JP6169454B2 - Insulator type measuring device - Google Patents

Description

  The present invention relates to an insulator type measuring apparatus.

  2. Description of the Related Art In recent years, an insulator type measuring apparatus that moves an arm with a stylus attached to the tip in the vertical direction based on the principle of an insulator has been widely used. The insulator type measuring device is used for, for example, contour measurement and roundness measurement. In measurement apparatuses such as these lever type measurement apparatuses, a cross spring may be used for the rotary shaft mechanism used for the vertical movement.

For example, Patent Document 1 discloses a contact-type diameter measuring instrument using a cross spring as a fulcrum for supporting a measuring arm. By using a cross-shaped spring, the contact-type diameter measuring instrument has a wide measurable range and realizes highly accurate measurement.

JP-A-11-257905

  By the way, an insulator type measuring apparatus using a cross spring as a rotating shaft has a very small damping force. Therefore, in general, it is necessary to provide a damper mechanism (vibration damping mechanism) for this rotating shaft. The conventional insulator type measuring device has this damper mechanism on the arm portion of the insulator. However, the provision of the damper mechanism increases the weight of the insulator-type measuring device, causing a problem that the responsiveness deteriorates.

  The contact-type diameter measuring device described in Patent Document 1 has no suggestion or teaching about the damper mechanism. Therefore, the contact type diameter measuring device has a very small damping force.

  The present invention has been made in view of the above-described problems, and a main object of the present invention is to provide an insulator type measuring apparatus that has good responsiveness and excellent attenuation.

The insulator type measuring apparatus according to the first aspect of the present invention is:
An arm to which a stylus having a contact portion that comes into contact with the object to be measured is attached;
A rotation shaft mechanism that rotatably supports the arm according to contact of the contact portion with the object to be measured;
The rotating shaft mechanism has a sealing member that is filled with a buffer member and seals the buffer member.
It is characterized by that.

The insulator type measuring apparatus according to the second aspect of the present invention is:
The buffer member is a magnetic fluid;
The sealing member is a magnet, and the magnet is provided at an end portion in a major axis direction of the rotating shaft mechanism.

The insulator type measuring apparatus according to the third aspect of the present invention is:
The rotating shaft mechanism is constituted by a cross spring.

  INDUSTRIAL APPLICABILITY The present invention can provide an insulator type measuring apparatus that has good responsiveness and excellent attenuation.

It is a perspective view which shows the external appearance structure of the insulator type measuring apparatus 1 concerning Embodiment 1. FIG. FIG. 2 is a perspective view showing an internal configuration of a rotary shaft mechanism 30 according to the first embodiment. FIG. 3 is a perspective view showing the internal configuration of the rotary shaft mechanism 30 according to the first embodiment (magnets 32 and 33 and magnetic fluid 34 are not shown).

<Embodiment 1>
Embodiments of the present invention will be described below with reference to the drawings. Each embodiment is simplified for convenience of explanation. Since the drawings are simple, the technical scope of the present invention should not be interpreted narrowly based on the drawings. The drawings are only for explaining the technical matters, and do not reflect the exact sizes or the like of the elements shown in the drawings. Moreover, the same code | symbol is attached | subjected to the same element and the overlapping description is abbreviate | omitted suitably.

  First, the external configuration of the insulator type measuring apparatus 1 according to the present embodiment will be described with reference to FIG. The insulator type measuring device 1 is, for example, a contour shape measuring device, a roundness measuring device, or a roughness measuring device, and performs measurement using a stylus 40.

  The insulator measuring device 1 includes a frame 10, an arm 20 fixed to the frame 10 by a rotary shaft mechanism 30, a stylus 40 attached to the tip of the arm 20, and a displacement detector 50. Note that the insulator measuring device 1 is connected to a controller device that performs calculations using the displacement information detected by the displacement detector 50. The controller device is a computer having a CPU (Central Processing Unit) and a storage device (for example, a RAM (Random Access Memory) and a ROM (Read Only Memory)).

  The controller device acquires displacement information of the stylus 40 as an electrical signal from the displacement detector 50, and performs various calculations according to the measurement purpose using the displacement information.

  The frame 10 supports the displacement detector 50 and the like. As described above, the arm 20 has the stylus 40 attached to one end. The arm 20 is supported through a rotating shaft mechanism 30 so as to be swingable. That is, the arm 20 swings in the vertical direction (Z direction in the drawing) in accordance with the contact between the tip (contact portion) of the stylus 40 and the object to be measured.

