JPH05266624A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To realize highly accurate fixing easily, when the supporting part of a main insulating bent body is fixed to a supporting arm, by fixing the supporting part to the supporting arm while recognizing and eliminating parallel shift and angular shift of the medium sliding face of element part with respect to the recording medium surface. CONSTITUTION:A pole for electromagnetic conversion is buried, such that the end thereof is exposed, into the element part 22 of an insulating bent body 21 where the element part 22 and a supporting part 13 are integrated while a thin film coil and a signal conductor wire are buried from the element part 22 of the bent body 21 to the supporting part 13 along the pole. In such thin film magnetic head, the element part 22 opposing to a recording medium is notched at the opposite sides in width direction to provide step parts 23. At least a pair of capacitance detecting electrodes 24a, 24b for detecting lateral and longitudinal inclination, respectively, of a sliding face 22a sliding on the recording medium while contacting therewith are provided at the opposite step parts 23.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an integrated recording / reproducing thin film magnetic head used in a small magnetic disk device or the like.

In recent years, due to an increase in the amount of information processing in a computer system, the capacity and size of a magnetic disk device have been increased, and high density recording has been demanded. The flying gap of the magnetic head with respect to the recording medium becomes smaller and smaller as the recording density increases, so that the probability of contact between the magnetic head and the recording medium increases and the probability of occurrence of a serious failure such as head crash increases. Tend to do.

As a method of preventing the occurrence of such a failure, it is effective to reduce the size of the thin film magnetic head assembly itself, which is a combination of the thin film magnetic head and the supporting member, and reduce the load.

As a thin-film magnetic head assembly capable of simultaneously achieving the miniaturization and the reduction of load, an electromagnetic field is generated in an elongated insulative bending body in which an element portion having a medium sliding surface and a supporting portion are integrally formed. An integrated small-sized thin-film magnetic head for perpendicular magnetic recording / reproducing has been proposed in which a conversion element, a signal conductor wire, and the like are embedded in a laminated form by a thin-film forming technology. Such a small-sized thin-film magnetic head has a reduced load. It becomes difficult to parallelize the element part with respect to the recording medium surface and to set the angle when the is mounted on the support arm of the head positioning mechanism.

Therefore, there is a need for a head structure which can easily realize parallelism of the element portion with respect to the recording medium surface and setting an angle when the thin film magnetic head is attached to the support arm.

[0006]

2. Description of the Related Art A conventional integrated type small-sized thin film magnetic head described above is used for a recording medium surface as shown in a schematic perspective view of FIG. 5 (a) and a side sectional view of an essential part of FIG. 5 (b). Mainly an elongated insulative bending body 11 in which an element portion 12 made of Al ₂ O ₃ film or the like having a sliding surface that slides and a support portion 13 are integrally formed,
An L-shaped main magnetic pole 14 for electromagnetic conversion is embedded in the element portion 12 of the insulating bent body 11 so that its tip is exposed perpendicularly to the medium sliding surface of the element portion 12.

A helix-shaped thin-film coil 15 extending from the element portion 12 of the insulating bent body 11 to the support portion 13 along the main magnetic pole 14 and in parallel with the main magnetic pole 14 near the tip thereof. A magnetic flux return yoke 16 extending along the magnetic pole and magnetically connected to the rear end of the main magnetic pole 14 and a signal conductor wire 17 extending from the helix-shaped thin-film coil 15 are embedded in a laminated manner.

Further, the rear end portion of the insulative bending body 11 which is the main body of the magnetic head is adhered and fixed to a supporting member of a head positioning mechanism (not shown), for example, a supporting arm 19 by an adhesive agent or the like, and the signal conductor wire 17 is provided. An external extraction cable 20 is connected to the terminal pad 18 of.

The thin-film magnetic head according to the present invention is combined with a perpendicular magnetic recording medium having a double-layer film structure in which a perpendicular recording layer is laminated on a soft magnetic underlayer having a high magnetic permeability, and the soft magnetic underlayer of the perpendicular magnetic recording medium is used as the thin film. Utilizing the magnetic path between the main magnetic pole 14 and the magnetic flux return yoke 16 of the magnetic head to form a part of the closed magnetic path of the magnetic flux during recording / reproduction, with respect to the perpendicular recording layer of the perpendicular magnetic recording medium. It enables high-density perpendicular magnetic recording / playback.

[0010]

By the way, such an integrated small-sized thin-film magnetic head is extremely advantageous for reduction in size and weight, but mainly as the size and weight are reduced. Positioning when mounting the supporting portion 13 of the insulative bent body 11 to the supporting arm 19 of the head positioning mechanism (not shown), parallelization of the element portion 12 with respect to the recording medium surface, angle setting, etc. become difficult, and the mounting accuracy decreases. There was a problem.

