JPH0536799U - Air ion generator - Google Patents

Abstract

(57) [Summary] [Purpose] To prevent fine dust from adsorbing to the opening edge of the electrode holder. [Structure] A hole-shaped electrode holding portion 20 that holds a base end portion 11 of a discharge electrode 10 in a removable manner is provided, and the base end portion 11 of the discharge electrode 10 is formed into a cylindrical rod shape. A pointed conical tip portion 12 having a bottom surface having an outer diameter larger than that of the base end portion 11 is continuously provided.
The cover portion 13 covers the opening edge 21 of 0. [Effect] Since the opening edge of the electrode holding portion is not exposed by being covered with the covering portion of the discharge electrode, it is possible to prevent the situation where fine dust enters and is adsorbed in the gap between the opening edge and the base end portion of the discharge electrode. Fine dust will not grow up in a chain and fall into a clean room.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to an air ion generator for static electricity removal used in a clean room of a semiconductor manufacturing factory.

[0002]

[Prior Art]

 This type of device focuses on the fact that minute dust that floats in the air easily adheres to statically charged objects, and ionizes the indoor air to remove static electricity from the charged objects. It reduces the adhesion rate.

Conventionally, this type of air ion generator is provided with, for example, as shown in FIG. 6, a pair of discharge electrodes 1 in which a cylindrical rod is pointed, and the discharge electrodes 1 are mounted on a ceiling of a room or the like. It is detachably held in a hole-shaped electrode holding portion 3 provided in a plastic holding body 2 to be attached.

Then, positive and negative voltages are applied to the pair of discharge electrodes 1 to continuously generate positive and negative ions. Alternatively, the applied voltage is pulsed to alternately generate positive and negative ion groups.

[0005]

[Problems to be solved by the device]

 By the way, in this conventional air ion generator, since there is a slight gap between the discharge electrode 1 and the opening edge 4 of the electrode holding portion 3 into which the discharge electrode 1 is inserted, fine floating dust in the air is generated. If finely decomposed dust or the like caused by the discharge of the discharge electrode or the discharge electrode is attracted to the discharge electrode due to charging, etc., it is easily adsorbed at the opening edge 4, and once the adsorption starts, it grows in a chain and becomes a lump. However, there is a problem that it may fall in the end, and this falling dust may have an adverse effect.

Therefore, an object of the present invention is to provide an air ion generator in which fine dust is not adsorbed on the opening edge of the electrode holding portion.

[0007]

[Means for Solving the Problems]

 In order to solve such a problem, the present invention holds a discharge electrode composed of a rod-shaped base end portion and a pointed tip end portion continuing from the base end portion, and a base end portion of the discharge electrode detachably held. In an air ion generator provided with a hole-shaped electrode holder, a cover is formed between the base end and the tip of the discharge electrode to cover the opening edge of the electrode holder.

[0008]

[Action]

 According to this air ion generator, the base end portion of the discharge electrode is inserted into and held by the electrode holding portion. In this state, the opening edge of the electrode holder is covered with the cover and is not exposed. Therefore, it is possible to prevent fine dust from entering the space between the opening edge and the base end and adsorbing it.

[0009]

【Example】

 Hereinafter, an air ion generator according to an embodiment of the present invention will be described with reference to the drawings.

In the embodiment shown in FIGS. 1 and 2, 10 is a discharge electrode, for example, preferably made of a tungsten alloy, and a pair of discharge electrodes is provided. As shown in FIG. 3, the discharge electrode 10 is composed of a cylindrical rod-shaped base end portion 11 and a pointed tip end portion 12 continuous with the base end portion 11. The tip portion 12 is formed in a conical shape, and the diameter of the bottom surface 12a is formed larger than the diameter of the base portion 11.

More specifically, the discharge electrode 10 has a total length of about 13 mm, of which the tip 12 is about 5 mm. Further, the diameter of the base end portion 11 is about 1.5 mm. The tip portion 12 has a bottom surface 12a with a diameter of about 4 mm, and is gently tapered so that the leading edge has a diameter of about 50 μm so as to obtain a uniform corona discharge. The bottom surface 12a is configured as a cover portion 13 that covers an opening edge of an electrode holding portion, which will be described later, formed between the base end portion 11 and the tip end portion 12.

