JPH0625449A - Super water-repellent film and manufacturing method thereof - Google Patents
Super water-repellent film and manufacturing method thereofInfo
- Publication number
- JPH0625449A JPH0625449A JP4180732A JP18073292A JPH0625449A JP H0625449 A JPH0625449 A JP H0625449A JP 4180732 A JP4180732 A JP 4180732A JP 18073292 A JP18073292 A JP 18073292A JP H0625449 A JPH0625449 A JP H0625449A
- Authority
- JP
- Japan
- Prior art keywords
- film
- water
- repellent
- fluorine
- chlorosilane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Materials Applied To Surfaces To Minimize Adherence Of Mist Or Water (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
Abstract
(57)【要約】
【目的】 従来、撥水性をもつフィルムとしてはフッ素
系のプラスチックフィルム、あるいは、片面、もしくは
両面に、フッ素系、シリコーン系の撥水性コーティング
材を塗装したプラスチックフィルムなどがあったが、実
用的な撥水性が得られない、フィルムのもつ透明性が得
られない、などの問題があった。本発明は、この問題を
解決すべく、透明性を維持し、超撥水性をもった、低コ
ストで実用に耐える機能性フィルムを提供することを目
的とする。
【構成】 片面または、両面にプラズマ処理によって適
当な微小な突起を形成したプラスチックフィルム上にク
ロロシラン系、または、アルコキシシラン系のフッ素化
合物を化学吸着させ単分子膜を形成することにより透明
性のよい超撥水性フィルムが得られる。
(57) [Summary] [Purpose] Conventionally, as water-repellent films, there have been fluorine-based plastic films, and plastic films coated with a fluorine-based or silicone-based water-repellent coating material on one or both sides. However, there were problems that practical water repellency could not be obtained and that the transparency of the film could not be obtained. In order to solve this problem, it is an object of the present invention to provide a functional film which maintains transparency and has super water repellency and which can be put to practical use at low cost. [Structure] A chlorosilane-based or alkoxysilane-based fluorine compound is chemically adsorbed on a plastic film on one or both sides of which appropriate minute protrusions have been formed by plasma treatment to form a monomolecular film, which has good transparency. A super water-repellent film is obtained.
Description
【0001】[0001]
【産業上の利用分野】本発明は、機能性を高めたプラス
チックフィルム、及び、その製造方法に関するものであ
り、とりわけ、撥水性フィルム、及び、その製造方法に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plastic film having enhanced functionality and a method for producing the same, and more particularly to a water repellent film and a method for producing the same.
【0002】[0002]
【従来の技術】撥水性をもつ表面を得るためには、その
表面張力を水の表面張力よりも低くすることが必要にな
る。撥水性、すなわち、物質表面のぬれやすさを示す数
字として接触角という考え方がある。表面に水滴を置い
た場合、水滴と表面が接触する角度である。一般に、撥
水性を持つフィルムとしては、実用的には水の接触角で
160°近い超撥水状態が必要である。2. Description of the Related Art In order to obtain a water-repellent surface, it is necessary to make its surface tension lower than that of water. There is a concept of contact angle as a number indicating water repellency, that is, the wettability of a material surface. The angle at which the surface of the water drops contacts the surface when the water drop is placed on the surface. Generally, as a film having water repellency, a super water repellent state in which the contact angle of water is close to 160 ° is practically required.
【0003】従来の撥水性、透明性をもつフィルムとし
てはフッ素系の四フッ化エチレン−六フッ化プロピレン
共重合樹脂(FEP)などのフィルムなどが代表的であ
る。また、最近ではポリエステルフィルムなどの汎用フ
ィルムの表面に撥水性コーティング剤(たとえば、フッ
素系コーティング剤)を塗装することにより撥水性を付
与することが一般的に行われている。As a conventional film having water repellency and transparency, a film of fluorine-based tetrafluoroethylene-hexafluoropropylene copolymer resin (FEP) or the like is typical. In addition, recently, it has been generally practiced to impart water repellency by coating a surface of a general-purpose film such as a polyester film with a water repellent coating agent (for example, a fluorine-based coating agent).
