JP6512707B2 - Substrate loading cassette - Google Patents

Description

The present invention
The present invention relates to a substrate loading cassette provided with a substrate support rod which does not change the position of a placed substrate even when used at high temperature.

  Conventionally, for example, Patent Document 1 and Patent Document 2 are known as a substrate loading cassette used when processing a glass substrate at a normal temperature. The "wire cassette for substrate" of Patent Document 1 can cope with a large glass substrate, suppresses the wear of the covering member for covering the glass substrate and the wire, and has a high storage efficiency and a reduced equipment cost. An object of the present invention is to provide a substrate cassette for loading and unloading a plurality of substrates by loading and unloading the substrates from the front side, and arranging a plurality of wires horizontally for mounting the substrates horizontally. The present invention is characterized in that a plurality of steps of the wire row are provided, and a covering member is provided at intervals with respect to the entire length of the wire. In Patent Document 1, a substrate is loaded horizontally, and a large number of substrates can be loaded in the vertical direction. The substrate wire cassette has a plurality of wire rows in which a plurality of wires for loading the substrates are stretched. Then, in order to prevent the substrate from being damaged, a covering member such as a synthetic resin is provided on the surface of the wire.

  The "substrate cassette" of Patent Document 2 enables simplification of the fixing structure of the wire, prevents degradation of the wire at the time of cleaning the substrate cassette, and can further improve the storage efficiency of the substrate. It is an object of the present invention to provide a cassette for a substrate having various mechanisms, and in fixing the first and second frames of the wire member, an engagement terminal is provided at one end of the wire member and the other end is clamped by a nut Possible thread terminals are provided. In Patent Document 2, for example, one end of the wire is engaged with one frame on which the wire is suspended, and the other end is tightened with a nut from the other frame side so that the wire does not bend. , Always tension the wire.

JP, 2010-215287, A JP 2005-222972 A

  In the structure in which only the wire is stretched as in Patent Document 1, heat expansion occurs in the wire when the temperature is high, and the height and horizontal position of the loaded substrate are when and when it is put in the furnace for heat treatment. It changes with time, and there is a problem that the robot can not be accessed well, or the upper and lower gaps between the substrates are separated, resulting in variations in temperature rise. In addition, there is a problem that the synthetic resin film melts at high temperature and adheres to the substrate.

  Also, as in Patent Document 2, when the wire is always tensioned, the tensioned height position is maintained even when the wire is extended, but for this purpose, it is necessary to apply very strong tension. There is. When this cassette is placed in a high-temperature furnace, the frame itself of the cassette is softened by heat, so if the tension is too strong, the frame is deformed by the tension, and as in the case of Patent Document 1, the robot There is a risk that problems will occur if the substrate is transferred. In addition, in order to give the frame a sufficient strength so as not to thermally deform the frame, there is a problem that the cassette itself becomes large and heavy.

In the horizontal direction, the thermal expansion coefficients of the glass substrate and the wire are significantly different (thermal expansion coefficient of glass: approx. 9 × 10 ^-6 / ° C, thermal expansion coefficient of wire [in the case of stainless steel]: approx. 17-18 × 10 ^-6 / ° C), so even if the wire is stretched horizontally, the problem is that the glass substrate placed on the wire is dragged by the wire and moved as the temperature rises. there were.

  The present invention has been made in view of the above-mentioned conventional problems, and provides a substrate loading cassette provided with a substrate support rod of a substrate which does not change the position of the loaded substrate even when used at high temperature. With the goal.

  A substrate loading cassette according to the present invention is a substrate loading cassette for loading a substrate to be heat-treated, which is spanned between a cassette main body having two supporting members facing each other at intervals and the two supporting members. And a plurality of supporting rods for supporting the ceramic, the supporting rods each having a hollow portion penetrating in the longitudinal direction, a wire member penetrating the hollow portion, and both ends of the wire member. An urging member provided between the outer circumferential rod member and the detachment preventing member, provided between the outer circumferential rod member and the detachment preventing member, each provided for preventing the detachment of the wire member from the outer circumferential rod member And a member.

