通接続部は、Ａ部を拡大する図３（Ｂ）に例示するように、接続部材の少なくとも１つ（ここでは、供給流路３０）が、内周面３２ａがガス流通路３１に接するスリーブ３２および平面部３３を備え、スリーブ３２の外周面３２ｂおよび平面部３３の平坦面３３ａにおいて、本パッキン１０の一端２ａおよび平坦面２ｂが係止されてシールを形成する。接続部材の少なくとも他の１つ（ここでは、容器弁２０）の開部２４の内周面２４ａがガス流通路２３に接し、内周面２４ａの一端に所定長さの傾斜部２４ｃを備え、傾斜部２４ｃにおいて本パッキン１０の角部２ｃが押圧されて変形してシールを形成する。 At this time, as illustrated in FIG. 3B in which the gas flow connection portion is enlarged from the portion A, at least one of the connection members (here, the supply flow channel 30) is the gas flow passage, and the inner peripheral surface 32a is the gas flow passage. A sleeve 32 and a flat portion 33 are provided in contact with 31, and one end 2 a and the flat surface 2 b of the packing 10 are engaged with each other on the outer peripheral surface 32 b of the sleeve 32 and the flat surface 33 a of the flat portion 33 to form a seal. The inner peripheral surface 24a of the opening 24 of at least another one of the connecting members (here, the container valve 20) is in contact with the gas flow passage 23, and an inclined portion 24c having a predetermined length is provided at one end of the inner peripheral surface 24a. At the inclined portion 24c, the corner portion 2c of the packing 10 is pressed and deformed to form a seal.
詳細には、さらに拡大する図３（Ｃ）に例示するように、スリーブ３２の外周面３２ｂおよび平面部３３の平坦面３３ａにおいて、本パッキン１０の一端２ａおよび平坦面２ｂとの面接触によるシールが形成され、容器弁２０の傾斜部２４ｃにおいて、本パッキン１０の角部２ｃとの線接触に近いシールが形成される。容器弁２０のナット２５の締め付け操作によって、本パッキン１０の突状部２が変形し、一端２ａおよび平坦面２ｂにおいて、外周面３２ｂおよび平坦面３３ａに対する押圧が高くなり、広範囲の強固なシール面を形成することができるとともに、本パッキン１０の変形の支えとなる。一方、本パッキン１０の角部２ｃは、突状部２の他の部位よりも大きく変形し、容器弁２０の傾斜部２４ｃに、より強く密着した状態を形成し、強固なシール面を形成することができる。このとき、小容量の角部２ｃは、小さな力で大きな変形を生じさせることができることから、低トルクで確実なシールを形成することができる。 Specifically, as illustrated in FIG. 3C, which is further enlarged, the outer peripheral surface 32b of the sleeve 32 and the flat surface 33a of the flat portion 33 are sealed by surface contact with the one end 2a of the packing 10 and the flat surface 2b. In the inclined portion 24c of the container valve 20, a seal close to a line contact with the corner portion 2c of the packing 10 is formed. By the tightening operation of the nut 25 of the container valve 20, the projecting portion 2 of the packing 10 is deformed, and the pressure on the outer peripheral surface 32b and the flat surface 33a is increased at the one end 2a and the flat surface 2b. , And supports the deformation of the packing 10. On the other hand, the corner portion 2c of the packing 10 is deformed more than the other portions of the protruding portion 2, and forms a tighter contact surface with the inclined portion 24c of the container valve 20 to form a strong sealing surface. be able to. At this time, since the small-capacity corner portion 2c can cause a large deformation with a small force, a reliable seal can be formed with a low torque.