【0004】[0004]
【発明が解決しようとする課題】しかしながら、従来の
フッ素系のフィルムでは透明性が得られるものの、撥水
性については水の接触角で100°程度と十分に満足で
きるものが得られない。そればかりかコストの面でも実
用的でない。この低コスト化に対応するため、上述のよ
うな汎用フィルム上に撥水性コーティング剤をコートす
ることにより、フィルム表面に機能性を付与する方法が
とられている。しかし、コスト面では改善されるが、撥
水性についてはフッ素系のフィルムと同程度であるのに
加え、耐環境性の面で劣ってしまう。最近、フィルムに
限らず、撥水性を向上させる方法として、フッ素系樹
脂、シリコーン系樹脂などに無機微粒子を均一に分散し
た複合塗料をコーティング剤に用いる方法やニッケルめ
っき液中にフッソ樹脂の微粒子を分散させめっきを行う
方法などがある。これらの方法を用いると被覆された表
面の形態的効果により水の接触角で160°近い超撥水
状態が得られているが、フィルム上に応用してもフィル
ムとの付着力が弱い、フィルムのもつ透明性が維持でき
ないなどの問題が生じてしまう。したがって、フィルム
の透明性を維持し、超撥水性をもった低コストで実用に
耐える撥水性フィルムの出現が望まれていた。However, although the conventional fluorine-based film can provide transparency, it does not have sufficient water repellency such that the contact angle of water is about 100 °. Not only that, but also in terms of cost, it is not practical. In order to cope with this cost reduction, there has been adopted a method of imparting functionality to the film surface by coating the above-mentioned general-purpose film with a water-repellent coating agent. However, although the cost is improved, the water repellency is about the same as that of the fluorine-based film, and the environmental resistance is inferior. Recently, not only film, but also as a method of improving water repellency, a method of using a composite paint in which inorganic fine particles are uniformly dispersed in a fluororesin, a silicone resin, etc. as a coating agent, or fine particles of a fluorine resin in a nickel plating solution are used. There is a method of dispersing and plating. When these methods are used, a super water-repellent state with a contact angle of water of about 160 ° is obtained due to the morphological effect of the coated surface, but even if it is applied on a film, the adhesion to the film is weak. There will be problems such as the inability to maintain transparency. Therefore, it has been desired to develop a water-repellent film that maintains the transparency of the film, has super-water repellency, and can be used practically at low cost.
【0005】[0005]
【課題を解決するための手段】本発明は、上記の目的を
達成するために、片面もしくは両面に微小な突起を形成
したプラスチックフィルムとそのプラスチックフィルム
上に形成したクロロシラン系、メトキシシラン系、およ
び、または、エトキシシラン系フッ素化合物の化学吸着
膜とから構成されている。In order to achieve the above-mentioned object, the present invention provides a plastic film having minute projections formed on one side or both sides thereof, and a chlorosilane type, a methoxysilane type, and a chlorosilane type formed on the plastic film. Or a chemical adsorption film of an ethoxysilane fluorine compound.
【0006】[0006]
【作用】本発明の超撥水性フィルムは、フィルムの表面
を酸素を含んだプラズマ処理を施し、100nm前後の突
起を形成することによって撥水性を向上させる表面形態
的効果を得るだけでなく、形成された突起が100nm程
度であるために透明性を維持することができ、また、こ
の表面処理によりその上に形成される化学吸着単分子膜
が必要とする反応基をも付与するため、フィルムと化学
吸着単分子膜とが容易に強固な付着力を得ることがで
き、耐環境性、あるいは寿命、コスト面でも優れたもの
となる。The super-water-repellent film of the present invention is not only provided with a surface morphological effect of improving water repellency by subjecting the surface of the film to plasma treatment containing oxygen to form protrusions of about 100 nm, and Since the protrusions formed have a thickness of about 100 nm, transparency can be maintained, and the surface treatment also imparts the reactive groups required by the chemisorption monomolecular film formed thereon, and thus the film is A strong adhesion force can be easily obtained with the chemisorption monomolecular film, which is excellent in environmental resistance, life, and cost.
【0007】[0007]
【実施例】本発明のうち撥水性、透明性を例に挙げ、実
施例1で図面を参照しながら説明する。EXAMPLE The water repellency and transparency of the present invention will be described as an example to explain Example 1 with reference to the drawings.
【0008】(実施例1)以下、本発明の実施例1につ
いて図面を参照しながら説明する。(First Embodiment) A first embodiment of the present invention will be described below with reference to the drawings.
【0009】図1は本発明の超撥水性フィルムの構成図
である。図2は第1図の一部Bを分子レベルまで拡大し
た図である。FIG. 1 is a constitutional view of the super water-repellent film of the present invention. FIG. 2 is an enlarged view of part B of FIG. 1 to the molecular level.
