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JPH0747223A - Electric field apparatus for gas oxidation - Google Patents

Electric field apparatus for gas oxidation

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Publication number
JPH0747223A
JPH0747223A JP5195689A JP19568993A JPH0747223A JP H0747223 A JPH0747223 A JP H0747223A JP 5195689 A JP5195689 A JP 5195689A JP 19568993 A JP19568993 A JP 19568993A JP H0747223 A JPH0747223 A JP H0747223A
Authority
JP
Japan
Prior art keywords
electrode
peripheral wall
dielectric
comb
projections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP5195689A
Other languages
Japanese (ja)
Inventor
Seiichi Nishida
聖一 西田
Masayoshi Murata
正義 村田
Osao Kudome
長生 久留
Eishiro Sasagawa
英四郎 笹川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP5195689A priority Critical patent/JPH0747223A/en
Publication of JPH0747223A publication Critical patent/JPH0747223A/en
Withdrawn legal-status Critical Current

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  • Plasma Technology (AREA)
  • Treating Waste Gases (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PURPOSE:To provide an electric field apparatus for gas oxidation which can generate a uniform plasma regardless of properties of a gas to be treated. CONSTITUTION:By arranging projections 1a and 3a and 1c and 3a of electrodes with the same shape in such a way that they are shifted and not neighbor with each other e.g. on the right side and the left side of a dielectric 2, creeping discharge is generated on the face of the opposite side to the face where the dielectric 2 is brought into contact with the projections 1a, 1c and 3a, namely, the surface of the dielectric with which the electrode is not brought into contact. At the same time, as electrodes 1a, 1d, 1b, 1c, 3a and 3b are arranged to the creeping discharge generating face and an electric voltage being the same polarity as that of the creeping discharge generating face is applied, a space between the creeping discharge generating face and the electrodes arranged so as to surround it, namely, the inside of a cylindrical gas flow path is turned to a glow discharge plasma condition.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はO2 を酸化してO3 を製
造し、脱臭や燃焼効率改善を行う装置、またはNOx
SOx を酸化して脱硝・脱硫を行う排ガス処理装置など
に適用される気体酸化用電界装置に関する。
FIELD OF THE INVENTION The present invention relates to an apparatus for oxidizing O 2 to produce O 3 for deodorization or improving combustion efficiency, or an exhaust gas treatment apparatus for oxidizing NO x or SO x for denitration / desulfurization. The present invention relates to an electric field device for gas oxidation applied to.

【0002】[0002]

【従来の技術】図7及び図8は従来から用いられている
気体酸化用電界装置の説明図である。この装置により例
えばガス焚きボイラの排ガス中のNOx を処理する場合
を例にとり説明する。図7において101は従来の気体
酸化用電界装置の反応容器であり、正方形の断面を有す
る通路が飛行に隣りあって配設されており、アルミナ磁
器,窒化珪素磁器,ジルコニア磁器など絶縁性のセラミ
ックスからなるハニカム構造体を形成する。このハニカ
ム構造体の一つの管状通路について説明すると、これは
102,103,104,105の四つの連続した内壁
により構成され、展開すれば図8のようになる。また内
壁102,103,104,105は境界線106,1
07,108,109によって90°に折り曲げられた
構造をなす。内壁102の一端110に電源127に連
なる端子111,112と続いてタングステンなどの導
電膜からなるコロナ放電極113,114が互いに等間
隔かつ平行に内壁102,103,104,105の表
面に連続して設置されている。
2. Description of the Related Art FIGS. 7 and 8 are explanatory views of a conventional electric field device for gas oxidation. It will be described taking as an example a case of processing a NO x in the exhaust gas, for example gas-fired boiler by the device. In FIG. 7, 101 is a reaction vessel of a conventional gas oxidation electric field apparatus, in which passages having a square cross section are arranged adjacent to each other in flight, and insulating ceramics such as alumina porcelain, silicon nitride porcelain, and zirconia porcelain. To form a honeycomb structure. Explaining one tubular passage of this honeycomb structure, it is constituted by four continuous inner walls 102, 103, 104 and 105, and when expanded, it becomes as shown in FIG. Further, the inner walls 102, 103, 104, 105 are border lines 106, 1
The structure is such that it is bent 90 ° by 07, 108, and 109. At one end 110 of the inner wall 102, terminals 111 and 112 connected to a power source 127, and subsequently corona discharge electrodes 113 and 114 made of a conductive film such as tungsten are connected to the surfaces of the inner walls 102, 103, 104 and 105 in parallel at equal intervals. Have been installed.

