JPH07244822A - Magnetoresistance effect type magnetic head - Google Patents

Abstract

PURPOSE:To improve reproduction output sensitivity when using Giant-MR film as an MR element. CONSTITUTION:An MR element 8 and a bias magnetic field application member 9 for applying a bias magnetic field to the MR element 8 are laid out between a pair of shield magnetic bodies 4 and 5. In the title MR head, a groove part 12 is formed at a lower shield magnetic body 4 and at the same time a flux guide 11 with a high permeability is provided at either the tip or rear edge side or both of the MR element 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetoresistive effect magnetic head used in a high-density storage device such as a hard disk drive.

[0002]

2. Description of the Related Art In recent years, along with the high performance of computers, there has been a demand for miniaturization and high capacity of hard disks. In particular, as the speed of the magnetic recording medium decreases with the downsizing, the need for a magnetoresistive effect magnetic head (hereinafter referred to as MR head) that does not depend on the speed of the magnetic recording medium has increased.

The MR head utilizes a phenomenon in which the electric resistance of a magnetoresistive effect element (hereinafter referred to as an MR element) such as permalloy changes depending on the direction of signal magnetization leaking from the magnetic recording medium, and the MR element on the magnetic recording medium. It converts a magnetic signal into an electrical signal. In this MR head, since the MR element is used as a read-only head, the read output does not depend on the relative speed with the magnetic recording medium, and in principle data can be read even if the magnetic recording medium does not rotate. it can.

Generally, as a magnetic head structure for a hard disk, an electromagnetic induction type thin film magnetic head (hereinafter referred to as an inductive head) as a recording-only head and an MR head as a reproduction-only head are vacuum thin films on the same slider. The laminated structure is formed by the forming technique.

For example, an MR head has a lower shield magnetic body 101 and an upper shield magnetic body 1 as shown in FIG.
In general, the MR element 103 is sandwiched by 02, and a bias conductor 104 for applying a bias magnetic field to the MR element 103 is provided on the MR element 103. Further, in this MR head, M
The front electrode 105 and the rear electrode 106 for passing a sense current to the R element 103 and extracting an output signal are MR
It is provided at the front end and the rear end of the element 103.

By the way, the shield magnetic bodies 101 and 102 of the MR head having the above-mentioned structure absorb the magnetic flux other than the magnetic flux of the magnetic signal from the track portion to be read by the head, and the MR element 103 becomes noise. There is a demand for a shield magnetic material having a high saturation magnetic flux density and a high magnetic permeability in order to prevent the magnetic flux from entering.

However, when a shield material having such a high saturation magnetic flux density and a high magnetic permeability is used, the shield magnetic bodies 101 and 102 also absorb the magnetic flux that should be taken in by the MR element 103, As a result, the reproduction output is reduced.

On the other hand, for the MR element 103, a material exhibiting a high magnetoresistive effect is required as the magnetoresistive effect material with the increase in density of magnetic recording. The magnetic resistance change rate of the currently used permalloy (Fe-Ni) (rate of change in resistance when a magnetic field is applied) is about 3%, and new materials may have a magnetoresistance change rate higher than this. is necessary. As one of the new materials, a magnetic film having a multi-layer structure in which thin magnetic metal layers and non-magnetic layers are alternately laminated, such as Fe, is used.
A magnetoresistance change rate of about 50% is observed in the multilayer film of Cr and Cr.

However, when a magnetic film having a multi-layer structure is used for an MR element, it is required that the resistance change amount is large in the range where the external magnetic field changes, and a film showing a magnetoresistance change rate of about 50% is 10 KOe. There is a problem that a sufficient magnetoresistive effect cannot be obtained unless a high magnetic field is applied. This is because the exchange interaction between the magnetic layers is strong and the direction of magnetization of the magnetic layers is unlikely to change due to an external magnetic field.

[0010]

Recently, a film structure that has improved such a problem has been developed, and such a film changes the direction of magnetization even when the external magnetic field is weak, and has a high magnetic field at a low magnetic field. The resistance change rate is shown. However, in such a situation, the metal artificial lattice multilayer film (soft Giant-MR film) that exhibits a high magnetoresistance change rate in a low magnetic field has a very small and large proportion of the magnetic layer, which is a few atomic layers. However, the volume ratio is about 30%.

