JPH07120612A - Liquid crystal display color filters - Google Patents

Abstract

(57) [Summary] [Purpose] A liquid crystal display in which cracks and peeling are unlikely to occur in the liquid crystal driving transparent electrode in the manufacturing process, and cracks and peeling are less likely to occur with time even after the manufacturing. Provide a color filter for. A color filter for a liquid crystal display of the present invention comprises an electrically insulating transparent substrate, a plurality of kinds of colored layers arranged in a predetermined pattern on the electrically insulating transparent substrate, and a plurality of colored layers on the colored layer. At least a liquid crystal driving transparent electrode provided between the electrically insulating transparent substrate and the plurality of kinds of colored layers, and the liquid crystal driving transparent electrode contains a zinc element and an indium element as main cation elements. It is characterized by comprising an amorphous oxide contained.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a color filter for a liquid crystal display.

[0002]

2. Description of the Related Art In a color liquid crystal display, color display is performed by utilizing the optical properties of liquid crystal, optical components, or an external light source, and a color filter is used as one of the optical components for performing color display. Has been done. This color filter, an electrically insulating transparent substrate also used as a substrate for forming a liquid crystal panel, a plurality of types of colored layers arranged in a predetermined pattern on the electrically insulating transparent substrate,
At least a liquid crystal driving transparent electrode provided on these colored layers or between the electrically insulating transparent substrate and the plurality of types of colored layers is provided.

The colored layer is a layer that selectively transmits light in a specific wavelength range of light emitted from a light source, and has a spectral transmittance characteristic depending on whether multicolor display or full color display is performed. Different types of colored layers are used. For example, in the case of performing full-color display by additive color mixing, a colored layer having high spectral transmittance in the red wavelength region, a colored layer having high spectral transmittance in the green wavelength region, and a colored layer having high spectral transmittance in the blue wavelength region are included. Three types are commonly used.

There are stripe type, mosaic type, triangle type, four-pixel arrangement type and the like in the arrangement pattern of these plural kinds of colored layers, which are appropriately used according to the operation mode and performance of the color liquid crystal display. In addition, between one colored layer and another colored layer, or on a transparent protective layer described later, or the like, metal chromium, a colored photoresist, or the like is used to prevent a reduction in contrast and color purity due to leaked light. A light-shielding layer is often provided. The light-shielding layer is provided so that the light-shielding layer is located between pixels when a color liquid crystal display equipped with a color filter is viewed in a plan view, and the entire shape thereof is generally matrix-like or stripe-like.

On the other hand, the liquid crystal driving transparent electrode may be provided between the electrically insulating transparent substrate and the colored layer described above, but the rise of the threshold voltage and the decrease of the steep rise of the liquid crystal display element are reduced. In order to prevent such problems, it is often provided directly on the above-mentioned colored layer or via a transparent protective layer. The shape of this transparent electrode for driving liquid crystal varies depending on the operation mode and performance of the color liquid crystal display,
It is formed into a plurality of stripes or a film. The transparent protective layer is provided for the purpose of improving the flatness and smoothness of the transparent electrode and protecting the colored layer. As the transparent electrode for driving the liquid crystal, an ITO film has been frequently used. This is because the ITO film has high transparency and conductivity, and also has good etching properties.

[0006]

However, the ITO is
The membrane has relatively low thermal stability and resistance to moist heat. Therefore, a color filter for a liquid crystal display using an ITO film as a transparent electrode for driving a liquid crystal, particularly a color filter for a liquid crystal display of a type in which an ITO film as a transparent electrode for driving a liquid crystal is provided on a colored layer, is not manufactured. However, there is a problem that cracks and peeling are likely to occur in the liquid crystal driving transparent electrode, and that cracks and peeling are likely to occur in the liquid crystal driving transparent electrode with time even after manufacturing.

An object of the present invention is to provide a liquid crystal display in which a transparent electrode for driving a liquid crystal is less likely to be cracked or peeled off during the manufacturing process and which is less likely to be cracked or peeled off with time even after the manufacturing. To provide a color filter for use.