【0010】図1において、1は0.1mmの厚みのポリ
エステルフィルム、2はポリエステルフィルム1を酸素
ガスによるプラズマ処理を行って形成された高さ85nm
のポリエステル表面の微小な突起、3はフッ素含有のク
ロロシラン系化合物(化1)からなる化学吸着膜であ
る。In FIG. 1, 1 is a polyester film having a thickness of 0.1 mm, and 2 is a height of 85 nm formed by subjecting the polyester film 1 to plasma treatment with oxygen gas.
The minute projections 3 on the polyester surface are a chemical adsorption film made of a fluorine-containing chlorosilane compound (Chemical formula 1).
【0011】[0011]
【化1】 [Chemical 1]
【0012】最初に、超撥水性フィルムの作製手順につ
いて述べる。まず、ポリエステルフィルム1を酸素分圧
10Paの真空容器内で0.2W/cm2、5分のプラズマ
処理を行う。その結果、図1に示すように、フィルム表
面から先端までの高さAが85nmの微小な突起が形成さ
れ、同時に、フィルム表面が親水化される。このように
して処理されたポリエステルフィルム1を容器から取り
出し、シクロヘキサンの溶媒で希釈した1×10-2 Mol
/l濃度のフッ素含有クロロシラン系化合物(化1)の溶
液中に10分浸漬する。ポリエステルの表面は酸素のプ
ラズマ処理によって親水化されているため表面で(化
2)の結合が形成され、フッ素含有のクロロシラン系化
合物(化1)による単分子膜4よりなる吸着膜3が形成
される。(図2)First, the procedure for producing the super water repellent film will be described. First, the polyester film 1 is plasma-treated at 0.2 W / cm 2 for 5 minutes in a vacuum container having an oxygen partial pressure of 10 Pa. As a result, as shown in FIG. 1, minute projections having a height A from the film surface to the tip of 85 nm are formed, and at the same time, the film surface is made hydrophilic. The polyester film 1 thus treated was taken out of the container and diluted with a solvent of cyclohexane to give 1 × 10 -2 Mol.
Immerse in a solution of a fluorine-containing chlorosilane compound (Chemical Formula 1) having a concentration of / l for 10 minutes. Since the surface of the polyester is hydrophilized by oxygen plasma treatment, the bond of (Chemical Formula 2) is formed on the surface, and the adsorption film 3 consisting of the monomolecular film 4 of the chlorosilane compound containing fluorine (Chemical formula 1) is formed. It (Fig. 2)
【0013】[0013]
【化2】 [Chemical 2]
【0014】このようにしてできた超撥水性フィルムの
撥水性、透明性の評価を行うため、水の接触角、透過率
について測定した。比較サンプルとして、FEPフィル
ム、フッ素系樹脂をコーティングしたポリエステルフィ
ルム、シリコーン系樹脂に無機微粒子(シリカ)を均一
に分散した複合塗料をコーティングしたポリエステルフ
ィルム、表面に突起を形成せず本発明と同じフッ素系ク
ロロシラン系化合物を使って化学吸着膜を形成したポリ
エステルフィルムの4つを用い、同様に、水の接触角、
透過率について測定した。なお、フィルム厚は、すべて
0.1mmである。In order to evaluate the water repellency and transparency of the super water repellent film thus formed, the contact angle of water and the transmittance were measured. As comparative samples, a FEP film, a polyester film coated with a fluorine-based resin, a polyester film coated with a composite coating in which inorganic fine particles (silica) are uniformly dispersed in a silicone-based resin, the same fluorine as the present invention without forming protrusions on the surface The same as the contact angle of water, which was obtained by using four polyester films on which a chemical adsorption film was formed using a chlorosilane-based compound.
The transmittance was measured. The film thickness is all 0.1 mm.
【0015】測定結果を(表1)に示す。The measurement results are shown in (Table 1).
【0016】[0016]
【表1】 [Table 1]
【0017】この(表1)から明らかなように、本実施
例1により作製した超撥水性フィルムは撥水性、透明性
の両面で優れた機能性フィルムであることがわかる。As is clear from this (Table 1), the super water-repellent film produced in Example 1 is a functional film excellent in both water repellency and transparency.
【0018】(実施例2)以下、本発明の実施例2につ
いて説明する。(Second Embodiment) A second embodiment of the present invention will be described below.
