JPH06115071A - Inkjet recording head - Google Patents
Inkjet recording headInfo
- Publication number
- JPH06115071A JPH06115071A JP4268834A JP26883492A JPH06115071A JP H06115071 A JPH06115071 A JP H06115071A JP 4268834 A JP4268834 A JP 4268834A JP 26883492 A JP26883492 A JP 26883492A JP H06115071 A JPH06115071 A JP H06115071A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- flow path
- head
- common flow
- recording head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000010521 absorption reaction Methods 0.000 claims abstract description 9
- 238000005192 partition Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 abstract description 22
- 239000000470 constituent Substances 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- 230000003014 reinforcing effect Effects 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000001454 recorded image Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000008961 swelling Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 238000013441 quality evaluation Methods 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
Landscapes
- Ink Jet (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
(57)【要約】
【目的】 列状に配置されたインク吐出口よりインク滴
を吐出させるインクジェット記録ヘッド（特に多ノズル
の大型ラインヘッド）において、ヘッド構成材料の一部
を工夫することにより、剛性向上と材料安定性を確保
し、組立性が良く、高い画像品質が得られる大型のイン
クジェット記録ヘッドを提供する。
【構成】 各インク吐出口にインクを供給するインク共
通流路を形成する部材のヤング率が２．７×１０11Ｎ／
ｍ2以上とし、また、前記共通流路形成部材の吸水率が
０．１％以下とした。
(57) [Summary] [Purpose] In an inkjet recording head (especially a large line head with multiple nozzles) that ejects ink droplets from the ink ejection ports arranged in rows, by devising some of the head constituent materials, (EN) Provided is a large-sized ink jet recording head which has improved rigidity and material stability, is easy to assemble, and can obtain high image quality. [Structure] The Young's modulus of a member forming an ink common flow path for supplying ink to each ink ejection port is 2.7 × 10 11 N /
m 2 or more, and the water absorption of the common flow path forming member was 0.1% or less.
Description
【０００１】[0001]
【産業上の利用分野】本発明はインク滴を用いて画像や
文字を記録する記録装置（プリンタ、複写機、ファクシ
ミリ等）に用いるインクジェット記録ヘッドに関し、さ
らに詳しくは、高度に多ノズル化された大型インクジェ
ット記録ヘッドの構成に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head used in a recording apparatus (printer, copying machine, facsimile, etc.) for recording images and characters by using ink droplets, and more specifically, it has a high number of nozzles. The present invention relates to a configuration of a large inkjet recording head.
【０００２】[0002]
【従来の技術】インクジェット記録方式に用いるインク
ジェット記録ヘッドとしては多種多様なものが知られて
いるが、一般に、微細な複数のインク吐出口、各インク
吐出口間を隔てる隔壁部材、インクを付勢してインク滴
を吐出させるインク吐出エネルギー発生体、各インク吐
出口にインクを導くインク共通流路によって構成され
る。2. Description of the Related Art A wide variety of ink jet recording heads are known for use in an ink jet recording system. Generally, a plurality of fine ink ejection ports, a partition member separating each ink ejection port, and an ink urging member are energized. And an ink common channel for guiding the ink to each ink ejection port.
【０００３】従来、前記隔壁部材およびインク共通流路
は同一工程で形成される場合が多く、種々の形成方法が
考案されている。Conventionally, the partition member and the ink common flow channel are often formed in the same step, and various forming methods have been devised.
【０００４】第一の方法としては、特開昭５６−１２１
７７５号公報のようにガラス板等の表面をフォトリソグ
ラフィによってエッチング加工して形成する方法が上げ
られる。As a first method, Japanese Patent Laid-Open No. 56-121
As disclosed in Japanese Patent No. 775, there is a method of forming the surface of a glass plate or the like by etching by photolithography.
【０００５】第二の方法としては、米国特許４３６４０
６６号公報のようにポリサルフォン等の樹脂材料を射出
成形することにより直接的に形成する方法が上げられ
る。A second method is US Pat.
As disclosed in Japanese Patent No. 66, a method of directly forming a resin material such as polysulfone by injection molding can be used.
