JPH0543392Y2 - - Google Patents
Info
- Publication number
- JPH0543392Y2 JPH0543392Y2 JP8725489U JP8725489U JPH0543392Y2 JP H0543392 Y2 JPH0543392 Y2 JP H0543392Y2 JP 8725489 U JP8725489 U JP 8725489U JP 8725489 U JP8725489 U JP 8725489U JP H0543392 Y2 JPH0543392 Y2 JP H0543392Y2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- mirror mounting
- mounting portion
- back surface
- drive source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 6
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 230000008602 contraction Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
【考案の詳細な説明】
（産業上の利用分野）
本考案は例えばフーリエ変換赤外分光光度計
（FTIR）の干渉計において、主としてその固定
鏡の角度を調整する機構に関するものである。[Detailed Description of the Invention] (Industrial Application Field) The present invention mainly relates to a mechanism for adjusting the angle of a fixed mirror in an interferometer of, for example, a Fourier transform infrared spectrophotometer (FTIR).
（従来の技術）
第３図にフーリエ変換赤外分光光度計の干渉計
の一例を示す。(Prior Art) FIG. 3 shows an example of an interferometer of a Fourier transform infrared spectrophotometer.
１は赤外光源、２はビームスプリツタ（半透
鏡）、３は移動鏡、４は固定鏡である。光源１か
らの赤外光５はビームスプリツタ２に対して45度
の角度で入射する。ビームスプリツタ２では入射
光は透過光５ａと反射光５ｂに二分され、透過光
５ａは移動鏡３によつて反射されて再びビームス
プリツタ２に戻され、反射光５ｂは固定鏡４で反
射されて再びビームスプリツタ２に戻される。透
過光５ａと反射光５ｂはビームスプリツタ２で合
一して干渉光６となり、試料７を透過して検出器
８で検出される。 1 is an infrared light source, 2 is a beam splitter (semi-transparent mirror), 3 is a movable mirror, and 4 is a fixed mirror. Infrared light 5 from light source 1 is incident on beam splitter 2 at an angle of 45 degrees. In the beam splitter 2, the incident light is divided into transmitted light 5a and reflected light 5b, the transmitted light 5a is reflected by the movable mirror 3 and returned to the beam splitter 2, and the reflected light 5b is reflected by the fixed mirror 4. and then returned to the beam splitter 2. The transmitted light 5a and the reflected light 5b are combined by the beam splitter 2 to become interference light 6, which is transmitted through the sample 7 and detected by the detector 8.
この干渉計において干渉条件を一定にするため
に、固定鏡４の角度を自動調整する。 In order to keep the interference conditions constant in this interferometer, the angle of the fixed mirror 4 is automatically adjusted.
従来の調整機構としては、第４図及び第５図に
示されるように、ミラー１０の取付け部１１の裏
面中央部が支柱１２で支持され、ミラー取付け部
１１の裏面上で支柱１２が取りつけられている点
を中心として互いに直交する２軸上にそれぞれミ
ラー取付け部裏面に垂直な方向に変位する駆動源
１３，１４が当接している。ミラー取付け部１１
の裏面上にはまた、支柱１２が取り付けられてい
る位置Ｃに対して駆動源１３，１４が当接してい
る位置と対称な位置がそれぞれ圧縮バネ１５，１
６で押されている。９は支柱１２、駆動源１３，
１４及び圧縮バネ１５，１６を支持しているハウ
ジングである。駆動源１３，１４としては一般に
積層型圧電アクチユエータが用いられている。 As shown in FIGS. 4 and 5, in the conventional adjustment mechanism, the central part of the back surface of the mounting section 11 of the mirror 10 is supported by a support 12, and the support 12 is attached on the back surface of the mirror mounting section 11. Drive sources 13 and 14 are in contact with each other and are displaced in a direction perpendicular to the rear surface of the mirror mounting portion on two axes that are orthogonal to each other with the point centered at the mirror mounting portion. Mirror mounting part 11
Compression springs 15 and 1 are also located on the back surface of the support column 12 at positions symmetrical to the positions where the drive sources 13 and 14 are in contact with the position C where the support column 12 is attached.
6 is pressed. 9 is a pillar 12, a driving source 13,
14 and compression springs 15 and 16. As the drive sources 13 and 14, laminated piezoelectric actuators are generally used.
