JPH0574900A - IC auto handler - Google Patents
IC auto handlerInfo
- Publication number
- JPH0574900A JPH0574900A JP3238120A JP23812091A JPH0574900A JP H0574900 A JPH0574900 A JP H0574900A JP 3238120 A JP3238120 A JP 3238120A JP 23812091 A JP23812091 A JP 23812091A JP H0574900 A JPH0574900 A JP H0574900A
- Authority
- JP
- Japan
- Prior art keywords
- auto
- lens
- handler
- ccd camera
- marking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011179 visual inspection Methods 0.000 claims description 8
- 238000007689 inspection Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract 1
- 230000002950 deficient Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 3
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】
【構成】半導体の電気的特性を測定、分類するＩＣオー
トハンドラーとＣＣＤカメラ７、レンズ８、レザー発信
機９、ハーフミラー１０、ミラー１１、捺印マスク１２
で構成され、さらにＣＣＤカメラ７、レンズ８、捺印マ
スク１２は移動機構を有する。ＩＣオートハンドラー
は、ＩＣ４の電気的特性別にレザー発信機９、捺印マス
ク１２、ミラー１１、ハーフミラー１０、レンズ８より
ＩＣ４の捺印をおこなう。さらに、ＩＣ４の画像データ
ーをレンズ８、ＣＣＤカメラ７より取り込みＩＣ４の外
観検査を実施し、ＩＣ４の外観検査良否を判定する。つ
ぎにＩＣオートハンドラは、この良否判定別にＩＣ４を
ソートレール５に搬送し、収容マガジン６に収容する。
【効果】ＩＣ検査工程において、作業コストを削減し、
ＩＣが完成するまでのリードタイムを低減できる。ま
た、ＩＣの良品、不良品混入等による作業ミスも阻止す
ることが実現できる。
(57) [Summary] [Structure] IC auto-handler for measuring and classifying electrical characteristics of semiconductors, CCD camera 7, lens 8, laser transmitter 9, half mirror 10, mirror 11, marking mask 12
Further, the CCD camera 7, the lens 8 and the marking mask 12 have a moving mechanism. The IC auto-handler stamps the IC4 from the laser transmitter 9, the marking mask 12, the mirror 11, the half mirror 10 and the lens 8 for each electrical characteristic of the IC 4. Further, the image data of the IC4 is taken in from the lens 8 and the CCD camera 7, and the appearance inspection of the IC4 is performed to judge whether the appearance inspection of the IC4 is good or bad. Next, the IC auto handler conveys the IC 4 to the sort rail 5 and stores it in the storage magazine 6 according to the quality judgment. [Effect] Work cost is reduced in the IC inspection process,
The lead time to complete the IC can be reduced. Further, it is possible to prevent work mistakes due to mixing of good and bad ICs.
Description
【０００１】[0001]
【産業上の利用分野】本発明はＩＣテストシステムに係
わる、ＩＣの電気的特性を測定、分類するためのＩＣオ
ートハンドラーに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an IC auto-handler for measuring and classifying the electrical characteristics of an IC, which relates to an IC test system.
【０００２】[0002]
【従来の技術】従来ＩＣの捺印と外観検査は、ＩＣの電
気的特性を測定、分類する工程の前後、別工程において
ＩＣ捺印専用機及び外観検査専用機により実施してい
た。2. Description of the Related Art Conventionally, IC marking and appearance inspection have been carried out by an IC marking dedicated machine and a visual inspection dedicated machine before and after the step of measuring and classifying the electrical characteristics of the IC.
【０００３】[0003]
【発明が解決しようとする課題】しかし、別工程におい
てＩＣ捺印専用機及びＩＣ外観検査専用機でＩＣの捺
印、外観検査を行うと、作業コストがかかり、ＩＣが完
成するまでのリードタイムも増え、またＩＣの良品、不
良品混入等による作業ミスも発生する結果となってしま
う。However, when the IC marking and the appearance inspection are performed by the IC marking dedicated machine and the IC appearance inspection dedicated machine in a separate process, the work cost is increased and the lead time to complete the IC is increased. In addition, work errors due to mixing of non-defective and defective ICs will occur.
【０００４】そこで本発明は、ＩＣオートハンドラーに
ＩＣの捺印機構と外観検査機構を取り付け、ＩＣの電気
的特性を測定し、ただちにＩＣの捺印と外観検査を行
い、その後分類するため作業コストも削減され、ＩＣが
完成するまでのリードタイムも低減できる。また、ＩＣ
の良品、不良品混入等による作業ミスも阻止することが
できる。Therefore, according to the present invention, the IC marking mechanism and the appearance inspection mechanism are attached to the IC auto handler, the electrical characteristics of the IC are measured, the IC marking and the appearance inspection are immediately performed, and then the classification is performed, so that the work cost is also reduced. Also, the lead time until the IC is completed can be reduced. Also, IC
It is possible to prevent work mistakes due to mixing of non-defective products and defective products.
