JP6854514B2 - Line sensor angle adjustment device, defect inspection device, line sensor angle adjustment method - Google Patents

Description

The present invention relates to a line sensor angle adjusting device, a defect inspection device, and a line sensor angle adjusting method for inspecting a transparent defect existing in an inspection target such as a film, and adds a camera angle adjusting function by remote control. It was done.
In particular, the present invention relates to a function that enables adjustment in an optical system that requires high adjustment accuracy for the angle of the camera.

Conventionally, a continuous sheet-shaped inspection is irradiated with light from a lighting device, the reflected light or transmitted light is imaged by a receiver, and the image signal is processed by an appropriate image processing device to extract defect information. Defect inspection of the inspection object is performed using the device. In such a defect inspection device, a line sensor in which a plurality of CCD cameras are arranged in the same direction is used.
As a method of adjusting the angle of the mounting position of the line sensor with respect to the measurement target, there is an inspection device of Patent Document 1. In this inspection device, the line sensor can adjust the tilt angle and the rotation angle with a micrometer. Then, this adjustment can be made based on the positions of a plurality of reference point images in the captured image.

Japanese Unexamined Patent Publication No. 2001-208514

However, in Patent Document 1 described above, in order to obtain the deviation of the mounting position of the line sensor, it is necessary to provide a jig in which the image of the reference point is etched and printed on the glass substrate. It takes time and effort to prepare such a jig, and it is necessary to secure a space for providing a reference image.

The present invention has been made in view of such circumstances, and an object of the present invention is a line sensor angle adjusting device capable of adjusting the mounting position of a line sensor without providing a jig on which a reference image is printed. The purpose of the present invention is to provide a defect inspection device and a method for adjusting the angle of a line sensor.

In order to solve the above-mentioned problems, the present invention includes a first adjusting unit that adjusts a rotation angle, which is an angle of rotation about a first axis parallel to the element surface of the line sensor in the normal direction, and a line. Of the second adjustment unit that adjusts the tilt angle, which is the angle of rotation around the second axis, which is the scanning direction of the sensor, and the first adjustment unit and the second adjustment unit in response to an external adjustment instruction. It is an angle adjusting device for a line sensor having an adjustment control unit for adjusting by driving at least one of the adjusting units, and the angle adjusting device for the line sensor is an element range on one end side of the line sensor. The value based on the average value of the output values in the above and the value based on the average value of the output values in the element range on the other end side of the line sensor are displayed on the screen, and the adjustment control unit performs the adjustment control unit on one end side of the line sensor. The first adjusting unit adjusts the difference between the value based on the average value and the value based on the average value on the other end side of the line sensor within a predetermined range .

Further, the present invention is a defect inspection device that inspects an object to be inspected while being conveyed in the transport direction, and is a defect inspection device having the above-mentioned angle adjusting device for a line sensor.

Further, in the present invention, the angle adjusting device of the line sensor sets the average value of the output values in the element range on one end side of the line sensor and the average value of the output values in the element range on the other end side of the line sensor. The value based on the value is displayed on the screen, and the rotation angle of the rotation angle, which is the angle at which the first adjustment unit of the angle adjustment device of the line sensor rotates about the first axis parallel to the element surface of the line sensor in the normal direction. After making adjustments, the second adjusting unit of the angle adjusting device of the line sensor adjusts the tilt angle, which is the angle of rotation about the second axis, which is the scanning direction of the line sensor, and adjusts the angle of the line sensor. The first adjustment control unit of the device sets the difference between the value based on the average value on one end side of the line sensor and the value based on the average value on the other end side of the line sensor within a predetermined range. Adjustment is performed by driving the adjustment unit.

As described above, according to the present invention, the tilt angle and the rotation angle can be easily adjusted regardless of the installation status of the defect inspection device and without using a special jig.

It is a figure which shows the arrangement example (flow direction) of the inspection apparatus of this invention. It is a figure which shows the arrangement example (width direction) of the inspection apparatus of this invention. It is a block diagram which shows the apparatus configuration example of this invention. It is a figure for demonstrating the camera output waveform of the optical system of this invention. It is a figure for demonstrating an example of the control fracture surface of this invention. It is a figure which shows the relationship between the angle deviation and the edge amount which is an Example of this invention. It is a flowchart for demonstrating the process of adjusting a rotation angle and a tilt angle. It is a figure for demonstrating the Example and the comparative example of this invention.