【0003】このような構成の反応容器101の内部に
ガス焚きボイラの排ガスを導入しつつ上記コロナ放電極
113と114の間にパルス巾が1ns〜1000ns程度
のパルス高電圧を印加するとその内壁表面近傍にはパル
スコロナ放電を発生して排ガスをプラズマ化する。そう
するとプラズマ化された排ガス中では下記化学反応が起
こる。 2O2 → O3 + 1/2O2 NO+O3 → NO2 +O2 上記化学反応式は排ガス中に含まれるO2 分子がプラズ
マによりO3 になり、さらにO3 が有害成分であるNO
を酸化させてNO2 にすることを示す。ここで生成され
たNO2 はアルカリ洗浄による還元や吸着剤で吸着する
ことにより容易に除去または無害化処理することができ
る。したがって、コロナ放電極113,114を管状通
路内壁102,103,104,105に設けることが
できるので立体的な構造となっても大きな場所を要せず
小型で能力の大きい気体酸化用電界装置として脱臭や燃
焼を伴う各種装置の燃焼効率改善、または各種燃焼を伴
う装置から排出される排ガス中のNOx やSOx を除去
する排ガス処理装置等に適用されつつある。
When the pulsed high voltage having a pulse width of about 1 ns to 1000 ns is applied between the corona discharge electrodes 113 and 114 while introducing the exhaust gas of the gas-fired boiler into the reaction vessel 101 having such a structure, the inner wall surface of the corona discharge electrodes 113 and 114 is applied. A pulse corona discharge is generated in the vicinity to turn the exhaust gas into plasma. Then, the following chemical reactions occur in the exhaust gas turned into plasma. 2O 2 → O 3 + 1 / 2O 2 NO + O 3 → NO 2 + O 2 In the above chemical reaction formula, O 2 molecules contained in the exhaust gas are converted into O 3 by plasma, and O 3 is NO which is a harmful component.
Is oxidized to NO 2 . The NO 2 generated here can be easily removed or detoxified by reduction by alkali cleaning or adsorption with an adsorbent. Therefore, since the corona discharge electrodes 113, 114 can be provided on the inner walls 102, 103, 104, 105 of the tubular passages, they do not require a large space even if they have a three-dimensional structure, and they are small and have a large capacity as an electric field apparatus for gas oxidation. It is being applied to an exhaust gas treatment device for improving the combustion efficiency of various devices involving deodorization and combustion, or removing NO x and SO x in exhaust gas discharged from devices involving various combustion.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、従来の
装置では下記のような欠点があり、実用化が非常に困難
であるという問題点があった。 (1)電極と電極の間には空間のみ存在する構造なの
で、例えばガス中の水分が多い場合や管状通路内壁10
2,103,104,105に水滴がある場合には電極
間の絶縁強度が極端に低下し、アーク放電が発生してプ
ラズマが不均一となり処理できなくなることがある。し
たがって被処理ガスの性状(水分,油分など)の影響を
受けやすい。 (2)ハニカム構造体の管状通路内壁102,103,
104,105には放電電極としてタングステンなどの
導電性の膜が使用されているが、その成膜や給電などの
コストが非常に高い。 (3)誘電体としてハニカム構造体のセラミックスを使
用しているが、その構造上メンテナンスが困難であり、
万一ハニカム構造体の一部が破損した場合にはそれを全
部交換しなければならないので、保守コストが非常に高
い。
However, the conventional device has the following drawbacks and is very difficult to put into practical use. (1) Since there is only a space between the electrodes, for example, when there is a large amount of water in the gas or the inner wall of the tubular passage 10
If there are water droplets at 2, 103, 104 and 105, the insulation strength between the electrodes may be extremely reduced, arc discharge may occur, and the plasma may become non-uniform and the treatment may become impossible. Therefore, it is easily affected by the properties of the gas to be treated (water content, oil content, etc.). (2) Tubular passage inner walls 102, 103 of the honeycomb structure,
A conductive film of tungsten or the like is used as a discharge electrode for 104 and 105, but the cost of film formation and power supply is very high. (3) Honeycomb structure ceramics is used as the dielectric, but its structure makes maintenance difficult,
If a part of the honeycomb structure should be damaged, it must be replaced and the maintenance cost is very high.

【0005】本発明は、上述の問題に鑑み、従来の如き
電極となるラインを被着することなく誘電体の一部が破
損しても全部の交換をする必要がない均一のプラズマを
発生する気体酸化用電界装置の提供を目的とする。
In view of the above-mentioned problems, the present invention generates a uniform plasma which does not need to be completely replaced even if a part of the dielectric is damaged without depositing a line as an electrode as in the prior art. An object is to provide an electric field device for gas oxidation.

【0006】[0006]

