JPH06307816A - Non-contact plate width measuring device - Google Patents
Non-contact plate width measuring deviceInfo
- Publication number
- JPH06307816A JPH06307816A JP9450693A JP9450693A JPH06307816A JP H06307816 A JPH06307816 A JP H06307816A JP 9450693 A JP9450693 A JP 9450693A JP 9450693 A JP9450693 A JP 9450693A JP H06307816 A JPH06307816 A JP H06307816A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- width
- light receiving
- plate
- plate width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 41
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000003708 edge detection Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、板状の被測定物の板幅
を非接触で光学的に測定する非接触板幅測定装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact plate width measuring device for optically measuring the plate width of a plate-shaped object to be measured in a non-contact manner.
【0002】[0002]
【従来の技術】図6は、被測定物の外径を測定する外径
測定装置の斜視図である。この外径測定装置50は、投
光部51と受光部52が一対で配置され、投光部51
は、所定幅Zの測定ビームを受光部52に投光する。し
たがって、被測定物55を投光部51と受光部52間に
介在させることにより、受光部52では被測定物55の
外径に相当する幅分だけ、測定ビームが遮られ、被測定
物55の外径を非接触で測定することができる。2. Description of the Related Art FIG. 6 is a perspective view of an outer diameter measuring device for measuring the outer diameter of an object to be measured. In this outer diameter measuring device 50, a light projecting portion 51 and a light receiving portion 52 are arranged in a pair, and the light projecting portion 51
Emits a measurement beam having a predetermined width Z to the light receiving unit 52. Therefore, by interposing the object to be measured 55 between the light projecting section 51 and the light receiving section 52, the measuring beam is blocked by the light receiving section 52 by a width corresponding to the outer diameter of the object to be measured 55, and the object to be measured 55. The outer diameter of can be measured without contact.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、この外
径測定装置は、被測定物55の外径を測定できる範囲
は、測定ビームの所定幅Z以内であった。このため、被
測定物55が測定ビームの幅Z以上の幅広に形成された
もの、例えば、長尺状の板の場合、この被測定物55を
測定することができなかった。尚、投光部51と受光部
52との間は、測定ビームの焦点距離の都合上、高精度
測定を行うために所定間隔以上離すことができず、この
点でも投光部51、受光部52間に幅広の被測定物55
を介在させることができなかった。このように、投光部
51と受光部52とを対面させ、その間で被測定物55
を測定する構成の場合、被測定物55をその間に配置出
来なければ測定することができなかった。However, in this outer diameter measuring device, the range in which the outer diameter of the object 55 to be measured can be measured is within the predetermined width Z of the measuring beam. Therefore, in the case where the measured object 55 is formed wider than the width Z of the measurement beam, for example, a long plate, the measured object 55 cannot be measured. It should be noted that the light projecting section 51 and the light receiving section 52 cannot be separated from each other by a predetermined distance or more in order to perform highly accurate measurement because of the focal length of the measurement beam. Wide measurement object 55 between 52
Could not be intervened. In this way, the light projecting portion 51 and the light receiving portion 52 are made to face each other, and the object to be measured 55 is placed between them.
In the case of the configuration for measuring, the object to be measured 55 cannot be measured unless the object to be measured 55 can be arranged between them.
【0004】また、被測定物55が透明な材質である場
合、測定ビームはこの被測定物55部分を透光するた
め、受光信号の明暗の差が小さいため、精度良く外径測
定を行えなかった。さらに、透明体のキズや歪み等の影
響を受けやすかった。Further, when the object 55 to be measured is made of a transparent material, the measuring beam transmits the part to be measured 55, so that the difference in brightness of the received light signal is small, and therefore the outer diameter cannot be accurately measured. It was Furthermore, it was easily affected by scratches and distortion of the transparent body.