Hereinafter, the angle adjusting device for the line sensor according to the embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram showing a configuration of a defect inspection device to which an angle adjusting device for a line sensor according to an embodiment of the present invention is applied.
The inspection object 1 is in the form of a continuous sheet, and includes, for example, a film, a resin plate, and the like. When the object to be inspected is opaque such as a metal plate (when the illumination light is not transmitted), a reflection optical system is adopted instead of the transmission optical system as shown in FIG.
In the following embodiment, the case where the inspection object 1 is a film will be described as an example. The inspection object 1 has a long shape in the transport direction. Here, in FIG. 1, the transport direction indicates that the transport is carried out from the left side to the right side with respect to the paper surface.

The line sensor 2 images the inspection object 1 from above the inspection object 1 and outputs image data representing the imaging result. For this line sensor 2, for example, an 8K element line sensor manufactured by MEC Co., Ltd. can be used, a lens having a focal length of f90 mm is provided, and an image is captured from above the inspection object 1 with a resolution of 0.1 mm / pixel. It is necessary to accurately adjust the reading position (imaging position) of the line sensor 2 to the boundary position of the slit plate 4. That is, among the light that is installed below the inspection object 1 and passes through the inspection object 1, the light that passes between the slits of the slit plate 4 is received.
The line sensor 2 has various numbers of elements, for example, 2048 elements, 4096 elements, and 8192 elements, and an appropriate one may be selected depending on the inspection target 1 and the content of the defect to be detected.
In this line sensor 2, for example, a large number of elements are arranged in a line shape (straight line shape). As the number of elements, an appropriate number of elements is used according to the width of the inspection object 1, the traveling speed, the resolution, the installation space, and the like. The line sensor 2 applies the light intensity distribution on the surface of the inspection object 1 in units of lines (hereinafter referred to as inspection lines) in a direction orthogonal to the traveling direction of the inspection object 1 (for example, the width direction of the inspection object 1). Outputs the corresponding electrical signal. Examples of the line sensor include a CMOS (complementary MOS) camera and a CCD (Charge-Coupled Device) camera.

As the line-shaped illumination 3, LED illumination, quartz rod illumination, fluorescent lamp and the like are used. A slit plate 4 is attached above the line-shaped illumination 3 (direction facing the line sensor 2). The line-shaped illumination 3 is arranged in the longitudinal direction in the direction along the width direction of the inspection object 1.
The slit plate 4 has a plate shape in which slits are formed in a direction along the width direction of the inspection object 1, and the width of the slit is, for example, 3 to 10 mm. The slit plate 4 is attached to the line-shaped illumination 3 so as to be separated from the inspection object 1 by 100 to 400 mm. Further, as the slit plate 4, a slit plate on only one side may be used.

The camera folder 5 has a function of fixing the line sensor 2 and has a plurality of micrometer for adjusting the position and angle with respect to the line-shaped illumination 3.
The micrometer 6 (first adjusting unit) adjusts the rotation angle, which is the angle of rotation about the first axis parallel to the element surface of the line sensor 2 in the normal direction.
The micrometer 7 (second adjusting unit) adjusts the tilt angle (reference numeral 7A), which is an angle of rotation about the second axis, which is the scanning direction of the line sensor 2.

FIG. 2 is a conceptual diagram illustrating an adjustment direction of the line sensor 2.
The line sensor reading position 8 is a position corresponding to the arrangement direction (longitudinal direction) of the elements of the line sensor 2. By adjusting with the micrometer 6, it is possible to adjust the rotation angle θ1 which is the angle in the direction of rotation in the plane direction with reference to the center position 8A in the longitudinal direction of the line sensor reading position 8. That is, the position in the rotation direction with respect to the line-shaped illumination 3 can be adjusted. The line sensor reading position 8 can be changed by adjusting the rotation angle θ1, but by adjusting the rotation angle θ1, the relative angle of the line-shaped illumination 3 with respect to the line sensor reading position 8 is changed. Not only that, here, the relative angle of the slit of the slit plate 4 with respect to the line sensor reading position 8 is also changed.