【課題を解決するための手段】上述の目的を達成する本
発明の構成は、(1)角筒状の外枠の左右側壁より内部
に向って上下に複数段の棚状突起を有する第1電極と、
上記外枠の内部を左右複数個に仕切る隔壁より左右両側
に上記第1電極の棚状突起と対応する複数段の棚状突起
を有する第1櫛歯状電極と、平壁の左右両側に上記第1
電極及び第1櫛歯状電極それぞれの棚状突起と互い違い
にずれた位置にあって複数段の棚状突起を有する第2櫛
歯状電極と、上記第1電極と第2櫛歯状電極とのそれぞ
れの棚状突起に接触してその間に位置し及び上記第1櫛
歯状電極と第2櫛歯状電極とのそれぞれの棚状突起に接
触してその間に位置する誘電体とを有し、上記第1電極
及び第1櫛歯状電極と第2櫛歯状電極との間に異なる極
性の電圧を印加したことを特徴とし、また、(2)円筒
状の外枠の内周壁より内部中心に向って複数個の放射状
突起を有する第1電極と、この第1電極の放射状突起の
先端内部に外周壁が接触する円筒状の第1誘電体と、こ
の第1誘電体の内側にあって円筒状で外周壁及び内周壁
双方に放射状突起を有し外周壁側の隣り合う放射状突起
間の円弧距離を等しく採ると共に上記外周壁側の放射状
突起とその外側の電極の放射状突起とを互い違いにずれ
た位置関係とし内周壁側の隣り合う放射状突起間の円弧
距離を等しく採り更には上記外周壁の放射状突起先端が
円筒状誘電体の内周壁と接触する1段又は複数段の第2
電極と、この第2電極の内周壁の放射状突起に外周壁が
接触する円筒状の第2誘電体と、上記第2誘電体の内周
壁に放射状突起の先端が接触しこの放射状突起の基端を
全てひとまとめにし隣り合う放射状突起の円弧距離を等
しくしかもこの放射状突起と上記第2電極の内周壁の放
射状突起とを互い違いにずれた位置関係におく第3電極
とを有し、上記誘電体を挾んで隣り合う電極には異なっ
た極性を印加するようにしたことを特徴とする。
Means for Solving the Problems The structure of the present invention which achieves the above-mentioned object is as follows: (1) A first step having a plurality of shelves protruding inward from the left and right side walls of a rectangular tubular outer frame toward the inside. Electrodes,
A first comb tooth-shaped electrode having a plurality of steps of shelving protrusions corresponding to the shelving protrusions of the first electrode on both left and right sides of a partition wall that divides the inside of the outer frame into a plurality of left and right sides, and the first and second left and right sides of a flat wall as described above. First
A second comb-tooth-shaped electrode having a plurality of stages of shelf-like protrusions that are alternately offset from the shelf-like protrusions of the electrode and the first comb-tooth-like electrode; and the first electrode and the second comb-tooth-like electrode Of the first comb-teeth-shaped electrode and the second comb-teeth-shaped electrode that are in contact with and are located between the respective shelves of A voltage having a different polarity is applied between the first electrode and the first comb-teeth-shaped electrode and the second comb-teeth-shaped electrode, and (2) inside the inner peripheral wall of the cylindrical outer frame. A first electrode having a plurality of radial projections toward the center, a cylindrical first dielectric body whose outer peripheral wall contacts the tip of the radial projections of the first electrode, and a first dielectric body inside the first dielectric body. It is cylindrical and has radial protrusions on both the outer and inner peripheral walls, and the arc distance between adjacent radial protrusions on the outer peripheral wall side is equal. In addition, the radial projections on the outer peripheral wall side and the radial projections on the outer side electrode are staggered so that the arc distances between the adjacent radial projections on the inner peripheral wall side are equal, and the radial projections on the outer peripheral wall are also taken. One step or two or more steps of which the tip contacts the inner peripheral wall of the cylindrical dielectric
The electrode, the cylindrical second dielectric body whose outer peripheral wall contacts the radial projection on the inner peripheral wall of the second electrode, and the distal end of the radial projection contacting the inner peripheral wall of the second dielectric body, and the base end of the radial projection. All together, the adjacent radial projections have the same circular arc distance, and the third projection has a third electrode in a positional relationship in which the radial projections and the radial projections on the inner peripheral wall of the second electrode are offset from each other. It is characterized in that different polarities are applied to adjacent electrodes sandwiched therebetween.

【0007】[0007]

【作用】誘電体の表裏に位置ずれした棚状突起や放射状
突起を備えているため、突起が接触する誘電体表面のそ
の裏面側において沿面放電が発生されると共に、この沿
面放電発生面をとり囲むように突起や壁が備えられて沿
面放電発生面と同極性の電圧が印加されるため、ガス通
路内部はグロー放電プラズマ状態となる。すなわち、誘
電体の両側に異なる極性の電圧を発生させ誘電体表面の
沿面放電によりグロー放電プラズマを誘発させるため、
放電開始電圧は誘電体の厚さや電極間距離に支配され、
電極間は被処理ガスの性状の影響を受けにくく、また誘
電体の取り外しが容易となってメインテナンスが簡単で
ある。しかも電極は膜でなく製造が容易でコストが大幅
に低い。
[Function] Since the front surface and the back surface of the dielectric body are provided with misaligned shelf-like projections and radial projections, a creeping discharge is generated on the back surface side of the dielectric surface with which the projection is in contact, and the surface where the creeping discharge is generated is removed. Since a protrusion and a wall are provided so as to surround the same and a voltage having the same polarity as that of the creeping discharge generating surface is applied, the inside of the gas passage is in a glow discharge plasma state. That is, in order to induce glow discharge plasma by creeping discharge on the dielectric surface by generating voltages of different polarities on both sides of the dielectric,
The firing voltage is controlled by the thickness of the dielectric and the distance between the electrodes,
The space between the electrodes is unlikely to be affected by the properties of the gas to be processed, and the dielectric can be easily removed, which facilitates maintenance. Moreover, the electrode is not a film and is easy to manufacture and the cost is significantly low.