  The outer circumferential rod member is characterized by comprising a plurality of short outer circumferential rod members shorter than a distance between the two support members.

  The support rod is characterized by including an engaging portion that engages with one of the two support members.

  In the substrate loading cassette according to the present invention, the substrate support rod is provided so that the position of the mounted substrate does not change even when used at high temperature, and the substrate can be supported properly.

It is a perspective view showing a suitable embodiment of a substrate loading cassette concerning the present invention. It is explanatory drawing explaining the structure of the board | substrate loading cassette shown in FIG. It is explanatory drawing explaining the support rod applied to the substrate loading cassette of FIG. It is a side view which shows the 1st modification of a support rod. It is a sectional side view which shows the 2nd modification of a support rod. It is a sectional side view which shows the 3rd modification of a support rod.

  Hereinafter, preferred embodiments of a substrate loading cassette according to the present invention will be described in detail with reference to the attached drawings. FIG. 1 is a perspective view showing a state in which a glass substrate is mounted on a substrate loading cassette according to the present embodiment. FIG. 2 is an explanatory view showing the configuration of the substrate loading cassette shown in FIG.

  For example, as shown in FIG. 1, the substrate loading cassette 1 according to the present embodiment is disposed in a heating furnace (not shown) in a state in which a plurality of glass substrates 2 are placed, and heats the glass substrates 2 Used in

  As shown in FIGS. 1 and 2, the substrate loading cassette 1 connects the upper and lower rectangular frames 3 a and 3 b framed in a rectangular shape and the upper and lower rectangular frames 3 a and 3 b at each corner up and down 4. Cassette frame 3 composed of two vertical frames 3c, and a pair of two vertical frames 3c spaced apart from each other in the direction along the long side of the rectangle formed by the upper and lower rectangular frames 3a and 3b The glass substrate 2 is supported by being bridged over between the supporting members 4 which are spaced apart from each other along the short sides of the plurality of supporting members 4 passed and the upper and lower rectangular frames 3a and 3b. A plurality of support rods 5 are provided.

  In the following description, the vertical direction in the use state of the substrate loading cassette 1 is the vertical direction, the direction along the long side of the rectangle formed by the upper and lower rectangular frames 3a and 3b is the longitudinal direction, and the direction along the short side is the short It will be the direction. Even if each part of the substrate loading cassette 1 or each member constituting the substrate loading cassette 1 is in a single state, in the use state of the substrate loading cassette 1, the vertical direction, the longitudinal direction, and the short The directions to be the hand direction will be described by specifying each of the above directions.

  Between two pairs of vertical frames 3c spaced apart from each other in the short direction, a plurality of upper surfaces 4a are horizontally spaced from each other in the vertical direction with each vertical frame 3c forming a pair. The support member 4 is provided.

  The support member 4 is formed of a substantially strip-shaped plate material, and the width direction of the strip is arranged along the upper and lower sides, the end portion thereof is fixed to the vertical frame 3c, and the thickness direction is along the short direction. It is arranged as. That is, the plate-like support members 4 provided at intervals in the lateral direction are arranged to face each other. Further, the support members 4 facing each other are formed such that the upper surfaces 4a are positioned at the same height.

  On the upper surface 4 a of each support member 4, control recesses 4 b and 4 c having a semicircular cross section for supporting the support rod 5 and restricting the movement of the support rod 5 in the longitudinal direction are provided at appropriate intervals in the longitudinal direction. Multiple are formed. Each of the support rods 5 is arranged along the short direction when the support rod 5 is stretched between the support members 4 opposed in the short direction.