For example, when the supporting portion 13 of the insulating bent body 11 is attached to the support arm 19 of the head positioning mechanism (not shown), the medium sliding surface of the element portion 12 of the insulating bent body 11 with respect to the recording medium surface. If the parallelism is poor and there is a slight angle deviation in the left-right direction, the reproduction output is reduced when the recording / reproduction is performed by sliding the element portion 12 of the insulating bent body 11 on the recording medium surface. There is a drawback that the element portion 12 and the surface of the recording medium are damaged due to the contact of the edge of the element portion 12 on the inclined side.

In view of the above-mentioned conventional problems, the present invention attaches the supporting portion of the main body of the insulative bending body to the supporting arm and disposes the element portion on the surface of the recording medium. To provide a novel thin film magnetic head capable of realizing accurate mounting while confirming the parallel displacement of the sliding surface with respect to the recording medium surface and the angular displacement and the arrangement without the parallel displacement to the recording medium surface and the angular displacement. The purpose is.

[0013]

In order to achieve the above-mentioned object, the present invention has an elongated insulative bending body in which an element portion and a support portion are integrally formed, and the electromagnetic element is provided in the element portion of the bending body. A magnetic pole for conversion is embedded so that its tip is exposed on the surface facing the recording medium, and a thin film coil and a signal conductor wire are embedded so as to extend along the magnetic pole from the element portion of the insulating bent body to the support portion. In the configuration of the thin-film magnetic head, the step portion is provided by notching both sides in the width direction of the recording medium facing surface of the element portion, and the step portion on both sides of the element portion slides in contact with the recording medium in the left-right direction. Or at least a pair of electrodes for detecting in order to adjust the inclination in the front-back direction.

Further, at the stepped portions provided on both sides in the width direction of the recording medium facing surface of the element portion, detection is performed to adjust the inclination in the left-right direction and the front-back direction of the sliding surface that slides in contact with the recording medium. A plurality of electrodes are provided.

Further, the electrodes for respectively detecting the inclinations of the sliding surface in the left-right direction and the front-back direction are constituted by electrodes for detecting capacitance.

[0016]

According to the present invention, the left and right inclinations of the sliding surface that slides in contact with the recording medium are provided at the step portions provided on both sides in the width direction of the recording medium facing surface of the element portion of the insulating bent body as a main component. , Or at least a pair of capacitance detection electrodes for detecting inclination for adjusting the inclination in the front-back direction, and further for adjusting the inclination in the left-right direction and the inclination in the front-rear direction, and the supporting portion of the insulative bending body is used as a supporting arm. When the element part is attached and the element part is arranged on the recording medium surface, a parallel deviation or an angular deviation of the medium sliding surface of the element part with respect to the recording medium surface is caused by the pair of electrostatic capacitance detection electrodes. By mounting while detecting the change in electrostatic capacitance between the electrodes, the parallel displacement of the medium sliding surface of the element part with respect to the recording medium surface, the reduction of the reproduction output due to the angle deviation, and the contact of the inclined edge of the element part By the element part It is possible to prevent damage to the fine recording medium surface.

[0017]

Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a configuration diagram showing a first embodiment of a thin film magnetic head according to the present invention.

In the figure, reference numeral 21 is an elongated insulative bending body in which an element portion 22 made of an Al ₂ O ₃ film having a sliding surface 22a that slides with respect to the recording medium surface and a support portion 13 are integrally formed. A step 23 is formed by cutting out both sides in the width direction of the recording medium facing surface of the element section 22 of the insulating bent body 21, and the tip of the step 23 on each side is slid by contacting the recording medium. A pair of capacitance detection electrodes 24a and 24b for detecting the inclination of the surface 22a in the left-right direction (rolling direction) is embedded.

In the element part 22 of the insulative bending body 21, an L-shaped main magnetic pole for electromagnetic conversion (not shown) is provided at the tip of the element part 22 as in the conventional example shown in FIG. 5B. It is embedded so as to be exposed vertically to the medium sliding surface of the medium 22, and the element portion 22 to the support portion 13 of the insulating bent body 21 are arranged along the main pole thereof.
A helix-shaped thin-film coil, a magnetic flux return yoke magnetically connected to the rear end of the main pole, and a signal conductor wire extending from the helix-shaped thin-film coil are embedded in a laminated manner across the helix-shaped thin-film coil. ..

The rear end of the insulative bending body 21 (the rear end of the support portion 13) is adhered and fixed to a support member of a head positioning mechanism (not shown), such as the support arm 19, by an adhesive or the like. An external lead-out cable 20 is connected to the terminal pad 18 of the signal conductor wire led out from the thin film coil.