【0008】[0008]

【実施例】ここで、本発明の実施例を図1〜図3を参照
して説明する。図1は第1実施例の電界装置の外観図、
図2は電極構造の正面図、図3は電極構造の側断面図で
ある。角筒状体である外枠1の左右両側壁1dにはその
内部に上下にわたり複数段の棚状突起1aが設けられて
いる。更に、外枠1と一体で左右中央部に隔壁1bを有
し、この隔壁1bの左右両側に上記側壁1dの棚状突起
1aと対応する複数段の棚状突起1cが設けられてい
る。そして、この外枠1及び棚状突起1aが第1電極を
構成し、隔壁1bと棚状突起1cが第1櫛歯状電極を構
成して、例えばアルミニウムやステンレス鋼等の導体で
形成される。他方、第1電極と第1櫛歯状電極との間に
は、第2櫛歯状電極が備えられる。この第2櫛歯状電極
は外枠1の側壁1dや隔壁1bと平行な平壁3bとこの
平壁3bに上下に複数段形成された棚状突起3aとから
なり、この棚状突起3aは、棚状突起1d,1cの上下
位置とずれた位置となるように形成されている。そし
て、第1電極と第2櫛歯状電極との双方の棚状突起1
d,3aにそれぞれに接触するように、例えばガラスや
セラミックスなどの絶縁材料からなる誘電体2が仕切り
となるよう配置され、また第1櫛歯状電極と第2櫛歯状
電極との双方の棚状突起1c,3aそれぞれ接触するよ
うに同様の誘電体2が配置されている。外枠1の上下内
側であって、第2櫛歯状電極を上下に固定しかつ誘電体
2を上下に固定するスペーサである絶縁体4が配置され
例えばセラミックスやガラスなどの絶縁材料からなる。
電源5は、例えば周波数数十Hz〜数十KHz で電圧数KV〜
数十KVの正弦波やパルス波などの交番電圧が第1電極、
第1櫛歯状電極と第2櫛歯状電極との間に印加され、プ
ラズマ発生用の電力を供給する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will now be described with reference to FIGS. FIG. 1 is an external view of the electric field device of the first embodiment,
2 is a front view of the electrode structure, and FIG. 3 is a side sectional view of the electrode structure. Inside the left and right side walls 1d of the outer frame 1 which is a rectangular tube-shaped body, a plurality of stages of shelf-like projections 1a are provided vertically inside. Further, a partition wall 1b is integrally formed with the outer frame 1 at the central portion on the left and right, and a plurality of stages of shelf-shaped projections 1c corresponding to the shelf-shaped projections 1a of the side wall 1d are provided on both left and right sides of the partition wall 1b. The outer frame 1 and the shelf-like protrusions 1a form a first electrode, and the partition walls 1b and the shelf-like protrusions 1c form a first comb-tooth-like electrode, which are made of a conductor such as aluminum or stainless steel. . On the other hand, a second comb tooth-shaped electrode is provided between the first electrode and the first comb tooth-shaped electrode. The second comb-shaped electrode is composed of a flat wall 3b parallel to the side wall 1d and the partition wall 1b of the outer frame 1 and a shelf-like projection 3a formed on the flat wall 3b in a plurality of vertical steps. It is formed so as to be at a position deviated from the vertical position of the shelf-shaped projections 1d and 1c. Then, the ledges 1 of both the first electrode and the second comb-shaped electrode are formed.
A dielectric 2 made of an insulating material such as glass or ceramics is arranged as a partition so as to be in contact with each of d and 3a, and both the first comb-shaped electrode and the second comb-shaped electrode are arranged. Similar dielectrics 2 are arranged so that the shelves 1c and 3a are in contact with each other. An insulator 4, which is a spacer for vertically fixing the second comb-teeth-shaped electrodes and vertically fixing the dielectric 2 is arranged inside the outer frame 1 and is made of an insulating material such as ceramics or glass.
The power supply 5 has a frequency of several tens of Hz to several tens of KHz and a voltage of several KV to
Alternating voltage such as sine wave or pulse wave of several tens of KV is the first electrode,
It is applied between the first comb-teeth electrode and the second comb-teeth electrode to supply electric power for plasma generation.

【0009】さて、第1電極及び第1櫛歯状電極の内部
に例えばガス焚きボイラの排ガスを導入しつつ、第1電
極、第1櫛歯状電極と第2櫛歯状電極との間に電源5か
らプラズマ発生用の電力を供給すると、それらの電極と
誘電体2との間の空間すなわち管状通路内部には図2
(b)に示す縞模様のようなグロー放電プラズマGが発
生する。このプラズマは第1電極や第1櫛歯状電極と第
2櫛歯状電極の棚状突起1a,1c,3aの先端と誘電
体2との接触面近傍から放電を開始し、これら電極と誘
電体2とを内壁とする管状通路内の空間のガス全体に放
電が誘発さる。
While introducing, for example, the exhaust gas of the gas-fired boiler into the inside of the first electrode and the first comb-teeth-shaped electrode, the first electrode, the first comb-teeth-shaped electrode and the second comb-teeth-shaped electrode are separated from each other. When electric power for plasma generation is supplied from the power supply 5, the space between the electrodes and the dielectric 2, that is, the inside of the tubular passage is shown in FIG.
Glow discharge plasma G having a striped pattern shown in (b) is generated. This plasma starts discharge from the vicinity of the contact surface between the dielectric 2 and the tips of the first protrusions 1a, 1c, 3a of the first comb-shaped electrode and the second comb-shaped electrode and the second comb-shaped electrode, and these electrodes and the dielectric Electric discharge is induced in the entire gas in the space inside the tubular passage having the body 2 as the inner wall.

