JPH079331A - Spindle shaft inclination regulating device of grinder and the like - Google Patents

Abstract

PURPOSE:To obtain a highly accurate processing by carrying out a coarse regulation of an adequate nonparallel condition between a spindle head and a work by regulating a fixed regulating mechanism, manually by giving a de sired inclination to a spindle shaft, while setting a normal minute regulation and a minute regulation such as a condition converting during the processing, by using a motive power drive source. CONSTITUTION:Parallel clearances are provided between the upper surface 1a of a base board and the lower surface 2a of a column, and between the side surface 2b of the column and the side surface 3b of a spindle shaft casing, respectively, a recess groove is formed to each parallel clearance, a joint bar having a curved surface and a plain surface is formed, the curved surface is attached to the recess groove so as to project the plain surface into the parallel clearance, and at the same time the plain surface is contacted closely to the opposite surface, a fixed regulating mechanism 9 having a spiral line to fix and regulate the parallel clearance is provided, and the fixed regulating mechanism 9 provided to the upper surface 1a of the base board and the lower surface 2a of the column is connected to a motive power drive source.

Description

Detailed Description of the Invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is directed to the spindle head and the work which are attached to the lower end of a spindle head of a grinding and polishing machine such as various grinding machines, gliding machines, lapping machines and polishing machines. It is a device that adjusts the angle between and.

[0002]

2. Description of the Related Art Conventionally, in this type of apparatus such as a grinder, a spindle head is provided at the lower end of a spindle shaft that rotates and moves up and down by obtaining a drive source from a motor, and is installed on a base below the spindle head. A workpiece such as a semiconductor wafer is held on the upper surface of the chuck of the ground grinding table by vacuum means or the like to rotate itself, and the upper surface of the workpiece is machined with a machined surface such as a cup wheel type diamond grindstone on the lower surface of the spindle head. However, if the machined surface and the top surface of the workpiece are parallel to each other, the resistance during machining will increase depending on the machining conditions, resulting in damage to the machined surface of the work piece or cutting dust caused by machining work during machining. Since fine particle dust such as remains between the machining surface of the spindle head and the workpiece, and the machining surface of the workpiece may have minute scratches,
It was necessary to process while maintaining a slight inclination angle.

[0003]

[Problems to be solved] Therefore, a stud bolt or the like is erected between the side surface of the column of the grinding machine or the like and the side surface of the spindle shaft casing arranged in parallel to loosen or tighten, or The wedge angle was adjusted by adjusting the inclination angle, but if the inclination angle is too large, the flatness of the work will deteriorate, and the work surface on the upper surface of the work and the work surface on the lower surface of the spindle head will be separated. It was a laborious task to set and hold the ideal non-parallel state.

[0004]

SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a spindle shaft with an arbitrary inclination angle when grinding or polishing a work such as a semiconductor wafer, so that the space between the spindle head and the work is appropriately adjusted. For non-parallel state, coarse adjustment can be performed by manually adjusting the fixed adjustment mechanism, and fine adjustment and fine adjustment such as changing conditions during processing can be easily adjusted and set using the power drive source. It was developed to prevent damage or scratches on the work by holding it and to obtain high-precision processing accuracy.

[0005]

The structure of the present invention is a grinder equipped with a base, a column, a spindle shaft casing, a spindle shaft, a spindle head, and a grinding table.
Between the upper surface of the base and the lower surface of the column, and between the side surface of the column and the side surface of the spindle shaft casing, respectively, a parallel void portion is provided, and a concave groove is formed on any one of the surfaces forming the respective parallel void portions,
A joint bar having a curved surface and a flat surface having a shape matching the groove is formed, and the flat surface is projected into the parallel void portion while the curved surface is attached to the groove, and is closely contacted with the opposing surface. , A fixed adjustment mechanism having a screw is arranged at least three places for fixing and adjusting the respective parallel voids, and at least one fixed adjustment mechanism arranged on the upper surface of the base and the lower surface of the column is connected to the power source. It is a configured structure.