By adjusting the tilt angle with the micrometer 7, the line sensor reading position 8 can be adjusted so as to move in the direction parallel to the line-shaped illumination 3. That is, the inspection target 1 is located on the upstream side (the side where the roller on which the inspection target 1 is unwound is provided) or the downstream side (the inspection target 1) in the scanning direction about the central axis in the longitudinal direction of the line sensor 2. The line sensor reading position 8 can be adjusted to the upstream side or the downstream side of the inspection object 1 by changing the tilt angle toward the side on which the roller to be wound is provided. The line sensor reading position 8 can be changed by adjusting the tilt angle, but by adjusting this tilt angle, only the relative position of the line-shaped illumination 3 with respect to the line sensor reading position 8 is changed. However, here, the relative position of the slit of the slit plate 4 with respect to the line sensor reading position 8 is also changed.

FIG. 3 is a schematic block diagram showing the functional configuration of the defect inspection device 100 described above.
The parts corresponding to the respective parts of FIG. 1 are designated by the same reference numerals, and the points different from those of FIG. 1 will be described.
The line sensor 2 is attached to the camera folder 5, and the rotation angle (rotation direction) can be adjusted by the micrometer 6 and the tilt angle (tilt direction) can be adjusted by the micrometer 7.
The line-shaped illumination 3 is turned on in response to an on / off signal from the host computer 12.

The micrometer 6 and the micrometer 7 are individually provided with actuators, and the actuators are driven based on the drive signal output from the adjustment control unit 11 to adjust the rotation angle and the tilt angle.
When the adjustment control unit 11 receives the drive signal for the micrometer 6 output from the host computer 12, it outputs the drive signal to the actuator of the micrometer 6, and when it receives the drive signal for the micrometer 7, the adjustment control unit 11 outputs the drive signal for the micrometer 7. Outputs a drive signal to the actuator.
The host computer 12 refers to the actuator of the micrometer 6 or the micrometer 7 according to the control signal transmitted from the client terminal 13 connected via the network 20 or the control signal output from the image processing computer 15. Outputs the drive signal.
The host computer 12 is a computer on which a general-purpose OS is installed, and has functions such as adjusting inspection conditions, displaying a screen during inspection, and confirming inspection results.

The client terminal 13 is remotely connected to the host computer 12 via the network 20. This network may be wireless, wired, or a combination of wireless and wired. The client terminal 13 has an input device such as a mouse and a keyboard, and a display such as a display device.
The image processing device 14 detects a defect in the inspection object 1 based on the image pickup result of the line sensor 2, and outputs the detection result to the image processing computer 15.
The image processing computer 15 is controlled by a real-time OS (operating system), and controls the line sensor 2 and the image processing device 14 at high speed. The output of the image processing computer 15 is input to the host computer 12.

FIG. 4 is a graph showing an imaging result output from the line sensor 2. The vertical axis represents the output value of the line sensor 2, and the horizontal axis represents the position of the line sensor 2 in the width direction.
FIG. 4A is a graph showing the detection result of the line sensor 2 in the state of positive transmission. In the following, for convenience of explanation, the line sensor 2 receives light in a state where the central axis in the width direction of the line sensor 2 is arranged at a position (near the center) corresponding to the axis in the longitudinal direction of the slit of the slit plate 4. The form in which light passes through the inspection object 1 is referred to as "normal transmission".
Here, for example, it is an example when the rotation angle and the tilt angle are adjusted so that the line sensor reading position 8 corresponds to the slit of the slit plate 4. In this figure, both ends of the line sensor 2 in the width direction have slightly lower detection values than the central portion, but the detection values are substantially the same in the width direction.

