JP6097783B2 - Method for transferring carbon nanotube array and method for manufacturing carbon nanotube structure - Google Patents

Description

  The present invention relates to a carbon nanotube array transfer method and a carbon nanotube structure manufacturing method, and more particularly to a carbon nanotube array transfer method and a carbon nanotube film or a carbon nanotube wire manufacturing method.

  Carbon Nanotube (CNT) was discovered by Iijima in 1991, and carbon nanotubes are one of the important new materials in the 21st century, especially because of their excellent mechanical, electrical, and thermal properties. It is expected to be applied in a wide range of fields such as energy and composite materials. However, a single carbon nanotube is difficult to use because it has a nano-scale size. Currently, a macroscopic carbon nanotube structure having a large size can be formed using a plurality of carbon nanotubes as a raw material. The macroscopic carbon nanotube structure is, for example, a carbon nanotube film composed of a plurality of carbon nanotubes and a carbon nanotube wire composed of a plurality of carbon nanotubes.

  Patent Document 1 discloses that a carbon nanotube film is drawn directly from a carbon nanotube array. The carbon nanotube film is a self-standing structure composed of a plurality of carbon nanotubes whose ends are connected to each other by intermolecular force, and has excellent transparency and macroscopic dimensions. In a carbon nanotube film drawn directly from a carbon nanotube array, a plurality of carbon nanotubes are arranged in the same direction, so that they have excellent conductivity and thermal conductivity in the axial direction of the carbon nanotube, Can be applied. For example, it is fields such as a touch panel, a liquid crystal display, a speaker, a heating device, and a thin film transistor.

  The principle of forming a carbon nanotube film is that when carbon nanotubes in a super aligned carbon nanotube array are tightly coupled by intermolecular force and some of the carbon nanotubes are pulled out, the adjacent carbon nanotubes are brought into contact by the action of intermolecular force. Since the ends are connected and pulled out, a carbon nanotube film composed of a plurality of carbon nanotubes connected to the ends can be formed. However, since the carbon nanotubes are adsorbed to each other only by the intermolecular force between the carbon nanotubes to form a carbon nanotube film, once the morphology of the carbon nanotube array is destroyed or changed, uniform carbon The nanotube film cannot be pulled out continuously. In the conventional method, after a carbon nanotube array is grown on the surface of a growth substrate (generally, single crystal silicon), a carbon nanotube array grown directly on the growth substrate is pulled out to obtain a carbon nanotube film. doing.

  Currently, carbon nanotube array producers provide users with both carbon nanotube arrays and growth substrates. However, this increases the period until the growth substrate is recovered, and cannot be used quickly as a growth substrate for a new carbon nanotube array. In addition, high-cost single crystal silicon is easily broken during transportation. In addition, the above-described problem exists in drawing a carbon nanotube wire directly from a carbon nanotube array.

Chinese Patent Application No. 101239712

  Accordingly, in order to solve the above-mentioned problems, the present invention provides a method for transferring a carbon nanotube array and a method for manufacturing a carbon nanotube structure, which can reduce the production cost of the carbon nanotube structure and the applied product and simplify the production process. provide.

  The transfer method of the carbon nanotube array provides an alternative substrate, a growth substrate, and a spacing device, and is the first step of forming the carbon nanotube array on the surface of the growth substrate. A first step that can ensure continuous withdrawal from the nanotube array, the carbon nanotube structure comprising a plurality of carbon nanotubes connected end to end, and a second step of transferring the carbon nanotube array from a growth substrate to an alternative substrate The carbon nanotube array transferred to the alternative substrate is a carbon nanotube array transfer method comprising: a second step capable of ensuring that the carbon nanotube structure is continuously drawn from the carbon nanotube array. The second step is to bring the surface of the alternative substrate into contact with the surface away from the growth substrate of the carbon nanotube array, and to space the alternative substrate and the growth substrate with a spacing device; and at least one of the alternative substrate and the growth substrate. Moving one of them to separate the growth substrate from the growth substrate, detaching the carbon nanotube array from the growth substrate, and transferring to the substitution substrate.

  The height when the spacing device is located between the alternative substrate and the growth substrate is the same as the height of the carbon nanotube array or lower than the height of the carbon nanotube array, and the carbon nanotube array Higher than the distance pushed to a form that cannot be guaranteed to be continuously pulled out of the carbon nanotube array.

  The surface of the substitute substrate has a plurality of microstructures, and the surface having the microstructure of the substitute substrate is brought into contact with the surface away from the growth substrate of the carbon nanotube array.