[0006]

The function of the present invention is to provide a joint in which a concave groove is formed on any of the surfaces forming the respective parallel voids, and which has a curved surface and a flat surface having a shape matching the inner surface shape of the concave groove. Form a bar, and with the curved surface of the joint bar fitted to the groove, project the flat surface into the parallel voids and bring them into close contact with the opposing surfaces, and fix and adjust each parallel void to at least three places. By arranging the fixed adjustment mechanism having a screw, the screw is roughly adjusted using a tool such as a spanner, and at least one fixed adjustment mechanism provided on the upper surface of the base and the lower surface of the column is a power source. Since it is connected to, it is possible to perform fine adjustment and adjustment and fixing such as changing conditions during processing by driving the power source.

[0007]

Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a side view of a grinding machine embodying the present invention, FIG. 2 is a perspective view of a joint bar, and FIG.
FIG. 4 is an explanatory view of a main part of a joint bar, and FIG. 4 is an explanatory view of a fixing adjustment mechanism connected to a power drive source.

According to the present invention, the spindle head 4 of a grinding and polishing machine such as various grinders, gliding machines, lapping machines, and polish machines is attached to the lower end of the spindle shaft 4 to incline the spindle head 5 and the work. Is a device for adjusting an angle between the base 1, a column 2 standing on the upper surface of the base 1, a spindle shaft casing 3 carried on the side of the column 2, and a spindle shaft. The casing 3 is provided with a spindle shaft 4, a spindle head 5 attached to a lower end of the spindle shaft 4, and a grinding table 6 assembled on the base 1 below the spindle head 5. In a grinder or the like, there are slight parallel gaps A. between the base upper surface 1a and the column lower surface 2a and between the column side surface 2b and the spindle shaft casing side surface 3b. B, each of the parallel voids A. Any of the faces 1a. 2a. 2b. A concave groove 7 having a substantially semicircular cross section is formed in 3b, and a curved surface 8a having a substantially semicircular cross section and a flat surface 8b having a shape matching the inner surface shape of the concave groove 7.
And a curved surface 8a of the joint bar 8 is attached to the groove 7, and a flat surface 8b is formed on the parallel void portion A. A surface which is projected parallel to B and is opposed to a. b in close contact with each of the parallel voids A. Fixing adjustment mechanism having screws at least at three positions for fixing and adjusting B in a parallel state or a non-parallel state 9.
9.9 are arranged, and the base upper surface 1a and the column lower surface 2 are arranged.
At least one fixing adjustment mechanism 9 disposed on the a is connected to the power drive source 9a.

The surface grinder or the like according to the present invention has a base 1 fixed to the floor, a column 2 standing on the base 1,
A spindle shaft casing 3 vertically movably supported on the side of the column 2, a rotatable spindle shaft 4 assembled inside the spindle shaft casing 3, and a work attached to the lower end of the spindle shaft 4. And a grinding table 6 assembled on the base 1 below the spindle head 5 together with a rotatable chuck.

Then, a semiconductor wafer or the like which is a work is held by a chuck provided on the grinding table 6 by a vacuum means or the like, and the chuck is rotated, and at the same time, it is rotated to a spindle shaft 4 by a motor M installed above. A force is applied to transmit the rotational force to the spindle head 5 at the lower end of the spindle shaft 4, and the spindle shaft casing 3 is lowered from above the work to lower the spindle shaft 4 and grind the lower surface of the spindle head 5. The upper surface of the work is ground with a processing surface such as a grindstone.

In the grinding machine, the base 1 upper surface 1 of the base 1
A small parallel gap A is provided in the horizontal direction between a and the column lower surface 2a of the column 2, and the vertical direction is also provided between the column side surface 2b of the column 2 and the spindle shaft casing side surface 3b of the spindle shaft casing 3. Slight parallel void B
And each of the parallel voids A. Any of the faces 1a. 2a. 2b. A groove 7 having a substantially semicircular cross section is formed in 3b, and each groove 7 is formed at a position where the spindle shaft 4 is inclined in the left-right direction shown in FIG. That is, it is formed in a direction orthogonal to the spindle shaft 4.