【0005】本発明は、上記課題を解決するためになさ
れたものであり、被測定物が投光部と受光部との間隔以
上を有する場合、すなわち、所定幅を有する被測定物で
あってもその板幅を測定でき、さらに、被測定物が透明
な場合でもこの板幅を測定することができる非接触板幅
測定装置を提供することを目的としている。The present invention has been made in order to solve the above problems, and when the object to be measured has a distance between the light projecting portion and the light receiving portion or more, that is, the object to be measured has a predetermined width. It is also an object of the present invention to provide a non-contact plate width measuring device capable of measuring the plate width and measuring the plate width even when the object to be measured is transparent.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本発明の非接触板幅測定装置は、所定幅(W)を有
する被測定物(55)の板幅を非接触で光学的に測定す
る板幅測定装置であって、該被測定物の一方の面の端部
に配置され、被測定物に対し所定角度(α1)、及び被
測定物の幅方向に所定幅(L1)を有して測定ビーム
(B)を出射する投光部(2)と、前記被測定物の一方
の面でかつ該投光部と同一面に設けられ、該投光部から
出射された測定ビームのうち被測定物により反射された
測定ビームを受光する受光部(3)と、該受光部による
測定ビームの受光状態により被測定物の板端を検出し、
被測定物の板幅を演算する演算部(30)とを具備する
ことを特徴としている。In order to achieve the above object, the non-contact plate width measuring device of the present invention optically non-contact the plate width of an object (55) having a predetermined width (W). A plate width measuring device for measuring, which is arranged at an end of one surface of the object to be measured, and has a predetermined angle (α1) with respect to the object to be measured and a predetermined width (L1) in the width direction of the object to be measured. A light projecting portion (2) having the measurement beam (B) and a measurement beam provided on one surface of the object to be measured and on the same surface as the light projecting portion and emitted from the light projecting portion. A light receiving section (3) for receiving the measurement beam reflected by the object to be measured, and a plate edge of the object to be measured by the light receiving state of the measurement beam by the light receiving section,
And a calculator (30) for calculating the plate width of the object to be measured.
【0007】[0007]
【作用】投光部2および受光部3は、いずれも被測定物
55の一方の面上に配置され、投光部2の測定ビームB
が被測定物55で反射され受光部3で検出される。投光
部2は、被測定物55の幅方向端部位置に設けられ、よ
って、測定ビームBは、被測定物55の端部より内方の
部分のみ受光部3で検出される。これにより、演算部3
0は、被測定物55の端部位置を検出でき、被測定物5
5の板幅を得ることができる。Both the light projecting section 2 and the light receiving section 3 are arranged on one surface of the object 55 to be measured, and the measuring beam B of the light projecting section 2 is measured.
Is reflected by the DUT 55 and detected by the light receiving section 3. The light projecting unit 2 is provided at an end position in the width direction of the DUT 55, and thus the measurement beam B is detected by the light receiving unit 3 only at a portion inside the end of the DUT 55. As a result, the calculation unit 3
0 can detect the end position of the DUT 55,
A board width of 5 can be obtained.
【0008】[0008]
【実施例】図1は、本発明の非接触板幅測定装置の第1
実施例の構成を示す斜視図である。図示の如く、この装
置は、板状物としての被測定物55の一方の面側におい
て、非測定物55の幅W以上の横幅を有する検出器1が
設置される。被測定物55は、図の矢印A方向に長尺な
形状であり、図示の箇所に固定あるいは、A方向に搬送
される。検出器1は、上端のアングル10が基体に固定
される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a first non-contact plate width measuring device of the present invention.
It is a perspective view which shows the structure of an Example. As shown in the figure, in this device, a detector 1 having a lateral width equal to or larger than the width W of the non-measured object 55 is installed on one surface side of the measured object 55 as a plate-shaped object. The DUT 55 has an elongated shape in the direction of arrow A in the figure, and is fixed at the illustrated position or conveyed in the direction A. The angle 10 at the upper end of the detector 1 is fixed to the base.
【0009】検出器1は、一対の投光部2と受光部3で
構成される。この投光部2と、受光部3は、被測定物5
5の長さ方向に対し所定角度α1,α2(α1≒α2)
を有して設けられる。投光部2には、レーザ光源、及び
光学系が設けられ、レーザ光の測定ビームBが被測定物
55に対し前記所定角度α1を有して出射される。ま
た、受光部3には、光学系および受光素子が設けられ、
被測定物55により所定角度α2で反射した測定ビーム
Bがこの受光素子で検出される。The detector 1 comprises a pair of a light projecting section 2 and a light receiving section 3. The light projecting section 2 and the light receiving section 3 are arranged under the object 5 to be measured.
