JP6304479B2 - Liquid ejecting head and liquid ejecting apparatus - Google Patents

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that eject liquid from nozzle openings, and more particularly to an ink jet recording head and an ink jet recording apparatus that eject ink as liquid.

  An ink jet recording head, which is a typical example of a liquid ejecting head that ejects liquid droplets, includes, for example, a nozzle opening and a flow path such as a pressure generating chamber that communicates with the nozzle opening. Some ink droplets cause ink droplets to be ejected from the nozzle openings by causing a pressure change.

  In such an ink jet recording head, the components contained in the ink evaporate from the nozzle openings, thereby increasing the viscosity of the ink, causing variations in the ejection characteristics of the ink droplets over time, and keeping the liquid ejection quality constant. I can't. In addition, the liquid ejection quality is also caused by the difference between the ink droplet component when the component contained in the ink settles and ejected continuously and the component of the ink droplet when ejected after a while. Variation will occur.

  For this reason, ink is supplied to a manifold which is a common liquid chamber in which a plurality of pressure generating chambers communicate in common, and ink is recovered from the manifold, and the ink is circulated by repeating supply and recovery, thereby providing ink. Inkjet recording heads have been proposed in which the thickening of the ink and the sedimentation of components contained in the ink are suppressed (see, for example, Patent Documents 1 and 2).

JP 2009-247938 A JP-A-6-143601

  However, even if the ink in the manifold is circulated, the temperature difference (temperature gradient) between the temperature at the center of the ink flow in the manifold and the temperature of the ink near the nozzle opening communicating with the pressure generating chamber supplied from the manifold. Even if the ink at the desired temperature circulates in the manifold, the temperature of the ink near the nozzle opening becomes lower than the temperature of the ink in the manifold, and the ink cannot be ejected at the optimum temperature. There is a problem that optimum ejection characteristics cannot be obtained.

  In addition, even if the ink in the manifold is circulated, there is a temperature gradient between the temperature of the ink on the inflow path for supplying ink to the manifold and the temperature on the outflow path for discharging ink from the manifold in the direction in which the pressure generating chambers are arranged side by side. As a result, there is a problem that ink having the same temperature cannot be ejected from all the nozzle openings, resulting in variations in ejection characteristics.

  In addition, if the volume of the manifold is reduced, the temperature gradient of ink between the liquid ejection surface side and the side opposite to the liquid ejection surface in the manifold and the temperature gradient of ink in the direction in which the pressure generation chambers are juxtaposed can be reduced. The pressure loss increases, the pressure change of the pressure generating means cannot be absorbed on the manifold side, and problems such as crosstalk occur.

  Such a problem exists not only in an ink jet recording head but also in a liquid ejecting head that ejects liquid other than ink.

  In view of such circumstances, the present invention suppresses a decrease in the volume of the manifold, reduces a temperature gradient in the manifold, and discharges the liquid at an optimum temperature. The purpose is to provide.

An aspect of the present invention that solves the above problems includes a liquid ejection surface provided with a nozzle opening for ejecting liquid, a pressure generation chamber that is arranged in parallel in the in-plane direction of the liquid ejection surface and communicates with the nozzle opening, Pressure generating means for causing a pressure change in the pressure generating chamber, a manifold communicating with the plurality of pressure generating chambers, an inflow path for supplying warmed liquid to the manifold, and an outflow for allowing liquid to flow out of the manifold And the inflow passage has an inclined channel on the side communicating with the manifold, and the inclined channel has at least the surface direction of the inner surface on the liquid ejecting surface side orthogonal to the liquid ejecting surface. A first component that travels from the inflow path toward the liquid ejection surface, and a second component that travels in the in-plane direction of the liquid ejection surface from the inflow path toward the outflow path. 1 vector direction and The liquid jet is characterized in that the inclined flow path is formed such that an inner surface of the inflow path opposite to the liquid jet surface is in the first vector direction. In the head.
In this aspect, by providing the inclined flow path, the temperature gradient of the liquid in the manifold can be reduced with the flow of the heated liquid supplied in the manifold as the first vector direction. Thereby, it is possible to suppress the occurrence of variations in the temperature of the liquid supplied to each pressure generation chamber and to suppress the occurrence of variations in the liquid ejection characteristics. In addition, since only the inclined flow path is provided, the volume of the manifold is not reduced, the increase in pressure loss can be suppressed, and adverse effects on the discharge characteristics and the like can be suppressed.
In addition, the inclined flow path is formed so that the inner surface of the inflow path opposite to the liquid ejection surface is in the first vector direction, so that the liquid flowing into the manifold from the inclined flow path can be diffused. The temperature gradient can be reduced by forming a reliable flow in the liquid.
According to another aspect of the present invention, there is provided a liquid ejection surface provided with a nozzle opening for ejecting liquid, a pressure generation chamber that is arranged in parallel in the in-plane direction of the liquid ejection surface and communicates with the nozzle opening, A pressure generating means for causing a pressure change in the pressure generating chamber; a manifold communicating with the plurality of pressure generating chambers; an inflow path for supplying warmed liquid to the manifold; and an outflow path for discharging liquid from the manifold And the inflow passage has an inclined channel on a side communicating with the manifold, and the inclined channel has at least a surface direction of the inner surface on the liquid ejecting surface side orthogonal to the liquid ejecting surface. A first component having a first direction from the inflow path toward the liquid ejection surface and a second component in an in-plane direction of the liquid ejection surface from the inflow path toward the outflow path. The vector direction of Is formed, the inclined flow path, in a direction perpendicular to the liquid jetting surface, a liquid-jet head, characterized in that provided in communication with the liquid ejecting surface side of the manifold.
In this aspect, by providing the inclined flow path, the temperature gradient of the liquid in the manifold can be reduced with the flow of the heated liquid supplied in the manifold as the first vector direction. Thereby, it is possible to suppress the occurrence of variations in the temperature of the liquid supplied to each pressure generation chamber and to suppress the occurrence of variations in the liquid ejection characteristics. In addition, since only the inclined flow path is provided, the volume of the manifold is not reduced, the increase in pressure loss can be suppressed, and adverse effects on the discharge characteristics and the like can be suppressed.
In addition, since the inclined channel is provided in communication with the liquid ejection surface side of the manifold in the direction orthogonal to the liquid ejection surface, the liquid stays on the side near the inflow path on the liquid ejection surface side. It can suppress and sedimentation of the component contained in the liquid can be suppressed, and the bubble discharge property can be improved.
According to another aspect of the present invention, there is provided a liquid ejection surface provided with a nozzle opening for ejecting liquid, a pressure generation chamber that is arranged in parallel in the in-plane direction of the liquid ejection surface and communicates with the nozzle opening, A pressure generating means for causing a pressure change in the pressure generating chamber; a manifold communicating with the plurality of pressure generating chambers; an inflow path for supplying warmed liquid to the manifold; and an outflow path for discharging liquid from the manifold And the inflow passage has an inclined channel on a side communicating with the manifold, and the inclined channel has at least a surface direction of the inner surface on the liquid ejecting surface side orthogonal to the liquid ejecting surface. A first component having a first direction from the inflow path toward the liquid ejection surface and a second component in an in-plane direction of the liquid ejection surface from the inflow path toward the outflow path. The vector direction of The nozzle opening is a region obtained by projecting the opening communicating with the manifold of the inclined flow channel onto the liquid ejecting surface in the first vector direction in the direction in which the pressure generating chambers are arranged side by side. The liquid ejecting head is provided in a region on the outflow path side including the liquid ejecting head.
In this aspect, by providing the inclined flow path, the temperature gradient of the liquid in the manifold can be reduced with the flow of the heated liquid supplied in the manifold as the first vector direction. Thereby, it is possible to suppress the occurrence of variations in the temperature of the liquid supplied to each pressure generation chamber and to suppress the occurrence of variations in the liquid ejection characteristics. In addition, since only the inclined flow path is provided, the volume of the manifold is not reduced, the increase in pressure loss can be suppressed, and adverse effects on the discharge characteristics and the like can be suppressed.
The nozzle opening is provided in an area on the outflow path side including an area in which the opening communicating with the manifold of the inclined flow path is projected onto the liquid ejection surface in the first vector direction in the direction in which the pressure generation chambers are arranged. As a result, it is possible to suppress liquids having different temperatures from being supplied to the pressure generation chambers communicating with the nozzle openings, and to suppress variations in the liquid ejection characteristics.
Here, it is preferable that the inclined flow path is provided in communication with the liquid ejection surface side of the manifold in a direction orthogonal to the liquid ejection surface. According to this, it is possible to suppress the liquid from staying on the side near the inflow path on the liquid ejection surface side, to suppress the sedimentation of the components contained in the liquid and to improve the bubble discharge performance.
In addition, the nozzle opening includes a region in which the opening communicating with the manifold of the inclined channel is projected onto the liquid ejecting surface in the first vector direction in the juxtaposed direction of the pressure generating chambers. It is preferable to be provided in the roadside region. According to this, it can suppress that the liquid of a different temperature is supplied to the pressure generation chamber connected to a nozzle opening, and can suppress that dispersion | variation arises in the ejection characteristic of a liquid.
Moreover, it is preferable that the said nozzle opening provided in the edge part of the parallel arrangement direction of the said pressure generation chamber of the said nozzle opening is provided in the said projected area | region. According to this, the parallel arrangement direction of the pressure generating chambers of the liquid ejecting head can be reduced in size.
Further, it is preferable that a dummy nozzle that is not used for discharging the liquid is provided on the inclined flow path side with respect to the projected region in the juxtaposition direction of the pressure generating chambers. According to this, by providing the dummy nozzles that are not related to the temperature of the liquid outside the projected region, the direction in which the pressure generating chambers of the liquid ejecting head are arranged side by side can be reduced in size.
Further, the outflow path has an outflow path inclined channel on a side communicating with the manifold, and the outflow channel inclined channel has at least a surface direction of the inner surface on the liquid ejection surface side to the liquid ejection surface. A third component that is perpendicular to the liquid ejection surface from the liquid ejection surface toward the outflow passage, and a fourth component that is in an in-plane direction of the liquid ejection surface and travels from the inflow passage toward the outflow passage. It is preferably formed so as to be in the second vector direction. According to this, the temperature gradient of the liquid in the manifold can be further reduced by providing the outflow channel inclined channel. In addition, by providing the inclined flow path for the outflow path, the direction of the liquid flowing through the flow path can be reversed, that is, the liquid can be supplied from the outflow path and the liquid can flow out from the inflow path. There is no limitation on the head mounting direction, and the assembly process and the like can be simplified.
In addition, in the direction orthogonal to the liquid ejection surface, the inclined flow path of the inflow passage extends in a direction away from the liquid ejection surface from an end portion of the manifold opposite to the liquid ejection surface. It may be.
Further, the inclined flow path of the inflow path is formed across the region where the inclined flow path and the manifold communicate with each other on the side opposite to the liquid ejection surface of the manifold. Preferably, it is formed by the inclined channel projection provided so as to protrude toward the surface. According to this, the inclined channel is inclined in the first vector direction without extending the inclined channel in the direction away from the liquid ejecting surface from the end opposite to the liquid ejecting surface of the manifold. Can be formed. Therefore, the direction perpendicular to the liquid ejection surface of the liquid ejection head can be reduced in size.
Further, it is preferable that a projection that protrudes in a direction intersecting a flow direction of the liquid flowing in the manifold is provided between the inflow passage and the outflow passage in the manifold. According to this, since the center of the flow of the liquid flowing through the manifold from the inflow path toward the outflow path moves to the side communicating with the pressure generation chamber by providing the protrusion, the temperature gradient of the liquid flowing through the manifold is further increased. Can be reduced. Further, since only the protrusions are provided, the volume of the manifold is not significantly reduced, the increase in pressure loss can be suppressed, and adverse effects on the discharge characteristics and the like can be suppressed.
Further, it is preferable that the protrusion is provided so as to protrude toward a portion communicating with the manifold of the pressure generating chamber. Accordingly, the center of the flow of the liquid flowing from the inflow path toward the outflow path can be reliably moved to the side communicating with the pressure generating chamber.
Moreover, it is preferable that a plurality of the protrusions are provided between the inflow path and the outflow path. According to this, the center of the flow of the liquid flowing from the inflow path toward the outflow path can be reliably moved to the side communicating with the pressure generating chamber by the plurality of protrusions. Moreover, it can suppress that the volume of a manifold reduces remarkably.
According to another aspect of the invention, there is provided a liquid ejecting apparatus including the liquid ejecting head according to the above aspect.
In this aspect, it is possible to realize a liquid ejecting apparatus that suppresses variations in the liquid ejection characteristics.
According to another aspect, there is provided a liquid ejecting surface provided with a nozzle opening for ejecting liquid, a pressure generating chamber arranged in parallel in the in-plane direction of the liquid ejecting surface and communicating with the nozzle opening, and the pressure generating chamber Pressure generating means for causing a pressure change to the manifold, a manifold communicating with the plurality of pressure generating chambers, an inflow path for supplying the heated liquid to the manifold, and an outflow path for allowing the liquid to flow out of the manifold. And the inflow passage has an inclined channel on a side communicating with the manifold, and the inclined channel has a direction in which at least the surface direction of the inner surface on the liquid ejecting surface side is perpendicular to the liquid ejecting surface. The first vector direction having a first component from the inflow path toward the liquid ejection surface and a second component in the in-plane direction of the liquid ejection surface from the inflow path toward the outflow path Formed to be A liquid-jet head characterized by that.
In this aspect, by providing the inclined flow path, the temperature gradient of the liquid in the manifold can be reduced with the flow of the heated liquid supplied in the manifold as the first vector direction. Thereby, it is possible to suppress the occurrence of variations in the temperature of the liquid supplied to each pressure generation chamber and to suppress the occurrence of variations in the liquid ejection characteristics. In addition, since only the inclined flow path is provided, the volume of the manifold is not reduced, the increase in pressure loss can be suppressed, and adverse effects on the discharge characteristics and the like can be suppressed.

