JPH05174348A - Magnetic head and manufacture thereof - Google Patents

Abstract

(57) [Summary] [Purpose] To prevent the flatness of the slider air floating surface from deteriorating due to bounce when the slider is cut, and to reduce the number of steps. [Structure] A shallow groove is provided outside the slider air floating surface 5, and a step 10 is formed on the side surface of the slider by cutting the groove. Therefore, the influence of the processing load and the surface stress at the time of cutting is absorbed in step 10, the springing on the slider air floating surface does not occur, and the number of processing steps for a single magnetic head can be significantly reduced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an external storage device for a computer, mainly to a magnetic head used in a fixed magnetic disk device and a method for manufacturing the same.

[0002]

2. Description of the Related Art In recent years, the recording density has been remarkably improved in a magnetic disk device which is a computer external storage device, and as a means for achieving a high recording density, zone bit recording is used for a magnetic head together with further lower flying height. Therefore, it is required to reduce the difference in flying height between the inner and outer circumferences of the magnetic disk. Therefore, a magnetic head called a negative pressure slider type magnetic head or a TPC slider, which forms a slider pattern by using a photolithography technique, has been developed. FIG. 5 is a perspective view of a negative pressure slider type head in which a magnetic gap is held by two magnetic core halves as a conventional example. As shown in FIG. 5, in the conventional negative pressure slider type magnetic head, the slider side surfaces 8a and 8b on the outside of the air floating surface 5 formed by using the photography technique are located outside the air floating surface 5 by several tens of μm. The surface has been polished by.
Further, FIG. 6 is a diagram illustrating a conventional manufacturing process. The conventional technique will be described below with reference to FIG. Figure 6
As shown in (a), the magnetic core halves 1a and 1b made of a ferromagnetic oxide are welded to the mold glass 3 via the magnetic gap 2 made of a non-magnetic material to form a bar having the magnetic gap. Thereafter, in order to regulate the gap depth to a predetermined size, the front surface 4 of the bar is ground and polished. Then, as shown in FIG. 6B, the air floating surface 5, the negative pressure generating portion 6, the track portion 7 and the like are formed by a method such as ion milling using a photolithography technique. After that, the slider is cut into individual pieces, but during the normal cutting process, due to the surface stress of the cut surface and the processing load, a flip-up phenomenon is observed in the vicinity of the cut surface, and the flatness of the air floating surface 5 is deteriorated. Therefore,
As shown in FIG. 6 (c), the cutting process is performed at a position where the splashing at the time of cutting does not affect the air floating surface 5, and then, as shown in FIG.
As shown in (d), the side surfaces 8a and 8b of the slider are polished so as to have a predetermined shape. As described above, in the case of the magnetic head in which the slider pattern is formed by using the photolithography technique, the final polishing step of the air floating surface 5 is performed by a method such as ion milling.
Since it is a process before forming the air floating surface and the like, it is necessary that the flatness of the air floating surface is not deteriorated in the subsequent processes. In order to ensure reliability when the slider is flying low, it is necessary to improve the flatness of the slider air floating surface, but during cutting, as described above, the flatness of the air floating surface is caused by the phenomenon of splashing near the cutting surface. Is getting worse. Therefore, separate the cutting position to a position where the bounce does not affect,
After that, the cut surface is polished so that it is contained in a predetermined shape.

[0003]

However, in the above-described manufacturing method, when the both sides of the magnetic head are polished one by one, the number of man-hours is very large because the magnetic head is attached to the jig. However, there was a problem that the cost increased. The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide a magnetic head and a method for manufacturing the same, which can reduce the man-hours without deteriorating the flatness of the air floating surface at the time of cutting.

[0004]

In order to achieve the above object, the present invention has a shape in which a step by machining is provided on the side surface of a slider, and when a cutting process is performed as a manufacturing method thereof, first, 30 A shallow groove having a depth of about 150 μm is processed using a resin bond or a resin bond type grindstone, and then the groove is cut to form a step on the side surface of the slider.

[0005]

Therefore, according to the present invention, the groove is first processed and then the inside of the groove is cut, so that one step is formed on the side surface of the slider. Therefore, the influence of the processing load and surface stress at the time of cutting the slider is absorbed by the step, and the jumping due to the cutting is eliminated. Further, the influence of the groove processing on the rebound is small because the groove depth is shallow and the load during processing is small. Therefore, there is no influence on the slider air floating surface due to the bounce. Therefore, it is possible to perform a cutting process that does not affect the air floating surface.

