JP7551540B2 - Powder Coating System - Google Patents

Description

This disclosure relates to a powder/granular material coating system that applies a coating process to the surface of powder/granular material.

As a technique for forming a film on the surface of a powder or granular material, for example, Patent Document 1 discloses a method and apparatus for processing a particulate material. The apparatus includes a rotatable vertical atomic layer deposition (ALD) cartridge having a cavity defined by a sidewall, a vertical passage provided in the center of the cartridge to allow a precursor vapor to flow from top to bottom through the cartridge, the passage extending substantially vertically from top to bottom within the cartridge, and a spiral region provided in the cavity to expand from the vertical passage to the sidewall, and is configured to move the particulate material to be ALD processed upward by rotation within the cartridge and to move the particulate material downward along the vertical passage to circulate the particulate material during the ALD process.

Special table 2016-508544 publication

Incidentally, in order to send the powder that has been subjected to the film-forming process in the container to the next process, it is necessary to remove the powder from the container. However, in the device of Patent Document 1, the spiral region is formed as a transport path for transporting the particulate material within the container, making it difficult to efficiently remove the ALD-processed particulate material from the container.

Specifically, when a transport path for transporting powder or granular material within a container is formed to extend along the inner circumference of the container, the transport path may form a protruding portion that protrudes radially inward from the inner surface of the container, or may form a step within the container. As a result, the transport path may impede the movement of the powder or granular material within the container, causing the powder or granular material to become stuck within the container. Therefore, when a transport path that extends along the inner circumference of the container is formed within the container, it is difficult to efficiently remove the powder or granular material that has been subjected to the film-forming process from the container.

The present disclosure has been made in consideration of the above problems, and aims to provide a powder/granular material film-forming system that can efficiently discharge powder/granular material that has been film-formed inside a container to the outside of the container, even when the transport path for transporting the powder/granular material is formed to extend along the inner circumference of the container.

The provided powder/granular material coating system includes a container capable of containing powder/granular material and having a transport path extending along the inner circumference of the container, a coating device capable of depositing a coating material on the surface of the powder/granular material in the container, an outlet path extending from the transport path to the outside of the container, and a vibration generating device that vibrates the container so that the powder/granular material in the container is transported along the transport path toward the outlet path and the powder/granular material transported to the outlet path is transported out of the container along the outlet path.

In this powder/granular material film-forming system, the discharge path extends from the transport path to the outside of the container, and the vibration generating device vibrates the container so that the powder/granular material in the container is transported along the transport path toward the discharge path and the powder/granular material transported to the discharge path is transported along the discharge path to the outside of the container. Therefore, even if a transport path extending along the inner circumference of the container is formed inside the container, the powder/granular material that has been film-formed inside the container is transported along the transport path to the discharge path by the vibration of the vibration generating device, and is then efficiently transported outside the container along the discharge path.

In the powder/granular material film forming system, it is preferable that the container has a bottom surface on which the powder/granular material can be placed, and the transport path is a spiral transport path that extends spirally upward from the bottom surface along the inner circumference of the container. In this configuration, the vibration generating device can transport the powder/granular material placed on the bottom surface of the container upward along the spiral transport path by vibrating the container.

In this case, the film forming device is preferably configured to be capable of forming a film of the film forming material on the surface of the powder on the spiral transport path. In this configuration, the powder on the spiral transport path is transported upward along the spiral transport path while being agitated by vibrations generated by a vibration generating device, and a film is formed on the spiral transport path.

It is preferable that the powder-granular material film-forming system further includes a conveying direction switching member that can be switched between a conveying position, which is a position for guiding the powder-granular material conveyed along the conveying path to the conveying path, and a circulation position, which is a position for guiding the powder-granular material conveyed along the conveying path so that the powder-granular material falls toward the bottom surface. In this configuration, when the conveying direction switching member is arranged at the circulation position, the powder-granular material arranged on the bottom surface of the container is conveyed upward along the spiral conveying path by the vibration of the vibration generating device, and when it reaches the conveying direction switching member, it is guided by the conveying direction switching member and falls toward the bottom surface. Therefore, when the conveying direction switching member is arranged at the circulation position, the powder-granular material film-forming system can move the powder-granular material so that the powder-granular material circulates multiple times along a conveying route that is continuous in the order of the bottom surface, the spiral conveying path, the conveying direction switching member, and the bottom surface. This makes it possible, for example, to circulate the powder-granular material in the container until the time (film-forming time) required for the film-forming device to form a film of the film-forming material on the surface of the powder-granular material in the container has elapsed, thereby reliably forming a film of the film-forming material on the surface of the powder-granular material. On the other hand, when the film-forming time has elapsed, the transport direction switching member is switched to the discharge position. When the transport direction switching member is disposed in the discharge position, the powder/granular material film-forming system can discharge the powder/granular material that has been subjected to the film-forming process and is moving upward on the spiral transport path out of the container through the discharge path.

In the powder/granular material film forming system, the discharge path is connected to the container at a position corresponding to the tip of the spiral transport path, and the direction in which the discharge path extends from the tip of the spiral transport path to the outside of the container is preferably along the direction of the spiral transport path at the tip. In this configuration, the force applied by the vibration generating device to the powder/granular material near the tip of the spiral transport path, i.e., the force applied to the powder/granular material in the direction along the direction of the spiral transport path at the tip of the spiral transport path, can be utilized to send the powder/granular material near the tip of the spiral transport path to the discharge path and discharge it along the discharge path to the outside of the container.

In the powder/granular material film forming system, it is preferable that the discharge path has a portion that slopes downward so that the powder/granular material discharged from the container can be advanced along the discharge path by utilizing gravity. In this configuration, the powder/granular material discharged from the transport path to the discharge path can be effectively advanced along the discharge path by utilizing gravity.

In the powder/granular material film-forming system, the container is a first container, the film-forming device is a first film-forming device, and the film-forming material is a first film-forming material. The powder/granular material film-forming system preferably further includes a second container capable of containing powder/granular material, the second container being connected to the first container via the conveying path so that the powder/granular material conveyed out of the first container along the conveying path can be conveyed into the second container, and a second film-forming device capable of forming a film of a second film-forming material on the surface of the powder/granular material conveyed into the second container. In this configuration, the powder/granular material that has been film-treated with the first film-forming material in the first container is supplied to the second container, and the second film-forming material can be further film-treated on the surface of the powder/granular material in the second container. The first film-forming material and the second film-forming material may be the same or different. When the first film-forming material and the second film-forming material are different, multiple different films can be laminated on the surface of the powder or granular material.

In the powder/granular material film-forming system, the transport path is a first transport path, the discharge path is a first discharge path, the vibration generating device is a first vibration generating device, the second container has a second transport path extending along the inner circumference of the second container, and the powder/granular material film-forming system preferably further includes a second discharge path extending from the second transport path to the outside of the second container, and a second vibration generating device that vibrates the second container so that the powder/granular material in the second container is transported along the second transport path toward the second discharge path and the powder/granular material transported to the second discharge path is transported along the second discharge path to the outside of the second container. In this configuration, even if a second transport path extending along the inner circumference of the second container is formed in the second container, the powder/granular material film-formed in the second container is efficiently transported out of the second container along the second discharge path by the vibration of the second vibration generating device.

