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JP6279309B2 - Polishing cushion, polishing apparatus, polishing method, and article including an object polished by the polishing method - Google Patents

Polishing cushion, polishing apparatus, polishing method, and article including an object polished by the polishing method Download PDF

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Publication number
JP6279309B2
JP6279309B2 JP2013263590A JP2013263590A JP6279309B2 JP 6279309 B2 JP6279309 B2 JP 6279309B2 JP 2013263590 A JP2013263590 A JP 2013263590A JP 2013263590 A JP2013263590 A JP 2013263590A JP 6279309 B2 JP6279309 B2 JP 6279309B2
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Prior art keywords
polishing
outer layer
cushion
inner layer
layer
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JP2015116653A (en
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通宏 山原
通宏 山原
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3M Innovative Properties Co
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3M Innovative Properties Co
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Priority to JP2013263590A priority Critical patent/JP6279309B2/en
Priority to PCT/US2014/071095 priority patent/WO2015095489A1/en
Priority to EP14871298.7A priority patent/EP3083140A4/en
Priority to US15/103,778 priority patent/US20160303708A1/en
Priority to CN201480069189.8A priority patent/CN105829022B/en
Priority to TW103144879A priority patent/TW201544258A/en
Publication of JP2015116653A publication Critical patent/JP2015116653A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002Flexible supporting members, e.g. paper, woven, plastic materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/22Lapping pads for working plane surfaces characterised by a multi-layered structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001Manufacture of flexible abrasive materials
    • B24D11/003Manufacture of flexible abrasive materials without embedded abrasive particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/02Backings, e.g. foils, webs, mesh fabrics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D9/00Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
    • B24D9/02Expansible drums for carrying flexible material in tubular form, e.g. expanded by centrifugal force
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D9/00Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
    • B24D9/08Circular back-plates for carrying flexible material

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Description

本発明の一側面は、研磨用クッション、研磨装置、研磨方法、及び当該研磨方法により研磨された対象物を含む物品に関する。   One aspect of the present invention relates to a polishing cushion, a polishing apparatus, a polishing method, and an article including an object polished by the polishing method.

従来から、金属材等を研磨するための研磨装置が知られており、例えば、研磨ディスクまたは研磨ホイールを備える研磨装置が流通している。例えば、下記特許文献1には、研磨ベルトを支持し、被加工物に対して当該研磨ベルトを当てるための接触要素が記載されている。この接触要素は鋸歯状の一連の山部を有し、個々の山部を隔てる溝にはその山部よりも柔らかい材料が詰められる。また、下記特許文献2には、駆動部に備わる駆動源から延在する回転軸に対して偏心してかつ回転自在にて一端を該回転軸に連結した駆動軸が該回転軸の回転により該回転軸の軸芯を中心として偏心運動することで、弾性部材からなる支柱を介して該駆動部に支持されかつ該駆動軸の他端に固定されたベース板をオービタル運動させるオービタルサンダ用駆動装置が記載されている。   Conventionally, a polishing apparatus for polishing a metal material or the like is known. For example, a polishing apparatus including a polishing disk or a polishing wheel is in circulation. For example, the following Patent Document 1 describes a contact element that supports an abrasive belt and applies the abrasive belt to a workpiece. This contact element has a series of serrated peaks and the grooves separating the individual peaks are filled with a softer material than the peaks. Further, in Patent Document 2 below, a drive shaft that is eccentric with respect to a rotation shaft extending from a drive source provided in a drive unit and is rotatably connected to one end of the rotation shaft is rotated by rotation of the rotation shaft. An orbital sander drive device that orbitally moves a base plate that is supported by the drive unit and fixed to the other end of the drive shaft via a support post made of an elastic member by performing eccentric movement about the shaft core. Have been described.

英国特許出願公開第813963号明細書British Patent Application No. 813963 米国特許第7824248号明細書U.S. Pat. No. 7,824,248

一台の研磨装置で(言い換えると、例えば一つの研磨ディスクまたはエンドレス研磨ベルトで)様々な態様の研磨を行うことができれば便利である。例えば、相対的に高い圧力で研磨面を対象物に押し付けながら該被加工面を多く研磨する一方で、相対的に低い圧力で研磨面を対象物に押し付けながら該被加工面を細かく仕上げることもできれば便利である。このような幅広い研磨態様を一つの研磨装置で実現するために研磨面の裏側にクッション材を配することが考えられるが、従来から存在するクッション材を採用するだけでは所望の研磨効果を得ることが難しい。そこで、上記のような複数種類の研磨態様を一台の研磨装置で実現することが望まれている。   It would be convenient if various types of polishing could be performed with a single polishing apparatus (in other words, for example, with a single polishing disk or endless polishing belt). For example, while the polishing surface is pressed against the object with a relatively high pressure, the workpiece surface is polished much, while the polishing surface is pressed against the object with a relatively low pressure to finely finish the processing surface. It is convenient if possible. In order to realize such a wide range of polishing modes with a single polishing apparatus, it is conceivable to arrange a cushion material on the back side of the polishing surface, but a desired polishing effect can be obtained only by using a conventional cushion material. Is difficult. Therefore, it is desired to realize a plurality of types of polishing modes as described above with a single polishing apparatus.

本発明の一側面に係る研磨用クッションは、研磨部材および支持部材のうちの一方の側に面する第1外層と、研磨部材および支持部材のうちの他方の側に面する第2外層と、第1外層と第2外層との間に位置する内層と、第2外層に形成された、内層が進入可能な複数の空間とを備え、内層の硬度が第1外層の硬度および第2外層の硬度の双方よりも低い。   The polishing cushion according to one aspect of the present invention includes a first outer layer facing one side of the polishing member and the support member, a second outer layer facing the other side of the polishing member and the support member, An inner layer located between the first outer layer and the second outer layer, and a plurality of spaces formed in the second outer layer into which the inner layer can enter, wherein the inner layer has a hardness of the first outer layer and the second outer layer. Lower than both hardnesses.

