JPH0547805A - Magazine cassette device - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a magazine cassette device capable of improving work efficiency without requiring frequent replacement of magazines. [Structure] A magazine cassette device 1 includes a storage device 2 for storing a magazine 20, a rotating device for rotating the storage device 2 around a rotation shaft 6, and a carrier 30 stored in the magazine 20 vertically along the rotation shaft 6. Moving device 4 moving in the direction
And a heating device for heating and keeping the storage device 2 warm. The storage device 2 is rotated so that the magazine 20 is located above the moving device 4. The moving device 4 is driven to lift the entire carrier so that the uppermost carrier is lifted from the upper part of the magazine to a predetermined position. Then, the top carrier is gripped by the loader device and supplied to the work process.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magazine cassette device which is used when a semiconductor device is carried in and out of the next process by a magazine method in a semiconductor device manufacturing process.

[0002]

2. Description of the Related Art Film carrier tapes and I
In the case of inner lead bonding with the electrode of the C chip, the reel-to-reel system utilizing the flexibility of the tape is adopted to promote automation of the work. However, in this method, when the tape is wound on a reel, for example, when the IC chip becomes large, a defective product may occur due to disconnection of the lead or contact between the lead and the IC chip. For this reason, when the IC chip is large, a magazine method is adopted in which a tape cut into a regular length is sandwiched by carriers and the carriers are stored in a magazine for work.

FIG. 8 is a schematic perspective view of a normally used magazine. The magazine 70 shown in FIG. 8 has a rectangular parallelepiped shape, and a handle 74 is formed on the upper portion 72. No walls are formed on the front and rear side faces, and the carrier 80 holding the film carrier tape or the like is inserted from the front and rear side faces,
About 20 to 30 sheets are laminated. Now, when carrying the carrier 80 from the magazine 70 into the resin sealing process, for example, when two carriers can be put in a mold, the two magazines 70 are arranged in parallel in a predetermined device, and one of the magazines is placed in parallel. A loader device (not shown) for pulling out the carrier 80 at the uppermost part in one direction and transporting it to a predetermined position
The carrier 80 is conveyed to a predetermined working position by the. When the resin sealing operation for the carrier 80 is completed, the magazine 70 is lifted upward, the next carrier 80 is taken out from the magazine 70 by the loader device, and the same operation is repeated.

[0004]

However, in the conventional method in which the carrier 80 in the magazine 70 is taken in and out in one direction, only at most two magazines 70 can be set in a predetermined device, so that the carrier in the magazine can be set. When it runs out, it is necessary to take out the empty magazine from the apparatus and replace it with a new magazine containing the carrier 80. For this reason, when working on a large amount of tape or the like, the magazine has to be frequently replaced, which causes a problem of poor working efficiency.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a magazine cassette device which can improve working efficiency without requiring frequent replacement of magazines.

[0006]

SUMMARY OF THE INVENTION To achieve the above object, a magazine cassette device according to the present invention stores a magazine in which a plurality of carriers used for transporting an object to be processed are housed substantially radially. And a rotation means for rotating the storage means.

Further, at least one of carrier moving means for moving the carrier stored in the magazine along the rotation axis of the storing means and storage moving means for moving the storage means along the rotating axis is provided. Is desirable.

[0008]

According to the present invention, according to the above-described structure, a magazine containing a plurality of carriers used for transporting an object to be processed, for example, a film or a lead frame on which a semiconductor device is placed between the processing steps is radially arranged in the storage means. By storing, a plurality of magazines can be stored in the storing means.
Further, by providing the rotating means for rotating the storing means, when there is no carrier in one magazine,
The carrier can be easily supplied from the next magazine simply by rotating the storage means.

Further, by providing carrier moving means for moving the carrier stored in the magazine along the rotation axis of the storing means or storage moving means for moving the storing means along the rotation axis, the carrier is conveyed to a predetermined position. It will be easier to deliver when doing.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. 1 is a schematic perspective view of a magazine cassette device according to an embodiment of the present invention, FIG. 2 is a schematic perspective view of a magazine housed in the magazine cassette device, and FIG. 3 (a) is a carrier housed in the magazine. Schematic perspective view, FIG.
(B) is a schematic plan view of the carrier, FIG. 4 is a view showing a state in which a magazine is inserted in a magazine cassette device according to an embodiment of the present invention, and FIG. 5 is mounted on a film carrier tape using the magazine cassette device. It is a figure for demonstrating the process of resin-sealing the formed IC chip.