Predetermined angles α1, α2 with respect to the length direction of 5 (α1 ≈ α2)
Is provided. The light projecting unit 2 is provided with a laser light source and an optical system, and the measurement beam B of the laser light is emitted to the object 55 to be measured at the predetermined angle α1. Further, the light receiving section 3 is provided with an optical system and a light receiving element,
The measurement beam B reflected by the DUT 55 at a predetermined angle α2 is detected by this light receiving element.
【0010】そして、投光部2の測定ビームBは、被測
定物55の板幅方向に沿って所定範囲L1を有してい
る。この測定ビームBは、所定幅L1を有し順次走査さ
れる構成である。The measurement beam B of the light projecting section 2 has a predetermined range L1 along the plate width direction of the object 55 to be measured. The measurement beam B has a predetermined width L1 and is sequentially scanned.
【0011】上記構成で被測定物55に対し検出器1の
投光部2から測定ビームBを出射すると、所定幅L1の
測定ビームBは、被測定物55に投光される部分と、投
光されない部分とが生じる。このため、受光部3では、
被測定物55が存在する箇所を走査する測定ビームBの
反射光が受光される。When the measuring beam B is emitted from the light projecting section 2 of the detector 1 to the object 55 to be measured with the above-mentioned structure, the measuring beam B having a predetermined width L1 is projected onto the object 55 to be measured and a portion to be projected onto the object 55 to be measured. Some parts are not illuminated. Therefore, in the light receiving unit 3,
The reflected light of the measurement beam B that scans the position where the DUT 55 is present is received.
【0012】このように、被測定物55に対し所定幅L
1の測定ビームBを出射し、反射した光の範囲により被
測定物55の板幅Wを検出することができる。具体的に
は、受光部3の検出信号は演算部に入力され、演算部は
反射した光の範囲に応じた板幅信号を出力する。また、
測定ビームBが所定角度α1を有して斜めに照射される
構成であるため、被測定物55がガラス等の透明体であ
る場合においても、反射光量に増減に関わらず常に高精
度に板幅を検出できる。As described above, the predetermined width L with respect to the object 55 to be measured.
It is possible to detect the plate width W of the DUT 55 by emitting the measurement beam B of No. 1 and the range of the reflected light. Specifically, the detection signal of the light receiving unit 3 is input to the calculation unit, and the calculation unit outputs a plate width signal according to the range of the reflected light. Also,
Since the measurement beam B is obliquely emitted at a predetermined angle α1, even when the DUT 55 is a transparent body such as glass, the plate width is always highly accurately irrespective of the amount of reflected light. Can be detected.
【0013】次に図2は、本発明の非接触板幅測定装置
の第2実施例の構成を示す斜視図、図3は同正面図、図
4は同側面図である。この実施例の装置は、板状物とし
ての被測定物55の一方の面側において、両端箇所にそ
れぞれ検出器1,5が離れて設置される。被測定物55
は、図の矢印A方向に長尺な形状であり、図示の箇所に
固定あるいはA方向に搬送される。検出器1,5は、上
端のアングル10がそれぞれ図3に示す基体12a,1
2bに固定されるものであり、基体12a,12bは、
互いの方向にスライド自在である。基体12a,12b
の相対距離は外部の間隔測定装置で検出され、後述する
演算部30に出力される。Next, FIG. 2 is a perspective view showing the configuration of a second embodiment of the non-contact plate width measuring device of the present invention, FIG. 3 is the same front view, and FIG. 4 is the same side view. In the apparatus of this embodiment, the detectors 1 and 5 are separately installed at both ends on one surface side of the object to be measured 55 as a plate-like object. DUT 55
Has a shape elongated in the direction of arrow A in the figure, and is fixed to the illustrated position or conveyed in the direction A. In the detectors 1 and 5, the angles 10 at the upper ends are the bases 12a and 1 shown in FIG. 3, respectively.
2b, and the bases 12a and 12b are
It is slidable in the direction of each other. Substrates 12a, 12b
The relative distance of is detected by an external distance measuring device and is output to the arithmetic unit 30 described later.