Since the head structure is composed of a so-called magnetic circuit, the signal magnetic field is determined by the distribution of the magnetic permeability with the shield magnetic body that sandwiches the MR element. Therefore, the MR element, which is thinner than the shield magnetic body, has a low magnetic permeability.
Further, if an artificial metal multilayer film is used as the MR element, the magnetic permeability is reduced due to the reduction of the ratio of the magnetic layer. As a result, the signal magnetic field does not enter the MR element, and even if the magnetoresistance change rate is large, the output sensitivity does not increase.

Therefore, the present invention has been proposed in view of the above-mentioned technical problems of the related art, and an MR head which greatly improves the reproduction output sensitivity when a metal artificial multilayer film is used as an MR element. The purpose is to provide.

[0013]

In an MR head according to the present invention, an artificial metal multilayer film in which magnetic metal layers and non-magnetic layers are alternately laminated is used as an MR element, and the MR element is used as a contact surface with a magnetic recording medium. A longitudinal shield structure in which the longitudinal direction is perpendicular to the above, electrodes are laminated on the front end side and the rear end side thereof, and these electrodes and the MR element are sandwiched by a pair of shield magnetic bodies. .

In this MR head, the signal magnetic flux entering the MR element is compensated for by the low magnetic permeability of the artificial metal multilayer film.
A flux guide made of a magnetic material having a high magnetic permeability is provided in order to efficiently draw the R element to the rear end side. It is desirable to provide the flux guide on the front end side or the rear end side of the MR element or on both sides. Permalloy, for example, is suitable as the flux guide.

Further, the distance between the MR element and the shield magnetic body facing each other is increased in order to prevent the signal magnetic flux from falling on the shield magnetic bodies provided above and below the MR element. As a means thereof, for example, a groove is provided in the lower shield magnetic body, or a nonmagnetic space is provided between the upper shield magnetic body and the MR element.

In addition to these, in order to prevent most of the signal magnetic flux flowing into the MR element from leaking to the adjacent shield magnetic body, a bias magnetic field applying member for applying a bias magnetic field to the MR element is attached to the lower shield magnetic body. It is arranged between the formed groove or the upper shield magnetic body and the MR element or both.

Further, in consideration of the bias efficiency, the flux guide is arranged such that the front end of the groove is formed in front of the rear end of the groove provided in the lower shield magnetic body with respect to the contact surface with the magnetic recording medium. It is desirable to provide it. That is, the flux guide is provided before the rear end of the groove. For example, the MR element may be provided at a position approximately in the center of the magnetic sensitive section.

[0018]

In the present invention, the metal artificial multilayer film is used as the MR element, but if the metal artificial multilayer film is simply used,
Since the ratio of the magnetic layer is small, the magnetic permeability is low.
However, by providing a flux guide such as a permalloy having a high magnetic permeability that compensates for the low magnetic permeability of the artificial metal multilayer film on the front end side and / or the rear end side of the MR element, the front end of the MR element The signal magnetic flux entering from the side efficiently enters the rear end.

Furthermore, in addition to the above-mentioned flux guide, by providing a groove portion in the lower shield magnetic body, the distance between the lower shield magnetic body and the MR element facing each other becomes larger, so that the signal magnetic flux entering the MR element is shielded. Hard to leak to the magnetic body.

Further, in the MR head of the present invention, a bias magnetic field applying member is provided both in the groove portion provided in the lower shield magnetic body and between the upper shield magnetic body and the MR element, so that the MR element is exposed to the MR element. The bias will be applied more efficiently.

Furthermore, by providing the flux guide in front of the rear end of the groove on the medium sliding contact side, a bias magnetic path is formed and the bias efficiency is improved.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments to which the present invention is applied will be described in detail below with reference to the drawings. In this example,
This is an example applied to a composite magnetic head (composite MR head and inductive head) mounted in a hard disk drive used in a computer or the like.

The composite magnetic head 1 uses an MR head as a read-only magnetic head as shown in FIG.
An inductive head is used as a write-only magnetic head, and normally one side surface 2a of the slider 2 is used.
In addition, after the MR head is formed by the vacuum thin film forming technique, the inductive head is laminated on the MR head.

The reproducing magnetic gap and the recording magnetic gap of the MR head and the inductive head both face the air bearing surface (hereinafter referred to as ABS 3) which is the surface 3 facing the hard disk. ing.

