JPH0625968Y2 - Gas laser tube - Google Patents
Gas laser tubeInfo
- Publication number
- JPH0625968Y2 JPH0625968Y2 JP1988004038U JP403888U JPH0625968Y2 JP H0625968 Y2 JPH0625968 Y2 JP H0625968Y2 JP 1988004038 U JP1988004038 U JP 1988004038U JP 403888 U JP403888 U JP 403888U JP H0625968 Y2 JPH0625968 Y2 JP H0625968Y2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- stem
- discharge
- thin tube
- gas laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 235000013372 meat Nutrition 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Lasers (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案はレーザ管外囲器の両端がステム構体とガラス面
板に依り密閉された内部ミラー形ガスレーザ管の放電細
管の支持構造に関するもので有る。[Detailed Description of the Invention] [Industrial field of application] The present invention relates to a support structure for a discharge capillary of an internal mirror type gas laser tube in which both ends of a laser tube envelope are sealed by a stem structure and a glass face plate. .
従来より内部ミラー形ガスレーザ管は第３図に示す様に
外囲器となるガラス太管１１の一端にステム９、もう一
端にステム構体が接続され、更にステム構体のステム中
管３及びステム９に接続されたミラー支持体６及び１０
にガラス面板（以後ミラーと呼称）１２を配置してミラ
ーの周囲を接着剤に依り密閉接着されて真空外囲器が構
成され、前記ガラス太管１１の内周面に沿って設けられ
た陰極７とステム中管３に設けられた陽極１３との間に
電圧を印加し、管球内のステム中管３で支持された放電
細管１の管内にプラズマを形成し、放電細管１を中心に
ミラーの内部共振器の作用に依りレーザ発振を起させ
る。この様な内部ミラー形ガスレーザ管の特に放電細管
１を支持する方法としては第４図（ａ）に示す様に放電
細管となるガラス細管１の所定の寸法位置に加熱押圧し
て凸形状の突起物２０を形成して更に中管３を第４図
（ｂ）に示すように突起物の端部へ被せ接着して放電ル
ーム４を兼ねた放電細管を支持する構造となっている。Conventionally, an internal mirror type gas laser tube has a stem 9 connected to one end of a thick glass tube 11 serving as an envelope and a stem structure connected to the other end as shown in FIG. Mirror supports 6 and 10 connected to
A glass face plate (hereinafter referred to as a mirror) 12 is disposed on the inner surface of the thick glass tube 11 to form a vacuum envelope by hermetically sealing the periphery of the mirror with an adhesive to form a cathode. 7 and a positive electrode 13 provided in the stem middle tube 3, a voltage is applied, plasma is formed in the discharge thin tube 1 supported by the stem middle tube 3 in the bulb, and the discharge thin tube 1 is centered. Laser oscillation is caused by the action of the internal cavity of the mirror. As a method for supporting the discharge thin tube 1 of such an internal mirror type gas laser tube, as shown in FIG. 4 (a), the glass thin tube 1 to be the discharge thin tube is heated and pressed at a predetermined dimension to form a convex projection. An object 20 is formed and the middle tube 3 is further covered and adhered to the end of the projection as shown in FIG. 4 (b) to support the discharge thin tube which also serves as the discharge room 4.
この様なレーザ管に置いて、特に放電細管を支持するた
めのステム中間のフレヤー部と放電細管内周部に設けら
れた突起物とを接続する放電細管組立の製造工程に於て
は接続部のガラス肉が不揃いのため、薄肉部や厚肉部が
発生する。特に薄肉部は機械的強度が小さくクラック破
壊の原因となったり、又放電細管の撓みが発生し光軸に
起因する特性不良を来たしたり、更には、電気抵抗が低
下し、絶縁破壊を誘発する欠点が有った。In the manufacturing process of the discharge thin tube assembly, in which the flare portion in the middle of the stem for supporting the discharge thin tube is connected to the protrusion provided on the inner peripheral portion of the discharge thin tube, the connecting portion is placed in such a laser tube. Since the glass meat is uneven, thin and thick parts are generated. In particular, the thin part has low mechanical strength and may cause crack breakage, or the deflection of the discharge capillary may cause the defective characteristics due to the optical axis. Furthermore, the electrical resistance may decrease and induce dielectric breakdown. There was a flaw.