  Here, it is preferable that the inclined channel is formed so that an inner surface of the inflow channel opposite to the liquid ejecting surface is in the first vector direction. According to this, it is possible to reduce the temperature gradient by suppressing the diffusion of the liquid flowing into the manifold from the inclined flow path and forming a reliable flow in the liquid.

  Further, it is preferable that the inclined flow path is provided in communication with the liquid ejecting surface side of the manifold in a direction orthogonal to the liquid ejecting surface. According to this, it is possible to suppress the liquid from staying on the side near the inflow path on the liquid ejection surface side, to suppress the sedimentation of the components contained in the liquid and to improve the bubble discharge performance.

  In addition, the nozzle opening includes a region in which the opening communicating with the manifold of the inclined channel is projected onto the liquid ejecting surface in the first vector direction in the juxtaposed direction of the pressure generating chambers. It is preferable to be provided in the roadside region. According to this, it can suppress that the liquid of a different temperature is supplied to the pressure generation chamber connected to a nozzle opening, and can suppress that dispersion | variation arises in the ejection characteristic of a liquid.

  Moreover, it is preferable that the said nozzle opening provided in the edge part of the parallel arrangement direction of the said pressure generation chamber of the said nozzle opening is provided in the said projected area | region. According to this, the parallel arrangement direction of the pressure generating chambers of the liquid ejecting head can be reduced in size.

  Further, it is preferable that a dummy nozzle that is not used for discharging the liquid is provided on the inclined flow path side with respect to the projected region in the juxtaposition direction of the pressure generating chambers. According to this, by providing the dummy nozzles that are not related to the temperature of the liquid outside the projected region, the direction in which the pressure generating chambers of the liquid ejecting head are arranged side by side can be reduced in size.

  Further, the outflow path has an outflow path inclined channel on a side communicating with the manifold, and the outflow channel inclined channel has at least a surface direction of the inner surface on the liquid ejection surface side to the liquid ejection surface. A third component that is perpendicular to the liquid ejection surface from the liquid ejection surface toward the outflow passage, and a fourth component that is in an in-plane direction of the liquid ejection surface and travels from the inflow passage toward the outflow passage. It is preferably formed so as to be in the second vector direction. According to this, the temperature gradient of the liquid in the manifold can be further reduced by providing the outflow channel inclined channel. In addition, by providing the inclined flow path for the outflow path, the direction of the liquid flowing through the flow path can be reversed, that is, the liquid can be supplied from the outflow path and the liquid can flow out from the inflow path. There is no limitation on the head mounting direction, and the assembly process and the like can be simplified.

  Further, in the direction orthogonal to the liquid ejection surface, the inclined flow path may be extended in a direction away from the liquid ejection surface from an end portion of the manifold opposite to the liquid ejection surface. .

  In addition, the inclined channel is formed across the region where the inclined channel and the manifold communicate with each other on the opposite side of the manifold from the liquid ejecting surface, and protrudes toward the liquid ejecting surface. It is preferable that it is formed by the inclined channel projection provided. According to this, the inclined channel is inclined in the first vector direction without extending the inclined channel in the direction away from the liquid ejecting surface from the end opposite to the liquid ejecting surface of the manifold. Can be formed. Therefore, the direction perpendicular to the liquid ejection surface of the liquid ejection head can be reduced in size.

