JPH04144937A - Sealing material - Google Patents
Sealing materialInfo
- Publication number
- JPH04144937A JPH04144937A JP26587390A JP26587390A JPH04144937A JP H04144937 A JPH04144937 A JP H04144937A JP 26587390 A JP26587390 A JP 26587390A JP 26587390 A JP26587390 A JP 26587390A JP H04144937 A JPH04144937 A JP H04144937A
- Authority
- JP
- Japan
- Prior art keywords
- sealing material
- pbo
- glass
- low
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003566 sealing material Substances 0.000 title claims abstract description 19
- 239000011521 glass Substances 0.000 claims abstract description 31
- 239000000843 powder Substances 0.000 claims abstract description 25
- 239000000945 filler Substances 0.000 claims abstract description 20
- 239000006104 solid solution Substances 0.000 claims abstract description 11
- 239000000203 mixture Substances 0.000 claims abstract description 9
- GNTDGMZSJNCJKK-UHFFFAOYSA-N Vanadium(V) oxide Inorganic materials O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 abstract description 15
- 238000007789 sealing Methods 0.000 abstract description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 10
- 239000000919 ceramic Substances 0.000 abstract description 10
- 238000002156 mixing Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 3
- 229910052593 corundum Inorganic materials 0.000 abstract description 2
- LAJZODKXOMJMPK-UHFFFAOYSA-N tellurium dioxide Chemical compound O=[Te]=O LAJZODKXOMJMPK-UHFFFAOYSA-N 0.000 abstract description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract description 2
- 229910003069 TeO2 Inorganic materials 0.000 abstract 1
- 238000004806 packaging method and process Methods 0.000 abstract 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 229910020001 NaZr2(PO4)3 Inorganic materials 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910052878 cordierite Inorganic materials 0.000 description 2
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000174 eucryptite Inorganic materials 0.000 description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 229910052844 willemite Inorganic materials 0.000 description 2
- 229910052845 zircon Inorganic materials 0.000 description 2
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 2
- 239000004254 Ammonium phosphate Substances 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910015427 Mo2O3 Inorganic materials 0.000 description 1
- 229910019695 Nb2O6 Inorganic materials 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 229910000148 ammonium phosphate Inorganic materials 0.000 description 1
- 235000019289 ammonium phosphates Nutrition 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- KRFJLUBVMFXRPN-UHFFFAOYSA-N cuprous oxide Chemical compound [O-2].[Cu+].[Cu+] KRFJLUBVMFXRPN-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004031 devitrification Methods 0.000 description 1
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- 229910052808 lithium carbonate Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 235000011007 phosphoric acid Nutrition 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 235000014692 zinc oxide Nutrition 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Glass Compositions (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、封着材料に関し、より具体的にはアルミナを
使用したセラミックパッケージの気密封着に好適な封着
材料に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a sealing material, and more specifically to a sealing material suitable for hermetically sealing a ceramic package using alumina.
［従来の技術］
従来よりセラミックパッケージの気密封着に使用する封
着材料としては、ＰｂＯ−８２０３系の低融点ガラスに
ウイレマイト、コージェライト、ジルコン、酸化すず、
β−ユークリプタイト等の低膨張セラミック粉末のフィ
ラーを混合したものが使用されている。[Prior Art] Sealing materials conventionally used for hermetically sealing ceramic packages include PbO-8203-based low melting point glass, willemite, cordierite, zircon, tin oxide,
A mixture of a filler of low expansion ceramic powder such as β-eucryptite is used.
近年、セラミックパッケージに集積度の高いＩＣや特殊
な水晶振動子等の熱に敏感な素子を搭載することがあり
、この゛ためセラミックパッケージの封着材料の封着温
度をより下げることが強く望まれているが、ＰｂＯ−８
２０ｓ系の低融点ガラスを用いた封着材料ではこの要求
に応えることが困難である。In recent years, ceramic packages are sometimes equipped with heat-sensitive elements such as highly integrated ICs and special crystal oscillators.Therefore, there is a strong desire to lower the sealing temperature of the sealing material for ceramic packages. Although it is rare, PbO-8
It is difficult to meet this requirement with a sealing material using 20S type low melting point glass.
このような事情からＰｂＯ−８２０３系ガラスよりも低
い温度で封着可能な低融点ガラスとしてｐｂｏ −ｖ２
０５系ガラスが開発され、この系のガラスに低膨張セラ
ミック粉末のフィラーを混合してなる封着材料が提案さ
れている。Due to these circumstances, pbo-v2 is a low-melting glass that can be sealed at a lower temperature than PbO-8203 glass.
05 series glass has been developed, and a sealing material made by mixing this glass with a filler of low expansion ceramic powder has been proposed.