このような側面においては、研磨時に研磨部材に圧力が掛かると、柔らかい内層の一部がその圧力により空間内に進入する。空間の全体が内層で埋まらない程度の圧力(すなわち、相対的に低い圧力)で研磨部材を対象物に当てた場合には、内層がその圧力を緩衝するので、研磨部材を被加工面に弱く当ててその面を細かく仕上げることが可能になる。一方、個々の空間が内層で埋められるほどの圧力(すなわち、相対的に強い圧力)で研磨部材を対象物に当てた場合には、内層がほぼ完全に潰れて圧力をほとんど緩衝しなくなるので、その圧力のほぼすべてが研磨部材に伝わって被加工面が多く研磨される。このように、柔らかい内層が進入する空間を外層に設けることで、複数種類の研磨態様を一台の研磨装置で実現することができる。   In such a side surface, when pressure is applied to the polishing member during polishing, a part of the soft inner layer enters the space by the pressure. When the polishing member is applied to the object at a pressure that does not fill the entire space with the inner layer (that is, a relatively low pressure), the inner layer buffers the pressure, so that the polishing member is weakened to the work surface. It becomes possible to finish the surface finely. On the other hand, when the polishing member is applied to the object at a pressure that allows each space to be filled with the inner layer (that is, a relatively strong pressure), the inner layer is almost completely crushed and the pressure is hardly buffered. Almost all of the pressure is transmitted to the polishing member, so that the work surface is largely polished. As described above, by providing the outer layer with a space for the soft inner layer to enter, a plurality of types of polishing modes can be realized with a single polishing apparatus.

本発明の一側面によれば、複数種類の研磨態様を一台の研磨装置で実現することができる。   According to one aspect of the present invention, a plurality of types of polishing modes can be realized with a single polishing apparatus.

実施形態に係る研磨用クッションの斜視図である。1 is a perspective view of a polishing cushion according to an embodiment. 実施形態に係る研磨用クッションの一例を示す分解斜視図である。It is a disassembled perspective view which shows an example of the polishing cushion which concerns on embodiment. 実施形態に係る研磨用クッションの別の例を示す分解斜視図である。It is a disassembled perspective view which shows another example of the cushion for grinding | polishing which concerns on embodiment. 研磨用クッションの空間の更に別の例を示す斜視図である。It is a perspective view which shows another example of the space of a polishing cushion. 研磨用クッションの空間の更に別の例を示す斜視図である。It is a perspective view which shows another example of the space of a polishing cushion. 研磨用クッションの空間の更に別の例を示す斜視図である。It is a perspective view which shows another example of the space of a polishing cushion. 研磨用クッションの空間の更に別の例を示す斜視図である。It is a perspective view which shows another example of the space of a polishing cushion. 研磨用クッションの空間の更に別の例を示す斜視図である。It is a perspective view which shows another example of the space of a polishing cushion. 研磨用クッションの空間の更に別の例を示す斜視図である。It is a perspective view which shows another example of the space of a polishing cushion. 研磨用クッションの空間の更に別の例を示す斜視図である。It is a perspective view which shows another example of the space of a polishing cushion. 実施形態に係る研磨用クッションを備える携帯用グラインダの図である。It is a figure of a portable grinder provided with the polishing cushion which concerns on embodiment. 携帯用グラインダにおける研磨用クッションの取付を示す分解斜視図である。It is a disassembled perspective view which shows attachment of the cushion for grinding | polishing in a portable grinder. 実施形態に係る研磨用クッションを備える研磨ホイールの斜視図である。It is a perspective view of a grinding wheel provided with a cushion for grinding concerning an embodiment. 研磨ホイールにおける研磨用クッションの取付を示す分解斜視図である。It is a disassembled perspective view which shows attachment of the cushion for grinding | polishing in a grinding | polishing wheel. 実施形態に係る研磨用クッションを備えるシングルアクションサンダーの図である。It is a figure of the single action sander provided with the cushion for grinding concerning an embodiment. 実施形態に係る研磨用クッションを備えるダブルアクションサンダーの図である。It is a figure of a double action sander provided with the cushion for grinding concerning an embodiment. シングルアクションサンダーまたはダブルアクションサンダーにおける研磨用クッションの取付を示す分解斜視図である。It is a disassembled perspective view which shows attachment of the cushion for grinding | polishing in a single action sander or a double action sander. 実施形態に係る研磨用クッションが押圧で変化する様子を模式的に示す断面図である。It is sectional drawing which shows typically a mode that the cushion for grinding | polishing which concerns on embodiment changes with press. 実施例および比較例における研磨量および表面の仕上がりの結果を示す表である。It is a table | surface which shows the result of the grinding | polishing amount and surface finish in an Example and a comparative example.

以下、添付図面を参照しながら本発明の実施形態を詳細に説明する。なお、図面の説明において同一又は同等の要素には同一の符号を付し、重複する説明を省略する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same or equivalent elements are denoted by the same reference numerals, and redundant description is omitted.

まず、図1〜10を用いて、実施形態に係る研磨用クッション10の構造を説明する。研磨用クッション10は、研磨装置の構成要素である研磨部材および支持部材の間に配される物品である。一般に研磨の目的は一つではなく、例えば、対象物の面(被加工面)を多く削ったりその面を細かく仕上げたりするなどのいくつかの態様が挙げられる。研磨用クッション10はこのような複数種類の研磨態様を一台の研磨装置で実現するために用いられる。   First, the structure of the polishing cushion 10 according to the embodiment will be described with reference to FIGS. The polishing cushion 10 is an article disposed between a polishing member and a support member that are components of the polishing apparatus. In general, the purpose of polishing is not one. For example, there are several modes such as cutting a large number of surfaces of the object (surface to be processed) or finely finishing the surface. The polishing cushion 10 is used to realize such a plurality of types of polishing modes with a single polishing apparatus.

ここで、本明細書における用語「研磨」は研削も含む概念である。また、本明細書における用語「研磨部材」は、対象物の面と接触する研磨面を有する部品である。また、本明細書における用語「支持部材」は、研磨時に研磨部材および研磨用クッション10を直接的にまたは間接的に支持する部品である。   Here, the term “polishing” in this specification is a concept including grinding. Further, the term “abrasive member” in this specification is a component having an abrasive surface that comes into contact with the surface of an object. Further, the term “support member” in the present specification is a component that directly or indirectly supports the polishing member and the polishing cushion 10 during polishing.