  Further, it is preferable that a projection that protrudes in a direction intersecting a flow direction of the liquid flowing in the manifold is provided between the inflow passage and the outflow passage in the manifold. According to this, since the center of the flow of the liquid flowing through the manifold from the inflow path toward the outflow path moves to the side communicating with the pressure generation chamber by providing the protrusion, the temperature gradient of the liquid flowing through the manifold is further increased. Can be reduced. Further, since only the protrusions are provided, the volume of the manifold is not significantly reduced, the increase in pressure loss can be suppressed, and adverse effects on the discharge characteristics and the like can be suppressed.

  Further, it is preferable that the protrusion is provided so as to protrude toward a portion communicating with the manifold of the pressure generating chamber. Accordingly, the center of the flow of the liquid flowing from the inflow path toward the outflow path can be reliably moved to the side communicating with the pressure generating chamber.

  Moreover, it is preferable that a plurality of the protrusions are provided between the inflow path and the outflow path. According to this, the center of the flow of the liquid flowing from the inflow path toward the outflow path can be reliably moved to the side communicating with the pressure generating chamber by the plurality of protrusions. Moreover, it can suppress that the volume of a manifold reduces remarkably.

According to another aspect of the invention, there is provided a liquid ejecting apparatus including the liquid ejecting head according to the above aspect.
In this aspect, it is possible to realize a liquid ejecting apparatus that suppresses variations in the liquid ejection characteristics.

FIG. 3 is an exploded perspective view of the recording head according to the first embodiment. FIG. 3 is a cross-sectional view of the recording head according to the first embodiment. FIG. 3 is a cross-sectional view of the recording head according to the first embodiment. FIG. 3 is a cross-sectional view of the recording head according to the first embodiment. FIG. 3 is a cross-sectional view illustrating a flow of a liquid in a recording head compared with Embodiment 1. FIG. 3 is a cross-sectional view illustrating a flow of a flow path in the recording head compared to the first embodiment. FIG. 10 is a cross-sectional view illustrating a modification of the protrusion according to the first embodiment. FIG. 10 is a cross-sectional view illustrating a modification of the protrusion according to the first embodiment. 6 is a cross-sectional view illustrating a recording head according to Embodiment 2. FIG. FIG. 6 is a cross-sectional view illustrating a recording head according to a third embodiment. 1 is a diagram illustrating a schematic configuration of a recording apparatus according to an embodiment.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is an exploded perspective view of an ink jet recording head showing an example of a liquid jet head according to Embodiment 1 of the present invention, FIG. 2 is a cross-sectional view of the ink jet recording head, and FIG. FIG. 4 is a cross-sectional view taken along the line AA ′ of FIG. 4, and FIG. 4 is a cross-sectional view taken along the line BB ′ of FIG.

  As shown in the drawing, the ink jet recording head 1 includes a plurality of members such as a head main body 11 and a case 40, and the plurality of members are joined together by an adhesive or the like. In the present embodiment, the head body 11 includes a flow path forming substrate 10, a communication plate 15, a nozzle plate 20, a protective substrate 30, and a compliance substrate 91.

  In the flow path forming substrate 10 constituting the head body 11, a plurality of pressure generating chambers 12 are arranged in parallel along the direction in which the plurality of nozzle openings 21 are arranged in parallel. Hereinafter, this direction is referred to as a direction in which the pressure generating chambers 12 are arranged side by side or a first direction X. Further, the flow path forming substrate 10 is provided with a plurality of rows in which the pressure generation chambers 12 are arranged in parallel in the first direction X, and in this embodiment, two rows. An arrangement direction in which a plurality of rows of the pressure generation chambers 12 in which the pressure generation chambers 12 are formed along the first direction X is provided is hereinafter referred to as a second direction Y. In the two rows in which the pressure generation chambers 12 are arranged in the first direction X, the row of the other pressure generation chambers 12 is adjacent to the row of the one pressure generation chamber 12 in the first direction X. The pressure generating chambers 12 are arranged at positions shifted in the first direction X by half the interval between the pressure generating chambers 12. As a result, the nozzle openings 21 to be described in detail later are similarly arranged so that two rows of the nozzle openings 21 are shifted in the first direction X by a half interval, thereby doubling the resolution in the first direction X. . In the present embodiment, a direction orthogonal to the first direction X and the second direction Y is referred to as a third direction Z. In the present embodiment, in the first direction X, the inflow path 44 side, which will be described later in detail, is referred to as X1, and the outflow path 45 side is referred to as X2. In the second direction Y, one side is referred to as Y1 side and the other side is referred to as Y2 side. In the second direction Y, as will be described in detail later, the ink from the manifold 100 provided closer to the Y1 side than the row of the pressure generating chambers 12 is placed in the row of the pressure generating chambers 12 provided on the Y1 side. Ink is supplied to the row of pressure generation chambers 12 provided on the Y2 side from the manifold 100 provided on the Y2 side of the row of pressure generation chambers 12. Further, in the third direction Z, the liquid ejection direction side (recording sheet S side) is referred to as Z1 side, and the opposite side is referred to as Z2 side.

  Further, the flow path forming substrate 10 is provided with a flow path resistance of the ink flowing into the pressure generation chamber 12 on one end side in the second direction Y of the pressure generation chamber 12 with an opening area smaller than that of the pressure generation chamber. A supply path or the like may be provided.

  A communication plate 15 is bonded to one surface of the flow path forming substrate 10. Further, the nozzle plate 20 provided with the nozzle openings 21 is joined to the communication plate 15. In the present embodiment, the Z1 side in the third direction Z in which the nozzle openings of the nozzle plate 20 open serves as the liquid ejection surface 20a.

  The communication plate 15 is provided with a nozzle communication path 16 that communicates the pressure generation chamber 12 and the nozzle opening 21. The communication plate 15 has a larger area than the flow path forming substrate 10, and the nozzle plate 20 has a smaller area than the flow path forming substrate 10. Thus, cost reduction can be achieved by making the area of the nozzle plate 20 relatively small.

  The communication plate 15 is provided with a first manifold portion 17 and a second manifold portion 18 that constitute a part of the manifold 100.

  The first manifold portion 17 is provided through the communication plate 15 in the third direction Z.

  Further, the second manifold portion 18 does not penetrate the communication plate 15 in the third direction Z, and opens to the nozzle plate 20 side of the communication plate 15 and is provided halfway in the third direction Z.

  Further, the communication plate 15 is provided with a supply communication passage 19 that communicates with one end portion of the pressure generation chamber 12 in the second direction Y independently for each pressure generation chamber 12. The supply communication path 19 communicates the second manifold portion 18 and the pressure generation chamber 12.

  On the other hand, a diaphragm is formed on the surface of the flow path forming substrate 10 opposite to the communication plate 15. Moreover, the piezoelectric actuator 300 which is a pressure generation means of this embodiment is comprised by laminating | stacking a 1st electrode, a piezoelectric material layer, and a 2nd electrode in order on a diaphragm. In general, one of the electrodes of the piezoelectric actuator 300 is used as a common electrode, and the other electrode and the piezoelectric layer are patterned for each pressure generating chamber 12.

  A protective substrate 30 having substantially the same size as the flow path forming substrate 10 is bonded to the surface of the flow path forming substrate 10 on the piezoelectric actuator 300 side. The protective substrate 30 has a holding portion 31 that is a space for protecting the piezoelectric actuator 300. The protective substrate 30 is provided with a through hole 32 that penetrates in the third direction Z. The end portion of the lead electrode 90 drawn from the electrode of the piezoelectric actuator 300 is extended so as to be exposed in the through hole 32, and the lead substrate and the wiring substrate 121 on which the drive circuit 120 such as a drive IC is mounted, It is electrically connected in the through hole 32.

  In addition, a case 40 is fixed to the protective substrate 30 and the communication plate 15 to define the manifold 100 communicating with the plurality of pressure generating chambers 12 together with the head body 11. The case 40 has substantially the same shape as the communication plate 15 described above in a plan view, and is bonded to the protective substrate 30 and is also bonded to the communication plate 15 described above. Specifically, the case 40 has a recess 41 having a depth in which the flow path forming substrate 10 and the protective substrate 30 are accommodated on the protective substrate 30 side. The concave portion 41 has an opening area larger than the surface of the protective substrate 30 bonded to the flow path forming substrate 10. The opening surface on the nozzle plate 20 side of the recess 41 is sealed by the communication plate 15 in a state where the flow path forming substrate 10 and the like are accommodated in the recess 41. As a result, the third manifold portion 42 is defined by the case 40 and the head body 11 on the outer peripheral portion of the flow path forming substrate 10. The first manifold portion 17 and the second manifold portion 18 provided on the communication plate 15 and the third manifold portion 42 defined by the case 40 and the head main body 11 constitute the manifold 100 of the present embodiment. Has been. In the present embodiment, the manifold 100 is formed on both sides of the head body 11 across the second direction Y.