【０００６】第三の方法としては、特公平２−４２６７
０号公報のようにインク吐出エネルギー発生体（例えば
発熱素子や薄膜ピエゾ素子）を形成した基盤上に感光性
樹脂材料を接合し、該感光性樹脂をフォトリソグラフィ
によってパターン形成して構成する方法が上げられる。As a third method, Japanese Patent Publication No. 2-4267
As disclosed in Japanese Unexamined Patent Publication No. 0-202, a method in which a photosensitive resin material is bonded to a substrate on which an ink ejection energy generator (for example, a heating element or a thin film piezo element) is bonded, and the photosensitive resin is patterned by photolithography is used. Can be raised.
【０００７】[0007]
【発明が解決しようとする課題】近年、記録方式の高速
化と高画質化が大きな注目を集めており、インクジェッ
ト方式においてもインク吐出周波数の高速化と多ノズル
化は極めて重要である。多ノズル化の観点からヘッドの
記録幅に着目すると、従来、数ｍｍであった記録幅を２
００〜３００ｍｍといった長尺に拡大する必要性があ
る。In recent years, much attention has been paid to the speeding up of the recording method and the improvement of the image quality, and in the ink jet method, it is extremely important to increase the ink ejection frequency and increase the number of nozzles. Focusing on the recording width of the head from the viewpoint of increasing the number of nozzles, the recording width that was conventionally several mm is
It is necessary to enlarge the length as long as 100 to 300 mm.
【０００８】このような大型のインクジェット記録ヘッ
ド（以下、ラインヘッドと表現する）によって良好な画
像記録を行うには次のような配慮が必要である。The following considerations are required to perform good image recording with such a large ink jet recording head (hereinafter referred to as a line head).
【０００９】第一に各インク吐出口から飛翔するインク
滴の速度や量を均一にするため、各ヘッド構成部材を精
度良く接合する必要がある。接合しようとする部材に反
りやたわみが存在すると高精度の接合は困難である。First, in order to make the speed and amount of ink droplets flying from each ink ejection port uniform, it is necessary to accurately join the head constituent members. If the members to be joined have a warp or a bend, it is difficult to join them with high precision.
【００１０】第二に各インク吐出口から記録紙に至る飛
程（以下、プラテンギャップと表現する）を均一に保つ
ため、ヘッドの剛性確保と寸法の経時安定性が必要であ
る。第三に各インク吐出口列の直線性を維持するため、
ヘッドの剛性確保と寸法の経時安定性が必要である。Second, in order to maintain a uniform range (hereinafter referred to as a platen gap) from each ink ejection port to the recording paper, it is necessary to secure the rigidity of the head and to stabilize the dimensions with time. Thirdly, in order to maintain the linearity of each ink ejection port array,
It is necessary to secure the rigidity of the head and to stabilize the dimensions over time.
【００１１】これらの要求品質は従来の小数ノズルヘッ
ドに比較して格段に高いレベルが求められる。These required qualities are required to have a remarkably high level as compared with the conventional fractional nozzle head.
【００１２】前記従来技術はラインヘッドを構成する上
で次のような課題を有する。The above-mentioned prior art has the following problems in constructing a line head.
【００１３】第一の従来技術では、ガラスのヤング率が
低く、例えば、ヘッドを記録装置に固定する時に加わる
応力でヘッドに反りやうねりが生じ、プラテンギャップ
不良やインク吐出口列の曲がりによる画質不良が起こり
やすい。In the first prior art, the Young's modulus of glass is low, and for example, the stress applied when the head is fixed to the recording apparatus causes warping or waviness in the head, resulting in a defective platen gap or a bend in the ink ejection port array. Defects are likely to occur.
【００１４】第二の従来技術でも、第一と同じく樹脂材
料のヤング率が低いため、記録装置組み込みによって画
質不良が発生しやすい。また、射出成形による反りやう
ねりが発生しやすく、ヘッド組立時に他のヘッド構成部
材（例えば、インク吐出エネルギー発生体やインク吐出
口）と精度良く接合することができず、インク吐出速度
や吐出インク量のバラツキ原因となる。さらに、従来の
小型ヘッドでは問題とならない程度であったインクによ
る膨潤で、経時的に反りやうねりが助長されやすく、画
像品質の経時劣化が発生する。Also in the second prior art, since the Young's modulus of the resin material is low as in the first prior art, defective image quality is likely to occur due to incorporation into the recording device. Also, warping or undulation due to injection molding is likely to occur, and it is not possible to accurately join with other head constituent members (for example, an ink discharge energy generator or an ink discharge port) during head assembly, and thus the ink discharge speed and the discharge ink It causes variation in the quantity. Further, swelling with ink, which has not been a problem with conventional small heads, tends to promote warpage and undulation over time, resulting in deterioration of image quality over time.