図1に示すように研磨用クッション10は少なくとも3層から成る。具体的には、研磨用クッション10は、研磨部材および支持部材のうちの一方の側に面する第1外層11と、研磨部材および支持部材のうちの他方の側に面する第2外層12と、これら二つの外層の間に位置する内層13とを備える。第1外層11、第2外層12、および内層13はいずれも平板状であり、これらの3層は接着剤により積み重ねられる。各層の厚さは、研磨部材の寸法や、研磨装置の種類および寸法などを考慮して決めればよい。   As shown in FIG. 1, the polishing cushion 10 comprises at least three layers. Specifically, the polishing cushion 10 includes a first outer layer 11 facing one side of the polishing member and the support member, and a second outer layer 12 facing the other side of the polishing member and the support member. And an inner layer 13 positioned between these two outer layers. The first outer layer 11, the second outer layer 12, and the inner layer 13 are all flat, and these three layers are stacked with an adhesive. The thickness of each layer may be determined in consideration of the size of the polishing member, the type and size of the polishing apparatus, and the like.

第1外層11および第2外層12は、例えば、天然ゴムまたは合成ゴム(例えばウレタンゴムやクロロプレンゴムなど)を主原料として作製される。一方、内層13は、例えば、天然ゴムまたは合成ゴムから得られる発泡体である。内層13の緩衝性および弾性を考慮するとその発泡体については連続気泡型よりも独立気泡型の方が好ましいが、もちろん連続気泡型の発泡体を用いてもよい。あるいは、内層13の主原料は、第1外層および第2外層12よりも硬度の低い天然ゴムまたは合成ゴムでもよい。   The first outer layer 11 and the second outer layer 12 are produced using, for example, natural rubber or synthetic rubber (for example, urethane rubber or chloroprene rubber) as a main raw material. On the other hand, the inner layer 13 is a foam obtained from, for example, natural rubber or synthetic rubber. Considering the buffering properties and elasticity of the inner layer 13, the foam is preferably the closed cell type rather than the open cell type, but of course, an open cell type foam may be used. Alternatively, the main raw material of the inner layer 13 may be natural rubber or synthetic rubber having a lower hardness than the first outer layer and the second outer layer 12.

内層13の硬度は、第1外層11の硬度および第2外層12の硬度の双方よりも低い。各層の硬度は、ゴムの硬さを測定する規格である「加硫ゴム及び熱可塑性ゴム −硬さの求め方−」(JIS K6253(2012年度版))に準拠して測定される。例えば、内層13がタイプAデュロメータでは測りにくい程に軟質であれば、内層13の硬度はタイプEデュロメータの硬度計を用いて測定する方がよい。上記の関係を満たすのであれば、内層13の硬度および二つの外層の硬度の具体的な数値は限定されない。一例として、第1外層11および第2外層12の硬度がタイプAデュロメータで70であり、内層13の硬度がタイプEデュロメータで5であってもよい。あるいは、第1外層11および第2外層12の硬度がタイプAデュロメータで50であり、内層13の硬度がタイプEデュロメータで10であってもよい。なお、第1外層11と第2外層12との間で硬度が異なってもよい。   The hardness of the inner layer 13 is lower than both the hardness of the first outer layer 11 and the hardness of the second outer layer 12. The hardness of each layer is measured in accordance with “Vulcanized rubber and thermoplastic rubber—How to obtain hardness—” (JIS K6253 (2012 edition)), which is a standard for measuring the hardness of rubber. For example, if the inner layer 13 is so soft that it is difficult to measure with a type A durometer, the hardness of the inner layer 13 should be measured using a type E durometer. As long as the above relationship is satisfied, the specific numerical values of the hardness of the inner layer 13 and the hardness of the two outer layers are not limited. As an example, the hardness of the first outer layer 11 and the second outer layer 12 may be 70 in a type A durometer, and the hardness of the inner layer 13 may be 5 in a type E durometer. Alternatively, the hardness of the first outer layer 11 and the second outer layer 12 may be 50 with a type A durometer, and the hardness of the inner layer 13 may be 10 with a type E durometer. The hardness may be different between the first outer layer 11 and the second outer layer 12.

二つの外層のうちの一方(本明細書では第2外層12とする)には複数の空間14が形成される。この空間14は、図2に示すように第2外層12の一方の面から反対側の面にかけて貫通した孔(底のない空間)14aであってもよい。あるいは、この空間14は、図3に示すように第2外層12の一方の面において形成された窪み(底がある空間)14bであってもよい。いずれにしても、第2外層12の面のうち空間14の開口部を有する方が内層13と貼り合わされる。   A plurality of spaces 14 are formed in one of the two outer layers (referred to as the second outer layer 12 in this specification). As shown in FIG. 2, the space 14 may be a hole (a space without a bottom) 14 a penetrating from one surface of the second outer layer 12 to the opposite surface. Alternatively, the space 14 may be a recess (a space with a bottom) 14b formed on one surface of the second outer layer 12 as shown in FIG. In any case, the surface of the second outer layer 12 having the opening of the space 14 is bonded to the inner layer 13.

図2,3では円形の空間14が千鳥状に配置されているが、空間14の形状および配置はこれに限定されるものではない。空間の変形例の一部を図4〜10に示す。なお、図4〜9の変形例では空間が貫通孔であるが、当然ながらそれは窪みであってもよい。図10の変形例では空間は窪みである。   2 and 3, the circular spaces 14 are arranged in a staggered manner, but the shape and arrangement of the spaces 14 are not limited to this. A part of the modification of space is shown in FIGS. In addition, in the modification of FIGS. 4-9, space is a through-hole, However, It may be a hollow naturally. In the modification of FIG. 10, the space is a depression.

図4では三角形の空間14が千鳥状に配置されており、図5では四角形の空間14が千鳥状に配置されている。もちろん、千鳥状の配置は必須ではなく、例えば空間14が格子状に配置されてもよい。図6〜10では個々の空間はスリット状である。図6では、第2外層12の一辺に沿って延びる空間14が千鳥状に配置されている。図7では、第2外層12の一辺に沿って延びる空間14が、当該一辺と直交する辺に沿って整列している。図8では、第2外層12の外縁に対して斜めに延びる空間14が整列している。図9ではジグザグ状の空間14が整列している。図10では、第2外層12の外縁に対して斜めに延びる空間14が網状に配置されている。当然ながら空間14の形状はこれらに限定されず、例えば六角形、星形、楕円、波形、円弧、扇形などの様々な形が考えられる。   In FIG. 4, the triangular spaces 14 are arranged in a staggered manner, and in FIG. 5, the rectangular spaces 14 are arranged in a staggered manner. Of course, the staggered arrangement is not essential. For example, the spaces 14 may be arranged in a lattice pattern. In FIGS. 6 to 10, each space has a slit shape. In FIG. 6, the spaces 14 extending along one side of the second outer layer 12 are arranged in a staggered manner. In FIG. 7, the space 14 extending along one side of the second outer layer 12 is aligned along a side orthogonal to the one side. In FIG. 8, the spaces 14 extending obliquely with respect to the outer edge of the second outer layer 12 are aligned. In FIG. 9, the zigzag spaces 14 are aligned. In FIG. 10, spaces 14 extending obliquely with respect to the outer edge of the second outer layer 12 are arranged in a net shape. Of course, the shape of the space 14 is not limited to these, and various shapes such as a hexagon, a star, an ellipse, a waveform, an arc, and a sector are conceivable.