A magazine cassette device 1 shown in FIG. 1 holds a storage device 2 for storing a magazine, a rotating device (not shown) for rotating the storage device 2, and an object to be processed (TAB tape, lead frame, etc.). It is provided with a moving device 4 for moving the carrier in the vertical direction and a heating device (not shown) for heating and keeping the storage device 2 warm.

The storage device 2 is formed by forming a storage portion 12 for storing a magazine on the side surface of a cylindrical main body portion 10. Six storage units 12 are formed at positions symmetrical with respect to the rotational symmetry axis of the cylinder. Further, two groove portions 14 are formed on each of the left and right sides of the storage portion 12. The storage device 2 can be detached from the magazine cassette device, and since it is formed of aluminum, it is lighter and easier to carry than when it is formed of stainless steel or the like. still,
Generally, it is desirable to form three or more storage parts 12, and it is not always necessary to form the storage parts 12 symmetrically.
Further, the main body 10 may be formed in a polygonal prism shape.

The rotating device rotates the storage device 2 around an axis of rotational symmetry, which may be configured to rotate in both forward and reverse directions. The moving device 4 moves the carriers in the magazine stored in the storage unit 12 along the rotating shaft 6 in the vertical direction of FIG. The moving device 4 may also be configured to be rotatable around the rotary shaft 6.

When the magazine cassette device is used in the resin sealing process, since the heating device is provided, the carrier is heated to substantially the same temperature as the molten resin before the work.
Since the temperature can be kept warm, it is possible to shift to the resin sealing work in the state where the tape is thermally expanded. Therefore, it is possible to prevent the tape from expanding and the mounting position of the semiconductor device or the like from being displaced during the work. it can. Also, after work,
The work of curing the thermosetting resin can be easily performed with the carrier stored in the storage device.

The magazine 20 is formed in a rectangular parallelepiped shape as shown in FIG. Upper plate 22 that can be pulled out at the top
The upper plate 22 is provided with a handle 24 for easy carrying. No walls are formed on the front and rear side surfaces of the magazine 20, and carriers are inserted from the front and rear side surfaces to be stacked in the magazine 20. Usually, about 20 to 30 carriers are laminated. Two convex portions 26 are formed on each of the left and right outer surfaces. By inserting the convex portion 26 into the groove portion 14 of the storage device 2, the magazine 20 can be accurately and stably stored in the storage portion 12 of the storage device 2. Further, no wall is formed at the bottom of the magazine 20, and the carrier is held by small holding portions 28 provided at several places on the bottom.

Note that the magazine 20 does not have a structure in which the carriers are directly stacked and accommodated. For example, the claws that move only upward are formed on the left and right inner side surfaces of the magazine, and each carrier is held by the claws. You may make it laminated | stacked.
Even in this case, the carrier can be easily lifted by driving the moving device 4 upward.

The carrier 30 shown in FIG. 3 comprises an upper carrier piece 32a, a lower carrier piece 32b and a hinge 34. A pin 36 is formed on the lower carrier piece 32b, and a hole 38 is formed at the position of the upper carrier piece 32a corresponding to the pin 36.
Are formed. The pins 36 are used to align the TAB tape with the carrier 30. The dashed-dotted line in FIG. 3B indicates the position where the TAB tape is arranged. Insert the sprocket hole of the TAB tape into the pin 36 and stack the two carrier pieces 32a and 32b on top of each other to form the TAB.
The tape is fixed to the carrier 30. Further, the carrier pieces 32a, 32b are provided with holes 42, 42 at substantially central portions of the portions where the TAB tape is not held, and cut portions 44, 44 are formed at one ends of the portions where the TAB tape is held. The holes 42 are used to align the carrier 30 with the mold cavity, and the notches 44 are used to align the TAB tape with the mold cavity.

Notches 46 are formed at both ends of the upper carrier piece 32a. Therefore, when the TAB tape is sandwiched by the carrier 30, the TAB tape and the lower carrier piece 32b are exposed in the notch 46 of the carrier when viewed from the upper carrier piece 32a side. The reason why the upper carrier piece 32a is formed by cutting out both ends thereof is that a vacuum suction device is used as a loader device as described later.

