JPH07120850A - Shutter device for light source of exposure device - Google Patents

Abstract

PURPOSE:To obviate the generation of a deviation in illuminance distribution and illuminance angle by providing a shutter device with pinholes which are larger than the condensing spots of plural lenses and exist at the condensing spots and opening/closing means for the pinholes. CONSTITUTION:A flyeye lens 1 consists of the plural lenses 10 smaller in diameter than the luminous flux diameter of vertically and horizontally disposed light sources and the individual lenses 10 are so set as to cross orthogonally the optical axes from the light sources and form the respectively discrete condensing spots 11. The shutter is composed of a pair of pinhole plates 20, 21. The respective pinhole plate 20, 21 form the plural pinholes 23 in the same position. These pinholes 23 are slightly larger in diameter than the condensing spots 11. The condensing spots 11 are so formed as to exist between the pinhole plates 20 and 21 within the spots. The pinhole plate 20 is stationary and the pinhole plate 21 is moved back and forth laterally by operation of an actuator 22. Namely, the light passing the pinholes 23 is opened and closed by the short- distant movement of the pinhole plate 21.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shutter device for a light source of an exposure device for printing a circuit pattern or the like on a printed circuit board.

[0002]

2. Description of the Related Art In an exposure apparatus, irradiation from a light source is opened and closed by a shutter device to print an object such as a printed circuit board. Conventionally, this shutter device is configured to open and close the irradiation light by inserting and removing a single shutter plate capable of blocking the entire light flux from the light source.

[0003]

However, the luminous flux from the light source is usually about 100 mm at the minimum, and it takes about 0.5 seconds to move the entire luminous flux by moving one plate. there were. Further, in the conventional shutter device, since the opening / closing operation is a reciprocating operation, there is a problem in that a difference in light-shielding time occurs depending on the location of the light beam, which causes a deviation in the illuminance distribution and a deviation in the irradiation angle. The present invention aims to solve the above-mentioned problems of the prior art.

[0004]

In order to achieve the above object, the exposure apparatus light source shutter apparatus of the present invention is arranged so as to be orthogonal to the optical axis of the light source and has a diameter smaller than the luminous flux diameter of the light source. It is basically characterized in that it is provided with a plurality of lenses, a pinhole having a diameter larger than the focused spots of the plurality of lenses and located at the focused spot, and means for opening and closing the pinhole. .

[0005]

The light from the light source is focused on the pinhole located at the focusing spot through a plurality of lenses arranged so as to be orthogonal to the optical axis of the light source and having a diameter smaller than the light beam diameter of the light source. .
The pinhole is opened and closed by means of opening and closing.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is applied to a shutter device in an exposure apparatus for a printed circuit board will be described below with reference to the drawings. In FIG. 1, the exposure light (ultraviolet light) emitted from the point light source 5 is condensed by the elliptical mirror 6, reflected by the plane mirror 7 and the plane mirror 8, and converted into a parallel light flux by the collimator mirror 9 to be converted into a film mask F. And an optical system reaching the printed circuit board P is formed.

A shutter device including a fly-eye lens 1 and a shutter 2 is provided in the middle of the plane mirror 7 and the plane mirror 8. As shown in FIG. 2, the fly-eye lens 1 is composed of a plurality of lenses 10 arranged vertically and horizontally. The individual lenses 10 are set so as to be orthogonal to the optical axis from the light source, and each of them has its own focused spot. Forming 11 and 2
A secondary light source surface is formed.

The shutter 2 comprises a pair of pinhole plates 20, 2
It is composed of 1. Each of the pinhole plates 20 and 21 has a plurality of pinholes 23 formed at the same position, and the pinholes 23 are slightly larger in diameter than the focused spot 11. As shown in FIG. 3, the pinhole 23 locates the focused spot 11 therein. Further, in this embodiment, as shown in FIG. 2, the focused spot 11 is located at an intermediate position between the pinhole plate 20 and the pinhole plate 21 in the thickness direction.