一つの第2外層12において異なる形状の空間14が混在してもよく、例えば三角形の空間14と四角形の空間14とが混在してもよいし、円形の空間14とスリット状の空間14とが混在してもよい。また、一つの第2外層12において貫通孔および窪みが混在してもよい。また、一つの第2外層12における個々の空間14の大きさが区々であってもよく、例えば、直径が1cmである円形の空間14と直径が2cmである円形の空間14とが混在してもよい。   Spaces 14 having different shapes may be mixed in one second outer layer 12, for example, a triangular space 14 and a rectangular space 14 may be mixed, or the circular space 14 and the slit-shaped space 14 may be mixed. It may be mixed. Further, in one second outer layer 12, through holes and depressions may be mixed. Further, the size of each space 14 in one second outer layer 12 may vary, for example, a circular space 14 having a diameter of 1 cm and a circular space 14 having a diameter of 2 cm are mixed. May be.

第2外層12の全体における空間14の領域の割合、すなわち空隙率は限定されず、例えばその空隙率が50〜80%の範囲にあってもよい。一つの第2外層における空間14の形状または大きさが区々の場合もあり得るので、その空隙率は算出対象の領域の位置により変わり得る。例えば、一つの第2外層12において周縁部付近の空隙率が50%で中央付近の空隙率が70%である場合などがあり得る。   The ratio of the area | region of the space 14 in the whole 2nd outer layer 12, ie, the porosity, is not limited, For example, the porosity may be in the range of 50 to 80%. Since the shape or size of the space 14 in one second outer layer may vary, the porosity may vary depending on the position of the calculation target region. For example, in one second outer layer 12, there may be a case where the porosity near the periphery is 50% and the porosity near the center is 70%.

次に、図11〜14を用いて、研磨用クッション10の適用例を示す。図11,12は携帯用グラインダ20に研磨用クッション10を適用する例であり、この例において研磨部材は研磨ディスク21であり支持部材はパッド22である。研磨用クッション10は研磨ディスク21およびパッド22の形状に合わせて加工され、その中心には貫通孔が形成される。研磨用クッション10は研磨ディスク21およびパッド22と同様に携帯用グラインダ20に着脱可能に取り付けられる。図12に示すように、ユーザは、携帯用グラインダ20の本体から延びるシャフト23にパッド22、研磨用クッション10、研磨ディスク21の順にこれらの3部品を差し込む。そして、ユーザは、シャフト23の端部に形成されている雄ねじにナット24を締め付けることで、パッド22、研磨用クッション10、および研磨ディスク21をシャフト23に固定する。   Next, application examples of the polishing cushion 10 will be described with reference to FIGS. FIGS. 11 and 12 show an example in which the polishing cushion 10 is applied to a portable grinder 20. In this example, the polishing member is a polishing disk 21 and the support member is a pad 22. FIG. The polishing cushion 10 is processed according to the shape of the polishing disk 21 and the pad 22, and a through hole is formed at the center thereof. The polishing cushion 10 is detachably attached to the portable grinder 20 like the polishing disk 21 and the pad 22. As shown in FIG. 12, the user inserts these three components in the order of the pad 22, the polishing cushion 10, and the polishing disk 21 into the shaft 23 extending from the main body of the portable grinder 20. Then, the user fastens the pad 22, the polishing cushion 10, and the polishing disc 21 to the shaft 23 by tightening the nut 24 to the male screw formed at the end of the shaft 23.

図13,14は研磨ホイール30に研磨用クッション10を取り付ける例であり、この例において研磨部材はエンドレス研磨ベルト31であり支持部材はホイール32である。図14は、ホイール32の外周よりも短い複数の研磨用クッション10(例えば、長さが該外周の1/8である8個の研磨用クッション10)を示しているが、研磨用クッション10はエンドレス(すなわち、輪)であってもよい。研磨用クッション10はホイール32の外周面上に着脱可能に取り付けられる。図14に示すように複数の研磨用クッション10を取り付けるのであれば、ホイール32側に面する研磨用クッション10の外層(図14では第2外層12)上には接着層または粘着層がさらに形成される。この場合には、ユーザは研磨用クッション10をホイール32の外周面に貼り付けた後にエンドレス研磨ベルト31をホイール32に取り付ける。研磨用クッション10がエンドレス(輪)であれば、ユーザはまずその研磨用クッション10をホイール32にはめてから、エンドレス研磨ベルト31をホイール32に取り付ける。   FIGS. 13 and 14 show an example in which the polishing cushion 10 is attached to the polishing wheel 30. In this example, the polishing member is an endless polishing belt 31 and the support member is a wheel 32. FIG. FIG. 14 shows a plurality of polishing cushions 10 that are shorter than the outer periphery of the wheel 32 (for example, eight polishing cushions 10 having a length that is 1/8 of the outer periphery). It may be endless (ie, a ring). The polishing cushion 10 is detachably mounted on the outer peripheral surface of the wheel 32. If a plurality of polishing cushions 10 are attached as shown in FIG. 14, an adhesive layer or an adhesive layer is further formed on the outer layer (second outer layer 12 in FIG. 14) of the polishing cushion 10 facing the wheel 32 side. Is done. In this case, the user attaches the polishing cushion 10 to the outer peripheral surface of the wheel 32 and then attaches the endless polishing belt 31 to the wheel 32. If the polishing cushion 10 is endless (ring), the user first attaches the polishing cushion 10 to the wheel 32 and then attaches the endless polishing belt 31 to the wheel 32.