  FIG. 3 is an explanatory view for explaining the support rod of the present embodiment. FIG. 3A is a side view of the support rod, and FIG. 3B is an enlarged view of an essential part showing another form of the support rod. The support rod 5 is a ceramic round bar material, and as shown in FIG. 3, it is positioned slightly on the center side from one end and has an outer diameter smaller than that of the other portion as an engaging portion. A restriction groove 5a recessed in a rectangular shape is formed. The width of the restricting groove 5a is formed to be slightly wider than the thickness of the support member 4, and is engaged with one of the support members 4 when the support rod 5 is stretched between the support members 4 opposed in the short direction. In addition, the movement of the support rod 5 in the lateral direction is restricted. That is, in the support rod 5, the outer diameter is different between a portion provided with the restriction groove 5 a and placed on one of the support members 4 and a portion placed on the other support member 4. For this reason, when the glass substrate 2 is placed on the support rod 5, the restriction recesses 4b and 4c provided on the two support members 4 on which the support rod 5 is bridged so that the glass substrate 2 is horizontally disposed. The depth of the restriction recess 4b on the side where the restriction groove 5a is engaged is shallower. In order to attach to the cassette 1, it is only necessary to align the restricting groove 5a at one end of the support rod 5 with the restricting recess 4a and align the other end with the restricting recess 4c and place from above.

  According to the substrate lamination cassette 1 of the present embodiment, since the plurality of support rods 5 which are bridged between the two support members 4 and support the glass substrate 2 are made of ceramic having high heat resistance, they are made of, for example, metal wires. In this case, thermal expansion and deformation can be suppressed more than in the case where it does not bend even without applying tension.

  When the glass substrate 2 is supported by a wire, the wire may be coated with a synthetic resin or the like in order to prevent the glass substrate 2 from being damaged by the unevenness of the surface of the wire. A wire coated with such a synthetic resin can not be used at high temperatures because the coating melts due to heat, but the ceramic support rod 5 as described above has the synthetic resin melted. Even in the case of heat treatment at a high temperature, which can be used, it can be used, and since the surface condition is also very small compared to the wire, there is no risk of being damaged when supporting the glass substrate 2.

  Further, since the support rod 5 is provided with the restriction groove 5 a engaged with one of the two support members 4, the support rod 5 can be prevented from falling off from the two support members 4. At this time, only one of the support members 4 is engaged to restrict the movement of the support rod 5, so even if the support rod 5 expands and contracts due to a temperature change, the support rod 5 does not move with the other support member 4. It can be extended freely as it is not restricted. For this reason, the load by extension can be prevented from acting on the support rod 5.

  Further, in the above embodiment, an example was described in which the engaging portion with the support member 4 was a rectangular restricting groove 5a slightly wider than the width of the support member 4 and smaller than the outer diameter of the other outer peripheral portion. Not limited to this, as long as it can be engaged with the support member 4 to restrict the movement of the support rod 5 in the lateral direction, for example, as shown in FIG. I don't care. Further, the control recesses 4b and 4c may not be semicircular in cross section, but may be rectangular, or the control groove 5a may be recessed in a quadrangle, or the support rod 5 may not be a round bar but a triangular bar or more. The shape may be any shape.

  FIG. 4 is a side view showing a first modified example of the support rod. In the said embodiment, although the example in which the support rod 5 was equipped with the control groove 5a was demonstrated, as shown in FIG. 4, the control groove 5a may not necessarily be provided. With such a configuration, processing on the support rod 5 is unnecessary, and it can be manufactured at a very low cost.

  Although the said embodiment demonstrated the example which formed the support rod 5 with the single raw material of the ceramic, it does not restrict to this.

  FIG. 5 is a side sectional view showing a second modified example of the support rod. The support rod 6 of the second modification includes, for example, a cylindrical ceramic outer peripheral rod member 7 having a hollow portion 6a penetrating in the longitudinal direction of the rod, a wire 8 penetrating the hollow portion 6a, and a wire 8 A nut 9 is provided at each end to prevent the wire 8 from coming off from the outer peripheral rod member 7, and is interposed between the outer peripheral rod member 7 and the nut 9 to apply an axial force to the wire 8. And a disc spring 10 as a biasing member.