  A method of manufacturing a carbon nanotube structure provides an alternative substrate, a growth substrate, and a spacing device, and is a first step of forming a carbon nanotube array on the surface of the growth substrate. A first step that can ensure continuous withdrawal from the carbon nanotube array, the carbon nanotube structure comprising a plurality of carbon nanotubes connected end to end, and a step of transferring the carbon nanotube array from a growth substrate to an alternative substrate; The form of the carbon nanotube array transferred to the alternative substrate in two steps is a second step that can ensure that the carbon nanotube structure is continuously pulled out of the carbon nanotube array, and the carbon nanotube array on the alternative substrate is A third step of pulling out the Bonn nanotube structure, wherein the second step contacts the surface of the substitute substrate with the surface away from the growth substrate of the carbon nanotube array, and the spacing device sets the spacing between the substitute substrate and the growth substrate. And a step of moving at least one of the substitute substrate and the growth substrate to separate the substitute substrate and the growth substrate, detaching the carbon nanotube array from the growth substrate, and transferring to the substitute substrate.

  Compared with the prior art, the method for transferring a carbon nanotube array and the method for producing a carbon nanotube structure of the present invention have the following advantageous effects. In the step of growing the carbon nanotube array and the step of extracting the carbon nanotube structure from the carbon nanotube array, the carbon nanotube array has been transferred from the growth substrate to a different substrate, so in the step of extracting the carbon nanotube structure from the carbon nanotube array, The substrate on which the carbon nanotube array is installed can be manufactured from a low cost material. This enables carbon nanotube array producers to quickly collect costly growth substrates by transferring the carbon nanotube array to an alternative substrate and providing the user with both the carbon nanotube array and the alternative substrate. To simplify the production process. Therefore, the method for transferring a carbon nanotube array and the method for producing a carbon nanotube structure of the present invention are advantageous for industrial application to a carbon nanotube film and a carbon nanotube wire, and change the production method to lower the production cost. Also, in the process of transferring the carbon nanotube array, the spacing device can ensure that the distance between the alternative substrate and the growth substrate is not too close, which is advantageous for protecting the form of the carbon nanotube array. In addition, by installing the microstructure on the surface of the alternative substrate and increasing the surface area of the alternative substrate, the bonding force between the alternative substrate and the carbon nanotube array can be increased, so the selection of the alternative substrate material Can widen the range.

FIG. 1 is a diagram showing a method for transferring a carbon nanotube array according to Embodiment 1 of the present invention. FIG. 2 is a scanning electron micrograph of the carbon nanotube film drawn from the carbon nanotube array according to Embodiment 1 of the present invention. FIG. 3 is a side view of an alternative substrate according to a different embodiment of the present invention. FIG. 4 is a side view of an alternative substrate according to a different embodiment of the present invention. FIG. 5 is a side view of an alternative substrate according to a different embodiment of the present invention. FIG. 6 is a top view of an alternative substrate according to a different embodiment of the present invention. FIG. 7 is a top view of an alternative substrate according to a different embodiment of the present invention. FIG. 8 is a diagram showing a carbon nanotube array transfer method according to Embodiment 2 of the present invention. FIG. 9 is a diagram illustrating a method for transferring a carbon nanotube array according to an embodiment of the present invention. FIG. 10 is a view showing a method of transferring a carbon nanotube array according to another embodiment of the present invention. FIG. 11 is a top view when the spacing device and the carbon nanotube array according to one embodiment of the present invention are installed between a growth substrate and an alternative substrate. FIG. 12 is a top view when a spacing device and a carbon nanotube array according to another embodiment of the present invention are installed between a growth substrate and an alternative substrate. FIG. 13 is a diagram showing a method for manufacturing a carbon nanotube structure according to an embodiment of the present invention. FIG. 14 is a diagram showing a method for manufacturing a carbon nanotube structure according to an embodiment of the present invention. FIG. 15 is a photograph of a carbon nanotube film drawn from a carbon nanotube array transferred to an alternative substrate according to an embodiment of the present invention.

  Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1)
Referring to FIG. 1, the present invention provides a method for transferring a carbon nanotube array 10. The transfer method of the carbon nanotube array 10 includes the following steps.

  Step S1: As shown in FIG. 1, the alternative substrate 30 and the growth substrate 20 are provided, and the carbon nanotube array 10 is formed on the surface of the growth substrate 20. It is possible to ensure that the structure is continuously pulled out from the carbon nanotube array 10, and the carbon nanotube structure includes a plurality of carbon nanotubes connected at one end to the other. A structure 304 is formed.