研磨用クッション10は、図15に示すシングルアクションサンダー40Aおよび図16に示すダブルアクションサンダー40Bにも適用可能である。これらの研磨装置40A,40Bは、図17に詳細に示す共通の研磨パッド41を備える。この研磨パッド41において研磨部材は研磨ディスク42であり支持部材はパッド43である。研磨用クッション10は研磨ディスク42およびパッド43の形状に合わせて加工される。研磨用クッション10はシングルアクションサンダー40Aまたはダブルアクションサンダー40Bに着脱可能に取り付けられる。図17に示すように、ユーザは、研磨装置40Aまたは40Bの本体から延びるシャフト44にパッド43を取り付け、このパッド43に研磨用クッション10を貼り付け、その研磨用クッション10に研磨ディスク42を貼り付ける。なお、貼付は面ファスナあるいは粘着剤などにより実現可能である。この一連の作業により、パッド43、研磨用クッション10、および研磨ディスク42がシャフト44に対して固定される。   The polishing cushion 10 can also be applied to the single action sander 40A shown in FIG. 15 and the double action sander 40B shown in FIG. These polishing apparatuses 40A and 40B include a common polishing pad 41 shown in detail in FIG. In this polishing pad 41, the polishing member is a polishing disk 42 and the support member is a pad 43. The polishing cushion 10 is processed according to the shape of the polishing disk 42 and the pad 43. The polishing cushion 10 is detachably attached to the single action sander 40A or the double action sander 40B. As shown in FIG. 17, the user attaches a pad 43 to the shaft 44 extending from the main body of the polishing apparatus 40A or 40B, attaches the polishing cushion 10 to the pad 43, and attaches the polishing disk 42 to the polishing cushion 10. wear. Note that the sticking can be realized with a hook-and-loop fastener or an adhesive. By this series of operations, the pad 43, the polishing cushion 10, and the polishing disk 42 are fixed to the shaft 44.

研磨装置の種類にかかわらず、研磨用クッション10の使用態様は二つある。一つは、図11〜17に示すように、複数の空間14が形成された第2外層12が支持部材(パッド22、ホイール32、またはパッド43)の側に面し、空間14を持たない第1外層11が研磨部材(研磨ディスク21、エンドレス研磨ベルト31、または研磨ディスク42)の側に面するように研磨用クッション10を研磨装置に取り付ける手法である。もう一つは、第2外層12が研磨部材の側に面し第1外層11が支持部材の側に面するように研磨用クッション10を研磨装置に取り付ける手法である。   Regardless of the type of polishing apparatus, there are two modes of use of the polishing cushion 10. First, as shown in FIGS. 11 to 17, the second outer layer 12 formed with a plurality of spaces 14 faces the support member (pad 22, wheel 32, or pad 43) and does not have the space 14. In this method, the polishing cushion 10 is attached to the polishing apparatus so that the first outer layer 11 faces the polishing member (the polishing disk 21, the endless polishing belt 31, or the polishing disk 42). The other is a method of attaching the polishing cushion 10 to the polishing apparatus such that the second outer layer 12 faces the polishing member and the first outer layer 11 faces the support member.

このように研磨装置の種類および研磨用クッションの使用態様は様々であるが、いずれにしても、ユーザは研磨部材と支持部材との間に研磨用クッション10が配置された研磨装置を用いて対象物を研磨する。研磨された対象物はそのまま物品として、あるいは物品の一部として提供される。   As described above, the types of the polishing apparatus and the usage modes of the polishing cushion are various. In any case, the user can use the polishing apparatus in which the polishing cushion 10 is disposed between the polishing member and the support member. Polish the object. The polished object is provided as an article as it is or as a part of the article.

ユーザが研磨部材の面を対象物に押し当てて被加工面を研磨する際には、図18に示すように、研磨部材50と支持部材60との間に配された研磨用クッション10の内層13が、第2外層12に形成された空間14内に入り込む。図18の中段に示すように、空間14が完全に埋まらない程度の圧力(すなわち、相対的に低い圧力)でユーザが研磨部材50を対象物に当てた場合には、内層13がその圧力を緩衝するので研磨部材50を被加工面に弱く当てることができ、その結果、その面を細かく仕上げることができる。一方、図18の下段に示すように、空間14が内層13で完全に埋まるほどの圧力(すなわち、相対的に高い圧力)でユーザが研磨部材50を対象物に当てた場合には、内層13が第1外層11および第2外層12の間でほぼ完全に潰れて空間14がその内層13で埋まるので、内層13はほとんど圧力を緩衝しない。その結果、その圧力のほぼすべてを研磨部材50に伝えて対象物の面を多く研磨することができる。   When the user presses the surface of the polishing member against the object to polish the surface to be processed, the inner layer of the polishing cushion 10 disposed between the polishing member 50 and the support member 60 as shown in FIG. 13 enters the space 14 formed in the second outer layer 12. As shown in the middle part of FIG. 18, when the user applies the polishing member 50 to the object at a pressure that does not completely fill the space 14 (that is, a relatively low pressure), the inner layer 13 reduces the pressure. Since the buffering is performed, the polishing member 50 can be weakly applied to the surface to be processed, and as a result, the surface can be finely finished. On the other hand, as shown in the lower part of FIG. 18, when the user hits the polishing member 50 against the object with a pressure that allows the space 14 to be completely filled with the inner layer 13 (that is, a relatively high pressure), Is almost completely crushed between the first outer layer 11 and the second outer layer 12, and the space 14 is filled with the inner layer 13, so that the inner layer 13 hardly buffers the pressure. As a result, almost all of the pressure can be transmitted to the polishing member 50 to polish the surface of the object much.

柔らかい内層が進入し得る空間を持たない研磨用クッションでは、内層がほとんど変形しないので、結局、内層が圧力をほとんど緩衝しない。その結果、対象物を多く研磨することはできても、被加工面を細かく仕上げることは難しい。一方、本実施形態によれば、柔らかい内層13が進入する空間14を第2外層12に設けることで、複数種類の研磨態様を一台の研磨装置で実現することができる。   In a polishing cushion that does not have a space through which a soft inner layer can enter, the inner layer hardly deforms, so that the inner layer hardly absorbs pressure. As a result, even if many objects can be polished, it is difficult to finish the work surface finely. On the other hand, according to the present embodiment, by providing the second outer layer 12 with the space 14 into which the soft inner layer 13 enters, a plurality of types of polishing modes can be realized with a single polishing apparatus.