本考案のガスレーザ管は以上述べた様に放電細管の支持
構造に関する技術上の問題点を解決すべく、放電細管本
体の円周部に放電細管と一体にステム中管の肉厚と近似
する鐘状を有した形状の放電細管支持部を形成し、該支
持部先端とステム中管先端とを接続し、放電細管支持及
び放電ルームを構成している事を特徴としている。As described above, the gas laser tube of the present invention has a bell that approximates the wall thickness of the stem middle tube integrally with the discharge thin tube in the circumferential portion of the discharge thin tube body in order to solve the technical problems related to the support structure of the discharge thin tube. It is characterized in that a discharge thin tube supporting portion having a shape is formed, and the tip of the supporting portion and the tip of the middle tube of the stem are connected to form a discharge thin tube supporting member and a discharge room.
本考案の目的は、製法の難易度軽減及び強度と共に品質
の優れたレーザ管を提供する事に有る。It is an object of the present invention to provide a laser tube which is excellent in quality as well as the difficulty of the manufacturing method and strength.
次に本考案の実施例を参照しながら詳細に説明する。第
１図は本考案の一実施例のレーザ管の断面図で有る。第
２図は本考案の一実施例の放電細管組立構造の製造工程
を示す図である。先ず放電細管１を構成する外径７mmで
内径が１mmのガラス細管を１２０mmに切断する。所定の
寸法に切断したガラス細管の所定寸法位置を加熱し、第
２図（ａ）に示すように鐘状を呈した放電細管支持部２
を形成する。この放電細管支持部２は型成形されている
ためガラス肉厚は均一に成形されている。該放電細管支
持部２は、ステム構体１５の中央に設けたステム中管３
の先端と接続して放電細管を支持すると共に放電ルーム
４を具備した放電細管組立を構成している（第２図
（ｂ））。この第２図（ｂ）の様な構造の放電細管組立
のステム中管先端にはミラー支持体６を接続し又陰極７
をリード線８に取り付ける。陽極１３はステム中管側壁
に設けられる。他の一方のステム９にもミラー支持体１
０を取り付ける。ミラー支持体６，１０にはレーザ共振
器間のミラー−１２を各々取付ける。夫々組立られた放
電細間組立、ステム９はガラス太管１１の両端に封着
し、ガラス太管１１と共に外囲器を構成し、更にミラー
支持体にミラー１２を封着して気密封止している。Next, a detailed description will be given with reference to an embodiment of the present invention. FIG. 1 is a sectional view of a laser tube according to an embodiment of the present invention. FIG. 2 is a diagram showing a manufacturing process of a discharge capillary assembly structure according to an embodiment of the present invention. First, a glass capillary tube having an outer diameter of 7 mm and an inner diameter of 1 mm, which constitutes the discharge capillary tube 1, is cut into 120 mm. The discharge thin tube supporting portion 2 has a bell shape as shown in FIG. 2 (a) by heating a predetermined size position of the glass thin tube cut into a predetermined size.
To form. Since the discharge capillary support portion 2 is molded, the glass wall thickness is uniform. The discharge thin tube supporting portion 2 is a stem middle tube 3 provided in the center of the stem structure 15.
Is connected to the tip of the discharge tube to support the discharge tube and a discharge tube assembly including the discharge chamber 4 is formed (FIG. 2 (b)). A mirror support 6 is connected to the tip of the middle tube of the stem of the discharge thin tube assembly having the structure as shown in FIG.
Is attached to the lead wire 8. The anode 13 is provided on the side wall of the stem middle tube. The mirror support 1 is also attached to the other stem 9.
Attach 0. The mirrors 12 between the laser resonators are attached to the mirror supports 6 and 10, respectively. Each of the assembled discharge cells and stems 9 is sealed to both ends of the glass thick tube 11 to form an envelope together with the glass thick tube 11, and the mirror 12 is further sealed to the mirror support to hermetically seal. is doing.