It is preferable that the powder/granular material film-forming system further includes a vacuum chamber unit that houses the first container, the first conveying path, the second container, and the second conveying path. In this configuration, the first container, the first conveying path, the second container, and the second conveying path are housed in the vacuum chamber unit, so that the powder/granular material can be transported in the order of the first container, the first conveying path, the second container, and the second conveying path under a vacuum atmosphere. This allows the first film-forming material and the second film-forming material to be formed in this order on the powder/granular material under a vacuum atmosphere, and the formed powder/granular material to be conveyed out of the second container along the second conveying path.

According to the present disclosure, a powder/granular material film-forming system is provided that can efficiently discharge powder/granular material that has been film-formed inside a container to the outside of the container, even when the transport path is formed to extend along the inner circumference of the container.

FIG. 2 is a side view showing the powder/granular film forming system according to the embodiment, in which a container and a vacuum chamber unit are illustrated in cross section. 2 is a cross-sectional view taken along line II-II in FIG. 1. FIG. 2 is a perspective view showing a container, a discharge path, an inner guide path, and a conveying direction switching member of the powder/particle film forming system. 2 is a schematic plan view showing a container, a discharge path, an inner guide path, and a conveying direction switching member of the powder/granular film forming system. FIG. 2 is a schematic plan view showing a container, a discharge path, an inner guide path, and a conveying direction switching member of the powder/granular film forming system. FIG. FIG. 2 is a cross-sectional view showing an example of a container and a film forming device of the powder/granular film forming system. FIG. 2 is a cross-sectional view showing an example of powder or granular material subjected to a film-forming process by the powder or granular material film-forming system. FIG. 11 is a plan view showing a powder/granular film forming system according to a first modified example of the embodiment, in which a vacuum chamber unit is depicted in cross section. FIG. 4 is a side view showing a powder/granular film forming system according to a first modified example of the embodiment. FIG. 11 is a schematic plan view showing a powder/granular film forming system according to a second modified example of the embodiment. FIG. 11 is a schematic plan view showing a powder/granular film forming system according to a second modified example of the embodiment. FIG. 11 is a cross-sectional view showing a container and a film-forming device in a powder/granular film-forming system according to a third modified example of the embodiment. FIG. 11 is a cross-sectional view showing a container and a film-forming device in a powder/granular film-forming system according to a fourth modified example of the embodiment.

Below, a powder/granular material film-forming system according to an embodiment of the present disclosure will be described with reference to the drawings. The powder/granular material film-forming system according to this embodiment is an apparatus for forming a film on the surface of powder/granular material by a film-forming method such as PVD (physical vapor deposition) or CVD (chemical vapor deposition). Specifically, examples of PVD include sputtering and arc ion plating. Examples of CVD include plasma enhanced CVD and ALD (atomic layer deposition).

Figure 1 is a side view showing the powder/granular material film-forming system 100 according to this embodiment, with the container and vacuum chamber unit depicted in cross section. Figure 2 is a cross section taken along line II-II in Figure 1. Figure 3 is a perspective view showing the container, discharge path, inner guide path, and transport direction switching member of the powder/granular material film-forming system 100.

The powder/granular material film-forming system 100 according to this embodiment is an apparatus that applies a film-forming process to the surface of powder/granular material by sputtering.

As shown in Figures 1 to 3, the powder/granular film forming system 100 according to this embodiment includes a supplying machine 1, multiple powder/granular film forming machines 2, a recovery machine 3, and a vacuum chamber unit 4.

The feeder 1 is configured to be able to supply powder to the powder-and-granular material film forming machine 2. The feeder 1 includes a vibration generating device 1A (vibration driving device), a hopper 1B, and a powder-and-granular material supply path 1C (transport trough). The hopper 1B includes a container capable of temporarily storing powder and is configured to be able to open the lower outlet as necessary to supply powder to the powder-and-granular material supply path 1C. The vibration generating device 1A and the powder-and-granular material supply path 1C form a linear feeder. The powder-and-granular material supply path 1C has a base end connected to the vibration generating device 1A, a tip end connected to one of the multiple powder-and-granular material film forming machines 2 (the powder-and-granular material film forming machine 2 located at the most upstream), and an intermediate portion located directly below the hopper 1B. The powder-and-granular material supply path 1C extends linearly from the base end to the tip end. The vibration generator 1A vibrates the powder/granular material supply path 1C so that the powder/granular material on the powder/granular material supply path 1C is supplied to the powder/granular material film forming machine 2 along the powder/granular material supply path 1C.

In this embodiment, the multiple powder/granular material film forming machines 2 include a first powder/granular material film forming machine 2 and a second powder/granular material film forming machine 2. These powder/granular material film forming machines 2 are connected to each other. The first powder/granular material film forming machine 2 is configured to be able to form a film of a first film material on the surface of the powder/granular material supplied from the powder/granular material supply path 1C of the supply machine 1, and to be able to transport the filmed powder/granular material to the second powder/granular material film forming machine 2. The second powder/granular material film forming machine 2 is configured to be able to form a film of a second film material on the surface of the powder/granular material supplied from the first powder/granular material film forming machine 2, and to be able to transport the filmed powder/granular material to the recovery machine 3. Therefore, as shown in FIG. 7, the powder/granular material film forming system 100 can perform surface treatment A with a first film material and surface treatment B with a second film material on the surface of the powder/granular material F in this order.

In this embodiment, the powder/granular material film forming system 100 has two powder/granular material film forming machines 2, but three or more powder/granular material film forming machines 2 may be connected as shown in Figures 10 and 11 described below. In this way, the powder/granular material film forming system 100 can freely increase or decrease the number of powder/granular material film forming machines 2, so that powder/granular material film forming machines 2 can be added according to the application, from the research and development stage to mass production of powder/granular material products. In addition, since each of the multiple powder/granular material film forming machines 2 can individually perform film forming processing on powder/granular material, for example, during mass production of powder/granular material products, the operation of any of the multiple powder/granular material film forming machines 2 can be locally stopped.

The first and second film-forming materials may be different materials from each other, or may be the same material. Various materials that can be formed into films by sputtering can be used as the first and second film-forming materials.

In this embodiment, the first powder/granular film forming machine 2 and the second powder/granular film forming machine 2 have the same structure, but may have different structures. The first powder/granular film forming machine 2 includes a container 10 (first container), a discharge path 24 (first discharge path), an inner guide path 27 (first inner guide path), a vibration generating device 30 (first vibration generating device), a conveying direction switching member 35 (first conveying direction switching member), a film forming device (first film forming device), and a support table 90 that supports these. Similarly, the second powder/granular film-forming machine 2 includes a container 10 (second container), a discharge path 24 (second discharge path), an inner guide path 27 (second inner guide path), a vibration generator 30 (second vibration generator), a transport direction switching member 35 (second transport direction switching member), a film-forming device (second film-forming device), and a support table 90 that supports these.

The container 10 has a cylindrical shape with a bottom and a side wall, and is capable of containing powdered or granular material. The container 10 has a shape that opens upward. The container 10 has a bottom surface 13, which is the upper surface of the bottom, and an inner surface 14, which is the inner surface of the side wall.

The bottom surface 13 is a surface on which powder F (see FIG. 6) can be placed. Specifically, the powder supply path 1C of the feeder 1 is connected to the side wall of the container 10 in the first powder coating machine 2, and at least a part of the powder supplied from the powder supply path 1C falls from the tip of the powder supply path 1C inside the container 10 and is placed on the bottom surface 13 of the container 10. The side wall of the container 10 in the second powder coating machine 2 is connected to the discharge path 24 of the first powder coating machine 2, and at least a part of the powder supplied from the discharge path 24 falls from the tip of the discharge path 24 inside the container 10 and is placed on the bottom surface 13 of the container 10.

