JPH0755210A - Humidification water supply device - Google Patents

Abstract

(57) [Abstract] [Purpose] It is possible to supply a certain amount of pure water to the evaporator of a humidifier with an inexpensive device without using a mechanical water supply device. [Structure] An inflow tank 1a having an inflow port 3 is arranged above an outflow tank 1b for supplying a small amount of water to a humidifier 9 provided on the lower side, and a partition plate 2 for separating the inflow tank 1a and the outflow tank 1b. Is provided with a plurality of drip members for gravity-dripping the water in the inflow tank 1a, and the outflow tank 1b
In addition, an overflow ditch 5 is provided to keep the water level in the outflow tank 1b constant.

Description

Detailed Description of the Invention

[0001]

The present invention relates to a biofermentor,
A humidifier that is used in a clean room (box), temperature and humidity controlled constant temperature and humidity box, ultra-precision cutting air control device, and other semiconductor wafer manufacturing equipment, and that evaporates pure water or ultrapure water to humidify it. The present invention relates to a humidifying water supply device for supplying pure water as water for use.

[0002]

2. Description of the Related Art A pump or an on-off stop valve is generally used to feed a certain amount of water to a tank or the like.

[0003]

When water is supplied by a pump or an on-off stop valve, the flow rate of water can be easily controlled, but when pure water including ultrapure water is supplied, the pump and the on-off stopper valve are Not suitable. In the case of pure water, unlike ordinary water, it does not contain impurities that have a lubricating effect on the sliding surface of the pump, etc. There is a problem that the durability of the pump and the like is low, and the pure water is contaminated by the wear of these. If you dare to supply water with a pump etc., it will be a large device and the cost will increase, and besides, the tube pump is non-polluting to pure water, but has poor durability and pulsation etc. There is a defect.

In addition, when a heating wire made of metal or the like is brought into direct contact with water, there is a problem in that it may leak to the outside through pure water.

The present invention has been conceived in view of the above, and it is possible to supply a certain amount of pure water to the evaporation section with an inexpensive device without using a mechanical water supply device, and to prevent an electric leakage accident. It is an object of the present invention to provide a humidifying water supply device that does not generate

[0006]

In order to achieve the above object, a humidifying water supply device according to the present invention is provided on an upper side of an outflow tank 1b for supplying a small amount of water to a humidifier 9 provided on a lower side. An inflow tank 1a having an inflow port 3 is arranged, and a plurality of drip members for gravity-dripping the water in the inflow tank 1a are provided on a partition plate 2 between the inflow tank 1a and the outflow tank 1b. 1b is provided with an overflow weir 5 for keeping the water level in the outflow tank 1b constant. In addition, the inflow tank 1a and the outflow tank 1b
Is made of an insulating material, and the inner surface of the outflow tank 1b is subjected to a hydrophobic treatment.

[0007]

[Operation] The water that has flowed into the inflow tank 1a is dropped by gravity into the outflow tank via the dropping member.
Then, the water dropped in the outflow tank 1b is held in a fixed amount by the overflow weir 5. Water is supplied little by little from the inside of the outflow tank 1b to the humidifier arranged below this. At this time, since the inner surface of the outflow tank 1b is hydrophobized, water is not attached here.

[0008]

EXAMPLES Examples of the present invention will be described with reference to the drawings. In the figure, reference numeral 1 denotes a water supply tank, which is electrically constituted by an insulator and is divided into two upper and lower parts by a partition plate 2, the upper side of which is an inflow tank 1a,
The lower side is the outflow tank 1b. An inflow port 3 is provided in the inflow tank 1a, and a float switch 4 for adjusting the water level is internally provided. In the outflow tank 1b,
An overflow dam 5 is provided to keep the water level in the outflow tank 1b constant, and a drain port 6 is provided to drain the water overflowing outside the overflow dam 5.

The partition plate 2 has two upper and lower tanks 1a,
A plurality of communication holes 7 that communicate with 1b are provided. A drip nozzle 8 having an open bottom end is fitted in each of the communication holes 7, and the drip nozzle 8 is made of an insulator and the inner surface thereof is hydrophilic. . The diameter of the holes is 2 mm or less, and the water passing therethrough is dropped into drops. Also, the upper and lower tanks 1
The inner surfaces of a and 1b are hydrophobized.

A humidifier 9 is provided below the outflow tank 1b. In this humidifier 9, a large number of hollow fiber bodies 13 having water permeability are stretched between a bottom plate 10 of an outflow tank 1b and an upper plate 12 of a lower tank 11, and each hollow fiber body 13 is It communicates with the inflow tank 1b and the lower tank 11. The metal thin wires 14 are wound around the respective hollow fiber bodies 13 over the entire length thereof, and the metal thin wires 14 are
It is connected to the power supply 16 via the electrodes 15a and 15b. An air passage 17 is provided between the outflow tank 1b and the lower tank 11.
Therefore, each hollow fiber body 13 is exposed to the wind passing through it.

In the above structure, pure water flows into the inflow tank 1a from the inflow port 3 under natural flow. The inflow amount from the inflow port 3 is controlled by the float switch 4, and the water level in the inflow tank 1a is always within a certain range. The pure water in the inflow tank 1a is dropped into the outflow tank 1b from the dropping nozzle 8 provided in the partition plate 2. The water level in the outflow tank 1b is maintained by the overflow weir 5, and the pure water overflowing from this is discharged from the discharge port 6.