  The case 40 is provided with a connection port 43 that communicates with the through hole 32 of the protective substrate 30 and through which the wiring substrate 121 is inserted.

  Further, as shown in FIGS. 3 and 4, the case 40 has an inflow path 44 that communicates with the manifold 100 and supplies ink to the manifold 100, and an outflow that communicates with the manifold 100 and causes ink in the manifold 100 to flow out. A path 45 is provided. Such an inflow path 44 is provided on one side of the head body 11 in the first direction X, and the outflow path 45 is provided on the other side of the head body 11 in the first direction X. The inflow path 44 of the present embodiment is connected to the liquid storage means 5 provided outside the ink jet recording head 1 via the supply pipe 8 at one place, and the inflow path 44 is in the middle. Are branched into two to communicate with the manifolds 100 on both sides of the head body 11 in the second direction Y, respectively. Further, the two outflow passages 45 communicating with the two manifolds 100 are joined together in the middle and connected to the recovery pipe 9. That is, the inflow path 44 to which the same ink is supplied branches into two in the middle and supplies the same ink to the two manifolds 100. Further, the ink in the manifold 100 flows out from one outlet by joining the outflow passages 45 communicating with each other on the way. Of course, the inflow passage 44 may be provided independently for each manifold 100 without branching in the middle, and the outflow passage 45 may be provided independently for each manifold 100 without joining in the middle. May be.

  Further, as shown in FIG. 2, a compliance substrate 91 is provided on the surface of the communication plate 15 where the first manifold portion 17 and the second manifold portion 18 are opened. The compliance substrate 91 seals the openings of the first manifold portion 17 and the second manifold portion 18.

  Such a compliance substrate 91 includes a sealing film 92 and a fixed substrate 93 in the present embodiment. The sealing film 92 is formed of a flexible thin film (for example, polyphenylene sulfide (PPS), stainless steel (SUS), etc. The fixed substrate 93 is made of metal such as stainless steel (SUS), etc. A region facing the manifold 100 of the fixed substrate 93 is an opening 94 that is completely removed in the thickness direction, and thus one surface of the manifold 100 has flexibility. It is a compliance part which is a flexible part sealed only with the sealing film 92.

  Here, the inflow path 44 for supplying ink to the manifold 100 has an inclined flow path 46 on the side communicating with the third manifold portion 42 of the manifold 100 as shown in FIG.

  In the inclined flow path 46, at least the liquid ejection surface 20a side, that is, the surface direction of the first surface 46a on the Z1 side in the third direction Z is a direction perpendicular to the liquid ejection surface 20a and the liquid ejection from the inflow path 44 is performed. A first vector direction 200 having a first component 201 toward the surface 20a and a second component 202 in the in-plane direction of the liquid ejection surface 20a and from the inflow path 44 toward the outflow path 45. It is formed with an inclination. In addition, the 1st component 201 of this embodiment is a component which is the 3rd direction Z and goes to the Z1 side from the Z2 side. The second component 202 is a component in the first direction X from the X1 side that is the inflow channel 44 side to the X2 side that is the outflow channel 45 side. The inclined flow path 46 is composed of the first component 201 and the second component 202 at least in the liquid ejection surface 20a side, that is, the surface direction of the first surface 46a on the Z1 side in the third direction Z. The first vector direction 200 is inclined and formed. Further, in the inclined channel 46 of the present embodiment, the surface direction of the second surface 46b on the side opposite to the liquid ejection surface 20a, that is, the Z2 side in the third direction Z is the first vector direction 200. It is formed to be inclined.

  In this way, by providing at least the first surface 46a of the inclined channel 46 so as to be in the first vector direction 200, the ink supplied from the inclined channel 46 into the manifold 100 is the first. A flow in the vector direction 200 is formed. In the present embodiment, the second surface 46 b of the inclined flow path 46 is provided so as to be inclined in the first vector direction 200, so that the flow of ink supplied into the manifold 100 is not diffused. The liquid can flow toward the liquid ejection surface 20a. Incidentally, when the opening area of the inclined flow path 46 is gradually enlarged toward the manifold 100 side, the flow of ink supplied into the manifold 100 diffuses. In the present embodiment, by providing the first surface 46a and the second surface 46b of the inclined channel 46 so as to be in the same first vector direction 200, the opening area is gradually enlarged toward the manifold 100 side. Without spreading the ink flow. Similarly, the width of the inclined channel 46 in the second direction Y may be gradually increased toward the manifold 100 or may not be increased. In order to prevent the ink flow from diffusing, it is preferable to provide the inclined channel 46 with the same width in the second direction Y. As described above, if the ink flow is excessively diffused, the function of the inclined flow path 46 is not exhibited, and a temperature gradient is generated in the manifold 100 between the inflow path 44 side and the outflow path 45 side. It is preferable to form the inclined flow path 46 as described above.

  Incidentally, the inclined flow path 46 inclines only the 2nd surface 46b so that it may become the 1st vector direction 200, and does not incline the 1st surface 46a, but the 1st direction X or the 2nd direction Y In such an inclined flow path having only the second surface 46b as an inclined surface, the ink supplied into the manifold 100 is caused to flow toward the first vector direction 200. Is difficult. That is, the inclined flow path 46 is provided so as to be inclined so that the surface direction of the first surface 46a at least on the liquid ejection surface 20a side, that is, the Z1 side in the third direction Z is the first vector direction 200. The ink supplied from the inclined flow path 46 into the manifold 100 forms a flow in the first vector direction 200. Therefore, even if the second surface 46b of the inclined flow path 46 is in the first direction X or the second direction Y, the first vector direction is applied to the ink supplied into the manifold 100 by the inclined flow path 46. A flow to 200 can be formed.

  In the present embodiment, such a second surface 46b of the inclined channel 46 is Z1 in the third direction Z from the side opposite to the liquid ejection surface 20a at the connection portion between the inclined channel 46 and the manifold 100. It is formed by the inclined channel projection 47 provided so as to protrude toward the side. That is, the inclined channel 46 of the present embodiment is provided at the same height as the Z2 side in the third direction Z of the manifold 100, and a second surface 46b inclined by the inclined channel projection 47 is formed. As a result, even if the inclined channel 46 has the same height in the third direction Z as the manifold 100, the second surface 46b is inclined. Thus, by making the inclined flow path 46 the same height as the height on the Z2 side in the third direction Z of the manifold 100, the case 40 can be prevented from being enlarged in the third direction Z.

  Note that the inclined channel projection 47 is preferably provided outside the region communicating with the pressure generating chamber 12 in the first direction X, that is, on the X1 side. As a result, it is possible to suppress variations in the volume of the manifold 100 communicating with each pressure generating chamber 12 and variations in the ink ejection characteristics. In other words, if the inclined channel projection 47 is provided at a position facing the second direction Y of the pressure generation chamber 12, the inclined channel projection 47 is present, so that the pressure generation chamber 12 is opposed in the second direction Y. The pressure generating chamber 12 in which the volume of the manifold 100 in the third direction Z is reduced, and the volume of the manifold 100 in the third direction Z facing in the second direction Y where the inclined channel projection 47 does not exist. This is because a difference occurs. Of course, the inclined channel projection 47 may be formed in a region communicating with the pressure generating chamber 12 in the first direction X.

  In the present embodiment, such an inclined channel 46 is provided in the third direction Z so as to communicate with the side opposite to the liquid ejection surface 20a of the manifold 100, that is, the Z2 side.

  Thus, by providing the inclined flow path 46 on the side of the inflow path 44 that communicates with the manifold 100, the ink heated in the manifold 100 is transferred from the liquid ejection surface 20 a side, that is, the Z 2 side in the third direction Z. It can flow to the Z1 side. Therefore, the temperature gradient of the ink in the manifold 100 in the third direction Z, that is, the difference between the ink temperature on the Z1 side and the ink temperature on the Z2 side of the manifold 100 can be reduced. Further, by providing the inclined flow path 46, the ink heated in the manifold 100 is communicated with the outflow path 45 from the X1 side in the first direction X, which is the side communicating with the inflow path 44 on the Z1 side. It can flow toward a certain X2 side. Accordingly, the temperature gradient in the first direction X on the Z1 side of the ink in the manifold 100, that is, the ink temperature on the X1 side that is the side communicating with the inflow path 44, and the side communicating with the outflow path 45 of the manifold 100. The difference from the ink temperature on the X2 side can be reduced.