以上の説明から本考案の内部ミラー形ガスレーザ管に於
いては、放電細管本体周縁部に予め、ステム中管の形状
肉厚とも近似する肉厚を有した鐘状の支持部を形成し、
該支持部とステム中管とを接続する事に依り、細管支持
部の構造が単純化し、其れ故に加工性が著しく向上し、
ガラス肉厚の均一が可能となったばかりでなく強度の向
上と併せて肉厚のバラツキが起因する電気抵抗の低下が
皆無となり、量産にも適した信頼性の高い内部ミラー形
ガスレーザ管を得る事が出来た。From the above description, in the internal mirror type gas laser tube of the present invention, a bell-shaped support portion having a wall thickness similar to that of the middle tube of the stem is formed in advance in the peripheral portion of the discharge thin tube body,
By connecting the support part and the stem middle tube, the structure of the thin tube support part is simplified, and therefore the workability is remarkably improved,
Not only has the glass thickness become uniform, but strength has also been improved, and there has been no decrease in electrical resistance due to variations in wall thickness, and a highly reliable internal mirror gas laser tube suitable for mass production can be obtained. Was completed.
第１図は本考案に依る一実施例のガスレーザ管の断面
図、第２図は本考案に依る一実施例の放電細管組立構造
の製造工程を示す断面図、第３図は従来のガスレーザ管
の断面図、第４図は従来のガスレーザ管の放電細管組立
構造の製造工程図。 １……放電細管、２……放電細管支持部、３……ステム
中管、４……放電ルーム、６，１０……ミラー支持体、
７……陰極、８……リード線、９……ステム、１１……
ガラス太管、１２……ミラー、１３……陽極。FIG. 1 is a sectional view of a gas laser tube of an embodiment according to the present invention, FIG. 2 is a sectional view showing a manufacturing process of a discharge capillary assembly structure of an embodiment of the present invention, and FIG. 3 is a conventional gas laser tube. FIG. 4 is a manufacturing process diagram of a conventional discharge laser tube assembly structure for a gas laser tube. 1 ... Discharge capillary, 2 ... Discharge capillary support, 3 ... Stem middle tube, 4 ... Discharge room, 6, 10 ... Mirror support,
7 ... Cathode, 8 ... Lead wire, 9 ... Stem, 11 ...
Thick glass tube, 12 ... Mirror, 13 ... Anode.
Claims (1)
を内蔵し、且つ気体を密閉した真空外囲器の一端がミラ
ー面板を取付けたステムに依り閉じられもう一端がステ
ム中管を備えているステム構体で閉じられている内部ミ
ラー形ガスレーザ管に於いて、前記ステム構体中央に配
置されたステム管の肉厚と近似した肉厚の鐘状の放電細
管支持部を前記放電細管外周の任意の位置に前記放電細
管と一体に形成し、該放電細管支持部の端部を前記ステ
ム構体中央部のステム中管先端と接続した事を特徴とし
たガスレーザ管。1. A vacuum envelope containing a discharge thin tube for forming a discharge path between a cathode and an anode and sealing a gas is closed at one end by a stem having a mirror face plate and at the other end a stem middle tube. In the internal mirror type gas laser tube closed by the provided stem structure, a bell-shaped discharge thin tube supporting portion having a wall thickness similar to that of the stem tube arranged at the center of the stem structure is provided on the outer periphery of the discharge thin tube. The gas laser tube is characterized in that it is formed integrally with the discharge thin tube at an arbitrary position, and the end portion of the discharge thin tube support portion is connected to the tip of the middle stem tube of the central portion of the stem structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988004038U JPH0625968Y2 (en) | 1988-01-14 | 1988-01-14 | Gas laser tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988004038U JPH0625968Y2 (en) | 1988-01-14 | 1988-01-14 | Gas laser tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01108961U JPH01108961U (en) | 1989-07-24 |
| JPH0625968Y2 true JPH0625968Y2 (en) | 1994-07-06 |
Family
ID=31206195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988004038U Expired - Lifetime JPH0625968Y2 (en) | 1988-01-14 | 1988-01-14 | Gas laser tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625968Y2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3955152A (en) * | 1975-02-14 | 1976-05-04 | Owens-Illinois, Inc. | Tubular laser |
-
1988
- 1988-01-14 JP JP1988004038U patent/JPH0625968Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01108961U (en) | 1989-07-24 |
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