As shown in the enlarged cross-sectional view of FIG. 2, the MR head has a pair of shield magnetic bodies 4, 5 formed on one side surface 2a of the slider 2 and these shield magnetic bodies 4, 5.
An MR element 8 having a front end electrode 6 and a rear end electrode 7 laminated in between, and a bias magnetic field applying member 9 for applying a bias magnetic field to the MR element 8 are configured.

Hereinafter, the shield magnetic body 4 formed in the lower layer will be referred to as the lower shield magnetic body 4, and the shield magnetic body 5 formed in the upper layer will be referred to as the upper shield magnetic body 5.

The MR element 8 is formed, for example, in a substantially rectangular pattern in plan view, and is provided so that its longitudinal direction is perpendicular to the ABS surface 3. Also, this M
One side edge of the R element 8 on the leading end side faces the ABS surface 3.

The MR element 8 has a metal artificial multilayer film (Giant-MR) which exhibits a high magnetoresistance change rate in a low magnetic field.
Membrane) is used. As shown in FIG. 3, the artificial metal multilayer film is formed by alternately stacking a thin magnetic metal layer 8a and a non-magnetic layer 8b in multiple layers by means such as sputtering.

Examples of the metal artificial multilayer film satisfying the above requirements are, for example, a combination of Fe-Ni and Cu, and Fe-C.
Combination of r and Cu, Combination of Co and Cu, F
An example is a combination of e-Ni-Co and Cu. In this embodiment, Fe-Ni- is used as the magnetic metal layer 8a.
Co, Cu is used as the non-magnetic layer 8b, and the magnetic metal layer 8a is used.
Has a thickness of 1.2 nm and the non-magnetic layer 8b has a thickness of 2.2 nm.
These are alternately sputtered as Fe-Ni-
One set of the Co layer and the Cu layer was set as one layer so that the total number of layers was 10.

As a method for forming the magnetic metal layer 8a and the nonmagnetic layer 8b, a high frequency sputtering method or an ion beam sputtering method can be used.

Since the insulating layer 10 provided between the MR element 8 and the lower shield magnetic body 4 functions as the lower gap film of the reproducing magnetic gap g, Al ₂ which can sufficiently secure the insulating property between them. O ₃ or SiO or SiO ₂
And the like. The insulating layer 10 is formed by sputtering or the like.

The tip electrode 6 is directly laminated on the tip of the MR element 8 so that one side edge thereof faces the ABS 3 and is electrically connected to the MR element 8.
The tip electrode 6 has a function as an electrode for supplying a sense current to the MR element 8 and also has a reproducing magnetic gap g.
It also functions as an upper gap film.
Therefore, the tip electrode 6 has Ta, Ti, W, Cr,
It is desirable to use a non-magnetic metal material having conductivity such as Cu. In this embodiment, a laminated film structure of Ti and Cu is used.

On the other hand, the rear end electrode 7 is laminated on the rear end portion of the MR element 8 so that a part thereof is laminated on the flux guide 11 for the purpose of improving the pulling in of the signal magnetic flux. ing. The rear end electrode 7 is the front end electrode 6
Unlike the above, since it does not function as a gap film, its film thickness is made thicker than that of the tip electrode 6, and is set to a film thickness that can sufficiently function as an electrode. The material used for this rear end electrode 7 is Ta, Ti, W, C as in the case of the front end electrode 6.
A nonmagnetic metal material such as r or Cu is used. In the present embodiment, the rear end electrode 7 has a laminated film structure of Ti and Cu similarly to the front end electrode 6.

The flux guide 11 is provided to compensate for the low magnetic permeability of the artificial metal multilayer film, and is made of a film made of a soft magnetic material having a high magnetic permeability. For example, this flux guide 11 has a magnetic permeability μ of 10
A soft magnetic material such as a permalloy of 00 or more, sendust, an Fe—Co-based amorphous material, or the like is used. In order to form the flux guide 11, any vacuum thin film forming means such as sputtering, vapor deposition or plating can be applied. In this example, permalloy was deposited to a thickness of 0.3 μm.

