JPH0724812U - Automatic transfer machine for clean room - Google Patents

Abstract

(57) [Abstract] [Purpose] An object is to provide an automatic transfer machine for a clean room, which can uniformly purify the atmosphere in the column without increasing the size. In an automatic transfer machine for a clean room, which is covered by a column 32 provided upright on a base and has a transfer section extending outside the column, a column back wall has a plurality of windows 32a to 32d. The window is covered with a filter 50 of the air purification unit.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an automatic transfer machine for a clean room.

[0002]

[Prior art]

 There may be a storage room in the factory for temporarily storing semi-finished products and finished products. FIG. 3 shows an example thereof, 10 is a storage cabinet, 20 is a shelf of the storage cabinet, 30 is an automatic transfer machine capable of traveling on the rail 31, and 40 is an article.

In this example, the article 40 stored in the storage opening of the storage box 10 is conveyed to the designated storage position of the designated shelf by the automatic transfer machine 30 and, conversely, the designated shelf. The article is taken out from the designated storage position and transported to the exit of the storage 10.

This type of article storage arranged in a clean room has an air space from the ceiling side of the article storage to the lattice floor in order to prevent dust and the like from accumulating in the article storage. As shown in FIG. 2, the automatic transfer machine 30 is provided with an air purifying unit 33 on the lower side of the column 32 so that dust and the like generated in the column 32 can be removed from the articles. Prevents it from flowing into the storage. In FIG. 2, reference numeral 34 is a base portion, and the hollow column 32 extends upward from the base portion 34 in the vertical direction. Reference numeral 35 is an elevating shaft of the elevating mechanism, 36 is an elevating part engaged and held by the elevating shaft 35, 37 is a telescopic / swivel arm extending from the elevating part 36 to the outside of the column 32, 37A is an article gripping part provided on the arm 37, 38 is a duct part externally attached to the column 32, 39A is a fan, and 39B is a filter.

[0005]

[Problems to be solved by the device]

 Conventionally, as described above, the automatic transfer machine 30 used in a clean room is entirely covered with a hollow column 32 and is provided with an air purification unit 33. However, this air purification unit 33 is located below the column 32. Since it is provided on the side, when the height of the column 32 becomes large, it is difficult to suck the air on the upper side of the column 32 to the lower side. However, there is a problem in that the size of the automatic transfer machine will be increased and that of the automatic transfer machine will be increased.

The present invention has been made to solve this problem, and an object thereof is to provide an automatic transfer machine for a clean room, which can uniformly purify the atmosphere in the column without causing an increase in size. And

[0007]

[Means for Solving the Problems]

 In order to achieve the above-mentioned object, the present invention is an automatic transfer machine for a clean room, which is covered with a column standing on a base and has a transfer section extending outside the column. And each window is covered by the filter of the air purification unit.

[0008]

[Action]

 In the present invention, since the air purification units are dispersedly arranged in the column, the atmosphere in the column can be uniformly purified in the vertical direction without causing an increase in size.

[0009]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings.

In FIG. 1, reference numerals 32 a to 32 d denote windows provided on the back wall of the column 32, which are covered from the inside of the column 32 with a filter 50 that constitutes an air purification unit. Reference numeral 51 is a fan that constitutes an air purification unit.

In this embodiment, the windows 32 a to 32 d are arranged in the height direction of the column 32 at regular intervals. Therefore, the air in the column 32 is sent out of the column through the filter 50 in the upper portion and the lower portion of the column in the same manner, and there is no possibility that dust is accumulated in the upper portion or the lower portion of the column.

In this embodiment, since the air purification units are arranged in a distributed manner in the column 32, the air purification unit need only be small, and it is not necessary to provide an externally attached duct portion 38, etc. It doesn't have to be shaped.

[0013]

[Effect of device]

 As described above, according to the present invention, since the air purification units are dispersedly arranged in the column, the atmosphere in the column can be uniformly purified in the vertical direction without causing an increase in size.

[Brief description of drawings]

FIG. 1 is a partial sectional side view showing an embodiment of the present invention.

FIG. 2 is a partial cross-sectional side view showing a conventional automatic transfer machine.

FIG. 3 is a diagram showing an example of an article storage.

[Explanation of symbols]

 32 column of automatic transfer machine 32a-32d window 50 filter 51 fan

Claims (1)

[Scope of utility model registration request] 1. An automatic transfer machine for a clean room, which is covered with a column erected on a base and has a transfer section extending outside the column, wherein a back wall of the column has a plurality of windows, and each window has a plurality of windows. Is an automatic transfer machine for a clean room, characterized in that is covered with the filter of the air purification unit.