【００１５】第三の従来技術により、感光性樹脂を多重
積層して前記隔壁部材や前記インク共通流路を構成しよ
うとした場合も、第二の従来技術と同様に、感光樹脂材
料のヤング率が低く、画質不良が発生しやすい。また、
多重積層時に発生する反りやうねりで他のヘッド構造部
材と精度良く接合できず、インク吐出速度や吐出インク
量のバラツキ原因となる。さらに、インクによる膨潤
で、経時的に反りやうねりが助長されやすく、画像品質
の経時劣化が発生する。Even when the photosensitive resin is laminated in multiple layers according to the third conventional technique to form the partition member and the ink common flow path, the Young's modulus of the photosensitive resin material is the same as in the second conventional technique. Is low, and poor image quality is likely to occur. Also,
The warp or undulation that occurs during the multi-layering makes it impossible to join the head structural member with high precision, which causes variations in the ink ejection speed and the ejected ink amount. Further, the swelling due to the ink tends to promote warpage and undulation over time, resulting in deterioration of image quality over time.
【００１６】このように、安定したインク吐出性能と記
録画像品質を確保する上でヘッドの剛性確保は重要な課
題であり、材料力学的にヘッド材料のヤング率で表記す
ることができる。また、従来の小型ヘッドでは問題とな
らない程度であった流路材料のインクによる膨潤が課題
となり、特にインクの主成分である水の吸収性は大きな
課題となる。As described above, securing the rigidity of the head is an important issue in securing stable ink ejection performance and recorded image quality, and can be expressed by Young's modulus of the head material in terms of material dynamics. Further, swelling of the flow path material with ink, which is not a problem in the conventional small head, becomes a problem, and in particular, the absorbability of water, which is the main component of the ink, becomes a big problem.
【００１７】本発明はこういった状況に鑑み上記の課題
を解決するもので、その目的とするところは、ヘッド構
成材料を工夫することにより、剛性向上と材料安定性を
確保し、組立性が良く、高い画像品質が得られる大型の
ラインヘッドを提供することにある。The present invention solves the above problems in view of such a situation. An object of the present invention is to improve rigidity and material stability by devising a head constituent material and to improve assemblability. It is to provide a large-sized line head that can obtain good and high image quality.
【００１８】[0018]
【課題を解決するための手段】本発明のインクジェット
記録ヘッドは、列状に配置された複数のインク吐出口
と、各インク吐出口間を隔てる隔壁部材と、インクを付
勢してインク滴を前記吐出口より吐出させるインク吐出
エネルギー発生体と、各インク吐出口にインクを導くた
めのインク共通流路を備えたインクジェット記録ヘッド
において、各インク吐出口にインクを供給するインク共
通流路を形成する部材のヤング率が２．７×１０11Ｎ／
ｍ2以上であることを特徴とし、また、前記共通流路形
成部材の吸水率が０．１％以下であることを特徴とす
る。An ink jet recording head according to the present invention comprises a plurality of ink ejection openings arranged in a row, a partition member separating the ink ejection openings, and a biasing ink to eject ink droplets. In an ink jet recording head having an ink ejection energy generator ejected from the ejection ports and an ink common channel for guiding ink to each ink ejection port, an ink common channel for supplying ink to each ink ejection port is formed. Young's modulus of the member to be treated is 2.7 × 10 11 N /
m 2 or more, and the water absorption rate of the common flow path forming member is 0.1% or less.
【００１９】[0019]
【作用】本発明のインクジェット記録ヘッドによれば、
各インク吐出口にインクを導くインク共通流路部材のヤ
ング率を最適化し、インクの主成分である水の吸収を制
限することによって、ヘッドの剛性と信頼性を確保し、
前述の目的を達成させるものである。According to the ink jet recording head of the present invention,
The rigidity and reliability of the head are secured by optimizing the Young's modulus of the ink common flow path member that guides the ink to each ink ejection port and limiting the absorption of water, which is the main component of the ink,
The above-mentioned object is achieved.