  Step S2: A step of transferring the carbon nanotube array 10 from the growth substrate 20 to the alternative substrate 30. The form of the carbon nanotube array 10 transferred to the alternative substrate 30 is that the carbon nanotube structure is continuously formed from the carbon nanotube array 10. It is guaranteed that it can be pulled out.

  Step S2 is a step (S21) of bringing the surface 302 having the microstructure 304 of the alternative substrate 30 into contact with the surface of the carbon nanotube array 10 away from the growth substrate 20, and at least one of the alternative substrate 30 and the growth substrate 20. And moving the one to separate the alternative substrate 30 and the growth substrate 20, detaching the carbon nanotube array 10 from the growth substrate 20, and transferring to the alternative substrate 30 (S 22).

  The carbon nanotube structure includes a plurality of carbon nanotubes whose ends are connected to each other, and the plurality of carbon nanotubes are bonded to each other by an intermolecular force and are formed by connecting the ends to each other. Structure. For example, a carbon nanotube film or a carbon nanotube wire.

  The carbon nanotube array 10 is grown on the surface of the growth substrate 20 by chemical vapor deposition (CVD). The carbon nanotubes in the carbon nanotube array 10 are basically parallel to each other and perpendicular to the surface of the growth substrate 20. Adjacent carbon nanotubes are in contact with each other and bonded by intermolecular forces. By controlling the growth conditions, the carbon nanotube array 10 is basically free of impurities. Here, the impurities are, for example, amorphous carbon or residual metal particles of the catalyst. The carbon nanotube array 10 is basically free of impurities, the carbon nanotubes are in close contact with each other, and has a large intermolecular force between adjacent carbon nanotubes. When pulling out a segment, adjacent carbon nanotubes are connected end-to-end by the action of intermolecular forces and are continuously drawn out to form a self-supporting structure (eg, carbon nanotube film or carbon nanotube wire). The carbon nanotube array 10 in which carbon nanotubes can be pulled out by being connected end to end is a super aligned carbon nanotube array. The super-aligned carbon nanotube array is described in Patent Document 1.

  The growth substrate 20 is a substrate suitable for the growth of the super aligned carbon nanotube array, and the material thereof is, for example, P-type silicon, N-type silicon, or silicon oxide.

  The carbon nanotube structure drawn out from the carbon nanotube array 10 includes a plurality of carbon nanotubes whose ends are connected to each other. Specifically, the carbon nanotube structure may be a carbon nanotube film. The carbon nanotube film is a self-supporting structure and includes a plurality of carbon nanotubes arranged basically along the same direction. Referring to FIG. 2, a plurality of carbon nanotubes in the carbon nanotube film are arranged along the same direction. The direction in which the plurality of carbon nanotubes extend is basically parallel to the surface of the carbon nanotube film. The plurality of carbon nanotubes are connected by intermolecular force. Specifically, each carbon nanotube in the plurality of carbon nanotubes is connected to the adjacent carbon nanotubes in the extending direction and the ends of the carbon nanotubes by intermolecular force, so that the carbon nanotube film can realize a self-supporting structure. Further, the carbon nanotube film can include a plurality of carbon nanotube segments. The ends of the plurality of carbon nanotube segments are connected by an intermolecular force along the long axis direction of the carbon nanotubes. Each carbon nanotube segment includes a plurality of carbon nanotubes bonded in parallel to each other by an intermolecular force. In a single carbon nanotube segment, the lengths of the plurality of carbon nanotubes are the same.

  The carbon nanotube film also includes a small number of random carbon nanotubes. However, since most of the carbon nanotubes are arranged along the same direction, the extending direction of the random carbon nanotubes does not affect the extending direction of most of the carbon nanotubes. Specifically, a large number of carbon nanotubes in the carbon nanotube film are slightly curved rather than absolutely linear. Or, it may not be completely arranged in the extending direction and may be slightly shifted. Therefore, in the plurality of carbon nanotubes arranged along the same direction, adjacent carbon nanotubes may partially contact each other. Indeed, the carbon nanotube film has a plurality of voids. That is, voids are formed between adjacent carbon nanotubes. Thereby, the carbon nanotube film has excellent transparency. Furthermore, the intermolecular force at the part where the adjacent carbon nanotubes are in contact and the intermolecular force at the part where the ends are connected can maintain the self-supporting structure of the carbon nanotube film. The thickness of the carbon nanotube film is 0.5 nm to 100 μm, preferably 0.5 nm to 10 μm. When the width of the carbon nanotube structure is narrow, the carbon nanotube structure is a carbon nanotube wire having a free-standing structure.

