JPH05242859A - High frequency inductively coupled plasma mass spectrometer - Google Patents

Abstract

(57) [Abstract] [Purpose] The maintainability was improved and the quadrupole rod was prevented from being subjected to excessive force, improving the reliability of analysis.
Provide CP-MS. [Structure] A Q pole rod of a quadrupole mass filter is sandwiched between leaf spring parts of a voltage supply clip to connect the Q pole rod and the voltage supply clip.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high frequency wave for supplying a high frequency energy to a high frequency induction coil to form a high frequency magnetic field to generate a high frequency inductively coupled plasma and analyzing the element to be measured in a sample using the plasma. Involved in an inductively coupled plasma mass spectrometer (hereinafter referred to as "ICP-MS"), particularly, an ICP having improved maintainability and improved analysis reliability by preventing excessive force from acting on a quadrupole rod.
-For MS.

[0002]

2. Description of the Related Art FIG. 3 is a diagram showing a general configuration of an ICP-MS. In this figure, the argon gas is supplied from the argon gas supply source 3 to the outer chamber 1b and the outermost chamber 1c of the plasma torch 1 through the gas regulator 2, and the inner chamber 1a is filled with solids in the sample introduction device 4. The sample is vaporized by the laser light emitted from the laser light source 5 and then carried in by an argon gas which is a carrier gas.
In the case of a liquid sample, the laser light source 5 is removed and the liquid sample contained in the sample introduction device 4 is atomized by a nebulizer (not shown) and then introduced into the inner chamber 1a of the plasma torch 1. It Also, the sample is often a liquid sample rather than a solid sample.

On the other hand, a high frequency current is applied to a high frequency induction coil 6 wound around the plasma torch 1 by a high frequency power source 10, and a high frequency magnetic field (not shown) is provided around the coil 6.
Are formed. In this state, when electrons or ions are implanted in the argon gas near the high frequency magnetic field,
A high frequency inductively coupled plasma 7 is instantaneously generated by the action of the high frequency magnetic field.

The inside of the fore chamber main body 11 sandwiched between the nozzle 8 and the skimmer 9 is sucked by a vacuum pump 12. Further, the center chamber 13 is provided with ion lens systems 14a and 14b, and the inside of the center chamber 13 has a first oil diffusion pump 1
5, the inside of the rear chamber 17 housing the quadrupole mass filter 16 is sucked by the second oil diffusion pump 18.

In this state, the sample vaporized as described above is introduced into the high frequency inductively coupled plasma 7, and ionization and light emission are performed. The ions in the plasma 7 pass through the nozzle 8 and the skimmer 9 and then the ion lens system 14
It is converged through between a and 14b and introduced into the quadrupole mass filter 16. In this way, among the ions that have entered the quadrupole mass filter 16, only the ions having the target mass-to-charge ratio pass through the quadrupole mass filter 16 and are guided to the secondary electron multiplier 19 to be detected. The detection signal is sent to the signal processing unit 20 and is calculated and processed to obtain the elemental analysis value of the measured element in the sample.

FIG. 4 is a diagram for explaining the quadrupole mass filter in detail, in which 21 is a Q pole rod 22a.
Ceramic for holding the Q pole for holding ~ 22d,
Reference numerals 23a to 23d are voltage supply rods for applying drive voltages to the Q pole rods 22a to 22d, respectively. In the conventional quadrupole mass filter having such a configuration, four through holes having female threads are provided on the side surface of the Q pole holding ceramic 21, and the female threads have a voltage supply rod 23a. The voltage supplying rods 23a to 23d are inserted into the ceramics 21 for holding the Q pole by screwing the male screws of 23 to 23d. In addition, by supplying a predetermined drive voltage to the voltage supply rods 23a to 23d, the Q pole rods 22a to 22d are obtained.
Was driving.

