JPH0685490B2 - Method for manufacturing piezoelectric ceramic resonator - Google Patents
Method for manufacturing piezoelectric ceramic resonatorInfo
- Publication number
- JPH0685490B2 JPH0685490B2 JP20412686A JP20412686A JPH0685490B2 JP H0685490 B2 JPH0685490 B2 JP H0685490B2 JP 20412686 A JP20412686 A JP 20412686A JP 20412686 A JP20412686 A JP 20412686A JP H0685490 B2 JPH0685490 B2 JP H0685490B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- vibration
- ceramic resonator
- thickness
- resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title claims description 23
- 238000000034 method Methods 0.000 title claims description 10
- 238000004519 manufacturing process Methods 0.000 title description 6
- 238000001125 extrusion Methods 0.000 claims description 6
- 238000003892 spreading Methods 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical group O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 239000004200 microcrystalline wax Substances 0.000 description 1
- 235000019808 microcrystalline wax Nutrition 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- ZBSCCQXBYNSKPV-UHFFFAOYSA-N oxolead;oxomagnesium;2,4,5-trioxa-1$l^{5},3$l^{5}-diniobabicyclo[1.1.1]pentane 1,3-dioxide Chemical compound [Mg]=O.[Pb]=O.[Pb]=O.[Pb]=O.O1[Nb]2(=O)O[Nb]1(=O)O2 ZBSCCQXBYNSKPV-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は通信機器,映像機器,音響機器等の各種電子機
器に用いられるフィルタや発振子として機能する圧電セ
ラミック共振子の製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a piezoelectric ceramic resonator that functions as a filter or an oscillator used in various electronic equipment such as communication equipment, video equipment, and audio equipment.
従来の技術 圧電セラミック共振子は利用する周波数帯によって様々
な振動形態が利用されている。すなわち、LF帯からMF帯
にかけては長さ方向振動や広がり振動が用いられ、HF帯
からVHF帯にかけては厚みたて振動、厚みすべり振動,
弾性表面波振動等が用いられている。そして、材料によ
って周波数定数が一定なので、共振子の寸法によって共
振周波数が決まる。また、利用する振動以外の振動を必
要な程度まで減少させて使う必要がある。2. Description of the Related Art Piezoelectric ceramic resonators have various vibration modes depending on the frequency band used. That is, lengthwise vibration and spreading vibration are used from the LF band to the MF band, and thickness vertical vibration, thickness shear vibration, and thickness shear vibration from the HF band to the VHF band.
Surface acoustic wave vibration or the like is used. Since the frequency constant is constant depending on the material, the resonance frequency is determined by the size of the resonator. In addition, it is necessary to reduce the vibration other than the vibration to be used to the required degree.
長さ方向振動や広がり振動を用いた従来の圧電セラミッ
ク共振子の構成を第4図に示す。第4図において、1は
圧電セラミック、2,3は対向電極である。このような圧
電セラミック共振子は、板状の焼結体を得、両面に対向
電極を付与し、分極してから個々の圧電セラミック共振
子に分割して製造される。また、板状の焼結体を得る方
法としては、次の3つの方法のいずれかで行われてい
る。すなわち、ブロック状の焼結体を作り、これを板
状にスライスする。シート成形により板状の成形体を
得、これを焼成する。押出成形により板状の成形体を
得、これを焼成するといった方法である。このような長
さ方向振動や広がり振動を用いた圧電セラミック共振子
は、不要な厚みたて振動を減少させるため、第4図に示
す形状から研磨剤や研磨紙等を用いて周辺部の面取りが
行われていた。FIG. 4 shows the configuration of a conventional piezoelectric ceramic resonator using longitudinal vibration and spreading vibration. In FIG. 4, 1 is a piezoelectric ceramic, and 2 and 3 are counter electrodes. Such a piezoelectric ceramic resonator is manufactured by obtaining a plate-shaped sintered body, providing opposite electrodes on both surfaces thereof, and polarizing and then dividing the piezoelectric ceramic resonator into individual piezoelectric ceramic resonators. Moreover, as a method for obtaining a plate-shaped sintered body, any one of the following three methods is performed. That is, a block-shaped sintered body is prepared and sliced into a plate shape. A plate-shaped molded body is obtained by sheet molding and is fired. It is a method in which a plate-shaped molded body is obtained by extrusion molding and is fired. A piezoelectric ceramic resonator using such longitudinal vibration or spreading vibration reduces unnecessary vertical vibration, so that the peripheral portion of the piezoelectric ceramic resonator is chamfered from the shape shown in FIG. 4 by using an abrasive or polishing paper. Was being done.