【0014】検出器1は、一対の投光部2と受光部3で
構成され、検出器5も同様の投光部6,受光部7を有す
る。この検出器1側により説明すると、投光部2と、受
光部3は、図4に示す如くそれぞれ被測定物55の長さ
方向に対し所定角度α1,α2(α1≒α2)を有して
設けられる。投光部2には、レーザ光源、及び光学系が
設けられ、レーザ光の測定ビームBが被測定物55に対
し前記所定角度α1を有して出射される。また、受光部
3には、光学系および受光素子が設けられ、被測定物5
5により所定角度α2で反射した測定ビームBがこの受
光素子で検出される。The detector 1 is composed of a pair of a light projecting section 2 and a light receiving section 3, and the detector 5 also has a similar light projecting section 6 and a light receiving section 7. Explaining from the detector 1 side, the light projecting section 2 and the light receiving section 3 have predetermined angles α1, α2 (α1≈α2) with respect to the length direction of the DUT 55 as shown in FIG. It is provided. The light projecting unit 2 is provided with a laser light source and an optical system, and the measurement beam B of the laser light is emitted to the object 55 to be measured at the predetermined angle α1. The light receiving section 3 is provided with an optical system and a light receiving element.
The measuring beam B reflected at a predetermined angle α2 by 5 is detected by this light receiving element.
【0015】そして、投光部2の測定ビームBは、図
2,3に示すように、被測定物55の板幅方向に沿って
所定範囲L2を有している。この測定ビームBは、所定
幅L2を有し順次走査される構成である。また、受光部
3の受光素子で検出された測定状態は、演算部30に出
力される。尚、走査方向の中央部分B0の箇所を境に一
方の走査側(板幅が長い方向;B+側)が加算信号、他
方の走査側(板幅が短い方向;B−側)が減算信号とさ
れている。As shown in FIGS. 2 and 3, the measurement beam B of the light projecting section 2 has a predetermined range L2 along the plate width direction of the object 55 to be measured. The measurement beam B has a predetermined width L2 and is sequentially scanned. The measurement state detected by the light receiving element of the light receiving unit 3 is output to the arithmetic unit 30. It should be noted that one scanning side (long plate width direction; B + side) is an addition signal, and the other scanning side (short plate width direction; B− side) is a subtraction signal with the center portion B0 in the scanning direction as a boundary. Has been done.
【0016】図5は、演算部30を示すブロック図であ
る。検出器1,5の間隔は、リニアスケール等の間隔測
定装置25で測定され、板幅演算手段33に間隔信号S
1が出力される。また、検出器1の受光部3の測定状態
は、板端検出手段31に入力され、同様に検出器5の受
光部7の測定状態は板端検出手段31に入力される。板
端検出手段31,32は、被測定物55の板端を検出す
るものであり、板端検出信号S2a,S2bは板幅演算
手段33に出力される。板幅演算手段33は、間隔測定
装置25の間隔信号S1を基に、両板端検出手段31,
32の板端検出信号S2a,S2bを加算することによ
り、被測定物55の板幅Wを演算し、板幅信号S3を出
力する。FIG. 5 is a block diagram showing the arithmetic unit 30. The interval between the detectors 1 and 5 is measured by an interval measuring device 25 such as a linear scale, and the interval signal S is sent to the plate width calculating means 33.
1 is output. Further, the measurement state of the light receiving portion 3 of the detector 1 is input to the plate edge detecting means 31, and similarly, the measurement state of the light receiving portion 7 of the detector 5 is input to the plate edge detecting means 31. The plate edge detection means 31 and 32 detect the plate edge of the object 55 to be measured, and the plate edge detection signals S2a and S2b are output to the plate width calculation means 33. The plate width calculating means 33, based on the interval signal S1 from the interval measuring device 25, detects both plate edge detecting means 31,
The plate width W of the DUT 55 is calculated by adding the plate edge detection signals S2a and S2b of 32, and the plate width signal S3 is output.
【0017】上記構成の動作を説明すると、これら検出
器1,5は、図2,3に示す如くそれぞれの測定ビーム
Bの略中央部分、すなわち、測定ビームBの走査中央部
分B0部分が被測定物55の幅方向端部に位置するよ
う、前記基体12a,12bをスライドさせ、粗位置決
めする。The operation of the above-described structure will be described. In these detectors 1 and 5, the substantially central portion of each measuring beam B, that is, the scanning central portion B0 of the measuring beam B is measured as shown in FIGS. The bases 12a and 12b are slid and roughly positioned so that they are positioned at the widthwise ends of the object 55.