  Here, the ink flow of the present embodiment in which the inclined channel 46 is provided, and the ink of the comparative example in which the inflow channel is provided along the first direction X or the second direction Y without providing the inclined channel 46. The flow of this is shown in FIG.

  As shown in FIG. 5A, when the inclined flow path 46 is provided in the inflow path 44 as in the present embodiment, the ink 500 supplied to the manifold 100 is the heated ink 500 in the third direction. It spreads over Z and the first direction X. Thereby, the temperature gradient is reduced over the entire manifold 100.

  On the other hand, as shown in FIG. 5B, in the configuration in which the inflow path 144 is provided along the first direction X without providing the inclined flow path 46, the heat supplied to the manifold 100 is heated. The ink 501 flows while being biased toward the Z2 side in the third direction Z. Incidentally, in the example shown in FIG. 5B, the inflow path 144 communicates with the Z2 side of the manifold 100. For example, when the inflow path 144 is communicated with the Z1 side of the manifold 100, the inflow path 144 is heated. Further, the ink 501 flows toward the Z1 side, and the temperature gradient of the ink in the entire manifold 100, particularly, the temperature gradient in the third direction Z cannot be reduced. When the ink in the manifold 100 is agitated at the time of ink ejection or the like, if the temperature gradient is large, there is a problem that a large temperature difference occurs between the temperature before agitation and the temperature after agitation. . In the configuration of the present embodiment shown in FIG. 5A, the temperature gradient of the entire manifold 100 can be reduced. Therefore, even if the ink in the manifold 100 is stirred, the temperature before stirring and the temperature after stirring. And the temperature difference can be reduced.

  Further, as shown in FIG. 5C, in the configuration in which the inflow path 144A is provided along the third direction Z without providing the inclined flow path 46, the heated ink 502 supplied into the manifold 100 is provided. Is flowing from Z2 to Z1 on the X1 side which is the inflow path 144A side, but the flow of the ink 502 in the third direction Z is reflected in the compliance substrate and thus undulates in the third direction Z. It flows to the X2 side. Accordingly, the temperature gradient in the entire manifold 100, particularly in the first direction X, becomes large.

  As described above, by providing the inclined flow path 46 on the side of the inflow path 44 that communicates with the manifold 100, the ink heated in the manifold 100 is Z2 in the third direction Z on the liquid ejection surface 20a side. Can flow from the side to the Z1 side, and can flow from the X1 side, which is the side communicating with the inflow path 44 in the first direction X, toward the X2 side, which is the side communicating with the outflow path 45, on the Z1 side. . Therefore, the temperature gradient of the entire manifold 100, particularly the temperature gradient in the third direction Z and the first direction X can be reduced. In the ink jet recording head 1 of the present embodiment, the manifold 100 and the pressure generating chamber 12 are provided in communication with each other on the Z1 side in the third direction Z when viewed from the whole manifold 100. For this reason, if the flow of ink circulating in the manifold 100 is biased to the Z2 side, a difference occurs between the ink temperature on the Z2 side and the ink temperature on the Z1 side supplied to the pressure generating chamber 12, and the ink at the intended temperature is discharged. It cannot be discharged. Further, if a temperature gradient occurs on the Z1 side between the X1 side and the X2 side in the first direction X, the temperature of the ink supplied to each pressure generation chamber 12 varies, and the ink ejection characteristics vary. End up. That is, when there is a difference in ink temperature between the X1 side and the X2 side in the first direction X, the temperature of the ink discharged from the pressure generation chamber 12 communicating with the manifold 100 on the X1 side communicates with the X2 side. This means that there is a difference between the temperature of the ink ejected from the pressure generation chamber 12. Since the viscosity of the ink changes depending on the temperature, inks having different viscosities are ejected, resulting in variations in ejection characteristics.

  In the present embodiment, by providing the inclined flow path 46, the flow of the heated ink in the manifold 100 is inclined in the first vector direction 200, and the ink in the manifold 100 in the third direction Z is inclined. The temperature gradient in the first direction X can be reduced while reducing the temperature gradient. Therefore, it is possible to suppress variation in the temperature of the ink supplied to each pressure generating chamber 12 and to suppress variation in the ink ejection characteristics.

  Further, in this embodiment, the ink flow can be formed simply by providing the inclined flow path 46 and the temperature gradient of the ink in the manifold 100 can be reduced, so that the volume of the manifold 100 is not reduced. Accordingly, it is possible to suppress an increase in pressure loss due to a decrease in the volume of the manifold 100, and a supply failure due to a shortage of the volume of the manifold 100, or ink moving to the manifold 100 side due to driving of the piezoelectric actuator 300 occurs. The occurrence of crosstalk or the like can be suppressed.

  The first vector direction 200 that defines the inclined flow path 46 is appropriately determined depending on the size of the first direction X, the second direction Y, and the third direction Z of the manifold 100, the ink flow rate, and the like. You only have to set it.

  Further, in the present embodiment, as shown in FIG. 4, in the first direction X, the nozzle opening 21 has a liquid ejecting surface through the opening communicating with the manifold 100 of the inclined flow path 46 toward the first vector direction 200. It is provided in the area 401 on the outflow path including the area 400 projected onto 20a. That is, by providing the nozzle openings 21 in the region 401, it is possible to suppress variations in the temperature of the ink supplied to the pressure generating chambers 12 communicating with the nozzle openings 21 and to cause variations in the ink ejection characteristics. Can be suppressed. Incidentally, if the nozzle opening 21 is provided outside the area 401, a temperature difference is generated in the ink between the outside and the inside of the area 401, so that pressure generation that communicates with the nozzle opening 21 provided in the area 401 is generated. There is a temperature difference between the ink temperature supplied to the chamber 12 and the ink temperature supplied to the pressure generating chamber 12 communicating with the nozzle opening 21 provided outside the region 401. As a result, the ejection characteristics of the ink ejected from the nozzle openings 21 in the region 401 and the ink ejected from the nozzle openings 21 outside the region 401 vary.

  Of the nozzle openings 21 arranged in parallel in the first direction X, the nozzle opening 21 on the X1 side which is the end is preferably formed in the projected region 400. Accordingly, the ink jet recording head 1 can be reduced in size in the first direction X while suppressing the size in the first direction X from being increased. Incidentally, when dummy nozzles that are not used for ink ejection are formed, the dummy nozzles are preferably formed outside the region 401, that is, on the X1 side of the region 401. Also by this, it is possible to suppress the ink jet recording head from being enlarged in the first direction X and to reduce the size in the first direction X. Of course, the positions of the nozzle opening 21 and the dummy nozzle are not limited to those described above, and the nozzle opening 21 may be provided outside the projected area 400, that is, on the X1 side of the area 400. May be provided in the region 401.

  Note that, in the region 401 of the present embodiment, on the outflow channel 45 side, an opening communicating with the manifold 100 of the outflow channel inclined channel 48 is provided in the second vector direction 210 on the manifold 100 side of the outflow channel 45, as will be described in detail later. Is a region including the region up to the region 402 projected onto the liquid ejection surface 20a in the opposite direction. That is, by providing the nozzle openings 21 in the region 401 also on the outflow path 45 side, it is possible to suppress variations in the temperature of the ink supplied to the pressure generating chambers 12 communicating with the nozzle openings 21 and to prevent the ink from flowing. Variations in ejection characteristics can be suppressed. Further, the nozzle opening 21 at the end on the outflow passage 45 side, that is, the nozzle opening 21 on the X2 side among the nozzle openings 21 arranged in parallel in the first direction X is also formed in the projected region 402. Is preferred. Thereby, it is possible to suppress the ink jet recording head from being enlarged in the first direction X and to reduce the size in the first direction X. Further, in the case where a dummy nozzle is provided, it is preferable that the dummy nozzle is also formed outside the region 401, that is, on the X2 side also on the outflow path 45 side. Also by this, it is possible to suppress the ink jet recording head from being enlarged in the first direction X and to reduce the size in the first direction X.

  Further, the outflow path 45 through which ink flows out from the manifold 100 has an outflow path inclined channel 48 on the side communicating with the third manifold portion 42 of the manifold 100 as shown in FIG.