【００２０】[0020]
【実施例】以下、実施例に従って本発明について詳しく
説明する。EXAMPLES The present invention will be described in detail below with reference to examples.
【００２１】図１は本発明の第１の実施例を示すインク
ジェット記録ヘッドの斜視図である。FIG. 1 is a perspective view of an ink jet recording head showing a first embodiment of the present invention.
【００２２】図１において、基板１の表面にはインク吐
出エネルギー発生体であるピエゾ素子２が接合され、基
板１表面に形成した電極（図示せず）を通して電気信号
を印加し、圧電効果による振動を発生する。インク共通
流路部材５はピエゾ素子２の整列方向の両側に沿ってイ
ンク吐出口８にインクを供給するインク共通流路６を備
えている。振動膜４は例えばポリイミド樹脂膜であり、
インク共通流路部材５とピエゾ素子２の表面に接着ある
いは融着接合されている。補強部材３は基板１上にピエ
ゾ素子２と交互配置して接合され、振動膜４とインク共
通流路部材５と接着あるいは融着接合することによっ
て、振動膜４のピエゾ素子間のクロストークを防ぐ役割
を果たす。振動膜４の表面にはステンレス製薄板をエッ
チング加工して形成した隔壁７が補強部材３上に位置す
るように接着あるいは融着されている。ノズル板９はイ
ンク吐出口８を具備しており、インク吐出口８がピエゾ
素子２と鉛直に対抗する位置でインク共通流路部材５と
隔壁７に接合されている。In FIG. 1, a piezoelectric element 2 which is an ink ejection energy generator is bonded to the surface of a substrate 1, and an electric signal is applied through electrodes (not shown) formed on the surface of the substrate 1 to vibrate by a piezoelectric effect. To occur. The ink common flow channel member 5 includes an ink common flow channel 6 that supplies ink to the ink ejection ports 8 along both sides of the piezo element 2 in the alignment direction. The vibration film 4 is, for example, a polyimide resin film,
The ink common flow path member 5 and the surface of the piezo element 2 are bonded or fusion bonded. The reinforcing member 3 is alternately arranged on the substrate 1 and bonded to the piezo elements 2. By bonding or fusing the vibrating film 4 and the ink common flow path member 5, cross-talk between the piezo elements of the vibrating film 4 is prevented. Play a protective role. On the surface of the vibrating film 4, a partition 7 formed by etching a stainless thin plate is adhered or fused so as to be located on the reinforcing member 3. The nozzle plate 9 has an ink ejection port 8, and is joined to the ink common flow path member 5 and the partition wall 7 at a position where the ink ejection port 8 vertically opposes the piezo element 2.
【００２３】即ち、ピエゾ素子２の振動エネルギーが振
動膜４に伝達され、振動膜４と隔壁７とノズル板９によ
って形成される圧力室の圧力変化によってインク吐出口
８よりインク滴を吐出させるものである。That is, the vibration energy of the piezo element 2 is transmitted to the vibrating film 4, and an ink droplet is ejected from the ink ejection port 8 by the pressure change of the pressure chamber formed by the vibrating film 4, the partition wall 7 and the nozzle plate 9. Is.
【００２４】前述のとおり、インクジェット記録ヘッド
の多ノズル化は重要な課題であり、この要求に答えるた
め、本例の構成で０．６７７ｍｍピッチ（３７．５ｄｐ
ｉ）、吐出口径６０μｍで５１２個のインク吐出口を有
する試験ヘッド（全長約３９０ｍｍ）を作成した。その
際、インク供給流路部材５を様々な材質で製作し、材料
の剛性（ヤング率で表記）と吸水性が組立性や記録画像
品質に関する比較検討を行った。検討した材料と物性値
を表１に示す。As described above, increasing the number of nozzles in the ink jet recording head is an important issue, and in order to meet this demand, the construction of this example has a 0.677 mm pitch (37.5 dp).
i), a test head (total length of about 390 mm) having an ejection port diameter of 60 μm and 512 ink ejection ports was prepared. At that time, the ink supply flow path member 5 was manufactured with various materials, and the rigidity (expressed by Young's modulus) and the water absorption of the materials were compared and examined for assemblability and recorded image quality. Table 1 shows the studied materials and physical properties.