By the way, the conventional carrier is one in which each frame of the TAB tape is sandwiched from three sides, but the carrier 30 used in this embodiment has a structure in which the edge portions of each frame are sandwiched from four sides. .. However, a portion corresponding to the resin supply port is cut out so as not to block the resin supply port during the resin sealing work. When a tape having a two-layer structure is used as the tape, the two-layer tape is thinner than the tape having a three-layer structure and the rigidity of the tape is inferior. For this reason, when a double-layered tape is sandwiched between conventional carriers, the tape is distorted to cause misalignment, and when resin sealing work is performed, the tape is sealed in a distorted state due to the flow of resin. And the resin-sealed product becomes defective. In this embodiment, since the edge portions of each frame of the tape are sandwiched from four sides, distortion of the tape can be suppressed and the tape can be firmly fixed in a flat state, so that the product yield can be improved.

In this embodiment, since 35 mm tape is used as the film carrier tape, the carrier 30 has carrier pieces 32a and 32b each having a thickness of about 2 mm.
The width is about 40 mm and the depth is about 260 mm. The magazine 20 is designed so that this carrier can be inserted. The width of the carrier
By setting the depth to 70 mm tape, which is the maximum standard of the width of the film carrier tape,
Even when using a millimeter or 48 millimeter tape, the same magazine can be used by changing the design of the portion for sandwiching the tape while keeping the size of the entire carrier. The magazine 20 and the carrier 30 are made of stainless steel.

Next, the operation when the resin sealing process of the TAB tape is performed using the magazine cassette device of this embodiment will be described.

First, the carrier 30 holds the TAB tape. After stacking a large number of carriers 30 in the magazine 20, the six magazines 20 are inserted into the storage section 12 of the storage device 2 as shown in FIG. And each magazine 2
The upper plate 22 of 0 is removed. Here, the storage device 2 is heated to approximately the same temperature as the molten resin by the heating device. Next, the storage device 2 is rotated so that the magazine is located above the moving device 4. The moving device 4 is driven, and as shown in FIG. 5, the entire carrier is lifted so that the uppermost carrier is lifted to a position (position where the loader device grips the carrier) separated from the upper part of the magazine by a certain distance. Then, the top carrier is supplied to the molding process by the loader device.

FIG. 6 is a view showing a portion of the carrier sucked by the loader device (vacuum suction device) used in this embodiment, and FIG.
Indicates that the loader device sucks the carrier A-
It is an A-direction arrow schematic sectional drawing. In this embodiment, the vacuum suction device 50 is used as the loader device. The vacuum suction device 50 sucks the periphery of the carrier 30 to suck the carrier 30.
Is conveyed to a predetermined position. In FIG. 6, the shaded portion shows the portion of the carrier sucked by the vacuum suction device 50. Since the carrier 30 has the notches 46 formed at both ends of the upper carrier piece 32a, the vacuum suction device 50 does not suck only the upper carrier piece 32a at the notches 46, but the TAB tape is applied at the hatched portion X. The lower carrier piece 32b can be sucked at the hatched portion Y. This allows
It is possible to prevent the vacuum suction device 50 from sucking only the upper carrier piece 32a and opening the lower carrier piece 32b, so that the carrier 30 can be surely sucked.

Next, as shown in FIG. 5, the carrier 30 is moved to the lower mold 60 by a vacuum suction device, and the hole 42 of the carrier 30 is formed in the pilot pin 64 formed in the cavity 62 of the lower mold 60. insert. In this embodiment, the upper die (not shown) is placed on the lower die 60 after the two carriers are conveyed to predetermined positions. Resin is poured into the cavity of the mold to seal the IC chip mounted on the film carrier tape with resin. When the resin sealing work is completed, the carrier 30 is transferred to the storage device 102 of another magazine cassette device 101 by the vacuum suction device. This magazine cassette device 10
Reference numeral 1 stores a magazine 120 on which no carrier is mounted in the storage device 102. Then, the receiving portion 104a of the moving device 104 is raised to a position where the unloader device (vacuum suction device) conveys the TAB tape. After the carrier 30 transported by the vacuum suction device is placed on the receiving portion 104a of the moving device 104, the moving device 104 descends by the thickness of the carrier.

After that, the above operation is repeated, and the IC chips mounted on the film carrier tape are resin-sealed one after another. When the carrier 30 is removed from one magazine 20, the moving device 4 descends, the storage device 2 is rotated, and the process for the next magazine is performed. Even in the magazine cassette device 101 that stores the carrier 30 for which the resin sealing work has been completed, when the carrier fills the magazine 120, the storage device 102 is rotated to store the carrier in the next empty magazine.

Finally, when it is necessary to cure the thermosetting resin after the resin sealing work, the curing of the resin can be easily progressed by the heating device provided in the magazine cassette device 101.