In this embodiment, the bottom surface 13 includes an inclined surface. This inclined surface slopes downward from the center of the bottom surface 13 (the portion including the central axis A of the cylindrical container 10) toward the outside in the radial direction of the container 10. The inclined surface is formed continuously from the center of the bottom surface 13 to the outer periphery of the bottom surface 13. The bottom surface 13 of the container 10 may be formed of a flat surface that does not include an inclined surface.

A powder/granule drop space S is formed inside the container 10 (see Figs. 3 and 6). This powder/granule drop space S is a space for dropping powder/granule F toward the bottom surface 13 inside the container 10 when a film formation process is performed, and is a space that continues upward from the bottom surface 13. Details of the powder/granule drop space S will be described later.

The inner surface 14 has a circular shape in a plan view and is a surface that rises upward from the outer periphery of the bottom surface 13.

The container 10 further has a conveying path 21. The conveying path 21 extends along the inner circumference of the container 10 and is for conveying powdered or granular material. Specifically, in the present embodiment shown in FIG. 3 and FIG. 6, the conveying path 21 (first conveying path) in the first powdered or granular material film forming machine 2 and the conveying path 21 (second conveying path) in the second powdered or granular material film forming machine 2 are each a spiral conveying path 21 that extends upward from the bottom surface 13 along the inner circumference of the container 10. The spiral conveying path 21 is provided so as to protrude from the inner surface 14 of the container 10 to the inside in the radial direction of the container 10, and extends upward from the bottom surface 13 in a spiral shape along the inner surface 14. The spiral conveying path 21 is disposed in an area other than the powdered or granular material falling space S, and is a path along which the powdered or granular material F is conveyed.

The base end (lower end) of the spiral conveying path 21 is located adjacent to the outer periphery of the bottom surface 13, and the tip end (the downstream end of the spiral conveying path 21 in the conveying direction) of the spiral conveying path 21 is located adjacent to the inner surface 14 above the bottom surface 13. Specifically, the tip end of the spiral conveying path 21 is provided at a position adjacent to the inner surface 14 at the top of the container 10 (near the upper end of the container 10). The spiral conveying path 21 has an upper surface on which the powdered or granular material F is placed. The outer edge (radially outer edge) of the upper surface of the spiral conveying path 21 is connected to the inner surface 14 of the container 10. The spiral conveying path 21 has a gradient such that the position increases from the base end to the tip.

The inner guide path 27 is for further guiding the powdered material conveyed to the tip or its vicinity of the spiral conveying path 21 to the inner region of the spiral. The inner guide path 27 extends from the tip or its vicinity of the spiral conveying path 21 toward a region more inward than the spiral conveying path 21 in a plan view. The inner guide path 27 has an upper surface on which the powdered material F is placed, and a side surface that rises upward from an edge located on one side (outer circumference side) of the upper surface. The inner guide path 27 is arranged so that the drop point of at least a part of the powdered material F falling from the tip of the inner guide path 27 is the center of the bottom surface 13. Specifically, as shown in FIG. 4, the tip of the inner guide path 27 is located near the central axis A of the container 10 in a plan view. The inner guide path 27 has a shape curved like an arc in a plan view.

The discharge path 24 is for discharging the powder transported to the tip of the spiral conveying path 21 out of the container 10. The discharge path 24 includes a base end 24A, an intermediate portion 24B, and a tip end 24C. The base end 24A of the discharge path 24 is connected to the container 10 so as to be continuous with the tip of the spiral conveying path 21 at a position corresponding to the tip of the spiral conveying path 21, and extends from the tip of the spiral conveying path 21 to the outside of the container 10. The intermediate portion 24B of the discharge path 24 is located between the base end 24A and the tip end 24C and connects them. The tip end 24C of the discharge path 24 is connected to a device located downstream of the discharge path 24. Specifically, the tip 24C of the discharge path 24 in the first powder/granular material film forming machine 2 is connected to the side wall of the container 10 in the second powder/granular material film forming machine 2, and the tip 24C of the discharge path 24 in the second powder/granular material film forming machine 2 is connected to the recovery machine 3.

3, the base end 24A of the discharge path 24 has a bottom wall 241 extending in the longitudinal direction of the base end 24A, and a pair of side walls 242, 243 rising upward from both sides in the width direction of the bottom wall 241 perpendicular to the longitudinal direction of the bottom wall 241. Although not shown, each of the intermediate portion 24B and the tip portion 24C of the discharge path 24 also has a bottom wall 241 similar to the base end 24A and a pair of side walls 242, 243. In this embodiment, each of the base end 24A, the intermediate portion 24B, and the tip portion 24C of the discharge path 24 has a shape that extends linearly, but is not limited to such a shape. At least one of the base end 24A, the intermediate portion 24B, and the tip portion 24C of the discharge path 24 may include a portion that extends while curving.

The base end 24A of the discharge path 24 is connected to a connection provided at the top of the container 10, as shown in Figures 3 and 4, for example. An opening 26 is formed at the top of the side wall of the container 10 at a location corresponding to the connection, and the base end 24A of the discharge path 24 is continuous with the spiral conveying path 21 through the opening 26. This allows the base end 24A of the discharge path 24 to receive powdered material from the tip of the spiral conveying path 21 located inside the container 10.

The direction D (extension direction D) in which the base end 24A of the discharge path 24 extends from the tip of the spiral conveying path 21 to the outside of the container 10 is along the direction of the spiral conveying path 21 at the tip of the spiral conveying path 21. In this embodiment, the tip of the spiral conveying path 21 is the portion corresponding to the connection portion of the container 10, i.e., the portion corresponding to the opening 26. The direction of the spiral conveying path 21 at the tip of the spiral conveying path 21 corresponds to the tangent direction of the inner surface 14 at the portion C (see FIG. 4) that is located most upstream in the conveying direction among the edges that define the opening 26. The extension direction D may be not only parallel to the direction of the spiral conveying path 21 at the tip of the spiral conveying path 21, but may also be slightly inclined with respect to the direction of the spiral conveying path 21 at the tip of the spiral conveying path 21.

The discharge path 24 has a portion that slopes downward to allow the powder discharged outside the container 10 to move further along the discharge path 24 by utilizing gravity. In other words, the discharge path 24 has a portion that slopes downward toward the device located downstream of the discharge path 24. Specifically, the discharge path 24 in the first powder/granular material film forming machine 2 has a portion that slopes downward toward the container 10 in the second powder/granular material film forming machine 2, and the discharge path 24 in the second powder/granular material film forming machine 2 has a portion that slopes downward toward the recovery machine 3. In each of the first powder/granular material film forming machine 2 and the second powder/granular material film forming machine 2, the tip 24C of the discharge path 24 is located at a lower position than the base end 24A of the discharge path 24. In this embodiment, the middle portion 24B and the tip portion 24C of the discharge path 24 are inclined downward toward the device located downstream of the discharge path 24. The entire discharge path 24 may be inclined downward toward the device located downstream of the discharge path 24.

The conveying direction switching member 35 is configured to be able to switch between an output position P1 (see FIG. 4), which is a position for guiding the powder F conveyed along the spiral conveying path 21 to the base end 24A of the discharge path 24, and a circulation position P2 (see FIG. 5), which is a position for guiding the powder F conveyed along the spiral conveying path 21 so that the powder F falls toward the bottom surface 13.

