JPH06267485A - Scanning electron microscope - Google Patents

Abstract

(57) [Abstract] [Purpose] Energy dispersive X-ray analyzer and wavelength dispersive X
To provide a scanning electron microscope equipped with an X-ray passage prevention plate and an X-ray passage hole for preventing excessive X-rays so as to enable simultaneous analysis of a line analyzer. [Structure] When performing analysis using a wavelength dispersive X-ray analyzer in a scanning electron microscope, in order to prevent excess X-rays from entering the energy dispersive X-ray analyzer, the sample and the energy dispersive X-ray are used. A rotating or sliding X-ray passage prevention plate having a plurality of X-ray passage holes with different hole diameters was provided between the analyzer and the analyzer. [Effect] Energy dispersion in X-ray analysis using a scanning electron microscope. Type X-ray analyzer and wavelength dispersive X-ray analyzer can be simultaneously analyzed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an energy dispersive X-ray analyzer and a wavelength dispersive X-ray which analyze a characteristic X-ray generated from a sample by irradiating the sample inserted in the sample chamber with an electron beam. The present invention relates to a scanning electron microscope to which an analysis device can be attached.

[0002]

2. Description of the Related Art In a conventional apparatus, almost no consideration has been given to preventing excessive X-rays from entering an energy dispersive X-ray analyzer.

[0003]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
It is possible to mount the energy dispersive X-ray analyzer and the wavelength dispersive X-ray analyzer at the same time, but the probe current required in the actual analysis is 2 × 10 ^{− in the} energy dispersive X-ray analyzer. ^{It was 10} A, which was 2 × 10 ^-8 A in the wavelength dispersive X-ray analyzer, and there was a large difference between the two analyzers, so it was not possible to perform analysis in both analyzers at the same time. In the present invention, when the sample is irradiated with an electron beam under the analysis conditions of the wavelength dispersive X-ray analyzer, the characteristic X-rays generated do not enter the detector with excessive characteristic X-rays for the energy dispersive X-ray analyzer. In order to prevent this, it is an object to provide a scanning electron microscope equipped with a rotating or sliding X-ray passage prevention plate having an X-ray passage hole.

Another object of the present invention is to provide a scanning electron microscope equipped with an X-ray passage prevention plate having X-ray passage holes having a plurality of hole diameters in order to cope with various probe currents.

Further, the X-ray passage prevention plate has a two-layer structure of a light material and a heavy material, so that the backscattered electrons and the secondary excitation X
It is an object of the present invention to provide a scanning electron microscope capable of preventing a line from entering a detector.

[0006]

To achieve the above object, an X-ray having a two-layer structure that rotates or slides and has a plurality of X-ray passage holes having different hole diameters between a sample and an energy dispersive X-ray analyzer. The passage prevention plate was attached to the electron microscope.

[0007]

A rotating or sliding X-ray passage prevention plate having a plurality of X-ray passage holes having different hole diameters is provided between the sample and the energy dispersive X-ray analyzer. As a result, an excessive amount of X-rays cannot pass through, and an appropriate amount of X-rays is emitted as energy dispersive X
Detected by line analyzer.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention is shown in FIG. The incident electrons 2 generated from the filament 1 pass through the condenser lens 3 and the objective lens 4 and are irradiated to the sample 5, so that characteristic X-rays 6a, 6b and 6c are generated. At this time, C is determined from information such as the probe current value of the Faraday cup 10, the dead time of the energy dispersive X-ray analyzer 12 or the acquisition start signal of the wavelength dispersive X-ray analyzer 11.
The optimum condition is selected by the PU 13, and the signal passed through the digital-analog converter 14 and the amplifier 15 is sent to the motor 9 to rotate the X-ray passage prevention plate 7. Thereby, the plurality of X-ray passage holes 16a, 16b, 1 formed in the X-ray passage prevention plate 7 are formed.
An X-ray passage hole having an appropriate hole diameter is selected from 6c and 16d, and excessive characteristic X-rays 6b and 6c are not detected by the energy dispersive X-ray detector 8 and only the characteristic X-ray 6a is detected. As a result, the energy dispersive X-ray analyzer and the wavelength dispersive X-ray analyzer can be simultaneously analyzed.

FIG. 2 shows a second embodiment of the present invention. Characteristic X-rays 6a, 6b, 6c generated from the sample 5 by the incident electron 2 passing through the objective lens 4 and irradiating the sample 5
Excessive characteristic X-rays 6b and 6c are absorbed by the X-ray passage preventing plate having a two-layer structure of an X-ray passage preventing plate 7a made of a light element such as carbon and an X-ray passage preventing plate 7b made of a heavy element such as tantalum. Only the characteristic X-ray 6a is detected by the X-ray detector 8. In addition, the use of a lightening material for the X-ray passage prevention plate 7a prevents the generation of backscattered electrons.
It becomes possible to absorb the X-ray of the secondary excitation by using the element material for b. As a result, good results are obtained in the simultaneous analysis of the energy dispersive X-ray analyzer and the wavelength dispersive X-ray analyzer.

FIG. 3 shows a third embodiment of the present invention. The X-ray passage prevention plate 7 has a plurality of different X-ray passage holes 16a, 16
b, 16c, 16d and a blanking point 17 are provided so that they are rotated. As a result, it becomes possible to select the X-ray passage hole corresponding to the change in the probe current. Furthermore, it is possible to select a state in which no signal enters the X-ray detector.

[0011]

According to the present invention, an energy dispersive X-ray analyzer and a wavelength dispersive X-ray analyzer can be simultaneously analyzed by X-ray analysis using a scanning electron microscope.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an apparatus according to an embodiment.

FIG. 2 is a device configuration diagram in the vicinity of an objective lens according to a second embodiment.

FIG. 3 is a structural diagram of an X-ray passage prevention plate according to a third embodiment.

[Explanation of symbols]

1 ... Filament, 2 ... Incident electron beam, 3 ... Condenser lens, 4 ... Objective lens, 5 ... Sample, 6a, 6b, 6c ...
Characteristic X-ray, 7 ... X-ray passage prevention plate, 8 ... Energy dispersive X-ray detector, 9 ... Motor, 10 ... Faraday cup, 1
DESCRIPTION OF SYMBOLS 1 ... Wavelength dispersive X-ray analyzer, 12 ... Energy dispersive X-ray analyzer, 13 ... CPU, 14 ... Digital-analog converter, 15 ... Amplifier, 16a, 16b, 16c, 16
d ... X-ray passage hole, 17 ... Blanking point.

Claims (1)

[Claims] 1. An energy dispersive X-ray analyzer, a wavelength dispersive X-ray analyzer and the electron beam, which irradiate a sample inserted in a sample chamber with an electron beam and detect characteristic X-rays generated from the sample. In a scanning electron microscope to be generated, when performing analysis using the wavelength dispersive X-ray analyzer, in order to prevent excess X-rays from entering the energy dispersive X-ray analyzer, the sample and the energy dispersive A scanning electron microscope, wherein a rotating or sliding X-ray passage preventing plate having a plurality of X-ray passing holes having different hole diameters is provided between the scanning electron microscope and the X-ray analyzer.