In this embodiment, the pinhole plate 20 is fixed, and the pinhole plate 21 is movable in the left and right directions.
The actuator 22 is operated to reciprocate in the left-right direction. FIG. 3 shows a state in which the pinhole plate 20 and the pinhole 23 of the pinhole plate 21 are overlapped with each other to expose the focused spot 11 and allow the light flux to pass therethrough.
In FIG. 4, the pinhole plate 21 is moved to the right in the drawing,
It shows a state in which the pinhole 23 is shielded without overlapping the pinhole 23.

The movement of the pinhole plate 21 at this time may be the same as or slightly larger than the diameter of the pinhole 23, so that the passage / blocking of light can be completed in a short time. Further, since a plurality of converging spots can be passed / blocked at the same time, the illuminance distribution and the irradiation angle are not affected.

Further, a pinhole 23 is formed on the focused spot 11.
Is located, stray light is cut when passing through the pinhole 23, and high-quality parallel light can be obtained.

The light passing through the shutter 2 is reflected by the plane mirror 8 as described above, converted into a parallel light flux by the collimator mirror 9 and irradiated on the film mask F, and the circuit pattern on the film mask F is printed on the printed circuit board. It is configured to be baked on P.

According to the embodiment described above, the light passing through the pinhole 23 can be opened and closed by moving the pinhole plate 21 a short distance. For example, in the case of a conventional single shutter, if the shutter range is 200 mm from the center, the shutter range can be about 20 mm in the above embodiment, and the shutter range is about 1 mm.
A shutter speed of 0 times can be obtained. Therefore, high-speed light shielding can be performed, and further, simultaneous light shielding of a plurality of focused spots does not cause irradiance distribution or irradiation angle deviation.
Further, stray light can be cut by the pinhole 23, and high-quality parallel light can be obtained.

[0014]

As described above, the exposure device light source shutter device of the present invention is provided so as to be orthogonal to the optical axis of the light source, and has a plurality of lenses each having a diameter smaller than the light beam diameter of the light source. Since a pinhole having a diameter larger than the condensing spots of a plurality of lenses and located at the condensing spots and a means for opening / closing the pinholes are provided, high-speed opening / closing of light can be performed with a short distance movement. Further, the simultaneous shading of a plurality of converging spots does not cause the illuminance distribution or the irradiation angle bias. Further, there is an effect that stray light can be cut by the pinhole, and high quality parallel light can be obtained.

[Brief description of drawings]

FIG. 1 is a schematic front view showing an embodiment of the present invention.

FIG. 2 is an enlarged view showing an embodiment of the present invention.

FIG. 3 is a plan view showing an embodiment of the present invention.

FIG. 4 is a plan view showing the operation of the embodiment of the present invention.

[Explanation of symbols]

1: Fly-eye lens, 2: Shutter, 5: Point light source,
6: elliptical mirror, 7: plane mirror, 8: plane mirror,
9: Collimator mirror, 10: Lens, 11: Focus spot, 20: Pinhole plate, 21: Pinhole plate, 2
2: Actuator, 23: Pinhole.

Claims (3)

[Claims] 1. Arranged so as to be orthogonal to the optical axis of the light source,
A plurality of lenses each having a diameter smaller than a light beam diameter of the light source, a pinhole having a diameter larger than a condensing spot of the plurality of lenses and located at the condensing spot, and means for opening and closing the pinhole, A shutter device for an exposure device light source, comprising: 2. Arranged so as to be orthogonal to the optical axis of the light source,
A plurality of lenses each having a diameter smaller than a light beam diameter of the light source, and a pair of pinhole plates each having a diameter larger than a condensing spot of the plurality of lenses and having a pinhole located at the condensing spot; A shutter device for a light source of an exposure apparatus, comprising: means for opening and closing the pinhole by moving one of the pinhole plates. 3. The shutter device for an exposure apparatus light source according to claim 1, wherein the plurality of lenses are a single fly-eye lens.