The bias magnetic field applying member 9 is for applying a bias magnetic field to the MR element 8, and is the tip electrode 6.
Between the rear end electrode 7 and the rear electrode 7, and the insulating layer 13 is provided in the groove 12 formed in the lower shield magnetic body 4 on the side opposite to the side where the electrodes 6 and 7 are provided with the MR element 8 interposed therebetween. It is provided in the form of being embedded by.

The bias magnetic field applying member 9 has the above M
It serves to apply a bias magnetic field along the longitudinal direction of the R element 8 (perpendicular to the ABS 3).
It is provided in a direction orthogonal to the longitudinal direction of the R element 8. The bias magnetic field applying member 9 may be, for example, a conductive conductor or a hard film (a permanent magnet having a high coercive force and a high saturation magnetic flux density).
When the bias magnetic field applying member 9 is a conductor, a bias current from a DC power source is applied to both terminals of the conductor pattern in the track width direction which is the longitudinal direction of the wiring pattern.

In this embodiment, Cu having excellent conductivity is used as the bias magnetic field applying member 9 and its film thickness is 0.3 μm.
The film was formed so that Note that Ti may be formed above and below Cu in consideration of the adhesion to the insulating layers 10 and 13.

The pair of shield magnetic bodies 4 and 5 provided so as to sandwich the MR element 8 from above and below functions as a shield for absorbing magnetic flux that becomes noise other than the magnetic flux of the magnetic signal to be read by the MR element 8. And is made of, for example, permalloy or sendust. It is desirable that the film thickness of these shield magnetic bodies 4 and 5 be about 2.0 μm in order to prevent the signal magnetic field from entering the reproducing magnetic gap g from a track other than the reproducing track.

The lower shield magnetic body 4 of the shield magnetic bodies 4 and 5 extends in the direction perpendicular to the ABS surface 3 so that one side edge of the shield magnetic body 4 faces the ABS surface 3. Is provided. In particular, this lower shield magnetic body 4 has a groove portion 12 for embedding the above bias magnetic field applying member 9 with an insulating layer 13 at a position corresponding to a region sandwiched by the front electrode 6 and the rear electrode 7. .

The groove 12 has a bottom surface 12a parallel to the bias magnetic field applying member 9 and inclined surfaces 12b, 12 formed on both sides of the bottom surface 12a so as to widen the opening width of the groove.
As a groove having a substantially U-shaped cross section, the groove is formed in the short side direction (track width direction) of the lower shield magnetic body 4.

Of the inclined surfaces 12b and 12c, the ABS
The groove tip portion D ₁ of the inclined surface 12b provided on the surface 3 side which is close to the MR element 8 is located at substantially the same position as the rear end portion (position of the depth zero of the reproducing magnetic gap g) E _{1 of the} tip electrode 6. ing. On the other hand, the MR element 8 of the other inclined surface 12c
Groove rear end D ₂ adjacent to is the rear with respect to the distal end portion E ₂ of the flux guide 11.

When viewed in reverse, the flux guide 1
The tip end portion E _{2 of} No. 1 is provided closer to the ABS surface 3 with respect to the groove rear end portion D ₂ of the inclined surface 12c. That is, if the flux guide 11 is provided closer to the ABS 3 than the groove rear end portion D ₂ of the groove portion 12, a bias magnetic path is formed, and the MR element 8 is more easily biased.

On the other hand, like the lower shield magnetic body 4, the upper shield magnetic body 5 provided so as to face the upper shield magnetic body 5 faces the ABS surface 3 at one side edge thereof.
It is provided so as to extend perpendicularly to the BS surface 3 toward the back side. Further, the upper shield magnetic body 5 has an ABS surface 3
Is laminated directly to the tip electrode 6 on the side, and is laminated on the rear side so as to have a sufficient facing distance to the MR element 8 via the insulating layer 14. The insulating layer 1
3, 14 are insulating layers 10 functioning as lower gap films.
Similarly, it is made of an insulating material such as Al ₂ O ₃ , SiO, and SiO ₂ .

In this embodiment, both the lower shield magnetic body 4 and the upper shield magnetic body 5 are made of permalloy by the plating method, and the thickness thereof is set to 2.0 μm.