［発明が解決しようとする問題点コ
先記したようにｐｂｏ−ｖ２ｏＩｓ系ガラスは、低い温
度で封着可能であるが、熱膨張係数をアルミナのそれ（
約７０Ｘ １０−７／ ”Ｃ）に近似させる目的で、こ
のガラスに対して通常のフィラー、すなわちウイレマイ
ト、コージェライト、ジルコン、酸化すず、β−ユーク
リプタイト等の低膨張セラミック粉末のフィラーを混合
すると、熱膨張係数は低下するが、材料の流動性が著し
く損なわれ、低い温度で封着することが困難になるとい
う問題が生じる。[Problems to be solved by the invention] As mentioned earlier, pbo-v2oIs glass can be sealed at low temperatures, but its thermal expansion coefficient is lower than that of alumina (
For the purpose of approximating approximately 70X 10-7/''C), ordinary fillers, such as fillers of low expansion ceramic powders such as willemite, cordierite, zircon, tin oxide, and β-eucryptite, are mixed with this glass. This causes a problem in that although the coefficient of thermal expansion decreases, the fluidity of the material is significantly impaired, making it difficult to seal at low temperatures.
本発明の目的は、Ｐｂ０−ｖ２０．系ガラスと低膨張セ
ラミック粉末のフィラーとからなり、熱膨張係数が低く
、且つ良好な流動性を有するため低い温度で封着するこ
とが可能な封着材料を提供することである。The object of the present invention is that Pb0-v20. It is an object of the present invention to provide a sealing material which is made of glass and a filler of low expansion ceramic powder, has a low coefficient of thermal expansion, and has good fluidity, so that it can be sealed at a low temperature.
口問題点を解決するための手段］
本発明者は、フィラーとして各種の低膨張材料を研究し
ていく中で、ＮａＺｒ２（ＰＯ４）３型固溶体がＰｂＯ
−Ｖ２Ｏ５系ガラスと相性が良く、これを粉末にしてｐ
ｂｏ−ｖ２ｏｅ５系ガラス粉末と混合した場合、良好な
流動性を示すことを見い出し、本発明を提案するに到っ
た。[Means for Solving Problems] While researching various low expansion materials as fillers, the present inventor found that NaZr2(PO4)3 type solid solution was PbO
-Compatible with V2O5 glass, which can be made into powder.
It was discovered that good fluidity is exhibited when mixed with bo-v2oe5-based glass powder, and the present invention was proposed.
すなわち本発明の封着材料は、Ｐｂ０−Ｖ２Ｏ５系ガラ
ス粉末とＮａＺｒ２（ＰＯ４）３型固溶体粉末のフィラ
ーとからなることを特徴とする。That is, the sealing material of the present invention is characterized by comprising a Pb0-V2O5 glass powder and a filler of NaZr2(PO4)3 type solid solution powder.
また本発明の封着材料のｐｂｏ −Ｖ２Ｏ５系ガラス粉
末は、重量百分率でＰｂＯ２０〜５０％、Ｖ２Ｃｈ
２（１〜５０％、ＴｅＯ□５〜４０％、Ａ１□０３０〜
８％の組成を有することを特徴とする。Furthermore, the pbo-V2O5 glass powder of the sealing material of the present invention has a weight percentage of PbO20 to 50%, V2Ch
2 (1~50%, TeO□5~40%, A1□030~
It is characterized by having a composition of 8%.
［作用コ
本発明で使用するＮａＺｒ２（ＰＯ４）＋堅固溶体は、
次の一般式で表される物質であり、Ｘは１価に相当する
元素よりなり、Ｙは４価に相当する元素よりなり、また
Ｚは５価に相当する元素よりなる。[Function] The NaZr2 (PO4) + solid solution used in the present invention is
It is a substance represented by the following general formula, where X is an element corresponding to a monovalent element, Y is an element corresponding to a tetravalent element, and Z is an element corresponding to a pentavalent element.
Ｘ Ｙ２ Ｚ３０１２
Ｘ ＝ Ｌｉ、Ｎａ、に、 ’／２Ｍｇ、 ”／２Ｃａ
、’／２Ｓｒ、’／４ＺｒＹ ＝ Ｚｒ、Ｔｉ、Ｓｎ、
Ｎｂ−Ｎａ、Ｔａ−Ｎａ、Ｖ−ＮａＺ ＝ Ｐ、Ｓｉ＋
Ｎａ
この物質は、広範囲に固溶体を形成し、熱膨張係数が低
いという特性を有している。X Y2 Z3012 X = Li, Na, '/2Mg, '/2Ca
,'/2Sr,'/4ZrY = Zr, Ti, Sn,
Nb-Na, Ta-Na, V-NaZ = P, Si+
Na This material has the characteristics of forming a solid solution over a wide range and having a low coefficient of thermal expansion.