【0010】したがって、第1電極、第1櫛歯状電極の
内部導入されたガスは、その内部でほぼ均一なプラズマ
状態となり、排ガス中のNOx ,N2 ,及びO2 などの
ガス分子は励起及び解離させられて化学的に活性な状態
となる。その結果、以下に述べる反応がひき起こされ
る。 2O2 → O3 + 1/2O2 NO+O3 → NO2 +O2 上記の反応式は第1電極、第1櫛歯状電極に導入された
NOx の主成分であるNOがNO2 に酸化処理されるこ
とを示す。通常、ガス焚きボイラの排ガス処理を行う場
合、排ガス浄化処理の対象となるものはNOx である
が、その主成分はNOである。NOは反応性に乏しくそ
の処理が難しいが、上述のようにNO2 に酸化するとア
ルカリ洗浄による還元や吸着剤により吸着剤する方法な
どにより容易に無害化処理できる。また、誘電体を極性
の異なる電極間に設置し、その異なる極性の電極が誘電
体をはさんで隣り合わないようにずらして配設されるの
で、誘電体表面から放電開始し、誘電体内部での電界集
中も少い。したがって放電電極間は誘電体により常に絶
縁されているので、ガス中の水分や油分などの影響を受
けるとなく安定したプラズマ状態を維持することができ
る。さらに管状通路内壁の四つの面は、一つの面が誘電
体、たの三面が同電位の導体で囲まれる構造となってお
り、電界強度分布を平坦化してプラズマを均一にする作
用がある。また、本実施例の電界装置を多数並列に接続
したり、あるいは、棚状突起及び誘電体を縦方向に延長
して管状通路の数を増やすことにより処理量を増大させ
ることができるので大容量化も容易である。しかも電極
構造は金属製の櫛歯状電極の内部に誘電体を差込む形式
の簡単なものであり、誘電体のメンテナンスが容易であ
り、製造コストも低い。
Therefore, the gas introduced into the first electrode and the first comb-teeth electrode becomes a substantially uniform plasma state inside, and gas molecules such as NO x , N 2 and O 2 in the exhaust gas. It is excited and dissociated to be in a chemically active state. As a result, the reaction described below is caused. 2O 2 → O 3 + 1 / 2O 2 NO + O 3 → NO 2 + O 2 In the above reaction formula, NO, which is the main component of NO x introduced into the first electrode and the first comb-shaped electrode, is oxidized into NO 2. Indicates that it will be done. Usually, when the exhaust gas treatment of a gas-fired boiler is performed, the target of the exhaust gas purification treatment is NO x , but its main component is NO. NO has poor reactivity and is difficult to treat, but as described above, when it is oxidized to NO 2 , it can be easily detoxified by a method such as reduction by alkali washing or an adsorbent with an adsorbent. In addition, the dielectric is placed between electrodes of different polarities, and the electrodes of different polarities are arranged so as to be offset so as not to be adjacent to each other across the dielectric. There is little electric field concentration. Therefore, the discharge electrodes are always insulated from each other by the dielectric, so that a stable plasma state can be maintained without being affected by moisture or oil in the gas. Further, the four surfaces of the inner wall of the tubular passage have a structure in which one surface is surrounded by a dielectric and the other three surfaces are surrounded by conductors of the same potential, which has the effect of flattening the electric field intensity distribution and making the plasma uniform. In addition, a large capacity can be achieved by connecting a large number of electric field devices of this embodiment in parallel, or by extending the shelf-like projections and the dielectrics in the vertical direction to increase the number of tubular passages, thereby increasing the throughput. It is easy to convert. Moreover, the electrode structure is a simple one in which a dielectric is inserted inside a comb-shaped electrode made of metal, maintenance of the dielectric is easy, and the manufacturing cost is low.