[0008]

A color filter for a liquid crystal display according to the present invention that achieves the above-mentioned object comprises an electrically insulating transparent substrate and a plurality of types arranged on the electrically insulating transparent substrate in a predetermined pattern. A colored layer and at least a liquid crystal driving transparent electrode provided on these colored layers or between the electrically insulating transparent substrate and the plurality of types of colored layers, and the liquid crystal driving transparent electrode is It is characterized by comprising an amorphous oxide containing zinc element and indium element as main cation elements.

The present invention will be described in detail below. The color filter for a liquid crystal display of the present invention, as described above, an electrically insulating transparent substrate, a plurality of types of colored layers arranged in a predetermined pattern on the electrically insulating transparent substrate, and these colored layers At least a liquid crystal driving transparent electrode provided on or between the electrically insulating transparent substrate and the plurality of types of colored layers is provided.

Such a filter structure itself is similar to the conventional one, and as the electrically insulating transparent substrate, use is made of substrates of various materials which have been conventionally used as substrates of color filters for liquid crystal displays. You can
Specific examples of the electrically insulating transparent substrate, blue plate glass, white plate glass, non-alkali glass, quartz glass, various electrically insulating transparent glass such as borosilicate glass, polycarbonate, polyether sulfone, polyethylene terephthalate, polyarylate, Various electrically insulating polymers such as amorphous polyolefin, allyl diglycol carbonate, acrylic resin, epoxy resin, polyether, or the above electrically insulating transparent glass coated with the above electrically insulating transparent polymer, etc. Can be mentioned.
The electrically insulating transparent substrate does not necessarily have to be plate-shaped as in the conventional case, and may be sheet-shaped or film-shaped.

As the coloring layer, as in the conventional case, depending on whether the target color filter is for multi-color display or full-color display, and how the target color filter is. A plurality of types of colored layers having different spectral transmittance characteristics are appropriately combined and used depending on whether or not they are used in a liquid crystal display equipped with various kinds of backlights. The material of each of these plural types of colored layers is appropriately selected according to the spectral transmittance characteristics of the desired colored layer, and also depending on the method of forming the colored layer and the like.

The method for forming the colored layer is not particularly limited, and may be a dyeing method, a printing method, a dispersion method, an electrodeposition method, a micelle electrolysis method, etc. depending on the accuracy required for the intended color filter. It is appropriately selected from various methods that have been conventionally used. When the colored layer is formed by the dyeing method, examples of the material include gelatin, casein, polyvinyl alcohol, polyacrylamide, etc. to which a photosensitizer is added and an acid dye or a reactive dye, and the colored layer is formed by the printing method. In the case of forming, for example, a prepolymer to which a pigment and a dispersion aid are added, or an ink is used. When the colored layer is formed by the dispersion method, for example, a color resin liquid in which a coloring material such as a dye, an organic pigment, or an inorganic pigment is dispersed in a transparent photosensitive resin or a transparent resin is used, and the electrodeposition method is used. When the colored layer is formed, for example, an electrodeposition liquid obtained by dispersing a coloring material such as a pigment and a polymer in a desired solvent is used. When the colored layer is formed by the micelle electrolysis method, for example, an aqueous medium having a desired electric conductivity in which a micelle forming agent and a hydrophobic dye are dispersed is used.

When the colored layer is formed by the electrodeposition method or the micelle electrolysis method, a transparent electrode for performing electrodeposition or electrolysis is required. In these methods, the colored layer is formed on the surface of the transparent electrode. To be done. In these cases,
The transparent electrode used for forming the colored layer may be used as it is as the liquid crystal driving electrode, or a liquid crystal driving electrode may be separately provided on the colored layer as described later. When the transparent electrode used for forming the colored layer is used as it is as a liquid crystal driving electrode, a predetermined amorphous oxide described later is used as an electrode material.

The arrangement pattern of the colored layer is not particularly limited, and as in the conventional case, depending on the operation mode or performance of the liquid crystal display in which the target color filter is used, the stripe type, It is appropriately arranged in a mosaic type, a triangle type, a four-pixel arrangement type, or the like.

