JPH0712272Y2 - Fluorine resin sealed container - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a fluororesin hermetically sealed container having chemical resistance and heat resistance, which is used in the field of semiconductors or medical devices.

[Conventional technology]

2. Description of the Related Art Conventionally, containers such as filter cartridges and cleaners used in the process of manufacturing electronic components such as LSIs are mainly formed of fluororesin because they are exposed to a strong acid for etching and a solvent for cleaning. When the lid is hermetically connected to the container body, for example, as disclosed in JP-B-63-28653, the joint portion is heat-sealed at a specific temperature in a crimped state. Mechanical strength is poor and it easily deforms when stress is applied to the connecting part from inside and outside,
There is a problem that the heat fusion part comes off, and there is a tendency that the number of steps in the heat fusion process increases and the cost becomes high, and it is difficult to replace the contents once the container body and the lid are connected. Because of this, it was usually thrown away. Also, for the purpose of increasing the mechanical strength of the heat-sealed portion of the container body and the lid, it is considered to apply synthetic resin from the outer surface of the container or to reinforce with a metal clip, but chemical resistance However, impurities may be mixed into the chemicals used in the semiconductor and medical device fields that require high purity, and when the temperature further rises, the thermal expansion of the fluororesin and the metal differs and the connection part bends. There is also a problem that the connecting part separates from the clip when the temperature drops.

[Problems to be solved by the device]

In view of the above situation, the present invention is to solve the problem that the container body and the lid body made of a fluororesin can be sealed and connected very easily, and the connection portion can be easily deformed even when stress is applied from inside and outside the container. First, it is to provide a sealed container made of a fluorine-based resin, which can maintain its hermeticity and can easily attach and detach the main body and the lid.

[Means for Solving the Problems]

In order to solve the above-mentioned problems, the present invention provides a container in which a container body made of a fluororesin is connected to a lid body. Embed a reinforcing ring in the connecting part of both the main body and the lid,
Further, a sealed container made of a fluororesin having an O-ring interposed between the joint surfaces of the connecting portion was constructed.

As the reinforcing ring, a metal ring, a metal element wire or a heat resistant fiber, or a reinforcing ring formed by combining the metal element wire and the heat resistant fiber into an annular shape was used.

[Action]

The fluororesin container of the present invention having the above-mentioned contents is screwed and connected to the connecting portion of the container body and the lid by surrounding the screw threads, respectively, and is inserted between the joint surface of the connecting portion. The state of being sealed by the ring is maintained by the rigidity of the reinforcing ring embedded in both the connecting portions of the main body and the lid.

〔Example〕

The present invention will be further described in detail with reference to the embodiments shown in the accompanying drawings.

FIG. 1 shows a typical embodiment of the present invention, in which 1 is a container body and 2 is a lid for closing the body 1.

The main body 1 and the lid body 2 are formed of a fluorine-based resin having chemical resistance to a strong acid for etching and a solvent for cleaning when manufacturing a semiconductor electronic component. As the fluorine-based resin, , A typical tetrafluoroethylene resin (PTFE)
In addition, ethylene tetrafluoride / perfluoroalkyl vinyl ether copolymer resin (PFA), ethylene tetrafluoride / hexafluoropropylene copolymer resin (FEP), ethylene tetrafluoride / ethylene copolymer resin (ETFE) and Examples thereof include polyvinylidene fluoride (vinylidene fluoride) resin (PVDF).

The main body 1 is formed in a bottomed cylindrical shape with one side open, and has an opening edge formed to have a slightly thick wall to form a connecting portion 3a. A screw thread 4a is formed on one side surface of the connecting portion 3a. The reinforcing ring 5a is provided inside the connecting portion 3a corresponding to the screw thread 4a.
Is buried.

The lid 2 is formed in a shallow cylindrical shape having a bottom with one side opened, and similarly has the connecting portion 3b formed with a slightly thicker opening edge and joined to the connecting portion 3a, A thread 4b is provided around one side of the connecting portion 3b facing the thread 4a of the main body 1, and a reinforcing ring 5b is embedded inside the connecting portion 3b corresponding to the thread 4b.