【0011】本発明に係る第2実施例を図4,図5及び
図6により説明する。図4は第2実施例の電界装置を示
す図である。図5は電極構造の正面図で開口断面を示す
図、図6は電極構造の側断面を示すものである。第1の
電極は、円筒状の外壁11bの内側に周方向等間隔で放
射状突起11aが複数突出する構造を有する。第1の誘
電体21は、円筒状をなし、隔壁にもなっていて、その
外側には第1の電極の放射状突起11aの先端が接触し
ている。第2の電極は、円筒状の隔壁12bの外側には
周方向等間隔で放射状突起12aが複数突出していて、
また隔壁12bの内側にも周方向等間隔で放射状突起1
2cが複数突出している。この複数の放射状突起12c
はその内側の第2の誘電体22の外側に接触している。
なお、隔壁12bの外側に突出した放射状突起12a及
びその内側に突出した放射状突起12cにおいて、それ
ぞれの隣り合う突起、例えばある突起12aからその隣
りの突起12aまでの距離はそれらの先端から先端迄の
円弧距離が等しくなっている。そのため、隔壁12bの
外側と内側において突起12aの数よりも突起12cの
数が少なくなっている。第2の誘電体22は、円筒状を
なし、隔壁にもなっていて、その外側には第2の電極の
放射状突起12cが複数接触しており、隔壁の内側には
第3の電極の複数の突起13aが接触している。第3の
電極は、複数の放射状突起13aを一方の端部で接合
し、他方の端すなわち先端は第2の誘電体22の内側に
接触しており、それらの突起13aの先端どうしの間隔
はそれらの円弧距離が等しくなるよう配置されている。
また、第1の誘電体21及び第2の誘電体22をはさむ
突起(例えば11aと12a,12cと13a)はそれ
ぞれが隣り合わないようずれして配置されている。さら
に、各放射状突起の配置は、隣り合う平板の先端どうし
の円弧距離がほぼ一定になっているし、各放射状突起の
突出長さも一定である。こうして、図5のように多数の
扇状の開口断面が形成される。なお、第1,第2,及び
第3の電極は、アルミニウムやステンレス鋼などの金属
材料(導体)で形成され、第1及び第2の誘電体(21
及び22)はガラスやセラミックスなどの絶縁材料で形
成される。5は電源であり、その一方の端子には第1の
電極及び第3の電極が接続され、他方の端子には第2の
電極が接続されている。
A second embodiment according to the present invention will be described with reference to FIGS. 4, 5 and 6. FIG. 4 is a view showing the electric field device of the second embodiment. FIG. 5 is a front view of the electrode structure showing a cross section of the opening, and FIG. 6 is a side view of the electrode structure. The first electrode has a structure in which a plurality of radial projections 11a are projected inside the cylindrical outer wall 11b at equal intervals in the circumferential direction. The first dielectric 21 has a cylindrical shape and also serves as a partition wall, and the tip of the radial projection 11a of the first electrode is in contact with the outside thereof. The second electrode has a plurality of radial projections 12a protruding at equal intervals in the circumferential direction on the outside of the cylindrical partition wall 12b.
The radial projections 1 are also provided on the inner side of the partition wall 12b at equal intervals in the circumferential direction.
A plurality of 2c are projected. The plurality of radial protrusions 12c
Is in contact with the outside of the second dielectric 22 inside thereof.
In addition, in the radial projections 12a projecting outside of the partition wall 12b and the radial projections 12c projecting inside thereof, the distance between each adjacent projection, for example, a certain projection 12a and the adjacent projection 12a is from their tip to tip. The arc distances are equal. Therefore, the number of the protrusions 12c is smaller than the number of the protrusions 12a on the outer side and the inner side of the partition wall 12b. The second dielectric 22 has a cylindrical shape and also serves as a partition, a plurality of radial projections 12c of the second electrode are in contact with the outside thereof, and a plurality of the third electrodes are inside the partition. Projections 13a are in contact with each other. The third electrode joins the plurality of radial protrusions 13a at one end, and the other end, that is, the tip is in contact with the inside of the second dielectric 22, and the distance between the tips of the protrusions 13a is small. They are arranged so that their arc distances are equal.
Further, the projections (for example, 11a and 12a, 12c and 13a) sandwiching the first dielectric body 21 and the second dielectric body 22 are arranged so as not to be adjacent to each other. Furthermore, regarding the arrangement of the radial protrusions, the arc distance between the tips of the adjacent flat plates is substantially constant, and the protruding length of each radial protrusion is also constant. Thus, a large number of fan-shaped opening cross sections are formed as shown in FIG. The first, second, and third electrodes are formed of a metal material (conductor) such as aluminum or stainless steel, and the first and second dielectrics (21
And 22) are formed of an insulating material such as glass or ceramics. Reference numeral 5 denotes a power source, one terminal of which is connected to the first electrode and the third electrode, and the other terminal of which is connected to the second electrode.

【0012】この円筒状の電極内部に例えばガス焚きボ
イラの排ガスを導入しつつ、電源5から上記電極に電力
を供給すると、扇状の断面をした管状通路内部にはグロ
ー放電プラズマが発生し、その結果以下に述べる反応が
ひき起こされる。 2O2 → O3 + 1/2O2 NO+O3 → NO2 +O2 上記の反応式は第1の電極に導入されたNOx の主成分
であるNOがNO2 に酸化処理されることを示す。な
お、第2実施例は前記第1実施例の平板状の誘電体を円
筒状に置き換えたものであるが、プラズマ発生の原理は
第1及び第2実施例ともに共通しており、NOx 酸化処
理の性能は同等である。本実施例ではNOx 酸化処理に
ついて説明したが、O3 生成やCOのCO2 への酸化処
理等にも適用可能である。なお、第1,第2実施例共、
さらに多段に形成できる。
When electric power is supplied from the power source 5 to the electrode while introducing the exhaust gas of the gas-fired boiler into the cylindrical electrode, glow discharge plasma is generated in the tubular passage having a fan-shaped cross section, Results The following reactions are triggered. 2O 2 → O 3 + 1 / 2O 2 NO + O 3 → NO 2 + O 2 The above reaction formula shows that NO, which is the main component of NO x introduced into the first electrode, is oxidized to NO 2 . In the second embodiment, the flat plate-shaped dielectric of the first embodiment is replaced by a cylindrical shape, but the principle of plasma generation is common to both the first and second embodiments, and NO x oxidation is performed. The processing performance is comparable. In the present embodiment, the NO x oxidation treatment has been described, but it can also be applied to O 3 generation, CO oxidation to CO 2, and the like. In addition, in both the first and second embodiments,
Further, it can be formed in multiple stages.