In the color filter for a liquid crystal display of the present invention, a liquid crystal driving transparent electrode is provided on the plurality of types of colored layers described above or between the electrically insulating transparent substrate and the plurality of types of colored layers. The transparent electrode for driving a liquid crystal is made of an amorphous oxide containing zinc element and indium element as main cation elements.

The atomic ratio Zn / (Zn + In) of zinc element and indium element in this amorphous oxide is preferably 0.2 or more and less than 0.9. The atomic ratio is 0.
Those less than 2 are likely to be crystalline, and cracks and wrinkles are likely to occur along with crystallization. In addition, those having an atomic ratio of 0.9 or more are likely to be crystalline, and cracks and wrinkles are likely to occur due to crystallization. Further, when the atomic ratio is 0.9 or more, the conductivity decreases.

The amorphous oxide may contain, as a cation element other than the zinc element and the indium element, one or more third elements having a valence of positive trivalence or more.
The type of the third element is not particularly limited as long as it has a valence of positive trivalence or more, and examples thereof include tin, aluminum, antimony, gallium, and germanium. By including the third element, the conductivity of the amorphous oxide can be improved. However, when the total content of the third element in the total amount of all the cation elements exceeds 20 at%, the ionic content of the ions increases. The conductivity is likely to decrease due to scattering. Therefore, the ratio of the total amount of the third element is preferably 20 at% or less with respect to the total amount of all the cation elements.

The liquid crystal driving transparent electrode made of the above-mentioned amorphous oxide is formed on the plurality of kinds of colored layers described above or between the electrically insulating transparent substrate and the plurality of kinds of colored layers as in the conventional case. However, in order to prevent an increase in the threshold voltage of the liquid crystal display element and a decrease in the steepness of rising, etc.,
It is preferably provided on the plurality of types of colored layers described above.
In this case, it may be directly provided on the colored layer, but it is preferably provided via a transparent protective layer in order to improve the flatness and smoothness of the transparent electrode or to protect the colored layer. This transparent protective layer can be formed of an acrylic transparent resin, a polyimide transparent resin, or the like, as in the conventional case.

The film thickness of the liquid crystal driving transparent electrode made of the above amorphous oxide is preferably 30 Å to 1 μm. If it is less than 30 Å, it is difficult to obtain sufficient conductivity, and if it exceeds 1 μm, the light transmittance tends to decrease. A more preferable value of the film thickness is 500
~ 5000 Angstroms, 800-4000
Angstroms are particularly preferred. Further, the shape of the transparent electrode for driving the liquid crystal is appropriately selected according to the operation mode of the liquid crystal display in which the intended color filter is used, as in the conventional case. For example, in a color filter used for a simple matrix type liquid crystal display or a diode type active matrix type liquid crystal display, the liquid crystal driving transparent electrodes are provided in a plurality of stripes. Further, in a color filter used in a thin film transistor type active matrix liquid crystal display, a liquid crystal driving transparent electrode is provided in a single film shape common to all pixels. The stripe-shaped transparent electrode is generally produced by patterning a transparent conductive film having a desired size by an etching method.

The transparent electrode for driving a liquid crystal, which is made of the amorphous oxide, or the transparent conductive film, which is the base thereof, can be formed by various methods. However, in order to obtain a film with high homogeneity and excellent adhesion while preventing the occurrence of cracks and peeling, In ₂ O
₃ (ZnO) _m (m = 2 to 20, preferably m = 2 to
8 and more preferably m = 2 to 6), and particularly preferably formed by a sputtering method using a sintered body containing a hexagonal layered compound as a target.

The target may consist essentially of the above-mentioned hexagonal layered compound, or may contain indium oxide or zinc oxide in addition to this hexagonal layered compound. Is preferably as high as possible, and 98% or more is desired. Further, this target may be doped with one or more kinds of elements having a valence of positive trivalence or more or a compound thereof, and when such a target is used, a transparent electrode or a transparent conductive material having higher conductivity is used. A membrane can be obtained. However, if the ratio of the doping element (the above-mentioned third element) in the finally obtained transparent electrode or transparent conductive film exceeds 20 at% with respect to the total amount of all cation elements, the conductivity will rather deteriorate due to ion scattering. The amount of dope is
The ratio of the doping element in the finally obtained transparent electrode or transparent conductive film is 20 at with respect to the total amount of all cation elements.
Adjust so that it does not exceed%. Specific examples of the doping element include Sn, Al, Sb, Ga, and Ge.