  The arm 20 is rotatably attached with the rotary shaft mechanism 30 as a fulcrum. As described above, the stylus 40 is attached to one end of the arm 20, and the other end is connected to the displacement detector 50.

  The rotating shaft mechanism 30 is a member that connects the frame 10 and the arm 20 and serves as a fulcrum for the rotational movement of the arm 20 as described above. The rotating shaft mechanism 30 according to the present invention has a damper mechanism inside. Details of the damper mechanism will be described later with reference to FIGS.

  The stylus 40 has a contact portion that contacts the object to be measured at the tip. The stylus 40 is attached so as to protrude downward from one end of the arm 20 (Z direction) as described above. The stylus 40 has a contact portion on the other end side when the attachment side with the arm 20 is one end. The stylus 40 has a cylindrical shape as shown in the figure, and a super steel ball is fixed to a cylindrical tip portion (that is, a contact portion). Note that the shape of the stylus 40 shown in the drawing is merely an example, and a plurality of superhard balls may be attached to the contact portion. The material of the contact portion where the stylus 40 contacts the object to be measured may be any member used in a general insulator type measuring apparatus, and may be composed of, for example, sapphire. The contact portion of the stylus 40 continues to be in contact with the object to be measured at the time of measurement, and the arm 20 swings around the rotating shaft mechanism 30 as a fulcrum according to the unevenness of the object to be measured.

  The displacement detector 50 is attached to the arm 20. Specifically, the displacement detector 50 is attached to the end of the arm 20 opposite to the one end to which the stylus 40 is attached. The displacement detector 50 detects the displacement of the position of the contact portion of the stylus 40, and supplies the detected displacement information (displacement amount) as an electrical signal to the above-described controller device.

  Next, the internal structure of the rotating shaft mechanism 30 will be described with reference to FIG. FIG. 2 is a cross-sectional perspective view showing the internal structure of the rotating shaft mechanism 30. A cross leaf spring 31 is formed inside the rotary shaft mechanism 30 as shown in the figure. The basic configuration of the cross leaf spring is disclosed in, for example, US Pat. No. 3,181,851, US Pat. No. 3,807,029, and the like. The cross leaf spring 31 is flexible in the rotation direction with respect to the center of the rotation axis, and has a strong rigidity against the force applied from the vertical direction.

At both ends of the rotating shaft mechanism 30 in the longitudinal direction, end portions of the rotating shaft mechanism 30 or sealing members for sealing the inside are provided at both ends. In this example, a magnet 32 and a magnet 33 (not shown in FIG. 2; provided at the end opposite to the magnet 32) are attached as sealing members. Further, a magnetic fluid 34 is injected into the rotary shaft mechanism 30 (the gap between the cross leaf springs 31).

  That is, the rotary shaft mechanism 30 according to the present embodiment has a magnetic fluid 34 that functions as a buffer member inside in addition to the rotary shaft mechanism (a configuration having only a cross-plate spring inside) of a conventional lever type measuring device. And a magnet 32 and a magnet 33 for sealing the inside of the rotary shaft mechanism 30.

In addition, the rotating shaft mechanism 30 can be filled with, for example, grease as a buffer member. Further, the rotating shaft mechanism 30 may use an arbitrary member covering the end portion instead of the magnets 32 and 33 as a sealing member.

  The magnetic fluid 34 is attracted by the magnetic force of either the magnet 32 or the magnet 33. Therefore, when the filling amount of the magnetic fluid 34 is small, a cavity is generated in the vicinity of the approximate center inside the rotary shaft mechanism 30.

  The viscosity can be adjusted by adjusting the thickness of the magnet 32 and the magnet 33 (the width in the longitudinal direction of the rotating shaft mechanism 30) and the filling amount of the magnetic fluid 34.

  Next, the internal structure of the rotating shaft mechanism 30 will be further described with reference to FIG. FIG. 3 is a cross-sectional perspective view of the rotary shaft mechanism 30 viewed from the magnet 32 in the axial direction. For ease of understanding, the description of the magnet 32 and the magnetic fluid 34 is omitted in FIG.

