JPH06246621A - Both side polishing device - Google Patents

Abstract

(57) [Summary] [Structure] The holding rollers 14 and 19 for holding the outer peripheral edge of the disk-shaped work are supported on the support body 11 at three positions so as to be rotatable about the horizontal axis, and the holding rollers 14 and 19 are respectively supported. A polishing tool 34 for polishing the front and back surfaces of the work is attached to both sides of the work rotatably held by, and a dressing material having the same shape as the work is provided. [Effect] Since the workpieces are held and polished one by one, there is no need to manage each batch as compared with the batch processing of a plurality of workpieces at a time, and the work supply and take-out positions can be improved. No need to position
Further, by holding the dressing material on the holding roller and polishing it with the polishing tool, the shape of the polishing surface of the polishing tool can be controlled extremely easily and quickly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double-side polishing apparatus for polishing both sides of a thin disk-shaped work such as a hard disk substrate.

[0002]

2. Description of the Related Art Conventionally, as a polishing apparatus for polishing both sides of a disk-shaped work of this kind, a plurality of works are held in a large carrier, and a large-diameter polishing tool (for polishing) is used above and below the carrier. The polishing tool and the carrier are rotated in a predetermined direction by disposing a surface plate) to simultaneously polish the front and back surfaces of a plurality of works.

Further, in such a polishing apparatus, when controlling the shape of the polishing platen, a correction carrier for controlling the surface of the polishing platen, an intermediate platen, etc. are inserted between the upper and lower platens for correction. It was being polished.

[0004]

However, according to the polishing apparatus as described above, since a plurality of works are polished at one time, that is, the batch type processing, it is necessary to manage the polishing state for each batch. There was a problem that it occurred and was troublesome.

For example, when performing batch type polishing, it is necessary to always perform processing for each same batch over each process such as roughing and finishing. That is, in the batch type, the difference in the thickness of the work within the same batch is small and there is no problem, but since there is a difference in the thickness between different batches, the work to be processed in a certain process unless the thickness is controlled for each batch. And a workpiece that is not machined is generated, which affects the machined surface roughness and the machined surface flatness, increasing the number of defective products.

Further, in the above-mentioned batch type polishing, it is difficult to detect the position where the work is supplied and the position where the work is finished, and the work and the polishing tool are ringed (adhered) by the working liquid. It was also troublesome to separate the ringing work from the polishing tool.

Further, when the surface shape of the polishing surface plate is controlled by using a correction carrier, an intermediate surface plate, or the like as in the above polishing apparatus, it is necessary to make a special shape before the surface of the polishing surface plate has a predetermined shape. Since it requires a great deal of skill and trial and error,
There is a problem that it is difficult to determine the time required for shape control and the reproducibility is low.

Therefore, an object of the present invention is to provide a double-sided polishing apparatus which can solve the above problems.

[0009]

In order to solve the above problems, a double-sided polishing apparatus of the present invention is a holding roller for holding the outer peripheral edge of a disk-shaped material to be polished at the outer peripheral portion of the disk-shaped material to be polished. Is rotatably supported on a support at least at three locations and about a horizontal axis, and is placed on both sides of the disk-shaped material to be rotatably held by each of the holding rollers via a holding body. A rotary shaft that can be moved toward and away from the abrasive is disposed, and a polishing tool that polishes the front and back surfaces of the material to be polished is attached to the tip of the rotary shaft, and a rotary drive device that rotates the rotary shaft is installed. Along with the provision of a pressing device for pressing both of the polishing tools through the rotary shaft to the front and back surfaces of the material to be polished with a predetermined biasing force, and a dressing material having substantially the same shape as the material to be polished. It is equipped.

[0010]

With the above construction, only one piece of the material to be polished is held by the holding roller, and the polishing tool is rotated by the rotary driving device and pressed against the material to be polished by the pressing device, so that both surfaces of the material to be polished are pressed. It can be simultaneously polished with a polishing tool. Therefore, compared to batch processing of a plurality of polishing materials at one time, it is not necessary to control each batch, and it is not necessary to position the supply and removal positions of the polishing material, and Is held by the holding roller, so there is no concern about ringing with the polishing tool.

Further, when it becomes necessary to correct the shape of the polishing surface of the polishing tool, the dressing material is held by the holding roller instead of the material to be polished, and the polishing tool is used for polishing. The tool side is easily and accurately corrected and polished.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In FIG. 1 and FIG. 2, reference numeral 1 denotes a double-side polishing apparatus for polishing both sides, that is, the front and back surfaces of a thin circular substrate (hereinafter, simply referred to as a work) W for a hard disk, which is roughly classified into It is composed of a holding section 3 for the work W arranged in the central portion of the horizontal support base 2, and a polishing section 4 arranged on the horizontal support base 2 at both sides of the holding section 3.