  The outflow channel inclined flow path 48 is such that at least the liquid ejection surface 20a side, that is, the surface direction of the first surface 48a on the Z1 side in the third direction Z is a direction perpendicular to the liquid ejection surface 20a. A second vector direction 210 having a third component 211 from 20a toward the outflow path 45 and a fourth component 212 in the in-plane direction of the liquid ejection surface 20a and from the inflow path 44 toward the outflow path 45; It is formed so as to be inclined. In addition, the 3rd component 211 of this embodiment is a component which is the 3rd direction Z and goes to the Z2 side from the Z1 side. The fourth component 212 is in the same direction as the second component 202 constituting the first vector direction 200 of the inclined channel 46 provided in the inflow channel 44 and is on the X1 side in the first direction X. It is a component heading from the X2 side. The outflow channel inclined channel 48 has at least the third component 211 and the fourth component 212 in the direction of the first surface 48a on the liquid ejection surface 20a side, that is, the Z1 side in the third direction Z. Are inclined so as to be the second vector direction 210 synthesized. In addition, the inclined channel 48 for the outflow channel of the present embodiment is a surface on the side opposite to the liquid ejection surface 20a, that is, the second surface 48b on the Z2 side in the third direction Z faces the second vector direction 210. It is formed so as to be inclined.

  Thus, by providing at least the first surface 48a of the inclined flow path 48 for the outflow passage so as to be in the second vector direction 210, the liquid ejection surface 20a side in the manifold 100, that is, the Z1 side is provided. Since the ink can flow out through the inclined flow path 48 for the outflow path, the temperature gradient of the entire manifold 100, in particular, the temperature gradient in the third direction Z and the temperature gradient in the first direction X can be further reduced. it can.

  In this embodiment, the second surface 48b of the outflow channel inclined channel 48 is the second surface 48b from the side opposite to the liquid ejection surface 20a in the connection portion between the outflow channel inclined channel 48 and the manifold 100. 3 is formed by an inclined channel projection 49 for the outflow channel 45 provided so as to project toward the Z1 side in the direction Z. That is, the inclined channel 48 for the outflow channel of the present embodiment is provided at the same height as the Z2 side in the third direction Z of the manifold 100, and is inclined by the inclined channel projection 49 for the outflow channel 45. As a result of the formation of the second surface 48b, the second flow surface 48b is inclined and formed even if the inclined flow path 48 for the outflow channel is the same height as the manifold 100 in the third direction Z. Yes. In this way, the outflow channel inclined channel 48 is set to the same height as the Z2 side height in the third direction Z of the manifold 100, thereby suppressing the case 40 from being enlarged in the third direction Z. Can do.

  Note that the inclined channel protrusion 49 for the outflow channel 45 is, similar to the inclined channel projection 47 for the inflow channel 44, outside the region communicating with the pressure generating chamber 12 in the first direction X, That is, it is preferably provided on the X2 side. As a result, it is possible to suppress variations in the volume of the manifold 100 communicating with the pressure generation chambers 12 and variations in the ink ejection characteristics.

  In this embodiment, the outflow channel inclined channel 48 is provided in communication with the side opposite to the liquid ejection surface 20a of the manifold 100, that is, the Z2 side in the third direction Z.

  By providing the outflow channel inclined channel 48 on the side of the outflow channel 45 communicating with the manifold 100 in this way, the ink flowing from X1 to X2 in the manifold 100 is allowed to flow toward the liquid ejection surface 20a, that is, in the third direction Z. Can flow out from the Z1 side. Therefore, the temperature gradient of the ink in the manifold 100 in the third direction Z, that is, the difference between the ink temperature on the Z1 side and the ink temperature on the Z2 side of the manifold 100 can be reduced. Further, by providing the outflow channel 45 with the outflow channel inclined channel 48 similar to the inclined channel 46 of the inflow channel 44, the ink jet recording head can have a symmetrical structure in the first direction X. Therefore, even if ink flows backward, that is, ink is supplied to the manifold 100 from the outflow path 45 and the ink in the manifold 100 flows out from the inflow path 44, the temperature gradient of the ink in the manifold 100 can be reduced. . That is, the direction of the flow path of the ink jet recording head 1 can be freely selected, and there is no restriction on the direction when the ink jet recording head 1 is assembled to an ink jet recording head unit or the like, thereby simplifying the assembly process. Can do.

  Furthermore, in the present embodiment, as shown in FIGS. 2 and 3, the manifold 100 protrudes in a direction intersecting the direction of the ink flowing in the manifold 100 on the way from the inflow path 44 to the outflow path 45. A protrusion 110 is provided. In the present embodiment, a plurality of, in the present embodiment, four protrusions 110 are provided in a single manifold 100 at regular intervals in the first direction X.

  The manifold 100 is provided with a widened portion on the side opposite to the head main body 11, that is, on the Z2 side in the third direction Z. For this reason, the protruding portion 110 of the present embodiment is provided so as to protrude from the Z2 side, which is the opposite side to the liquid ejecting surface 20a, toward the Z1 side, which is the liquid ejecting surface 20a side, so as to fill this widened portion. A first protrusion 111, a second protrusion 112 provided to protrude from the opposite side of the nozzle opening 21 toward the nozzle opening 21 in the second direction Y continuously to the first protrusion 111, It comprises. The second protrusion 112 of the manifold 100 provided on the Y1 side in the second direction Y is provided to protrude from the Y1 side that is the manifold 100 side toward the Y2 side that is the pressure generation chamber 12 side. The second protrusion 112 of the manifold 100 provided on the Y2 side in the second direction Y is provided to protrude from the Y2 side that is the manifold 100 side toward the Y1 side that is the pressure generation chamber 12 side.

  That is, the protrusion 110 is provided across a corner that is diagonal to the corner in the third direction Z and the second direction Y, which is the side communicating with the pressure generation chamber 12 of the manifold 100. It can be said that the protruding portion 110 protrudes toward the side communicating with the manifold 100 of the pressure generating chamber 12.

  In this way, by providing the plurality of protrusions 110 protruding in the direction perpendicular to the ink flow direction in the ink flow direction of the manifold 100, that is, the first direction X that is the circulation direction, the volume of the manifold 100 is reduced. Without significantly decreasing, the center of the flow of ink flowing in the manifold 100, that is, the center where the flow velocity is maximum can be moved to the side communicating with the pressure generating chamber 12. That is, by providing the protrusion 110, the ink flow formed on the Z1 side on the X1 side by the inclined flow path 46 is prevented from moving to the Z2 side as it goes to the X2 side, and the first flow is suppressed. The ink flow on the Z2 side can be maintained over the direction X. Accordingly, when the ink flowing in the manifold 100 is supplied to the pressure generation chamber 12, the temperature difference between the temperature of the ink circulating in the manifold 100 and the temperature of the ink supplied to the pressure generation chamber 12 is reduced. be able to. That is, the ink having a desired temperature circulating in the manifold 100 can be supplied to the pressure generation chamber 12 in a state in which the temperature is suppressed from decreasing, and the ink can be ejected at the desired temperature. It is possible to suppress a decrease in ink discharge characteristics.

  That is, as shown in FIG. 6A, when the protrusion 110 is not provided in the manifold 100, it becomes the center C1 of the flow of ink flowing through the manifold 100, whereas the protrusion in the manifold 100 of this embodiment. When 110 is provided, as shown in FIG. 6B, the center C <b> 2 of the ink flow that flows through the manifold 100 moves to the side communicating with the pressure generation chamber 12 rather than the center C <b> 1 where the protrusion 110 is not provided. 6A is a cross-sectional view of the main part of the comparative example, and FIG. 6B is a cross-sectional view of the main part of the recording head of the present embodiment.

  Therefore, by providing the protrusion 110 in the manifold 100, the center C2 of the ink flow flowing in the manifold 100 can be on the side communicating with the pressure generating chamber 12, and the ink supplied to the pressure generating chamber 12 is supplied. Thus, the temperature gradient in the third direction Z of the ink in the manifold 100 can be reduced, and the temperature gradient in the second direction Y can be reduced.

  Further, since the protrusion 110 does not significantly reduce the volume of the manifold 100, an increase in pressure loss can be suppressed, and supply failure due to insufficient volume of the manifold 100 or driving of the piezoelectric actuator 300 causes the manifold 100 side. It is possible to suppress the occurrence of crosstalk caused by the movement of ink.

  Furthermore, by providing a plurality of protrusions 110 at a predetermined interval from the inflow path to the outflow path, the rigidity of the case 40 in which a long space is defined as in the manifold 100 is improved, and the deformation is difficult to deform. Can do.

  In addition, although the protrusion part 110 of this embodiment has the 1st protrusion part 111 and the 2nd protrusion part 112, the shape of a protrusion part is not specifically limited to this, The protrusion part 110 has the 1st protrusion part 111 and the 1st protrusion part. You may be comprised only in either one of the 2 protrusion parts 112. FIG. Further, the protrusion 110 is not limited to the one having the first protrusion 111 and the second protrusion 112. Here, other examples of the protrusions are shown in FIGS. 7 and 8 are cross-sectional views of the ink jet recording head showing modifications of the protrusions.