The pure water in the outflow tank 1b is leached on the surface of the hollow fiber 13 of the humidifier 9 while the hollow fiber 13 is flowing down little by little, and is evaporated by the heating of the metal thin wire 14 which is energized.
As a result, the wind passing through the ventilation passage 17 is humidified by the pure water vapor.

In the above operation, the pure water is supplied from the inflow tank 1a to the outflow tank 1b by the dropping nozzle 8 so that the pure water in the outflow tank 1b is kept extremely stationary. . Further, even if the potential of the pure water in the outflow tank 1b is high due to the electric leakage from the heating part of the humidifier 5 due to the water supply to the outflow tank 1b dropping, the electric leakage from the dropping part to the inflow tank 1a side. And the inlet 3 of this inflow tank 1a
There will be no leakage of electricity to the outside through the inflowing pure water. Further, at this time, since the inner surfaces of both the inflow and outflow tanks 1a and 1b are hydrophobic, water does not adhere to the inner surfaces of both tanks 1a and 1b, and leakage of electric current transmitted through these inner surfaces is also prevented. It

The dropping nozzle 8 in the above construction may be made of a rigid material such as plastic, for example, 6-nylon, 66-nylon, polypropylene surface hydrophilized product, or the like, as shown in FIG. It may be 18 or a solid string fibrous material. In addition, all of these have been subjected to a hydrophilic treatment.

In FIG. 3, the dropping member is a dropping nozzle 8 having an inner diameter of 2 mm and the hollow fiber 18 having an outer diameter of 1.9 mm and an inner diameter of 1.0 mm.
In this case, the relationship between the water level in the inflow tank 1a and the water flow rate by dropping is shown. It was found that each water flow rate was changed according to the water level in the inflow tank 1a. FIG. 4 shows the relationship between the amount of electric power for heating the humidifier 9 and the amount of evaporated water.
It was found that the amount of evaporative water changed significantly by changing the amount of water sent to.

In the above embodiment, the humidifier 9 using a hollow fiber is provided below the outflow tank 1b, but one outflow port is provided on the bottom plate of the outflow tank 1b. A more constant amount of water may be supplied to the boiler type humidifier.

[0017]

According to the present invention, a certain amount of pure water can be supplied to the evaporation section of the humidifier 9 by an inexpensive device without using a mechanical water supply device such as a pump.

Further, according to the present invention, in particular, the inflow tank 1a having the inflow port 3 is arranged above the outflow tank 1b for supplying a small amount of water to the humidifier 9 provided on the lower side, and the inflow tank 1a is provided. A plurality of drip members for gravity-dropping the water in the inflow tank 1a are provided on the partition plate 2 with the outflow tank 1b, and the outflow tank 1b is provided with a constant water level in the outflow tank 1b. Since the overflow weir 5 is provided, the inflow tank 1a to the outflow tank 1
Water is supplied to b in the form of drops, and the water that has been supplied too much overflows from the overflow weir 5, so that the water in the outflow tank 1b is held in a stationary state at a fixed amount. The amount of water supplied to the humidifier 9 below the flowing water tank 1b can be kept constant, and the humidifier 9 can maintain high-precision humidity.

In addition, since at least the outflow tank 1b is made of an insulating material and the inner surface of the outflow tank 1b is subjected to a hydrophobic treatment, the water supply to the outflow tank 1b is performed in a drop shape, It is possible to eliminate leakage of electricity that is transmitted from the outflow tank 1b to the inflow tank 1a side.

[Brief description of drawings]

FIG. 1 is a structural explanatory view showing an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing another example of the dropping member.

FIG. 3 is a diagram showing the relationship between the water level of the inflow tank by different drip members and the water supply amount by drip.

FIG. 4 is a diagram showing the relationship between the amount of electric power for heating the humidifier and the amount of evaporated water.

[Explanation of symbols]

1 ... Water supply tank, 1a ... Inflow tank, 1b ... Outflow tank, 2 ... Partition plate, 3 ... Inflow port, 4 ... Float meter,
5 ... Overflow weir, 6 ... Discharge port, 7 ... Communication hole, 8 ... Dripping nozzle, 9 ... Humidifier, 10 ... Bottom plate, 11 ... Lower tank, 12
... Upper plate, 13 ... Hollow fiber body, 14 ... Metal fine wire, 15a, 1
5b ... electrode, 16 ... power supply.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kuro Imaizumi 1200 Manda, Hiratsuka, Kanagawa Prefecture Komatsu Seisakusho Laboratory (72) Inventor Tetsuo Tako, Hiratsuka, Kanagawa 1200 Komatsu Seisakusho Research Institute ( 72) Inventor Toshihiko Matsumoto 1200 Manda, Hiratsuka-shi, Kanagawa Inside Komatsu Seisakusho Co., Ltd. (72) Inventor Genichiro Watanabe 1200 Manda, Hiratsuka-shi, Kanagawa Inside Komatsu Seisakusho Co., Ltd.

Claims (2)

[Claims] 1. An inflow tank 1a having an inflow port 3 is arranged above an outflow tank 1b for supplying a small amount of water to a humidifier 9 provided on the lower side, and the inflow tank 1a and the outflow tank 1 are provided.
a plurality of drip members for gravitationally dropping the water in the inflow tank 1a on the partition plate 2 with b, and the overflow tank for keeping the water level in the outflow tank 1b constant in the outflow tank 1b. 5. A humidifying water supply device, characterized by being provided with 5. 2. The humidifying water supply apparatus according to claim 1, wherein the inflow tank 1a and the outflow tank 1b are made of an insulating material, and the inner surface of the outflow tank 1b is subjected to a hydrophobic treatment.