【０００５】[0005]
【課題を解決するための手段】本発明のＩＣオートハン
ドラーは、ＩＣの電気的特性を測定するテスターとハン
ドリング装置を含むテストシステムにおいて、上記テス
ターのテストヘッドと、ＩＣの間で電気的特性を測定、
分類するために用いられるＩＣオートハンドラーにおい
て、ＩＣの捺印機構と外観検査機構を取り付けたことを
特徴とする。The IC auto-handler of the present invention is a test system including a tester and a handling device for measuring the electrical characteristics of the IC, and the electrical characteristics are measured between the test head of the tester and the IC. Measurement,
The IC auto-handler used for classification is characterized by having an IC marking mechanism and a visual inspection mechanism.
【０００６】[0006]
【実施例】以下に本発明の一実施例を図面に基づいて説
明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
【０００７】図１は本発明のＩＣオートハンドラーの概
略図である。FIG. 1 is a schematic view of an IC auto handler of the present invention.
【０００８】図１において、ＩＣ４が収容されている供
給マガジン１より、ＩＣ４はＩＣオートハンドラー本体
のチャンバーレール２に収容される。In FIG. 1, the IC 4 is housed in the chamber rail 2 of the IC auto handler main body from the supply magazine 1 housing the IC 4.
【０００９】このチャンバーレール２により、ＩＣ４は
測定部３に適した並びとされ、必要に応じた個数が収容
される。With the chamber rails 2, the ICs 4 are arranged in a line suitable for the measuring unit 3 and the ICs 4 are accommodated in the required number.
【００１０】さらにＩＣ４の電気的特性の測定条件に合
わせた温度に設定される。Further, the temperature is set in accordance with the measurement condition of the electric characteristics of IC4.
【００１１】チャンバーレール２に収容されたＩＣ４は
設定温度、待機時間の確認をおこない測定部３に搬送さ
れ、テスター等によりＩＣ４の電気的特性を測定する。The IC 4 housed in the chamber rail 2 is conveyed to the measuring section 3 after confirming the set temperature and the waiting time, and the electrical characteristics of the IC 4 are measured by a tester or the like.
【００１２】この電気的特性の測定結果により、テスタ
ーはＩＣオートハンドラーにＩＣ４の分類データーを転
送する。The tester transfers the classification data of IC4 to the IC auto handler based on the measurement result of the electrical characteristics.
【００１３】ＩＣオートハンドラーは、この分類データ
ー別にＩＣ４の捺印を行うため、捺印マスク１２、レン
ズ８を適正位置に設置する。The IC auto handler sets the marking mask 12 and the lens 8 at appropriate positions in order to mark the IC 4 according to the classification data.
【００１４】捺印マスク１２、レンズ８設置後、レーザ
ー発信機９より発射されたレーザー光線は捺印マスク１
２を通過する事により、捺印マスク１２どうりに加工整
形される。After the marking mask 12 and the lens 8 are installed, the laser beam emitted from the laser transmitter 9 is the marking mask 1
By passing through 2, it is processed and shaped like the imprint mask 12.
【００１５】この加工整形されたレーザー光線はミラー
１１、ハーフミラー１０、レンズ８を通過し、測定部３
のＩＣ４に到達する。The processed and shaped laser beam passes through the mirror 11, the half mirror 10 and the lens 8, and the measuring section 3
Reach IC4.
【００１６】ＩＣ４はこのレザー光線を受け、テスター
からの分類デター別に捺印される。次にＩＣオートハン
ドラーは外観検査をおこなうため、ＩＣの外観検査項目
別にレンズ８、ＣＣＤカメラ７を適正位置に移動させ
る。The IC 4 receives the laser beam and is imprinted with the classification data from the tester. Next, the IC auto handler moves the lens 8 and the CCD camera 7 to appropriate positions for each IC visual inspection item in order to perform visual inspection.
【００１７】移動動作終了を確認後、ＩＣオートハンド
ラーは画像データーをレンズ８、ＣＣＤカメラ７より取
り込み、予め取り込んである良品画像データーと比較を
おこなう。After confirming the completion of the moving operation, the IC auto-handler takes in the image data from the lens 8 and the CCD camera 7 and compares it with the non-defective image data previously taken in.
【００１８】この比較値が設定値以下の場合、つぎの外
観検査項目をおこなうため再びレンズ８、ＣＣＤカメラ
７を適正位置に移動させる。When the comparison value is less than the set value, the lens 8 and the CCD camera 7 are moved to the proper positions again in order to perform the next appearance inspection item.
【００１９】移動動作終了を確認後、ＩＣオートハンド
ラーは画像データーをレンズ８、ＣＣＤカメラ７より取
り込み、予め取り込んである良品画像データーと比較を
おこない、比較値が設定値以上になるまでＩＣオートハ
ンドラーは以上の作業を繰り返す。After confirming the completion of the moving operation, the IC auto-handler takes in the image data from the lens 8 and the CCD camera 7 and compares it with the image data of the non-defective product which has been taken in in advance. Repeats the above work.