  Here, the self-supporting structure is a form in which a carbon nanotube film or a carbon nanotube wire can be used independently without using a support material. That is, it means that the carbon nanotube film or the carbon nanotube wire can be suspended without supporting the carbon nanotube film or the carbon nanotube wire from the opposite sides and changing the structure of the carbon nanotube film or the carbon nanotube wire. Since the carbon nanotubes in the carbon nanotube film or the carbon nanotube wire are connected by intermolecular force, a self-supporting structure is realized.

  A method of pulling out a carbon nanotube film from the carbon nanotube array 10 is disclosed in Patent Document 1.

  The alternative substrate 30 is a solid substrate and is a soft substrate or a hard substrate. The alternative substrate 30 has a surface on which the carbon nanotube array 10 is placed. In the process of transferring the carbon nanotube array 10 from the growth substrate 20 to the alternative substrate 30, the form of the carbon nanotube array 10 is basically maintained, and it is ensured that the carbon nanotube structure can be continuously pulled out from the carbon nanotube array 10. Yes. That is, the carbon nanotube array 10 maintains the form of a super aligned carbon nanotube array.

  Assuming that the shape of the carbon nanotube array 10 is maintained, when the carbon nanotube array 10 is transferred to the alternative substrate 30, the carbon nanotube array 10 is placed upside down on the surface 302 of the alternative substrate 30. Specifically, the carbon nanotube array 10 includes a first surface 102 and a second surface 104 positioned opposite to the first surface 102. Each carbon nanotube grows from the surface of the growth substrate 20 to form the carbon nanotube array 10. One end of each carbon nanotube adjacent to the growth substrate 20 is defined as the lower end of the carbon nanotube, and the end opposite to the lower end is defined as the upper end of the carbon nanotube. In the growth substrate 20, the first surface 102 is formed on the lower end side of the carbon nanotubes in the carbon nanotube array 10, and the second surface 104 is formed on the upper end side of the carbon nanotubes in the carbon nanotube array 10. That is, the first surface 102 of the carbon nanotube array 10 is positioned close to the surface of the growth substrate 20 or on the surface 202 of the growth substrate 20. Therefore, the first surface 102 is the lower growth end of each carbon nanotube in the carbon nanotube array 10. The second surface 104 is away from the surface of the growth substrate 20 and is the upper growth end of each carbon nanotube in the carbon nanotube array 10. After the carbon nanotube array 10 is transferred to the alternative substrate 30, the second surface 104 of the carbon nanotube array 10 is adjacent to the surface 302 of the alternative substrate 30 or positioned on the surface 302 of the alternative substrate 30.

Step (S21) and step (S22) can be performed in a room temperature environment. In step (S21) and step (S22), the configuration of the carbon nanotube array 10 ensures that the carbon nanotube structure can be continuously pulled out from the carbon nanotube array 10. After the carbon nanotube array 10 is transferred to the alternative substrate 30, the space between the surface 302 of the alternative substrate 30 and the second surface 104 of the carbon nanotube array 10 can be continuously extracted. Bonded only by intermolecular forces. That is, the bonding force (F _BC ) between the alternative substrate 30 and the carbon nanotube array 10 is smaller than the intermolecular force (F _CC ) between the carbon nanotubes in the carbon nanotube array 10. Further, the bonding force (F _BC ) between the alternative substrate 30 and the carbon nanotube array 10 is larger than the bonding force (F _AC ) between the surface 202 of the growth substrate 20 and the carbon nanotube array 10. Thereby, the carbon nanotube array 10 can be detached from the growth substrate 20 and transferred to the alternative substrate 30. That is, F _AC <F _BC <F _CC .

  In the process of detaching the carbon nanotube array 10 from the growth substrate 20 and transferring it to the alternative substrate 30, the surface 302 of the alternative substrate 30 and the second surface 104 of the carbon nanotube array 10 are only in contact with each other. A sufficient binding force (for example, intermolecular force) is generated between the surface 302 and the carbon nanotube array 10 to detach the carbon nanotube array 10 from the growth substrate 20.