  As shown in FIG. 7, the protrusion 110 </ b> A is provided to protrude in the third direction Z from the Z <b> 2 side toward the Z <b> 1 side. In addition, the protrusion 110 </ b> A is disposed so as to define a predetermined space between the wall of the manifold 100 in the second direction Y.

  As shown in FIG. 8, the protrusion 110 </ b> B includes a second protrusion 112 that protrudes from the wall surface in the second direction Y of the manifold 100 toward the nozzle opening 21.

  Even in the protrusions 110A and 110B shown in FIGS. 7 and 8, the center of the flow of the ink flowing in the manifold 100 is moved to the side communicating with the pressure generation chamber 12, so that the protrusions described above are used. The same effect as 110 can be achieved.

(Embodiment 2)
FIG. 9 is a cross-sectional view of an ink jet recording head that is an example of a liquid jet head according to Embodiment 2 of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to Embodiment 1 mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 9, an inclined channel 46A is provided on the manifold side of the inflow channel.

  The inclined flow path 46A is formed so that the surface direction of the inner surface on the Z1 side, which is the liquid ejection surface 20a side, becomes the first vector direction 200.

  The inclined channel 46A is formed such that the surface direction of the inner surface on the Z2 side, which is the opposite side to the liquid ejection surface 20a, is the first vector direction 200 by the inclined channel projection 47.

  Such an inclined channel 46A is provided in communication with the manifold 100 on the Z1 side, which is the liquid ejection surface 20a side. That is, the inner surface on the Z1 side of the inclined channel 46A is continuously provided on the wall surface on the Z1 side of the manifold 100 or the compliance substrate 91 side.

  Thereby, the flow of ink that has flowed into the manifold 100 from the inclined flow path 46A is prevented from staying at the end of the manifold 100 on the X1 side in the Z1 direction, so that the bubble discharge property and the like can be improved.

  In the present embodiment, similarly to the above-described first embodiment, the outflow path is similar to the inclined channel 46A of the present embodiment so that the ink jet recording head 1 has a symmetrical structure in the first direction X. An inclined outlet channel 48B is provided. For this reason, even if the ink is caused to flow in the reverse direction, the temperature gradient of the ink in the manifold 100 can be reduced.

(Embodiment 3)
FIG. 10 is a cross-sectional view of an ink jet recording head which is an example of a liquid ejecting head according to Embodiment 3 of the invention. In addition, the same code | symbol is attached | subjected to the member similar to Embodiment 1 mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 10, an inclined channel 46B is provided on the manifold side of the inflow channel.

  The inclined flow path 46B is formed such that the surface direction of the inner surface on the Z1 side, which is the liquid ejection surface 20a side, becomes the first vector direction 200.

  In addition, the inclined flow path 46B is formed such that the surface direction of the inner surface on the Z2 side that is the opposite side to the liquid ejection surface 20a is the first vector direction 200.

  Such an inclined flow path 46B is formed to extend outward from the Z2 side of the manifold 100 in the third direction Z. That is, in this embodiment, the inclined flow path 46B is formed without providing the inclined flow path projection 47. Even with such a configuration, the temperature gradient of the ink in the manifold 100 can be reduced as in the first embodiment.

  In the present embodiment, similarly to the first embodiment described above, the outflow path 45 is also similar to the inclined flow path 46B of the present embodiment so that the ink jet recording head 1 has a symmetrical structure in the first direction X. An outflow channel inclined channel 48B having the above-described configuration is provided. For this reason, even if the ink is caused to flow in the reverse direction, the temperature gradient of the ink in the manifold 100 can be reduced.

(Other embodiments)
As mentioned above, although one Embodiment of this invention was described, the basic composition of this invention is not limited to what was mentioned above.

  For example, in the first to third embodiments described above, the first surfaces 46a and 48a and the second surfaces 46b and 48b forming the inclined channels 46 to 46B and the outlet channels 48 to 48B are the first surfaces 46a and 48b. Although it is a flat surface having a surface direction toward the vector direction 200 or the second vector direction 210, the present invention is not particularly limited thereto. For example, the inclined channels 46 to 46B and the inclined channels 48 to 48B for the outflow channel are used. The first surfaces 46a and 48a and the second surfaces 46b and 48b forming the shape may be formed in a step shape or may be formed in a curved surface shape. When the first surfaces 46a and 48a and the second surfaces 46b and 48b are formed in a step shape, the ink inside the inclined channels 46 to 46B and the inclined channels 48 to 48B for the outflow channels is used. It is only necessary that the flow be in the first vector direction 200 or the second vector direction 210. Further, when the first surfaces 46 a and 48 a and the second surfaces 46 b and 48 b are formed in a curved shape, the inclined channels 46 to 46 B and the outlet channels 48 to 48 B are opened to the manifold 100. The tangential direction in the portion to be used only needs to be the first vector direction 200 or the second vector direction 210.

  In Embodiments 1 to 3 described above, the outflow channel 45 is also provided with the outflow channel inclined channels 48 to 48B. However, the present invention is not limited to this, and the outflow channel 45 includes the outflow channel inclined channel. Even if 48 to 48B is not provided, if the inclined flow paths 46 to 46B are provided in the inflow path 44, the temperature gradient of the ink in the manifold 100 can be reduced.

  Furthermore, it is also possible to combine the inclined flow paths 46 to 46B of the inflow path 44 of Embodiments 1 to 3 described above and the inclined flow paths 48 to 48B for the outflow path of the outflow path 45.

  In the first to third embodiments described above, the configuration of the ink jet recording head 1 having the communication plate 15 and the configuration in which the compliance substrate 91 is disposed on the Z1 side surface of the communication plate 15 are exemplified. The presence or absence is not particularly limited to this, and the position of the compliance substrate 91 is not particularly limited to this. For example, the compliance substrate 91 may be provided on the wall surface side in the second direction Y with respect to the manifold 100, or may be provided on the Z2 side in the third direction Z.

  In each of the above-described embodiments, the piezoelectric actuator 300 is described as the pressure generating means for causing the pressure change in the pressure generating chamber 12, but the piezoelectric actuator 300 is formed by, for example, film formation and lithography. It may be a thin film type or a thick film type formed by a method such as attaching a green sheet. In addition, a longitudinal vibration type piezoelectric actuator in which an electric material and an electrode forming material are alternately stacked to expand and contract in the axial direction can also be used. Furthermore, as a pressure generating means, a heat generating element is arranged in the pressure generating chamber, and a liquid droplet is discharged from the nozzle opening by a bubble generated by heat generation of the heat generating element, or static electricity is generated between the diaphragm and the electrode. Thus, a so-called electrostatic actuator that discharges liquid droplets from the nozzle openings by deforming the diaphragm by electrostatic force can be used.

  The ink jet recording head 1 described above constitutes a part of the ink jet recording head unit and is mounted on the ink jet recording apparatus. FIG. 11 is a schematic view showing an example of the ink jet recording apparatus.

  The ink jet recording apparatus I according to the present embodiment fixes the ink jet recording head 1 to the apparatus main body and conveys an ejection target medium such as recording paper in a direction orthogonal to the direction in which the nozzle openings 21 are arranged side by side. This is a so-called line type ink jet recording apparatus that performs printing on an ejection medium.

  Specifically, as shown in FIG. 11, an ink jet recording apparatus I supplies an ink jet recording head unit 2 including an ink jet recording head 1, an apparatus main body 3, and a recording sheet S that is a recording medium. A paper roller 4 and liquid storage means 5 are provided.

  The ink jet recording head unit 2 (hereinafter also referred to as the head unit 2) includes a plurality of ink jet recording heads 1 and a plate-like base plate 6 that holds the plurality of ink jet recording heads 1. The head unit 2 is fixed to the apparatus main body 3 via a frame member 7 attached to the base plate 6.

  The apparatus body 3 is provided with a roller 4. The roller 4 conveys a recording sheet S such as paper that is an ejection medium fed to the apparatus main body 3, and passes the recording sheet S so as to face the liquid ejection surface 20 a of the ink jet recording head 1.

  Each ink jet recording head 1 is connected to a liquid storage means 5 that is fixed to the apparatus main body 3 and stores ink via a supply tube 8 such as a flexible tube and a recovery tube 9. Ink from the liquid storage means 5 is supplied to the inflow passages of the respective ink jet recording heads 1 through the supply pipes 8, and ink that has not been ejected by the ink jet recording heads 1 is liquidated from the outflow passages through the recovery pipes 9. It is collected in the storage means 5. A pump 9a is provided in the middle of the recovery pipe 9, and the ink from the liquid storage means 5 passes through the inflow path, the manifold 100 and the outflow path in the ink jet recording head 1 by the pressure of the pump 9a. Cycle through. Further, although not particularly illustrated, the liquid storage means 5 is provided with a heating means such as a heater for heating the stored ink. Of course, the heating means may be provided in the supply pipe 8 or the ink jet recording head 1.