【００２０】全ての外観検査項目において、予め取り込
んである良品画像データーとの比較値が設定値以下の場
合、ＩＣオートハンドラーはＩＣ４を外観検査良品 と
判定する。In all the appearance inspection items, if the comparison value with the non-defective image data that has been captured in advance is less than the set value, the IC auto handler determines that IC4 is a good appearance inspection item.
【００２１】測定部３において外観検査されたＩＣ４
は、ＩＣオートハンドラの良品ソートレール５に搬送さ
れ、電気的特性及び、外観検査別に分類され、収容マガ
ジン６に収容される。The IC 4 that has been visually inspected in the measuring section 3
Are transported to the non-defective sort rail 5 of the IC auto handler, sorted by electrical characteristics and visual inspection, and stored in the storage magazine 6.
【００２２】[0022]
【発明の効果】以上に述べたように本発明によれば、半
導体の電気的特性を測定するテスターとハンドリング装
置を含むテストシステムで、上記テスターのテストヘッ
ドとＩＣの間で電気的特性を測定、分類するために用い
られるＩＣオートハンドラーにおいて、ＩＣの捺印をお
こなう捺印機構と、外観検査をおこなう外観検査機構を
設けることにより、ＩＣが完成するまでのリードタイ
ム、作業コストの低減と、ＩＣの不良品混入等の作業ミ
スを阻止できるため、ＩＣのコストを下げ、品質の高い
ＩＣの生産を実現できる。As described above, according to the present invention, a test system including a tester for measuring the electrical characteristics of a semiconductor and a handling device measures the electrical characteristics between the test head of the tester and the IC. , In the IC auto handler used for classification, by providing a marking mechanism for marking the IC and a visual inspection mechanism for performing the visual inspection, the lead time to the completion of the IC and the work cost are reduced, Since it is possible to prevent work mistakes such as mixing of defective products, it is possible to reduce the cost of ICs and realize the production of high quality ICs.
【図１】本発明のＩＣオートハンドラーの一実施例を示
す主要構成図。FIG. 1 is a main configuration diagram showing an embodiment of an IC auto handler of the present invention.
１ 供給マガジン ２ チャンバーレール ３ 測定部 ４ ＩＣ ５ ソートレール ６ 収容マガジン ７ ＣＣＤカメラ ８ レンズ ９ レーザー発信機 １０ ハーフミラー １１ ミラー １２ 捺印マスク 1 Supply Magazine 2 Chamber Rail 3 Measuring Section 4 IC 5 Sort Rail 6 Storage Magazine 7 CCD Camera 8 Lens 9 Laser Transmitter 10 Half Mirror 11 Mirror 12 Marking Mask
Claims (1)
ハンドリング装置を含むテストシステムで、上記テスタ
ーのテストヘッドとＩＣの間で電気的特性を測定するた
めに用いられるＩＣオートハンドラーにおいて、ＩＣの
捺印機構と外観検査機構を取り付けたことを特徴とする
ＩＣオートハンドラー。1. A test system including a tester and a handling device for measuring electrical characteristics of an IC, wherein an IC autohandler used for measuring electrical characteristics between a test head of the tester and the IC is used. An IC auto-handler featuring a marking mechanism and a visual inspection mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238120A JPH0574900A (en) | 1991-09-18 | 1991-09-18 | IC auto handler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238120A JPH0574900A (en) | 1991-09-18 | 1991-09-18 | IC auto handler |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0574900A true JPH0574900A (en) | 1993-03-26 |
Family
ID=17025480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3238120A Pending JPH0574900A (en) | 1991-09-18 | 1991-09-18 | IC auto handler |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0574900A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005119774A1 (en) * | 2004-06-01 | 2005-12-15 | Manufacturing Integration Technology Ltd | Method and apparatus for precise marking and placement of an object |
| US6990421B2 (en) | 2002-10-02 | 2006-01-24 | Seiko Epson Corporation | Method of displaying measurement result in inspection process and system thereof, and computer program |
| US7123979B2 (en) | 2002-10-23 | 2006-10-17 | Seiko Epson Corporation | Method of intercorporate information-sharing, system, and computer program |
-
1991
- 1991-09-18 JP JP3238120A patent/JPH0574900A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6990421B2 (en) | 2002-10-02 | 2006-01-24 | Seiko Epson Corporation | Method of displaying measurement result in inspection process and system thereof, and computer program |
| USRE43405E1 (en) | 2002-10-02 | 2012-05-22 | Seiko Epson Corporation | Method of displaying measurement result in inspection process and system thereof, and computer program |
| US7123979B2 (en) | 2002-10-23 | 2006-10-17 | Seiko Epson Corporation | Method of intercorporate information-sharing, system, and computer program |
| WO2005119774A1 (en) * | 2004-06-01 | 2005-12-15 | Manufacturing Integration Technology Ltd | Method and apparatus for precise marking and placement of an object |
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