【0013】[0013]

【発明の効果】以上説明したように本発明によれば、コ
ンパクトかつ低コストで気体の酸化処理装置を実現する
ことができる。しかもメンテナンスが簡単で大容量化も
容易であるので、O2 を酸化してO3 を製造し脱臭や燃
焼効率改善を行う装置やNOx,SOx ,COなどを酸
化して脱硝・脱硫等の排ガス処理を行う装置などの気体
酸化用電界装置として産業上の価値が著しく高い。
As described above, according to the present invention, it is possible to realize a compact and low-cost gas oxidation treatment apparatus. Moreover, since maintenance is easy and the capacity can be easily increased, a device for oxidizing O 2 to produce O 3 for deodorization and improving combustion efficiency, and a device for NO x , SO x , CO, etc. for denitration / desulfurization, etc. The industrial value is extremely high as an electric field device for gas oxidation such as a device for treating exhaust gas.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例の斜視図。FIG. 1 is a perspective view of a first embodiment of the present invention.

【図2】第1実施例の正面図。FIG. 2 is a front view of the first embodiment.

【図3】図2のIII-III 断面図。3 is a sectional view taken along line III-III in FIG.

【図4】第2実施例の斜視図。FIG. 4 is a perspective view of a second embodiment.

【図5】第2実施例の正面図。FIG. 5 is a front view of the second embodiment.

【図6】図5のVI−VI断面図。6 is a sectional view taken along line VI-VI of FIG.

【図7】従来例の斜視図。FIG. 7 is a perspective view of a conventional example.

【図8】図7の展開図。FIG. 8 is a development view of FIG. 7.

【符号の説明】[Explanation of symbols]

a,1c,3a 棚状突起 1b 隔壁 1d 側壁 2 誘電体 3b 平壁 5 電源 11a,12a,12c,13a 放射状突起 11b 外壁 12b 隔壁 21,22 誘電体 a, 1c, 3a Shelf-like projection 1b Partition wall 1d Side wall 2 Dielectric material 3b Flat wall 5 Power supply 11a, 12a, 12c, 13a Radial projection 11b Outer wall 12b Partition wall 21,22 Dielectric material

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 B01D 53/74 B01J 19/00 A 8822−4G 19/08 Z 8822−4G C01B 13/11 A H05H 1/48 9014−2G (72)発明者 笹川 英四郎 長崎県長崎市飽の浦町1番1号 三菱重工 業株式会社長崎造船所内─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical display location B01D 53/74 B01J 19/00 A 8822-4G 19/08 Z 8822-4G C01B 13/11 A H05H 1/48 9014-2G (72) Inventor Eishiro Sasakawa 1-1 1-1 Atsunoura-machi, Nagasaki-shi, Nagasaki Mitsubishi Heavy Industries, Ltd. Nagasaki Shipyard Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 角筒状の外枠の左右側壁より内部に向っ
て上下に複数段の棚状突起を有する第1電極と、 上記外枠の内部を左右複数個に仕切る隔壁より左右両側
に上記第1電極の棚状突起と対応する複数段の棚状突起
を有する第1櫛歯状電極と、 平壁の左右両側に上記第1電極及び第1櫛歯状電極それ
ぞれの棚状突起と互い違いにずれた位置にあって複数段
の棚状突起を有する第2櫛歯状電極と、 上記第1電極と第2櫛歯状電極とのそれぞれの棚状突起
に接触してその間に位置し及び上記第1櫛歯状電極と第
2櫛歯状電極とのそれぞれの棚状突起に接触してその間
に位置する誘電体とを有し、 上記第1電極及び第1櫛歯状電極と第2櫛歯状電極との
間に異なる極性の電圧を印加した気体酸化用電界装置。
1. A first electrode having a plurality of shelves protruding vertically inward from the left and right side walls of a rectangular tubular outer frame, and on both left and right sides of a partition wall that divides the outer frame into a plurality of left and right sides. A first comb-tooth-shaped electrode having a plurality of stages of shelf-shaped protrusions corresponding to the shelf-shaped protrusions of the first electrode, and shelf-shaped protrusions of the first electrode and the first comb-tooth-shaped electrode on both left and right sides of a flat wall. The second comb-teeth-shaped electrode having a plurality of stages of shelf-like projections that are staggered in a staggered manner and the shelf-like projections of the first electrode and the second comb-teeth-like electrode that are in contact with each other And a dielectric that is in contact with and is located between the respective shelf-like protrusions of the first comb-tooth-shaped electrode and the second comb-tooth-shaped electrode. An electric field device for gas oxidation in which voltages of different polarities are applied between two comb-teeth electrodes.
【請求項2】 円筒状の外枠の内周壁より内部中心に向
って複数個の放射状突起を有する第1電極と、 この第1電極の放射状突起の先端内部に外周壁が接触す
る円筒状の第1誘電体と、 この第1誘電体の内側にあって円筒状で外周壁及び内周
壁双方に放射状突起を有し外周壁側の隣り合う放射状突
起間の円弧距離を等しく採ると共に上記外周壁側の放射
状突起とその外側の電極の放射状突起とを互い違いにず
れた位置関係とし内周壁側の隣り合う放射状突起間の円
弧距離を等しく採り更には上記外周壁の放射状突起先端
が円筒状誘電体の内周壁と接触する1段又は複数段の第
2電極と、 この第2電極の内周壁の放射状突起に外周壁が接触する
円筒状の第2誘電体と、 上記第2誘電体の内周壁に放射状突起の先端が接触しこ
の放射状突起の基端を全てひとまとめにし隣り合う放射
状突起の円弧距離を等しくしかもこの放射状突起と上記
第2電極の内周壁の放射状突起とを互い違いにずれた位
置関係におく第3電極とを有し、 上記誘電体を挾んで隣り合う電極には異なった極性を印
加するようにした気体酸化用電極。
2. A first electrode having a plurality of radial projections from the inner peripheral wall of a cylindrical outer frame toward the inner center, and a cylindrical outer wall contacting the inside of the tips of the radial projections of the first electrode. The first dielectric and a cylindrical inner cylindrical inside of the first dielectric having radial projections on both the outer peripheral wall and the inner peripheral wall, the arc distance between adjacent radial projections on the outer peripheral wall side being equal, and the outer peripheral wall Side radial projections and the radial projections of the electrodes on the outer side thereof are staggered with each other, and the arc distances between the adjacent radial projections on the inner peripheral wall side are equal, and the tip of the radial projection on the outer peripheral wall is a cylindrical dielectric. The one or more steps of the second electrode in contact with the inner peripheral wall of the second electrode, the cylindrical second dielectric having the outer peripheral wall in contact with the radial projections of the inner peripheral wall of the second electrode, and the inner peripheral wall of the second dielectric. The tip of the radial projection comes into contact with the base of this radial projection. All together, the adjacent radial projections have the same circular arc distance, and the radial projections and the third projections are arranged so that the radial projections on the inner peripheral wall of the second electrode are offset from each other. An electrode for gas oxidation in which different polarities are applied to adjacent electrodes.
JP5195689A 1993-08-06 1993-08-06 Electric field apparatus for gas oxidation Withdrawn JPH0747223A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5195689A JPH0747223A (en) 1993-08-06 1993-08-06 Electric field apparatus for gas oxidation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5195689A JPH0747223A (en) 1993-08-06 1993-08-06 Electric field apparatus for gas oxidation