発明が解決しようとする問題点 このような従来の製造方法では、面取りという工程が増
え、しかも効率良く面取りを行うためには比較的粗い研
磨剤または研磨紙を使うため、角が欠け易く、使用する
長さ方向振動または広がり振動のところに不要なスプリ
アスが発生し易い。また、面取りが一様に行われにく
く、素子間にバラツキが発生するという欠点を有してい
た。Problems to be Solved by the Invention In such a conventional manufacturing method, the number of steps of chamfering is increased, and a relatively coarse abrasive or polishing paper is used for efficient chamfering. Unnecessary spurious is likely to occur at the longitudinal vibration or the spreading vibration. Further, there is a drawback that chamfering is difficult to be performed uniformly, and variations occur between elements.
本発明はこのような問題点を解決するもので、量産性に
優れ不要な厚みたて振動を減少させることができる圧電
セラミック共振子の製造方法を提供することを目的とす
るものである。The present invention solves such a problem, and an object of the present invention is to provide a method of manufacturing a piezoelectric ceramic resonator which is excellent in mass productivity and can reduce unnecessary thickness vibration.
問題点を解決するための手段 本発明は上記問題点を解決するために、押出成形により
溝を有する板状成形体を作り、これを分割することによ
り、個々の圧電セラミック共振子の一端または両端部に
厚みの傾斜をつけてなるものである。Means for Solving the Problems In order to solve the above problems, the present invention creates a plate-shaped molded body having a groove by extrusion molding and divides the molded body to divide one end or both ends of each piezoelectric ceramic resonator. The part has a thickness gradient.
作用 この方法により、圧電セラミック共振子の一端または両
端に厚みの傾斜をつけることにより、厚みたて振動の振
動する寸法が一定でなくなり、不要な厚みたて振動を減
少させることができる。しかも、連続した成形体のとき
に圧電セラミック共振子の厚みに傾斜をつけるため、量
産性に優れ、焼結体で面取りするときのように端面を粗
すこともなく、均一性にも優れている。By this method, by grading the thickness at one end or both ends of the piezoelectric ceramic resonator, the vibration dimension of the vertical vibration is not constant, and unnecessary vertical vibration can be reduced. Moreover, since the thickness of the piezoelectric ceramic resonator is inclined in the case of a continuous molded body, it is excellent in mass productivity, and does not have to be roughened on the end face unlike chamfering with a sintered body, and has excellent uniformity. There is.
実施例 以下、本発明の一実施例について図面を参照しながら説
明する。Embodiment An embodiment of the present invention will be described below with reference to the drawings.
まず、チタン酸鉛,ジルコン酸鉛,マグネシウムニオブ
酸鉛の三成分系に二酸化マンガンを添加した組成の圧電
セラミック原料100重量部に対して、メチルセルロース
4重量部,プロピレングリコール5重量部,マイクロク
リスタリンワックス1重量部,水15重量部を加え、通常
の方法で混合混練して押出成形用原料とし、第2図に示
すような断面形状の出口を持った押出成形機4で、第3
図に示すように溝5を有する厚さ0.6mmで幅120mmの板状
成形体6を押出成形した。次に、この連続した板状成形
体6を乾燥ゾーンで乾燥させ、約50mmに切断し焼成し
た。次いで、焼成後、板状焼結体の両面に銀ペーストを
スクリーン印刷し、焼付けた。First, 4 parts by weight of methyl cellulose, 5 parts by weight of propylene glycol, and microcrystalline wax based on 100 parts by weight of a piezoelectric ceramic raw material having a composition of manganese dioxide added to a ternary system of lead titanate, lead zirconate, and lead magnesium niobate. 1 part by weight and 15 parts by weight of water were added, and the mixture was kneaded and kneaded by a usual method to obtain a raw material for extrusion molding. The extrusion molding machine 4 having an outlet having a sectional shape as shown in FIG.
As shown in the figure, a plate-shaped compact 6 having a groove 5 and a thickness of 0.6 mm and a width of 120 mm was extruded. Next, this continuous plate-shaped molded body 6 was dried in a drying zone, cut into about 50 mm and baked. Next, after firing, silver paste was screen-printed on both sides of the plate-shaped sintered body and baked.