In order to increase the bonding force (F _BC ) between the surface 302 of the alternative substrate 30 and the carbon nanotube array 10 and satisfy F _AC <F _BC <F _CC , a plurality of microstructures 304 are provided on the surface 302 of the alternative substrate 30. Can be installed. Thereby, the surface area of the surface 302 of the alternative substrate 30 is increased, and the bonding force (F _BC ) can be increased without changing the material of the alternative substrate 30. The microstructure 304 is a protrusion or a recess provided on the surface 302 of the alternative substrate 30. 1, 3, 4, and 5, the cross-sectional shape of the microstructure 304 is hemispherical, rectangular, tapered, toothed, stepped, or other shape, It consists of a dot, line or sheet. Referring to FIG. 6, in one embodiment, the microstructures 304 are tub-like structures that are parallel to each other and spaced from each other. Referring to FIG. 7, in another embodiment, the microstructures 304 are hemispherical protrusions that are spaced apart and evenly spaced. Further, it is preferable that the majority of the microstructures 304 be uniformly installed on the surface 302 of the alternative substrate 30. The number of the microstructures 304 is preferably a quantity that increases the surface area of the surface 302 of the alternative substrate 30 by 30% to 120% from the surface area of the plane. The surface 302 having the microstructure 304 of the alternative substrate 30 can be in sufficient contact with the carbon nanotube array 10. The microstructure 304 increases the contact area between the substitute substrate 30 and the carbon nanotube array 10, maintains a large adsorption force on the substitute substrate 30, and increases the bonding force (F _BC ). The alternative substrate 30 is a substrate made of a normal inorganic material or organic material, for example, glass, silicon, quartz, plastic, or rubber. The plastic is, for example, acrylic resin (PMMA) or polyethylene terephthalate (PET).

  The height of the protrusion microstructure 304 or the depth of the recess microstructure 304 is preferably 0.5% to 10% of the height of the carbon nanotube array 10. More preferably, it is 5 micrometers-50 micrometers. That is, the surface 302 needs to have a considerable flatness, and when the carbon nanotube array 10 is placed on the surface 302 of the alternative substrate 30, insufficient contact with the surface 302 can be prevented. The microstructure 304 is formed by a method such as photoetching, laser etching, or chemical etching.

In order to satisfy F _AC <F _BC <F _CC , the substitute substrate 30 can be manufactured using a material having appropriate surface energy and interface energy. Alternatively, a material having appropriate surface energy and interface energy can be provided on the surface of the alternative substrate 30. In this embodiment, the material of the alternative substrate 30 is polydimethylsiloxane (PDMS).

The alternative substrate 30 is not attached to the carbon nanotube array 10 with an adhesive. With the conventional adhesive, _FAC < _FBC is satisfied, and the carbon nanotube array 10 can be detached from the growth substrate 20. However, since the intermolecular force between the carbon nanotubes in the carbon nanotube array 10 is small, F _BC > F _CC is _satisfied with any conventional adhesive. Thereby, the step of pulling out the subsequent carbon nanotube structure cannot be performed. In step (S21) and step (S22), the alternative substrate 30 maintains a solid state.

  In step (S <b> 21), a small pressure (f) is applied to the alternative substrate 30 and the carbon nanotube array 10 in order to bring the surface 302 of the alternative substrate 30 into sufficient contact with the upper end of the carbon nanotubes in the carbon nanotube array 10. However, the alternative substrate 30 prevents the carbon nanotubes in the carbon nanotube array 10 from being brought down. Otherwise, the shape of the carbon nanotube array 10 is changed, and the carbon nanotube structure cannot be continuously drawn out from the carbon nanotube array 10.

  Since there is a difference in height between the microstructure 304 of the alternative substrate 30 and the surface 302 of the alternative substrate 30, the surface 302 is in contact with the concave portion of the surface 302 and the second surface 104 of the carbon nanotube array 10. A pressure is applied to the carbon nanotube in contact with the protrusion. Thereby, the upstanding carbon nanotubes in the carbon nanotube array 10 are slightly curved. However, since the microstructure 304 has a low height, the curvature of the carbon nanotube is small. In the process of separating the alternative substrate 30 and the growth substrate 20, the carbon nanotube array 10 can be restored to the conventional height, and the carbon nanotube structure can be continuously pulled out from the carbon nanotube array 10. maintain.

  In the step (S22), in the step of detaching the carbon nanotube array 10 from the growth substrate 20, preferably, all the carbon nanotubes in the carbon nanotube array 10 are simultaneously detached from the growth substrate 20. That is, the movement direction of at least one of the alternative substrate 30 and the growth substrate 20 is perpendicular to the surface of the growth substrate 20 on which the carbon nanotubes grow, and the carbon nanotubes in the carbon nanotube array 10 are moved along the growth direction of the carbon nanotubes. To be detached from the growth substrate 20. When the alternative substrate 30 and the growth substrate 20 move together, the moving direction of both is perpendicular to the surface of the growth substrate 20 on which the carbon nanotubes grow.