Any one of the surfaces 1a. 2a. 2b. The joint bar 8 to be fitted to the concave groove 7 formed in 3b may have a curved surface 8a having a semi-circular cross-section of a semi-cylindrical shape having a length and one surface formed into a flat surface 8b. In the illustrated embodiment, it is formed in the parallel void portion A between the upper surface 1a of the base and the lower surface 2a of the column, and the concave groove 7 for attaching the curved surface 8a of the joint bar 8 is formed in the upper surface 1a of the base. The curved surface 8a of the joint bar 8 is attached to the groove 7, and the joint bar fixing screw hole 10 is formed to fix the joint bar 8 to the opposite column lower surface 2a. A stud bolt 11 having a short cylindrical head portion 11a is screwed into the joint bar fixing screw hole 10, while a circular hole 8c is formed at the center of the joint bar 8 in the longitudinal direction. The stud bolt 1 is inserted into the circular hole 8c. The short cylindrical head portion 11a of the stud bolt 11 is inserted through the short cylindrical head portion 11a of the stud bolt 11 so that the joint bar 8 can be moved laterally about the stud bolt 11. And
That is, it serves as a pivotal fulcrum for the lateral movement of the joint bar 8.

As shown in FIG. 2, a fixed adjustment mechanism 9 having a screw thread, which will be described later, is movably inserted through the circular hole 8c of the joint bar 8 at equal intervals. Mechanism circular hole 8d. 8d has a hole 8d for fixing and adjusting mechanism and is provided in the joint bar 8.
d. A fixing adjustment mechanism screw hole 12 into which the fixing adjustment mechanism 9 is screwed is formed in the base upper surface 1a at a position matching 8d, and a column at a position matching the fixing adjustment mechanism screw hole 12 is formed. A through hole 2c is formed in the lower surface 2a, and the fixing adjustment mechanism 9 has a bulged nut-shaped head 9c.
A stud bolt 9b having a cylindrical portion 9d penetrating the body 2 through the through hole 2c and a thread 9e below.

Then, the spindle shaft casing 3 is carried in a slight parallel gap B provided vertically between the column side face 2b of the column 2 and the spindle shaft casing side face 3b of the spindle shaft casing 3, and the parallel gap is formed. A fixing adjustment mechanism screw hole 12 for screwing the fixing adjustment mechanism 9 for inclining the portion is formed, but if there are at least three fixing adjustment mechanism screw holes 12 for screwing the fixing adjustment mechanism 9, they are carried. And it is possible to adjust, but it may be four or more places,
Upper surface 1a of the base 1 and lower surface 2a of the column 2
The column can be erected and adjusted if there are at least three fixing adjustment mechanisms 9 arranged in a slight parallel gap A horizontally provided between the column and the column, but there are four or more. It doesn't matter.

The parallel gap B between the column side surface 2b of the column 2 and the spindle shaft casing side surface 3b of the spindle shaft casing 3 needs to support the spindle shaft casing side surface 3b at the column side surface 2a, and the spindle shaft is directed upward. Fixing adjustment mechanism 9 that supports the casing side surface 3b
In the embodiment shown in FIG. 4, the screw hole 12 for the fixing adjustment mechanism is screwed into the column side surface 2b on the upper side, and the spindle shaft casing side surface 3b matching the screw hole 12 for the fixing adjustment mechanism is provided. A through hole is formed in the same manner as described above, and a stud bolt 9b around which a load supporting member serving as a carrying and fixing adjustment mechanism 9 is provided is passed through the through hole and screwed into a fixing adjustment mechanism screw hole 12. is there.

In order to pivot the column 2 into the parallel gap A between the upper surface 1a of the base 1 and the lower surface 2a of the column 2, the fixing of the two places arranged on the joint bar 8 is performed. In addition to the adjusting mechanism 9.9, at least one fixed adjusting mechanism 9 is provided in the parallel space A, but the stud bolt 9b of the fixed adjusting mechanism 9 is provided with a spring washer 9 '. It allows for some pivoting.

In the embodiment of the present invention, the fixing adjusting mechanism 9 is provided on the joint bar 8, but the position where the fixing adjusting mechanism 9 is provided is not limited to the embodiment and can be provided. The curved surface 8a of the joint bar 8 and any one of the surfaces 1a. 2a. 2b. This is because the pivot base point is formed by the concave groove 7 having a substantially semicircular cross-section formed in 3b, and the parallel void B provided between the column side surface 2b and the spindle shaft casing side surface 3b has a spanner or the like. The screw of the fixing adjustment mechanism 9.9.9 disposed at at least three places is rotated by a tool to perform fixed adjustment in a parallel state or a non-parallel state.