In the MR head constructed as described above, since the flux guide 11 compensates for the low magnetic permeability when the Giant-MR film is used as the MR element 8, the Giant-MR film has the same. The original function can be fully exerted. In addition to this, by forming the groove portion 12 in the lower shield magnetic body 4, the signal magnetic flux entering the MR element 8 from the ABS 3 is prevented from leaking to the lower shield magnetic body 4 in the depth direction of the MR element 8. Can be retracted to the rear end. In addition, the MR element 8
With a sufficient distance between the upper shield magnetic body 5 and the upper shield magnetic body 5, the signal magnetic flux can be similarly drawn into the rear end portion of the MR element 8.

On the other hand, although not shown, the inductive head has the same structure as a general thin film magnetic head, and has a pair of thin film magnetic cores made of a soft magnetic material such as permalloy, and these thin film magnetic cores have a predetermined structure. In addition to being stacked with a space, a conductor coil is spirally formed between these thin film magnetic cores with an insulating layer interposed. This inductive head is laminated and formed on the MR head via an insulating layer by a vacuum thin film forming technique.

The recording density characteristics of the magnetic head of the present invention having the above-mentioned structure and the conventional head shown in FIG. 11 were actually measured. Both heads have a gap length of 0.2μ.
m, and the track width was 3 μm. The result is shown in FIG. In FIG. 4, a waveform A shows the head of the present invention, and a waveform B shows the conventional head.

As can be seen from these results, the head of the present invention has a recording density characteristic about twice as high as that of the conventional head. This is because the low magnetic permeability due to the metal artificial multilayer film is compensated by providing a flux guide and a groove, so that the signal from the medium does not fall into the shield magnetic body and penetrates deep into the MR element, As a result, the output is greatly improved due to the high magnetoresistance change rate of the MR element film.

The specific embodiments to which the present invention is applied have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made. For example, in the above-described embodiment, the bias magnetic field applying member 9 is provided in the groove portion 12 formed in the lower shield magnetic body 4 via the insulating layer 13.
As shown in FIG. 5, the upper shield magnetic body 5 and the MR element 8
The same effect can be obtained by providing the insulating layer 14 between and.

Alternatively, as shown in FIG. 6, a bias magnetic field applying member 9 may be provided between the groove portion 12 of the lower shield magnetic body 4 and between the upper shield magnetic body 5 and the MR element 8. When the bias magnetic field applying members 9 are provided above and below with the MR element 8 in between, a larger bias magnetic field can be applied to the MR element 8.

Regarding the flux guide 11,
Although the MR element 8 is provided at the rear end portion in the above-described embodiment, it may be provided at the front end side. Alternatively, as shown in FIG. 7, the same effect can be obtained by providing the flux guides 11 on both the front end side and the rear end side. The position where the flux guide 11 is provided is a portion where the front electrode 6 and the rear electrode 7 that do not contribute to the output are provided. The portions where these electrodes 6 and 7 are provided are portions that do not contribute to output because they are equipotential to the MR element 8. Therefore, even if the flux guides 11 are provided in these portions, no adverse effect occurs. The flux guide 11 is MR
The element 8 is directly laminated on the element 8, and the front electrode 6 and the rear electrode 7 are laminated on the element 8.

The MR element 8 in the case where the flux guide 11 is not provided at either the front end portion or the rear end portion of the MR element 8.
As shown in FIG. 8, the signal magnetic field entering the area is the largest on the ABS surface side, and sharply decreases toward the rear part away from the ABS surface. In particular, it is remarkable in the case of Giant-MR film having small magnetic permeability. However, as shown in FIG. 9, when the flux guides 11 are provided at the front end and the rear end of the MR element 8, respectively, the signal magnetic field can be drawn to the rear end of the MR element 8.

In order to form the flux guides at the front and rear ends of the MR element 8, for example, as shown in FIG. 10A, the resist 15 is applied and patterned except the portion where the flux guide is to be formed. . Next, as shown in FIG. 3B, permalloy is entirely sputtered on the MR element 8. Then, the resist is removed. as a result,
As shown in FIG. 3C, the flux guides 11 are formed on the front and rear ends of the MR element 8.

[0054]

As is apparent from the above description, in the MR head of the present invention, when a metal artificial multilayer film which is a Giant-MR film is used for an MR element, the transparency of the metal artificial multilayer film is increased. The low magnetic susceptibility can be compensated by the flux guides provided on the front end side and / or the rear end side of the MR element, and the effect of drawing the signal magnetic flux entering from the front end side of the MR element to the rear end part is enhanced. You can In addition to this, by forming a groove in the lower shield magnetic body, it is possible to prevent the signal magnetic flux entering the MR element from leaking to the lower shield magnetic body. In addition, by providing the flux guide at a position that is in contact with the groove portion, it becomes a bias magnetic path and the bias efficiency can be improved.