【0019】超撥水性フィルムの作製手順について図面
を参照しながら説明する。図3は本発明の超撥水性フィ
ルムを作製するための化学吸着膜形成装置の概略図であ
る。図3において、5は真空容器、6は密閉容器に入っ
ているフッ素含有のクロロシラン系化合物(化1)、7
は密閉容器のコックである。The procedure for producing the super water-repellent film will be described with reference to the drawings. FIG. 3 is a schematic view of a chemical adsorption film forming apparatus for producing the super water-repellent film of the present invention. In FIG. 3, 5 is a vacuum container, 6 is a fluorine-containing chlorosilane compound (Chemical formula 1) contained in a closed container, 7
Is a cock of a closed container.
【0020】実施例1と同様のプラズマ処理を行いフィ
ルム表面に微小な突起を形成した後、真空容器内を1×
10-3Paになるまで排気する。次に、密閉容器のコック
7を開きフッ素含有のクロロシラン系化合物6の原液を
気化させる。すると、プラズマ処理を行ったフィルムの
表面が親水化されているため、気化した(化1)とフィ
ルム表面とで(化2)の結合が形成され、フッ素含有の
クロロシラン系化合物による単分子膜4よりなる吸着膜
3が形成される。The same plasma treatment as in Example 1 was performed to form minute protrusions on the film surface, and then the inside of the vacuum chamber was 1 ×.
Evacuate to 10 -3 Pa. Next, the cock 7 of the closed container is opened to vaporize the stock solution of the chlorosilane compound 6 containing fluorine. Then, since the surface of the film subjected to the plasma treatment is made hydrophilic, a bond of (Chemical Formula 2) is formed between the vaporized (Chemical Formula 1) and the film surface, and the monomolecular film 4 of the fluorine-containing chlorosilane compound is formed. The adsorption film 3 is formed.
【0021】このようにしてできた超撥水性フィルムを
実施例1と同様の評価を行った。測定結果を(表2)に
示す。The super water-repellent film thus obtained was evaluated in the same manner as in Example 1. The measurement results are shown in (Table 2).
【0022】[0022]
【表2】 [Table 2]
【0023】この(表2)から明らかなように、本実施
例2により作製した超撥水性フィルムは、実施例1と同
様に、撥水性、透明性の両面に渡り優れた機能性フィル
ムであると同時に、同じ真空容器内で一括して膜形成ま
でできるため工程時間の短縮、低コスト化も実現可能と
なる。As is clear from (Table 2), the super water-repellent film produced in Example 2 is a functional film excellent in both water repellency and transparency as in Example 1. At the same time, since it is possible to collectively form a film in the same vacuum container, it is possible to shorten the process time and reduce the cost.
【0024】なお、実施例1または2においてクロロシ
ラン系化合物として(化1)を用いたが、他のフッ素含
有クロロシラン系化合物、例えば、(化3)や(化4)
などを用いても同じ効果は得られる。Although (Chemical Formula 1) was used as the chlorosilane-based compound in Example 1 or 2, other fluorine-containing chlorosilane-based compounds such as (Chemical Formula 3) and (Chemical Formula 4) were used.
The same effect can be obtained by using, for example.
【0025】[0025]
【化3】 [Chemical 3]
【0026】[0026]
【化4】 [Chemical 4]
【0027】また、本実施例では吸着させる化合物にク
ロロシラン系化合物を用いたが、メトキシシラン系、ま
たは、エトキシシラン系、または、クロロシラン系を含
めた混合系化合物であっても同様の効果を得ることがで
きる。In this embodiment, a chlorosilane compound is used as the compound to be adsorbed, but a similar effect can be obtained even if a methoxysilane compound, an ethoxysilane compound, or a mixed compound including a chlorosilane compound is used. be able to.
【0028】また、フィルム表面の突起の高さを今回は
85nmとしたが、10nm以下になると十分な撥水性が得
られなくなり、また、500nmを越えるとフィルム表面
の機械的強度が極力弱くなるため、望ましくは10〜5
00nmである。The height of the projections on the film surface was 85 nm this time, but if the height is 10 nm or less, sufficient water repellency cannot be obtained, and if it exceeds 500 nm, the mechanical strength of the film surface becomes weak as much as possible. , Preferably 10-5
It is 00 nm.
【0029】なお、実施例2で、クロロシラン系化合物
の分子量が大きくなる、すなわち、炭素の数が大きくな
ると蒸発しにくくなるが、原液を適度に加熱することで
対応できるが、直鎖状の場合で炭素の数が25程度まで
が望ましい。In Example 2, when the molecular weight of the chlorosilane compound becomes large, that is, when the number of carbons becomes large, it becomes difficult to evaporate, but it can be dealt with by heating the stock solution appropriately, but in the case of a straight chain Therefore, it is desirable that the number of carbons is up to about 25.