【0018】この状態で被測定物55に対し検出器1,
5の投光部2,6から測定ビームBを出射すると、図
2,3の如く、所定幅L2の測定ビームBは、被測定物
55に投光される部分と、投光されない部分とが生じ
る。このため、受光部3,7では、被測定物55の板端
に相当する部分を走査する測定ビームBのみが受光さ
れ、板端検出手段31,32に出力される。In this state, the detector 1,
When the measurement beam B is emitted from the light projecting portions 2 and 6 of 5, the measurement beam B having a predetermined width L2 is divided into a portion projected on the DUT 55 and a portion not projected. Occurs. Therefore, in the light receiving portions 3 and 7, only the measurement beam B that scans the portion corresponding to the plate edge of the DUT 55 is received and output to the plate edge detecting means 31 and 32.
【0019】したがって、板端検出手段31,32で
は、受光部3,7から出力される測定状態を示す走査信
号がどの範囲まで出力されているかを検出する。例え
ば、測定状態が測定ビームBの内方側のB−部分から走
査中央部分B0まで検出された場合、板端はB0部分と
して検出する。また、測定ビームBの内方側のB−部分
から板端方向のB+側の所定部分まで検出された場合、
板端はB+部分として検出する。このように、板端検出
手段31,32は、走査される測定ビームBを基に被測
定物55の板端を検出する。Therefore, the plate edge detecting means 31 and 32 detect up to which range the scanning signal output from the light receiving portions 3 and 7 indicating the measurement state is output. For example, when the measurement state is detected from the B- portion on the inner side of the measurement beam B to the scanning center portion B0, the plate edge is detected as the B0 portion. In addition, in the case of detecting from the B− portion on the inner side of the measurement beam B to a predetermined portion on the B + side in the plate edge direction,
The plate edge is detected as the B + part. In this way, the plate edge detecting means 31, 32 detect the plate edge of the DUT 55 based on the measurement beam B to be scanned.
【0020】そして、板幅演算手段33は、間隔測定装
置25から検出される検出器1,5の間隔信号S1に、
板端検出手段31,32の板端検出信号S2a,S2b
を加算して、被測定物55の板幅Wを演算し、板幅信号
S3を出力する。具体的には、板端検出手段31,32
で板端がB0である場合、板幅信号S3は間隔信号S1
のみとなる。また、板端検出手段31,32で板端がB
0より外方(板幅が長い方向)にずれた場合には、間隔
信号S1に板端検出信号S2a,S2bが加算され、板
端検出手段31,32で板端がB0より内方(板幅が短
い方向)にずれた場合には、間隔信号S1に板端検出信
号S2a,S2bが減算される。Then, the plate width calculating means 33 outputs the interval signal S1 of the detectors 1 and 5 detected by the interval measuring device 25 to
Plate edge detection signals S2a, S2b of the plate edge detection means 31, 32
Is added to calculate the plate width W of the DUT 55, and the plate width signal S3 is output. Specifically, the plate edge detection means 31, 32
When the plate edge is B0, the plate width signal S3 is the interval signal S1.
Will only be. Further, the plate edge is detected by the plate edge detecting means 31 and 32.
When it is displaced outward from 0 (the direction in which the plate width is long), the plate edge detection signals S2a and S2b are added to the interval signal S1, and the plate edge detection means 31 and 32 move the plate edge inward from B0 (plate When the width is deviated, the plate edge detection signals S2a and S2b are subtracted from the interval signal S1.
【0021】また、被測定物55が搬送されることによ
り、板幅が変化したときには、板端検出信号S2a,S
2bが変化し、これに応じて板幅信号S3が変化する。
尚、一方の板端のみが変化した場合には、対応するいず
れかの板端検出信号S2a,S2bのみが変化する。When the plate width changes due to the object to be measured 55 being conveyed, the plate edge detection signals S2a, S2 are detected.
2b changes, and the plate width signal S3 changes accordingly.