Therefore, according to the MR head of the present invention, it is possible to fully exert the function of the Giant-MR film, that is, the high output is obtained in the original low magnetic field, and the reproduction output is achieved despite the narrow gap length. Can be achieved, and as a result, it becomes possible to cope with the miniaturization and high capacity of the hard disk drive device accompanying the high performance of computers and the like.

[Brief description of drawings]

FIG. 1 is a perspective view of a composite type magnetic head mounted in a hard disk drive.

FIG. 2 is an enlarged sectional view of an MR head.

FIG. 3 is an enlarged cross-sectional view of an MR element using a metal artificial multilayer film.

FIG. 4 is a characteristic diagram showing recording density characteristics.

FIG. 5 is an enlarged cross-sectional view showing another example of the MR head.

FIG. 6 is an enlarged cross-sectional view of an MR head in which a bias magnetic field applying member is provided above and below the MR element with the MR element interposed therebetween.

FIG. 7 is an enlarged cross-sectional view of an MR head in which a flux guide is provided at a front end portion and a rear end portion of the MR element.

FIG. 8 is a characteristic diagram showing changes in the amount of signal magnetic flux entering the MR element when the MR element is not provided with a flux guide.

FIG. 9 shows M when a flux guide is provided on the MR element.
It is a characteristic view which shows the signal magnetic flux amount change which enters into an R element.

FIG. 10 is a cross-sectional view showing a step of forming a flux guide.

FIG. 11 is an enlarged sectional view of a conventional MR head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Composite type magnetic head 2 Slider 3 ABS surface 4 Lower shield magnetic body 5 Upper shield magnetic body 6 Front electrode 7 Rear end electrode 8 MR element 8a Magnetic metal layer 8b Nonmagnetic layer 9 Bias magnetic field applying member 11 Flux guide 12 Groove part

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Junichi Sugawara 6-735 Kitashinagawa, Shinagawa-ku, Tokyo Sony Corporation

Claims (6)

[Claims] 1. A magnetoresistive effect element comprising a magnetic metal layer and a non-magnetic layer, which are arranged so that the longitudinal direction is perpendicular to a surface contacting with a magnetic recording medium and are alternately laminated, and the magnetic recording. With respect to the magnetoresistive effect element, a front end electrode laminated on the front end side of the magnetoresistive effect element facing the contact surface with the medium, a rear end electrode laminated on the rear end side of the magnetoresistive effect element, An upper shield magnetic body provided on the side where the front electrode and the rear electrode are formed, and a magnetic shield provided on the opposite side of the magnetoresistive element from the side where the front electrode and the rear electrode are formed. A lower shield magnetic body having a groove formed in a part of the surface facing the effect element, a bias magnetic field applying member for applying a bias magnetic field to the magnetoresistive effect element, and a front end side and a rear end side of the magnetoresistive effect element. Or high transparency provided on either side A magnetoresistive effect magnetic head comprising: a flux guide made of a magnetic material having magnetic susceptibility. 2. The magnetoresistive head according to claim 1, wherein the bias magnetic field applying member is provided in the groove of the lower shield magnetic body with an insulating layer interposed therebetween. 3. The magnetoresistive effect magnetic head according to claim 1, wherein the bias magnetic field applying member is provided between the magnetoresistive effect element and the upper shield magnetic body via an insulating layer. 4. The bias magnetic field applying member is provided in the groove portion of the lower shield magnetic body via an insulating layer, and is provided between the magnetoresistive element and the upper shield magnetic body via an insulating layer. The magnetoresistive effect magnetic head according to claim 1. 5. A tip end portion of a flux guide provided on the rear end side of the magnetoresistive effect element is provided closer to a contact surface with a magnetic recording medium than a rear end portion of a groove portion provided on the lower shield magnetic body. The magnetoresistive effect type magnetic head according to claim 1, 2, 3, or 4. 6. The magnetoresistive head according to claim 1, 2, 3 or 4, wherein the flux guide is permalloy.