以上説明したように、本発明の一側面に係る研磨用クッションは、研磨部材および支持部材のうちの一方の側に面する第1外層と、研磨部材および支持部材のうちの他方の側に面する第2外層と、第1外層と第2外層との間に位置する内層と、第2外層に形成された、内層が進入可能な複数の空間とを備え、内層の硬度が第1外層の硬度および第2外層の硬度の双方よりも低い。   As described above, the polishing cushion according to one aspect of the present invention has the first outer layer facing one side of the polishing member and the support member, and the other side of the polishing member and the support member. A second outer layer, an inner layer located between the first outer layer and the second outer layer, and a plurality of spaces formed in the second outer layer into which the inner layer can enter, wherein the hardness of the inner layer is that of the first outer layer. It is lower than both the hardness and the hardness of the second outer layer.

また、本発明の一側面に係る研磨装置は、上記の研磨用クッションと、研磨部材と、支持部材とを備える。   A polishing apparatus according to one aspect of the present invention includes the above polishing cushion, a polishing member, and a support member.

また、本発明の一側面に係る研磨方法は、研磨装置を用いた研磨方法であって、研磨部材と支持部材との間に研磨用クッションが配置された研磨装置を用いて対象物を研磨する工程を含み、研磨用クッションが、研磨部材および支持部材のうちの一方の側に面する第1外層と、研磨部材および支持部材のうちの他方の側に面する第2外層と、第1外層と第2外層との間に位置する内層と、第2外層に形成された、内層が進入可能な複数の空間とを備え、内層の硬度が第1外層の硬度および第2外層の硬度の双方よりも低い。   A polishing method according to one aspect of the present invention is a polishing method using a polishing apparatus, and polishes an object using a polishing apparatus in which a polishing cushion is disposed between a polishing member and a support member. A first outer layer facing the one side of the polishing member and the support member, a second outer layer facing the other side of the polishing member and the support member, and a first outer layer An inner layer located between the first outer layer and the second outer layer, and a plurality of spaces formed in the second outer layer into which the inner layer can enter, wherein the inner layer has both the hardness of the first outer layer and the hardness of the second outer layer. Lower than.

また、本発明の一側面に係る物品は、上記の研磨方法により研磨された対象物を含む。   Further, an article according to one aspect of the present invention includes an object polished by the above polishing method.

このような側面においては、研磨時に研磨部材に圧力が掛かると、柔らかい内層の一部がその圧力により空間内に進入する。空間の全体が内層で埋まらない程度の圧力(すなわち、相対的に低い圧力)で研磨部材を対象物に当てた場合には、内層がその圧力を緩衝するので、研磨部材を被加工面に弱く当ててその面を細かく仕上げることが可能になる。一方、個々の空間が内層で埋められるほどの圧力(すなわち、相対的に強い圧力)で研磨部材を対象物に当てた場合には、内層がほぼ完全に潰れて圧力をほとんど緩衝しなくなるので、その圧力のほぼすべてが研磨部材に伝わって被加工面が多く研磨される。このように、柔らかい内層が進入する空間を外層に設けることで、複数種類の研磨態様を一台の研磨装置で実現することができる。   In such a side surface, when pressure is applied to the polishing member during polishing, a part of the soft inner layer enters the space by the pressure. When the polishing member is applied to the object at a pressure that does not fill the entire space with the inner layer (that is, a relatively low pressure), the inner layer buffers the pressure, so that the polishing member is weakened to the work surface. It becomes possible to finish the surface finely. On the other hand, when the polishing member is applied to the object at a pressure that allows each space to be filled with the inner layer (that is, a relatively strong pressure), the inner layer is almost completely crushed and the pressure is hardly buffered. Almost all of the pressure is transmitted to the polishing member, so that the work surface is largely polished. As described above, by providing the outer layer with a space for the soft inner layer to enter, a plurality of types of polishing modes can be realized with a single polishing apparatus.

本発明の別の側面では、内層が進入可能な空間を有さない第1外層が研磨部材の側に面し、第2外層が支持部材の側に面してもよい。研磨部材の側に面する第1外層に空間を設けないことで、研磨用クッションに加えられた圧力が第1外層からほぼ均一に研磨部材に伝わるので、被加工面を斑なく研磨することが可能になる。   In another aspect of the present invention, the first outer layer that does not have a space into which the inner layer can enter may face the polishing member side, and the second outer layer may face the support member side. By not providing a space in the first outer layer facing the polishing member, the pressure applied to the polishing cushion is transmitted almost uniformly from the first outer layer to the polishing member, so that the work surface can be polished without unevenness. It becomes possible.

本発明の別の側面では、複数の空間の開口部が形成された第2外層の面が内層に貼り合わされてもよい。この場合には内層と開口部との間に介在する物がないので、内層がその空間内に入り易くなり、その分、内層の厚さを調整しやすくなる。   In another aspect of the present invention, the surface of the second outer layer in which openings in a plurality of spaces are formed may be bonded to the inner layer. In this case, since there is no intervening material between the inner layer and the opening, the inner layer easily enters the space, and the thickness of the inner layer is easily adjusted accordingly.

本発明の別の側面では、複数の空間が貫通孔であってもよい。空間を貫通孔とすることで該空間内に進入する内層の体積を最大限に増やすことができるので、相対的に低い圧力を研磨部材に当てることが容易になる。また、窪みを形成する場合と比べると貫通孔の形成は容易なので、その分、研磨用クッションを簡単に作製できる。   In another aspect of the present invention, the plurality of spaces may be through holes. By making the space a through-hole, the volume of the inner layer that enters the space can be maximized, so that it is easy to apply a relatively low pressure to the polishing member. Further, since the formation of the through-hole is easier than in the case of forming the depression, the polishing cushion can be easily produced correspondingly.

以下、実施例に基づいて本発明を具体的に説明するが、本発明はそれらに何ら限定されるものではない。   EXAMPLES Hereinafter, although this invention is demonstrated concretely based on an Example, this invention is not limited to them at all.