The holding portion 3 has a plate-like support 11 standing upright in the center of the horizontal support base 2 and two support shafts rotatably protruding from the support 11 via bearings 12, respectively. The body 13, a lower holding roller 14 attached to the tip of each of these support shafts 13 and having a groove portion 14a capable of holding the outer peripheral edge of the work W on the outer peripheral portion thereof, and also to the support body 11, As shown by an arrow a in FIG. 1, the swing cylinder device 17 is swingably supported in the vertical plane via the mounting pin and is swingable by the swing cylinder device 17 supported by the support bracket 16 on the support body 11 side. A support arm 18 that is made free and a groove portion 19a that is rotatably attached to one end of the support arm 18 via a bearing (not shown) and that can hold the outer peripheral edge of the work W are formed on the outer peripheral portion. Were are composed of the upper support roller 19. In addition each holding rollers 14 and 19, as shown in FIG. 3, are each disposed with a predetermined interval in the same vertical plane.

Each of the holding rollers 14 and 19 is made of synthetic resin, and two lower holding rollers 14 are provided.
About, it is designed to be rotated. That is, the driven pulley 21 is attached to the other end of the support shaft body 13 of each lower holding roller 14, and both driven pulleys 21 are interlockingly connected by a connecting belt (not shown). The first electric motor 25 for rotating the driving pulley 24 that is linked to the driven pulley 21 on one side through the driving belt 23 is the horizontal support base 2.
It is placed at a predetermined location above.

Therefore, by driving the first electric motor 25, both lower holding rollers 14 can be rotated at a predetermined speed. Next, the left and right polishing sections 4 will be described. The main configuration of the left and right is the same, and the difference is that there is only one rotary drive source. Therefore, in this embodiment, The description will be made focusing on the polishing section 4A on the left side.

That is, the polishing section 4A is composed of the support 11
A holder 32 supported on a horizontal support base 2 on the left side of the holder via a support bracket 31, a rotary cylinder (not shown) rotatably arranged in the holder 32, and a rotary cylinder inside the rotary cylinder. The rotating shaft body 33 inserted through the serration portion, that is, slidably and also capable of transmitting rotation.
And a polishing tool 34 attached to one end of the rotary shaft 33 near the support 11, and the other end of the rotary shaft 33 supported by the horizontal support base 2 via a support bracket 35. It is composed of a pressing cylinder device (pressing device) 37 for pressing the polishing tool 34 against the surface of the work W by pressing it through the member 36, and a rotary drive unit for rotating the rotary cylinder.

Further, as described above, the rotary drive section is adapted to drive the both-side polishing sections 4A, 4B simultaneously. That is, the conductive shaft 41 is rotatably supported on the horizontal support base 2 in parallel with the rotation axis of the polishing tool 34, and both ends of the conduction shaft 41 are attached to the ends of the rotary cylinders. A driven intermediate pulley 44, which is interlockingly connected to the driven pulley 42 via a connecting belt 43, is attached, and in the middle of one end of the transmission shaft body 41,
The driving intermediate pulley 45 is attached, and the second electric motor (rotary driving device) 48 for rotating the driving pulley 47 linked to the driving intermediate pulley 45 via the driving belt 46 is mounted on the horizontal support 2. It is arranged.

The polishing section 4 is also provided with a control device 51 for controlling the amount of movement of the rotary shaft 33. That is, as shown in FIG. 1, the control device 51 includes a positioning member 52 attached to a connecting member 36 that connects the rotating shaft body 33 and the pressing cylinder device 37.
And a positioning cylinder device (also referred to as a knock cylinder) 53 which is attached to the holding body 32 side and has a retractable rod portion 53a capable of abutting on the tip of the positioning member 52.

Further, as shown in FIG. 3, the double-side polishing apparatus 1 is provided with a dressing material D having the same shape as the work W, and between the holding rollers 14 and 19 during arbitrary polishing. I am trying to be supplied.
The dressing material D has the same material and shape as the work W, that is, the work itself has electrode surfaces coated with diamond abrasive grains, or the work has been lapped, or the work has front and back surfaces. The work itself has a dressing function, such as a wrapping film bonded.

Next, the work of polishing the work W will be described. First, the swing cylinder device 17 swings the upper holding roller 19 upward so that the work W is supported by the lower holding roller 14, and then the upper holding roller 19 is lowered to lower the three holding rollers 14. , 19 accurately guides and holds the grooves 14a, 19a of the rollers 14, 19 respectively.

Next, by the pressing cylinder device 37,
The rotary shafts 33 on both sides are moved to the work W side. During this movement, the rotary shaft 33 moves forward until the positioning member 52 comes into contact with the retractable rod portion 53a of the positioning cylinder device 53.

Then, the positioning member 52 abuts on the retractable rod portion 53a and the forward movement of the rotary shaft 33 is stopped. In this state, the polishing tool 34 maintains a predetermined clearance with respect to both surfaces of the work W. Has been done.