3, the transport direction switching member 35 is disposed at or near the tip of the spiral transport path 21, and is supported by the container 10 (e.g., by the spiral transport path 21) so as to be rotatable between an unloading position P1 and a circulation position P2 relative to the spiral transport path 21. The position of the transport direction switching member 35 may be switched manually or automatically based on a command from a controller (not shown) included in the powder/granular film formation system 100. When the position of the transport direction switching member 35 is switched based on a command from the controller, the powder/granular film formation system 100 further includes a drive device (not shown) for rotating the transport direction switching member 35 between the unloading position P1 and the circulation position P2 based on a command from the controller. The drive device may be, for example, a motor, a cylinder, or the like that operates based on a command from the controller to rotate the transport direction switching member 35.

3, the conveying direction switching member 35 has a bottom wall 351 extending along the upper surface of the spiral conveying path 21, and a pair of side walls 352, 353 standing upward from both sides in the width direction of the bottom wall 351. Each of the pair of side walls 352, 353 extends along the extension direction of the bottom wall 351. When the conveying direction switching member 35 is disposed at the conveying position P1 as shown in FIGS. 3 and 4, the pair of side walls 352, 353 face the base end 24A of the conveying path 24, so that the conveying direction switching member 35 can guide the powder F conveyed along the spiral conveying path 21 to the base end 24A of the conveying path 24. On the other hand, when the conveying direction switching member 35 is disposed at the circulation position P2 as shown in Fig. 5, the pair of side walls 352, 353 face the inner region of the spiral of the spiral conveying path 21, so that the conveying direction switching member 35 can guide the powdered material F conveyed along the spiral conveying path 21 so that the powdered material F falls toward the bottom surface 13. In this embodiment, when the conveying direction switching member 35 is disposed at the circulation position P2 as shown in Fig. 5, the pair of side walls 352, 353 face the inner guide path 27, so that the conveying direction switching member 35 can guide the powdered material F conveyed along the spiral conveying path 21 to the inner guide path 27, and the inner guide path 27 can guide the powdered material F along the inner guide path 27 to the tip of the inner guide path 27. As a result, the powdered material F falls from the tip of the inner guide path 27 toward the bottom surface 13. The structures of the spiral conveying path 21, the conveying direction switching member 35, the discharge path 24, and the inner guide path 27 are not particularly limited as long as they are capable of guiding the powdered or granular material F as described above, but for example, the structures shown in Figures 3 and 4 can be adopted.

3 and 4, the spiral conveying path 21 includes a conveying path main body 21A and a downstream end 21B. The conveying path main body 21A is a portion that occupies the majority of the spiral conveying path 21, and is a portion that extends in a spiral shape from the bottom surface 13 of the container 10 or its vicinity to the conveying direction switching member 35 or its vicinity. The conveying path main body 21A has a base end (lower end) connected to the bottom surface 13 and a tip end at a position corresponding to the base end of the conveying direction switching member 35. The downstream end 21B is a portion that constitutes the end on the downstream side of the conveying direction in the spiral conveying path 21, and is a portion that extends from the conveying path main body 21A or its vicinity to the base end 24A of the conveying path 24 or its vicinity. The downstream end 21B has a base end at a position corresponding to the tip of the conveying path main body 21A and the base end of the conveying direction switching member 35, and a tip at a position corresponding to the base end of the base end 24A of the conveying path 24. The tip of the downstream end 21B is the tip of the spiral conveying path 21.

3, the tip of the conveying path main body 21A of the spiral conveying path 21 is located above the base end of the conveying direction switching member 35, and the base end of the conveying direction switching member 35 is located above the base end of the downstream end 21B of the spiral conveying path 21. The part including the tip of the conveying path main body 21A is arranged so as to overlap the part including the base end of the conveying direction switching member 35 in a planar view. In addition, it is preferable that the part including the tip of the conveying path main body 21A is arranged so as to overlap not only the part including the base end of the conveying direction switching member 35 but also the part including the base end of the downstream end 21B in a planar view. The conveying direction switching member 35 may be placed on the downstream end 21B so as to be in contact with the upper surface of the downstream end 21B of the spiral conveying path 21, or may be arranged above the downstream end 21B with a vertical gap from the upper surface of the downstream end 21B. The inner guide path 27 extends from the downstream end 21B of the spiral conveying path 21 toward an area inside the spiral conveying path 21 in a plan view. The structure shown in FIG. 3 allows the position of the conveying direction switching member 35 to be smoothly switched between the discharge position P1 and the circulation position P2. The structure shown in FIG. 3 also allows the powdered material F to be smoothly conveyed from the tip of the conveying path main body 21A of the spiral conveying path 21 to the conveying direction switching member 35, the powdered material F to be smoothly conveyed from the tip of the conveying direction switching member 35 to the discharge path 24 via the downstream end 21B of the spiral conveying path 21, and the powdered material F to be smoothly conveyed from the tip of the conveying direction switching member 35 to the inner guide path 27.

In the specific example shown in FIG. 3, the tip of the downstream end 21B (the tip of the spiral conveying path 21) is connected to the base end 24A of the discharge path 24 so as to be smoothly continuous, but the tip of the downstream end 21B may be located above the base end of the base end 24A of the discharge path 24 and connected to the base end 24A of the discharge path 24 via a step. Also, in the specific example shown in FIG. 3, the downstream end 21B is connected to the inner guide path 27 so as to be smoothly continuous, but the downstream end 21B may be located above the base end of the inner guide path 27 and connected to the inner guide path 27 via a step.

The vibration generating device 30 vibrates the container 10 so that the powder in the container 10 is transported along the spiral conveying path 21 toward the base end 24A of the conveying path 24. As described above, the extension direction D of the base end 24A of the conveying path 24 is the direction along the direction of the spiral conveying path 21 at the tip of the spiral conveying path 21. Therefore, when the conveying direction switching member 35 is disposed at the conveying position P1, when the vibration generating device 30 vibrates the container 10 as described above, the powder transported to the conveying direction switching member 35 is guided by the conveying direction switching member 35 to the base end 24A of the conveying path 24 and is conveyed out of the container 10 along the base end 24A of the conveying path 24. On the other hand, when the transport direction switching member 35 is positioned at the circulation position P2, when the vibration generating device 30 vibrates the container 10 as described above, the powder transported to the transport direction switching member 35 is guided by the transport direction switching member 35 to the inner guide path 27, and falls from the tip of the inner guide path 27 through the powder fall space S toward the bottom surface 13.

The vibration generator 30 includes a generator body and a shaft. The shaft interconnects the generator body and the container 10. The upper part of the shaft is connected to the bottom of the container 10. This allows the generator body to transmit vibrations to the container 10 via the shaft, causing the container 10 to vibrate.

The vibration generator 30 is configured to be able to vibrate the container 10 in a direction including a component in the direction of the central axis A of the container 10 (up and down direction) and a component in the circumferential direction around the central axis A. Specifically, the vibration generator 30 may vibrate the container 10 so that the container 10 reciprocates in a first direction including a component in one circumferential direction and an upward component, and a second direction including a component in the other circumferential direction and a downward component. The vibration generator 30 may also vibrate the container 10 so that the container 10 alternately moves in a direction including a component in one circumferential direction and an upward component, and a direction including a component in one circumferential direction and a downward component. By vibrating the container 10 in a direction including such components, the powdered granular material F can be efficiently transported upward along the spiral transport path 21 as shown by the arrow in FIG. 3, and further guided along the discharge path 24 or the inner guide path 27.