The adjustment of the parallel void portion A formed between the upper surface 1a of the base and the lower surface 2a of the column is performed by fixing the adjusting mechanism at least one of the fixing adjusting mechanisms 9.9.9 arranged at at least three places. The screw 9 is connected to a power source 9a such as a motor or air, and the screw is rotated by power to adjust and fix it in a parallel or non-parallel tilt.

Although the embodiment of the present invention has been described above by taking a grinding machine as an example, it can be applied to a lapping machine, a polishing machine, a filing riding machine or the like having the same structure as the spindle shaft 4.

[0021]

INDUSTRIAL APPLICABILITY The present invention uses a tool such as a spanner to rotate and loosen or tighten the head of the bolt of the fixing and adjusting mechanism for the parallel gap between the side surface of the column and the side surface of the spindle shaft casing. , Tilting the spindle axis with respect to the column for coarse adjustment, and in addition, fine adjustment,
Adjustment during processing is performed by connecting the bolts of at least one fixed adjustment mechanism of the fixed adjustment mechanism of the parallel gap between the lower surface of the column and the upper surface of the base to the power drive source. The base and column can be tilted,
It can be tilted with an electrically connected controller, and the machined surface of the lower surface of the spindle head and the machined surface of the upper surface of the workpiece can be set slightly non-parallel, and damage to the workpiece due to resistance during machining, Alternatively, it is possible to prevent minute scratches, remote control is possible by connecting to a power source, and inclination can be adjusted without stopping the grinder or the like.

[0021]

[Brief description of drawings]

FIG. 1 is a side view of a grinding machine embodying the present invention.

FIG. 2 is a perspective view of a joint bar.

FIG. 3 is an explanatory view of a main part of a joint bar.

FIG. 4 is an explanatory diagram of a fixing adjustment mechanism connected to a power drive source.

[Explanation of symbols]

A parallel gap between the upper surface of the base and the lower surface of the column B parallel gap between the side surface of the column and the side surface of the spindle shaft casing 1 base 1a upper surface of the base 2 column 2a lower surface of the column 2b column side surface 2c through hole 3 spindle shaft casing 3b Spindle shaft Casing side surface 4 Spindle shaft 5 Spindle head 6 Grinding table 7 Recessed groove 8 Joint bar 8a Curved surface 8b Flat surface 8c Circular hole 8d Fixed adjustment mechanism circular hole 9 Fixed adjustment mechanism 9a Power drive source 9b Stud bolt 9c Head 9d Column part 9e Screw thread 9'Spring washer 10 Joint bar fixing screw hole 11 Stud bolt 11a Short cylindrical head 12 Screw hole for fixing adjustment mechanism

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] March 25, 1994

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Brief description of the drawing

[Correction method] Change

[Correction content]

[Brief description of drawings]

FIG. 1 is a side view of a grinding machine embodying the present invention.

FIG. 2 is a perspective view of a joint bar.

FIG. 3 is an explanatory view of a main part of a joint bar.

FIG. 4 is an explanatory view of a fixing adjustment mechanism connected to a power drive source.

Claims (1)

[Claims] 1. A base, a column erected on an upper surface of the base, a spindle shaft casing carried on a side of the column, a spindle shaft assembled to the spindle shaft casing, In a grinder or the like provided with a spindle head attached to the lower end of a spindle shaft and a grinding table assembled to the base below the spindle head, between the upper surface of the base and the lower surface of the column, and A small number of parallel gaps are provided between the column side face and the spindle shaft casing side face, and a concave groove having a substantially semicircular cross section is formed on any of the faces forming the respective parallel gap portions. A kamaboko-shaped joint bar having a curved surface having a substantially semicircular cross section and a flat surface having a shape matching the inner surface shape of the groove is formed, and the curved surface of the joint bar is attached to the groove. Flat surface is the parallel void The fixing adjustment mechanism having screw threads at least at three positions for fixing and adjusting the respective parallel void portions in the parallel state or in the non-parallel state by projecting them in parallel with each other and closely contacting the opposite surfaces with each other. A spindle shaft inclination adjusting device for a grinding machine or the like, wherein at least one fixing adjusting mechanism provided on the upper surface and the column lower surface is connected to a power source. [0001]