＜本パッキンの他の構成例＞
図４（Ａ）〜（Ｃ）は、本パッキン１０の他の構成を例示する概略図である。側面部３の一部に、１以上の、側面部３よりも厚肉の厚肉部３ｆを有することを特徴とする。厚肉部３ｆを設けることによって、角部２ｃの変形によって生じた本パッキン１０の歪を厚肉部３ｆにおいて吸収するとともに、角部２ｃへの反発力の発生によって、よりシール性を強化することができる。また、突状部２以外に形成された厚肉部３ｆは、接続部材とのシール面を新たに形成することができる。具体的には、図４（Ａ）のように、側面部３の中央に厚肉部３ｆを備えた構成を挙げることができる。既述の突状部２での（ａ）一端２ａと平坦面３ｃによるシール、（ｂ）角部２ｃによるシールに加え、側面部３での（ｃ）厚肉部３ｆと接続部材との面接触によるシールを形成することができる。また、角部２ｃの部分的な変形は、本パッキン１０を部分的に特定方向に押圧する力や引張る力が生じ易く、長期使用における歪による本パッキン１０の弾性やシール機能を弱くすることがある。厚肉部３ｆは、こうした押圧等を吸収する役割を果し、歪の発生を緩和させることができ、強固なシール面を形成することができる。
<Other configuration examples of this packing>
4A to 4C are schematic views illustrating other configurations of the packing 10. A part of the side surface portion 3 has one or more thick portions 3 f that are thicker than the side surface portion 3. By providing the thick portion 3f, the thick portion 3f absorbs the distortion of the packing 10 caused by the deformation of the corner portion 2c, and further enhances the sealing performance by generating a repulsive force on the corner portion 2c. Can do. Moreover, the thick part 3f formed other than the protruding part 2 can newly form a sealing surface with the connection member. Specifically, as shown in FIG. 4A, a configuration in which the thick portion 3f is provided at the center of the side surface portion 3 can be exemplified. In addition to (a) the seal by the one end 2a and the flat surface 3c in the protruding portion 2 described above, (b) the surface of the thick portion 3f and the connection member in the side surface portion 3 in addition to the seal by the corner portion 2c. A seal by contact can be formed. Further, the partial deformation of the corner 2c is likely to cause a force that partially presses the packing 10 in a specific direction or a pulling force, and weakens the elasticity and sealing function of the packing 10 due to distortion in long-term use. is there. The thick portion 3f plays a role of absorbing such pressure and the like, can reduce the occurrence of distortion, and can form a strong sealing surface.
また、図４（Ｂ）のように、側面部３の他端３ｅに厚肉部３ｇを備えた構成を挙げることができる。上記（ａ）〜（ｃ）のシール構造を有するとともに、最も最外周面（他端３ｅ）で外気を遮断するシールを形成することによって、より確実なシール部を構成することができる。また、図４（Ｃ）のように、側面部３の中央，他端３ｅに厚肉部３ｆ，３ｇを備えた構成を挙げることができる。上記（ａ）〜（ｃ）のシール構造、および最外周面での外気を遮断するシール構造を形成するとともに、歪の発生を緩和させる機能を有することができる。 Moreover, the structure provided with the thick part 3g in the other end 3e of the side part 3 can be mentioned like FIG. 4 (B). By having the seal structure of (a) to (c) above and forming a seal that blocks outside air at the outermost peripheral surface (the other end 3e), a more reliable seal portion can be configured. Further, as shown in FIG. 4C, a configuration in which thick portions 3f and 3g are provided at the center and the other end 3e of the side surface portion 3 can be given. While having the sealing structure of said (a)-(c) and the sealing structure which interrupts | blocks the external air in an outermost peripheral surface, it can have a function which relieve | moderates generation | occurrence | production of distortion.