[0006]

1 is a perspective view of a negative pressure slider type magnetic head according to an embodiment of the present invention. Here, the magnetic head is a negative pressure slider type magnetic head in which a magnetic gap is held by two magnetic core halves as in the conventional example. As shown in FIG. 1, in the magnetic head according to the present invention, the outside of the air floating surface 5 formed by using a photography technique has a structure having a step 10 on the side surface of a slider formed by machining. FIG. 2 is a diagram showing a manufacturing process of the negative pressure slider according to the present invention. Similar to the conventional manufacturing method, FIG. 2 (a) shows a magnetic block having a magnetic gap 2 which is ground and polished so as to have a predetermined gap depth, and FIG. 2 (b) shows front polishing. By using a photography technique for the surface 4, the air floating surface 5, the negative pressure generating portion 6, and the track portion 7 are formed by a method such as ion milling.
Is formed. After that, before cutting into a single slider, as shown in FIG. 2 (c), resin-bonded or metal-resin-bonded # 1500 is attached to the outside of the air floating surface 5.
A groove 9 having a depth of about 30 to 50 μm is provided by using a grindstone of about # 3000. Then, as shown in FIG. 2D, the inside of the groove 9 is cut to form a slider alone. At this time, the slider side surface is formed with the slider side surface step 10, and the influence of the processing load at the time of cutting and the surface stress of the cut surface is absorbed in the slider side surface step 10. Therefore, the air floating surface does not jump up.

Next, a specific example of this embodiment will be described. FIG. 3 shows an example of how the groove ends are repelled when a groove having a depth of 100 μm is machined using a metal resin bond # 2000 grindstone. At that time, the range affected by the rebound due to groove processing is about 5 to 15 μm. Therefore, groove processing is 25 to 30 μm from the slider air floating surface.
If it is carried out at a certain position, the air floating surface will not jump up due to the influence of groove processing. In this embodiment, a groove having a depth of 100 μm is provided outside the air floating surface by 30 μm, and a groove having a depth of 5 μm from the air floating surface is provided.
Cutting was performed at a position outside 0 μm. FIG. 4 (a) shows the state of the slider air floating surface being splashed at that time. Also,
FIG. 4 (b) shows, as a comparison, the state of the jumping up when cutting was performed at a position 50 μm outside the air floating surface by a normal cutting method without groove processing. By comparing the two,
In the normal cutting method, the flatness is deteriorated in the range of about 90 μm on the air floating surface. However, it can be seen that the cutting method according to the present example does not deteriorate the flatness of the air floating surface due to the splashing at the time of cutting, and is effective as a cutting method for suppressing the bounce of the slider air floating surface. Therefore, it is not necessary to separate the cutting position to a position where the influence on the air floating surface does not occur, and then polish both cutting surfaces. The number of man-hours required for grooving is about 1/10 of the man-hour required for polishing both cut surfaces, and the man-hours can be significantly reduced. In this embodiment, the junction type negative pressure slider type magnetic head in which two magnetic core halves are glass-welded to form a magnetic gap has been described, but a magnetic pattern having a slider pattern is formed by using a photolithography technique. The same effect can be obtained with a composite type magnetic head, a thin film laminated magnetic head and a thin film head as long as they are heads.

[0008]

As is apparent from the above-described embodiment, the present invention eliminates the rising of the slider air floating surface at the time of cutting and prevents the flatness of the slider air floating surface from being deteriorated. Therefore, there is an effect that it is not necessary to intentionally separate the cutting position from the air floating surface, and the subsequent polishing process of the slider side surface can be eliminated to significantly reduce the number of steps.

[Brief description of drawings]

FIG. 1 is a perspective view of a negative pressure slider type magnetic head according to an embodiment of the present invention.

FIG. 2 is a diagram illustrating a manufacturing process of a negative pressure slider type magnetic head according to an embodiment of the present invention.

FIG. 3 is a diagram showing a result of measurement of bounce by groove processing.

FIG. 4 is a diagram showing a result of a bounce amount measured by the present invention and a normal cutting process.

FIG. 5 is a perspective view of a conventional negative pressure slider type magnetic head.

FIG. 6 is a diagram illustrating a conventional processing step diagram.

[Explanation of symbols]

1a, 1b ... magnetic core half body, 2 ... magnetic gap, 3 ...
Mold glass, 4 ... Front polishing surface, 5 ... Air floating surface, 6 ... Negative pressure generating portion, 7 ... Track portion, 8a, 8b
… Slider side, 9… groove, 10… Steps on slider side.

Claims (2)

[Claims] 1. A magnetic head having a slider air floating surface formed by a photolithography technique, the magnetic head having a step formed by machining on a slider side surface outside the air floating surface. 2. A method of manufacturing a magnetic head, characterized in that when a magnetic head is cut, a shallow groove is provided in advance and then the groove is cut.