  In such an ink jet recording apparatus I, the recording sheet S is transported in the transport direction by the roller 4, and ink is ejected by the ink jet recording head 1 of the head unit 2 to print an image or the like on the recording sheet S. .

  In the above example, only one head unit 2 including a plurality of ink jet recording heads 1 is provided in the ink jet recording apparatus I. However, two head units 2 mounted on the ink jet recording apparatus I are provided. You may provide above. Further, the ink jet recording head 1 may be directly mounted on the ink jet recording apparatus I. Further, the liquid storage means 5 may not be mounted on the ink jet recording apparatus, and the heating means provided in the liquid storage means 5 or the like may not be mounted on the ink jet recording apparatus. That is, the ink jet recording head 1 according to the present invention is not particularly limited with respect to the presence or absence of the heating means as long as the heated ink is supplied.

  In the above-described example, the so-called line-type ink jet recording apparatus I that performs printing only by transporting the recording sheet S while the ink jet recording head 1 is fixed is illustrated, but the present invention is not particularly limited thereto. Absent. For example, a so-called serial type ink jet in which the ink jet recording head 1 is mounted on a carriage that moves in the main scanning direction intersecting the conveyance direction of the recording sheet S, and printing is performed while the ink jet recording head 1 is moved in the main scanning direction. The present invention can also be applied to a type recording apparatus.

  Further, in the present embodiment, the ink jet type recording apparatus I in which the liquid storage means 5 is fixed to the apparatus main body 3 is illustrated, but the present invention is not particularly limited thereto. For example, the liquid storage means such as an ink cartridge The present invention can also be applied to an ink jet recording apparatus of a type that is fixed to the ink jet recording head 1, the ink jet recording head unit 2, or a carriage.

  Furthermore, in this embodiment, the ink jet recording apparatus has been described as an example of the liquid ejecting apparatus. However, the present invention is intended for all liquid ejecting apparatuses having a liquid ejecting head widely, and liquid other than ink is used. Of course, the present invention can also be applied to a liquid ejecting apparatus including a liquid ejecting head for ejecting. Other liquid ejecting heads include, for example, various recording heads used in image recording apparatuses such as printers, color material ejecting heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejection head used for electrode formation, a bioorganic matter ejection head used for biochip production, and the like.

  I ink jet recording apparatus (liquid ejecting apparatus), 1 ink jet recording head (liquid ejecting head), 12 pressure generating chamber, 20 nozzle plate, 20a liquid ejecting surface, 21 nozzle opening, 40 case, 44 inflow path, 45 outflow path 46, 46A, 46B Inclined channel, 47 Inclined channel protrusion, 48 Outflow channel inclined channel, 49 Outlet channel inclined channel projection, 100 Manifold, 110 Projection, 120 Drive circuit, 121 Wiring board, 200 first vector direction, 201 first component, 202 second component, 210 second vector direction, 211 third component, 212 fourth component, 300 piezoelectric actuator (pressure generating means), 400 area where the inclined channel is projected, 401 area, 402 outflow channel inclination Area where the oblique channel is projected

Claims (14)

A liquid ejection surface provided with a nozzle opening for ejecting liquid;
A pressure generating chamber arranged in parallel in the in-plane direction of the liquid ejection surface and communicating with the nozzle opening;
Pressure generating means for causing a pressure change in the pressure generating chamber;
A manifold communicating with the plurality of pressure generating chambers;
An inflow passage for supplying the heated liquid to the manifold;
An outflow passage for allowing liquid to flow out of the manifold,
The inflow channel has an inclined channel on the side communicating with the manifold,
The inclined flow path includes a first component in which at least a surface direction of the inner surface on the liquid ejecting surface side is a direction orthogonal to the liquid ejecting surface and from the inflow path toward the liquid ejecting surface; A first vector direction having an in-plane direction and a second component from the inflow path toward the outflow path ,
The liquid ejecting head, wherein the inclined flow path is formed such that an inner surface of the inflow path opposite to the liquid ejecting surface is in the first vector direction . A liquid ejection surface provided with a nozzle opening for ejecting liquid;
A pressure generating chamber arranged in parallel in the in-plane direction of the liquid ejection surface and communicating with the nozzle opening;
Pressure generating means for causing a pressure change in the pressure generating chamber;
A manifold communicating with the plurality of pressure generating chambers;
An inflow passage for supplying the heated liquid to the manifold;
An outflow passage for allowing liquid to flow out of the manifold,
The inflow channel has an inclined channel on the side communicating with the manifold,
The inclined flow path includes a first component in which at least a surface direction of the inner surface on the liquid ejecting surface side is a direction orthogonal to the liquid ejecting surface and from the inflow path toward the liquid ejecting surface; A first vector direction having an in-plane direction and a second component from the inflow path toward the outflow path,
The inclined passage, wherein in a direction perpendicular to the liquid ejecting surface, liquids jet head you characterized in that provided in communication with the liquid ejecting surface side of the manifold.   A liquid ejection surface provided with a nozzle opening for ejecting liquid;
  A pressure generating chamber arranged in parallel in the in-plane direction of the liquid ejection surface and communicating with the nozzle opening;
  Pressure generating means for causing a pressure change in the pressure generating chamber;
  A manifold communicating with the plurality of pressure generating chambers;
  An inflow passage for supplying the heated liquid to the manifold;
  An outflow passage for allowing liquid to flow out of the manifold,
  The inflow channel has an inclined channel on the side communicating with the manifold,
  The inclined flow path includes a first component in which at least a surface direction of the inner surface on the liquid ejecting surface side is a direction orthogonal to the liquid ejecting surface and from the inflow path toward the liquid ejecting surface; A first vector direction having an in-plane direction and a second component from the inflow path toward the outflow path,
  The nozzle opening includes, in the juxtaposed direction of the pressure generating chambers, an area in which the opening communicating with the manifold of the inclined channel is projected onto the liquid ejection surface toward the first vector direction. A liquid ejecting head provided in a region. The inclined passage, in the direction perpendicular to the liquid ejecting surface, according to claim 1 or 3 liquid jet head according to being provided to communicate with the liquid ejecting surface side of the manifold. The nozzle opening includes, in the juxtaposed direction of the pressure generating chambers, an area in which the opening communicating with the manifold of the inclined channel is projected onto the liquid ejection surface toward the first vector direction. claim 1 Symbol mounting the liquid ejecting head, characterized in that provided in the region. 6. The liquid jet head according to claim 3 , wherein the nozzle opening provided at an end portion of the nozzle opening in the juxtaposition direction of the pressure generating chambers is provided in the projected region. Dummy nozzles not used for discharging liquid, in the arrangement direction of the pressure generating chamber, according to claim 3, 5 or 6, wherein a is provided on the inclined flow path side than the projected regions Liquid jet head. The outflow path has an outflow path inclined channel on the side communicating with the manifold,
The inclined flow path for the outflow path includes at least a third component in which the surface direction of the inner surface on the liquid ejection surface side is a direction perpendicular to the liquid ejection surface and heading from the liquid ejection surface toward the outflow path, and the liquid claim 1-7 in which the fourth component directed to the outlet channel from the inlet passage a plane direction of the ejection face, the second feature which is formed such that the vector direction having to The liquid jet head according to one item. In the direction orthogonal to the liquid ejection surface, the inclined channel of the inflow passage extends in a direction away from the liquid ejection surface from an end portion of the manifold opposite to the liquid ejection surface. liquid jet head according to any one of claims 1-8, characterized in that. The inclined flow path of the inflow channel is formed across the region where the inclined flow path and the manifold communicate with each other on the side opposite to the liquid ejecting surface of the manifold, and faces the liquid ejecting surface side. liquid jet head according to any one of claim 1 to 9, characterized in that it is formed by the inclined flow path protrusion that protrudes Te. The protrusion is provided in the manifold so as to protrude between the inflow path and the outflow path in a direction intersecting a flow direction of the liquid flowing in the manifold. liquid jet head according to any one of 10. The liquid ejecting head according to claim 11 , wherein the protrusion is provided so as to protrude toward a portion communicating with the manifold of the pressure generating chamber. The protrusions to a liquid ejecting head according to claim 11 or 12, wherein the provided plurality between from the inflow channel to the outlet channel. A liquid ejecting apparatus comprising the liquid ejecting head according to any one of claims 1 to 13.

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