Reference numeral 20 denotes a hole-shaped electrode holding portion that holds the base end portion 11 of the discharge electrode 10 in a removable manner. The electrode holding portion 20 is formed of a conductive cylindrical socket, and is provided in a pair on a plastic holding body 22. The diameter of the electrode holding portion 20 is formed so that the base end portion 11 of the discharge electrode 10 can be easily removed for replacement and cleaning of the discharge electrode 10. The opening edge 21 is covered with the cover 13 of the discharge electrode 10.

The holder 22 is fixed to the ceiling or the like of the clean room by any means such as screwing. Reference numeral 23 is a wiring for applying a high voltage to the discharge electrode 10 via the electrode holding portion 20. The high voltage to be applied may be alternating current or direct current.

Therefore, according to the air ion generator according to this embodiment, the discharge electrode 10 is attached by inserting the base end portion 11 thereof into the electrode holding portion 20. When a voltage is applied to the electrode holder 20, corona discharge is performed at the tip 12 of the electrode holder 20, and the air in the vicinity of the tip 12 is ionized.

In this state, even if fine floating dust in the air or fine decomposed dust caused by discharge of the discharge electrode 10 is attracted to the discharge electrode 10 due to charging of the dust itself, the opening edge 21 of the electrode holding portion 20. Since this is not covered and exposed by the cover 13 of the tip 12, it is possible to prevent fine dust from entering and adsorbing in the gap between the opening edge 21 and the base 11.

As described above, since the fine dust is not adsorbed, the dust does not grow and adhere to the portion as a lump, and therefore, the lump of the attached dust falls into the clean room. Also disappears.

FIG. 4 is a perspective view showing a discharge electrode 30 according to another example. In this, the tip portion 32 is formed in a quadrangular pyramid shape, and the bottom surface thereof is a cover portion 33. FIG. 5 is a perspective view showing a discharge electrode 40 according to another example. This is provided with a rod-shaped base end portion 41 and a narrower tip end portion 42, and a flange-shaped cover portion 43 is integrally formed between the base end portion 41 and the tip end portion 42.

The shape of the cover is not limited to that described above, and may be formed in any shape. Further, although a pair of discharge electrodes is provided in the above embodiment, the present invention is not necessarily limited to this, and three or more discharge electrodes may be provided. In addition, various methods such as positive and negative voltage are applied to the discharge electrode to generate positive and negative ions continuously, and the applied voltage is pulsed to alternately generate positive and negative ion groups. Of course, it can be applied to the method of.

[0019]

[Effect of the device]

 As described above, according to the air ion generator of the present invention, since the opening edge of the electrode holding portion is not exposed by being covered with the covering portion of the discharge electrode, the gap between the opening edge and the base end portion of the discharge electrode is fine. It is possible to prevent dust from entering and adsorbing. Therefore, the adsorbed fine dust does not grow up in a chain and does not fall down, and dust in a clean room or the like can be ensured accordingly.

[Brief description of drawings]

FIG. 1 is a sectional view showing an air ion generator according to an embodiment of the present invention.

FIG. 2 is a perspective view showing an air ion generator according to an embodiment of the present invention.

FIG. 3 is a perspective view showing a discharge electrode according to an embodiment of the present invention.

FIG. 4 is a perspective view showing another example of a discharge electrode.

FIG. 5 is a perspective view showing another example of a discharge electrode.

FIG. 6 is a sectional view showing an example of a conventional air ion generator.

[Explanation of symbols]

 1 Discharge electrode 3 Electrode holding part 4 Opening edge 10 Discharge electrode 11 Base end part 12 Tip part 13 Cover part 20 Electrode holding part 21 Opening edge 22 Holding body

Claims (1)

[Scope of utility model registration request] 1. A discharge electrode comprising a rod-shaped base end portion and a pointed tip end portion continuous with the base end portion, and a hole-shaped electrode holding portion for holding the base end portion of the discharge electrode in a removable manner. In the air ion generator, the air ion generator is characterized in that a cover portion for covering an opening edge of the electrode holding portion is formed between the base end portion and the tip end portion of the discharge electrode.