また本発明で使用するＰｂＯＶ２０ａ系ガラス粉末の成
分を先記のように限定した理由は以下のとおりである。Further, the reason why the components of the PbOV20a-based glass powder used in the present invention are limited as described above is as follows.
ＰｂＯが２０％より少ないと３７０℃以下の温度でガラ
スが充分に流動しなくなり、５５％より多いと封着時に
結晶化を起こし、流動しなくなる。If PbO is less than 20%, the glass will not flow sufficiently at temperatures below 370° C., and if it is more than 55%, crystallization will occur during sealing and the glass will not flow.
Ｖ２Ｏ５が、２０％より少ないとガラス化が困難となり
、５５％より多いと封着時に結晶化を起こし、流動しな
くなる。If V2O5 is less than 20%, vitrification will be difficult, and if it is more than 55%, crystallization will occur during sealing and will not flow.
Ｔｅ０９が５％より少ないと封着時に結晶化を起こし、
流動しなくなり、４０％より多いと溶融ガラスの成形時
に失透する。If Te09 is less than 5%, crystallization occurs during sealing,
If the amount exceeds 40%, the molten glass will become devitrified during molding.
Ａｌ２Ｏ３は、失透防止の効果があるが、８％より多い
とガラスの粘度が高くなり、３７０℃以下の温度で十分
に流動しなくなる。Al2O3 has the effect of preventing devitrification, but if it exceeds 8%, the viscosity of the glass becomes high and it does not flow sufficiently at temperatures below 370°C.
尚、上記成分以外にも例えば１０％以下のＺｎＯ１！１
１２０３ 、Ｐ２Ｏ５や５％以下のＣｕ２Ｏ、ＷＯ３、
Ｂ２Ｏ３，５１０２、Ｍｏ２Ｏ３、Ｎｂ２Ｏ６％ Ｆｅ
２Ｏ３、ＺｒＯ２、ＳｒＯ、ＢａＯを含育させることが
可能である。In addition to the above components, for example, 10% or less of ZnO1!1
1203, P2O5, 5% or less Cu2O, WO3,
B2O3,5102, Mo2O3, Nb2O6% Fe
It is possible to contain 2O3, ZrO2, SrO, and BaO.
［実施例コ 以下、本発明の封着材料を実施例に基づいて説明する。[Example code] Hereinafter, the sealing material of the present invention will be explained based on Examples.
第１表は、本発明のＰｂＯ−Ｖ２０５系ガラス粉末を示
すものである。Table 1 shows the PbO-V205 glass powder of the present invention.
第１表に示したガラス粉末は、鉛丹、五酸化バナジウム
、二酸化テルル、亜鉛華、アルミナ、五酸化ニオブを表
記の組成になるように調合し、白金ルツボに入れ、電気
炉において８００ ’Ｃで１時間溶融した後、薄板状に
成形し、次いでこの成形物をボールミルで粉砕し、２０
０メツシユ篩を通過させることによって作製した。The glass powder shown in Table 1 is prepared by mixing lead red, vanadium pentoxide, tellurium dioxide, zinc white, alumina, and niobium pentoxide to the indicated composition, placing it in a platinum crucible, and heating it in an electric furnace at 80'C. After melting for 1 hour at
0 mesh sieve.
第２表は、本発明のＮａＺｒ２（ＰＯ４）３型固溶体粉
末のフィラーを示すものである。Table 2 shows the filler of the NaZr2(PO4)3 type solid solution powder of the present invention.
以下余白
第
表
第２表において試料Ｎｏ 、７のフィラーは、試料Ｎｏ
。In Table 2 below, the filler for sample No. 7 is sample No.
.
ｌのフィラーのＺｒの１．０を１．０（Ｎｂ−Ｎａ）で
置換した組成であり、試料ＮＯ１９のフィラーは試料Ｎ
ｏ、１のフィラーのＰの０．２を０．２（Ｓｉ＋Ｎａ）
で置換した組成である。また試料Ｎｏ、１１のフィラー
は、試料Ｎｏ 、７のフィラーのＮｂの０．５をＴａの
０．５で置換した組成である。The filler of sample No. 19 has a composition in which 1.0 of Zr in the filler of sample No. 1 is replaced with 1.0 (Nb-Na).
o, 0.2 of P of filler 1 is 0.2 (Si+Na)
This is the composition replaced with . Further, the filler of sample No. 11 has a composition in which 0.5 of Nb in the filler of sample No. 7 is replaced with 0.5 of Ta.