The target described above can be obtained, for example, as follows. First, indium oxide or a compound that becomes indium oxide by baking (eg, indium chloride, indium nitrate, indium acetate, indium hydroxide, indium alkoxide), and zinc oxide or a compound that becomes zinc oxide by baking (eg, zinc chloride, zinc nitrate, Zinc acetate, zinc hydroxide, zinc alkoxide). At this time, a simple substance (excluding gas) made of an element (excluding indium) having a valence of at least positive trivalence, a salt of the above element, or the like may be added, if necessary. next,
The obtained mixture is calcined at 500 to 1200 ° C. Then, the obtained calcined product is pulverized by a ball mill, a roll mill, a pearl mill, a jet mill or the like to have a particle diameter of 0.01 to
A powder having a uniform particle size within a range of 1.0 μm is obtained. In addition, you may perform a reduction process at 100-800 degreeC before grinding. If necessary, the calcination and pulverization of the powder may be repeated a desired number of times. Then, the obtained powder is pressure-molded into a desired shape, and the molded product is sintered at 800 to 1700 ° C. At this time, polyvinyl alcohol, methyl cellulose, polywax, oleic acid or the like may be used as a sintering aid, if necessary. By obtaining the sintered body in this manner, a target of interest can be obtained.

Sputtering using this target can be carried out by RF sputtering, DC sputtering or the like, but from the viewpoint of productivity and film characteristics of the obtained film, the DC sputtering method is generally preferred industrially. The following is an example of the sputtering conditions for DC sputtering. That is, the sputtering atmosphere is an inert gas such as argon gas, or a mixed gas of an inert gas and oxygen gas, the atmospheric pressure during sputtering is about 5 × 10 ⁻² to 1 × 10 ⁻⁴ Torr, and the target applied voltage is It is set to 200 to 500V. When the degree of vacuum during sputtering is less than 5 × 10 ^-2 Torr, plasma stability is poor and 1
When it exceeds × 10 ^-4 Torr, it becomes difficult to increase the voltage applied to the target. The target applied voltage is 2
If the voltage is less than 00V, the film formation speed is slow and the productivity is low, and the voltage is 500V.
If it exceeds, it becomes difficult to obtain a good quality film. The substrate temperature varies depending on whether the amorphous oxide film is directly provided on the electrically insulating transparent substrate, the colored layer, the transparent protective layer, or the like. The member serving as the base material of the crystalline oxide film is appropriately set so as not to be deformed, altered, decomposed, or the like. When an amorphous oxide film is provided on the transparent protective layer, the substrate temperature should be room temperature to 3
The temperature is preferably 00 ° C. If it exceeds 300 ° C, discoloration of the colored layer and thermal decomposition of the transparent protective layer are likely to occur. Also,
Manufacturing costs increase as the substrate temperature increases.

The amorphous oxide film thus obtained has conductivity and light transmittance equal to or higher than that of the ITO film, and has higher thermal stability and resistance to moist heat. ing. Further, in the color filter for a liquid crystal display of the present invention including the transparent electrode for driving a liquid crystal, which comprises the amorphous oxide film or the amorphous oxide film patterned into a predetermined shape, the liquid crystal driving is performed in the manufacturing process. It is difficult for cracks and peeling to occur on the transparent electrode for use. further,
Since the amorphous oxide film has higher thermal stability and resistance to moist heat as compared with the ITO film as described above, the transparent electrode for driving the liquid crystal may be aged with time even after the color filter is manufactured. It is difficult for cracks and peeling to occur on the surface.

The color filter for a liquid crystal display of the present invention has a transparent protective layer between one colored layer and another colored layer in order to prevent deterioration of contrast and color purity due to leaked light, as in the conventional case. A light shielding layer made of metallic chromium, a colored photoresist, or the like may be provided on the layer or the like. The light-shielding layer is provided so that the light-shielding layer is located between pixels when a color liquid crystal display equipped with a color filter is viewed in a plan view, and the entire shape thereof is generally matrix-like or stripe-like.