【００２５】なお、ステンレス以外の材料は、図２に示
すように平板状のインク共通流路部材５に対して研削砥
石１１を矢印Ａ方向に移動させることによってインク共
通流路６およびピエゾ素子２の係合溝を加工し、ステン
レス材料は同一形状をメタルソーで加工した。For materials other than stainless steel, the common ink flow channel 6 and the piezo element 2 are moved by moving the grinding wheel 11 in the direction of arrow A with respect to the flat ink common flow channel member 5 as shown in FIG. The engagement groove was processed, and the stainless steel material was processed with the same shape using a metal saw.
【００２６】[0026]
【表１】 [Table 1]
【００２７】他の構成部品は全く同じ材質で組立て、イ
ンク吐出周波数１２ＫＨｚ、インク滴速度１２ｍ／ｓｅ
ｃ、インク滴重量０．０８μｃｃ／ｄｏｔ（水性イン
ク）の条件にて、図３に示すように回転ドラム１２に固
定した記録紙１３に記録ヘッド１４を対向させ、記録ヘ
ッド１３を回転ドラム１２の１回転につき矢印Ｂの方向
に８４．７μｍづつ８回移動させて画像記録する方法で
３００ｄｐｉの画像記録を行って画像品質評価した。組
立性と画像品質に関する評価結果を表２に示す。The other components are assembled from the same material, the ink ejection frequency is 12 KHz, and the ink drop velocity is 12 m / se.
Under the conditions of c and ink drop weight of 0.08 μcc / dot (water-based ink), the recording head 14 is made to face the recording paper 13 fixed to the rotating drum 12 as shown in FIG. The image quality was evaluated by recording an image at 300 dpi by moving the image 8 times by 84.7 μm per rotation in the direction of arrow B. Table 2 shows the evaluation results regarding the assemblability and the image quality.
【００２８】[0028]
【表２】 [Table 2]
【００２９】ヤング率の低いホウケイ酸ガラスと快削性
セラミックは平坦な素材を使用したにもかかわらず、図
２のインク共通流路部材５の溝加工後にヘッド長手方向
に０．６ｍｍ程度の不均一なソリが生じた。このソリは
ピエゾ素子２および補強部材３を接合した基板１に接着
固定した後も残留し、隔壁７やノズル板９を接合する
と、前記ソリのためにピエゾ素子２とインク吐出口８の
接合位置ズレが起こり、インク吐出不良やインク滴速度
のバラツキが発生し、良好なインク吐出特性得られなか
った。また、製作したヘッドを記録装置に取り付ける際
にネジ固定による応力がヘッドに加わり、ヘッドのソリ
やたわみがさらに増長され、プラテンギャップが均一で
ないための画像ムラや、記録画像の直線性が損なわれる
現象が確認された。Although the borosilicate glass having a low Young's modulus and the free-cutting ceramic were made of flat materials, even after the grooves were formed in the ink common flow path member 5 of FIG. A uniform warp occurred. This warp remains even after being adhered and fixed to the substrate 1 to which the piezo element 2 and the reinforcing member 3 are joined, and when the partition wall 7 and the nozzle plate 9 are joined, the joining position of the piezo element 2 and the ink ejection port 8 due to the warp. Displacement occurred, ink ejection failure and variation in ink drop velocity occurred, and good ink ejection characteristics could not be obtained. In addition, when the manufactured head is attached to the recording apparatus, stress due to screw fixing is applied to the head, warp and deflection of the head are further increased, and image unevenness due to uneven platen gap and linearity of recorded image are impaired. The phenomenon was confirmed.
【００３０】ステンレスと純度８５％アルミナの場合も
溝加工後に０．３ｍｍ程度の不均一なソリが発生した。
このインク共通流路部材を用いてヘッドを組み立てる
と、ガラスや快削性セラミックより発生度合いは低い
が、インク吐出不良やインク滴の速度バラツキが発生し
た。また、記録装置取付時のソリやたわみによる画像劣
化も、ガラスや快削セラミックより程度は良いが、満足
できる画質を得ることができなかった。In the case of stainless steel and 85% pure alumina, uneven warp of about 0.3 mm was generated after the groove processing.