  In step (S <b> 21) and step (S <b> 22), first, the carbon nanotube array 10 receives a force that is pushed from the growth substrate 20, and then receives a force that is pulled toward the alternative substrate 30.

(Embodiment 2)
Referring to FIG. 8, the present invention provides a method for transferring a carbon nanotube array 10. The transfer method of the carbon nanotube array 10 includes the following steps.

  Step S1: providing an alternative substrate 30, a growth substrate 20, and a spacing device 60, and forming the carbon nanotube array 10 on the surface of the growth substrate 20, wherein the carbon nanotube array 10 is formed by converting the carbon nanotube structure into carbon. It is guaranteed that the nanotube array 10 can be continuously pulled out.

  Step S2: a step of transferring the carbon nanotube array 10 from the growth substrate 20 to the alternative substrate 30. The form of the carbon nanotube array 10 transferred to the alternative substrate 30 is that the carbon nanotube structure is continuously formed from the carbon nanotube array 10. It is guaranteed that it can be pulled out.

  In step S2, the surface 302 of the alternative substrate 30 is brought into contact with the surface of the carbon nanotube array 10 away from the growth substrate 20, and the distance between the alternative substrate 30 and the growth substrate 20 is set by the spacing device 60 (S21). And moving at least one of the alternative substrate 30 and the growth substrate 20 to separate the alternative substrate 30 and the growth substrate 20, detaching the carbon nanotube array 10 from the growth substrate 20, and transferring to the alternative substrate 30. (S22).

  The carbon nanotube structure includes a plurality of carbon nanotubes whose ends are connected to each other, and the plurality of carbon nanotubes are bonded to each other by an intermolecular force and are formed by connecting the ends to each other. For example, a carbon nanotube film or a carbon nanotube wire.

  The growth method and structure of the carbon nanotube array 10 are the same as the growth method and structure of the carbon nanotube array 10 in the first embodiment. The structure of the carbon nanotube structure in the second embodiment is the same as the structure of the carbon nanotube structure in the first embodiment.

  The process of step S2 in the second embodiment is basically the same as the process of step S2 in the first embodiment, but the differences are as follows.

  In step (S21), the surface 302 of the alternative substrate 30 that contacts the carbon nanotube array 10 and the carbon of the growth substrate 20 are sufficiently brought into contact with the surface 302 of the alternative substrate 30 and the upper end of the carbon nanotube in the carbon nanotube array 10. The distance from the surface 202 on which the nanotubes are grown is the same as the height of the carbon nanotube array 10 or smaller than the height of the carbon nanotube array 10. Thereby, the alternative substrate 30 applies a small pressure to the carbon nanotube array 10. The alternative substrate 30 does not defeat the carbon nanotubes in the carbon nanotube array 10. Otherwise, the shape of the carbon nanotube array 10 is changed, and the carbon nanotube structure 40 cannot be continuously pulled out from the carbon nanotube array 10. Therefore, the pressure should not be too great. That is, the distance between the surface 302 of the alternative substrate 30 and the surface 202 of the growth substrate 20 should not be too short. That is, it needs to be larger than the limit distance. Here, the ultimate distance is a distance at which the carbon nanotube array 10 is pushed to a form in which it cannot be guaranteed that the carbon nanotube structure is continuously drawn out from the carbon nanotube array. That is, by controlling the distance between the surface 302 and the surface 202, in the form of the carbon nanotube array 10, it is ensured that the structure of the carbon nanotube structure can be continuously pulled out from the carbon nanotube array. it can.

  The pressure cannot be easily controlled, and the carbon nanotube array 10 is brought down when the pressure is slightly increased. Further, since the height of the carbon nanotube array 10 is only several tens of micrometers to several hundreds of micrometers, when the carbon nanotube array 10 is transferred using the alternative substrate 30, the alternative substrate 30, the growth substrate 20, It is difficult to control the distance. Therefore, the spacing device 60 can be installed between the alternative substrate 30 and the growth substrate 20. The spacing device 60 can ensure that the distance between the surface 302 of the alternative substrate 30 and the surface 202 of the growth substrate 20 is not too close. The height when the spacing device 60 is located between the alternative substrate 30 and the growth substrate 20 is equal to the height of the carbon nanotube array 10 or lower than the height of the carbon nanotube array 10, in this case the spacing device 60. And a carbon nanotube array 10 is formed with a height difference (X). The height of the spacing device 60 is greater than the limit distance. In step (S <b> 21), the spacing device 60 and the carbon nanotube array 10 are installed between the alternative substrate 30 and the growth substrate 20.