  The wire 8 is formed longer than the outer peripheral rod member 7, and a screw 8a is formed at both ends. Nuts 9 are screwed into both ends of the wire 8 which has penetrated the outer peripheral rod member 7 respectively. Between the nut 9 and the outer peripheral rod member 7, one washer 11 through which the wire 8 penetrates is interposed on one end side and two washers on the other end side. A plurality of disc springs 10 are provided to penetrate the wire 8 between the two washers 11 interposed on the other end side.

  Therefore, by tightening the nuts 9 screwed to both ends of the wire 8, an axial force is applied to the wire 8 to be more strongly tensioned, and the outer peripheral rod member 7 is compressed in the longitudinal direction Strength can be further enhanced. Here, although the example which used the disc spring 10 as an urging member was demonstrated, you may use not only this but a coil spring, a spring washer, etc. As shown in FIG. Further, at this time, by making nuts 9 screwed to both ends of the wire 8 into flanged nuts, the washers 11 disposed on the nut 9 side can be removed.

  FIG. 6 is a side sectional view showing a third modification of the support rod 5. The support rod 12 of the third modification uses a plurality of short outer periphery rod members 7a shorter than the distance between the two support members 4 on which the support rods 12 are bridged as the outer periphery rod members 7, and a plurality of short outer periphery rod members 7a. It differs from the support rod 6 of the second modification in that the wire 8 is inserted and the support rod 12 is configured. In the case of the third modification, since the plurality of short outer periphery rod members 7a used are short in length, each short outer periphery rod member 7a has high resistance to an impact acting in a shear direction and a compression force. This makes it possible to provide the support rod 12 which is less likely to be damaged.

  Moreover, compared with the long rod member 7, since the length is short, it is hard to break and handling becomes easy. Also, even when damaged, it is economical because it is not necessary to replace the whole one, and only the damaged part needs to be replaced. In addition, since the rod member 7 can be attached to the cassette frame 3 simply by placing it, assembly and maintenance become much easier as compared with the conventional case where the tension of the wire is adjusted in balance so that the frame is not deformed.

In addition, since the support rod 5 is made of ceramic, the thermal expansion coefficient is close to that of glass (thermal expansion coefficient of ceramic [in the case of Al ₂ O ₃ ]: about 8 to 9 × 10 ^-6 / ° C). Even if the support rod 5 is extended as the temperature rises, the glass substrate 2 placed thereon is hardly dragged and moved.

Reference Signs List 1 substrate loading cassette 2 glass substrate 3 cassette frame 3a rectangular frame 3b lower rectangular frame 3c vertical frame 4 support member 4a upper surface 4b, 4c control recess 5 support rod 5a control groove 6 support rod 6a hollow portion 7 outer peripheral rod member 7a Short outer periphery rod member 8 wire 8a screw 9 nut 10 disc spring 11 washer 12 support rod

Claims (3)

A cassette loading cassette for loading a substrate to be heat-treated, the cassette main body having two support members facing each other at a distance, and a plurality of support rods which are bridged between the two support members to support the substrates. Equipped
The support rods are respectively provided on a ceramic outer peripheral rod member having a hollow portion penetrating in the longitudinal direction, a wire member passing through the hollow portion, and both end portions of the wire member, and the outer peripheral rod of the wire member A substrate loading device comprising: a detachment preventing member for preventing detachment from the member; and a biasing member interposed between the outer peripheral rod member and the detachment preventing member and applying an axial force to the wire member. cassette. The substrate loading cassette according to claim 1, wherein the outer peripheral rod member is constituted by a plurality of short outer peripheral rod members shorter than a distance between the two support members. The substrate loading cassette according to claim 1 , wherein the support rod includes an engagement portion that engages with one of the two support members.

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