When a head was assembled using this ink common flow path member, the occurrence of ink was lower than that of glass and free-cutting ceramics, but ink ejection failure and ink drop velocity variation occurred. Further, although the image deterioration due to warpage and flexure when the recording device is attached is better than that of glass or free-cutting ceramic, satisfactory image quality cannot be obtained.
【００３１】ヤング率が２．７×１０11Ｎ／ｍ2を越え
る材料では、溝加工時に発生するソリは０．０５ｍｍ以
下であり、前述のような組立上の問題や記録装置搭載時
の変形は発生せず、極めて良好な製作歩留まりが得ら
れ、画像品質も良好であった。With a material having a Young's modulus of more than 2.7 × 10 11 N / m 2 , the amount of warp generated during groove processing is 0.05 mm or less. Did not occur, an extremely good production yield was obtained, and the image quality was also good.
【００３２】また、樹脂含浸アルミナ−１はヤング率が
２．７×１０11Ｎ／ｍ2を越え、溝加工時のソリや記録
装置搭載時のソリやたわみに起因する問題はなかった
が、画像品質の経時劣化が発生した。原因を解析する
と、インクの主成分である水が素材に吸収されてソリや
変寸を起こし、画質が経時劣化していることが判明し
た。吸水率０．１％の樹脂含浸アルミナや表面に金属溶
射を施して吸水性を排除した材料においては、こうした
問題は発生しなかった。Further, the resin-impregnated alumina-1 had a Young's modulus of over 2.7 × 10 11 N / m 2 , and there was no problem due to warpage during groove processing, warpage during mounting in a recording apparatus, or bending. Image quality has deteriorated over time. Analysis of the cause revealed that water, which is the main component of the ink, was absorbed by the material, causing warpage and sizing, and the image quality deteriorated over time. Such problems did not occur in resin-impregnated alumina having a water absorption rate of 0.1% or in a material whose surface was subjected to metal spraying to eliminate water absorption.
【００３３】このように、インク共通流路部材５のヤン
グ率が２．７×１０11Ｎ／ｍ2以上であることが好まし
く、特に本例のようなラインヘッドを構成する場合にそ
の効果は大きい。As described above, the Young's modulus of the ink common flow path member 5 is preferably 2.7 × 10 11 N / m 2 or more, and particularly when the line head as in this example is constructed, its effect is obtained. large.
【００３４】また、信頼性を確保するにはインク共通流
路部材５の吸水率が０．１％以下であることが望まし
い。In order to ensure reliability, it is desirable that the water absorption coefficient of the ink common flow path member 5 be 0.1% or less.
【００３５】特に純度９０％以上のアルミナや窒化アル
ミは前述の剛性と非吸水性を備えた有効な材料である。Particularly, alumina and aluminum nitride having a purity of 90% or more are effective materials having the above-mentioned rigidity and non-water absorption.
【００３６】剛性確保の観点だけに着目すれば、インク
共通流路部材５以外（例えば基板１）の剛性を上げても
有効であるが、例えば、本例の条件でラインヘッドを構
成する場合、図１において各インク吐出口８にインクを
供給するインク共通流路６は、インク流量とインク吐出
口でのメニスカスの安定性を確保するためにｂ＝５ｍ
ｍ，ｈ＝３ｍｍの溝が２本必要となり、他部品に比較し
て大きな断面積を必要とし、断面２次モーメントも大き
い。即ち、ヘッド剛性向上への寄与率が大きく、他部品
の剛性を上げる場合に必要な形状的・コスト的な負担が
ない。From the viewpoint of ensuring the rigidity only, it is effective to increase the rigidity of the parts other than the ink common flow path member 5 (for example, the substrate 1). However, for example, when the line head is constructed under the conditions of this example, In FIG. 1, the ink common flow path 6 that supplies ink to each ink ejection port 8 is b = 5 m in order to secure the ink flow rate and the stability of the meniscus at the ink ejection port.
