JPH06204081A - Adjusting method for frequency of layered component - Google Patents

Abstract

PURPOSE:To make this method more advantageous in the aspect of working efficiency and accuracy in adjustment than a conventional method by trimming an electrode for trimming transversely in its lateral direction thereby reducing the area of the electrode in the region from the trimmed section to the end of opening so as to adjust the capacitance between it and an inner electrode. CONSTITUTION:Electrodes 16 and 17 for trimming, each of which forms any shape of a spiral, U, or a comb whose one side is opened, are formed, in opposition to inner electrodes 14 and 15, at a stacked component. In the section opposed to the inner electrodes 14 and 15 of the electrodes 16 and 17 for trimming, the electrodes 16 and 17 for trimming are trimmed transversely in its lateral direction into grooves 20 and 21 by a laser or the like. And, the area of the electrode in the region from the trimmed sections 20 and 21 to the end of opening is reduced to adjust the capacitance between them and the inner electrodes 14 and 15. Hereby, the quantity of operation of a laser or the like required for trimming becomes very short, and the frequency adjustment can be performed efficiently.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of adjusting the frequency by adjusting the capacitance of a capacitor, which is a laminated component used as a resonator or a filter, by trimming.

[0002]

2. Description of the Related Art In a resonator, a filter, or the like formed in a laminated structure by a printing method or a sheet method, an electrode for trimming is formed in advance for frequency adjustment, and the electrode is trimmed after firing. Make sure that the resonance frequency is within the specified range. In such frequency adjustment, conventionally, as shown in FIG. 4A, a trimming electrode 33 is formed so as to face an internal electrode 31 formed in a layered structure by a dielectric 32. The resonance frequency is measured, the trimming position is determined from the difference from the target value, and the trimming electrode 33 (35, 36) is determined.
Is an external electrode connected to the internal electrode 31 and the trimming electrode 33, respectively) and is trimmed by a laser beam or a sandblast method,
The trimming portion 34 and the region 33a up to the tip of the trimming electrode 33 are separated from the external electrode 36 and adjusted so that the resonance frequency falls within a target range.
FIG. 4B is an example diagram of an equivalent circuit of a laminated component that performs this frequency adjustment. The trimming is performed in parallel with the inductor L and the capacitor C formed in the lower layer of the laminated component illustrated in FIG. 4A. Frequency adjustment capacitor C by electrode 33
The resonance frequency is adjusted by connecting v and adjusting the capacitance of the capacitor Cv by the trimming.

[0003]

However, according to this conventional method, since the trimming length a is long, there is a problem that the operation amount of the laser beam or the like is large and the efficiency is low. Further, when the frequency is adjusted by trimming the plate-shaped trimming electrode 33 as described above, it is difficult to finely adjust the frequency. An object of the present invention is to provide a method for adjusting the frequency of a laminated component, which is more advantageous in terms of work efficiency and adjustment accuracy than the conventional method described above.

[0004]

In order to achieve the above object, the present invention provides a laminated component with a trimming electrode having any one of a spiral shape, a U-shape, and a comb-teeth shape whose one end is open. The trimming electrode is formed so as to face the internal electrode, and the trimming electrode is trimmed across the lateral direction in the portion of the trimming electrode facing the internal electrode. It is characterized in that the electrode area is reduced to adjust the capacitance with the internal electrode.

[0005]

According to the method of the present invention, the trimming electrode is formed in a spiral shape, a U shape, or a comb tooth shape. Therefore, if this is trimmed in the lateral direction, the trimming portion is formed. The capacitance is reduced by the area of the region from to the open end, and the frequency is adjusted. The length of the trimming groove may be slightly longer than the width of the trimming electrode having a spiral shape, and the trimming amount is reduced.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1A is a sectional view showing an example of a laminated component which has been subjected to a frequency adjusting method according to the present invention, FIG. 1B is a plan view showing an electrode structure of its frequency adjusting portion, and FIG. It is a top view showing the layer composition of the electrode of the adjustment part. The present invention is also applied to a laminated component that constitutes only a capacitor, but in the example shown in FIG. 1 (A), the inductor section 1 and the capacitor section 2 are integrally laminated, and the frequency adjustment is performed thereon. The example which formed the capacitor part 3 for is shown. The inductor section 1 constitutes two inductors L1 and L2 inside, and is composed of an insulator 4 made of a magnetic material or a non-magnetic material and multilayer coil conductors 5 and 6. The capacitor section 2 also constitutes two capacitors C1 and C2, and each capacitor is composed of internal electrodes 8, 9 and 10, 11 facing each other with a dielectric 7 interposed therebetween. These coil conductors 5 and 6 and internal electrodes 8 to 11 for capacitors
Is connected to the external electrodes 12 and 13 provided by baking or the like corresponding to these to form a filter or a resonator including the inductor L and the capacitor C shown in FIG. Used as inductor and capacitor.