FIG. 4B is a graph showing the waveform of the output value of the line sensor 2 at each position in the direction orthogonal to the longitudinal direction of the line sensor reading position 8 (the transport direction of the inspection object 1), and the vertical axis is a graph. , Indicates the output value of the line sensor 2 when the position in the longitudinal direction of the line sensor 2 is aligned with each position on the horizontal axis, and the horizontal axis is the direction orthogonal to the longitudinal direction of the slit plate 4 (that is, the slit plate 4). The position in the short side direction) is shown.
Further, the waveform of FIG. 4A described above represents an output value when the tilt angle of the line sensor 2 is adjusted to correspond to the position corresponding to the position B in FIG. 4B. Further, the position A in FIG. 4B is adjusted so that the tilt angle corresponds to a position where the output value is 1/2 (1 / 2k) of the output value (k) at the position B. It is a graph of the output value as shown in FIG. 4 (c). In FIG. 4C, the vertical axis represents the output value of the line sensor 2, and the horizontal axis represents the position of the line sensor 2 in the width direction. At the position A in FIG. 4B, the output value of the line sensor 2 fluctuates greatly when the tilt angle fluctuates back and forth. That is, in FIG. 4B, when the position changes before and after the substantially center of the region where the amount of change in the output value is large (the position of the output value about half of the position A where the output value reaches the peak value), Since the fluctuation of the output value is large (the inclination is large), highly accurate position adjustment is required in order to stably obtain a value of 1/2 of the peak value of the output value in the entire field of view of the line sensor 2. In FIG. 4C, the case where the position A is set to 1/2 of the peak value of the output value of the line sensor 2 has been described, but 1/4 of the peak value of the output value depends on the defect to be detected. The tilt angle may be adjusted to a position such as, 1/8 or the like.
Here, by adjusting the tilt angle so that the position is 1/2 of the peak value, if there is a defect in the inspection object 1, the intensity of the transmitted light changes, but the defect is normal. Even if there is a transparent defect such as unevenness or bumps on the portion, the output value of the line sensor 2 changes due to refraction of light or the like, so that it can be easily detected as a defect. Therefore, it is desirable to adjust the tilt angle so that the position is 1/2 of the peak value. Further, it is desirable to adjust the rotation angle so that the line sensor can be imaged from one end side to the other end side in the width direction under the same conditions.

FIG. 5 is a diagram showing an example of a display screen of the host computer 12 or the client terminal 13. This display screen is output based on the output value of the line sensor 2.
The display column (reference numeral 51) corresponding to L is the output value of the line sensor 2, and the average value of the output values of the element range (S min to S max) on the start point side (one end side) is displayed.
The display column (reference numeral 52) corresponding to M is the output value of the line sensor 2, and the average value of the output values in the element range (M min to M max) in the central portion is displayed.
The display column (reference numeral 53) corresponding to R is the line sensor 2 output value, and the average value of the output values of the element range (E min to E max) on the end point side (the other end side) is displayed.

Here, buttons for adjusting the rotation angle and the tilt angle are displayed below each of the above-mentioned display fields. Of the buttons for adjusting the rotation angle (reference numeral 54, reference numeral 55), when the button (reference numeral 54) in the shape of a left-pointing arrow is clicked, the micrometer 6 moves to the- (minus) side and the right-pointing arrow. When the shaped button (reference numeral 55) is clicked, a drive signal is output from the host computer 12 to the adjustment control unit 11 so that the micrometer 6 rotates at a constant angle to the + (plus) side. As a result, a drive signal is output from the adjustment control unit 11 to the actuator of the micrometer 6, and the micrometer 6 rotates according to the button operation, so that the rotation angle of the line sensor 2 is adjusted.
Of the buttons for adjusting the tilt angle (reference numeral 56, reference numeral 57), when the button (reference numeral 56) in the shape of a left-pointing arrow is clicked, the micrometer 7 moves to the- (minus) side and the right-pointing arrow. When the shaped button (reference numeral 57) is clicked, a drive signal is output from the host computer 12 to the adjustment control unit so that the micrometer 7 rotates at a constant angle to the + (plus) side. As a result, a drive signal is output from the adjustment control unit 11 to the actuator of the micrometer 7, and the micrometer 7 rotates according to the button operation, so that the tilt angle of the line sensor 2 is adjusted.

During the transportation of the inspection object 1, the output value of the line sensor 2 shown in FIG. 4 is taken in at a predetermined time interval, so that the graph is updated and displayed. The rotation angle can be adjusted so that the output values of L and R match or the difference between them is within a predetermined range, and the appropriate value can be obtained. Further, on the adjustment screen shown in FIG. 5, the tilt angle can be adjusted to an appropriate value by adjusting the tilt angle so that the output value of M is maximized. In such adjustment of the rotation angle and the tilt angle, the host computer 12 causes the remotely connected client terminal 13 to display the graph of FIG. 4 and the adjustment screen of FIG. 5, and the client is based on this display screen. It can be adjusted by inputting an operation from the terminal 13 via the adjustment screen of FIG. Further, such adjustment of the rotation angle and the adjustment of the tilt angle can be performed manually by using the client terminal 13 or automatically by using the image processing computer 15 as described later.