As described above, the powder/granular material falling space S is a space for dropping the powder/granular material F toward the bottom surface 13 inside the container 10. In this embodiment, the powder/granular material falling space S is a space radially inward of the container 10 from the spiral conveying path 21. Specifically, the powder/granular material falling space S is a space radially inward of the container 10 from the spiral conveying path 21, and is a space below the tip of the inner guide path 27 on the downstream side in the conveying direction. This powder/granular material falling space S is a space that is continuous in the vertical direction from the bottom surface 13 to the tip of the inner guide path 27.

The film forming device in the first powder/granular film forming machine 2 is a device capable of forming a film of a first film forming material on the surface of powder/granular material F in the container 10 in the first powder/granular film forming machine 2. The film forming device in the second powder/granular film forming machine 2 is a device capable of forming a film of a second film forming material on the surface of powder/granular material F (the surface of powder/granular material F on which the first film forming material has been formed) in the container 10 in the second powder/granular film forming machine 2. In this embodiment, the film forming device in the first powder/granular film forming machine 2 and the film forming device in the second powder/granular film forming machine 2 have the same structure, but may have different structures.

As shown in FIG. 6, each of the first powder/granular film forming machine 2 and the second powder/granular film forming machine 2 includes a sputtering unit 50 and an inert gas supply unit 70.

The sputtering unit 50 includes a target 52 and various components such as a cooling mechanism housed in a case 51. The target 52 constitutes a cathode or a part of the cathode. The container 10 or the vacuum chamber unit 40 may constitute an anode. When the powder/granular film forming machine 2 is an apparatus that performs a film forming process on the surface of a powder/granular material by magnetron sputtering, for example, the sputtering unit 50 includes a magnet. In this case, the magnet is disposed adjacent to the target 52 (for example, directly above the target 52). The material constituting the target 52 in the first powder/granular film forming machine 2 is an example of a first film forming material, and the material constituting the target 52 in the second powder/granular film forming machine 2 is an example of a second film forming material.

The inert gas supply unit 70 is for supplying an inert gas into the container 10 when a film formation process is performed. The inert gas from the inert gas supply unit 70 is supplied into the vacuum chamber unit 4, for example, through a pipe not shown, and is thereby supplied into the container 10. For example, argon gas is used as the inert gas.

The vacuum chamber unit 4 is connected to a pump (not shown) for vacuuming via piping (not shown). The vacuum chamber unit 4 has a storage space that contains a portion that transports powder F and a portion that deposits a film material on the powder F, among the multiple portions that make up the powder/granular material film forming system 100. In this embodiment, the vacuum chamber unit 4 contains the hopper 1B and powder/granular material supply path 1C of the supply machine 1, the target 52, container 10, and discharge path 24 of the first powder/granular material film forming machine 2, the target 52, container 10, and discharge path 24 of the second powder/granular material film forming machine 2, and at least a portion of the recovery machine 3.

In this embodiment, the recovery machine 3 includes a hopper 3A, and at least a portion of the hopper 3A is housed in the vacuum chamber unit 4. The hopper 3A is configured so that the recovered powder F after the film formation process can be supplied to the next process by opening the outlet at the bottom as necessary.

Specifically, the vacuum chamber unit 4 includes a vacuum chamber 41 for the feeder that accommodates the hopper 1B and powder supply path 1C of the feeder 1, a vacuum chamber 42 for the first powder film forming machine that accommodates the target 52, container 10 and discharge path 24 of the first powder film forming machine 2, a vacuum chamber 42 for the second powder film forming machine that accommodates the target 52, container 10 and discharge path 24 of the second powder film forming machine 2, and a vacuum chamber 43 for the recovery machine that accommodates at least a portion of the recovery machine 3. The vacuum chamber 42 for the first powder film forming machine also accommodates a portion of the powder supply path 1C of the feeder 1.

Next, we will explain how to perform a film formation process on the surface of powder F by sputtering using the powder/granular material film formation system 100.

First, powder F is fed into the hopper 1B of the feeder 1, and the inside of the vacuum chamber unit 4 is evacuated. After the vacuum chamber unit 4 is evacuated, an inert gas (e.g., argon gas) is fed into the vacuum chamber unit 4. The conveying direction switching member 35 of each of the first powder film forming machine 2 and the second powder film forming machine 2 is placed at the circulation position P2. In this state, a glow discharge occurs when an external power source (not shown) applies positive and negative voltages to the anode and the target 52 (cathode), generating a plasma region P (see FIG. 6) near the target, and the inert gas is ionized. The ionized inert gas collides with the target 52, and the particles E (e.g., atoms or molecules) constituting the target 52 are knocked out by the kinetic energy. A part of the particles E knocked out from the target 52 moves downward in the powder drop space S and is supplied to the bottom surface 13.

Meanwhile, with the vibration generator 1A of the feeder 1, the vibration generator 30 of the first powder/granular material film-forming machine 2, and the vibration generator 30 of the second powder/granular material film-forming machine 2 all in operation, powder/granular material F is sequentially supplied from the hopper 1B to the powder/granular material supply path 1C at a preset supply rate. As a result, the powder/granular material on the powder/granular material supply path 1C is supplied along the powder/granular material supply path 1C into the container 10 of the first powder/granular material film-forming machine 2.

At least a portion of the powder F supplied into the container 10 of the first powder/granular material film forming machine 2 falls onto the bottom surface 13 of the container 10. Therefore, a portion of the particles E knocked out from the target 52 moves downward in the powder/granular material falling space S and adheres to the surface of the powder/granular material F on the bottom surface 13. In this embodiment, as shown in FIG. 6, there is no obstruction between at least a portion of the spiral conveying path 21 and the lower surface of the target 52. Therefore, another portion of the particles E knocked out from the target 52 moves toward the at least a portion of the spiral conveying path 21 in the powder/granular material falling space S and adheres to the surface of the powder/granular material F thereon. This allows the film forming process to be performed on the surface of the powder/granular material F on the bottom surface 13, and the film forming process to be performed on the surface of the powder/granular material F on the at least a portion of the spiral conveying path 21.

In the first powder/granular material film-forming machine 2, the vibration generating device 30 applies a predetermined vibration to the container 10, so that the powder/granular material F on the bottom surface 13 is transported upward along the spiral transport path 21. Since the transport direction switching member 35 of the first powder/granular material film-forming machine 2 is disposed at the circulation position P2, the powder/granular material F that reaches the transport direction switching member 35 is further guided along the inner guide path 27 to the vicinity of the center of the container 10 in a plan view, and falls from the tip of the inner guide path 27 toward the bottom surface 13 of the container 10. Therefore, the powder/granular material F circulates in the container 10 along a transport route that is arranged in the order of the bottom surface 13, the spiral transport path 21, the inner guide path 27, and the powder/granular material falling space S, until, for example, a preset time (first film-forming time) has elapsed. The powder/granular material F is filmed by the film-forming device while circulating along the transport route.

When the first film formation time has elapsed, the controller of the powder/granular material film formation system 100 operates the drive device so that the transport direction switching member 35 of the first powder/granular material film formation machine 2 switches from the circulation position P2 to the discharge position P1. As a result, the powder/granular material F that has reached the transport direction switching member 35 is discharged out of the container 10 along the discharge path 24 and supplied into the container 10 of the second powder/granular material film formation machine 2. At least a portion of the powder/granular material F supplied into the container 10 of the second powder/granular material film formation machine 2 falls onto the bottom surface 13 of the container 10.