Then, an O-ring 7 made of fluorine-based synthetic rubber having chemical resistance is fitted in an O-ring groove 6 provided around one of the joint surfaces of the connecting portion 3a of the main body 1 and the connecting portion 3b of the lid 2. The main body 1 and the lid 2 are sealed. The O-ring 7 can be made of a material having chemical resistance such as silicon rubber or elastic elastomer resin other than fluorine-based synthetic rubber.

As described above, by embedding the reinforcing ring 5 in both the main body 1 and the connecting portions 3a and 3b of the lid body 2, the mechanical strength for maintaining the shape can be more surely increased.

Next, to describe the structure of the connecting portion 3 more concretely, what is shown in FIG. 2 is an enlarged view of the main part of FIG. 1, and the tip is attached to the upper edge of the inner surface of the connecting portion 3a of the main body 1. A screw thread 4a set outside the inner surface is formed, while a connecting portion 3b of the lid 2 is formed.
Is provided with a step surface 9 that contacts the end surface 8 of the main body 1 to form a recessed portion 10 on the outer periphery, and a screw thread 4b that is screwed into the screw thread 4a is formed in the upper half of the recessed portion 10 on the step surface 9 side. While being formed, an O-ring groove 6 is provided in the lower half and is fitted into the O-ring groove 6.
The ring 7 is arranged to be pressed against the inner surface of the main body 1.

In the embodiment shown in FIG. 3, the end surface 8 of the main body 1 and the step surface 9 of the lid 2 are formed to have substantially the same width, and an O-ring groove 6 is provided around the step surface 9, O-ring 7 fitted in ring groove 6
Is pressed against the end face 8.

Further, the embodiment shown in FIG.
A concave portion 11 capable of accommodating the connecting portion 3b of the lid body 2 is formed inside, a screw thread 4a is formed on an inner surface of the concave portion 11, and an O-ring 7 is fitted to a lower surface 12 of the concave portion 11. An O-ring groove 6 to be mounted is provided around, while the connecting portion 3b of the lid body 2 has a simple shape, and a screw thread 4b to be screwed into the screw thread 4a is formed on the outer surface of the connecting portion 3b. Is pressed against the O-ring 7.

Further, those shown in FIGS. 5 and 6 are similar to those shown in FIGS.
Inside the connecting portion 3a of the main body 1 shown in the figure, the connecting portion 3a of the lid 2 is provided.
The arrangement is reversed with respect to the structure in which a part or all of the above is located. That is, in the embodiment shown in FIG. 5, a screw thread 4a is provided on the outer side of the connecting portion 3a of the main body 1, and the connecting portion 3b of the lid 2 accommodates the connecting portion 3a of the main body 1. 10 is formed inside, and the step surface 9 of the upper surface of the concave portion 10 is formed.
An O-ring groove 6 into which an O-ring 7 is fitted is formed, and the end surface 8 of the main body 1 is pressed against the O-ring 7.

In addition, in the one shown in FIG. 6, the connecting portion 3a of the main body 1 is formed to be slightly longer in the vertical direction than that shown in FIG. 5, the screw thread 4a is formed in the lower half of the outer surface, and the O is formed in the upper part of the outer surface. An O-ring groove 6 into which a ring 7 is fitted is provided around the inside of the connecting portion 3b of the lid body 2, and a concave portion 10 is formed vertically in the same manner as in FIG. A thread 4b is formed in the lower half of the inner surface, and the O-ring 7 is pressure-welded to the upper part thereof.

As described above, various shapes of the connecting portion 3 between the main body 1 and the lid body 2 are conceivable, and shapes other than those shown in the drawing may be adopted.

Further, if the reinforcing ring 5 is formed of a metal ring body as shown in FIG. 7, it is more preferable in terms of tensile strength and bending strength, but it is not limited to this. For example, as shown in FIG. 8, a metal wire 14 woven into a wire mesh and then formed into a ring, or a heat-resistant fiber 15 such as carbon fiber woven into a ring to form a metal wire It is also possible to employ a material in which 14 and the heat resistant fiber 15 are mixed-woven or laminated to form an annular shape. In forming the heat-resistant fiber 15 into a ring shape, it is possible to pre-impregnate the fibers with a fluorine-based resin or to mold the whole in order to maintain its shape until it is embedded in the connecting portion 3. .