【0030】さらに、本実施例ではポリエステルフィル
ムを使用したが、他のプラスチックフィルムでも同様の
結果が得られることはいうまでもない。Further, although the polyester film is used in this embodiment, it goes without saying that the same result can be obtained with other plastic films.
【0031】[0031]
【発明の効果】以上のように本発明は、片面もしくは両
面に微小な突起を形成したプラスチックフィルム上にク
ロロシラン系、メトキシシラン系、及び、または、エト
キシシラン系フッ素化合物の化学吸着膜を形成すること
で、透明で優れた撥水性をもった機能性フィルムを手軽
に安価に提供でき、工業的かつ実用的効果は多大であ
る。As described above, the present invention forms a chemical adsorption film of a chlorosilane-based, methoxysilane-based, and / or ethoxysilane-based fluorine compound on a plastic film having minute protrusions formed on one or both sides. As a result, a transparent functional film having excellent water repellency can be easily provided at low cost, and industrial and practical effects are great.
【図1】実施例1および2における超撥水性フィルムの
構成図FIG. 1 is a structural diagram of superhydrophobic films in Examples 1 and 2.
【図2】実施例1および2における第1図中のB部を膜
形成後、分子レベルまで拡大した断面図FIG. 2 is a cross-sectional view obtained by enlarging the portion B in FIG. 1 in Examples 1 and 2 to a molecular level after forming a film.
【図3】実施例2における化学吸着膜形成方法の概略図FIG. 3 is a schematic diagram of a method for forming a chemisorption film in Example 2.
1 ポリエステルフィルム 2 プラズマ処理によって形成された微小な突起 3 フッ素含有のクロロシラン系化合物による単分子膜
により形成された化学吸着膜 4 化学吸着した単分子膜 5 真空容器 6 密閉容器に入ったフッ素含有クロロシラン系化合物 7 密閉容器のコック1 Polyester film 2 Micro projections formed by plasma treatment 3 Chemical adsorption film formed by monomolecular film of chlorosilane compound containing fluorine 4 Chemically adsorbed monomolecular film 5 Vacuum container 6 Fluorine-containing chlorosilane in closed container -Based compound 7 Cock for closed container
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 C08J 7/00 306 7310−4F C09K 3/18 104 8318−4H ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location C08J 7/00 306 7310-4F C09K 3/18 104 8318-4H
Claims (6)
たプラスチックフィルムと前記プラスチックフィルム上
に形成したクロロシラン系、メトキシシラン系、およ
び、または、エトキシシラン系フッ素化合物の化学吸着
膜とからなる超撥水性フィルム。1. A super-repellent film comprising a plastic film having minute projections formed on one or both sides and a chemical adsorption film of a chlorosilane-based, methoxysilane-based, or ethoxysilane-based fluorine compound formed on the plastic film. Aqueous film.
ガスによるプラズマ処理で形成される請求項1記載の超
撥水性フィルム。2. The super water-repellent film according to claim 1, wherein the minute projections are formed by plasma treatment with a gas containing at least oxygen.
10〜500nmであるような請求項1または2記載の撥
水性フィルム。3. The water-repellent film according to claim 1, wherein the height of the minute projections from the film surface is 10 to 500 nm.