When only one plate edge changes, only one of the corresponding plate edge detection signals S2a and S2b changes.
【0022】このように、被測定物55の板幅は、検出
器1,5の間隔を示す間隔信号が粗い状態で検出され、
この検出器1,5で検出される板端範囲の増減を加算す
るのみで、高精度に板幅Wを検出することができる。As described above, the plate width of the DUT 55 is detected in a state where the interval signal indicating the interval between the detectors 1 and 5 is coarse,
The plate width W can be detected with high accuracy only by adding the increase or decrease of the plate edge range detected by the detectors 1 and 5.
【0023】また、被測定物55に対し所定幅L2の測
定ビームBを出射し、反射した光の範囲により板端を検
出する構成であるため、被測定物55がガラス等の透明
体である場合においても、反射光量に増減に関わらず常
に高精度に板端を検出でき、板幅を得ることができる。Further, since the measurement beam B having a predetermined width L2 is emitted to the object to be measured 55 and the plate edge is detected by the range of the reflected light, the object to be measured 55 is a transparent body such as glass. Even in such a case, the plate edge can always be detected with high accuracy and the plate width can be obtained regardless of the amount of reflected light.
【0024】尚、上記第2実施例では、被測定物55の
両端に検出器1,5を設けた構成として説明したが、被
測定物55の一方の端部が位置決めされた状態で固定、
あるいは搬送される構成とすることもでき、この場合、
他方の端部にのみ検出器1を配置するのみで同様に板幅
を検出することができる。また、第2実施例では、被測
定物55の両端の検出器1,5の間隔を間隔測定装置2
5で測定する構成としたが、この間隔測定装置に代り、
検出器1,5の間隔に相当する間隔信号S1が予め図示
しない記憶部等に記憶され、板幅演算手段33に入力さ
れる構成とすることもでき、この場合においても上記実
施例同様の作用効果を得ることができる。同様に、検出
器1,5の間隔が固定の場合にも間隔測定装置25を不
要にできる。In the second embodiment, the detectors 1 and 5 are provided at both ends of the object to be measured 55, but the object 55 to be measured is fixed with one end positioned.
Alternatively, it may be configured to be transported. In this case,
The plate width can be similarly detected by disposing the detector 1 only at the other end. In addition, in the second embodiment, the distance between the detectors 1 and 5 at both ends of the DUT 55 is set to the distance measuring device 2
Although it was configured to measure in 5, instead of this interval measuring device,
The interval signal S1 corresponding to the interval between the detectors 1 and 5 may be stored in advance in a storage unit (not shown) or the like and input to the plate width calculating means 33. In this case as well, the same operation as in the above embodiment is performed. The effect can be obtained. Similarly, when the distance between the detectors 1 and 5 is fixed, the distance measuring device 25 can be omitted.
【0025】[0025]
【発明の効果】本発明によれば、投光部と受光部が被測
定物の一方の面の端部に設けられた構成であるため、被
測定物の幅の検出が行える。これにより、被測定物の板
幅の長さにかかわらず板の幅方向の存在位置と端部位置
を検出でき、被測定物の板幅を容易かつ、高精度に得る
ことができる。また、投光部からは所定幅の測定ビーム
が斜めに出射され、被測定物により反射された測定ビー
ムの幅により被測定物の板幅を検出する構成であるた
め、被測定物が透明体であっても容易に板幅を得ること
ができる。According to the present invention, since the light projecting portion and the light receiving portion are provided at the end portions of one surface of the measured object, the width of the measured object can be detected. Accordingly, the existing position and the end position of the plate in the width direction can be detected regardless of the length of the plate width of the object to be measured, and the plate width of the object to be measured can be easily and highly accurately obtained. In addition, since the measurement beam having a predetermined width is obliquely emitted from the light projecting unit and the plate width of the measurement target is detected by the width of the measurement beam reflected by the measurement target, the measurement target is a transparent object. Even in this case, the plate width can be easily obtained.
【図1】本発明の非接触板幅測定装置の第1実施例を示
す斜視図。FIG. 1 is a perspective view showing a first embodiment of a non-contact plate width measuring device of the present invention.
【図2】本発明の非接触板幅測定装置の第2実施例を示
す斜視図。FIG. 2 is a perspective view showing a second embodiment of the non-contact plate width measuring device of the present invention.