実施例として、上記の研磨用クッション10に相当する3層の研磨用クッションを用意した。第1外層および第2外層の主原料はクロロプレンゴムであり、内層の主原料もクロロプレンゴムであった。実施例では、いずれも第1外層および第2外層の硬度はタイプAデュロメータの規格において50であり、内層の硬度はタイプEデュロメータの規格において5であった。また、第1外層および第2外層の厚みは2mmであり内層の厚みは3mmであった。第2外層に形成した複数の空間は円形の貫通孔であり、この貫通孔を千鳥状に並べた。空隙率は50〜80%とした。   As an example, a three-layer polishing cushion corresponding to the polishing cushion 10 was prepared. The main raw material of the first outer layer and the second outer layer was chloroprene rubber, and the main raw material of the inner layer was also chloroprene rubber. In the examples, the hardness of the first outer layer and the second outer layer was 50 in the type A durometer standard, and the hardness of the inner layer was 5 in the type E durometer standard. Moreover, the thickness of the 1st outer layer and the 2nd outer layer was 2 mm, and the thickness of the inner layer was 3 mm. The plurality of spaces formed in the second outer layer are circular through holes, and the through holes are arranged in a staggered pattern. The porosity was 50 to 80%.

一方、比較例として、空間を持たない一つの外層(上記実施形態における第1外層11に相当)と内層とから成る2層の研磨用クッションを用意した。各層の主原料および硬度は比較例と同じであった。   On the other hand, as a comparative example, a two-layer polishing cushion composed of one outer layer (corresponding to the first outer layer 11 in the above embodiment) having no space and an inner layer was prepared. The main raw materials and hardness of each layer were the same as those in the comparative example.

研磨用クッション以外の構成、および被研磨物は実施例と比較例とで共通とした。研磨装置として、米国ミシガン州カラマズー(Kalamazoo,Michigan,USA)にあるハモンド・ロト・フィニッシュ社(Hammond Roto−Finish Co,Inc.)製のセンタレス研磨機、ニッシンボウ・ハモンド・OD−2(Nisshinbo Hammond OD−2)を用いた。研磨ベルトには、米国ミネソタ州セントポール(St. Paul,Minnesota,USA)にあるスリーエム・カンパニー(3M Company)製のトライザクト(Trizact(商標))363FC A35を採用した。研磨ベルトの幅は5.08cm(2インチ)であった。被研磨物として、直径が5.08センチメートル(2インチ)の炭素鋼の棒を用いた。研磨時の圧力はセンタレス研磨機の負荷電流(アンペア)により規定した。   The configuration other than the polishing cushion and the object to be polished were common to the examples and comparative examples. As a polishing apparatus, a centerless polishing machine manufactured by Hammond Roto-Finish Co, Inc. in Kalamazoo, Michigan, USA, Nisshinbo Hammond OD-2 (Nissinbo Hammond OD-2) -2) was used. Trizact ™ 363FC A35 manufactured by 3M Company in St. Paul, Minnesota, USA was employed as the polishing belt. The width of the abrasive belt was 5.08 cm (2 inches). As an object to be polished, a carbon steel rod having a diameter of 5.08 centimeters (2 inches) was used. The pressure during polishing was defined by the load current (ampere) of the centerless polishing machine.

実施例および比較例において、圧力を高くした場合(負荷電流は4アンペア)と低くした場合(負荷電流は0.5アンペア)との2回、センタレス研磨機で棒を研磨した。ここで、高圧力とは、実施例において第2外層内の空間が内層で完全に埋まるほどの圧力であり(図18の下段を参照)、低圧力とは、実施例において第2外層内の空間の一部が内層で埋まらない程の圧力である(図18の中段を参照)。実施例および比較例の双方において、研磨時間は、棒の長さ方向における5.08cm(2インチ。すなわち、研磨ベルトの幅に相当する長さ)当たり1.5秒であった。図19に、その研磨の結果を研磨量と表面の仕上がりとの二つの側面で示す。研磨量は棒の直径の減少量により規定し、表面の仕上がりは表面粗さ(より具体的には算術平均粗さ(Ra))で規定した。   In the examples and comparative examples, the rod was polished with a centerless grinder twice, when the pressure was increased (load current was 4 amperes) and when the pressure was decreased (load current was 0.5 amperes). Here, the high pressure is a pressure such that the space in the second outer layer is completely filled with the inner layer in the embodiment (see the lower part of FIG. 18), and the low pressure is the pressure in the second outer layer in the embodiment. The pressure is such that a part of the space is not filled with the inner layer (see the middle part of FIG. 18). In both the examples and comparative examples, the polishing time was 1.5 seconds per 5.08 cm (2 inches, ie the length corresponding to the width of the polishing belt) in the length direction of the rod. FIG. 19 shows the result of the polishing in two aspects, the polishing amount and the surface finish. The amount of polishing was defined by the amount of reduction in the diameter of the rod, and the surface finish was defined by the surface roughness (more specifically, arithmetic average roughness (Ra)).

以上、本発明をその実施形態に基づいて詳細に説明した。しかし、本発明は上記実施形態に限定されるものではない。本発明は、その要旨を逸脱しない範囲で様々な変形が可能である。   The present invention has been described in detail based on the embodiments. However, the present invention is not limited to the above embodiment. The present invention can be variously modified without departing from the gist thereof.

上記実施形態では研磨用クッション10は3層構造であるが、研磨用クッションは4以上の層を有してもよい。ただし、ここでは、第1外層と内層とを貼り付けるための接着層、および第2外層と内層とを貼り付けるための接着層は考慮しない。すなわち、接着層以外の別の層が第1外層と内層との間に、または第2外層と内層との間に存在してもよい。ただし、空間が形成された外層と内層との間に存在する層は、当該空間への内層の進入を妨げない程度に薄くまたは柔らかくする必要がある。あるいは、第1外層の外側に別の層が貼られてもよいし、第2外層の外側に別の層が貼られてもよい。   In the above embodiment, the polishing cushion 10 has a three-layer structure, but the polishing cushion may have four or more layers. However, the adhesive layer for attaching the first outer layer and the inner layer and the adhesive layer for attaching the second outer layer and the inner layer are not considered here. That is, another layer other than the adhesive layer may be present between the first outer layer and the inner layer, or between the second outer layer and the inner layer. However, the layer existing between the outer layer and the inner layer in which the space is formed needs to be thin or soft enough not to prevent the inner layer from entering the space. Or another layer may be affixed on the outer side of a 1st outer layer, and another layer may be affixed on the outer side of a 2nd outer layer.

上記実施形態では第2外層12にのみ空間14が形成されたが、内層が進入する空間は第1外層および第2外層の双方に形成されてもよい。この場合、空間の形状、寸法、および場所が第1外層と第2外層とで同じでもよいし異なってもよい。   In the above embodiment, the space 14 is formed only in the second outer layer 12, but the space into which the inner layer enters may be formed in both the first outer layer and the second outer layer. In this case, the shape, size, and location of the space may be the same or different between the first outer layer and the second outer layer.