  The spacing device 60 is preferably a solid and rigid element. Further, the spacing device 60 is located between the surface 302 of the alternative substrate 30 and the surface 202 of the growth substrate 20, and controls the height of the spacing device 60 so that the space between the alternative substrate 30 and the growth substrate 20 can be controlled. Can be accurately maintained. The height (m) of the spacing device 60 is 0.9 to 1 times the height (n) of the carbon nanotube array 10. That is, m = 0.9n to 1n.

  When the height of the spacing device 60 is lower than the height of the carbon nanotube array 10, the alternative substrate 30 slightly curves the carbon nanotubes standing upright on the carbon nanotube array 10. However, since the spacing device 60 is included, the curvature of the carbon nanotube is small. In the process of separating the alternative substrate 30 and the growth substrate 20, the carbon nanotube array 10 can be restored to the conventional height, and the carbon nanotube structure 40 can be continuously pulled out from the carbon nanotube array 10. To maintain.

  The spacing device 60 can be installed on the growth substrate 20. Referring to FIG. 9, in another embodiment, the spacing device 60 may be installed on the alternative substrate 30. Referring to FIG. 10, the spacing device 60 may be a part of the alternative substrate 30 and is a structure protruding from the surface of the alternative substrate 30. The shape of the spacing device 60 is not limited, and may be a block shape, a sheet shape, a column shape, or a spherical shape, and may have an optimum height. Further, the spacing device 60 may be a plurality of spacing devices that are uniformly installed around the carbon nanotube array 10. As a result, the growth substrate 20 and the alternative substrate 30 are stably supported. Referring to FIG. 11, in one embodiment, the spacing device 60 is a ring gasket and is placed around the carbon nanotube array 10. Referring to FIG. 12, in another embodiment, the spacing device 60 is a plurality of cylindrical gaskets that are uniformly installed around the carbon nanotube array 10.

(Embodiment 3)
The present invention provides a method for transferring a carbon nanotube array 10. The transfer method of the carbon nanotube array 10 is basically the same as the transfer method of the carbon nanotube array 10 of the second embodiment, and both have the spacing device 60, except that the microstructure is formed on the surface of the alternative substrate 30. 304 is formed. The structure of the alternative substrate 30 of the third embodiment is the same as the structure of the alternative substrate 30 in the first embodiment. That is, a plurality of microstructures 304 are formed on the surface 302 of the alternative substrate 30.

  Referring to FIGS. 13 and 14, the present invention provides a method for manufacturing a carbon nanotube structure 40. The method for manufacturing the carbon nanotube structure 40 includes steps (S1) and (S2) in the first, second, and third embodiments, and further includes the carbon nanotube structure 40 from the carbon nanotube array 10 on the alternative substrate 30. And step (S3) of withdrawing.

  Referring to FIG. 15, the step (S3) is different from the step of extracting the carbon nanotube structure from the conventional carbon nanotube array as follows. The carbon nanotube structure 40 is drawn from the carbon nanotube array 10 transferred to the alternative substrate 30, and is not directly drawn from the carbon nanotube array 10 grown on the growth substrate 20. Preferably, the carbon nanotube structure 40 is pulled out from the carbon nanotube array 10 installed upside down on the surface of the alternative substrate 30. That is, the carbon nanotube structure 40 is pulled out from the lower growth portion of the carbon nanotube array 10.

  Further, the step (S3) includes a step (S31) of selecting a part of the carbon nanotube segments in the carbon nanotube array 10 installed on the surface of the alternative substrate 30 by the extraction tool 50, and moving the extraction tool 50, Drawing a selected carbon nanotube segment at a specific speed, and drawing out a plurality of carbon nanotube segments whose ends are connected to form a continuous carbon nanotube structure 40 (S32).

  In step (S31), when pulling out the carbon nanotube film, an adhesive tape having a specific width or an adhesive strip is adopted and brought into contact with the carbon nanotube array 10 to select a carbon nanotube segment having a specific width. When pulling out the carbon nanotube wire, the narrow carbon nanotube segment is selected by a narrow tool (tweezers). In the step (S32), the direction in which the selected carbon nanotube segment is pulled out forms an angle α with the growth direction of the carbon nanotubes in the carbon nanotube array 10. The angle α is 0 ° to 90 ° (not including 0 °), and preferably 30 ° to 90 °.