【図3】同装置の正面図。FIG. 3 is a front view of the device.
【図4】同装置の側面図。FIG. 4 is a side view of the device.
【図5】同装置の演算部を示すブロック図。FIG. 5 is a block diagram showing a calculation unit of the apparatus.
【図6】従来の外径測定装置を示す斜視図。FIG. 6 is a perspective view showing a conventional outer diameter measuring device.
1,5…検出器、2,6…投光部、3,7…受光部、2
5…間隔測定装置、30…演算部、31,32…板端検
出手段、33…板幅演算手段、55…被測定物、B…測
定ビーム。1, 5 ... Detector, 2, 6 ... Light emitting part, 3, 7 ... Light receiving part, 2
5 ... Interval measuring device, 30 ... Calculation part, 31, 32 ... Plate edge detecting means, 33 ... Plate width calculating means, 55 ... Object to be measured, B ... Measuring beam.
Claims (1)
の板幅を非接触で光学的に測定する板幅測定装置であっ
て、 該被測定物の一方の面の端部に配置され、被測定物に対
し所定角度(α1)、及び被測定物の幅方向に所定幅
(L1)を有して測定ビーム(B)を出射する投光部
(2)と、 前記被測定物の一方の面でかつ該投光部と同一面に設け
られ、該投光部から出射された測定ビームのうち被測定
物により反射された測定ビームを受光する受光部(3)
と、 該受光部による測定ビームの受光状態により被測定物の
板端を検出し、被測定物の板幅を演算する演算部(3
0)とを具備する非接触板幅測定装置。1. A device under test (55) having a predetermined width (W).
Is a non-contact optical plate width measuring device, which is arranged at an end of one surface of the object to be measured and has a predetermined angle (α1) with respect to the object to be measured, and the object to be measured. A light projecting portion (2) having a predetermined width (L1) in the width direction and emitting a measurement beam (B); and provided on one surface of the DUT and on the same surface as the light projecting portion. A light receiving section (3) for receiving the measurement beam reflected by the object to be measured among the measurement beams emitted from the light projecting section.
And a calculation unit (3) that detects the plate edge of the object to be measured based on the light receiving state of the measurement beam by the light receiving unit and calculates the plate width of the object to be measured.
0) and a non-contact plate width measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9450693A JPH06307816A (en) | 1993-04-21 | 1993-04-21 | Non-contact plate width measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9450693A JPH06307816A (en) | 1993-04-21 | 1993-04-21 | Non-contact plate width measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06307816A true JPH06307816A (en) | 1994-11-04 |
Family
ID=14112209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9450693A Pending JPH06307816A (en) | 1993-04-21 | 1993-04-21 | Non-contact plate width measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06307816A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001020253A1 (en) * | 1999-09-12 | 2001-03-22 | Alphatech Co., Ltd. | Method and apparatus for searching for object with speckle pattern light |
| JP2009294182A (en) * | 2008-06-09 | 2009-12-17 | Yokohama Rubber Co Ltd:The | Method and device for measuring width direction end position of belt-like member |
| JP2013015361A (en) * | 2011-07-01 | 2013-01-24 | Toshiba Mitsubishi-Electric Industrial System Corp | Width measuring apparatus |
| JP2014052203A (en) * | 2012-09-05 | 2014-03-20 | Toshiba Mitsubishi-Electric Industrial System Corp | Planar shape measurement instrument |
-
1993
- 1993-04-21 JP JP9450693A patent/JPH06307816A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001020253A1 (en) * | 1999-09-12 | 2001-03-22 | Alphatech Co., Ltd. | Method and apparatus for searching for object with speckle pattern light |
| JP2009294182A (en) * | 2008-06-09 | 2009-12-17 | Yokohama Rubber Co Ltd:The | Method and device for measuring width direction end position of belt-like member |
| JP2013015361A (en) * | 2011-07-01 | 2013-01-24 | Toshiba Mitsubishi-Electric Industrial System Corp | Width measuring apparatus |
| JP2014052203A (en) * | 2012-09-05 | 2014-03-20 | Toshiba Mitsubishi-Electric Industrial System Corp | Planar shape measurement instrument |
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