Further, in the color liquid crystal panel using the color filter for liquid crystal display of the present invention, an electrically insulating transparent substrate (hereinafter referred to as a driving substrate) provided with a transparent electrode having a predetermined shape in addition to the color filter is prepared. Then, it is obtained by enclosing a desired liquid crystal between the color filter and the driving substrate which are arranged to face each other. At this time, the color filter and the driving substrate are arranged such that the electrically insulating substrates are located outside, and the spacers made of glass beads or polymer particles are dispersed between them in addition to the liquid crystal. Further, an alignment film is arranged on each inner surface of the color filter and the driving substrate when the liquid crystal panel is configured, if necessary.

The color filter for a liquid crystal display of the present invention can be used for any type of color liquid crystal display of a direct view type, a front projection type and a rear projection type as long as it is a color liquid crystal display using a color filter. Specific examples of color liquid crystal displays include color liquid crystal displays for computers, word processors, and device monitors, liquid crystal color projectors, liquid crystal color televisions, liquid crystal color overhead projectors, instrument panels installed in color cars, and color aurora vision (trade name). A large-screen color liquid crystal display such as is mentioned.

[0028]

EXAMPLES Examples of the present invention will be described below. Example 1 (1) Formation of colored layer Sheet resistance 20 on a glass substrate as an electrically insulating transparent substrate
Ω / □ ITO film deposited (manufactured by Geomatec,
A soda lime glass (silica dip product) whose surface was polished was prepared as a glass substrate, and a colored layer was formed by a micelle electrolysis method in the following procedures (a) to (d).

(A) Formation of Electrode ITO Electrode by Photolithography Method An ultraviolet curable resist agent (FH2213 manufactured by Fuji Hunt Electronics Technology Co., Ltd.) was formed on the ITO film.
0) is spin-coated at a rotation speed of 1000 rpm. After spin coating, prebaking is performed at 80 ° C. for 15 minutes. After that, the ITO-glass substrate on which the resist film is formed is set in the exposure device. The mask has a stripe vertical pattern of 1920 lines with a line width of 100 μm, a gap μm, a line length of 230 mm. A 2 kW high-pressure mercury lamp is used as the light source. A proximity gap of 70 μm is set, the resist film is exposed to 120 mJ / cm ² and then developed with a developer (FHD-5 manufactured by Fuji Hunt Electronics Technology Co., Ltd.) to pattern the resist film into a predetermined shape. After development, rinse with pure water, and post bake at 180 ° C. after rinsing. Next, 1 M Fe was used as an etching solution.
Cl ₃ / 6N HCl / 0.1N HNO ₃ / 0.1N
A Ce (NO ₃ ) ₄ aqueous solution is prepared, and the ITO film is etched by the etching solution for about 20 minutes using the resist film patterned into a predetermined shape as a mask. The end point of etching is measured by electric resistance. After etching, rinse with pure water. After rinsing, 1N
The resist film is removed with aOH. In this way, stripe-shaped ITO electrodes for electrolysis are formed on the glass substrate (hereinafter, the glass substrate provided with the ITO electrodes for electrolysis is referred to as an ITO patterning glass substrate).

(B) Formation of a light-shielding layer As a resist agent for forming a light-shielding layer, color mosaic CK and C, manufactured by Fuji Hunt Electronics Technology Co., Ltd.
A mixture of R, CG and CB in a ratio of 3: 1: 1: 1 (weight ratio) is used. The ITO patterned glass substrate manufactured in the above procedure (a) is rotated at 10 rpm, and 30 cc of the resist agent for forming the light shielding layer is sprayed thereon. Next, the rotation speed of spin coating is set to 500 rpm to form a uniform resist film on the substrate. After spin coating, prebaking is performed at 80 ° C. for 15 minutes. Then, using an aligner with an alignment function, while performing a predetermined alignment, a predetermined design (90 × 310 μm square −2
The resist film is exposed using a mask having a line width of 0 μm).
A 2 kW high-pressure mercury lamp is used as the light source. Proximity gap 70μm, resist film 100mJ
/ Cm ^{2 After} exposure, it is developed with a developing solution (Fuji Hunt Electronics Technology Co., Ltd. Fuji Hunt CD diluted 4 times with pure water) for 30 seconds to pattern the resist film into a predetermined shape. After development, rinse with pure water, and post bake at 200 ° C. for 100 minutes after rinsing. In this way, a light-shielding layer having a predetermined shape made of the resist film is obtained (hereinafter, a glass substrate with a light-shielding layer is formed up to the light-shielding layer).