FIG. 6 is a diagram showing the relationship between the angle deviation and the edge amount in the present embodiment.
In this figure, the horizontal axis indicates the angular deviation, and the vertical axis indicates the average edge amount at the center of the camera waveform. The edge amount (Ni) can be calculated by the following equation.
Ni = C × Bi / Ai
Here, i: element position
Bi: Line sensor output value of positive transmission i element
Ai: Line sensor output value of i element of edge optical system
C: Coefficient (coefficient C is, for example, 2 when the scanning cycle is changed, for example, when the scanning cycle is doubled).
Is.
It is also possible to calculate the effective range from the start point element Ns to the end point element Ne and display the average value, the minimum value, and the maximum value of the edge amount Ni.

Here, for convenience of explanation, the light received by the line sensor 2 is transmitted through the inspection object 1 in a state where the line sensor 2 is arranged so as to be aligned with the boundary between the slit of the slit plate 4 and the light-shielding portion of the slit plate 4. This form is called "edge transparency". Further, the edge transmission when the edge amount N is 2 is referred to as 1/2 edge transmission. For example, at the position B in FIG. 4 (b), the edge amount is 1, and at the position A in FIG. 4 (b), the edge amount is 2, which corresponds to 1/2 edge transmission.

In the case of 1/2 edge transmission, in order to adjust the output value of the line sensor 2 within the range of ± 10%, it is necessary to adjust the angle deviation (adjustment range of the tilt angle) with high accuracy of ± 0.02 degrees. is there.
By adjusting the line sensor 2 according to the following procedure, such adjustment is automatically performed by the image processing computer instead of manually adjusting from the adjustment screen shown in FIG. 5 by connecting remotely from the client terminal 13. It is possible to adjust to an appropriate value.

FIG. 7 is a flowchart for explaining a process of adjusting the rotation angle and the tilt angle.
First, the amount of light is set so as to be positive transmission (step S1). Here, the host computer 12 temporarily stores the output value obtained from the line sensor 2 in the positive transmission state as Bi. Here, the output value obtained from the i-th element of the line sensor 2 is stored as Bi.
Next, the image processing device 14 changes the scanning period of the line sensor 2 according to the edge amount (step S2). For example, the edge amount is input from an input device connected to the host computer 12, and is notified to the image processing device 14 via the image processing computer 15. Based on this notification, the image processing device 14 sets the scanning cycle according to the edge amount. For example, when the edge amount is 2, the scanning period is doubled.

Next, when the notification of the completion of edge amount setting is received from the image processing device 14, the host computer 12 acquires the output value of the line sensor 2 via the image processing device 14 and the image processing computer 15, and the acquired line sensor 2 The tilt angle is adjusted by the micrometer 7 based on the output value of (step S3). Here, the tilt angle is adjusted so that the output value from the line sensor 2 becomes an output value (for example, the light amount and the output value are within a certain value) corresponding to the light amount in the positive transmission set in step S1. Here, the tilt angle is adjusted so as to be 1/2 edge transmission so as to correspond to the edge amount notified in step 2.

Next, the host computer 12 displays the adjustment screen shown in FIG. 5 based on the output value of the line sensor 2 input via the image processing device 14 and the image processing computer 15, and L (line) in the adjustment screen. The rotation angle is adjusted by the micrometer 6 so that the difference between the values of R (one end side of the sensor 2) and R (the other end side of the line sensor 2) is within a predetermined range (step S4). Here, as the values of L and R in FIG. 5, the edge amount is displayed instead of the output value of the line sensor 2. The edge amount is the line sensor output value Bi in the i element obtained in step S1, the line sensor output value Ai in the i element currently obtained from the line sensor 2, and the coefficient C (because the scanning period is doubled here). , C = 2), and the edge amount Ni is obtained. Then, the host computer 12 outputs a drive signal from the adjustment control unit 11 so that the edge amounts obtained as L and R in FIG. 5 are both 1, and drives the actuator of the micrometer 6 to change the rotation angle. adjust.