Publications (1)

Publication Number Publication Date
JPH0747223A true JPH0747223A (en) 1995-02-21

Family

ID=16345364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5195689A Withdrawn JPH0747223A (en) 1993-08-06 1993-08-06 Electric field apparatus for gas oxidation

Country Status (1)

Country Link
JP (1) JPH0747223A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999047242A1 (en) * 1998-03-18 1999-09-23 Scientific Research Center 'amt' Of Central Research Institute For Materials Method and device for cleaning combustion exhaust gas using a plasma
WO2001019515A1 (en) * 1999-09-09 2001-03-22 Hitachi Zosen Corporation Catalyst with discharge electrode or carrier
WO2004072445A1 (en) * 2003-02-12 2004-08-26 Ngk Insulators, Ltd. Plasma reaction vessel, and method of producing the same
WO2005001250A1 (en) * 2003-06-27 2005-01-06 Ngk Insulators, Ltd. Plasma generating electrode and plasma reactor
WO2005000450A1 (en) * 2003-06-27 2005-01-06 Ngk Insulators, Ltd. Apparatus and method of treating exhaust gas
JP2010029831A (en) * 2008-07-31 2010-02-12 Nakamura Sangyo Gakuen Plasma treatment method for powder
JP2010029830A (en) * 2008-07-31 2010-02-12 Nakamura Sangyo Gakuen Plasma treatment device
KR101119494B1 (en) * 2010-03-22 2012-02-28 손종채 Ion sterilizer
CN108046215A (en) * 2017-02-27 2018-05-18 袁野 A kind of novel ozone generates plate

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999047242A1 (en) * 1998-03-18 1999-09-23 Scientific Research Center 'amt' Of Central Research Institute For Materials Method and device for cleaning combustion exhaust gas using a plasma
WO2001019515A1 (en) * 1999-09-09 2001-03-22 Hitachi Zosen Corporation Catalyst with discharge electrode or carrier
WO2004072445A1 (en) * 2003-02-12 2004-08-26 Ngk Insulators, Ltd. Plasma reaction vessel, and method of producing the same
US7727487B2 (en) 2003-02-12 2010-06-01 Ngk Insulators, Ltd. Plasma reaction vessel, and method of producing the same
US7780923B2 (en) 2003-02-12 2010-08-24 Ngk Insulators, Ltd. Plasma reaction vessel, and method of producing the same
WO2005001250A1 (en) * 2003-06-27 2005-01-06 Ngk Insulators, Ltd. Plasma generating electrode and plasma reactor
WO2005000450A1 (en) * 2003-06-27 2005-01-06 Ngk Insulators, Ltd. Apparatus and method of treating exhaust gas
US7700051B2 (en) 2003-06-27 2010-04-20 Ngk Insulators, Ltd. Apparatus and method of treating exhaust gas
JP2010029831A (en) * 2008-07-31 2010-02-12 Nakamura Sangyo Gakuen Plasma treatment method for powder
JP2010029830A (en) * 2008-07-31 2010-02-12 Nakamura Sangyo Gakuen Plasma treatment device
KR101119494B1 (en) * 2010-03-22 2012-02-28 손종채 Ion sterilizer
CN108046215A (en) * 2017-02-27 2018-05-18 袁野 A kind of novel ozone generates plate

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