The frequency adjusting capacitor section 3 comprises adjusting capacitors C3 and C4 for adjusting the capacities of the capacitors C1 and C2, respectively. As shown in FIG. 1B, the adjustment capacitors C3 and C4 respectively have flat plate-shaped internal electrodes 14 and 15 and these internal electrodes 1 respectively.
The trimming electrodes 16 and 17 are spirally opposed to the electrodes 4 and 15 via the dielectric 7. An example of a method of forming the dielectric layer by the sheet method will be described below, but this dielectric layer may also be formed by the printing method. The adjusting capacitors C3 and C4 are, as shown in FIG.
The internal electrode 1 is formed on the surface of the dielectric sheet 7a by a printing method or the like.
4 and 15, the dielectric sheet 7b for the inter-electrode forming layer, the trimming electrodes 16 and 17 formed on the surface of the dielectric sheet 7c by a printing method, and the protective layer forming dielectric. The sheet 7d is formed by stacking and pressing the inductor section 1 and the capacitor section 2 before firing, and then firing. Further, after firing, the internal electrodes 14 and 15 constituting each of the adjusting capacitors C3 and C4 are formed.
Are commonly connected to the external electrodes 12 and 13 to which the internal electrodes 8 and 10 of the capacitors C1 and C2 are respectively connected, and one end of the trimming electrodes 16 and 17 is connected to the inside of the other of the capacitors C1 and C2. The electrodes 9 and 11 are commonly connected to the external electrodes 18 and 19, respectively. The width and length of the trimming electrodes 16 and 17 are set according to the maximum adjustment amount.

In this way, the adjusting capacitor sections C3, C
4 is formed, the resonance frequency of the product after firing,
Or measure the frequency etc. where the attenuation value reaches a predetermined level,
Based on the measured values, the trimming electrodes 1
6, 17 from the open end 16a, 17a a predetermined length,
That is, at the position where the difference between the target frequency and the actually measured value becomes zero, the trimming electrodes 16 and 17 are provided.
The product is trimmed in a groove shape by a laser or the like while controlling the trimming position of the product by image processing so as to traverse in the lateral direction. In FIGS. 1A and 1B, 20, 2
Reference numeral 1 denotes a groove formed by trimming.

As described above, the trimming electrodes 16 and 17 are
Trimmed groove 2 by trimming
Area 1 from 0, 21 to open ends 16a, 17a
The electrode areas of the capacitors C3 and C4 are reduced by 6b and 17b, and the resonance frequency and the like can be adjusted to a desired value.

Although the above description has been made with respect to an example in which the trimming electrode has a spiral shape, as shown in FIG. 3A, the trimming electrodes 16A and 17A are formed in a U-shape and trimming (trimming groove is formed). 20, 20a, 20b), or as shown in FIG. 3B, the trimming electrodes 16B, 17B are formed in a comb shape and trimmed (trimming grooves are indicated by 20c to 20e). The same effect can be achieved. Here, as a trimming mode, as shown for 17A and 17B, trimmings 20a and 20b (or 20) in different steps are performed for different branch portions of the trimming electrodes 17A and 17B.
d, 20e) or trimming electrode 16
As shown in B, the trimming 20c may be performed on a plurality of branches in a series of steps.

Further, the above description is based on the trimming electrode 1
Although the example in which 6 and 17 are provided inside the dielectric (insulator) has been described, as shown in FIG. 3C, the trimming electrode 16C may be provided on the surface of the laminated component to perform the trimming 20. . In this case, after trimming, it is preferable to coat with a protective layer 22 made of an insulating resin or glass.

The present invention is not limited to the above-mentioned embodiments, but can be applied to the case of being configured as a feedthrough capacitor and the case of using a laminated component as a substrate.

According to the present invention, the trimming electrode is formed in a spiral shape, a U shape, or a comb tooth shape, and the portion of the electrode facing the internal electrode is trimmed in the lateral direction. By doing so, the open end side is excluded from the trimming part.Since this trimming is normally performed over a range slightly longer than the width of the trimming electrode, the operation amount of the laser etc. required for trimming is very short. Therefore, the frequency can be adjusted efficiently.
Further, the frequency can be finely and precisely adjusted as compared with the conventional method in which the trimming electrode is formed in a flat plate shape and trimmed into a linear groove shape.

[Brief description of drawings]

FIG. 1A is a cross-sectional view showing an example of a laminated component in which a frequency adjusting method according to the present invention is carried out, and FIG. 1B is a plan view showing an electrode configuration of a frequency adjusting portion thereof.

FIG. 2 is a plan view showing a layer structure of electrodes of a frequency adjusting portion in the present embodiment.

3A and 3B are plan views for explaining another example of the frequency adjusting method according to the present invention, and FIG. 3C is a sectional view showing the other example.

FIG. 4A is a plan view of a laminated component that has been subjected to a conventional frequency adjustment method, and FIG. 4B is an equivalent circuit diagram of the laminated component.

[Explanation of symbols]

1 inductor part 2 capacitor part 3 adjustment capacitor part 4 insulator 5 and 6 coil conductor 7 dielectric 8 to 11 internal electrode 12, 13, 18, 19 external electrode 14, 15 adjustment internal electrode 16, 16A to 16C, 17 , 17A, 17B Trimming electrode 20, 20a to 20e, 21 Trimming groove

Claims (3)

[Claims] 1. A laminated component is formed with a trimming electrode having an open end at one of a spiral shape, a U-shape, and a comb-teeth shape so as to face an internal electrode. By trimming the trimming electrode in the widthwise direction in the portion facing the internal electrode, the electrode area of the region from the trimmed portion to the open end is reduced and the capacitance between the internal electrode and the internal electrode is reduced. A method for adjusting the frequency of a laminated component, which comprises adjusting the frequency. 2. The method for adjusting the frequency of a laminated component according to claim 1, wherein the trimming electrode is embedded inside an insulator, and the trimming electrode including the insulator is trimmed to form the internal electrode. A method for adjusting the frequency of a laminated component, which comprises adjusting the capacitance between the two. 3. The frequency adjusting method for a laminated component according to claim 1, wherein the trimming electrode is formed on the surface of an insulator, and the trimming electrode is trimmed.
A method for adjusting the frequency of a laminated component, comprising adjusting the capacitance between the internal electrode and the internal electrode.