The host computer 12 determines whether or not the adjustment is completed (step S5), and if the adjustment is not completed, proceeds to step S3 and finely adjusts the tilt angle (step S3). The rotation angle is adjusted accordingly (step S4).

FIG. 8 is a diagram illustrating a case where the tilt angle and the rotation angle are adjusted and a case where the adjustment is not performed.
When the tilt angle and rotation angle are adjusted by the host computer 12 shown in FIG. 5 or the tilt angle and rotation angle are adjusted by the operation from the client terminal 13, the tilt angle and the rotation angle are adjusted to be appropriate. As a result, the light that passed through the slit of the slit plate 4 and passed through the inspection object 1 could be received by the line sensor 2 in a preferable state (“camera waveform” and “camera waveform” in “when there is no deviation”). Edge amount ").
On the other hand, in the state where the tilt angle and the rotation angle are not adjusted correctly, in the case of the comparative example in which the adjustment is performed with the camera output as it is, a deviation occurs, and the output values of the line sensor are on one end side and the other end. On the side, where the output values are originally almost the same, they are different from each other. Further, the edge amount also has different values on one end side and the other end side of the line sensor 2. In this state, at least, it is considered that the rotation angle cannot be set to an appropriate state.

According to the embodiment described above, the adjustment of the tilt angle and the rotation angle by the remote connection from the client terminal 13 and the adjustment of the tilt angle and the rotation angle by the host computer 12 are performed by at least one of them. .. As a result, the operator can adjust the tilt angle and the rotation angle without directly operating the micrometer 6 or the micrometer 7. Here, for example, if the adjustment mechanism is installed in a place or environment where it is easy to operate, the operator can directly operate the micrometer 6 or the micrometer 7 to smoothly perform the adjustment work, but defect inspection can be performed. Depending on the installation status of the device, the adjusting mechanism such as the micrometer 6 or the micrometer 7 may be installed in a place such as a high place where it is difficult for workers to reach. Further, when the defect inspection device is located in the clean room, the adjusting mechanism may also be installed in the clean room, which causes a problem that the entry conditions are very limited. Further, when the defect inspection device is provided in the area of the explosion-proof structure, the adjustment mechanism may also be installed in the area of the explosion-proof structure, and even in such a case, the entry conditions are limited. Further, when the defect inspection device is installed in the room where the chemical material exists, the entry conditions are limited depending on the type of the chemical material, and it is necessary to pay attention to the chemical material even in the work after entering the room.
On the other hand, according to the above-described embodiment, the tilt angle and the rotation angle can be easily adjusted without approaching the defect inspection device, regardless of the installation status of the defect inspection device and without using a special jig. Can be adjusted.

Further, according to the above-described embodiment, it is possible to confirm the deviation of the mounting position of the line sensor from the waveform of the line sensor and perform the angle adjustment with high accuracy. In addition, it has become possible to remotely adjust the displacement of the line sensor mounting position, eliminating on-site work. Further, according to the above-described embodiment, the mounting position of the line sensor is deviated from the waveform of the line sensor without acquiring an image and measuring the coordinates as in the conventional case, and without using a special jig. It is possible to perform angle adjustment with high accuracy.

Although the case where the adjustment control unit 11 described above is provided separately from the host computer 12 has been described, the adjustment control unit 11 and the host computer 12 may be the same device. For example, the host computer 12 may have the adjustment control unit 11.

The function of the host computer 12 in the above-described embodiment may be realized by the computer. In that case, the program for realizing this function may be recorded on a computer-readable recording medium, and the program recorded on the recording medium may be read by the computer system and executed. The term "computer system" as used herein includes hardware such as an OS and peripheral devices. Further, the "computer-readable recording medium" refers to a portable medium such as a flexible disk, a magneto-optical disk, a ROM, or a CD-ROM, or a storage device such as a hard disk built in a computer system. Further, a "computer-readable recording medium" is a communication line for transmitting a program via a network such as the Internet or a communication line such as a telephone line, and dynamically holds the program for a short period of time. It may also include a program that holds a program for a certain period of time, such as a volatile memory inside a computer system that serves as a server or a client in that case. Further, the above program may be for realizing a part of the above-mentioned functions, and may be further realized for realizing the above-mentioned functions in combination with a program already recorded in the computer system. It may be realized by using a programmable logic device such as FPGA (Field Programmable Gate Array).