  Step (S22) is different from step (S3). In step (S <b> 22), the entire carbon nanotube array 10 is detached from the growth substrate 20, and an object is to maintain the form of the carbon nanotube array 10 even after the carbon nanotube array 10 is detached from the growth substrate 20. In step (S3), the carbon nanotube film or the carbon nanotube wire is drawn out from the carbon nanotube array 10. Accordingly, the entire carbon nanotube array 10 is not detached from the alternative substrate 30, but some carbon nanotubes, for example, carbon nanotube segments are detached from the alternative substrate 30, and the extracted carbon nanotube segments move adjacent carbon nanotube segments. The adjacent carbon nanotube segments are pulled out with their ends connected to each other and are detached from the alternative substrate 30 one after another.

  The carbon nanotube array transfer method and the carbon nanotube structure manufacturing method of the present embodiment have the following advantageous effects. In the step of growing the carbon nanotube array and the step of extracting the carbon nanotube structure from the carbon nanotube array, the carbon nanotube array has been transferred from the growth substrate to a different substrate, so in the step of extracting the carbon nanotube structure from the carbon nanotube array, The substrate on which the carbon nanotube array is installed can be manufactured from a low cost material. This enables carbon nanotube array producers to quickly collect costly growth substrates by transferring the carbon nanotube array to an alternative substrate and providing the user with both the carbon nanotube array and the alternative substrate. To simplify the production process. Therefore, the method for transferring a carbon nanotube array and the method for producing a carbon nanotube structure of the present invention are advantageous for industrial application to a carbon nanotube film and a carbon nanotube wire. To do. Also, in the process of transferring the carbon nanotube array, the spacing device can ensure that the distance between the alternative substrate and the growth substrate is not too close, which is advantageous for protecting the form of the carbon nanotube array. In addition, by installing the microstructure on the surface of the alternative substrate and increasing the surface area of the alternative substrate, the bonding force between the alternative substrate and the carbon nanotube array can be increased, so the selection of the alternative substrate material Can widen the range.

DESCRIPTION OF SYMBOLS 10 Carbon nanotube array 20 Growth substrate 30 Alternative substrate 40 Carbon nanotube structure 50 Drawer tool 60 Spacer 102 First surface 104 Second surface 202, 302 Surface 304 Microstructure

Claims (4)

A first step of providing an alternative substrate, a growth substrate, and a spacing device, and forming a carbon nanotube array on a surface of the growth substrate, wherein the carbon nanotube array is a super aligned carbon nanotube array, and the super aligned carbon nanotube array The carbon nanotube structure continuously drawn from the first step includes a plurality of carbon nanotubes connected end to end,
A second step of transferring the carbon nanotube array from the growth substrate to the alternative substrate, wherein the carbon nanotube array transferred to the alternative substrate is a second step in which the carbon nanotube array is the super-aligned carbon nanotube array. A nanotube array transfer method comprising:
In the second step, the surface of the substitute substrate is brought into contact with the surface of the carbon nanotube array away from the growth substrate, and the substitute device and the growth substrate are spaced apart by the spacing device; And moving at least one of the growth substrates to separate the alternative substrate and the growth substrate, detaching the carbon nanotube array from the growth substrate, and transferring to the alternative substrate. A carbon nanotube array transfer method that is characterized. The height when the spacing device is located between the alternative substrate and the growth substrate is 0.9 to 1 times the height of the carbon nanotube array. Carbon nanotube array transfer method.   The plurality of microstructures are formed on the surface of the substitute substrate, and the surface having the microstructure of the substitute substrate is brought into contact with a surface away from the growth substrate of the carbon nanotube array. Carbon nanotube array transfer method. A first step of providing an alternative substrate, a growth substrate, and a spacing device, and forming a carbon nanotube array on a surface of the growth substrate, wherein the carbon nanotube array is a super aligned carbon nanotube array, and the super aligned carbon nanotube array The carbon nanotube structure continuously drawn from the first step includes a plurality of carbon nanotubes connected end to end,
A second step of transferring the carbon nanotube array from the growth substrate to the alternative substrate, wherein the carbon nanotube array transferred to the alternative substrate is the super-aligned carbon nanotube array ;
Withdrawing the carbon nanotube structure from the carbon nanotube array on the alternative substrate,
In the second step, the surface of the substitute substrate is brought into contact with the surface of the carbon nanotube array away from the growth substrate, and the substitute device and the growth substrate are spaced apart by the spacing device; And moving at least one of the growth substrates to separate the alternative substrate and the growth substrate, detaching the carbon nanotube array from the growth substrate, and transferring to the alternative substrate. A method for producing a carbon nanotube structure characterized by the above.