(C) Preparation of Dispersion for Micelle Electrolysis As a dispersion for forming a colored layer having high spectral transmittance in the red wavelength region (hereinafter referred to as R colored layer), Chromophtal red A2B (manufactured by Ciba Geigy) is used. 2) (dispersion medium; pure water). Further, the dispersion liquid for forming a colored layer (hereinafter, referred to as a G colored layer) having a high spectral transmittance in the green wavelength region is a dispersion liquid (dispersion medium; pure water) of Heliogen Green L9361 (manufactured by BASF) and Irgadine. Yellow 2RLT (Ciba-Geigy) dispersion (dispersion medium; pure water) and 2
It is prepared by mixing at a ratio of 70:30 (weight ratio) while maintaining the temperature at 0 ° C., and further dispersing the mixed solution for 30 minutes by an ultrasonic homogenizer. As a dispersion liquid for forming a colored layer having high spectral transmittance in the blue wavelength region (hereinafter referred to as B colored layer), a dispersion liquid (dispersion medium; pure water) of Fastgen Blue TGR (manufactured by Dainippon Ink and Chemicals, Inc.) The ratio of 80:20 (weight ratio) while keeping 20 ° C. and Fastgen Super Violet 2RN (manufactured by Dainippon Ink and Chemicals), respectively.
Prepared by mixing in.

(D) Micelle electrolysis First, the glass substrate with a light-shielding layer prepared in the above-mentioned steps (a) and (b) was used to prepare the dispersion liquid (liquid temperature) for forming the R colored layer prepared in the above-mentioned step (c). 20 ° C.), and a potentiostat is connected to the electrolysis ITO electrode at the location where the R colored layer is to be formed. Then, 0.5 Vvs. SCE, constant potential electrolysis for 25 minutes is performed to obtain an R colored layer. After electrolysis, rinse with pure water, and after rinsing, bake at 100 ° C. for 15 minutes. Next, this substrate was immersed in a dispersion liquid (liquid temperature 20 ° C.) for forming a G colored layer prepared in the manner of (c) above, and a potentiostat was applied to the ITO electrode for electrolysis at the location where the G colored layer was to be formed. Connect. Then, 0.5 Vvs. SC
A constant voltage electrolysis for 20 minutes is performed for E to obtain a G colored layer. After electrolysis, rinse with pure water, and after rinsing, bake at 100 ° C. for 15 minutes. Finally, this substrate was immersed in the dispersion liquid (liquid temperature 20 ° C.) for forming the B coloring layer prepared as in the above (c), and the potentiostat was applied to the electrolysis ITO electrode at the location where the B coloring layer was to be formed. Connect. And 0.5V
vs. SCE, constant potential electrolysis for 15 minutes is performed to obtain a B colored layer. After electrolysis, rinse with pure water, and after rinsing at 100 ℃
Bake for 15 minutes. Thus, the R colored layer, the G colored layer, and the B colored layer are alternately formed in stripes on the glass substrate with the light shielding layer (hereinafter, the R colored layer, the G colored layer, and the B colored layer).
A glass substrate provided with a colored layer is called a glass substrate with a colored layer).

(2) Formation of transparent protective layer The glass substrate with a colored layer obtained in (1) above was set on a spin coater, and a polysiloxane resin (OS-808 manufactured by Nagase & Co., Ltd.) as a material for the transparent protective film was set. ) Was applied on the colored layer using a dispenser. At this time, the substrate 10
By slowly rotating at rpm, the resin was evenly applied to the entire surface of the glass substrate with the colored layer. Further, the glass substrate with the colored layer was rotated at 800 rpm for 1 minute to obtain a uniform resin thin film. Then, the resin was cured by baking at 260 ° C. for 2 hours. As a result, the intended transparent protective layer was obtained.