[0007]

However, in the above-mentioned conventional example, maintenance of the quadrupole mass filter is complicated, and there is a drawback that an excessive force acts on the Q pole rod which is assembled accurately. The present invention has been made in view of the drawbacks of such conventional examples, and its purpose is to
An object of the present invention is to provide an ICP-MS that improves maintainability and prevents excessive force from acting on the Q pole rod of the quadrupole mass filter to improve the reliability of analysis.

[0008]

The present invention is an ICP-M
In S, the above problem is solved by connecting the Q pole rod of the quadrupole mass filter with the leaf spring portion of the voltage supply clip and connecting the Q pole rod and the voltage supply clip.

[0009]

The present invention operates as follows. That is, the Q pole rod and the voltage supply clip are connected so that the Q pole rod of the quadrupole mass filter is sandwiched between the leaf spring portions of the voltage supply clip. Therefore, when a predetermined drive voltage is supplied to the wire from the drive power supply, the drive voltage is applied to the Q pole rod via the leaf spring, and the Q power supply voltage is applied to the Q pole rod from the drive power supply via the voltage supply clip. Is applied.

[0010]

Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is an explanatory view of the main configuration of an embodiment of the present invention. In the figure, 24a to 24d are voltage supply clips for holding and holding the Q pole rods 22a to 22d, respectively. 2 is a configuration perspective view for explaining the voltage supply clip in detail. In the figure, 25 is a Q pole rod, 26 is a leaf spring that holds the Q pole rod 25, and 27 is a leaf spring 26 at one end. It is a fixed wire.

In the embodiment of the present invention having the above-mentioned configuration, the Q pole rod and the voltage supply clip are connected so that the Q pole rod of the quadrupole mass filter is sandwiched by the leaf spring portions of the voltage supply clip. ing. That is, Q of FIG. 1 which constitutes the quadrupole mass filter 16 of FIG.
The pole rods 22a to 22d are sandwiched by the leaf spring portions (the leaf spring 26 portion of FIG. 2) of the voltage supply clips 24a to 24d shown in FIG.
2d and the voltage supply clips 24a to 24d are connected.

Therefore, when a predetermined drive voltage is supplied to the wire 27 of FIG. 2 from a drive power source (not shown), the drive voltage is applied to the Q pole rod 25 via the leaf spring 26 of FIG. Become. In this way, the driving voltage is applied to the Q pole rods 22a to 22d in FIG. 1 from the driving power source (not shown) through the voltage supply clips 24a to 24d.

The present invention is not limited to the above-described embodiment, and various modifications can be made. For example, the leaf spring portion of the voltage supply clip may have a shape other than the leaf spring 26 shown in FIG. ..

[0014]

According to the present invention as described in detail above, in the ICP-MS, the Q pole rod of the quadrupole mass filter is sandwiched between the leaf spring portions of the voltage supply clip and the voltage supply clip. Since the clip is connected, there is an advantage that maintenance of the quadrupole mass filter is facilitated and an unreasonable force does not act on the Q pole rod of the quadrupole mass filter as compared with the conventional example.

Therefore, according to the present invention, the maintainability is improved, and an excessive force is not applied to the Q pole rod of the quadrupole mass filter to improve the reliability of analysis.
CP-MS is realized.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a main part configuration of an embodiment of the present invention.

FIG. 2 is a configuration perspective view for explaining a voltage supply clip in detail.

FIG. 3 is a general configuration explanatory diagram of an ICP-MS.

FIG. 4 is an explanatory diagram of a main part configuration of a conventional example.

[Explanation of symbols]

 21 Q pole holding ceramics 22a to 22d Q pole rod 23a to 23d Voltage supply rod 24a to 24d Voltage supply clip 25 Q pole rod 26 Leaf spring 27 Wire

Claims (1)

[Claims] 1. In a high frequency inductively coupled plasma mass spectrometer, the Q pole rod of a quadrupole mass filter is connected to the voltage supply clip by sandwiching it with a leaf spring portion of the voltage supply clip. Characteristic high frequency inductively coupled plasma mass spectrometer.