In the magazine cassette device of this embodiment, since six magazines are radially stored in the storage device,
Since it is not necessary to frequently change the magazine, work efficiency is improved. Further, since the rotating device is provided and the storing device is configured to be rotatable, when there is no carrier in one magazine, the magazine can be replaced with the next magazine by simply rotating the storing device. Further, by using the moving device for moving the carrier, the carrier can be easily arranged at the position where the loader device can grasp, so that the carrier can be grasped by the loader device and continuously conveyed to the predetermined position. Therefore, the working time can be shortened.

Further, since the storage device can be removed from the magazine cassette device, the magazine containing the carrier can be stored in the storage device even after the working process is finished, and the products can be managed by the storage device.・ Can be stored. Moreover, when the process shifts to the next process, only the storage device needs to be mounted, which facilitates the shift between the processes.

In the above embodiment, the case where the magazine cassette device is used in the resin sealing process has been described. However, the present invention is not limited to this, and the magazine cassette device of this embodiment has an IC chip. It can also be used in the bonding process and inspection process.

Further, in the above embodiments, the case where the moving device for moving the carrier is provided in the magazine cassette device has been described, but the present invention is not limited to this, and a storage device is used instead of the carrier moving device. You may provide the storage moving apparatus which moves up and down along a rotating shaft.
Further, a moving device for moving the carrier and the storage device together may be provided.

In the above embodiment, the case where the upper plate of the magazine is of the pull-out type has been described, but the present invention is not limited to this, and the upper plate of the magazine is attached by an electromagnet. It may be a structure. Further, the upper plate may not be removable unless a loader device for taking out the carrier from above is used.

Further, in the above embodiment, the case where the upper carrier piece is provided with the notches at both ends has been described, but the present invention is not limited to this, and a vacuum suction device is used as the loader device. Otherwise, the upper carrier piece and the lower carrier piece may be formed in the same shape.

In addition, in the above embodiment, the case where the TAB tape is held by the carrier has been described, but the present invention is not limited to this, and the carrier may be held by a lead frame or the like.

[0034]

As described above, according to the present invention, a plurality of magazines can be stored in the storage means by radially storing the magazines in the storage means and providing the rotating means for rotating the storage means. Moreover, when one magazine runs out of carriers, the carrier can be easily supplied from the next magazine by simply rotating the storage means, eliminating the need for frequent magazine replacement work. It is possible to provide a magazine cassette device capable of promoting the automation of and improving the work efficiency.

[Brief description of drawings]

FIG. 1 is a schematic perspective view of a magazine cassette device according to an embodiment of the present invention.

FIG. 2 is a schematic perspective view of a magazine housed in the magazine cassette device of this embodiment.

FIG. 3A is a schematic perspective view of a carrier housed in the magazine of this embodiment, and FIG. 3B is a schematic plan view of the carrier.

FIG. 4 is a diagram showing a state in which a magazine is inserted in the magazine cassette device according to the embodiment of the present invention.

FIG. 5 is a diagram for explaining a step of resin-sealing an IC chip mounted on a film carrier tape using the magazine cassette device of this embodiment.

FIG. 6 is a diagram showing a portion of a carrier sucked by a loader device (vacuum suction device) used in this embodiment.

FIG. 7A is a view showing how the loader device sucks a carrier.
FIG. 6 is a schematic cross-sectional view taken along arrow A.

FIG. 8 is a schematic perspective view of a normally used magazine.

[Explanation of symbols]

 1, 101 Magazine cassette device 2, 102 Storage device 4, 104 Moving device 6 Rotating shaft 12 Storage part 14 Groove part 20, 120 Magazine 22 Upper plate 24 Handle 26 Convex part 28 Holding part 30 Carrier 32a Upper carrier piece 32b Lower carrier piece 34 Hinge 36 Positioning pin 38 Hole 42 Hole 44 Notch 50 Vacuum suction device 60 Lower mold 62 Cavity 64 Pilot pin

Claims (3)

[Claims] 1. A storage means for storing a magazine, in which a plurality of carriers used for transporting an object to be processed between processing steps are stored, in a substantially radial shape, and a rotating means for rotating the storage means. Magazine cassette device. 2. A carrier moving means for moving the carrier stored in the magazine along a rotation axis of the storing means, and a storage moving means for moving the storage means along the rotation axis. The magazine cassette device according to claim 1. 3. The magazine cassette device according to claim 1, wherein the storage means is detachably attached to the rotation means.