＜ガス流通接続部の他の構成例＞
次に、ガス流通接続部を構成する接続部材について、異なる形態の接続部材を用いたガス流通接続部の構成例について説明する。具体的には、図５に例示するように、容器弁２０または／および供給流路３０において、本パッキン１０の側面部３と対向する容器弁２０の平面部２４ｂまたは／および供給流路３０の平面部３３の平坦部３３ａに、周回状の溝部２４ｄまたは／および３３ｄが設けられ、側面部３（本構成例のように、図４（Ａ）、（Ｃ）に例示するパッキンを用いた場合においては、厚肉部３ｆ）の一部が変形して溝部２４ｄまたは／および３３ｄに挿入され、シールが形成されることを特徴とする。
<Other configuration examples of the gas distribution connection unit>
Next, a configuration example of the gas flow connection part using connection members of different forms will be described for the connection members constituting the gas flow connection part. Specifically, as illustrated in FIG. 5, in the container valve 20 and / or the supply flow path 30, the flat portion 24 b of the container valve 20 facing the side surface portion 3 of the packing 10 and / or the supply flow path 30. When the flat portion 33a of the flat surface portion 33 is provided with the circumferential groove portion 24d and / or 33d, and the side surface portion 3 (the packing illustrated in FIGS. 4A and 4C as in this configuration example is used) Is characterized in that a part of the thick part 3f) is deformed and inserted into the groove part 24d or / and 33d to form a seal.
本パッキン１０の突状部２におけるシール構造に加え、本パッキン１０の一部の変形による溝部２４ｄまたは／および３３ｄへの挿入による、線接触に近い新たなシールが形成されることによって、より確実なシール部を構成することができる。厚肉部３ｆを有する本パッキン１０が用いられた場合には、さらに平面部２４ｂまたは／および３３と厚肉部３ｆとの間に、面接触のシールが形成されて、一層確実なシール部を構成することができる。また、平面部２４ｂまたは／および３３と厚肉部３ｆとのシール形成は、本パッキン１０の側面部３全体ではなく厚肉部３ｆを設けて小容量化し、さらに溝部２４ｄまたは／および３３ｄを設け、溝部２４ｄまたは／および３３ｄへの本パッキン１０の局部的な変形によるシール部分の小容量化によって、複数のシール構造を有しても、非常に小さなトルクでシール面に潰れ代が形成され、突状部２の角部２ｃにおける変形と同様、確実なシール部を構成することができる。 In addition to the seal structure in the projecting portion 2 of the packing 10, a new seal close to line contact is formed by insertion into the groove 24 d and / or 33 d due to partial deformation of the packing 10. A simple seal portion can be configured. When the present packing 10 having the thick portion 3f is used, a surface contact seal is further formed between the flat portion 24b and / or 33 and the thick portion 3f, so that a more reliable seal portion can be obtained. Can be configured. Further, in the formation of the seal between the flat portion 24b and / or 33 and the thick portion 3f, the capacity is reduced by providing the thick portion 3f instead of the entire side surface portion 3 of the packing 10, and the groove portion 24d and / or 33d is further provided. By reducing the capacity of the seal portion by locally deforming the packing 10 into the groove 24d and / or 33d, even if it has a plurality of seal structures, a crush margin is formed on the seal surface with very small torque, As with the deformation at the corner 2c of the protruding portion 2, a reliable seal portion can be configured.
＜本ガス流通接続部におけるシール特性の検証＞
本ガス流通接続部におけるシール特性について、従来のガス容器弁との比較検証試験を行った。
（１）実験条件
接続部材に相当する開部２４と供給流路３０を除き、同一のガス容器弁を用いて、加圧条件の充填ガスの圧力の経時変化を追跡し、そのシール特性を検証した。具体的には、ガス容器バルブ出口に圧力計を備えた密閉流路を設置し、バルブを開として充填ガスであるヘリウム（Ｈｅ）を１４．７ＭＰａＧ封入し、圧力の安定を確認した後、バルブを閉とし、圧力計の指示を追跡した。このとき、ガス容器弁の締め付けトルクは、ともに４５Ｎ・ｍとした。
（１−２）実験結果
図６に例示するように、両者のシール特性に顕著な差異が見られた。具体的には、経過時間約５００ｓｅｃに対して、従来のパッキンについては、約１０ＭＰａの圧力低下が見られた。一方、本パッキンを用いた本ガス流通接続部においては、その間全くリークが見られないという結果が得られた。本パッキンおよび本ガス流通接続部の優れた機能を証明することができた。
<Verification of seal characteristics at this gas distribution connection>
A comparative verification test with a conventional gas container valve was performed on the sealing characteristics of the gas distribution connection part.