（考案が解決しようとする課題）
従来のミラー角度調整機構では、駆動源１３，
１４と圧縮バネ１５，１６はともにミラー取付け
部１１の裏面を押す方向に加圧しており、支柱１
２に対して引張り力を加えている。また、ミラー
１０の角度調整の応答速度を大きくするために、
圧縮バネ１５，１６としてはバネ定数の大きいも
のが使用されているので、支柱１２に対する引張
り力は大きくなつている。その結果、本来ミラー
１０の角度決定の中心になるべき支柱１２が伸び
縮みして微小範囲で正確にミラー角度を決定する
のが困難になる。(Problem to be solved by the invention) In the conventional mirror angle adjustment mechanism, the drive source 13,
14 and compression springs 15 and 16 are both pressurizing the rear surface of the mirror mounting portion 11 in the direction of pushing the support column 1.
A tensile force is applied to 2. In addition, in order to increase the response speed of the angle adjustment of the mirror 10,
Since the compression springs 15 and 16 have a large spring constant, the tensile force applied to the support column 12 is large. As a result, the support column 12, which should originally be the center for determining the angle of the mirror 10, expands and contracts, making it difficult to accurately determine the mirror angle within a minute range.
本考案は支柱の伸び縮みによるミラー角度調整
誤差を小さくしたミラー角度調整機構を提供する
ことを目的とするものである。 It is an object of the present invention to provide a mirror angle adjustment mechanism that reduces mirror angle adjustment errors due to expansion and contraction of the struts.
（課題を解決するための手段）
本考案でもミラー取付け部の裏面中央部を支柱
で支持し、ミラー取付け部の裏面上で前記支柱が
取りつけられている点を中心として互いに直交す
る２軸上にそれぞれミラー取付け部裏面に垂直な
方向に変位する駆動源を当接させる。支柱に引張
り力を作用させないようにするために、ミラー取
付け部を挟んで各駆動源と対向する位置から各駆
動源の加圧方向と反対方向に加圧するバネなどの
弾性部材を設ける。(Means for Solving the Problems) In the present invention, the central part of the back surface of the mirror mounting part is supported by a support, and on two axes perpendicular to each other centering on the point where the support is mounted on the back surface of the mirror mounting part. A drive source that is displaced in a perpendicular direction is brought into contact with the back surface of each mirror mounting portion. In order to prevent tensile force from acting on the support column, an elastic member such as a spring is provided to apply pressure in a direction opposite to the direction in which each drive source is applied from a position facing each drive source across the mirror mounting portion.
（作用）
本考案ではミラー取付け部の裏面側から駆動源
によつてミラー取付け部を押す力が作用し、ミラ
ー取付け部の表面側からは弾性部材によつて駆動
源と逆方向の力が作用する。その結果、支柱には
張力が働かなくなり、支柱の伸び縮みによる角度
誤差は起こらない。(Function) In this invention, a force to push the mirror mount is applied from the rear side of the mirror mount by a drive source, and a force in the opposite direction to the drive source is applied from the front side of the mirror mount by an elastic member. do. As a result, no tension is applied to the struts, and angular errors due to expansion and contraction of the struts do not occur.
（実施例）
一実施例を第１図及び第２図に示す。第１図は
正面図、第２図は第１図のＡ−A′位置での断面
図である。従来の調整機構と対比するために、第
４図及び第５図に示されるものと同じ部材には同
一の符号を用いる。(Example) An example is shown in FIGS. 1 and 2. FIG. 1 is a front view, and FIG. 2 is a sectional view taken along line A-A' in FIG. For contrast with conventional adjustment mechanisms, like reference numerals are used for like parts as shown in FIGS. 4 and 5.
本実施例は第３図に示されるフーリエ変換赤外
分光光度計の干渉計の固定鏡４の角度を調整する
ために設けられたものである。 This embodiment is provided for adjusting the angle of a fixed mirror 4 of an interferometer of a Fourier transform infrared spectrophotometer shown in FIG.
ハウジング９には支柱（センターバー）１２が
固定されており、支柱１２の先端にはミラー取付
け部１１がその裏面中央部Ｃで固定されている。
ミラー取付け部１１の前面にはミラー取付け部１
１と隙間をもつてミラー１０が固定されている。 A support (center bar) 12 is fixed to the housing 9, and a mirror attachment part 11 is fixed to the tip of the support 12 at the center C of the back surface thereof.
The mirror mounting part 1 is attached to the front of the mirror mounting part 11.
A mirror 10 is fixed with a gap from the mirror 1.
支柱１２が取り付けられているミラー取付け部
１１の裏面中央部Ｃを中心として互いに直交する
２軸上に駆動源である積層型圧電アクチユエータ
１３，１４がそれぞれ当接している。圧電アクチ
ユエータ１３，１４はハウジング９に固定され、
圧電アクチユエータ１３，１４はミラー取付け部
１１の裏面に対して垂直方向に力を及ぼすように
当接している。圧電アクチユエータ１３，１４は
電圧を印加することによつて伸縮し、ミラー取付
け部１１の裏面を垂直方向に押す。 Laminated piezoelectric actuators 13 and 14, which are drive sources, are in contact with each other on two axes that are orthogonal to each other with the center C of the back surface of the mirror mounting portion 11 to which the support column 12 is attached as the center. The piezoelectric actuators 13 and 14 are fixed to the housing 9,
The piezoelectric actuators 13 and 14 are in contact with the back surface of the mirror mounting portion 11 so as to exert a force in the vertical direction. The piezoelectric actuators 13 and 14 expand and contract by applying a voltage, and press the back surface of the mirror mounting portion 11 in the vertical direction.