第２表の各試料は、原料として炭酸ソーダ、炭酸リチウ
ム、炭酸カリ、炭酸カルシウム、炭酸ストロンチウム、
酸化マグネシウム、ジルコニア、チタニア、シリカ、酸
化すず、五酸化ニオブ、五酸化タンタル、五酸化バナジ
ウム、リン酸アンモニウム、正リン酸よりなるバッチを
湿式混合した後、１３００〜１５００℃で１６時間焼成
し、次いでこの焼成品を粉砕後、２０Ｇメツシユ篩を通
過させて平均粒径を約５ミクロンにしたものである。Each sample in Table 2 uses soda carbonate, lithium carbonate, potassium carbonate, calcium carbonate, strontium carbonate,
After wet mixing a batch consisting of magnesium oxide, zirconia, titania, silica, tin oxide, niobium pentoxide, tantalum pentoxide, vanadium pentoxide, ammonium phosphate, and orthophosphoric acid, calcining at 1300 to 1500 ° C. for 16 hours, Next, this fired product was pulverized and passed through a 20G mesh sieve to have an average particle size of about 5 microns.
第３表は、第１表のＰｂＯＶ２Ｏ５系ガラス粉末と第２
表のフィラーとを混合してなる封着材料を示すものであ
る。Table 3 shows the PbOV2O5 glass powder in Table 1 and the PbOV2O5 glass powder in Table 1.
This shows a sealing material mixed with the filler shown in the table.
以下余白
第３表に示した各試料は、ガラス粉末とフィラーとを表
に示す割合に混合したものであり、熱膨張係数が７４〜
７９Ｘ １０−’／”Ｃとアルミナのそれに近似してお
り、且つ封着温度も３７０〜３９０℃と低い値を示した
。Each sample shown in Table 3 below is a mixture of glass powder and filler in the ratio shown in the table, and has a coefficient of thermal expansion of 74 to 74.
79X 10-'/''C, which is close to that of alumina, and the sealing temperature also showed a low value of 370 to 390C.
尚、表中の熱膨張係数は、各試料から所望の大きさの焼
結体を作製した後、それを加工して直径４ｍｍ 、長さ
５０＋＋＋ａの円柱状の成形物を作製し、デイラドメー
ター（Ｄｉｌａｔｏｍｅｔｅｒ ）によって測定した。The coefficient of thermal expansion in the table is determined by producing a sintered body of the desired size from each sample, processing it to produce a cylindrical molded product with a diameter of 4 mm and a length of 50 +++ a, and measuring it with a deiradometer. (Dilatometer).
また封着温度は、各試料から外径２０１１１１ｈ高さ５
ｍｍのボタンを作製した後、このボタンを加熱して流動
させ、その外径が２２ｍｍになった温度を示したもので
ある。In addition, the sealing temperature was determined from each sample at an outer diameter of 201111h and a height of 5.
After producing a button with a diameter of 22 mm, the button was heated to flow, and the temperature at which the outer diameter of the button became 22 mm is shown.
［発明の効果コ
以上のように本発明の封着材料は、Ｐｂ０−ｖ２０５系
ガラスと、この系のガラスと相性の良いＮａＺｒ２（Ｐ
Ｏ４）３型固溶体粉末のフィラーとからなり、良好な流
動性を有するため封着温度が低く、且つ熱膨張係数も低
く、アルミナのそれに近似しているため、アルミナを使
用したセラミックパッケージの封着材料として好適であ
る。[Effects of the Invention] As described above, the sealing material of the present invention contains Pb0-v205 glass and NaZr2 (Pb0-v205 glass), which is compatible with this glass type.
O4) It is composed of filler of type 3 solid solution powder and has good fluidity, so the sealing temperature is low and the coefficient of thermal expansion is low, which is similar to that of alumina, so it is suitable for sealing ceramic packages using alumina. Suitable as a material.
Claims (2)
２（ＰＯ＿４）＿３型固溶体粉末のフィラーとからなる
ことを特徴とする封着材料。(1) PbO-V_2O_5-based glass powder and NaZr_
2(PO_4)_3 type solid solution powder filler.
ＰｂＯ２０〜５５％、Ｖ＿２Ｏ＿５２０〜５５％、Ｔｅ
Ｏ＿２５〜４０％、Ａｌ＿２Ｏ＿３０〜８％の組成を有
することを特徴とする特許請求の範囲第１項記載の封着
材料。(2) PbO-V_2O_5 glass has a weight percentage of PbO20-55%, V_2O_520-55%, Te
The sealing material according to claim 1, having a composition of O_25 to 40% and Al_2O_30 to 8%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26587390A JPH04144937A (en) | 1990-10-02 | 1990-10-02 | Sealing material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26587390A JPH04144937A (en) | 1990-10-02 | 1990-10-02 | Sealing material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04144937A true JPH04144937A (en) | 1992-05-19 |
Family
ID=17423283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26587390A Pending JPH04144937A (en) | 1990-10-02 | 1990-10-02 | Sealing material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04144937A (en) |
-
1990
- 1990-10-02 JP JP26587390A patent/JPH04144937A/en active Pending
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