  As shown in the drawing, a plurality of cross leaf springs 31 are provided so that plate-like members extending inside the cylindrical member are substantially orthogonal to each other. One end of the plate member is fixed to a cylindrical member 35 fixed to the frame 10, and the other end is fixed to a cylindrical member 36 connected to the arm 20 side including the stylus 40. In such a configuration of the cross leaf spring 31, a cavity is formed between the plate-like member and the cylindrical member (35, 36). In the rotating shaft mechanism 30 according to the present embodiment, the hollow portion is filled with the magnetic fluid 34. The magnet 32 and the magnet 33 seal the magnetic fluid 34 in the rotating shaft mechanism 30. In other words, the magnetic fluid 34 can be kept in the vicinity of the position where the magnets 32 and 33 are disposed in the rotating shaft mechanism 30 for a long time by the magnetic force of the magnets 32 and 33.

  Then, the effect of the insulator type measuring apparatus 1 concerning this Embodiment is demonstrated. As described above, the insulator type measuring apparatus 1 according to the present embodiment has a damper mechanism (a mechanism having a buffer member and a sealing member) capable of absorbing minute vibrations in the rotary shaft mechanism 30 including the cross leaf spring 31. It is the structure which has. Further, when a magnetic force is applied to the magnetic fluid 34, the viscosity of the magnetic fluid 34 tends to be further increased, and a strong damper effect can be obtained even with a small amount of magnetic material. Therefore, compared with the structure which does not have a damper mechanism in the rotating shaft mechanism 30 like patent document 1, the insulator type measuring apparatus 1 concerning this Embodiment is excellent in attenuation | damping property.

Further, as described above, the lever type measuring apparatus 1 according to the present embodiment realizes a damper mechanism without adding a damper component outside the rotating shaft mechanism 30 of the lever type measuring apparatus 1. Therefore, a significant increase in mass of the insulator type measuring apparatus 1 can be avoided, and deterioration of the frequency characteristics can be avoided. Further, in the case of a configuration in which a damper mechanism is provided on the arm as in the conventional case, the damper mechanism changes the vibration characteristics of the arm. Since the insulator type measuring apparatus 1 according to the present embodiment realizes the damper mechanism only by the rotating shaft mechanism 30, it is possible to avoid the change in the vibration characteristics of the arm 20.

  Further, since the damper mechanism is realized inside the rotary shaft mechanism 30 as described above, the configuration of the insulator type measuring apparatus 1 is simple. That is, the damper mechanism can be realized with a compact appearance similar to that of the general insulator type measuring apparatus 1.

In the configuration of FIG. 2, the rotary shaft mechanism 30 realizes a damper mechanism by two magnets 32 and 33 and a magnetic fluid 34. In such a configuration, since the magnetic fluid 34 is fixed by the magnet 32 and the magnet 33, it is possible to avoid outflow of working oil or the like as compared with the case where the damper mechanism is realized by other methods such as grease. it can.

  With the magnet 32 and the magnet 33, the inside of the rotating shaft mechanism 30 can be always filled with the magnetic fluid 34. Thereby, it is possible to prevent dust and the like from entering the rotary shaft mechanism 30.

  The above-described embodiments are merely examples relating to application of technical ideas obtained by the present inventors. That is, the technical idea is not limited to the above-described embodiment, and various changes can be made.

  For example, even when the rotary shaft mechanism 30 is configured by a general pivot bearing or radial bearing, as described above, the sealing member (preferably the magnet 32 and the magnet 33) and the buffer member (preferably the magnetic fluid 34). ) To realize a damper mechanism.

  Although the above-described cross leaf spring 31 has been described as having a cylindrical shape, it is not necessarily limited thereto. The cross leaf spring 31 has, for example, a rectangular tube shape, and may be configured so that plate members are orthogonal to each other in the respective tube shapes. Of course, the shape is not limited to a cylindrical shape or a rectangular tube shape, and may be other shapes.

DESCRIPTION OF SYMBOLS 1 Insulator type measuring apparatus 10 Frame 20 Arm 30 Rotating shaft mechanism 31 Cross leaf spring 32 Magnet 33 Magnet 34 Magnetic fluid 35 Cylindrical member 36 Cylindrical member 40 Stylus 50 Displacement detector

Claims (2)

An arm to which a stylus having a contact portion that comes into contact with the object to be measured is attached;
A rotation shaft mechanism that rotatably supports the arm according to contact of the contact portion with the object to be measured;
The rotary shaft mechanism is internal to the buffer member is filled, have a sealing member for sealing the buffer member,
The buffer member is a magnetic fluid,
The sealing member is a magnet, and the magnet is provided at both ends in the long axis direction of the rotating shaft mechanism.
An insulator type measuring apparatus characterized by the above. The lever type measuring apparatus according to claim 1 , wherein the rotation shaft mechanism is configured by a cross spring.

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