By using the thin-film magnetic head having such a structure, the rear end portion of the insulative bending body 21, which is the main body of the thin-film magnetic head, is attached to the support arm 19 of the head positioning mechanism (not shown) by an auxiliary jig or the like. As shown in the enlarged perspective view of the essential part of FIG. 2, the element portion 22 is temporarily attached and disposed on the surface of the perpendicular magnetic recording medium 28 having a double-layer film structure, for example, and the element portion 22 is slid. Capacitances C ₁ and C between the electrode surfaces of the pair of capacitance detection electrodes 24a and 24b provided on both stepped portions 23 and the surface of the corresponding perpendicular magnetic recording medium 28, respectively.
₂ is detected by the capacitance detectors 25a and 25b respectively connected to the capacitance detection electrodes 24a and 24b,
Both detection signals are input to the angle deviation display unit 27 through the differential amplifier 26 to check whether there is a capacitance difference between the electrostatic capacitances C ₁ and C ₂ .

At this time, when there is no capacitance difference between the electrostatic capacitances C ₁ and C ₂ , there is no angular deviation in which the element portion 22 tilts in the left-right direction (rolling direction), and therefore the head positioning mechanism. The rear end of the insulative bending body 21 temporarily attached to the support arm 19 is normally attached and fixed. If there is a capacitance difference between the capacitances C ₁ and C ₂ , the capacitance C ₁
And C ₂ are equal to each other, or at least the capacitance difference is 20 pF or less, the support arm 19 of the head positioning mechanism.
By attaching and adjusting the rear end portion of the insulative bending body 21 temporarily attached to, the rear end portion of the insulative bending body 21 to the support arm 19 of the head positioning mechanism,
The element portion 22 can be attached without angular displacement in the rolling direction.

FIG. 3 is an enlarged perspective view of an essential part showing a second embodiment of the thin film magnetic head according to the present invention, and the same parts as those in FIG. 1 are designated by the same reference numerals. The embodiment shown in this figure is different from the embodiment shown in FIG. 1 in that one side of a step portion 23 formed by cutting out both sides in the width direction in the recording medium facing surface of the element portion 22 of the insulating bent body 21. A pair of capacitance detection electrodes 31 for detecting the inclination in the front-back direction (pitching direction) of the sliding surface 22a that slides in contact with the recording medium before and after the stepped portion 23 of
That is, a and 31b were buried.

Such a thin-film magnetic head is manufactured by attaching the rear end portion of the insulative bending body 21, which is the main body, to the supporting arm 19 (see FIG. 1) of the head positioning mechanism (not shown) and fixing it. The rear end portion of the flexible body 21 is temporarily attached to the support arm 19 by an auxiliary jig or the like, and is disposed on the surface of the perpendicular magnetic recording medium 28 having a double-layer film structure and slid on the element portion 22. Capacitances C ₂ and C ₃ between the respective electrode surfaces of the pair of electrostatic capacitance detection electrodes 31a and 31b provided on both step portions 23 of FIG. In the same manner as in the first embodiment, the capacitance detectors detect the respective capacitances, and the detection signals of both of them are input to the angle deviation display section through the differential amplifier to obtain the capacitance difference between the capacitances C ₂ and C _3. Check for.

Then, while looking at the angle deviation display portion, the electrostatic capacitances C ₂ and C ₃ are made equal to each other or temporarily attached to the support arm 19 of the head positioning mechanism so that the capacitance difference becomes 20 pF or less. Insulation bending body 21
By attaching and adjusting the rear end of the head to properly fix it, the supporting arm 19 of the head positioning mechanism is attached to the insulating bending body.
The rear end portion 21 can be attached without the element portion 22 being angularly displaced in the pitching direction.

Further, FIG. 4 is an enlarged perspective view of an essential part showing a third embodiment of the thin film magnetic head according to the present invention, and the same parts as those in FIG. 1 are designated by the same reference numerals. The embodiment shown in this figure is different from the embodiment shown in FIG. 1 in that before and after each step 23 formed by cutting out both sides in the width direction on the recording medium facing surface of the element portion 22 of the insulating bent body 21. , Embedded with capacitance detection electrodes 41a, 41b, 41c, 41d for detecting the inclination in the left-right direction (rolling direction) and the inclination in the front-rear direction (pitching direction) of the sliding surface 22a that slides in contact with the recording medium. It was that.

Therefore, in such a thin film magnetic head, when the rear end portion of the insulative bending body 21, which is the main body, is attached and fixed to the supporting arm of the head positioning mechanism (not shown), the insulative bending body 21 is fixed. The rear end portion is temporarily attached to the support arm by an auxiliary jig or the like, and is disposed on the surface of the perpendicular magnetic recording medium 28 having a double-layer film structure and slid on both step portions 23 of the element portion 22. The plurality of capacitance detection electrodes 41a provided,
Capacitances C ₁ , C ₂ , C ₃ , C ₄ between the electrode surfaces 41b, 41c, 41d and the surface of the corresponding perpendicular magnetic recording medium 28, respectively.
In the same manner as in the embodiment of FIG. 1, and the detection signals of both of them are input to the angle deviation display section through the differential amplifier to obtain the electrostatic capacitances C ₁ , C ₂ , C Examine whether there is a difference in capacitance between ₃ and C ₄ .