ハウジング９には板バネ２０，２１が固定され
ており、それらの板バネ２０，２１の当接部は圧
電アクチユエータ１３，１４の変位軸と同軸上で
ミラー取付け部１１を挟んで圧電アクチユエータ
１３，１４とそれぞれ対向する位置にあり、板バ
ネ２０，２１はミラー取付け部１１をそれぞれ圧
電アクチユエータ１３，１４方向に加圧する。 Leaf springs 20, 21 are fixed to the housing 9, and the contact portions of the leaf springs 20, 21 are coaxial with the displacement axes of the piezoelectric actuators 13, 14, and the piezoelectric actuators 13, 21 are placed on both sides of the mirror mounting portion 11. The plate springs 20 and 21 press the mirror mounting portion 11 toward the piezoelectric actuators 13 and 14, respectively.
次に、本実施例の動作について説明する。 Next, the operation of this embodiment will be explained.
圧電アクチユエータ１３，１４に電圧を印加す
ることにより圧電アクチユエータ１３，１４がミ
ラー取付け部１１の裏面を押す。一方、圧電アク
チユエータ１３，１４の押す力に対して、ミラー
取付け部１１の表面側から板バネ２０，２１が圧
電アクチユエータ１３，１４と逆方向の力を加え
ている。圧電アクチユエータ１３，１４と板バネ
２０，２１の釣合いによりミラー１０の角度が決
定される。このとき、支柱１２には曲げ力だけが
加わるため、引張り力による歪の影響はない。 By applying a voltage to the piezoelectric actuators 13 and 14, the piezoelectric actuators 13 and 14 push the back surface of the mirror mounting portion 11. On the other hand, with respect to the pushing force of the piezoelectric actuators 13 and 14, the leaf springs 20 and 21 apply a force in the opposite direction to the piezoelectric actuators 13 and 14 from the front surface side of the mirror mounting portion 11. The angle of the mirror 10 is determined by the balance between the piezoelectric actuators 13 and 14 and the leaf springs 20 and 21. At this time, since only the bending force is applied to the support column 12, there is no effect of distortion due to the tensile force.
実施例ではミラー取付け部を駆動源と逆方向に
加圧する弾性部材として板バネを示しているが、
圧縮バネを用いるなど、他の機構に変えることも
できる。 In the embodiment, a leaf spring is shown as an elastic member that presses the mirror mounting part in the opposite direction to the drive source, but
Other mechanisms can also be used, such as using compression springs.
実施例は本考案を干渉計の固定鏡に適用してい
るが、本考案を干渉計の可動鏡に適用することも
できる。 In the embodiment, the present invention is applied to a fixed mirror of an interferometer, but the present invention can also be applied to a movable mirror of an interferometer.
（考案の効果）
本考案では駆動源の変位軸と同軸上でミラー取
付け部を挟んで各駆動源と対向する位置にそれぞ
れミラー取付け部を駆動方向に加圧する弾性部材
を設けたので、支柱の伸縮によるミラー角度の誤
差がなくなり、ミラー角度の調整精度が向上す
る。そのため、例えばこの調整機構をフーリエ変
換赤外分光光度計の干渉計の固定鏡に適用するこ
とにより、干渉状態を常に最良の状態になるよう
に制御することができる。(Effects of the invention) In the present invention, elastic members that press the mirror mounting portions in the driving direction are provided at positions coaxial with the displacement axis of the driving sources and facing each drive source across the mirror mounting portions. Errors in the mirror angle due to expansion and contraction are eliminated, improving the precision of mirror angle adjustment. Therefore, for example, by applying this adjustment mechanism to a fixed mirror of an interferometer of a Fourier transform infrared spectrophotometer, it is possible to control the interference state so that it is always in the best state.
本考案の調整機構は弾性部材の押圧が支柱の歪
に影響を与えないため、組立て工程では弾性部材
の押圧の調整が容易である。 In the adjustment mechanism of the present invention, the pressure of the elastic member does not affect the distortion of the support column, so it is easy to adjust the pressure of the elastic member during the assembly process.