(1) Experimental conditions Except for the opening 24 and the supply flow path 30 corresponding to the connection member, the same gas container valve is used to track the change over time of the pressure of the filling gas under the pressurizing condition and verify its sealing characteristics. did. Specifically, a closed flow path equipped with a pressure gauge is installed at the gas container valve outlet, and 14.7 MPaG of helium (He) as a filling gas is sealed by opening the valve, and after confirming the pressure stability, Was closed and the pressure gauge was followed. At this time, the tightening torque of the gas container valve was 45 N · m.
(1-2) Experimental Results As illustrated in FIG. 6, a remarkable difference was observed in the seal characteristics between the two. Specifically, a pressure drop of about 10 MPa was observed for the conventional packing with respect to an elapsed time of about 500 sec. On the other hand, in this gas circulation connection part using this packing, the result that a leak was not seen at all during that time was obtained. The excellent functions of the packing and the gas distribution connection could be proved.
１ 開口部
２ 突状部
２ａ 一端
２ｂ 平坦面
２ｃ 角部（他端）
２ｄ 突状部の厚み
２Ｌ 突状部の長さ
３ 側面部
３ａ 段差
３ｂ，３ｃ 平坦面
１０ 本パッキン
２０ 容器弁
２１ バルブ
２２ 開閉弁
２３ ガス流通路
２４ 開部
２４ａ 内周面
２４ｃ 傾斜部
２５ ナット
３０ 供給流路
３１ ガス流通路
３２ スリーブ
３２ａ 内周面
３２ｂ 外周面
３３ 平面部
３３ａ 平坦面
DESCRIPTION OF SYMBOLS 1 Opening part 2 Projection part 2a One end 2b Flat surface 2c Corner | angular part (other end)
2d Thickness of projecting portion 2L Length of projecting portion 3 Side surface portion 3a Steps 3b, 3c Flat surface 10 Packing 20 Container valve 21 Valve 22 Open / close valve 23 Gas flow passage 24 Open portion 24a Inner circumferential surface 24c Inclined portion 25 Nut 30 Supply flow path 31 Gas flow path 32 Sleeve 32a Inner peripheral surface 32b Outer peripheral surface 33 Flat portion 33a Flat surface
Claims (6)
中央に設けられた開口部と、該開口部を一端とし、所定の厚みを有して相対向する所定長さの平坦面を有する突状部と、該突状部の他端に設けられた段差を一端とし、少なくとも一部に前記突状部よりも薄肉の所定長さの平坦面を有する側面部と、を備え、
前記接続部材の少なくとも１つと、前記突状部の一端および平坦面において係止してシールを形成するとともに、前記接続部材の少なくとも他の１つと、前記突状部の他端に形成された角部においてシールを形成することを特徴とするガス流通部接続用パッキン。 A seal packing used for a plurality of gas flow connection portions to which the connection member constituting the end of the gas flow portion is connected,
An opening provided in the center, a protrusion having a predetermined thickness and a flat surface having a predetermined length opposite to each other, and the other end of the protrusion A step portion as one end, and a side surface portion having a flat surface of a predetermined length that is thinner than the protruding portion at least in part,
At least one of the connection members, one end of the projecting portion and a flat surface are locked to form a seal, and at least another one of the connection members and a corner formed at the other end of the projecting portion A gas circulation part connecting packing, wherein a seal is formed in the part.