In the second powder/granular material film-forming machine 2, the vibration generating device 30 applies a predetermined vibration to the container 10, so that the powder/granular material F on the bottom surface 13 is transported upward along the spiral transport path 21. Since the transport direction switching member 35 of the second powder/granular material film-forming machine 2 is disposed at the circulation position P2, the powder/granular material F that reaches the transport direction switching member 35 is further guided along the inner guide path 27 to the vicinity of the center of the container 10 in a plan view, and falls from the tip of the inner guide path 27 toward the bottom surface 13 of the container 10. Therefore, the powder/granular material F circulates in the container 10 along a transport route that is arranged in the order of the bottom surface 13, the spiral transport path 21, the inner guide path 27, and the powder/granular material falling space S, until, for example, a preset time (second film-forming time) has elapsed. The powder/granular material F is filmed by the film-forming device while circulating along the transport route.

When the second film formation time has elapsed, the controller of the powder/granular material film formation system 100 operates the drive device so that the transport direction switching member 35 of the second powder/granular material film formation machine 2 switches from the circulation position P2 to the discharge position P1. As a result, the powder/granular material F that has reached the transport direction switching member 35 is discharged out of the container 10 along the discharge path 24 and collected in the recovery machine 3.

As described above, in the powder/granular material film-forming system 100 according to this embodiment, the discharge path 24 is connected to the container 10 so as to be continuous with the spiral conveying path 21 at a position corresponding to the tip of the spiral conveying path 21 and extends from the spiral conveying path 21 to the outside of the container 10, and the vibration generating device 30 vibrates the container 10 so that the powder/granular material F in the container 10 is conveyed along the spiral conveying path 21 toward the discharge path 24 and the powder/granular material F conveyed to the discharge path 24 is conveyed along the discharge path 24 to the outside of the container 10. Therefore, even if the spiral conveying path 21 that extends spirally upward from the bottom surface 13 along the inner circumference of the container 10 is formed in the container 10, the powder/granular material F that has been subjected to the film-forming process in the container 10 is conveyed along the spiral conveying path 21 to the discharge path 24 by the vibration of the vibration generating device 30, and is further conveyed efficiently out of the container 10 along the discharge path 24.

In this embodiment, the conveying path is a spiral conveying path 21 that extends upward in a spiral shape from the bottom surface 13 along the inner circumference of the container 10, so that the vibration generating device 30 can convey the powder F placed on the bottom surface 13 of the container 10 upward along the spiral conveying path 21 by vibrating the container 10. In addition, in this embodiment, the film forming device can not only form a film of the film forming material on the surface of the powder F on the bottom surface 13 of the container 10, but also form a film of the film forming material on the surface of the powder F on the spiral conveying path 21. The powder F on the spiral conveying path 21 is conveyed upward along the spiral conveying path 21 while being stirred by the vibration generated by the vibration generating device 30, and a film is formed on the spiral conveying path 21.

In this embodiment, when the transport direction switching member 35 is disposed at the circulation position P2, the powder/granular material film-forming system 100 can move the powder/granular material F so that the powder/granular material F circulates multiple times along a transport route that is continuous in the order of the bottom surface 13, the spiral transport path 21, the transport direction switching member 35, the inner guide path 27, the powder/granular material falling space S, and the bottom surface 13. This makes it possible to circulate the powder/granular material F in the container 10 until a film-forming time (e.g., a first film-forming time or a second film-forming time) required for the film-forming device to form a film of the film-forming material on the surface of the powder/granular material F in the container 10 has elapsed, thereby reliably forming a film of the film-forming material on the surface of the powder/granular material F. On the other hand, when the film-forming time has elapsed, the transport direction switching member 35 is switched to the discharge position P1. When the transport direction switching member 35 is positioned at the discharge position P1, the powder/granular material film-forming system 100 can transport the powder/granular material F that has been subjected to the film-forming process and is moving upward along the spiral transport path 21 to the outside of the container 10 via the discharge path 24.

In this embodiment, the direction D (extension direction D) in which the discharge path 24 extends from the tip of the spiral conveying path 21 to the outside of the container 10 is along the direction of the spiral conveying path 21 at the tip of the spiral conveying path 21. Therefore, by utilizing the force applied by the vibration generating device 30 to the powder F near the tip of the spiral conveying path 21, i.e., the force applied to the powder in the direction along the direction of the spiral conveying path 21 at the tip of the spiral conveying path 21, the powder near the tip of the spiral conveying path 21 can be sent to the discharge path 24 and discharged along the discharge path 24 to the outside of the container 10.

In this embodiment, the discharge path 24 has a portion that slopes downward to allow the powder F discharged out of the container 10 to move further along the discharge path 24 by utilizing gravity. Therefore, the powder F sent from the spiral conveying path 21 to the discharge path 24 can be effectively moved forward along the discharge path 24 by utilizing gravity. The powder/granular material film forming system 100 may further include a vibration generating device (linear vibration sending device) (not shown) for supporting the forward movement of the powder F along the discharge path 24.

In this embodiment, the first powder/granular material coating machine 2 and the second powder/granular material coating machine 2 are connected, so that the powder/granular material F that has been coated with the first coating material in the first container 10 can be supplied to the second container 10, and the second coating material can be further coated on the surface of the powder/granular material in the second container 10.

In this embodiment, the vacuum chamber unit 4 accommodates the hopper 1B and powder supply path 1C of the supplying machine 1, the target 52, container 10 and conveying path 24 of the first powder film forming machine 2, the target 52, container 10 and conveying path 24 of the second powder film forming machine 2, and at least a part of the recovery machine 3. Therefore, the route from the hopper 1B of the supplying machine 1 to the recovery machine 3 can be adjusted to a vacuum atmosphere. This allows the powder to be transported in the route from the hopper 1B of the supplying machine 1 to the recovery machine 3 in a vacuum atmosphere, and the first film forming material and the second film forming material can be formed in this order on the powder F in a vacuum atmosphere. In addition, since the vacuum chamber unit 4 forms a sealed accommodation space, the film forming process on the powder F is performed without contamination.

[Modification]
Fig. 8 is a plan view showing a powder/granular material film forming system 100A according to a first modified example of the embodiment, in which a vacuum chamber is depicted in a cross-sectional view. Fig. 9 is a side view showing the powder/granular material film forming system 100A according to the first modified example.

In the powder/granular material coating system 100A according to the modified example 1 shown in Figures 8 and 9, the discharge path 24 of the first powder/granular material coating machine 2 is connected to the container 10 of the second powder/granular material coating machine 2, and the discharge path 24 of the second powder/granular material coating machine 2 is connected to the container 10 of the first powder/granular material coating machine 2.

9, the discharge path 24 of each of the first powder/granular film forming machine 2 and the second powder/granular film forming machine 2 has a portion that slopes downward to advance the powder/granular material discharged outside the container 10 along the discharge path 24 by utilizing gravity. Specifically, the discharge path 24 in the first powder/granular film forming machine 2 has a portion that slopes downward toward the container 10 in the second powder/granular film forming machine 2, and the discharge path 24 in the second powder/granular film forming machine 2 has a portion that slopes downward toward the container 10 in the first powder/granular film forming machine 2. In each of the first powder/granular film forming machine 2 and the second powder/granular film forming machine 2, the tip 24C of the discharge path 24 is disposed at a position lower than the base end 24A of the discharge path 24. In this embodiment, the middle portion 24B and the tip 24C of the discharge path 24 are inclined downward toward the device located downstream of the discharge path 24. The entire discharge path 24 may be inclined downward toward a device located downstream of the discharge path 24. The powder/granular material film forming system 100A may further include a vibration generating device (linear vibration sending device) (not shown) for supporting the advancement of the powder/granular material F along the discharge path 24.

This modified example 1 allows the powder F to circulate multiple times along a route that moves sequentially between the first powder/granular material film forming machine 2 and the second powder/granular material film forming machine 2. Other configurations of the powder/granular material film forming system 100A according to modified example 1 are similar to the corresponding configurations of the powder/granular material film forming system 100A according to the embodiment shown in Figures 1 to 6, so their description will be omitted. Note that the powder/granular material film forming system 100A according to modified example 1 is equipped with a supply machine 1 and a recovery machine 3 as shown in Figures 1 and 2, but the supply machine 1 and the recovery machine 3 are omitted from Figures 8 and 9.

10 and 11 are plan views showing a powder-and-granular film forming system 100B according to the second modified example of the embodiment. The powder-and-granular film forming system 100B according to the second modified example has a structure in which three or more powder-and-granular film forming machines 2 (specifically, six powder-and-granular film forming machines 2) are connected. FIG. 10 shows a state in which the transport direction switching member 35 in each powder-and-granular film forming machine 2 is disposed at the discharge position P1, and FIG. 11 shows a state in which the transport direction switching member 35 in each powder-and-granular film forming machine 2 is disposed at the circulation position P2. In FIGS. 10 and 11, the transport direction switching members 35 in the six powder-and-granular film forming machines 2 are disposed at the same position (discharge position P1 or circulation position P2), but are not limited to such an arrangement. The positions of some of the transport direction switching members 35 in the six powder-and-granular film forming machines 2 may be different from the positions of the other transport direction switching members 35. The powder/granular film forming system 100B according to the second modification includes the feeder 1 and the collector 3 as shown in FIG. 1 and FIG. 2, but the feeder 1 and the collector 3 are omitted in FIG. 10 and FIG. 11.

In this modification 2, by connecting three or more powder/granular material film forming machines 2, three or more film forming materials can be sequentially formed on the powder/granular material F. In addition, this modification 2 makes it possible for the powder/granular material F to circulate multiple times along a route that moves sequentially through three or more powder/granular material film forming machines 2.

The powder/granular material film-forming system 100 according to the embodiment is an apparatus that applies a film-forming process to the surface of powder/granular material by sputtering, but is not limited to this. For example, it may be an apparatus that applies a film-forming process to the surface of powder/granular material F by arc ion plating, or an apparatus that applies a film-forming process to the surface of powder/granular material F by plasma CVD.

Figure 12 is a cross-sectional view showing the container 10 and the film forming device in a powder/granular material film forming system 100 according to Modification 3 of the embodiment. The powder/granular material film forming system 100 according to Modification 3 includes a first powder/granular material film forming machine 2 and a second powder/granular material film forming machine 2, for example, as shown in Figures 1 and 2. In Modification 3, the film forming devices of the powder/granular material film forming machines 2 are different from those of the embodiment shown in Figures 1 to 6, and the other configurations are the same as those of the embodiment. Therefore, hereinafter, only the differences between Modification 3 and the embodiment shown in Figures 1 to 6, i.e., the film forming devices, will be described, and descriptions of the other configurations will be omitted.

The powder/granular material coating system 100 according to variant example 3 is an apparatus that applies a coating process to the surface of powder/granular material by arc ion plating.

In the third modification, each of the multiple powder/granular material film forming machines 2 includes an ion plating unit 50A. The ion plating unit 50A includes a target 52 and various components such as a magnet and a cooling mechanism housed in a case 51A. In each powder/granular material film forming machine 2 that performs a film forming process on the surface of the powder/granular material F by arc ion plating, the target 52 constitutes a cathode or a part of the cathode. The anode may be constituted by the container 10. In this case, the cooling mechanism may have a pipe for cooling water that is wrapped around the outer circumference of the container 10. The container 10 is cooled by supplying cooling water to this pipe.

In the film formation process by arc ion plating, a vacuum arc discharge is used to evaporate a solid target 52. Specifically, in this film formation process, in a vacuum atmosphere, the target 52 is used as a cathode, and power is supplied from an external power source (not shown) to generate a vacuum arc discharge between the target 52 and the anode. This causes the film formation material constituting the target 52 to evaporate from the surface of the target 52 and to be ionized. The ionized film formation material E is supplied to the powder F on the bottom surface 13 and the powder F on the spiral transport path 21, thereby subjecting the surface of the powder F to a film formation process. The material constituting the target 52 in the first powder film formation machine 2 is an example of a first film formation material, and the material constituting the target 52 in the second powder film formation machine 2 is an example of a second film formation material.

Figure 13 is a cross-sectional view showing the container 10 and the film forming device in a powder/granular material film forming system 100 according to Variation 4 of the embodiment. The powder/granular material film forming system 100 according to Variation 4 includes a first powder/granular material film forming machine 2 and a second powder/granular material film forming machine 2, for example, as shown in Figures 1 and 2. In Variation 4, the film forming devices of the powder/granular material film forming machines 2 are different from those in the embodiment shown in Figures 1 to 6, but the other configurations are the same as those in the embodiment. Therefore, hereinafter, only the differences between Variation 4 and the embodiment shown in Figures 1 to 6, i.e., the film forming devices, will be described, and descriptions of the other configurations will be omitted.

The powder/granular material film-forming system 100 of variant 4 is an apparatus that performs a film-forming process on the surface of powder/granular material F by plasma CVD.

In the fourth modification, the film forming apparatus includes a plasma source 60, a raw material gas supply unit, and an inert gas supply unit 70. The plasma source 60 includes a case 61, a power supply housed in the case 61, and an electrode or coil. The power supply may be placed outside the plasma source 60.

The raw gas supply unit supplies raw gas as a film forming material into the vacuum chamber unit 4 (inside the container 10). In the specific example shown in FIG. 13, the raw gas supply unit has a pipe 62 for supplying raw gas. The pipe 62 supplies raw gas to an area affected by the action of the plasma source 60. Specifically, the pipe 62 has a plurality of gas supply holes on the lower surface of the pipe 62, and is configured so that raw gas can be supplied from these gas supply holes below the plasma source 60. When the pipe 62 has an annular shape in a plan view, the plurality of gas supply holes are provided, for example, at intervals along the circumferential direction on the lower surface of the pipe 62. It is preferable that the plurality of gas supply holes are provided evenly in the circumferential direction. In this case, unevenness in the film forming process can be reduced compared to when the pipe is, for example, a straight pipe.

The raw material gas is supplied from the pipe 62 of the raw material gas supply unit to a region affected by the plasma source 60, for example, a region directly below the plasma source 60, such as the region P surrounded by the two-dot chain line P in FIG. 13. Specifically, an opening 63 is provided in the lower part 64 of the plasma source 60. This opening 63 is for discharging the plasma generated inside the plasma source 60 to the outside. When plasma is discharged from the opening 63 of the plasma source 60, a plasma region P is formed directly below the plasma source 60. The raw material gas supplied from the pipe 62 of the raw material gas supply unit is decomposed in the plasma region P to become a film-forming state. In the fourth modification, the raw material gas E in a film-forming state is a product (decomposition product) generated by decomposing the raw material gas by the plasma discharged from the plasma source 60.

In a film formation process using plasma CVD, the raw material gas E that has been made into a film-forming state by the plasma source 60 not only moves downward parallel to the vertical direction from directly below the opening 63 of the plasma source 60, but also moves so as to diffuse diagonally downward at a certain angle range with respect to the vertical direction. This allows a film to be efficiently formed on the surface of the powder F on the bottom surface 13 and on the surface of the powder on the spiral transport path 21.

[Other Modifications]
Although the powder/granular film forming system 100 according to the embodiment has been described above, the present disclosure is not limited to these embodiments and may be modified as follows, for example.

(1) In the above embodiment, the conveying path is a spiral conveying path 21 that extends spirally upward from the bottom surface 13 along the inner circumference of the container 10, but it does not necessarily have to extend spirally upward. The conveying path may, for example, extend in an arc shape along the inner circumference of the container in a plan view, or may extend in a ring shape along the inner circumference of the container.

(2) When a film formation process is performed using a method such as CVD in an atmosphere other than a vacuum atmosphere, the vacuum chamber unit 4 can be omitted.

(3) The method of film formation is not limited to sputtering, arc ion plating, or plasma CVD, but may be other methods such as ALD (atomic layer deposition).

(4) The film forming device may be configured to form a film of the film forming material on the surface of at least one of the powder F on the bottom surface 13 of the container 10 and the powder F being transported along the spiral transport path 21 toward the discharge path 24.

(5) The powder/granular material film-forming system 100 according to the embodiment includes a plurality of powder/granular material film-forming machines 2, but may include only a single powder/granular material film-forming machine 2. That is, the powder/granular material film-forming system may include a single container, a single film-forming device, a single discharge path, and a single vibration generating device. In this case, the container has a conveying path extending along the inner circumference of the container, the film-forming device is capable of forming a film-forming material on the surface of the powder/granular material in the container, the discharge path extends from the conveying path to the outside of the container, and the vibration generating device vibrates the container so that the powder/granular material in the container is conveyed along the conveying path toward the discharge path and the powder/granular material conveyed to the discharge path is conveyed out of the container along the discharge path. In this case, the vacuum chamber unit may accommodate a single container and a single discharge path.

(6) The powder/granular material coating system may include, for example, a pretreatment machine and at least one powder/granular material coating machine. In this modification, the powder/granular material pretreated in the pretreatment machine is supplied to the powder/granular material coating machine, and the pretreated powder/granular material is subjected to a coating process in the powder/granular material coating machine. Specific examples of pretreatments performed in the pretreatment machine include, for example, a heating process for heating the powder/granular material, a plasma irradiation process for irradiating the powder/granular material with plasma, and an ion irradiation process for irradiating the powder/granular material with ions, but the pretreatments are not limited to these specific examples. The pretreatment machine in this modified example includes, for example, a pretreatment container capable of accommodating powder or granular material and having a conveying path (e.g., a spiral conveying path) extending along the inner circumference of the pretreatment container, a pretreatment source capable of pretreatment of powder or granular material in the pretreatment container, an outlet path extending from the conveying path of the pretreatment container to the outside of the pretreatment container, and a vibration generator that vibrates the pretreatment container so that the powder or granular material in the pretreatment container is conveyed along the conveying path toward the outlet path and the powder or granular material conveyed to the outlet path is conveyed out of the pretreatment container along the outlet path. The pretreatment machine may further include a conveying direction switching member similar to the conveying direction switching member 35. The pretreatment machine may further include an inner guide path similar to the inner guide path 27. The powder/granular film forming machine in this modified example may be a powder/granular film forming machine for performing a film forming process on the surface of powder/granular material by sputtering (for example, the powder/granular film forming machine 2 shown in FIG. 6), a powder/granular film forming machine for performing a film forming process on the surface of powder/granular material by arc ion plating (for example, the powder/granular film forming machine 2 shown in FIG. 12), or a powder/granular film forming machine for performing a film forming process on the surface of powder/granular material F by plasma CVD (for example, the powder/granular film forming machine 2 shown in FIG. 13). Although not shown, the powder/granular film forming machine may be one for performing a film forming process on the surface of powder/granular material by ALD (atomic layer deposition).

(7) In each of the powder/granular material coating systems shown in Figures 1, 2, and 8 to 11, the discharge path has a portion that slopes downward to allow the powder/granular material discharged from the container to move further along the discharge path using gravity, but is not limited to this form. The discharge path does not have to have a portion that slopes downward. In this case, it is preferable that the powder/granular material coating system is equipped with a vibration generating device (linear vibration sending device) (not shown) to support the forward movement of the powder/granular material along the discharge path.

4: Vacuum chamber unit 10: Container 13: Bottom surface 14: Inner surface 21: Spiral conveying path (an example of a conveying path)
24: discharge path 27: inner guide path 30: vibration generating device 35: transport direction switching member 50: sputtering unit 50A: ion plating unit 52: target 60: plasma source 70: inert gas supply unit 100, 100A, 100B: powder/granular material film forming system F: powder/granular material P1: discharge position P2: circulation position

Claims (8)

A container capable of accommodating powder or granular material, the container having a conveying path extending along an inner periphery of the container;
a film forming device capable of forming a film of a film forming material on a surface of the powder or granular material in the container;
a discharge path extending from the transport path to the outside of the container;
a vibration generating device that vibrates the container so that the powder or granular material in the container is transported along the transport path toward the discharge path and the powder or granular material transported to the discharge path is discharged outside the container along the discharge path ,
The container has a bottom surface on which powder or granular material can be placed,
The powder/granular material coating system further includes a transport direction switching member that can be switched between an outlet position for guiding the powder/granular material transported along the transport path to the outlet path, and a circulation position for guiding the powder/granular material transported along the transport path so that the powder/granular material falls toward the bottom surface . The powder/granular film forming system according to claim 1 , wherein the transport path is a spiral transport path that extends upward in a spiral shape from the bottom surface along the inner circumference of the container. The powder/granular material coating system according to claim 2, wherein the coating device is configured to be capable of coating the coating material on the surface of the powder/granular material on the spiral transport path. the discharge path is connected to the container at a position corresponding to a tip end of the spiral conveying path,
4. The powder / granular film forming system according to claim 2, wherein a direction in which the discharge path extends from the tip of the spiral transport path to the outside of the container is a direction parallel to a direction of the spiral transport path at the tip. The powder/granular film forming system according to any one of claims 1 to 4 , wherein the discharge path has a portion that slopes downward to advance the powder/granular material discharged out of the container along the discharge path by utilizing gravity. the container is a first container, the film forming apparatus is a first film forming apparatus, and the film forming material is a first film forming material;
The powder/granular film forming system comprises:
a second container capable of accommodating powder or granular material, the second container being connected to the first container via the discharge path so that the powder or granular material discharged out of the first container along the discharge path can be carried into the second container;
The powder/granular material film forming system according to any one of claims 1 to 5 , further comprising: a second film forming device capable of forming a film of a second film forming material on a surface of the powder/granular material carried into the second container. the transport path is a first transport path, the discharge path is a first discharge path, and the vibration generating device is a first vibration generating device;
the second container has a second conveying path extending along an inner periphery of the second container;
The powder/granular film forming system comprises:
a second discharge path extending from the second transport path to the outside of the second container;
a second vibration generating device that vibrates the second container so that the powder or granular material in the second container is transported along the second transport path toward the second discharge path and the powder or granular material transported to the second discharge path is discharged outside the second container along the second discharge path;
The powder/granular film forming system according to claim 6 , further comprising: The powder/granular film-forming system according to claim 7 , further comprising a vacuum chamber unit that houses the first container, the first discharge path, the second container, and the second discharge path.

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