次に、これを分極し、第1図に示す形状の個々の圧電セ
ラミック共振子に切断した。このようにして押出成形時
の溝5により、切断後の個々の圧電セラミック共振子7
の両端部に厚みの傾斜8を形成した。これにより厚み一
様でなくなり、広がり振動の共振子において、不要な厚
みたて振動を減少させることができた。また、従来のよ
うに焼結体で面取りした場合に比べ、広がり振動のとこ
ろに不要なスプリアスが発生し難い。なお、第1図で9,
10は対向電極である。Next, this was polarized and cut into individual piezoelectric ceramic resonators having the shape shown in FIG. In this way, the individual piezoelectric ceramic resonators 7 after cutting are formed by the grooves 5 during extrusion molding.
A thickness gradient 8 was formed at both ends of the. As a result, the thickness of the resonator is not uniform, and unnecessary vertical vibration can be reduced in the resonator of spreading vibration. In addition, as compared with the conventional chamfering with a sintered body, unnecessary spurious is less likely to occur at the spreading vibration. In addition, in FIG.
10 is a counter electrode.
本実施例では、厚み方向の片側だけに厚みの傾斜をつけ
たが、これは両側につけても良い。また、両端部に厚み
の傾斜をつけたが、一端だけでも同様な効果が得られ
る。さらに、焼成,電極付け,分極後に個々に切断して
分割したが、成形体のときに個々に分割してから、焼
成,電極付け、分極しても良い。In this embodiment, the thickness is inclined only on one side in the thickness direction, but it may be attached on both sides. Further, although the thickness is inclined at both ends, the same effect can be obtained by only one end. Furthermore, after firing, electrode attachment, and polarization, they were individually cut and divided. However, they may be divided individually when forming a molded body, and then fired, attached with electrodes, and polarized.
発明の効果 以上のように本発明の方法によれば、量産に適した方法
で不要な厚みたて振動を減少させた長さ方向振動や広が
り振動を用いた圧電セラミック共振子を製造することが
でき、実用的に極めて有用である。EFFECTS OF THE INVENTION As described above, according to the method of the present invention, it is possible to manufacture a piezoelectric ceramic resonator using longitudinal vibration or spread vibration in which unnecessary thickness vertical vibration is reduced by a method suitable for mass production. It is possible and practically extremely useful.
第1図〜第3図は本発明の一実施例を説明する図で、第
1図は切断された圧電セラミック共振子を示す図、第2
図は押出成形機の出口の断面形状を示す図、第3図は溝
を有する板状成形体を示す図、第4図は従来の圧電セラ
ミック共振子を示す図である。 5……溝、6……板状成形体、7……圧電セラミック共
振子、8……厚みの傾斜。1 to 3 are views for explaining an embodiment of the present invention, FIG. 1 is a view showing a cut piezoelectric ceramic resonator, and FIG.
FIG. 3 is a diagram showing a cross-sectional shape of the outlet of the extruder, FIG. 3 is a diagram showing a plate-shaped molded product having grooves, and FIG. 4 is a diagram showing a conventional piezoelectric ceramic resonator. 5 ... Groove, 6 ... Plate-shaped body, 7 ... Piezoelectric ceramic resonator, 8 ... Inclination of thickness.
Claims (1)
り、これを分割することにより、個々の圧電セラミック
共振子の一端または両端部に厚みの傾斜をつけてなる圧
電セラミック共振子の製造方法。1. A piezoelectric ceramic resonator in which a plate-shaped molded body having a groove is formed by extrusion molding, and the piezoelectric molded body is divided into individual piezoelectric ceramic resonators having one or both ends inclined in thickness. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20412686A JPH0685490B2 (en) | 1986-08-29 | 1986-08-29 | Method for manufacturing piezoelectric ceramic resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20412686A JPH0685490B2 (en) | 1986-08-29 | 1986-08-29 | Method for manufacturing piezoelectric ceramic resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6360616A JPS6360616A (en) | 1988-03-16 |
| JPH0685490B2 true JPH0685490B2 (en) | 1994-10-26 |
Family
ID=16485255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20412686A Expired - Lifetime JPH0685490B2 (en) | 1986-08-29 | 1986-08-29 | Method for manufacturing piezoelectric ceramic resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0685490B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0211008A (en) * | 1988-06-29 | 1990-01-16 | Matsushita Electric Ind Co Ltd | Piezoelectric resonator |
-
1986
- 1986-08-29 JP JP20412686A patent/JPH0685490B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6360616A (en) | 1988-03-16 |
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