第１図は一実施例を示す正面図、第２図は第１
図のＡ−A′線位置での断面図、第３図は本考案
が適用されるフーリエ変換赤外分光光度計の干渉
計を示す概略構成図である。第４図は従来のミラ
ー角度調整機構を示す正面図、第５図は第４図の
Ｂ−B′線位置での断面図である。
１０……ミラー、１１……ミラー取付け部、１
２……支柱、１３，１４……圧電アクチユエー
タ、２０，２１……板バネ、Ｃ……ミラー取付け
部の支柱取付け部。
FIG. 1 is a front view showing one embodiment, and FIG. 2 is a front view showing one embodiment.
FIG. 3 is a cross-sectional view taken along line A-A' in the figure, and a schematic configuration diagram showing an interferometer of a Fourier transform infrared spectrophotometer to which the present invention is applied. FIG. 4 is a front view showing a conventional mirror angle adjustment mechanism, and FIG. 5 is a sectional view taken along line B-B' in FIG. 4. 10...Mirror, 11...Mirror mounting part, 1
2... Strut, 13, 14... Piezoelectric actuator, 20, 21... Leaf spring, C... Strut mounting part of mirror mounting part.
Claims (1)
ミラー取付け部の裏面上で前記支柱が取りつけら
れている点を中心として互いに直交する２軸上に
それぞれミラー取付け部裏面に垂直な方向に変位
する駆動源を当接させ、前記駆動源の変位軸と同
軸上でミラー取付け部を挟んで各駆動源と対向す
る位置にそれぞれミラー取付け部を駆動源方向に
加圧する弾性部材を設けたミラー角度調整機構。 Support the center part of the back of the mirror mounting part with a pillar,
Driving sources that are displaced in directions perpendicular to the back surface of the mirror mounting portion are brought into contact with each other on two axes that are orthogonal to each other centered on the point where the support is mounted on the back surface of the mirror mounting portion, and the displacement axis of the drive source is A mirror angle adjustment mechanism that is provided with an elastic member that presses the mirror mounting portion in the direction of the drive source at a position facing each drive source on the same axis with the mirror mounting portion sandwiched therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8725489U JPH0543392Y2 (en) | 1989-07-24 | 1989-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8725489U JPH0543392Y2 (en) | 1989-07-24 | 1989-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0325122U JPH0325122U (en) | 1991-03-14 |
| JPH0543392Y2 true JPH0543392Y2 (en) | 1993-11-01 |
Family
ID=31636904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8725489U Expired - Lifetime JPH0543392Y2 (en) | 1989-07-24 | 1989-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543392Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013206892A1 (en) * | 2013-04-17 | 2014-10-23 | OMRON Electronics Manufacturing of Germany G.m.b.H. | Reflector arrangement, light curtain, method for adjusting the reflector assembly, and method for mounting the reflector assembly |
-
1989
- 1989-07-24 JP JP8725489U patent/JPH0543392Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325122U (en) | 1991-03-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102981244B (en) | Two-dimensional large-diameter transmission-type quick reflecting mirror | |
| JPS60219744A (en) | Projection exposure device | |
| JP2886032B2 (en) | Optical adjustment mechanism of image reading device | |
| JPH03103728A (en) | Mechanism for adjusting inclination of movable mirror of spectrometer | |
| CN110531482A (en) | A kind of flexible high-precision time mirror assembly focus adjusting mechanism | |
| US4832452A (en) | Device for setting the angular position of optical elements | |
| JPH0543392Y2 (en) | ||
| US4319804A (en) | Adjustable hollow retroflector | |
| US10288895B2 (en) | Optical device and optical apparatus | |
| US4881814A (en) | Scanning Michelson interferometer assembly | |
| US4722592A (en) | Motorized-axis-angular fine adjustment prism mount | |
| US4735505A (en) | Assembly for adjusting an optical element | |
| US5680214A (en) | Horizontal-post/vertical-flexure arrangement for supporting large reference optics in phase-shifting scanning | |
| JPH0868931A (en) | Facial angle adjustment device | |
| JPH0542349Y2 (en) | ||
| JP2002072057A (en) | Surface adjusting device for adjusting parts | |
| US2629283A (en) | Interference schlieren apparatus of unusually large dimensions, having means for improving the interference quality by selective one point deformation of the reflecting elements of the device | |
| JPH03101409U (en) | ||
| JPH0519157A (en) | Reflecting mirror support device and positioning device using the same | |
| JP7561187B2 (en) | Device for mounting spherical optical components | |
| JP2000214367A (en) | Lens frame device | |
| JP2585567B2 (en) | Composite type retrodirective mirror and method of manufacturing the same | |
| JPH0452726Y2 (en) | ||
| JPH0943491A (en) | Moving mirror support mechanism | |
| JPS6364010A (en) | Laser light reflector support device |