When the sealed container made of fluororesin of the present invention is used as an outer container of a filter cartridge or a washing device, the lower surface of the main body 1 and the upper surface of the lid body 2 may be appropriately selected as indicated by the one-dot chain line in FIG. The inlet / outlet 16 is formed so as to penetrate therethrough, and the filter or the object to be cleaned is provided inside.

[Effect of device]

According to the fluororesin hermetically sealed container of the present invention as described above, in a container in which a fluororesin container main body and a lid are hermetically connected, a screw thread to be respectively screwed into the connecting portion of the main body and the lid. And a reinforcing ring is embedded in both the connecting portions of the main body and the lid, and O is provided between the connecting surfaces of the connecting portions.
Since the ring is interposed, the internal thread acts on the main body and the lid in the axial direction when the internal pressure acts on the main body and the lid by providing screw threads around the connecting portion of the main body and the lid. Although a stress is applied in the moving direction, the connecting portion does not shift in the axial direction due to the screwing relationship and is reliably regulated, so that the internal liquid does not leak. By embedding a reinforcing ring in the connecting part of both the main body and the lid, the mechanical strength is dramatically improved, and there is no deformation inside or outside due to internal pressure or changes in internal pressure, and its sealing performance is ensured. Keep in
It is possible to eliminate the drawbacks of fluororesins, which have poor mechanical strength. In addition, since it is not exposed to chemicals by being buried, it does not corrode and its function can be maintained for a long period of time. Furthermore, by inserting an O-ring between the joint surface of the main body and the lid, the sealability of the joint is further improved, and the internal liquid enters between the joints and the screwing relationship is disturbed and leaks. There is nothing to do.

Further, if the reinforcing ring is formed of a metal ring, it has excellent tensile and bending strengths.

Further, when the reinforcing ring is made of a metal element wire or a heat resistant fiber or a composite material of a metal element wire and a heat resistant fiber, weight reduction can be achieved.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view showing a typical embodiment of the present invention, FIG. 2 is a longitudinal sectional view of an essential part thereof, FIG. 3 is a longitudinal sectional view of an essential part showing another embodiment, and FIG. Similarly, a longitudinal cross-sectional view of the main part showing another embodiment, FIG. 5 is a vertical cross-sectional view of the main part showing the same other embodiment, and FIG. 6 is a vertical cross-sectional view of the main part showing the other embodiment.
FIG. 7 is a perspective view of a reinforcing ring, and FIG. 8 is a perspective view showing another embodiment of the reinforcing ring. 1: body, 2: lid, 3, 3a, 3b: connecting part, 4, 4a, 4b: screw thread, 5,
5a, 5b: Reinforcement ring, 6: O-ring groove, 7: O-ring, 8: End surface,
9: Step, 10: Recessed part, 11: Recessed part, 12: Lower surface, 13: End surface, 1
4: Metal wire, 15: Heat resistant fiber, 16: Entrance / exit.

Claims (5)

[Scope of utility model registration request] 1. A container in which a container body made of a fluorine-based resin and a lid are hermetically connected to each other, and a screw thread to be screwed into each connecting portion of the body and the lid is provided around the container, and both the body and the lid are provided. A reinforcing container is embedded in a connecting portion of the above, and an O-ring is interposed between the joining surfaces of the connecting portion, and a sealed container made of a fluororesin. 2. The fluororesin hermetically sealed container according to claim 1, wherein a metal ring is used as the reinforcing ring. 3. The fluororesin hermetically sealed container according to claim 1, wherein the reinforcing ring is a reinforcing ring formed by molding a metal wire into an annular shape. 4. The sealed container made of a fluororesin according to claim 1, wherein the reinforcing ring is a reinforcing ring formed by molding heat-resistant fibers into an annular shape. 5. The sealed container made of a fluorine resin according to claim 1, wherein the reinforcing ring is a reinforcing ring formed by combining a metal wire and a heat-resistant fiber into an annular shape and using the annular reinforcing ring.