Two grooves with m and h = 3 mm are required, a large cross-sectional area is required as compared with other parts, and the second moment of area is also large. That is, the contribution to the improvement of the head rigidity is large, and there is no shape or cost burden required for increasing the rigidity of other parts.
【００３７】第１の実施例は面イジェクトタイプのイン
クジェット記録ヘッドであるが、本発明はエッジイジェ
クトタイプの場合にも適応可能であり、第２の実施例と
して図４にその斜視図を示す。Although the first embodiment is a surface eject type ink jet recording head, the present invention is applicable to the edge eject type ink jet head as well, and a perspective view thereof is shown in FIG. 4 as a second embodiment.
【００３８】図４において、基板１の表面にはインク吐
出エネルギー発生体であるピエゾ素子２が接合され、基
板１表面に形成した電極（図示せず）を通して電気信号
を印加し、圧電効果による振動を発生する。インク共通
流路部材５はピエゾ素子２の整列方向に沿ってインク吐
出口８にインクを供給するインク共通流路６を備えてい
る。振動膜４は例えばポリイミド樹脂膜であり、インク
共通流路部材５とピエゾ素子２の表面に接着あるいは融
着接合されている。補強部材３は基板１上にピエゾ素子
２と交互配置して接合され、振動膜４とインク共通流路
部材５と接着あるいは融着接合することによって、振動
膜４のピエゾ素子間のクロストークを防ぐ役割を果た
す。振動膜４の表面にはステンレス製薄板をエッチング
加工して形成した隔壁７が補強部材３上に位置するよう
に接着あるいは融着されている。天板１０は隔壁７とイ
ンク共通流路部材５の上側に接着固定され、インク流路
を封止する。ノズル板９はインク吐出口８を具備してお
り、インク吐出口８が隔壁７の間隙中央に位置するよう
にインク共通流路部材５と隔壁７および天板１０に接合
されている。In FIG. 4, a piezo element 2 which is an ink ejection energy generator is bonded to the surface of the substrate 1, and an electric signal is applied through electrodes (not shown) formed on the surface of the substrate 1 to vibrate by the piezoelectric effect. To occur. The ink common flow path member 5 includes an ink common flow path 6 that supplies ink to the ink ejection ports 8 along the alignment direction of the piezo elements 2. The vibrating film 4 is, for example, a polyimide resin film, and is bonded or fusion-bonded to the surface of the ink common flow path member 5 and the piezo element 2. The reinforcing member 3 is alternately arranged on the substrate 1 and bonded to the piezo elements 2. By bonding or fusing the vibrating film 4 and the ink common flow path member 5, cross-talk between the piezo elements of the vibrating film 4 is prevented. Play a protective role. On the surface of the vibrating film 4, a partition 7 formed by etching a stainless thin plate is adhered or fused so as to be located on the reinforcing member 3. The top plate 10 is adhesively fixed to the partition 7 and the upper side of the ink common flow path member 5 to seal the ink flow path. The nozzle plate 9 is provided with an ink ejection port 8, and is joined to the ink common flow path member 5, the partition wall 7 and the top plate 10 so that the ink ejection port 8 is located at the center of the gap of the partition wall 7.
【００３９】即ち、ピエゾ素子２の振動エネルギーが振
動膜４に伝達され、振動膜４と隔壁７および天板１０に
よって形成される圧力室の圧力変化によってインク吐出
口８よりインク滴を吐出させるものである。That is, the vibration energy of the piezo element 2 is transmitted to the vibrating film 4, and an ink droplet is ejected from the ink ejection port 8 by the pressure change of the pressure chamber formed by the vibrating film 4, the partition wall 7 and the top plate 10. Is.
【００４０】図３の構成で第１の実施例と同様の組立性
・画像品質評価を行った結果、同じ効果が確認された。The same effect was confirmed as a result of performing the same assembling / image quality evaluation with the configuration of FIG. 3 as in the first embodiment.