While looking at the angle deviation display portion, the electrostatic capacitances C ₁ , C ₂ , C ₃ and C ₄ become equal to each other, or at least the capacitance difference becomes 20 pF or less so that the head positioning mechanism can be operated. The rear end portion of the insulative bending body 21 temporarily attached to the support arm is attached, adjusted, and properly fixed so that the rear end portion of the insulative bending body 21 is attached to the support arm of the head positioning mechanism. The portion 22 can be attached without any angular displacement between the rolling direction and the pitching direction.

It should be noted that for detecting capacitance, which is embedded in the step portions 23 provided on both sides of the element portion of the insulating bent body, the inclination in the left-right direction (rolling direction) and the inclination in the front-rear direction (pitching direction) are detected. The number of electrodes is not limited to the number of electrodes in the above-described embodiment, and by providing a large number of electrodes, the rear end of the insulative bending body can be used as the support arm of the head positioning mechanism and its element portion can be used in the rolling direction or There is no angular deviation in the pitching direction, and more accurate mounting is possible.

[0030]

As is clear from the above description, according to the thin-film magnetic head of the present invention, the supporting portion of the main body of the insulative bent body is attached to the supporting arm and the element portion is arranged on the recording medium surface. At the time of installation, it becomes possible to attach the element sliding surface of the element portion with respect to the recording medium surface accurately while checking the parallel displacement and the angular displacement with respect to the recording medium surface. Since they can be arranged without any parallel deviation or angular deviation, stable recording and reproducing output can always be obtained.

Further, it is possible to prevent the damage of the element portion and the surface of the recording medium due to the angular displacement, and it is possible to obtain the practically excellent effect.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a first embodiment of a thin film magnetic head of the present invention.

FIG. 2 is an enlarged perspective view of an essential part showing an element part of the first embodiment of the thin film magnetic head of the present invention.

FIG. 3 is an enlarged perspective view of essential parts showing a second embodiment of the thin film magnetic head of the present invention.

FIG. 4 is an enlarged perspective view of essential parts showing a third embodiment of the thin film magnetic head of the present invention.

5A and 5B are a schematic perspective view and a side sectional view of a main part for explaining a conventional integrated type thin film magnetic head.

[Explanation of symbols]

13 Support Part 18 Terminal Pad 19 Support Arm 20 External Extraction Cable 21 Insulating Bent Body 22 Element Part 23 Stepped Part 24a, 24b, 31a, 31b Capacitance Detection Electrode 25a, 25b Capacitance Detector 26 Differential Amplifier 27 Angle deviation display unit 28 Perpendicular magnetic recording medium 41a, 41b, 41c, 41d Capacitance detection electrode

Claims (3)

[Claims] 1. An elongated insulative bending body (21) in which an element portion (22) and a supporting portion (13) are integrally formed, and the bending body (21)
A magnetic pole for electromagnetic conversion is embedded in the element part (22) of the device so that the tip is exposed to the surface facing the recording medium, and is supported from the element part (22) of the insulating bending body (21) along the magnetic pole. In a thin film magnetic head in which a thin film coil and a signal conductor wire are embedded over the portion (13), a step portion (23) is formed by notching both sides in the width direction of the recording medium facing surface of the element portion (22). Steps (23) on both sides of the
A thin-film magnetic head, characterized in that at least a pair of electrodes (24a, 24b) for respectively detecting the inclination in the left-right direction or the inclination in the front-rear direction of the sliding surface (22a) that slides in contact with the recording medium are provided. .. 2. A left and right direction and a front-back direction of a sliding surface (22a) that slides in contact with a recording medium at step portions (23) provided on both sides in the width direction of the recording medium facing surface of the element portion (22). 2. The thin film magnetic head according to claim 1, further comprising a plurality of electrodes (41a, 41b, 41c, 41d) for respectively detecting the inclinations of the. 3. The electrodes (24a, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24b, 24d, 24b, 24b, 24b, 24c, 24d, 24d, 24b, 24d, 24b, 24d, 24d, 24c, 24d, 24d, 24d, 24d detecting the inclination of the sliding surface 22a of the element portion 22 in the left-right direction and the front-back direction.
41a, 41b, 41c, 41d) are composed of electrodes for detecting capacitance, and the thin film magnetic head according to claim 1 or 2.