中央に設けられた開口部と、該開口部を一端とし、所定の肉厚を有し、相対向する所定長さの平坦面を有する突状部と、該突状部の他端に段差を有し、前記突状部よりも薄い肉厚の所定長さの平坦面を少なくとも一部に有する側面部と、を備えたガス流通部接続用パッキンを用いるとともに、
前記接続部材の少なくとも１つが、内周面が前記ガス流通路に接するスリーブおよび前記側面部と対向する平面部を備え、該スリーブの外周面および該平面部において前記突状部の一端および平坦面が係止してシールを形成し、前記接続部材の少なくとも他の１つが、ガス流通路に接する内周面の一端に所定長さの傾斜部を備え、該傾斜部において前記突状部の他端に形成された角部が押圧されて変形してシールを形成することを特徴とするガス流通接続部。 A gas distribution connection part to which a plurality of connection members constituting the end of the gas distribution part are connected,
A step is provided at the center, an opening having the opening as one end, a predetermined thickness, a flat surface having a predetermined length opposite to each other, and the other end of the protrusion. And using a packing for connecting a gas flow part comprising a side part having at least a part of a flat surface with a predetermined length that is thinner than the projecting part,
At least one of the connecting members includes a sleeve whose inner peripheral surface is in contact with the gas flow passage and a flat portion facing the side portion, and one end of the projecting portion and a flat surface on the outer peripheral surface of the sleeve and the flat portion. Locks to form a seal, and at least the other one of the connecting members has an inclined portion of a predetermined length at one end of the inner peripheral surface in contact with the gas flow passage, and the protruding portion A gas flow connecting portion, wherein a corner portion formed at an end is pressed and deformed to form a seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012049344A JP5816578B2 (en) | 2012-03-06 | 2012-03-06 | Gas distribution connection packing and gas distribution connection using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012049344A JP5816578B2 (en) | 2012-03-06 | 2012-03-06 | Gas distribution connection packing and gas distribution connection using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013185618A JP2013185618A (en) | 2013-09-19 |
| JP5816578B2 true JP5816578B2 (en) | 2015-11-18 |
Family
ID=49387228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012049344A Active JP5816578B2 (en) | 2012-03-06 | 2012-03-06 | Gas distribution connection packing and gas distribution connection using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5816578B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2595968Y2 (en) | 1992-04-06 | 1999-06-02 | 松下電工株式会社 | Remote control circuit breaker |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7543585B1 (en) | 2024-03-13 | 2024-09-02 | イハラサイエンス株式会社 | Gasket and joint structure |
-
2012
- 2012-03-06 JP JP2012049344A patent/JP5816578B2/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2595968Y2 (en) | 1992-04-06 | 1999-06-02 | 松下電工株式会社 | Remote control circuit breaker |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013185618A (en) | 2013-09-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4708947B2 (en) | Flange joint leakage prevention method and apparatus | |
| US8297304B2 (en) | Storage container for liquid chlorosilane and closing lid therefor | |
| US6682081B2 (en) | Reduced area gaskets | |
| JP2012031994A (en) | Threaded joint and method of sealing threaded joint | |
| JP5816578B2 (en) | Gas distribution connection packing and gas distribution connection using the same | |
| CN205191089U (en) | Quick plugging device of removal tank car flange of putting pipe is unloaded in area | |
| CN116255456A (en) | Pressure-resistant shell and pipeline static seal design and manufacturing method | |
| CN211423633U (en) | Flange protection device | |
| US20130099488A1 (en) | O-ring shield system and method | |
| JP6848515B2 (en) | Water-stop structure for sealed water piping | |
| JP2021167668A (en) | Compression fit EME protective seal cap | |
| JP5937647B2 (en) | Gas distribution connection packing and gas distribution connection using the same | |
| CN106871704B (en) | A kind of online blocking method of tubular heat exchanger | |
| JP5336944B2 (en) | Spiral gasket | |
| JP4290153B2 (en) | Leakage prevention device for cryogenic flange joints | |
| JP5719529B2 (en) | Union joint and seal structure of union joint | |
| KR20090001795U (en) | Metal ring of pipe with gasket groove | |
| CN209495033U (en) | A kind of quick-release BULKHEAD UNION | |
| KR101563108B1 (en) | Sealing apparatus for water leakage prevention | |
| CN107355559A (en) | A kind of high platform valve | |
| CN220506077U (en) | Sealing flange convenient to block | |
| JP2005269684A (en) | Gas leakage prevention device for tube flange part of gas insulated switchgear | |
| CN210372029U (en) | Stop valve for conveying gaseous medium | |
| CN220688400U (en) | Pipeline plugging device | |
| RU2799160C1 (en) | Seal for flanged connection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20141112 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150819 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150902 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150928 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5816578 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |