JP7555022B2 - Inkjet Printing Device - Google Patents

Description

The present invention relates to an inkjet printing device. In particular, the present invention relates to an inkjet printing device for applying ink to large objects.

Conventionally, the deposition method has been used as a method for forming the light-emitting material for organic EL displays. The deposition method is carried out by heating the material using a mask with openings corresponding to the pixel areas where the light-emitting material is to be formed. In the deposition method, the material adheres to the entire mask and the entire deposition chamber. Therefore, the deposition method has the problem of extremely poor material utilization efficiency. In addition, since the deposition method uses a mask, it is necessary to replace the mask, and there is also the problem that the running costs of the mask are high.

In recent years, therefore, the vapor deposition method has been increasingly replaced by the inkjet method. With the inkjet method, the ink is applied only to the necessary areas, which significantly improves the efficiency of material utilization. It also eliminates the need for the masks that were previously used. Furthermore, the inkjet method can form any pattern, making it easy to accommodate changes in the model of organic EL display. Also, unlike the vapor deposition method, there is no need to use a chamber, which makes it possible to reduce investment costs.

The pixel section of an organic EL display is composed of an anode, a hole transport layer, a hole injection layer, a light emitting layer, an electron transport layer, an electron injection layer, a cathode, and a sealing material layer. There have been many efforts to form any of these layers using the inkjet printing method.

In addition to materials that make up organic EL, the use of inkjet printing methods to form materials that make up EL-QD (Electroluminescence Quantum dot), a self-luminous element that uses quantum dots as a next-generation device, and PL-QD (Photoluminescence Quantum dot), which is used as a wavelength conversion material, is also being actively considered.

Many of the materials that make up organic electroluminescence or quantum dots have the property that they are easily deteriorated by oxygen, ozone, water, or a combination of these. In order to prevent deterioration of the materials, the inkjet printing device that prints them needs to be surrounded by a nitrogen atmosphere environment or a clean dry air (CDA) environment, as described in Patent Document 1, for example.

International Publication No. 2017/047391

To prevent deterioration of the material applied by the inkjet device, it is necessary to surround the inkjet device with a nitrogen or CDA atmosphere. However, the initial investment costs for this are high, and the running costs of the nitrogen or CDA are also high.

The objective of the present invention is to provide an inkjet device that can suppress material deterioration without placing the entire device in an ideal nitrogen or CDA atmosphere.

An inkjet printing apparatus according to the present invention comprises a stage, an inkjet head that moves relative to the stage, a booth that covers the stage and the inkjet head and is divided into a plurality of sub-areas by openable and closable partitions , and an atmosphere control device that individually controls the atmosphere of the plurality of sub-areas, the plurality of sub-areas including a printing side booth area in which the inkjet head is located when applying ink to a printing object, and a maintenance side booth area in which the inkjet head is located when maintenance is performed, and the atmosphere control device controls the atmosphere of one sub-area based on a sensor located in the other sub-area.

The present invention provides an inkjet device that can suppress material deterioration without placing the entire device in an ideal nitrogen or CDA atmosphere.

FIG. 1 is a diagram showing a configuration of an inkjet printing apparatus according to a first embodiment; FIG. 1 is a diagram showing a state in which the booth is removed from the inkjet printing apparatus according to the first embodiment. FIG. 2 is a cross-sectional view of FIG. 1 taken along line AA. FIG. 2 is a cross-sectional view of FIG. 1; FIG. 13 is a diagram showing the configuration of an inkjet printing apparatus according to a second embodiment. FIG. 6 is a cross-sectional view taken along line CC of FIG. 5; FIG. 6 is a cross-sectional view taken along line DD of FIG. 5 . FIG. 13 is a diagram showing the configuration of an inkjet printing apparatus according to a third embodiment. FIG. 9 is a cross-section EE of FIG. FIG. 9 is a cross section FF of FIG. FIG. 13 is a diagram showing the configuration of an inkjet printing apparatus according to a fourth embodiment. A diagram showing cross section GG of FIG. A diagram showing a cross section HH of FIG. FIG. 13 is a diagram showing the configuration of an inkjet printing apparatus according to a fifth embodiment. FIG. 13 is a diagram showing the configuration of an inkjet printing apparatus according to a fifth embodiment. FIG. 13 is a diagram showing the configuration of an inkjet printing apparatus according to a sixth embodiment. FIG. 13 is a diagram showing a state in which the booth is removed from the inkjet printing apparatus according to the sixth embodiment. 1 is a cross-sectional view of an inkjet printing apparatus according to a modified example. 1 is a cross-sectional view of an inkjet printing apparatus according to a modified example.

The following describes an embodiment of the present invention with reference to the drawings.

(Embodiment 1)
A first embodiment will be described with reference to Figures 1 to 4. Figure 3 shows the AA cross section of Figure 1, and Figure 4 shows the BB cross section of Figure 1. In Figure 1, reference numeral 20 indicates a booth, which will be described later. Of the areas covered by the booth 20, a first booth area (an example of a printing side booth area) is indicated by reference numeral 21, and a second booth area (an example of a maintenance side booth area) is indicated by reference numeral 22. Note that the booth 20 is drawn with dotted lines to make it easier to see the various devices arranged inside the booth 20.

Figure 1 shows an inkjet printing device 100 that applies RGB ink using organic EL material, quantum dot ink, perovskite ink, etc. Figure 2 shows the inkjet printing device 100 with the booth 20 removed. The inkjet printing device 100 is a system that performs RGB inkjet printing all at once.

This inkjet printing device 100 is a system capable of simultaneously applying RGB materials, and is equipped with multiple inkjet heads 1. Some of the multiple inkjet heads 1 form a head group 11 that applies R ink collectively, another part forms a head group 12 that applies G ink collectively, and still another part forms a head group 13 that applies B ink collectively.

This inkjet printing device 100 has two drive units. The first drive unit is an inkjet head drive unit not shown. Head group 11, head group 12, and head group 13 are mounted on a gantry 41 and are configured to be movable in the direction of arrow 5 in FIG. 1 by the inkjet head drive unit. Head group 11, head group 12, and head group 13 can be moved in the direction of arrow 5 during maintenance or when applying ink. The inkjet head drive unit can be configured with a ball screw, a linear guide, a linear motor, a linear guide, a hydrostatic bearing, or the like.

Ink supply units 6, 7, and 8 are arranged next to the inkjet head 1 to supply ink to the inkjet head 1. The ink supply unit 6 supplies ink to the R ink head group 11. The ink supply unit 7 supplies ink to the G ink head group 12. The ink supply unit 8 supplies ink to the B ink head group 13. In this embodiment, the ink supply units 6, 7, and 8 are structured to move together with the inkjet head 1. However, the ink supply units 6, 7, and 8 may also be structured to be fixed and not move.

In addition, within the area in which the inkjet head 1 can move, there is a wiping area (cleaning area, not shown) for the inkjet head 1. A plasma unit (not shown) may be installed to change the wettability of the surface of the printing object, thereby changing the wettability of the printing object. A soft X-ray static electricity removal unit (not shown) may also be installed to prevent static electricity.

The second drive unit provided in the inkjet printing device 100 is a stage drive unit (not shown). The stage drive unit moves the stage 2 together with the object to be printed in the direction of arrow 3, which is a direction perpendicular to the direction of movement by the inkjet head drive unit indicated by arrow 5.

The stage 2 is supported by a frame 32 via a stage drive unit. An object to be printed is set on the stage 2. The stage 2 can move back and forth in the direction of movement indicated by the arrow 3. The stage drive unit can be configured with a ball screw or a linear guide, and is preferably configured with a linear motor or a hydrostatic bearing, for highly accurate positioning.

The inkjet printing device 100 also includes an alignment section (not shown) that aligns the printing object, and an inspection unit section 4 that observes the droplets on the printing object.

In this embodiment, inkjet coating of three colors, RGB, can be performed. However, instead of the three colors of ink, any of the layers of the anode, hole transport layer, hole injection layer, light emitting layer, electron transport layer, electron injection layer, cathode, and sealing material layer, or a combination of these layers, a material forming such layers, may be applied as inkjet ink.

In addition, in this embodiment, the inkjet head 1 applies ink to a predetermined printing range in one go. However, if the printing range exceeds the limited printing width of the inkjet head 1, the ink may be applied to the printing object by applying ink multiple times while the inkjet head 1 moves. In addition, when the resolution of the inkjet head is low, the ink may be applied to the printing object by applying ink multiple times while shifting the head so that parts of the printing range overlap each other.

The inkjet head 1 and stage 2 that constitute the inkjet printing device 100 are covered by a booth 20. The booth 20 is made of, for example, a relatively hard resin plate member or a relatively flexible sheet-like member. The booth 20 blocks air circulation between the inside and outside of the booth 20.

The area covered by the booth 20 is divided into multiple sub-areas, and in this embodiment, it is divided into a first booth area 21 and a second booth area 22. The first booth area is the area where the inkjet head 1 is located when applying ink to the printing object, that is, the area where printing by the inkjet head 1 is performed. The second booth area is the area where the inkjet head 1 is located when maintenance is performed.

The area covered by the booth 20, i.e., in this embodiment, the first booth area 21 and the second booth area 22, are kept in a nitrogen atmosphere or a CDA atmosphere by an atmosphere control device (not shown). The atmosphere control device can individually control the atmosphere in the first booth area 21 and the second booth area 22.

An atmosphere detection sensor may be disposed in the first booth area 21. The atmosphere detection sensor includes at least one of an oxygen concentration sensor, a nitrogen concentration sensor, an ozone concentration sensor, a moisture concentration sensor, and a temperature sensor.

The atmosphere control device may be configured with a purifier or the like that sucks gas from the area covered by the booth 20, performs a purification process, and then returns the gas to the area covered by the booth 20, and includes at least one of a nitrogen gas supply device and a clean dry air supply device. The atmosphere control device can individually adjust at least one of the nitrogen flow rate, nitrogen concentration, clean dry air flow rate, and clean dry air purity supplied to the area covered by the booth 20. The atmosphere control device may control the atmosphere of the first booth area 21 based on the detection result of the atmosphere detection sensor. The atmosphere control device may control the atmosphere of the second booth area 22 based on the detection result of the atmosphere detection sensor.

It is desirable that the oxygen concentration in the area covered by the booth 20 be 10 ppm or less, the moisture concentration be 10 ppm or less, and the temperature be in the range of 23±1°C. It is also desirable that the ozone concentration be in the range of 10 ppb or less.

When the atmosphere of the first booth area 21 and the second booth area 22 are controlled by a single atmosphere control device based on the detection results of an atmosphere detection sensor arranged in the first booth area 21, the control is based on information from the first booth area 21. In this case, the temperature of the first booth area 21 can be controlled within a range of, for example, 23±0.5°C, while the temperature variation of the second booth area 22 may be greater than that of the first booth area 21. However, since the second booth area 22 is an area used during maintenance, the temperature variation of the second booth area 22 may be greater.

On the other hand, the atmosphere in the first booth area 21, particularly in the area where the inkjet head 1 is located, has the greatest impact on the quality of the printed object. Therefore, it is desirable to strictly control the oxygen concentration, moisture concentration, ozone concentration, and air conditioning temperature around the inkjet head 1. Therefore, it is preferable to place the atmosphere detection sensor on the inkjet head 1 or in the vicinity of the inkjet head 1.

When the surface of the printing object is modified using a plasma unit, ozone may be generated. Therefore, when a plasma unit is provided, it is preferable to provide an ozone concentration sensor and to adopt a structure that makes it easy to exhaust gas around the plasma unit. An example of such a structure is to place an air vent in a portion of the booth 20 close to the plasma unit in order to suck gas from around the plasma unit or to supply nitrogen gas or CDA to the area around the plasma unit.

In this embodiment, there is no partition such as a wall at the boundary between the first booth area 21 and the second booth area 22. However, there may be a partition at the boundary between the first booth area 21 and the second booth area 22. That is, the booth 20 may be equipped with a partition. An openable and closable door or curtain, etc., may be used as the partition. By providing a partition, it is possible to manage the atmosphere of the first booth area 21 where printing is performed, or the atmosphere of the second booth area 22 where maintenance is performed, with the minimum necessary energy.

The supply of nitrogen or CDA to the first booth area 21 or the second booth area 22 by the atmosphere control device is performed through a filter from either or both of the top and side of the booth 20. In addition, the recovery of gas from the first booth area 21 or the second booth area 22 by the atmosphere control device is performed from either or both of the bottom and side of the booth 20. A portion of the nitrogen or CDA recovered from inside the booth 20 through the solvent trap is supplied again to the booth area after its purity has been adjusted. Note that a portion of the nitrogen or CDA may be exhausted through the solvent trap.

The atmospheric control device may also supply only newly generated nitrogen or CDA to the area covered by the booth 20, or may supply a mixture of gas recovered from the booth 20 and newly generated nitrogen or CDA.

The area covering the first booth area 21 of the booth 20 may have an opening (not shown) for removing the substrate to be printed. The area covering the second booth area 22 of the booth 20 may have an opening (not shown) for removing the inkjet head 1 and an opening (not shown) for removing the ink supply units 6, 7, and 8. The area covering the second booth area 22 of the booth 20 may have a glove provided so that the surface of the inkjet head 1 can be maintained by hand.

The above configuration makes it possible to control the atmosphere in each booth area with minimal energy consumption.

(Embodiment 2)
A second embodiment will be described with reference to Figures 5 to 7. The inkjet printing apparatus 100 shown in Figure 5 differs from the inkjet printing apparatus 100 shown in Figure 2 in that the shape of the booth 20 is different. Specifically, the booth 20 covers a third booth area 23 (an example of a maintenance-side booth area) that has a smaller volume than the second booth area 22. Figure 6 shows a cross section taken along line CC in Figure 5, and Figure 7 shows a cross section taken along line DD in Figure 5. Items that are not described in this embodiment are the same as those in the first embodiment.

The third booth area 23 is an area whose underside is defined by a surface that does not interfere with the inkjet head 1 and the members that move with the inkjet head 1 when the inkjet head 1 is moved to an area for maintenance of the inkjet head 1. Examples of surfaces that do not interfere with the inkjet head 1 and the members that move with the inkjet head 1 include surfaces that contact the underside of these moving members, or surfaces that are located a margin (e.g., 0.5 mm or more) below the trajectory drawn by the lower ends of these moving members. Alternatively, examples of surfaces that are located between the lower end of the inkjet head 1 and the upper surface of the stage 2 in the vertical direction include a surface that is located between the lower end of the inkjet head 1 and the upper surface of the stage 2.

By making the third booth area 23 an area with such a small volume, it is possible to reduce the amount of nitrogen or CDA required.

In addition, in this embodiment, a wiping unit 9 is provided in the booth 20 at a portion of the position that defines the lower surface of the third booth area 23. The wiping unit 9 is disposed in a position that is directly below the inkjet head 1 when the inkjet head 1 is located in the third booth area 23. The wiping unit 9 sucks the inkjet head 1 from below during maintenance of the inkjet head 1. The wiping unit 9 may be openable and closable to perform maintenance on the inkjet head 1.

(Embodiment 3)
A third embodiment will be described with reference to Figures 8 to 10. The inkjet printing apparatus 100 shown in Figure 8 is different from the inkjet printing apparatus 100 shown in Figure 5 in that the shape of the booth 20 is different. Specifically, the booth 20 covers a fourth booth area 24 (an example of a printing side booth area) whose volume is smaller than the first booth area 21. Figure 9 shows an E-E cross section of Figure 8, and Figure 10 shows an F-F cross section of Figure 8. Items that are not described in this embodiment are similar to those in the previously described embodiments.

The fourth booth area 24 is an area whose underside is defined by surfaces that do not interfere with the stage 2 and the members that move with the stage 2 during printing. Note that surfaces that do not interfere with the stage 2 and the members that move with the stage 2 include, for example, surfaces that contact these moving members on their undersides, or surfaces that are located a margin (e.g., 0.5 mm or more) below the trajectory drawn by the bottom ends of these moving members. Alternatively, surfaces that are located between the bottom end of the stage 2 and the top end of the frame 32 in the vertical direction include.

By making the fourth booth area 24 an area with such a small volume, it is possible to reduce the amount of nitrogen or CDA required.

(Embodiment 4)
The fourth embodiment will be described with reference to Figs. 11 to 13. The inkjet printing apparatus 100 shown in Fig. 11 is different from the inkjet printing apparatus 100 shown in Fig. 8 in that the shape of the booth 20 is different. Specifically, the booth 20 covers a fifth booth area 25 (an example of a printing side booth area), a sixth booth area 26 (an example of a printing side booth area), and a seventh booth area 27 (an example of a printing side booth area), whose total volume is smaller than that of the fourth booth area 24. Fig. 12 shows a cross section GG in Fig. 11, and Fig. 13 shows a cross section HH in Fig. 11. In Fig. 11, the dotted line areas represent the ranges of the third booth area 23, the fifth booth area 25, the sixth booth area 26, and the seventh booth area 27. Items not described in this embodiment are the same as those in the previously described embodiment.

The fifth booth area 25 surrounds the gantry 41, and the inkjet head 1 and inspection unit section 4 arranged on the gantry 41. In other words, the fifth booth area 25 is an area that surrounds members that cannot be moved by the stage driving section during printing. The bottom surface of the fifth booth area 25 can be the same surface as the bottom surface of the fourth booth area in embodiment 3.

The sixth booth area 26 is an area whose upper and lower surfaces are defined by surfaces that do not interfere with the stage 2 and the members that move with the stage 2 during printing. Note that surfaces that do not interfere with the stage 2 and the members that move with the stage 2 include, for example, surfaces that contact these moving members on the upper or lower side of these moving members, or surfaces that are located above or below the trajectory drawn by the upper or lower ends of these moving members by a margin (e.g., 0.5 mm or more). Note that the lower surface of the sixth booth area 26 can be the same surface as the lower surface of the fourth booth area in embodiment 3.

The seventh booth area 27 is an area whose upper and lower surfaces are defined by surfaces that do not interfere with the stage 2 and the members that move with the stage 2 during printing (including the alignment portion of the substrate, not shown). Note that surfaces that do not interfere with the stage 2 and the members that move with the stage 2 include, for example, surfaces that contact these moving members on the upper or lower side of these moving members, or surfaces that are located above or below the trajectory drawn by the upper or lower ends of these moving members by a margin (for example, 0.5 mm or more). Note that the lower surface of the seventh booth area 27 can be the same surface as the lower surface of the fourth booth area in embodiment 3.

By making the fifth booth area 25, the sixth booth area 26 and the seventh booth area 27 into areas with such small volumes, it is possible to further reduce the amount of nitrogen or CDA required.

If the volume of the area surrounding the moving stage 2 is reduced as in this embodiment, when the stage 2 moves, the mist caused by the ink ejected from the inkjet head 1 hits the inner surface of the booth 20, particularly the inner surface covering the sixth booth area 26 and the seventh booth area 27, and the mist is likely to adhere to the printing object. Therefore, a suction mechanism for sucking gas from the area covered by the booth 20 may be provided at both ends or either end of the sixth booth area 26 and the seventh booth area 27. In addition, the end of the sixth booth area 26 and the end of the seventh booth area 27 may be connected by a duct device that allows ventilation, so that the gas in the sixth booth area 26 moves to the seventh booth area 27 via the duct device as the stage 2 moves. By taking these measures, it is possible to prevent gas with a high mist concentration from stagnation, and ultimately to prevent the mist from adhering to the printing object.

In addition, by measuring the position of the stage 2 with a laser interferometer and controlling the stage driving unit based on the measurement results, it is possible to achieve high-precision position control of the stage 2. However, if the concentration of the mist described above increases, there is a risk that the measurement by the laser interferometer cannot be performed accurately. Furthermore, if gas fluctuations occur, the measurement cannot be performed accurately. In order to prevent such a situation, it is preferable to provide a gas supply mechanism that supplies gas such as nitrogen or CDA from outside the booth 20 to the path of the laser interferometer. This makes it possible to generate a uniform flow of gas and ensure the accuracy of the laser interferometer in a stable manner. It is preferable to supply nitrogen or CDA to the path of the laser interferometer from above or the side. It is also preferable to supply it from multiple locations at regular intervals.

(Embodiment 5)
A fifth embodiment will be described with reference to Figures 14 and 15. The inkjet printing apparatus 100 shown in Figure 14 differs from the inkjet printing apparatus 100 shown in Figures 11 to 13 in that it includes a volume variable unit 31. Figure 14 is a view corresponding to Figure 12. Matters not described in this embodiment are similar to those in the previously described embodiments.

The volume variable unit 31 is a member, such as a balloon, that can change its own volume by inflating and deflating, and is placed, for example, in the third booth area 23. As shown in FIG. 14, when the volume of the volume variable unit 31 increases, the volume of the third booth area 23 decreases accordingly. In other words, by placing the volume variable unit 31 within the area covered by the booth 20, it is possible to reduce the required amount of nitrogen or CDA.

On the other hand, by reducing the volume of the volume variable unit 31 as shown in FIG. 15, it is possible to prevent interference with these components when the inkjet head 1, etc., moves.

The location where the volume variable unit 31 is installed may be, for example, a location where one end is in contact with the ink supply unit 6, or a location away from the ink supply unit 6.

When the inkjet head 1 moves to the stage 2 (Figure 15), the volume of the volume variable unit 31 increases. This volume variable unit 31 may be in contact with the ink supply unit 6 installed next to the inkjet head 1, or may be separated from it.

The variable volume unit 31 in the third booth area 23 reduces the volume, minimizing the amount of nitrogen or CDA used and reducing running costs.

The volume variable unit 31 may be disposed in a sub-area where the stage 2 moves, such as the sixth booth area 26 or the seventh booth area 27. The volume variable unit 31 may also be configured to expand and contract, i.e., increase and decrease in volume, along with the movement of a moving member, such as the inkjet head 1 or the stage 2.

A small hole may also be provided in a part of the volume variable unit 31. If such a hole is provided, when the volume of the volume variable unit 31 becomes smaller, the gas present in the volume variable unit 31 can be ejected outside the volume variable unit 31 and into the area covered by the booth 20. This allows a downflow to be achieved within the area covered by the booth 20, thereby realizing the circulation of gas and preventing the retention of particles (derived from the above-mentioned mist or other dust, etc.).

Note that this embodiment is based on embodiment 4, but it goes without saying that the volume variable unit 31 may be applied to embodiments other than embodiment 4.

(Embodiment 6)
A sixth embodiment will be described with reference to Figures 16 and 17. Items that are not described in this embodiment are similar to those in the previously described embodiments.

Figure 16 shows the inkjet printing apparatus 100 according to this embodiment. Also, Figure 17 shows the inkjet printing apparatus 100 with the booth 20 removed. The booth 20 covers a single area, the eighth booth area.

The inkjet printing device 100 according to this embodiment includes a driving gantry 42. The driving gantry 42 is equipped with an inkjet head 1 and an ink supply unit 6. During inkjet coating, the stage 2 does not move, and the driving gantry 42 moves in the direction of the arrow 3. The position of the driving gantry 42 is controlled based on position information obtained by an encoder or laser interferometer attached to the driving gantry 42. According to this embodiment, the driving gantry 42 is configured to move, so the footprint of the inkjet printing device 100 can be reduced.

The eighth booth area 28 is an area whose upper and lower surfaces are defined by surfaces that do not interfere with the drive gantry 42 and the members that move with the drive gantry 42 during printing. Note that surfaces that do not interfere with the drive gantry 42 and the members that move with the drive gantry 42 include, for example, surfaces that contact these moving members on the upper or lower side of these moving members, or surfaces that are located above or below the trajectory drawn by the upper or lower ends of these moving members by a margin (e.g., 0.5 mm or more). An example of the lower surface of the eighth booth area 28 is a surface that is located between the lower end of the drive gantry 42 and the upper end of the frame 32 in the vertical direction.

By reducing the space covered by the booth 20, it is possible to reduce the initial investment cost of the booth area and reduce the running of nitrogen or CDA.

In this embodiment, as in the configuration described in embodiment 4, a mechanism for sucking in gas from the area covered by the booth 20 may be provided at both ends in the direction in which the drive gantry 42 moves. In addition, both ends of the eighth booth area 28 may be connected by a duct device, so that gas at one end of the eighth booth area 28 moves to the other end of the eighth booth area 28 via the duct device as the stage 2 moves. By taking these measures, it is possible to prevent gas with a high mist concentration from stagnating, and ultimately to prevent the mist from adhering to the printing target.

In each of the embodiments described so far, the booth 20 may be configured integrally with a member other than the booth 20 that constitutes the inkjet printing device 100, such as the frame 32. By configuring it in this manner, the initial cost of constructing the inkjet printing device 100 can be reduced.

On the other hand, the booth 20 may be configured separately from the components other than the booth 20 that make up the inkjet printing device 100.

Figures 18 and 19 show a modified version of the second embodiment. That is, the booth 20 is supported by the fan support part 52 together with the fan 51, but is separated from the frame 32 and the like. Note that Figures 18 and 19 correspond to Figures 6 and 7.

By configuring it in this way, when a vibration source such as a fan 51 with a HEPA filter or a suction device is attached to the booth 20, it is possible to more reliably prevent vibrations from being transmitted to the inkjet head 1 or the stage 2. This makes it possible to reliably perform printing with higher resolution.

It goes without saying that the matters specifically described in each embodiment or variant can be applied to other embodiments as appropriate, regardless of the order in which they are described.

The present invention can be used in general printing devices, including inkjet printing devices as well as screen printing devices.

100 Inkjet printing device 1 Inkjet head 2 Stage 3, 5 Arrow (movement direction)
Reference Signs List 4: Inspection unit section 6, 7, 8: Ink supply unit 9: Wiping unit 11, 12, 13: Head group 20: Booth 21: First booth area 22: Second booth area 23: Third booth area 24: Fourth booth area 25: Fifth booth area 26: Sixth booth area 27: Seventh booth area 28: Eighth booth area 31: Volume variable unit 32: Frame 41: Gantry 42: Drive gantry 51: Fan 52: Fan support section

Claims (22)

Stage and
an inkjet head that moves relative to the stage;
a booth that covers the stage and the inkjet head and is divided into a plurality of sub-areas by openable and closable partitions ;
an atmosphere control device that controls the atmospheres of the plurality of sub-areas individually;
Equipped with
the plurality of sub-areas include a printing side booth area in which the inkjet head is located when applying ink to a print target, and a maintenance side booth area in which the inkjet head is located when maintenance is performed,
The atmosphere control device controls the atmosphere of one sub-area based on a sensor disposed in the other sub-area.
Inkjet printing device. Stage and
an inkjet head that moves relative to the stage;
a booth that covers the stage and the inkjet head and is divided into a plurality of sub-areas by openable and closable partitions ;
an atmosphere control device that controls the atmospheres of the plurality of sub-areas individually;
A suction mechanism that sucks gas from within the sub-area;
Equipped with
the plurality of sub-areas include a printing side booth area in which the inkjet head is located when applying ink to a print target, and a maintenance side booth area in which the inkjet head is located when maintenance is performed,
The suction mechanism suctions gas from a sub-area where the stage moves when the stage moves.
Inkjet printing device. Stage and
an inkjet head that moves relative to the stage;
a booth that covers the stage and the inkjet head and is divided into a plurality of sub-areas by openable and closable partitions ;
an atmosphere control device that controls the atmospheres of the plurality of sub-areas individually;
Equipped with
the plurality of sub-areas include a printing side booth area in which the inkjet head is located when applying ink to a print target, and a maintenance side booth area in which the inkjet head is located when maintenance is performed,
The edge of one sub-area is connected to the edge of another sub-area by a duct system.
Inkjet printing device. Stage and
an inkjet head that moves relative to the stage;
a booth that covers the stage and the inkjet head and is divided into a plurality of sub-areas by openable and closable partitions ;
an atmosphere control device that controls the atmospheres of the plurality of sub-areas individually;
Equipped with
the plurality of sub-areas include a printing side booth area in which the inkjet head is located when applying ink to a print target, and a maintenance side booth area in which the inkjet head is located when maintenance is performed,
The ends of the two sub-areas through which the stage moves are connected by a duct system.
Inkjet printing device. Stage and
an inkjet head that moves relative to the stage;
a booth covering the stage and the inkjet head;
an atmosphere control device for controlling the atmosphere of an area covered by the booth;
Equipped with
The booth divides the area into a plurality of sub-areas by openable and closable partitions ;
the plurality of sub-areas include a printing side booth area, which is an area where the inkjet head is located when applying ink to a print target, and a maintenance side booth area, which is an area where the inkjet head is located when maintenance is performed;
a laser interferometer for detecting a position of the stage; and a gas supply mechanism for supplying gas toward a path of the laser interferometer.
Inkjet printing device. The atmosphere control device controls an atmosphere for each of the plurality of sub-areas.
6. The inkjet printing apparatus of claim 5 . Further comprising an atmosphere detection sensor disposed in the printing booth area,
The atmosphere control device controls the atmosphere of at least one of the plurality of sub-areas based on a detection result of the atmosphere detection sensor.
6. The inkjet printing apparatus of claim 5 . the atmosphere detection sensor includes at least one of an oxygen concentration sensor, a nitrogen concentration sensor, an ozone concentration sensor, a moisture concentration sensor, and a temperature sensor;
The atmosphere control device individually adjusts at least one of the nitrogen flow rate, the nitrogen concentration, the clean dry air flow rate, and the clean dry air purity supplied to the area.
8. The inkjet printing apparatus of claim 7 . The atmosphere control device controls the atmosphere in the printing booth area.
9. The inkjet printing apparatus according to claim 7 or 8 . A suction mechanism for suctioning gas from within the printing booth area is further provided,
The stage is configured to be movable in a predetermined direction within the printing booth area,
the suction mechanism is disposed at an end of the printing side booth area in the predetermined direction;
10. An inkjet printing apparatus according to claim 5 or any one of claims 7 to 9 . The booth further includes a duct device that connects both ends of the printing side booth area in a ventilated manner.
11. An inkjet printing apparatus according to claim 5 or any one of claims 7 to 10 . Further comprising a stage drive unit that moves the stage.
12. An inkjet printing apparatus according to claim 5 or any one of claims 7 to 11 . The printing booth area has a lower surface defined by a surface that does not interfere with a stage and a member that moves together with the stage during printing.
The inkjet printing apparatus of claim 12 . a bottom surface of the maintenance-side booth area is defined by a surface that does not interfere with the inkjet head and a member that moves together with the inkjet head when the inkjet head is moved to the maintenance-side booth area;
14. An inkjet printing apparatus according to claim 5 or any one of claims 7 to 13 . A partition is provided between the printing booth area and the maintenance booth area.
15. An inkjet printing apparatus according to claim 5 or any one of claims 7 to 14 . A wiping unit is disposed below the maintenance booth area.
16. An inkjet printing apparatus according to claim 5 or any one of claims 7 to 15 . further comprising a drive gantry supporting the inkjet head.
6. The inkjet printing apparatus according to claim 1. Stage and
an inkjet head that moves relative to the stage;
a booth covering the stage and the inkjet head;
an atmosphere control device for controlling the atmosphere of an area covered by the booth;
Further comprising a volume variable unit disposed in the area,
Equipped with
Inkjet printing device. the volume variable unit has a hole for ejecting gas present inside the volume variable unit when the volume of the volume variable unit becomes smaller;
20. The inkjet printing apparatus of claim 18 . the booth is provided with at least one of an opening for inserting and removing the inkjet head and an opening for inserting and removing a printing object when replacing the inkjet head ;
20. An inkjet printing apparatus according to any preceding claim. a frame supporting the stage;
The booth is integrally formed with the frame.
21. An inkjet printing apparatus according to any preceding claim. a frame supporting the stage;
The booth is equipped with a fan to supply gas to the area;
The booth is configured separately from the frame.
6. The inkjet printing apparatus of claim 5 .