(3) Formation of transparent electrode for driving liquid crystal A glass substrate with a colored layer provided with a transparent protective layer was attached to a DC magnetron direct sputtering device, and the inside of the vacuum chamber was set to 1 ×.
After reducing the pressure to 10 ^-6 Torr or less, argon gas having a purity of 99.99% was introduced up to 3 × 10 ^-3 Torr. And I
A hexagonal layered compound represented by n ₂ O ₃ (ZnO) ₅ and a sintered body target (molar ratio of In and Zn (former / latter) = 2/1) composed of indium oxide (In ₂ O ₃ ). Then, sputtering was performed under the conditions of a target applied voltage of 420 V and a substrate temperature of room temperature. By this sputtering, a thickness of 0.1 μm made of an amorphous oxide containing zinc element and indium element as main cation elements.
A liquid crystal driving transparent electrode was formed on the transparent protective layer. As a result, the intended color filter for liquid crystal display was obtained. This color filter is suitable as a color filter for a thin film transistor type active matrix type liquid crystal display or the like.

The surface resistance (surface resistance of the liquid crystal driving transparent electrode) of the color filter for liquid crystal display thus obtained was 30 Ω / □. Further, no deformation was observed in this color filter, and the color filter had a good appearance. About the liquid crystal driving transparent electrode in this color filter,
The cross-cut test was performed according to JIS, and the water resistance and heat resistance were measured according to JIS. Furthermore, the appearance was visually observed. The results are shown in Table 1. The fact that the liquid crystal driving transparent electrode was made of an amorphous oxide was confirmed from the measurement results of X-ray diffraction of the film formed directly on the glass substrate under the same conditions as in (3) above.
In addition, the atomic ratio of zinc element and indium element Zn / (Zn
It was confirmed that + In) was 0.27.

Example 2 In forming a transparent electrode for driving a liquid crystal, In ₂ O
Same as Example 1 except that a sintered body target (molar ratio of In and Zn (former / latter) = 1/2) consisting essentially of a hexagonal layered compound represented by ₃ (ZnO) ₄ was used. Then, a color filter for liquid crystal display was obtained. The surface resistance of the color filter for liquid crystal display thus obtained (the surface resistance of the transparent electrode for driving the liquid crystal) is 32.5.
It was Ω / □. Further, no deformation was observed in this color filter, and the color filter had a good appearance. With respect to the liquid crystal driving transparent electrode in this color filter, the same items as in Example 1 were tested and measured. The results are shown in Table 1. In addition, from the measurement result of the X-ray diffraction of the transparent electrode directly formed on the glass substrate under the same conditions as in Example 2, the liquid crystal driving transparent electrode formed in Example 2 was made of an amorphous oxide. Was confirmed. Further, it was confirmed that the atomic ratio Zn / (Zn + In) of the zinc element and the indium element was 0.58.

Example 3 In forming a transparent electrode for driving a liquid crystal, In ₂ O
₃ (ZnO) ₅ consisting essentially of the hexagonal layered compound, and the molar ratio of In and Zn (the former / the latter) is 1 /
Example 1 except using a sintered body target of 2.5
A color filter for liquid crystal display was obtained in the same manner as in. The surface resistance of the thus-obtained color filter for liquid crystal display (surface resistance of the liquid crystal driving transparent electrode) was 25.6 Ω / □. Further, no deformation was observed in this color filter, and the color filter had a good appearance. With respect to the liquid crystal driving transparent electrode in this color filter, the same items as in Example 1 were tested and measured. The results are shown in Table 1. In addition, from the measurement result of the X-ray diffraction of the transparent electrode directly formed on the glass substrate under the same conditions as in Example 3, the liquid crystal driving transparent electrode formed in Example 3 was made of an amorphous oxide. Was confirmed. Further, the atomic ratio of zinc element to indium element Zn / (Zn +
It was confirmed that In) was 0.61.