Although the embodiments of the present invention have been described in detail with reference to the drawings, the specific configuration is not limited to this embodiment, and includes designs and the like within a range that does not deviate from the gist of the present invention.

1: Inspection object 2: Line sensor 3: Line-shaped lighting 4: Slit plate 5: Camera folder 6: Micrometer (for rotation adjustment)
7: Micrometer (for tilt adjustment)
8: Line sensor reading position 9: Rotation control 10: Tilt control 11: Adjustment control unit 12: Host computer 13: Client terminal 14: Image processing device 15: Image processing computer

Claims (7)

A first adjustment unit that adjusts the rotation angle, which is the angle of rotation about the first axis parallel to the element surface of the line sensor in the normal direction.
A second adjustment unit that adjusts the tilt angle, which is the angle of rotation around the second axis, which is the scanning direction of the line sensor.
An angle adjusting device for a line sensor having an adjustment control unit that adjusts by driving at least one of the first adjustment unit and the second adjustment unit in response to an adjustment instruction from the outside. Yes,
The angle adjusting device for the line sensor is
A value based on the average value of the output values in the element range on one end side of the line sensor and a value based on the average value of the output values in the element range on the other end side of the line sensor are displayed on the screen.
The adjustment control unit makes the first adjustment so that the difference between the value based on the average value on one end side of the line sensor and the value based on the average value on the other end side of the line sensor is within a predetermined range. Make adjustments by department
Angle adjustment device of the La-sensor. It has a receiver that receives adjustment instructions sent from a control device connected via a network.
The angle adjusting device for the line sensor is
The output value from the element on the first end side of the line sensor and the output value from the element on the second end side, which is an end different from the first end side of the line sensor, are obtained from the control device. In addition to displaying it on the screen, a button for adjusting the rotation angle and a button for adjusting the tilt angle are displayed.
The adjustment control unit is based on an adjustment instruction received from the control device in response to an operation input to at least one of the button for adjusting the rotation angle and the button for adjusting the tilt angle. The angle adjusting device for a line sensor according to claim 1, wherein at least one of the first adjusting unit and the second adjusting unit is adjusted according to the operation input. The receiver is provided in the first computer.
The angle adjusting device for a line sensor according to claim 2, wherein the control device is a second computer connected to the first computer using remote control software. The adjustment control unit obtains an edge amount from the output value of the line sensor, and drives at least one of the first adjustment unit and the second adjustment unit based on the edge amount value. angle adjustment device of the line sensor according to claim 1, wherein causing the adjustment. A defect inspection device that inspects an object to be inspected while transporting it in the transport direction.
A defect inspection device having the angle adjusting device for the line sensor according to any one of claims 1 to 4. The angle adjustment device of the line sensor displays a value based on the average value of the output values in the element range on one end side of the line sensor and a value based on the average value of the output values in the element range on the other end side of the line sensor on the screen. Display and
The first adjusting unit of the angle adjusting device of the line sensor adjusts the rotation angle, which is the angle of rotation about the first axis parallel to the element surface of the line sensor in the normal direction.
The second adjusting unit of the angle adjusting device of the line sensor adjusts the tilt angle, which is the angle of rotation about the second axis, which is the scanning direction of the line sensor.
In the adjustment control unit of the angle adjusting device of the line sensor, the difference between the value based on the average value on one end side of the line sensor and the value based on the average value on the other end side of the line sensor is within a predetermined range. A method of adjusting the angle of a line sensor that adjusts by driving the first adjusting unit so as to be. The angle adjusting device for the line sensor is
The output value from the element on the first end side of the line sensor and the output value from the element on the second end side, which is an end different from the first end side of the line sensor, are transmitted via a network. It is displayed on the screen of the control device connected to the device, and a button for adjusting the rotation angle and a button for adjusting the tilt angle are displayed.
Receiving unit receives the instruction of the adjustment sent from the control device,
Based on the adjustment instruction received from the control device by the adjustment control unit in response to an operation input to at least one of the button for adjusting the rotation angle and the button for adjusting the tilt angle. At least one of the first adjustment unit and the second adjustment unit is adjusted according to the operation input.
The angle adjusting method for a line sensor according to claim 6.

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