研磨用クッション10を用いる際には、研磨用クッション10と研磨部材との間に別の部材を介在させてもよいし、研磨用クッション10と支持部材との間に別の部材を介在させてもよい。すなわち、研磨用クッション10の外面を研磨部材または支持部材と接触させなくてもよい。   When the polishing cushion 10 is used, another member may be interposed between the polishing cushion 10 and the polishing member, or another member may be interposed between the polishing cushion 10 and the support member. Also good. That is, the outer surface of the polishing cushion 10 may not be in contact with the polishing member or the support member.

10…研磨用クッション、11…第1外層、12…第2外層、13…内層、14…空間、14a…貫通孔(空間)、14b…窪み(空間)、21…研磨ディスク(研磨部材)、22…パッド(支持部材)、31…エンドレス研磨ベルト(研磨部材)、32…ホイール(支持部材)、42…研磨ディスク(研磨部材)、43…パッド(支持部材)、50…研磨部材、60…支持部材。   DESCRIPTION OF SYMBOLS 10 ... Cushion for grinding | polishing, 11 ... 1st outer layer, 12 ... 2nd outer layer, 13 ... Inner layer, 14 ... Space, 14a ... Through-hole (space), 14b ... Depression (space), 21 ... Polishing disk (abrasive member), DESCRIPTION OF SYMBOLS 22 ... Pad (support member), 31 ... Endless polishing belt (polishing member), 32 ... Wheel (support member), 42 ... Polishing disk (polishing member), 43 ... Pad (support member), 50 ... Polishing member, 60 ... Support member.

Claims (7)

研磨部材および支持部材のうちの一方の側に面する第1外層と、
前記研磨部材および前記支持部材のうちの他方の側に面する第2外層と、
前記第1外層と前記第2外層との間に位置する内層と、
前記第2外層に形成された、前記内層が進入可能な複数の空間と
を備え、
前記内層の硬度が前記第1外層の硬度および前記第2外層の硬度の双方よりも低い、研磨用クッション。
A first outer layer facing one side of the polishing member and the support member;
A second outer layer facing the other side of the polishing member and the support member;
An inner layer located between the first outer layer and the second outer layer;
A plurality of spaces formed in the second outer layer, into which the inner layer can enter,
A polishing cushion, wherein the hardness of the inner layer is lower than both the hardness of the first outer layer and the hardness of the second outer layer.
前記内層が進入可能な空間を有さない前記第1外層が前記研磨部材の側に面し、
前記第2外層が前記支持部材の側に面する、請求項1に記載の研磨用クッション。
The first outer layer does not have a space into which the inner layer can enter and faces the polishing member;
The polishing cushion according to claim 1, wherein the second outer layer faces the support member.
前記複数の空間の開口部が形成された前記第2外層の面が前記内層に貼り合わされた、請求項1または2に記載の研磨用クッション。   The polishing cushion according to claim 1 or 2, wherein a surface of the second outer layer in which openings of the plurality of spaces are formed is bonded to the inner layer. 前記複数の空間が貫通孔である、請求項1〜3のいずれか一項に記載の研磨用クッション。   The polishing cushion according to any one of claims 1 to 3, wherein the plurality of spaces are through holes. 請求項1〜4のいずれか一項に記載の研磨用クッションと、
前記研磨部材と、
前記支持部材とを備える研磨装置。
A polishing cushion according to any one of claims 1 to 4, and
The polishing member;
A polishing apparatus comprising the support member.
研磨装置を用いた研磨方法であって、
研磨部材と支持部材との間に研磨用クッションが配置された前記研磨装置を用いて対象物を研磨する工程を含み、
前記研磨用クッションが、
前記研磨部材および前記支持部材のうちの一方の側に面する第1外層と、
前記研磨部材および前記支持部材のうちの他方の側に面する第2外層と、
前記第1外層と前記第2外層との間に位置する内層と、
前記第2外層に形成された、前記内層が進入可能な複数の空間と
を備え、
前記内層の硬度が前記第1外層の硬度および前記第2外層の硬度の双方よりも低い、研磨方法。
A polishing method using a polishing apparatus,
Polishing the object using the polishing apparatus in which a polishing cushion is disposed between the polishing member and the support member,
The polishing cushion is
A first outer layer facing one side of the polishing member and the support member;
A second outer layer facing the other side of the polishing member and the support member;
An inner layer located between the first outer layer and the second outer layer;
A plurality of spaces formed in the second outer layer and into which the inner layer can enter,
The polishing method, wherein the hardness of the inner layer is lower than both the hardness of the first outer layer and the hardness of the second outer layer.
研磨装置を用いて研磨された物品を製造する方法であって、A method for producing an article polished using a polishing apparatus,
研磨部材と支持部材との間に研磨用クッションが配置された前記研磨装置を用いて対象物を研磨することで研磨された物品を得る工程を含み、Including a step of obtaining a polished article by polishing an object using the polishing apparatus in which a polishing cushion is disposed between a polishing member and a support member,
前記研磨用クッションが、The polishing cushion is
前記研磨部材および前記支持部材のうちの一方の側に面する第1外層と、A first outer layer facing one side of the polishing member and the support member;
前記研磨部材および前記支持部材のうちの他方の側に面する第2外層と、A second outer layer facing the other side of the polishing member and the support member;
前記第1外層と前記第2外層との間に位置する内層と、An inner layer located between the first outer layer and the second outer layer;
前記第2外層に形成された、前記内層が進入可能な複数の空間とA plurality of spaces formed in the second outer layer into which the inner layer can enter;
を備え、With
前記内層の硬度が前記第1外層の硬度および前記第2外層の硬度の双方よりも低い、The hardness of the inner layer is lower than both the hardness of the first outer layer and the hardness of the second outer layer,
研磨された物品を製造する方法。A method for producing a polished article.
JP2013263590A 2013-12-20 2013-12-20 Polishing cushion, polishing apparatus, polishing method, and article including an object polished by the polishing method Expired - Fee Related JP6279309B2 (en)

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US15/103,778 US20160303708A1 (en) 2013-12-20 2014-12-18 Polishing cushion, polishing apparatus, polishing method, and article including object polished by the polishing method
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