面に少なくとも酸素を含むガスでプラズマ処理を行い、
プラスチックフィルム表面上を均一に微小に荒らす工程
と、クロロシラン系、メトキシシラン系、エトキシシラ
ン系の少なくとも1種類のフッ素化合物を含んだ溶液中
に前記プラスチックフィルムを浸漬させ、前記フッ素系
化合物を溶液中で化学的に吸着させる工程とからなる超
撥水性フィルムの製造方法4. A plastic film is plasma-treated on one or both sides with a gas containing at least oxygen,
A step of uniformly and minutely roughening the surface of the plastic film, and immersing the plastic film in a solution containing at least one chlorosilane-based, methoxysilane-based, or ethoxysilane-based fluorine compound, and adding the fluorine-based compound to the solution. Method for producing a super water-repellent film, which comprises a step of chemically adsorbing with water
面に少なくとも酸素を含むガスでプラズマ処理を行い、
プラスチックフィルム表面上を均一に微小に荒らす工程
Pと、クロロシラン系、メトキシシラン系、エトキシシ
ラン系の少なくとも1種類のフッ素化合物もしくは溶剤
で希釈したフッ素化合物の溶液を気相により前記プラス
チック表面に化学吸着させる工程Qとからなる超撥水性
フィルムの製造方法。5. A plasma treatment is performed on one or both sides of a plastic film with a gas containing at least oxygen,
Step P for uniformly and minutely roughening the surface of the plastic film, and at least one chlorosilane-based, methoxysilane-based, or ethoxysilane-based fluorine compound or a solution of a fluorine compound diluted with a solvent is chemically adsorbed on the plastic surface by the gas phase. A method of manufacturing a super water-repellent film, which comprises the step of:
で一括して行われる請求項5記載の超撥水性フィルムの
製造方法。6. The method for producing a super water-repellent film according to claim 5, wherein the step P and the step Q are collectively performed in the same vacuum container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18073292A JP3245972B2 (en) | 1992-07-08 | 1992-07-08 | Manufacturing method of super water repellent film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18073292A JP3245972B2 (en) | 1992-07-08 | 1992-07-08 | Manufacturing method of super water repellent film |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001175139A Division JP3489572B2 (en) | 2001-06-11 | 2001-06-11 | Super water repellent film and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0625449A true JPH0625449A (en) | 1994-02-01 |
| JP3245972B2 JP3245972B2 (en) | 2002-01-15 |
Family
ID=16088341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18073292A Expired - Lifetime JP3245972B2 (en) | 1992-07-08 | 1992-07-08 | Manufacturing method of super water repellent film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3245972B2 (en) |
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| JP2002256090A (en) * | 2001-03-01 | 2002-09-11 | Ulvac Japan Ltd | Surface treatment method for plastic molded product, its apparatus, and production method for plastic molded product with vapor-depositted film formed |
| WO2003039856A1 (en) * | 2001-11-08 | 2003-05-15 | Nippon Sheet Glass Company, Limited | Ultra-water-repellent substrate |
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- 1992-07-08 JP JP18073292A patent/JP3245972B2/en not_active Expired - Lifetime
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| JP2002256090A (en) * | 2001-03-01 | 2002-09-11 | Ulvac Japan Ltd | Surface treatment method for plastic molded product, its apparatus, and production method for plastic molded product with vapor-depositted film formed |
| WO2003039856A1 (en) * | 2001-11-08 | 2003-05-15 | Nippon Sheet Glass Company, Limited | Ultra-water-repellent substrate |
| WO2003039855A1 (en) * | 2001-11-08 | 2003-05-15 | Nippon Sheet Glass Company, Limited | Article coated with coating film, and functional article coated with coating film using the same |
| US7022416B2 (en) | 2001-11-08 | 2006-04-04 | Nippon Sheet Glass Company, Limited | Article coated with coating film, and functional article coated with coating film using the same |
| EP1449642A4 (en) * | 2001-11-08 | 2007-06-13 | Nippon Sheet Glass Co Ltd | Ultra-water-repellent substrate |
| JP2007245266A (en) * | 2006-03-14 | 2007-09-27 | Daikin Ind Ltd | CMP equipment |
| JP2007284492A (en) * | 2006-04-13 | 2007-11-01 | General Electric Co <Ge> | Article with surface having low wettability and its manufacturing method |
| JP2010188584A (en) * | 2009-02-17 | 2010-09-02 | Nissan Motor Co Ltd | Frictional flaw resistant water repellent configuration and frictional flaw resistant water repellent structure |
| JP2010251745A (en) * | 2009-04-10 | 2010-11-04 | Asml Netherlands Bv | Immersion lithography device and device manufacturing method |
| US8993220B2 (en) | 2009-04-10 | 2015-03-31 | Asml Netherlands B.V. | Immersion lithographic apparatus and a device manufacturing method |
| JP2013544297A (en) * | 2010-10-28 | 2013-12-12 | スリーエム イノベイティブ プロパティズ カンパニー | Super hydrophobic film |
| WO2012147288A1 (en) * | 2011-04-27 | 2012-11-01 | 株式会社デンソー | Water-repellent substrate, heat exchanger using water-repellent substrate, and method for producing water-repellent substrate |
| JP2021168343A (en) * | 2020-04-10 | 2021-10-21 | 芝浦メカトロニクス株式会社 | Substrate processing apparatus |
| CN113862990A (en) * | 2021-09-18 | 2021-12-31 | 东华大学 | Modified fiber fabric and preparation method thereof |
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|---|---|
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