Example 4 In forming a transparent electrode for driving a liquid crystal, In ₂ O
SnO _{2 is} added to the hexagonal layered compound represented by ₃ (ZnO) _5.
A color filter for liquid crystal display was obtained in the same manner as in Example 1 except that a sintered target (mol ratio of In and Zn (former / latter) = 1 / 2.5) containing 5 wt% of was used. The surface resistance of the color filter for a liquid crystal display (surface resistance of the liquid crystal driving transparent electrode) thus obtained was 22.6 Ω / □. Further, no deformation was observed in this color filter, and the color filter had a good appearance. With respect to the liquid crystal driving transparent electrode in this color filter, the same items as in Example 1 were tested and measured. The results are shown in Table 1. In addition, from the measurement result of the X-ray diffraction of the transparent electrode directly formed on the glass substrate under the same conditions as in the fourth embodiment, the liquid crystal driving transparent electrode formed in the fourth embodiment is made of an amorphous oxide. Was confirmed. Further, the atomic ratio Zn / indium element Zn /
It was confirmed that (Zn + In) was 0.62 and the atomic ratio Sn / (In + Zn + Sn) of tin (Sn) was 0.05 (5 at%).

Comparative Example 1 When forming a transparent electrode for driving a liquid crystal, ITO (Sn
Example 1 except that a target containing O ₂ of 5 wt% was used.
A color filter for liquid crystal display was obtained in the same manner as in. The surface resistance of the color filter for liquid crystal display (surface resistance of the liquid crystal driving transparent electrode) thus obtained was 25Ω / □. With respect to the liquid crystal driving transparent electrode in this color filter, the same items as in Example 1 were tested and measured. The results are shown in Table 1. In addition, as a result of measuring the X-ray diffraction of the transparent electrode formed directly on the glass substrate under the same conditions as in Comparative Example 1, a peak of indium oxide was confirmed.

[0040]

[Table 1]

As is clear from Table 1, each of the color filters for liquid crystal displays obtained in Examples 1 to 4 had cracks, wrinkles,
Peeling does not occur, and the adhesiveness of the liquid crystal driving transparent electrode is high. Furthermore, each liquid crystal driving transparent electrode is also excellent in water resistance and heat resistance, so that it is unlikely that cracks or peeling will occur in the liquid crystal driving transparent electrode with time even after the production of the color filter. I understand.

On the other hand, in the color filter for a liquid crystal display obtained in Comparative Example 1, cracks, wrinkles, and peeling occur in the liquid crystal driving transparent electrode in the manufacturing process, and the adhesion of the liquid crystal driving transparent electrode is low. The water resistance and heat resistance of the liquid crystal driving transparent electrode formed in Comparative Example 1 are lower than those of the liquid crystal driving transparent electrode liquid crystals formed in Examples 1 to 4.

[0043]

As described above, in the color filter for liquid crystal display of the present invention, the transparent electrode for driving the liquid crystal is less likely to be cracked or peeled off during the manufacturing process, and the transparent electrode for driving the liquid crystal is lapsed with time even after the manufacturing. It is difficult for cracks and peeling to occur on the surface. Therefore, according to the present invention,
It becomes possible to easily provide a more reliable color filter for a liquid crystal display.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Seiichiro Yokoyama 1280, Uezumi, Sodegaura, Chiba Idemitsu Kosan Co., Ltd.

Claims (3)

[Claims] 1. An electrically insulating transparent substrate, a plurality of types of colored layers arranged in a predetermined pattern on the electrically insulating transparent substrate, and on these colored layers or the electrically insulating transparent substrate and At least a liquid crystal driving transparent electrode provided between a plurality of kinds of colored layers, and the liquid crystal driving transparent electrode is made of an amorphous oxide containing zinc element and indium element as main cation elements. A color filter for a liquid crystal display, which is characterized by 2. The color filter for a liquid crystal display according to claim 1, wherein an atomic ratio Zn / (Zn + In) of zinc element and indium element in the amorphous oxide is 0.2 or more and less than 0.9. 3. The amorphous oxide contains at least one third element having a valence of positive trivalence or more as a cation element other than zinc element and indium element, and accounts for the total amount of all cation elements. The ratio of the total amount of the third element is 20
The color filter for a liquid crystal display according to claim 1, which is at% or less.