In this state, a predetermined polishing liquid (also called a working liquid) is supplied from the spray nozzle 61 to the polishing surface of the workpiece W, and the electric motors 25 and 48 are driven to rotate the lower holding roller 14 and the rotation. Polishing tool 3 on both sides via shaft 33
While rotating 4 in the same direction, pull in the withdrawal rod portion 53a of the positioning cylinder device 53 little by little,
Then, the polishing tool 34 is pressed against both surfaces of the work W with an equal pressing force, so that both surfaces of the work W are softly polished.

Further, the pulling-in control of the above-mentioned retracting rod portion 53a is performed by bleeding the air in the cylinder body, and the precise control of the flow rate of this bleeding air is performed by the polishing tool on both sides of the work W. The pressing force of 34 can always be made equal.

When it is necessary to correct the surface shape of the polishing material 34a of the polishing tool 34 after a predetermined number of polishings have been performed, as shown in FIG. 3, instead of the work, a dressing material is used. D is held by the holding rollers 14 and 19, and both surfaces thereof are polished by the abrasive material 34a.

Then, the surface of the abrasive material 34a is, on the contrary, polished by the dressing material D, so that the correction work, that is, the control of the surface shape can be performed extremely easily. Of course, by inserting the dressing material D into the storage case of the work W at appropriate intervals, dressing of the polishing tool 34, that is, the polishing material 34a, that is, correction polishing can be performed automatically. The correction work by automation can be easily performed.

As described above, since the workpieces W to be polished are held one by one and both surfaces thereof are polished by the polishing tool, as compared with the conventional one in which a plurality of workpieces are batch processed at one time. Therefore, there is no need to manage the work for each batch, there is no need to position the supply and take-out positions of the work, and since the work is held by the holding roller, there is no concern about ringing with the polishing tool. .

Further, by holding the dressing material between the holding rollers and polishing it with a polishing tool, the surface of the polishing material can be modified very easily. By the way, in the above embodiment, three holding rollers for holding the work are provided, but the number is not limited to three, and for example, four holding rollers may be provided.

In the above embodiment, the lower holding roller is rotated by the first electric motor. For example, like the upper holding roller, the lower holding roller is simply rotatably supported via the bearing. You may allow it.
In this case, as shown in FIG. 3, since the polishing tool 34 is provided at a position eccentric with respect to the rotation center of the work W, the inner peripheral side and the outer peripheral side of the contact surface of the work W are Due to the relative speed difference of the work W, the work W itself is naturally rotated.

Further, in the above-mentioned embodiment, the machining locus can be obtained by vertically moving the support for supporting the holding roller or by eccentricizing the center axis of each of the holding roller or the polishing tool and the rotation axis thereof. It is also possible to make the work flatness of the work better by making it random.

[0031]

As described above, according to the structure of the present invention, since the materials to be polished are held one by one and both surfaces thereof are polished by the polishing tool, a plurality of materials to be polished can be conventionally used. It is not necessary to manage each batch, and it is not necessary to position the supply and removal positions of the material to be polished, compared with the case where batch processing is performed at once, and the material to be polished is held by a holding roller. Therefore, you do not have to worry about ringing with the polishing tool.

Further, by holding the dressing material on the holding roller and polishing it with the polishing tool, the shape of the polishing surface of the polishing tool can be controlled extremely easily and quickly.

[Brief description of drawings]

FIG. 1 is an overall side view of a double-sided polishing device according to an embodiment of the present invention.

FIG. 2 is a view on arrow AA of FIG.

FIG. 3 is a front view of relevant parts for explaining a dressing operation in the embodiment.

[Explanation of symbols]

 W Work D Dressing material 1 Double-sided polishing device 2 Horizontal support base 3 Holding part 4 Polishing part 11 Supporting body 14 Lower holding roller 19 Upper holding roller 32 Holding body 33 Rotating shaft body 34 Polishing tool 34a Abrasive material 37 Pressing cylinder device 48 Second electric motor 61 Spray nozzle

Claims (1)

[Claims] 1. An outer peripheral portion of a disk-shaped material to be polished,
A holding roller that holds the outer peripheral edge of the disk-shaped material to be polished is rotatably supported by at least three locations around a horizontal axis on a support, and is held rotatably by the holding rollers. A rotary shaft that is movable toward and away from the material to be polished is placed on both sides of the material to be polished via a holder, and the front and back surfaces of the material to be polished are polished at the tip of this rotary shaft. A tool is attached and a rotation drive device for rotating the rotary shaft is provided, and a pressing device for pressing both the polishing tools via the rotary shaft to the front and back surfaces of the material to be polished with a predetermined biasing force. A double-sided polishing apparatus provided with a dressing material having substantially the same shape as the material to be polished.