【００４１】[0041]
【発明の効果】以上述べたように本発明のインクジェッ
ト記録ヘッドによれば、各インク吐出口にインクを導く
インク共通流路部材のヤング率を最適化し、インクの主
成分である水の吸収を制限することによって、ヘッドの
剛性と信頼性を確保し、組立性が良く、高い画像品質が
得られる大型のインクジェット記録ヘッドを提供するこ
とができる。As described above, according to the ink jet recording head of the present invention, the Young's modulus of the ink common flow path member for guiding the ink to each ink ejection port is optimized to absorb water, which is the main component of the ink. By limiting the size, it is possible to provide a large-sized ink jet recording head that secures the rigidity and reliability of the head, has a good assembling property, and obtains high image quality.
【図１】本発明の第１の実施例の全体構成を示す斜視図
である。FIG. 1 is a perspective view showing the overall configuration of a first embodiment of the present invention.
【図２】第１の実施例におけるインク共通流路部材の加
工方法を示す斜視図である。FIG. 2 is a perspective view showing a method for processing an ink common flow path member in the first embodiment.
【図３】実施例のインクジェット記録ヘッドによる画像
記録方法を説明する斜視図である。FIG. 3 is a perspective view illustrating an image recording method using the inkjet recording head of the embodiment.
【図４】本発明の第２の実施例の全体構成を示す斜視図
である。FIG. 4 is a perspective view showing an overall configuration of a second embodiment of the present invention.
１ 基板 ２ ピエゾ素子 ３ 補強部材 ４ 振動膜 ５ インク共通流路部材 ６ インク共通流路 ７ 隔壁 ８ インク吐出口 ９ ノズル板 １０ 天板 １１ 研削砥石 １２ 回転ドラム １３ 記録紙 １４ 記録ヘッド 1 Substrate 2 Piezo Element 3 Reinforcing Member 4 Vibration Film 5 Ink Common Flow Channel Member 6 Ink Common Flow Channel 7 Partition 8 Ink Discharge Port 9 Nozzle Plate 10 Top Plate 11 Grinding Wheel 12 Rotating Drum 13 Recording Paper 14 Recording Head
フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｂ４１Ｊ 2/16 9012−2Ｃ Ｂ４１Ｊ 3/04 １０３ Ｈ Continuation of the front page (51) Int.Cl. 5 Identification number Office reference number FI technical display location B41J 2/16 9012-2C B41J 3/04 103 H
Claims (2)
と、各インク吐出口間を隔てる隔壁部材と、インクを付
勢してインク滴を前記吐出口より吐出させるインク吐出
エネルギー発生体と、各インク吐出口にインクを導くた
めのインク共通流路を備えたインクジェット記録ヘッド
において、 前記インク共通流路を形成する部材のヤング率が２．７
×１０11Ｎ／ｍ2以上であることを特徴とするインクジ
ェット記録ヘッド。1. A plurality of ink ejection ports arranged in a row, a partition member separating the respective ink ejection ports, and an ink ejection energy generator for urging ink to eject ink droplets from the ejection ports. In an inkjet recording head provided with an ink common flow path for guiding ink to each ink ejection port, the Young's modulus of the member forming the ink common flow path is 2.7.
An inkjet recording head having a density of × 10 11 N / m 2 or more.
％以下であることを特徴とする請求項１記載のインクジ
ェット記録ヘッド。2. The water absorption of the common flow path forming member is 0.1.
The ink jet recording head according to claim 1, wherein the content is not more than%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4268834A JPH06115071A (en) | 1992-10-07 | 1992-10-07 | Inkjet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4268834A JPH06115071A (en) | 1992-10-07 | 1992-10-07 | Inkjet recording head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06115071A true JPH06115071A (en) | 1994-04-26 |
Family
ID=17463915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4268834A Pending JPH06115071A (en) | 1992-10-07 | 1992-10-07 | Inkjet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06115071A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7014987B2 (en) | 2002-07-18 | 2006-03-21 | Canon Kabushiki Kaisha | Manufacturing method of liquid jet head |
| US7422309B2 (en) | 2003-09-24 | 2008-09-09 | Fujifilm Corporation | Droplet discharging head |
-
1992
- 1992-10-07 JP JP4268834A patent/JPH06115071A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7014987B2 (en) | 2002-07-18 | 2006-03-21 | Canon Kabushiki Kaisha | Manufacturing method of liquid jet head |
| US7422309B2 (en) | 2003-09-24 | 2008-09-09 | Fujifilm Corporation | Droplet discharging head |
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